KR102121367B1 - Non―contact optical measuring apparatus and method - Google Patents

Abstract

The present invention relates to a non-contact optical measuring device capable of fixing the position of a material in a non-contact manner to prevent deterioration of measurement precision in optical measurement of a thin material (eg, glass, panel, etc.), one embodiment of the present invention The non-contact optical measuring device according to the example is disposed facing at least one surface of the material, and the non-contact chuck unit that fixes at least one surface of the material in a non-contact manner, and the non-contact chuck unit, which is disposed close to the non-contact chuck unit and measures the material fixed to the non-contact chuck unit The optical unit to be lifted, the chuck elevating unit to adjust the relative height of the non-contact chuck unit relative to the optical unit by elevating the non-contact chuck unit, and the optical drive to adjust the horizontal position of the optical unit by moving the optical unit in the horizontal direction The unit includes a main lifting unit that simultaneously lifts the non-contact chuck unit and the optical unit to adjust the overall height of the non-contact chuck unit and the optical unit.

Description

Non-contact optical measuring device and method {NON-CONTACT OPTICAL MEASURING APPARATUS AND METHOD}

The present invention relates to a non-contact optical measuring device and method.

Materials that are optical measurement and measurement objects such as glass and panels (hereinafter referred to as'measurement objects') require high cleanliness.

Accordingly, it is advantageous to perform measurement and measurement in a state that allows only minimal contact with the object to be measured, and the conventional method of fixing the object is mostly a contact type fixing method, which may lead to contamination and damage when measuring the material. .

In addition, in the conventional method of fixing an object to be measured, it was necessary to repeatedly perform contact and release of contact with the material in order to stably fix the position of the material during measurement at all measurement points, which takes a lot of time for measurement and measurement. There was a problem.

In the semiconductor or flat panel display (FPD) process, the material to be measured and measured, that is, the object to be measured must maintain high cleanliness and high precision. This has a direct effect on yield and is an important requirement for each process.

1 is a view briefly showing a fixing device of a conventional optical measuring device. Referring to FIG. 1, the illustrated conventional material fixing device 10 adsorbs and fixes the lower surface of the material S, which is a measurement object, by vacuum. And this method was called a contact type fixing method. However, the conventional material fixing device 10 is advantageous for maintaining measurement precision, but has a disadvantage that measurement and measurement are possible only by the upper optical system.

2 is a view schematically showing a material fixing device of a conventional optical measuring device. Referring to FIG. 2, the illustrated conventional material fixing device 20 is configured to stably support the material S using a plurality of bars 21. However, in the case of the conventional bar-type material fixing device 20, as well as the material S, a plurality of bars 21 may be drooped down due to vibration and self-weight, in which case the measurement precision is relatively deteriorated. there was.

3 is a view briefly showing a material fixing device of a conventional optical measuring device. Referring to FIG. 3, one side of the illustrated conventional material fixing device 30 is an area 31 in which the material is seated, and the seated material is transferred to the other area 33 while providing a gap 35 provided therebetween. Through the optical measurement of the material was made. This structure was called a split type.

However, according to these conventional techniques, a contact chuck was used to align the optical axis of the optical system, maintain flatness of the material, suppress vibration, and prevent sagging. The contact chuck had disadvantages in terms of high cleanliness. .

Accordingly, there is a need for a technical solution that can simultaneously maintain high precision and high cleanliness in the optical measurement of the material, and shorten the measurement time by not repeatedly performing the fixing and release operations of the material.

As a conventional technique related to the present invention, the Republic of Korea Patent Registration No. 10-0988691 (2010.10.12. notice date) discloses an optical measuring device.

An object of the present invention is to provide a non-contact optical measuring device and method capable of fixing the position of a material in a non-contact manner to prevent deterioration of measurement precision in optical measurement of a thin material (eg glass, panel, etc.).

It is also an object of the present invention to provide a non-contact optical measuring apparatus and method using a plurality of chucks capable of fixing at least one surface of a material in a non-contact manner at a position close to an optical unit.

In addition, the object of the present invention is that the position of the material to be subjected to optical measurement is constrained in a non-contact manner, and constrained in the height direction (eg, Z-axis direction, etc.) and the rest of the directions (eg, X-axis direction, Y-axis direction, etc.) It is to provide a non-contact optical measuring apparatus and method that can minimize the repetitive contact and contact release operation is not limited to.

