KR102129365B1 - Coating apparatus - Google Patents

Abstract

The present invention relates to a liquid composition coating device for a complex dielectric. According to the present invention, the liquid composition coating device for a complex dielectric comprises: a lower support on which an insulating substrate is mounted; an upper support arranged on an upper side of the lower support; an injection unit installed on the upper support; and a cover unit. According to the present invention, a circuit board having excellent quality can be manufactured.

Description

Liquid composition coating device for composite dielectrics {COATING APPARATUS}

The present invention provides a liquid composition coating device for a composite dielectric to prevent the flow of the insulating substrate when a liquid composition for a composite dielectric for an embedded electronic device of a circuit board is applied on a ground electrode of the insulating substrate. It is about technology.

With the progress of the information society, there is an increasing demand for high-speed information transmission and high-frequency information signals. To cope with this, high-functionality and high-density mounting of circuit boards used in electronic products is desired, and to solve this problem, EPD (Embedded Passive Device Technology), a technology that makes electronic devices such as resistive capacitor inductors and antennas into circuit boards, is required. It is attracting attention.

As such a technology, the Republic of Korea Patent Registration No. 10-0923542 (October 19, 2009, hereinafter referred to as'document 1') "Embedded semiconductor package device using release material and its manufacturing method" has been proposed,

Literature 1 is an insulator substrate having a predetermined pattern of wiring circuits, a semiconductor chip embedded in the insulator substrate with at least a portion of its outer surface surrounded by a release material cover, and a bump for electrically connecting the semiconductor chip and the wiring circuit By including, the semiconductor chip is embedded in an insulator substrate in a state surrounded by a release material cover, and is a technology for an embedded semiconductor package device and a manufacturing method using the release material that can provide an easily recyclable embedded semiconductor package device.

As another technique, the Republic of Korea Patent Registration No. 10-1075645 (October 14, 2011, hereinafter referred to as'document 2') "Embedded circuit board manufacturing method" is presented,

Document 2 includes preparing an electrical element having an external electrode terminal, forming a protective film covering the external electrode terminal so that the external electrode terminal is unexposed, and having a chip mounting cavity having upper and lower surfaces opposite to the front and front surfaces. Preparing a circuit board, attaching a release film to the front of the circuit board so that the open top of the chip mounting cavity is sealed, placing an electrical element within the chip mounting cavity so that the protective film is in close contact with the release film, chip mounting cavity Forming an insulating film covering the rear surface of the circuit board while filling the free space of the chip mounting cavity through the open bottom of the step, separating the release film from the circuit board, removing the protective film to expose the external electrode terminal, and A method of manufacturing an embedded circuit board capable of preventing electrical connection defects between an electrical element and a circuit pattern in the process of manufacturing a substrate by including forming a metal circuit structure electrically connected to an external electrode terminal on the circuit board. Technology.

As another technique, Korean Patent Registration No. 10-1602318 (Registration on March 4, 2016, hereinafter referred to as'document 3'), "A method for manufacturing an embedded flexible circuit board using ACF" is presented.

Literature 3 shows that through-holes are formed in the circuit pattern to be electrically connected to the flip-chip terminal pad before mounting the flip-chip, and then the flip-chip is contacted and fixed to the substrate with ACF, and then a multi-layered protective layer such as a carrier film or other substrate is stacked. The entire upper surface of the substrate is protected by external insulation, and then hot pressed to make ACF heat-curing contact and electrical connection between the flip pad terminal pad and the circuit pattern with the ACF, and then through the through-hole to the flip pad terminal pad. As a method of electrically connecting with copper, a copper hole is coated with chemical copper plating to form a via hole that connects the heat-cured ACF to the inner wall, and the plating of the via hole and plating the lower surface of the substrate are completed by electroplating to complete the mounting of the flip-chip circuit board. After that, it consists of a sequential step process to complete the manufacture of embedded flexible circuit board products as a process of forming the circuit pattern on the lower surface of the substrate, and then uses the FPCB via-hole and ACF in combination to electrically connect with flip chip attachment. It is a technology for a method of manufacturing an embedded flexible circuit board using ACF that can achieve the process simplification and reliability improvement of the embedded FPCB by enabling the user to perform the process.

Literature 1. Republic of Korea Patent Registration No. 10-0923542 (October 19, 2009 registration) Document 2. Republic of Korea Patent Registration No. 10-1075645 (Registration on October 14, 2011) Document 3. Republic of Korea Patent Registration No. 10-1602318 (Registration on March 4, 2016)

The present invention is a circuit board consisting of a ground electrode formed on an insulating substrate, a composite dielectric thin film formed by applying a liquid composition for a composite dielectric on the ground electrode, and a wiring layer formed on or inside the thin film. When applying the liquid composition for a composite dielectric on the ground electrode, the insulating substrate is blocked from the outside and prevents flow, so that the composition is applied in a clean state, and also prevents the flow of the insulating substrate by spraying a certain amount of the composition. It is an object of the present invention to provide a liquid composition coating device for a composite dielectric.

