KR102238909B9 - 기판 반송 로봇의 승강부 프레임 - Google Patents
기판 반송 로봇의 승강부 프레임Info
- Publication number
- KR102238909B9 KR102238909B9 KR20150049626A KR20150049626A KR102238909B9 KR 102238909 B9 KR102238909 B9 KR 102238909B9 KR 20150049626 A KR20150049626 A KR 20150049626A KR 20150049626 A KR20150049626 A KR 20150049626A KR 102238909 B9 KR102238909 B9 KR 102238909B9
- Authority
- KR
- South Korea
- Prior art keywords
- lifting frame
- transfer robot
- wafer transfer
- wafer
- robot
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150049626A KR102238909B1 (ko) | 2015-04-08 | 2015-04-08 | 기판 반송 로봇의 승강부 프레임 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150049626A KR102238909B1 (ko) | 2015-04-08 | 2015-04-08 | 기판 반송 로봇의 승강부 프레임 |
Publications (3)
Publication Number | Publication Date |
---|---|
KR20160120834A KR20160120834A (ko) | 2016-10-19 |
KR102238909B1 KR102238909B1 (ko) | 2021-04-12 |
KR102238909B9 true KR102238909B9 (ko) | 2021-10-27 |
Family
ID=57250583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150049626A KR102238909B1 (ko) | 2015-04-08 | 2015-04-08 | 기판 반송 로봇의 승강부 프레임 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR102238909B1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110371669A (zh) * | 2019-06-28 | 2019-10-25 | 上海提牛机电设备有限公司 | 一种上下晶圆框架盒移动机构与晶圆送料系统 |
KR102613948B1 (ko) | 2023-06-12 | 2023-12-14 | (주)대화정공 | 사출물 취출 로봇의 메인 프레임 구조체 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101115332B1 (ko) * | 2011-06-01 | 2012-03-06 | 정재은 | 알루미늄 프로파일의 연결구 |
KR101460761B1 (ko) * | 2013-03-27 | 2014-11-11 | 현대중공업 주식회사 | 반송로봇용 승강축부재 및 그 제조방법 |
-
2015
- 2015-04-08 KR KR1020150049626A patent/KR102238909B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20160120834A (ko) | 2016-10-19 |
KR102238909B1 (ko) | 2021-04-12 |
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