In addition, an object of the present invention is to provide a non-contact optical measurement apparatus and method that can perform the optical measurement operation of the material more quickly by minimizing the operation of repeatedly contacting or releasing the material during optical measurement of the material.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention not mentioned can be understood by the following description, and will be more clearly understood by embodiments of the present invention. In addition, it will be readily appreciated that the objects and advantages of the present invention can be realized by means of the appended claims and combinations thereof.

In order to achieve the above object, the non-contact optical measuring apparatus according to an embodiment of the present invention is disposed facing at least one surface of the material, the non-contact chuck unit for fixing at least one surface of the material in a non-contact manner; An optical unit disposed close to the non-contact chuck unit and measuring a material fixed to the non-contact chuck unit; A chuck elevating unit that elevates the non-contact chuck unit to adjust a relative height of the non-contact chuck unit based on the optical unit; An optical drive unit that moves the optical unit in a horizontal direction to adjust a horizontal position of the optical unit; And a main lifting unit that simultaneously lifts the non-contact chuck unit and the optical unit to adjust the overall height of the non-contact chuck unit and the optical unit.

At this time, the non-contact chuck unit, the first non-contact chuck is arranged spaced apart on one side with the optical unit therebetween to fix at least one surface of the material in a non-contact manner; And a second non-contact chuck that is spaced apart from the other side of the first non-contact chuck with the optical unit interposed therebetween and secures at least one surface of the material in a non-contact manner.

In addition, the first non-contact chuck and the second non-contact chuck may be arranged to face each other while maintaining a separation distance therebetween.

In addition, the non-contact chuck unit further includes a support member for connecting and supporting the first non-contact chuck and the second non-contact chuck, wherein the support member is formed in any one of a circular, elliptical, and polygonal shape. The hollow area can be secured.

In addition, the optical unit, through the inner rectangular hollow region of the support member protrudes in the vertical direction, may be formed to be adjustable in the horizontal direction within the rectangular hollow region by the optical drive unit.

In addition, the chuck elevating unit, a chuck elevating motor for generating a rotational force required for elevating the non-contact chuck unit; And a chuck elevating motor stage that receives the rotational force generated by the chuck elevating motor and moves the non-contact chuck unit linearly up and down within a set height range.

In addition, as the non-contact chuck unit linearly moves up and down within a set height range, the distance between the material fixed to the non-contact chuck unit in a non-contact manner and the optical unit is adjusted, so that the focal length of the optical unit can be adjusted. have.

In addition, the optical drive unit, a first optical drive motor for generating a rotational force to move the optical unit in the first horizontal direction; A second optical drive motor generating rotational force to move the optical unit in a second horizontal direction crossing the first horizontal direction; And an optical drive motor stage that receives the rotational force generated from each of the first and second optical drive motors and linearly moves the optical unit in the first and second horizontal directions.

In addition, the main lifting unit, the main lifting motor for generating the rotational force required to simultaneously lift the non-contact chuck unit and the optical unit; And a main elevating motor stage that linearly moves the non-contact chuck unit and the optical unit vertically by receiving the rotational force generated by the main elevating motor.

According to another embodiment of the present invention, as a non-contact optical measuring method using the above-described non-contact optical measuring device, the non-contact optical measuring device is disposed under the material, the material is fixed at the top of the non-contact chuck unit, and the optical unit It is possible to provide a non-contact optical measurement method for measuring the fixed material by using.

In addition, according to another embodiment of the present invention, as a non-contact optical measuring method using the above-described non-contact optical measuring device, the non-contact optical measuring device is disposed on the top of the material, and the material is fixed at the bottom of the non-contact chuck unit, It is possible to provide a non-contact optical measurement method for measuring the fixed material using the optical unit.

In addition, according to another embodiment of the present invention, as a non-contact optical measuring method using the above-described non-contact optical measuring device, a plurality of the non-contact optical measuring device is prepared, and the plurality of non-contact optical measuring devices are upper and lower parts of the material. It is possible to provide a non-contact optical measurement method of arranging so as to face each other, fixing a material between the plurality of non-contact chuck units, and measuring the fixed material using the plurality of optical units.