Furthermore, an object of the present invention is to provide a liquid composition coating device for a composite dielectric that allows the composition to be automatically recharged by an amount sprayed after spraying a predetermined amount of the composition.

In order to solve the above problems, the liquid composition coating device for a composite dielectric according to the present invention,

The ground electrode is formed on a circuit board consisting of a ground electrode formed on an insulating substrate, a thin film of a composite dielectric formed by applying a liquid composition for a composite dielectric on the ground electrode, and a wiring layer formed on or inside the thin film. In order to apply a liquid composition for a composite dielectric,

A lower support on which the insulating substrate is seated;

An upper support disposed on an upper side of the lower support and descending;

The liquid composition for a composite dielectric, which is installed on the upper support, is filled with a liquid for pressure generation on the upper side and filled with a liquid composition for a composite dielectric on the lower side, and the liquid composition for a composite dielectric pushed by pressure due to expansion of the liquid for pressure generation is grounded on the insulating substrate. An injection unit formed of a structure injected on the electrode; And

Includes a cover unit that descends with the injection unit when the upper support is lowered and blocks the insulating substrate from the outside when the liquid composition for a composite dielectric is sprayed by the injection unit.

The injection unit has a cylindrical shape by a pressure partition wall surrounding the side surface, and an upper housing having a light-transmitting lens in an upper side sealing area, and a liquid partition wall surrounding the side surface and an extension from the pressure partition wall to form an injection passage for a liquid composition for a composite dielectric It includes a spray nozzle disposed on the lower side, the upper housing and the lower housing formed to be connected or extended to each other, and provided between the upper housing and the lower housing space filled with the liquid for pressure generation on the upper housing side, the The lower housing side partitions the space filled with the liquid composition for a composite dielectric, and includes a compartment for transferring pressure applied to the space filled with the liquid for pressure generation to the space filled with the liquid composition for a composite dielectric,

The lower support is a base, a jig disposed in the upper central region of the base and on which the insulating substrate is seated, two or more posts erected at both ends of the upper side of the base, and a fixed plate interconnecting the tops of each post, It is provided to be accommodated in the base but includes a suction motor connected to the jig through a suction pipe to fix the insulating substrate by suction, and a control unit to control the suction degree of the suction motor by a control signal,

The upper support is spaced apart from the lower support on the upper side of the jig and has an upper bracket having a lower opening-type receiving space therein, a support plate accommodated at the receiving space of the upper bracket and supported at both ends of the receiving space. And a distance measuring sensor that irradiates a laser downward on the outer surface of the upper bracket, and measures the reflection time of the irradiated laser so that the elevation distance of the upper bracket can be controlled by the control unit.

The liquid composition coating device for a composite dielectric according to the present invention,

It is possible to spray and apply a certain amount of the liquid composition for a composite dielectric, and to allow the liquid composition for a composite dielectric to be automatically recharged after being sprayed. As the process is performed in a clean state by blocking the insulating substrate from the outside during the application process It has the greatest effect of manufacturing a high-quality circuit board.

1 is a front configuration diagram showing a liquid composition coating device for a composite dielectric according to the present invention,
Figure 2 is a cross-sectional configuration for showing the injection unit and the cover unit,
Figure 3 is a plan configuration of the backflow prevention valve,
Figure 4 is a cross-sectional configuration for showing the descending injection unit and cover unit,
Figure 5 is a partial cross-sectional configuration of a use state for showing the movement of the liquid composition for the composite dielectric according to the pressure transmission flow and the rod and the cover member connected thereto,
Figure 6 is a partial cross-sectional configuration for showing the guide of the cover unit,
7 and 8 is a partial cross-sectional configuration of the use state for showing that the guide of the cover unit is operated by the displacement means.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to ordinary or lexical meanings, and the inventor appropriately explains the concept of terms to explain his or her invention in the best way. Based on the principle that it can be defined, it should be interpreted as meanings and concepts consistent with the technical spirit of the present invention. Therefore, the embodiments shown in the embodiments and the drawings described in this specification are only the most preferred embodiments of the present invention and do not represent all of the technical spirit of the present invention, and various equivalents that can replace them at the time of this application It should be understood that there may be water and variations.

Based on FIG. 1, the direction of the lower supporter side is specified as lower or lower, and the upper supporter side is designated as upper or upper.

In the present invention, a liquid composition for an organic-inorganic composite dielectric having excellent dispersibility of an inorganic dielectric with respect to an organic polymer and exhibiting a high dielectric constant in the case of an organic-inorganic composite dielectric,

It contains inorganic dielectrics and fluorinated aromatic polymers.

