KR102118991B1 - A automatic apparatus for treating the fine particle with plasma - Google Patents

Abstract

The present invention relates to an apparatus for automatically treating barrel plasma, for treating a loading operation, an unloading operation, and a plasma treating pre-process for a treated fine granular material in an automated process while moving a barrel, in which the treated file particular material is contained, is fed to and mounted at the process locations automatically. An apparatus for automatically treating barrel plasma according to the present invention includes: a plasma treating part configured to plasma-treat a surface of a treated fine granular material contained in a barrel; a barrel mounting part mounting the barrel on the plasma treating part; a treated material loading part installed adjacent to the barrel mounting part and configured to load a predetermined amount of the treated fine granular material in the barrel; a treated material unloading part installed at a location that is adjacent to the plasma treating part and configured to unload the treated fine granular material, which has been completely treated in the barrel; and a barrel moving part configured to move among the treated material loading part, the barrel mounting part, and the treated material unloading part and move the barrel to the process locations.

Description

Barrel plasma automatic processing device {A AUTOMATIC APPARATUS FOR TREATING THE FINE PARTICLE WITH PLASMA}

The present invention relates to an automatic treatment device for barrel plasma, and more specifically, loading, unloading, and plasma treatment of the treated fine particulate material while automatically moving and mounting the barrel containing the treated fine particulate material to each process location. It relates to a Barrel Plasma automatic processing device that processes the entire process as an automated process.

In general, when a different material is coated on a surface of a specific material or when a different material is attached, a surface treatment operation is performed on the surface of the material in order to increase the adhesion of the coating material or the attached material. Various methods can be used for the surface treatment or surface modification of these materials, and recently, a plasma surface treatment method capable of obtaining an innovative surface modification effect has been widely used.

Plasma surface treatment method is a method of modifying the surface of a material by irradiating a normal pressure plasma or a vacuum plasma to the surface of a material that requires surface treatment, and the treatment method is eco-friendly and has an excellent treatment effect.

Such a conventional plasma surface treatment apparatus is a method in which surface treatment is performed only on a surface requiring treatment in a state where a material having a large size of a material to be treated is fixed to a surface of a fixed table.

However, such a conventional plasma processing apparatus has a problem in that it has a plurality of surfaces and is granular and is very small in size, so that it is very small. Particularly, when two or more surfaces of the fine granular material need to be processed, there is a problem in that gripping and handling of the material is difficult.

In addition, since such fine particulate matter is difficult to handle in the process itself, it is necessary to automate the entire process so that accurate processing is achieved.

The technical problem to be solved by the present invention is to automatically process the loading, unloading and plasma treatment of the fine particulate matter to be processed by the automated process while automatically moving and mounting the barrel containing the fine particulate matter to be processed to each process location. To provide a Barrel Plasma automatic processing device.

Barrel plasma automatic processing apparatus according to the present invention for solving the above-described technical problem, the plasma processing unit for plasma processing on the surface of the target fine particulate material contained in the barrel; A barrel mounting unit for mounting the barrel in the plasma processing unit; An object loading unit which is installed adjacent to the barrel mounting unit, and loads a predetermined amount of the fine particulate matter to be treated on the barrel; An object unloading unit installed at a position adjacent to the plasma processing unit, and unloading the micro-particulate material to be processed, which has been processed in the barrel; It includes; a barrel moving part that moves between the processing object loading part, the barrel mounting part, and the processing object unloading part, and moves the barrel to each process position.

In the present invention, the plasma processing unit includes: a processing chamber having a cylindrical interior space with an open front; An electrode unit installed at the center of the processing chamber and applying a high voltage to inject plasma gas in the barrel direction mounted on the processing chamber; It is installed in the processing chamber, it is preferable to include; exhaust portion for sucking the gas inside the processing chamber and discharged to the outside.

In addition, the barrel mounting portion in the present invention, the barrel is seated on the upper surface, the mounting plate is in close contact with the open front of the processing chamber to make the space inside the processing chamber as a closed space; A pair of barrel rotating rods rotatably installed through the mounting plate and rotating while supporting the barrel; It is installed on the rear surface of the mounting plate, the rotating rod rotating portion for rotating the barrel rotating rod; A plate rotating part rotating the mounting plate and the rotating rod rotating part in the vertical direction and the processing chamber direction; It is preferable to include; a plate forward and backward portion for moving the plate rotation portion forward and backward in the direction of the processing chamber.

In addition, in the present invention, it is preferable that the electrode part enters the inside of the barrel while the barrel is mounted in the processing chamber, and a space is formed between the barrel opening and the electrode part.