According to the present invention, it is possible to fix the position of the material in a non-contact manner during optical measurement of a thin material (eg, glass, panel, etc.), thereby improving measurement accuracy.

In addition, according to the present invention, at least one surface of the material can be fixed in a non-contact manner at a position close to the optical unit, thereby improving the measurement accuracy.

In addition, according to the present invention, the position of the material to be optically measured is constrained in a non-contact manner, and is constrained in the height direction (eg, Z-axis direction, etc.) and the rest of the directions (eg, X-axis direction, Y-axis direction, etc.) May not be bound to. As a result, when the optical measurement of a thin plate-like material (for example, glass, panel, etc.) is performed, the inflow of vibration from the outside can be suppressed, which has the advantage of improving measurement accuracy.

In addition, according to the present invention, as the repetitive contact or contact release process between the chuck and the material is minimized during the optical measurement of the material, the optical measurement time of the material is significantly shortened to quickly finish the measurement operation.

In addition to the above-described effects, the concrete effects of the present invention will be described together while describing the specific matters for carrying out the invention.

1 to 3 are views schematically showing a material fixing device of a conventional optical measuring device.
4 is a perspective view schematically showing a non-contact optical measuring apparatus according to an embodiment of the present invention.
5 is a use diagram showing a first implementation example of a non-contact optical measuring apparatus according to an embodiment of the present invention.
6 is a use diagram illustrating a second implementation example of a non-contact optical measurement apparatus according to an embodiment of the present invention.
7 is a use diagram illustrating a third implementation example of a non-contact optical measurement apparatus according to an embodiment of the present invention.
8A, 8B, and 8C are conceptual views illustrating an operating principle according to various implementation examples of the non-contact optical measurement apparatus illustrated in FIGS. 5, 6, and 7.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings so that those skilled in the art to which the present invention pertains can easily practice. The present invention can be implemented in many different forms and is not limited to the embodiments described herein.

In order to clearly describe the present invention, parts irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar elements throughout the specification. In addition, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to the components of each drawing, the same components may have the same reference numerals as possible even though they are displayed on different drawings. In addition, in describing the present invention, when it is determined that detailed descriptions of related well-known structures or functions may obscure the subject matter of the present invention, detailed descriptions thereof may be omitted.

In describing the components of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are only for distinguishing the component from other components, and the nature, order, order, or number of the component is not limited by the term. When a component is described as being "connected", "coupled" or "connected" to another component, the component may be directly connected to or connected to the other component, but different components between each component It will be understood that the "intervenes" may be, or each component may be "connected", "coupled" or "connected" through other components.

In addition, in implementing the present invention, components may be subdivided and described for convenience of description, but these components may be implemented in one device or module, or one component may be multiple devices or modules. It can be implemented by being divided into.

In the drawings, FIG. 4 is a perspective view schematically showing a non-contact optical measuring apparatus according to an embodiment of the present invention.

Referring to FIG. 4, the non-contact optical measuring apparatus 1000 according to an embodiment of the present invention includes a non-contact chuck unit 100, an optical unit 200 representing an optical system, a chuck elevating unit 300, an optical driving unit ( 400), the main lifting unit 500.

The non-contact chuck unit 100 refers to a device for fixing a position of a material by constraining a material such as a plate-like material, for example, an optical measurement, and a thin glass or panel in a height direction in a non-contact manner.

The non-contact chuck unit 100 may be disposed to face at least one surface (eg, a lower surface, an upper surface, an upper surface, a lower surface, etc.) of the material S (see FIG. 5 ). As a result, the non-contact chuck unit 100 can fix at least one surface of the material S (see FIG. 5) in a non-contact manner.

Specifically, as an example, the non-contact chuck unit 100 may include a first non-contact chuck 110 and a second non-contact chuck 120.

The first non-contact chuck 110 may be arranged to be spaced apart at a predetermined distance in one direction with an optical unit 200 (more specifically, an optical upper body 210) meaning an optical system therebetween. .

The first non-contact chuck 110 keeps the distance between the optical unit 200 and the material to be optically measured (S, see FIG. 5) constant, and the material (see S, FIG. 5) is height-directed in a non-contact manner. It can be composed of a device that is constrained only in the (eg Z-axis direction).