When a fluorinated aromatic polymer is used as the organic polymer, the fluorinated aromatic polymer has excellent dispersibility of the inorganic dielectric, so that the inorganic dielectric can be highly incorporated into the composition, thereby obtaining a high dielectric constant as a composite dielectric.

The composite dielectric formed of the liquid composition for composite dielectrics is preferable for use as an electronic device such as a capacitor constituting an electric circuit board among applications where the composite dielectric is used.

Further, in order to obtain a high dielectric constant composite dielectric, it is preferable that the inorganic dielectric is in the range of 100 to 2,000 parts by mass relative to 100 parts by mass of the fluorinated aromatic polymer.

The present invention also includes a composite dielectric made using a liquid composition for a composite dielectric or an electric circuit board including the composite dielectric as a constituent part.

At this time, the composite dielectric means that the liquid composition in which the inorganic dielectric is dispersed is molded into a predetermined shape, and represents a molded body and a molded film in which the inorganic dielectric is highly dispersed in an organic polymer.

For a liquid composition for an organic-inorganic composite dielectric that disperses an inorganic dielectric in an organic polymer, the amount of the inorganic dielectric in the composition can be increased by containing a fluorinated aromatic polymer as a glass polymer, and the dielectric constant in the high-frequency region of the composite dielectric can be significantly improved. Can.

The content of the inorganic dielectric and the fluorinated aromatic polymer in the liquid composition for a composite dielectric of the present invention,

It is preferable that the inorganic dielectric is within the range of 100 to 2,000 parts by mass relative to 100 parts by mass of the fluorinated aromatic polymer.

When the content of the inorganic dielectric is less than 100 parts by mass, the dielectric constant of the composite dielectric made of the liquid composition may be lowered, and when the content of the inorganic dielectric exceeds 2,000 parts by mass, the viscosity of the composition may increase and the handleability may decrease.

As a result, a more preferable lower limit of the inorganic dielectric content is most preferably an inorganic dielectric of 500 parts by mass or 700 parts by mass or more with respect to 100 parts by mass of the fluorinated aromatic polymer. Further, the more preferable condition of the inorganic dielectric content is most preferably 1,500 parts by mass or 1,000 parts by mass or less with respect to 100 parts by mass of the fluorinated aromatic polymer.

The fluorinated aromatic polymer of the present invention is a repeating unit comprising an aromatic ring having at least one fluorine group and at least one bond selected from the group of ether bonds, ketone bonds, sulfone bonds, amide bonds, imide bonds, and ester bonds. It is a polymer composed of, and examples thereof include polyimide, polyether, polyetherimide, polyether ketone, polyether sulfone, polyamide ether, polyamide, polyethernitrile, and polyester having fluorine atoms.

It is preferable that the fluorinated aromatic polymer of the present invention is a polyester having a fluorine atom. This is appropriately suppressed the interaction with the inorganic dielectric, a phenomenon that interferes with the production of a liquid composition for a composite dielectric, that is, a significant increase in viscosity, gelation, loss of fluidity, aggregation, etc. are reduced. As a result, since a liquid composition for a composite dielectric compounded with more inorganic dielectrics can be produced, it is possible to form a composite dielectric in a thin film shape because it can not only exhibit a higher dielectric constant as the composite dielectric, but also lower the viscosity.

As the method for synthesizing the fluorinated aromatic polymer of the present invention, general polymerization reactions such as condensation polymerization, addition polymerization, solution polymerization, suspension polymerization, and emulsion polymerization are used.

And, as the organic solvent used in the synthesis method, a polar solvent such as N-methyl-2-pyrrolidone (NMP), N,N-dimethylacetamide or methanol, or an aromatic solvent such as toluene is selected. Potassium carbonate, lithium carbonate, potassium hydroxide, etc. are selected as the basic compound used in.

In addition, in the synthesis method, a fluorinated aromatic polymer is obtained by removing the solvent from the reaction solution after completion of the reaction and washing the distillate if necessary. Alternatively, the reaction solution may be obtained by adding the fluorinated aromatic polymer to a solvent having low solubility to precipitate the polymer to separate the precipitate by filtration.

The inorganic dielectric of the present invention may be formed in a shape of particles, fibers, scales, cones, and the like.

The average particle diameter of the inorganic dielectric is appropriately selected in consideration of the thickness of the composite dielectric made of a liquid composition, but when used as a thin film, it is preferably within the range of 0.01 to 10 µm, but most preferably within the range of 0.5 to 3 µm. Do.

Further, the specific surface area per volume of the inorganic dielectric is preferably in the range of 1 m 2 /g to 10 m 2 /g, but most preferably in the range of 2 m 2 /g to 5 m 2 /g.

