KR102180113B9 - 두께 측정 장치 - Google Patents

두께 측정 장치

Info

Publication number
KR102180113B9
KR102180113B9 KR1020190050660A KR20190050660A KR102180113B9 KR 102180113 B9 KR102180113 B9 KR 102180113B9 KR 1020190050660 A KR1020190050660 A KR 1020190050660A KR 20190050660 A KR20190050660 A KR 20190050660A KR 102180113 B9 KR102180113 B9 KR 102180113B9
Authority
KR
South Korea
Prior art keywords
measuring device
thickness measuring
thickness
measuring
Prior art date
Application number
KR1020190050660A
Other languages
English (en)
Other versions
KR102180113B1 (ko
KR20200127098A (ko
Inventor
김학성
박동운
오경환
김헌수
Original Assignee
한양대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한양대학교 산학협력단 filed Critical 한양대학교 산학협력단
Priority to KR1020190050660A priority Critical patent/KR102180113B1/ko
Priority to PCT/KR2020/005265 priority patent/WO2020222454A1/ko
Priority to US17/607,952 priority patent/US12055378B2/en
Publication of KR20200127098A publication Critical patent/KR20200127098A/ko
Application granted granted Critical
Publication of KR102180113B1 publication Critical patent/KR102180113B1/ko
Publication of KR102180113B9 publication Critical patent/KR102180113B9/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
    • G01D1/12—Measuring arrangements giving results other than momentary value of variable, of general application giving a maximum or minimum of a value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
    • G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
KR1020190050660A 2019-04-30 2019-04-30 두께 측정 장치 KR102180113B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020190050660A KR102180113B1 (ko) 2019-04-30 2019-04-30 두께 측정 장치
PCT/KR2020/005265 WO2020222454A1 (ko) 2019-04-30 2020-04-21 두께 측정 장치
US17/607,952 US12055378B2 (en) 2019-04-30 2020-04-21 Thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190050660A KR102180113B1 (ko) 2019-04-30 2019-04-30 두께 측정 장치

Publications (3)

Publication Number Publication Date
KR20200127098A KR20200127098A (ko) 2020-11-10
KR102180113B1 KR102180113B1 (ko) 2020-11-18
KR102180113B9 true KR102180113B9 (ko) 2022-04-11

Family

ID=73028935

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190050660A KR102180113B1 (ko) 2019-04-30 2019-04-30 두께 측정 장치

Country Status (3)

Country Link
US (1) US12055378B2 (ko)
KR (1) KR102180113B1 (ko)
WO (1) WO2020222454A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114396861B (zh) * 2022-01-26 2024-09-06 北京海创高科科技有限公司 一种双通道钢筋混凝土钢筋结构扫描仪及扫描方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5408308A (en) 1993-01-29 1995-04-18 Corning Incorporated Method for monitoring hermetically-coated fibers
US6950196B2 (en) * 2000-09-20 2005-09-27 Kla-Tencor Technologies Corp. Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen
JP4392463B2 (ja) * 2002-12-13 2010-01-06 日本鉄塔工業株式会社 膜厚測定方法
US7815862B2 (en) 2003-03-14 2010-10-19 Alliance For Sustainable Energy, Llc Wafer characteristics via reflectometry
RS20060577A (en) * 2006-10-19 2009-05-06 U.S. Music Corporation, Method for signal period measuring with adaptive triggers
US20120170021A1 (en) 2008-09-02 2012-07-05 Phillip Walsh Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sample
JP5419411B2 (ja) 2008-10-08 2014-02-19 キヤノン株式会社 テラヘルツ波発生素子
JP5477275B2 (ja) 2010-02-26 2014-04-23 アイシン精機株式会社 塗装膜の検査装置および検査方法
JP6300430B2 (ja) * 2012-03-28 2018-03-28 国立大学法人千葉大学 膜厚測定方法および膜厚測定装置
US9658155B2 (en) 2012-12-17 2017-05-23 Patrick K Brady System and method for identifying materials using a THz spectral fingerprint in a media with high water content
GB201514637D0 (en) * 2015-08-18 2015-09-30 Univ Surrey Method and apparatus for determining a repeat period in periodic data
JP6589239B2 (ja) * 2015-09-25 2019-10-16 株式会社Ｓｃｒｅｅｎホールディングス 膜厚測定装置及び膜厚測定方法
KR101788450B1 (ko) * 2016-03-17 2017-10-19 연세대학교 산학협력단 테라헤르츠파를 이용한 투명 박막의 두께를 측정하는 장치 및 그 측정 방법
KR102350650B1 (ko) * 2017-03-30 2022-01-12 한양대학교 산학협력단 두께 측정 장치, 두께 측정 방법 및 두께 측정 프로그램

Also Published As

Publication number Publication date
KR102180113B1 (ko) 2020-11-18
US20220316860A1 (en) 2022-10-06
WO2020222454A1 (ko) 2020-11-05
KR20200127098A (ko) 2020-11-10
US12055378B2 (en) 2024-08-06

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Legal Events

Date Code Title Description
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]