For example, a Bernoulli chuck, an ultrasonic chuck, an air chuck, etc. can be used. In addition, any non-contact chuck device configured to simultaneously act repulsive force and attraction between the chuck and the material to fix the material in a non-contact state can be used without limitation. .

The first non-contact chuck 110 configured as described above can fix the material S (refer to FIG. 5) on one side of the optical unit 200 in a non-contact manner.

The second non-contact chuck 120 has a predetermined distance in the opposite direction of the first non-contact chuck 110, that is, in the other direction, with the optic unit 200 (more specifically, the optical upper body 210) interposed therebetween. Can be spaced apart.

In addition, the second non-contact chuck 120 maintains a constant distance between the optical unit 200 and the material to be optically measured (see FIG. 5) in the same manner as the first non-contact chuck 110 described above. That is, the second non-contact chuck 120 may also fix the material (see S, FIG. 5) on the other side of the optical unit 200 in a non-contact manner.

The second non-contact chuck 120 may be configured using a Bernoulli chuck, an ultrasonic chuck, an air chuck, and the like, like the first non-contact chuck 110, but is not limited thereto.

The second non-contact chuck 120 configured as described above may fix the material S (see FIG. 5) together with the first non-contact chuck 110 at the other side of the optical unit 200 in a non-contact manner. Accordingly, the position of the material S (see FIG. 5) can be stably fixed without disturbing the optical measurement of the optical unit 200.

Meanwhile, the first non-contact chuck 110 and the second non-contact chuck 120 may be disposed on positions facing each other while maintaining a separation distance therebetween. That is, the first non-contact chuck 110 and the second non-contact chuck 120 may be arranged side by side at a predetermined distance.

Specifically, the non-contact chuck unit 100 may further include a support member 130.

The support member 130 connects and supports the first non-contact chuck 110 and the second non-contact chuck 120, whereby the optical unit (between the first non-contact chuck 110 and the second non-contact chuck 120) 200) can be positioned without interference from surrounding structures.

For example, as illustrated in FIG. 4, the support member 130 may have a rectangular frame shape in which a predetermined rectangular hollow region is secured.

However, although the shape of the support member 130 is illustrated in FIG. 4 as a square, it is not limited thereto. For example, it may be formed in any shape of a circle, oval, or polygon. As described above, the support member 130 may be used in various forms as long as it has a shape capable of securing a predetermined clearance between the optical unit 200 so as not to interfere with the measurement of the optical unit 200.

Depending on the structure of the support member 130, the optical unit 200 may be installed in a form that protrudes in the vertical direction through the inner rectangular hollow region of the support member 130. As a result, the optical unit 200 does not interfere with the surroundings in the inner quadrangular hollow area of the support member 130 by the optical driving unit 400, that is, the horizontal direction, that is, the front and rear and left and right directions (for example, X-axis and Y Positioning may be possible in the axial direction, etc.). As a result, the optical unit 130 is positioned very close to the first and second non-contact chucks 110 and 120, and can be stably adjusted without disturbing surrounding structures, thereby significantly shortening the measurement time and improving measurement accuracy. I can do it.

The optical unit 200 is disposed on a position very close to the first and second non-contact chucks 110 and 120 while the inner square hollow area of the support member 130 connecting and supporting the first and second non-contact chucks 110 and 120 It is installed to be movable in a horizontal direction within.

The optical unit 200 may stably perform the optical measurement operation of the material between the first and second non-contact chucks 110 and 120 according to the above-described installation structure.

For example, the optical unit 200 may have a structure in which the optical upper body 210 and the optical lower body 230 are vertically coupled. The optical upper body 210 may be installed vertically through the inside of the inner rectangular hollow region of the support member 130 connecting and supporting the first and second non-contact chucks 110 and 120. The optical lower body 230 inserts the optical upper body 210 into the front end and is connected to the optical driving unit 400 to be described later, thereby enabling position adjustment in the front and rear and left and right directions of the optical unit 200. However, the upper optical body 210 and the lower optical body 230 are described separately according to the position, and may be formed in an integral structure.

The chuck elevating unit 300 may adjust the relative height of the non-contact chuck unit 100 based on the optical unit 200, that is, the first and second non-contact chucks 110 and 120 by elevating the non-contact chuck unit 100. have.