In the liquid composition for a composite dielectric of the present invention, a solvent may be blended for the purpose of improving moldability or film-forming properties and controlling viscosity. Examples of the solvent include toluene, xylene, nitrobenzene, and benzonitrile. Aromatic solvents, acetone, methyl ethyl ketone, cyclohexanone, cyclopentanone, and ketone solvents such as isobutyl ketone, methanol, ethanol, N-methyl-2-pyrrolidone (NMP), N,N-dimethylacet Amide, acetonitrile and the like can be selected.

The liquid composition for a composite dielectric of the present invention may contain other compounds or subsidiary materials as necessary, and other compounds or subsidiary materials include resins such as polyamide resins, polyamideimide resins, epoxy resins, phenol resins, fluorine resins, and silica. , Inorganic fillers such as alumina, aluminum hydroxide, glass, graphite, silane coupling agents, titanium coupling agents, flame retardants, antioxidants, plasticizers, leveling agents, anti-fogging agents, dispersants, and the like.

The molding method of the composite dielectric made using the liquid composition for a composite dielectric of the present invention is appropriately selected depending on the shape of the desired composite dielectric.

For example, when a composite dielectric is used as a thin layer (thin film), a liquid composition is cast on a film, substrate, or metal foil, such as dipping coat, spin coat, roll coat, spray coat, bar coat, screen print, flexo print, etc. After coating by a method to form a coating film, the solvent is dried to form a thin layer.

Examples of such composite dielectric applications and functions include bypass capacitors, charging elements, differential elements, terminal load elements, filters, antennas, and noise cuts.

The electric circuit board 1 comprising the composite dielectric of the present invention as a constituent part forms a ground electrode on an insulating substrate, forms a thin film of composite dielectric on the ground electrode, and then again forms a wiring layer on the surface or inside of the thin film. It can be produced by disposing.

Further, the composite dielectric of the present invention can be produced by applying to a conductive material such as a metal foil, or in close contact with a conductive material, or sandwiching it with a conductive material.

At this time, the circuit board (1) consisting of a ground electrode formed on an insulating substrate, a composite dielectric thin film formed by applying a liquid composition for a composite dielectric on the ground electrode, and a wiring layer formed on or inside the thin film In order to apply the liquid composition for a composite dielectric on the ground electrode, the liquid composition coating apparatus for a composite dielectric according to the present invention,

It is largely composed of a lower support 10, an upper support 20, an injection unit 30 and a cover unit 40.

Looking at each configuration,

The lower support 10

As shown in Figure 1,

Base (11),

The jig 12 is disposed in the upper central region of the base 11 and the insulating substrate is seated and supported.

Two or more posts (13) erected on both ends of the upper side of the base (11),

A fixed plate (14) interconnecting the top of each post (13),

A suction motor 16 provided to be accommodated inside the base 11 and connected to the jig 12 through a suction pipe 17 to fix the insulating substrate by adsorption, and

It comprises a control unit 15 for controlling the suction degree of the suction motor 16 by a control signal.

That is, the lower surface of the insulating substrate seated on the jig 12 is adsorbed by the suction force of the suction motor 16 to prevent the flow of the insulating substrate during coating so as to maintain the accuracy of the coating.

At this time, the lower surface of the insulating substrate is adsorbed, but the other end of the suction pipe 17 connected to the suction motor 16 is formed inside the jig 12 in a plurality of configurations so that it can be adsorbed as a whole in comparison with the width of the insulating substrate. , It is preferable that the control unit 15 controls and uses the suction degree of the suction motor 16 according to conditions such as the thickness of the insulating substrate to be coated.

In addition, the degree of suction of the suction motor 16 through the control unit 15 may be controlled according to a preset value stored in the control unit 15 in accordance with the conditions of the insulating substrate.

The upper support 20

As shown in Figure 1,

The upper bracket 21 having a lower opening-type receiving space portion 211 disposed therebetween at the upper side of the jig 12 in the lower support 10, and

Support plates 22 accommodated in the accommodation space portion 211 of the upper bracket 21 and supported at both ends of the accommodation space portion 211

It is made including.

At this time, the support plate 22 may be fixedly coupled to both ends of the receiving space portion 211 by bolts or the like.

The upper support 20 is capable of moving up and down by the lifting means 23, the lifting means 23 has an end passing through the fixed plate 14, the upper surface of the upper bracket 21 A cylinder body 232 having an elevating piston 231 connected to and selectively operating the elevating piston 231 by pneumatic or hydraulic pressure, and mounted on the fixed plate 14 of the lower support 10; A lower end is connected to both ends of the upper surface of the upper bracket 21 to be erected, and the upper end comprises a lifting guide 233 that is inserted and supported to move in and out of the fixing plate 14 of the lower support 10. The lifting means 23 is an example and may be variously modified and changed within a range that satisfies the conditions for raising and lowering the upper support 20.

On the other hand, the upper support 20 further includes a distance measurement sensor 24 connected to the control unit 15, the distance measurement sensor 24 is a laser (L) having a straightness downward on the outer surface of the upper bracket 21 Irradiated but the irradiated laser is reflected on the lower surface of the post 13 or the upper surface of the base 11 to control the elevating distance of the elevating means 23 according to the reflected time.