In addition, in the present invention, it is preferable that the barrel rotating rod is further provided with a friction force increasing member which is installed at a portion in contact with the barrel outer circumferential portion and increases frictional force with the barrel outer circumferential portion.

In addition, in the automatic barrel plasma processing apparatus according to the present invention, the plasma processing unit and the barrel mounting unit are configured in a pair, and a plurality of pairs are preferably installed adjacently.

In addition, in the present invention, the object loading unit includes: a hopper in which the fine particulate matter to be treated is contained in a large amount; It is installed in the lower opening of the hopper, the object to be measured by measuring a certain amount of fine particulate matter to be discharged; It is preferable to be configured to include; a to-be-processed part introduction part for introducing the inside of the barrel to stand and wait for the to-be-processed metering part.

In addition, in the present invention, the barrel moving part picks up the barrel loaded with the microparticles to be treated and moves to the position of the barrel mounting part, seated on the object loading part, and barrels the plasma-treated barrel in the barrel mounting part. A first barrel moving part picked up and moved to the discharge position; It is preferable to include; a second barrel moving part that receives the barrel from the first barrel moving part at the barrel discharge position, moves it to the position of the unloading part to be processed, and reverses the barrel by 180°.

In addition, in the present invention, it is preferable that the third barrel moving part is further provided in the barrel moving part to move the empty barrel to the loading target part by unloading the fine particulate matter to be processed by the second barrel moving part. .

In addition, the barrel plasma processing apparatus according to the present invention is installed adjacent to the unloading part of the object to be treated and remains inside the barrel by injecting high-pressure gas into the inside of the barrel reversed by the second barrel moving part. It is preferable that a barrel cleaning part for removing the fine particulate matter to be treated is further provided.

In addition, in the present invention, the barrel is preferably composed of a cylindrical member having an open top surface and a cover member detachably coupled to the upper portion of the cylindrical member to block a portion of the opening of the cylindrical member.

In addition, in the present invention, the first barrel moving part includes: a cover member gripping part for holding the cover member; A gripping part elevating means for driving the cover member gripping part in the vertical direction; And a cylindrical member gripping part for holding the outer surface of the cylindrical member.

According to the automatic plasma plasma treatment apparatus of the present invention, the process of loading, unloading, and pre-plasma treatment for the fine particulate matter to be treated as an automated process while automatically moving and mounting the barrel containing the fine particulate matter to be processed at each process location It has the advantage of being able to handle it.

1 is a perspective view showing the structure of an automatic barrel plasma processing apparatus according to an embodiment of the present invention.
2 is a plan view showing a structure of an automatic barrel plasma processing apparatus according to an embodiment of the present invention.
3 is a cross-sectional view showing a structure in which a barrel is mounted in a processing chamber according to an embodiment of the present invention.
4 and 5 are views showing a process in which the barrel is mounted on the barrel mounting portion and rotated according to an embodiment of the present invention.
6 is a rear view showing the structure of an automatic barrel plasma processing apparatus according to an embodiment of the present invention.
7 is a perspective view from another direction showing the structure of an automatic barrel plasma processing apparatus according to an embodiment of the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Barrel plasma automatic processing apparatus 100 according to this embodiment, as shown in Figures 1 and 2, the plasma processing unit 110, the barrel mounting unit 120, the object loading unit 130, the object unloading It comprises a portion 140 and the barrel moving portion 150. In this embodiment, the barrel 10 is, as shown in Figures 3 and 4, the upper surface of the cylindrical member 12 and the cylindrical member 12 is opened and detachably coupled to the upper portion of the cylindrical member 12, the cylinder It is composed of a cover member 14 that blocks a part of the opening 11 of the member 12, and this structure will be described below based on this structure.

First, the plasma processing unit 110 is a component that processes plasma on the surface of the microparticles to be treated contained in the barrel 10. That is, the plasma processing unit 110 according to the present embodiment is to perform plasma processing by spraying plasma gas onto the entire surface of the fine particulate material to be treated contained in the barrel 10.

To this end, in this embodiment, the plasma processing unit 110 is specifically configured as shown in FIGS. 1 and 2, including a processing chamber 111, an electrode unit 112, and an exhaust unit 113. First, the processing chamber 111 provides a space for plasma processing, and makes the interior space an enclosed space in a state where it is combined with a mounting plate 121 to be described later.

As shown in FIG. 1, the processing chamber 111 has a cylindrical shape with an open front, and an opening is installed in a lying position to see the front.

Next, as illustrated in FIG. 1, the electrode part 112 is installed at the center of the processing chamber 111, and a high voltage is applied to spray plasma gas in the barrel direction mounted in the processing chamber 111. Component. That is, the electrode unit 112 is to spread the raw material gas that is supplied from the outside is evenly diffused and injected in the direction of the fine particulate material to be treated, and a high voltage power source is applied to plasma the raw material gas injected.