The chuck lifting unit 300 may include a chuck lifting motor 310 and a chuck lifting motor stage 330.

The chuck lifting motor 310 generates a rotational force required for lifting the non-contact chuck unit 100. In addition, the chuck elevating motor stage 330 receives the rotational force from the chuck elevating motor 310 and moves the non-contact chuck unit 110 linearly up and down within a set height range. Here, the chuck elevating motor stage 330 includes a ball screw or the like, and refers to a conventional motor stage assembly that converts the rotational force of the motor into linear motion, and a detailed detailed configuration thereof will be omitted.

As configured as described above, the rotational force output from the chuck lifting motor 310 can move only the non-contact chuck unit 100 through the chuck lifting motor stage 330 in the height direction.

As described above, as only the non-contact chuck unit 100 is lifted while the optical unit 200 is positioned as it is, the relative height of the non-contact chuck unit 100 based on the optical unit 200 may be adjusted.

That is, as the non-contact chuck unit 100 is height-adjusted within the set height range, the distance between the material (see S, FIG. 5) fixed to the first and second non-contact chucks 110 and 120 and the optical unit 200 (ie , Spacing) can be adjusted. As a result, autofocusing (AF) adjustment of the optical unit 200 may be possible.

The optical drive unit 400 adjusts the horizontal position of the optical unit 200 by moving the optical unit 200 representing the optical system in the horizontal direction, that is, in the front-rear and left-right directions.

Specifically, the optical drive unit 400 includes first and second optical drive motors 410 and 430 that generate rotational force required to move the optical unit 200 in different directions, and an optical drive motor stage 450 ).

The first optical drive motor 410 generates a rotational force required to move the optical unit 200 in a first horizontal direction (eg, X-axis direction, etc.).

Alternatively, the second optical drive motor 430 generates a rotational force required to move the optical unit 200 in a second horizontal direction (eg, Y-axis direction, etc.). Here, the second horizontal direction means a direction crossing the first horizontal direction.

The optical drive motor stage 450 receives the rotational force generated from each of the first and second optical drive motors 410 and 430, and the optical unit in the first and second horizontal directions (for example, X-axis and Y-axis directions). The 200 can be moved in a straight line. The optical drive motor stage 450 may use a conventional motor stage composed of a ball screw or the like, and a detailed description thereof will be omitted.

The optical unit 200 can be moved in the first and second horizontal directions by the optical drive unit 400 configured as described above, so that the horizontal position can be adjusted.

The main lifting unit 500 may be disposed through a horizontal frame 900 forming the base of the device and a vertical frame 800 installed vertically upward from the top of the horizontal frame 900, the non-contact chuck unit 100 ) And the optical unit 200 are elevated at the same time.

For example, the main elevating unit 500 includes a main elevating motor 510 and a main elevating motor stage 530.

The main elevating motor 510 may be disposed to penetrate through a hole provided on a horizontal frame forming a base as shown in FIG. 4 and the rotational force required to elevate both the non-contact chuck unit 100 and the optical unit 200 Causes

The main elevating motor stage 530 is located on the opposite side of the optical drive unit 400 with the vertical frame 800 interposed therebetween, and receives the rotational force generated by the main elevating motor 510 to receive the non-contact chuck unit 100 and the optic The units 200 may be linearly moved up and down at the same time. The installation positions of the main elevating motor 510 and the main elevating motor stage 530 illustrated in FIG. 4 are exemplary and are not limited thereto.

According to the driving mechanism of the main lifting unit 500 configured as described above, the non-contact chuck unit 100 and the optical unit 200 can simultaneously move in the height direction (eg, Z-axis direction, etc.).

As described above, according to the non-contact optical measuring apparatus 1000 according to an embodiment of the present invention, since it is not necessary to repeatedly fix and release the position of the material (refer to FIG. 5), the measurement time is greatly reduced. It has the advantage of being shortened. In particular, the first and second non-contact chucks 110 and 120 constrain the material only in the height direction (eg, Z-axis direction, etc.) in order to make the surface to be measured uniform and maintain a stable position. It is not constrained in the front-rear and left-right directions (eg, X-axis and Y-axis directions). Accordingly, when driving the optical unit 200, which means the optical system, there is no need for a repetitive fixation release operation in a space in which interference with the device itself and a separate mechanism does not occur. Therefore, it is possible to bring about an advantageous effect that the measurement time is significantly shortened.