The injection unit 30 is

2 to 8,

The composite dielectric is installed on the support plate 22 of the upper support 20, the pressure generating liquid is filled on the upper side, and the liquid composition for the composite dielectric is filled on the lower side, pushed by the pressure due to the expansion of the liquid for pressure generation. For the liquid composition is made of a structure that is sprayed on the ground electrode from the insulating substrate,

In more detail,

The upper housing 31 having a cylindrical shape by the pressure barrier rib 311 surrounding the side surface and having a light-transmitting lens 312 in an upper side sealing area,
The upper end is formed in a shape surrounding the side with a shape extending downward from the lower end of the pressure barrier rib 311, but a replenishment port 325 connected to the supply unit 326 is formed on the outer surface, and the pressure barrier rib 311 is formed in the lower inner side. The liquid partition wall 321 partitioned in the provided compartment 33 and the spray passage 322 of the liquid composition for the composite dielectric are disposed on the lower side, but the spray nozzle 323 is disposed to be located inside the cover unit 40. Including the lower housing 32,

delete

The space provided between the upper housing 31 and the lower housing 32 is filled with a liquid for pressure generation on the upper housing 31, and a space filled with a liquid composition for a composite dielectric on the lower housing 32 side. Compartment (33) to transfer the pressure acting on the space filled with the liquid for pressure generation to the space filled with the liquid composition for the composite dielectric.

It is made including.

And the injection unit 30 is formed of an elastic material and is provided on the lower side inside the lower housing 32 so that the upper side is in close contact with the lower housing 32, a circular inlet 341 opened on the upper side is formed, and the lower side The cross section gradually narrows gradually from circular to linear, and at the lower end, a slit 342 through which the liquid composition for a composite dielectric passes is formed so that the liquid composition for a composite dielectric can be moved only toward the spray nozzle 323. It further includes a guiding backflow prevention valve 34.

Here, the slit 342 of the backflow prevention valve 34 maintains a closed state while the liquid composition for a composite dielectric is filled in the lower housing 31, and the compartment ( 33) when the pressure is delivered to the side filled with the liquid composition for the composite dielectric, the slit 342 is opened by the pressure and is injected through the injection passage 322, and when the pressure is released, the slit 342 is restored by the restoring force. This is closed.

On the other hand, the light transmission lens 312 of the upper housing 31 is a convex lens, and the light transmission lens 312 shows an example of blocking the upper part of the pressure barrier 311, but the present invention is not limited thereto. , If the transmissive lens 312 can be translucent, such as a planar or concave type, various types of applications are possible, and it is also possible to block the entire upper side of the pressure barrier 311 only with the transmissive lens 312.

As the pressure generating liquid, general water may be used, and various liquid substances such as polymer sol and gel such as alcohol or polyethylene glycol may be used. In addition, it is preferable to use a degassed liquid for minimizing residual bubbles when generating bubbles. In addition, when electrolyte (salt, etc.) is added to pure water as a pressure-generating liquid, molecules are ionized and energy required for collapsing of the molecular structure of the liquid is reduced, so that bubbles can be formed with better efficiency, which is more preferable. Do.

The upper housing 31 and the lower housing 32 may be formed integrally, or may be formed to be separated from each other based on the partition 45.

When the spray nozzle 323 provided inside the cover unit 40 formed to be connected to the lower housing 32 by the separation of the upper housing 31 and the lower housing 32 is damaged, contaminated or blocked, Excluding the upper housing 31, the cover unit 40 provided with the injection nozzle 323 and the cover unit 40 and the lower housing 32 successively can be solved through replacement, which is advantageous in terms of cost. Do.

The lower portion of the lower housing 32 and the side portions of the lower housing 32 including the spray nozzle 323 are stellite, aluminum alloy, and zirconium-based ceramics, as long as there is no difficulty in achieving the functions of the present invention. Various materials can be selected, and only a lower portion of the lower housing 32 on which the injection passage 322 is formed may be made of a zirconium-based ceramic material through insert injection.

Among the zirconium-based ceramic materials, zirconium oxide (zirconia) has a low thermal conductivity, so it is possible to prevent deterioration of the liquid composition for the composite dielectric due to heat transfer during laser irradiation, has high rupture toughness, and has very high resistance to crack propagation. Therefore, when spraying the liquid composition for the composite dielectric, it is possible to prevent a phenomenon that the end of the injection passage 322 is damaged or deformed, so that the lower housing 32, the injection nozzle 323, or the injection passage 322 is zirconium-based. It is preferable to form a zirconium oxide (zirconia) among the ceramic material.

In addition, the inside of the lower housing 32 or the injection nozzle 323 increases in horizontal cross-sectional area toward the upper side in some or all sections, and the slope of the inner wall is constant for each predetermined section, but the slope of the inner wall is smaller in the upward direction. A branch may contain multiple sections.

