KR102238909B9 - 기판 반송 로봇의 승강부 프레임 - Google Patents

기판 반송 로봇의 승강부 프레임

Info

Publication number
KR102238909B9
KR102238909B9 KR20150049626A KR20150049626A KR102238909B9 KR 102238909 B9 KR102238909 B9 KR 102238909B9 KR 20150049626 A KR20150049626 A KR 20150049626A KR 20150049626 A KR20150049626 A KR 20150049626A KR 102238909 B9 KR102238909 B9 KR 102238909B9
Authority
KR
South Korea
Prior art keywords
lifting frame
transfer robot
wafer transfer
wafer
robot
Prior art date
Application number
KR20150049626A
Other languages
English (en)
Other versions
KR20160120834A (ko
KR102238909B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020150049626A priority Critical patent/KR102238909B1/ko
Publication of KR20160120834A publication Critical patent/KR20160120834A/ko
Application granted granted Critical
Publication of KR102238909B1 publication Critical patent/KR102238909B1/ko
Publication of KR102238909B9 publication Critical patent/KR102238909B9/ko

Links

KR1020150049626A 2015-04-08 2015-04-08 기판 반송 로봇의 승강부 프레임 KR102238909B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150049626A KR102238909B1 (ko) 2015-04-08 2015-04-08 기판 반송 로봇의 승강부 프레임

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150049626A KR102238909B1 (ko) 2015-04-08 2015-04-08 기판 반송 로봇의 승강부 프레임

Publications (3)

Publication Number Publication Date
KR20160120834A KR20160120834A (ko) 2016-10-19
KR102238909B1 KR102238909B1 (ko) 2021-04-12
KR102238909B9 true KR102238909B9 (ko) 2021-10-27

Family

ID=57250583

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150049626A KR102238909B1 (ko) 2015-04-08 2015-04-08 기판 반송 로봇의 승강부 프레임

Country Status (1)

Country Link
KR (1) KR102238909B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110371669A (zh) * 2019-06-28 2019-10-25 上海提牛机电设备有限公司 一种上下晶圆框架盒移动机构与晶圆送料系统
KR102613948B1 (ko) 2023-06-12 2023-12-14 (주)대화정공 사출물 취출 로봇의 메인 프레임 구조체

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101115332B1 (ko) * 2011-06-01 2012-03-06 정재은 알루미늄 프로파일의 연결구
KR101460761B1 (ko) * 2013-03-27 2014-11-11 현대중공업 주식회사 반송로봇용 승강축부재 및 그 제조방법

Also Published As

Publication number Publication date
KR20160120834A (ko) 2016-10-19
KR102238909B1 (ko) 2021-04-12

Similar Documents

Publication Publication Date Title
SG10202013250YA (en) Method for transfer of semiconductor devices
GB2541987B (en) Drive mechanisms for robot arms
GB201820152D0 (en) Autonomous-behaviour-type robot
GB2523788B (en) Method of fabrication of CMOS-based Semiconductor Devices comprising CMOS-incompatible metals
AU201615901S (en) Robot
SG10201509657RA (en) Wafer processing method
SG10201505185XA (en) Wafer processing method
SG10201504351YA (en) Wafer processing method
SG10201508278VA (en) Wafer processing method
IL249505A0 (en) End effector of a substrate transfer robot
GB2541985B (en) Drive arrangements for robot arms
PL3047783T3 (pl) Robot-odkurzacz
SG10201506936WA (en) Wafer processing method
SG10201505459WA (en) Wafer processing method
SG11201703889XA (en) Robot
SG10201503911VA (en) Wafer processing method
SG10201504089SA (en) Wafer processing method
EP2950981A4 (en) ROBOT
EP3120583A4 (en) Method of call forwarding between devices
SG10201509978VA (en) Wafer processing method
SG10201509610XA (en) Wafer processing method
SG11201710209RA (en) Care robot
TWI562220B (en) Manufacturing method of semiconductor structure
SG11201802364XA (en) Robot arm
KR102238909B9 (ko) 기판 반송 로봇의 승강부 프레임

Legal Events

Date Code Title Description
N231 Notification of change of applicant
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Publication of correction