5, 6, and 7 show first, second, and third implementation examples of the non-contact optical measurement apparatus according to an embodiment of the present invention, and FIGS. 8A, 8B, and 8C are first, second, and third implementations. It is shown to explain the operation principle according to an example.

Referring to FIG. 5, a first implementation example using a non-contact optical measuring device according to the present invention is shown.

The material S is disposed on the non-contact optical measuring device 1000, and the material S seated on the upper part is raised using the non-contact chuck unit 100, that is, the first and second non-contact chucks 110 and 120. Constrain in the direction (eg Z-axis direction). Subsequently, the material S fixed in a non-contact manner may be optically measured using the optical unit 200.

In this case, between the first and second non-contact chucks 110 and 120 and the material S, the repulsive force F1 and the attraction force F2 may act simultaneously as illustrated in FIG. 8A. At this time, the repulsive force (F1) is applied with a relatively large force, and the attraction force (F2) can be applied with a relatively small force.

Referring to FIG. 6, a second implementation example using a non-contact optical measuring device according to the present invention is shown.

The material (S) is disposed under the non-contact optical measuring device (1000), and the material (S) located below them using the non-contact chuck unit (100), that is, the first and second non-contact chucks (110, 120). Is fixed in a non-contact manner by constraining in the height direction (eg, Z-axis direction, etc.). Subsequently, the material S fixed in a non-contact manner may be optically measured using the optical unit 200.

In this case, between the first and second non-contact chucks 110 and 120 and the material S, the repulsive force F1 and the attraction force F2 may act simultaneously as illustrated in FIG. 8B. At this time, the repulsive force (F1) is applied with a relatively small force and the attraction force (F2) can be applied with a relatively large force.

Referring to FIG. 7, a third implementation example using a non-contact optical measuring device according to the present invention is shown.

A plurality of non-contact optical measuring apparatuses 1000 and 1000' may be arranged in an attitude facing each other up and down. In addition, the material S may be horizontally arranged through a space facing each of the plurality of non-contact optical measuring devices 1000 and 1000'. Then, using a plurality of non-contact chuck units (100, 100') provided in each of the plurality of non-contact optical measuring devices (1000, 1000'), that is, the first and second non-contact chucks (110, 120, 110', 120') The material S can be constrained in the height direction (eg, Z-axis direction, etc.). Subsequently, the plurality of optical units 200 and 200' provided in each of the plurality of non-contact optical measuring devices 1000 and 1000' may be optically measured with the material S fixed therebetween.

In this case, between the first and second non-contact chucks 110, 120, 110', 120' and the material S, the repulsive force F1 and the attraction force F2 may act simultaneously as shown in FIG. 8C. At this time, the repulsive force (F1) may act as a relatively large force and the attraction force (F2) may act as a relatively small force. Alternatively, unlike this, the attraction force F2 may not be applied, and only the repulsive force F1 may be applied with a force having the same size. Accordingly, it is possible to constrain the height direction of the material in a non-contact manner.

As described above, according to the configuration and operation of the present invention, by fixing the position of the optical measurement object (eg, glass, panel, etc.) in a non-contact manner, problems of flatness and vibration that can affect measurement and measurement of the measurement object are solved. Can improve.

Further, upon measurement and measurement of the measurement object, the measurement object can be restrained non-contactly at a position close to the optical device and the measurement object can be driven in a direction set with the optical device.

Furthermore, the position of the object to be measured is constrained non-contactly, but constrained only in the height direction (for example, the Z-axis), and may not be constrained in the rest of the directions, thereby preventing the inflow of vibration from the base.

Furthermore, it is possible to quickly perform measurement and measurement tasks by minimizing the operation process of repeatedly contacting and releasing the measurement object every time measurement and measurement are performed.

As described above, the present invention has been described with reference to the exemplified drawings, but the present invention is not limited by the examples and drawings disclosed in the present specification, and it is various by a person skilled in the art within the scope of the technical idea of the present invention. It is obvious that modifications can be made. In addition, although the operation and effect according to the configuration of the present invention is not explicitly described while describing the embodiments of the present invention, it is natural that the predictable effect by the configuration should also be recognized.