In addition, the inside of the lower housing 32 or the injection nozzle 323 may be provided in a trumpet shape that expands in a curved shape toward the partition 33 side from the injection passage 322 side in a part or the entire section. .

The shape of the lower housing 32 or the injection nozzle 323 can be more concentrated in pushing the liquid composition for the composite dielectric into the injection passage 322 by the pressure transmitted from the partition 33. Thereby, the liquid composition for a composite dielectric injected through the injection passage 322 can obtain a larger injection speed.

The partition 33 is provided between the upper and lower housings 31 and 32, and may be formed of an elastic material that partitions the upper and lower housings 31 and 32.

At this time, the compartment 33 may be made of silicone rubber or the like.

The partition 33 is preferably reinforced near the edge and center due to rapid expansion because the partition 33 may be damaged first because of the rapid expansion.

In the above, although the example of the membrane in which the compartment 33 is formed of an elastic material is not limited thereto, the present invention is not limited thereto, and acts in a space filled with a liquid for generating pressure, such as a disk having a plate-shaped reciprocating motion. Of course, various implementations are possible if the pressure to be delivered can be delivered to a space filled with a liquid composition for a composite dielectric.

As shown in Figure 3, the backflow prevention valve 34 is such that the flow of the fluid (liquid, gas, etc.) flows only in one direction, and the shape of a part or the whole is closed like a duck's beak shape or a flute spout. It can be formed as.

In addition, the reverse flow prevention valve 34 is capable of spraying the liquid composition for the composite dielectric filled in the lower housing 32 to the outside through the injection passage 322, but the outside air or the like is connected to the injection passage 322. By preventing it from flowing through, it is possible to prevent contamination of the liquid composition for the composite dielectric by preventing external air or the like from being mixed with the liquid composition for the composite dielectric filled in the lower housing 32.

At this time, the slit 342 of the backflow prevention valve 34 has a closed linear shape, and various forms such as a straight line or a curved line or an intersection line may be applied.

The injection passage 322 of the lower housing 32 may be formed of a plurality of injection holes, and each injection hole may be formed in a taper shape in which the horizontal cross-sectional area gradually decreases from the upper side to the lower side.

In addition, the inner wall of the injection passage 322 may be formed of a ceramic (zirconia) (zirconia-based) material, and is preferably formed of zirconium oxide (zirconia). As described above, since the zirconium oxide has high rupture toughness and has very high resistance to crack propagation, it is possible to prevent the end of the injection passage 322 from being damaged or deformed when spraying the liquid composition for a composite dielectric.

In addition, when the injection passage 322 of the liquid composition for a composite dielectric is formed with a diameter of 250 μm or less, even if the liquid composition for the composite dielectric is filled in a space filled with the liquid composition for the composite dielectric, if the pressure of a predetermined pressure does not act, the composite dielectric The liquid composition does not escape into the injection passage 322.

On the other hand, the injection unit 30 further includes an energy concentrator 35 that concentrates energy toward a specific point in a closed space filled with a liquid for generating pressure,

The energy concentrator 35 is made of a device capable of concentrating energy using microwaves, lasers, or the like.

That is, the energy concentrator 35 concentrates the energy of the pressure generating liquid (laser, etc.), and the instantaneous volume expansion (increased pressure) due to evaporation of the pressure generating liquid and the transmission of shock waves to form a liquid composition for the composite dielectric. Is pushed to the injection passage 322.

On the other hand, the lower housing 32 is penetrated through the liquid partition wall 321, a supplementary opening 325 formed with a supply passage for a liquid composition for a composite dielectric, and connected to the lower housing through the supplementary opening 325 ( 32) A supply part 326 for supplying a liquid composition for a composite dielectric in the side space may be further provided.

As a result, the supply unit 326 may supplement the liquid composition for a composite dielectric with a constant pressure at a level at which the liquid composition for a composite dielectric does not exit the injection passage 322. This is to ensure that the liquid composition for the composite dielectric is filled without additional control.

That is, if there is no liquid composition for a composite dielectric in a space for filling the liquid composition for a composite dielectric, the liquid composition for a composite dielectric is filled, but if there is a liquid composition for a composite dielectric in a space for filling the liquid composition for a composite dielectric, the liquid composition for a composite dielectric It is possible to fill the liquid composition for a composite dielectric at a level that cannot be pushed out into the injection passage 322.

The cover unit 40

2 to 6,

When the upper support body 20 is lowered together with the injection unit 30, and for blocking the insulating substrate from the outside when the liquid composition for a composite dielectric is sprayed by the injection unit 30,

Chamber 41 connected to both sides of the liquid partition wall 321 of the lower housing 32,

The inner space portion 42, which is formed inside the chamber 41 and communicates with a space filled with the liquid composition for a composite dielectric, is opened downward.