The electrode portion 112 is specifically, as shown in Figure 3, one end is fixed to the center of the bottom surface (111a) of the processing chamber 111 is installed, as a whole the center of the cylindrical interior space of the processing chamber 111 It is formed to protrude in the direction of the opening. The electrode portion 112 is mounted in a form in which the barrel 10 is wrapped, so that a plasma treatment process is performed.

Therefore, the electrode unit 112 is provided with a diffusion unit 112a for uniform diffusion of raw material gas supplied from the outside and an injection unit 112b for injection, and the injection unit 112b is the processing chamber 111 ), installed in an inclined state of about 15° in the direct downward direction. This is because the barrel 10 is rotated in the process, and thus the microparticles 1 to be treated are concentrated in the region slightly biased to the side than the center of the barrel 10, and thus plasma in this direction. This is to intensively inject gas.

Next, as shown in FIGS. 2 and 3, the exhaust unit 113 is a component that is installed in the processing chamber 111 and sucks gas inside the processing chamber 111 to discharge it to the outside. The exhaust part 113 is piped to the processing chamber 111 so that the plasma gas injected by the injection part 112b is discharged into the gap between the electrode part 112 and the barrel opening 11 after processing (drawing) (Not shown in the figure) and an exhaust pump 113 connected thereto, to suck gas inside the processing chamber 111 and discharge it to the outside. The exhaust unit 113 also performs an exhaust operation for forming a vacuum atmosphere inside the processing chamber 111.

Next, the barrel mounting unit 120 is a component for mounting the barrel 10 to the plasma processing unit 110 in a processing state. That is, the barrel mounting unit 120 is mounted on the processing chamber 111 by installing the barrel 10 to which the microparticles to be treated are loaded and transferred by the object loading unit 130, so that plasma treatment is possible. It is made to rotate the barrel 10 so that plasma treatment is performed.

To this end, in this embodiment, the barrel mounting portion 120 is specifically shown in FIGS. 2 and 5, the mounting plate 121, the barrel rotating rod 122, the rotating rod rotating portion 123, the plate rotating portion 124 and It can be configured to include a plate forward and backward portion 125. First, as shown in FIGS. 1 and 4, the mounting plate 121 has a generally flat plate shape, and is a component in which the barrel 10 is mounted on the upper surface. And, as described above, the mounting plate 121 waits horizontally with the ground during the seating process of the barrel 10, and then stands upright in the state in which the barrel 10 is mounted in the plasma processing process, so that the processing chamber 111 ) Is in close contact with the open front surface to make the interior space of the processing chamber 111 a closed space.

Therefore, it is preferable that a sealing member (not shown in the drawing) is further provided on the contact portion between the mounting plate 121 and the processing chamber 111.

Next, the barrel rotating rod 122 is rotatably installed through the mounting plate 121, as shown in FIGS. 4 and 5, and is a component that rotates while supporting the barrel 10. In this embodiment, the barrel rotating rods 122 are spaced at regular intervals and installed in a pair to stably support and rotate the barrel 10.

And it is preferable that the barrel rotation rod 122 is further provided with a friction force increasing member 126. The frictional force increasing member 126 is installed in a portion of the barrel that actually comes into contact with the barrel outer circumferential portion 13, which is a portion in contact with the barrel rotating rod 122, and the barrel without the loss of rotational force of the barrel rotating rod 122. 10). Therefore, it is preferable that the frictional force increasing member 126 is made of a material having a large frictional force, such as rubber.

Next, the rotating rod rotating portion 123 is installed on the rear side of the mounting plate 121, as shown in Figure 5, is a component for rotating the barrel rotating rod 122. That is, the rotating rod rotating portion 123 is the barrel 10 and the mounting plate 121 is perfectly combined with the processing chamber 111, the plasma treatment preparation is completed, in the state that the plasma treatment is ready, the barrel rotating rod by the control command of the control unit ( 122). Then, as the barrel 10 supported on the barrel rotating rod 122 rotates, the fine particulate matter to be treated therein is evenly mixed, so that plasma treatment on the entire surface becomes possible.

Next, the plate rotating unit 124 is a component that rotates the mounting plate 121 and the rotating rod rotating unit 123 in the vertical direction and the processing chamber direction, as shown in FIGS. 4 and 5. That is, the plate rotation part 124 rotates the mounting plate 121 horizontally with the ground as shown in FIG. 4 in the process of mounting the barrel 10, and as shown in FIG. 5 in the process of plasma treatment. Stand upright, vertically.