S: material
100: non-contact chuck unit
110: first non-contact chuck
120: second non-contact chuck
200: optic unit
210: optical upper body
230: optical lower body
300: chuck lifting unit
310: Chuck lifting motor
330: chuck elevating motor stage
400: optical drive unit
410: first optical drive motor
430: second optical drive motor
450: optical drive motor stage
500: main lifting unit
510: main lifting motor
530: main elevating motor stage
800: vertical frame
900: horizontal frame

Claims (11)

A non-contact chuck unit disposed opposite to at least one surface of the material and fixing at least one surface of the material in a non-contact manner;
An optical unit disposed close to the non-contact chuck unit and measuring a material fixed to the non-contact chuck unit;
A chuck elevating unit that elevates the non-contact chuck unit to adjust a relative height of the non-contact chuck unit based on the optical unit;
An optical drive unit that moves the optical unit in a horizontal direction to adjust a horizontal position of the optical unit; And
The main non-contact chuck unit and the main lifting unit for simultaneously adjusting the entire height of the non-contact chuck unit and the optical unit by elevating the optical unit; includes,
The non-contact chuck unit is spaced apart from one side with the optical unit interposed therebetween, and the first non-contact chuck fixing at least one surface of the material in a non-contact manner, and spaced apart from the other side of the first non-contact chuck with the optical unit interposed therebetween. A second non-contact chuck is arranged to secure at least one side of the material in a non-contact manner,
The non-contact chuck unit further supports a connection between the first non-contact chuck and the second non-contact chuck, and further includes a support member having a hollow area therein,
The optical unit, the non-contact optical measuring device characterized in that it projects through the hollow region in the vertical direction, the position is adjusted in the horizontal direction within the hollow region by the optical drive unit.
delete According to claim 1,
The first non-contact chuck and the second non-contact chuck are spaced apart from each other and disposed to face each other.
Non-contact optical measuring device.
According to claim 1,
The hollow region has a shape of any one of a rectangle, a circle, an ellipse, and a polygon
Non-contact optical measuring device.
delete According to claim 1,
The chuck lifting unit,
A chuck elevating motor that generates a rotational force required for elevating the non-contact chuck unit; And
A chuck elevating motor stage that receives the rotational force generated by the chuck elevating motor and moves the non-contact chuck unit linearly up and down within a set height range;
Non-contact optical measuring device comprising a.
According to claim 1,
The optical drive unit,
A first optical drive motor generating rotational force to move the optical unit in a first horizontal direction;
A second optical drive motor generating rotational force to move the optical unit in a second horizontal direction crossing the first horizontal direction; And
An optical drive motor stage that linearly moves the optical unit in the first and second horizontal directions by receiving rotational force generated from each of the first and second optical drive motors;
Non-contact optical measuring device comprising a.
The method of claim 7,
The main lifting unit,
A main elevating motor generating rotational force required to simultaneously elevate the non-contact chuck unit and the optical unit; And
A main elevating motor stage that linearly moves the non-contact chuck unit and the optical unit up and down by receiving the rotational force generated by the main elevating motor;
Non-contact optical measuring device comprising a.
A non-contact optical measuring method using the non-contact optical measuring device of any one of claims 1, 3, 4, 6 to 8,
Non-contact optics which arranges a material on the top of the non-contact optical measuring device, fixes the position of the material seated on the top using the non-contact chuck unit, and then optically measures the material fixed in a non-contact manner using the optical unit How to measure.
A non-contact optical measuring method using the non-contact optical measuring device of any one of claims 1, 3, 4, 6 to 8,
Non-contact optics for disposing a material at the bottom of the non-contact optical measuring device, fixing the position of the material at the bottom using the non-contact chuck unit, and then optically measuring the material fixed in a non-contact manner using the optical unit How to measure.
A non-contact optical measuring method using the non-contact optical measuring device of any one of claims 1, 3, 4, 6 to 8,
A plurality of the non-contact optical measuring devices are prepared, and a material is disposed in a space between each of the plurality of non-contact optical measuring devices,
A non-contact optical measuring method of fixing a position of a material disposed between the plurality of non-contact chuck units using the plurality of non-contact chuck units, and then optically measuring the material fixed in a non-contact manner using the plurality of optical units.

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