A rod 43 that is disposed to slide up and down in the inner space portion 42,

Cylindrical cover member 44, which is coupled to the end of the rod 43 and is opened downward while the upper and side parts are blocked,

Arranged in the interconnection region between the space filled with the liquid composition for a composite dielectric and the inner space portion 42, the pressure acting on the space filled with the liquid for pressure generation passes through the liquid composition for the composite dielectric, and the interior space Sub-compartment portion 45 to be transmitted to the portion 42, and

Return means 46 for returning the rod 43 to its original position when the pressure delivered to the sub-compartment 45 is released

It is made including.

Here, as shown in FIG. 2, the chamber 41 may be integrally connected to the lower housing 32 or separately manufactured, and then coupled and separated, and on the opposite side facing each other in the liquid barrier rib 321. A pair is provided to be connected.

In addition, in the inner space portion 42, the space area in which the rod 43 is disposed is preferably a cylindrical spatial structure, and thus, the rod 43 is also preferably a cylindrical three-dimensional structure.

In addition, the sub-compartment 45 may be formed of an elastic material, like the above-described compartment 33, and particularly made of silicone rubber or the like. In addition, since the edge and the center vicinity may be damaged first due to the rapid expansion, it is preferable that the sub-compartment 45 reinforces the edge and the center vicinity due to the rapid expansion.

And, as shown in Figure 5, the return means 46 is a stepped space portion 461 formed to be recessed along the outer periphery of the middle portion of the rod 43 and the inner periphery of the inner space portion 42 The stopper 462 that protrudes while having a narrow upper and lower width in the region corresponding to the stepped space portion 461 and the top surface of the stepped space portion 461 and the stopper 462 ) Is composed of a return spring (463) interposed between the top of the. As a result, when the return spring 463 is compressed when the load 43 is lowered and the pressure transmission to the internal space portion 42 is released, the load 43 is returned to the original position by the restoring force of the return spring 463. .

Therefore, as shown in FIG. 6, the cover unit 40 descends together with the injection unit 30 when the upper support body 20 descends, and the compartment 33 is deformed by the expansion of pressure generating liquid. At this time, the sub-compartment portion 45 is also deformed by the liquid composition for a composite dielectric under pressure, and the rod 43 is lowered by the pressure delivered to the air filled in the inner space portion 42, thereby After the cover member 44 connected to the rod 43 covers and closes the insulating substrate, the liquid composition for the composite dielectric is sprayed to the ground electrode side of the insulating substrate by the injection unit 30.

As shown in FIG. 6, the cover unit 40 is disposed in the inner space portion 42 and guides the pressure transmitted to the sub-compartment portion 45 to be concentrated at the upper end of the rod 43. ),

The guide 47 is the inner space portion 42 so that the sealed air or the like filled in the inner space portion 42 is concentrated toward the end of the rod 43 by the pressure transmitted from the sub-compartment portion 45. It is arranged in the corner area where the direction change is made, and has an arcuate surface structure recessed inward.

7 and 8, the cover unit 40 moves the guide 47 from the inner space part 42 toward the sub-compartment part 45 to move the inner space part 42. Displacement means for adjusting the position of the rod 43 up and down by transmitting pressure to the (48) further comprises a,

The displacement means 48 is penetrated through the chamber 41 and the forward and backward pistons 481 connected to the end of the guide 47 and a part of the forward and backward pistons 481 are built in to selectively select by pneumatic or hydraulic pressure. It consists of a cylinder body 482 of pneumatic or hydraulic pressure to operate the forward and backward piston 481.

As a result, as shown in FIG. 8, when the forward/backward piston 481 operated by the cylinder body 482 of the displacement means 48 is advanced, the guide 47 is also advanced while pressure is applied to the internal space portion 42. The rod 43 is lowered by the pressure transmitted to the sub-compartment unit 45 in a state in which the position of the rod 43 is moved to the lower side and is displaced from the initial position. It is possible to adjust the lowering position of the rod 43 and the cover member 44 connected thereto.

In the above description of the present invention with reference to the accompanying drawings, the "liquid composition coating device for a composite dielectric capable of preventing flow of an insulating substrate" having a specific shape and structure was mainly described, but the present invention is various modifications and changes by those skilled in the art It is possible, and such modifications and variations should be interpreted as falling within the protection scope of the present invention.

1: Circuit board
10: lower support
11: Base
12: jig
13: Post
14: Fixed plate
15: control unit
16: suction motor
17: suction tube
20: upper support
21: upper bracket
211: accommodation space
22: support plate
23: elevating means
231: lifting piston
232: cylinder body
233: Lift Guide
24: distance measuring sensor
30: injection unit
31: upper housing
311: Pressure bulkhead
312: Flood lens
32: lower housing
321: liquid bulkhead
322: jet path
323: spray nozzle
325: Supplement
326: supply unit
33: compartment
34: backflow prevention valve
341: Entrance
342: slit
35: energy concentrator
40: cover unit
41: chamber
42: internal space
43: load
44: cover member
45: sub-compartment
46: return means
461: stepped space
462: stopper
463: Return spring
47: Guide
48: displacement means
481: forward and backward piston
482: cylinder body

Claims (4)

In the circuit board (1) consisting of a ground electrode formed on an insulating substrate, a thin film of a composite dielectric formed by coating a liquid composition for a composite dielectric on the ground electrode, and a wiring layer formed on or inside the thin film In order to apply the liquid composition for the composite dielectric on the ground electrode,
A lower support 10 on which the insulating substrate is seated;
The lower support 10 is disposed on the upper side of the lower support 20 to descend;
The liquid composition for a composite dielectric that is installed on the upper support 20 and is filled with a liquid for pressure generation on the upper side and a liquid composition for a composite dielectric on the lower side is pushed by pressure due to expansion of the liquid for pressure generation. An injection unit 30 made of a structure sprayed from the substrate onto the ground electrode; And
A cover unit 40 that descends together with the injection unit 40 when the upper support 20 descends and blocks an insulating substrate from the outside when the liquid composition for a composite dielectric is sprayed by the injection unit 30; Including,
The injection unit 30 is formed of a cylindrical shape by a pressure partition wall 311 surrounding a side surface, and an upper housing 31 having a light-transmitting lens 312 in an upper side sealing area,
The upper end is connected to the lower end of the upper housing 31 and has a shape extending downward, but has a shape in which a side is wrapped so that its interior can be partitioned from the upper housing 31, and the lower end is provided with the cover unit 40. The inside of the cover unit 40 is connected to the top of the liquid partition wall 321 and the inside of the cover unit 40 so that the inside is in communication, so that the injection passage 322 of the filled liquid composition for the composite dielectric is disposed on the bottom side. The lower housing 32 including the injection nozzle 323 to be, and
The space provided between the upper housing 31 and the lower housing 32 is filled with a liquid for pressure generation on the upper housing 31, and a space filled with a liquid composition for a composite dielectric on the lower housing 32 side. Compartment, but includes a compartment 33 for transmitting the pressure acting on the space filled with the liquid for pressure generation to the space filled with the liquid composition for a composite dielectric,
The lower support 10 is disposed in the base 11, the jig 12 is disposed in the upper central region of the base 11, the insulating substrate is seated, two or more standing on both ends of the upper side of the base 11 Post (13), a fixed plate (14) interconnecting the upper end of each post (13), provided inside the base (11) to be accommodated but connected to the jig (12) through the suction pipe (17) It includes a suction motor 16 for fixing the insulating substrate by adsorption and a control unit 15 for controlling the suction degree of the suction motor 16 by a control signal,
The upper support 20 is disposed on the lower support 10 to be spaced apart from the upper side of the jig 12, the upper bracket 21, the upper bracket 21 having a lower opening-type receiving space portion 211 therein. ) Is received in the receiving space portion 211 of the receiving space portion 211 is supported on both ends of the support plate 22 and the upper bracket 21 is irradiated with a laser (L) downward on the outer surface of the irradiated A liquid composition coating device for a composite dielectric, comprising a distance measuring sensor 24 that measures the reflection time of the laser so that the elevation distance of the upper bracket 21 can be controlled by the control unit 15.
According to claim 1,
The cover unit 40 is
A chamber 41 connected to both sides of the liquid partition wall 321 of the lower housing 32,
An inner space portion 42 formed in the chamber 41 and communicating with a space filled with the liquid composition for a composite dielectric, and having a lower opening (42);
And the rod 43 is arranged to slide up and down in the inner space portion 42,
A cylindrical cover member 44 that is coupled to the end of the rod 43 and is opened downward while the upper and side parts are blocked,
Arranged in the interconnection region between the space filled with the liquid composition for a composite dielectric and the inner space portion 42, the pressure acting on the space filled with the liquid for pressure generation passes through the liquid composition for the composite dielectric, and the interior space A sub-compartment portion 45 to be transmitted to the portion 42,
Return means 46 for returning the rod 43 to its original position when the pressure delivered to the sub-compartment 45 is released
Liquid composition coating device for a composite dielectric, characterized in that consisting of.
According to claim 2,
Liquid for the composite dielectric, characterized in that a guide 47 is disposed in the inner space portion 42 and guides the pressure delivered to the sub-compartment portion 45 to be concentrated at the upper end of the rod 43. Composition coating device.
The method of claim 3,
Adjusting the position of the rod 43 vertically by transmitting pressure to the inner space part 42 by moving the guide 47 from the inner space part 42 toward the sub-compartment part 45. Liquid composition coating device for a composite dielectric, characterized in that provided with a displacement (變位) means (48) for.

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