Next, the plate forward and backward portion 125 is a component that moves the plate rotation portion 124 forward and backward in the direction of the processing chamber 111, as shown in FIG. That is, the plate forward and backward portion 125 is the plate rotating portion 124 and the mounting plate 121 and the rotating rod rotating portion 123 coupled to the plate forward and backward, so that the barrel 10 and the mounting plate 121 are the It is to be coupled to or separated from the processing chamber 111.

And it is preferable that the barrel mounting portion 120 according to this embodiment is further provided with a barrel fixing portion 127 as shown in FIGS. 1 and 5. The barrel fixing part 127 is installed on the opposite side of the barrel rotating rod 122 among the mounting plates 121 and is coupled to the mounting plate 127 in a structure that can be retracted. The barrel fixing part 127 having such a structure waits in a position that does not interfere by being tilted backward during the process of seating the barrel 10 on the mounting plate 121 or during lifting, and then the barrel 10 and the mounting plate In the process in which the 121 is laid, it rotates in the direction of the barrel 10 and presses the lower portion of the barrel 10 in the direction of the barrel rotating rod 122 to fix the barrel so that it does not deviate from the normal position. When the laying process of the barrel is completed, the barrel fixing part is tilted back again.

Meanwhile, in this embodiment, the plasma processing unit 110 and the barrel mounting unit 120 are configured in a pair, and as shown in FIG. 1, a plurality of pairs may be installed adjacently for processing efficiency.

Next, as shown in FIG. 1, the object loading part 130 is installed adjacent to the barrel mounting part 120 and loads a certain amount of the fine particulate matter to be treated into the barrel 10. to be. The fine particulate matter to be treated must be loaded with a very precise amount predetermined in the barrel 10 for normal plasma treatment. The to-be-processed loading unit 130 performs accurate weighing and loading of the micro-particles to be treated.

To this end, the workpiece loading unit 130 is specifically configured as shown in Figures 1 and 2, including a hopper 131, a workpiece metering unit 132 and a workpiece input unit 133. Can be. First, the hopper 131 is a component in which the fine particulate matter to be treated is contained in a large amount, and an opening is formed at the lower side so that the fine particulate matter to be treated can be discharged in the direction of the object measuring part 132. Have

Next, the to-be-processed metering unit 132 is installed in the lower opening of the hopper 131 as shown in FIGS. 1 and 2, and is a component that meters and discharges a certain amount of the fine particulate matter to be treated. The to-be-treated object metering unit 132 is equipped with a sensor capable of measuring an accurate weight, such as a load cell, and receives a predetermined precise amount of the processed fine particulate material from the hopper.

Next, the to-be-treated portion 133 is as shown in Figures 1 and 2, the to-be-processed metering portion 132 standing on the barrel elevating portion 134 to stand inside the barrel 10 to stand by. It is a component that is moved and injected into the barrel 10 without external loss.

Meanwhile, as illustrated in FIGS. 1 and 7, the object loading unit 130 according to the present embodiment is preferably further provided with a barrel lifting unit 134. The barrel lifting part 134 is composed of a seating jig 134a that is seated in a state where the barrel 10 is standing and a lifting means 134b that lifts the seating jig 134a in the vertical direction. The barrel 10 is returned to the empty state by the barrel moving part, and is raised to the loading position of the object.

Next, the unloading unit 140 is installed in a position adjacent to the plasma processing unit 110, as shown in FIGS. 1 and 2, and the processed fine granules in the barrel 10 are completed. It is the component that unloads the material. That is, the unloading unit 140 receives the processed fine granular material, which is contained in the barrel 10 moved by the second barrel moving unit 152, is packaged and discharged to the outside. Is to do.

As illustrated in FIG. 1, the unloading unit 140 is a discharge hopper 141, a distribution unit 142, and a packaging discharge unit that receives the fine particulate matter to be treated from the barrel 10. It can be configured to include 143.

Next, the barrel moving part 150 moves between the object loading part 130, the barrel mounting part 120, and the object unloading part 140, and moves the barrel 10 to each process position. It is a moving component. That is, the barrel moving unit 150 is controlled by the control unit (not shown in the figure) to the barrel 10 in each process position in the automatic barrel plasma processing apparatus 100 according to this embodiment driven by an automated process. By moving.

To this end, in this embodiment, the barrel moving part 150 is specifically composed of a first barrel moving part 151 and a second barrel moving part 152. First, as illustrated in FIG. 1, the first barrel moving part 151 is seated on the object loading part 130 and picks up the barrel 10 loaded with the fine particulate matter to be processed, thereby allowing the barrel mounting part ( 120) is a component that moves to a position and picks up and moves the barrel 10, which has been plasma treated, in the barrel mounting unit 120 to a barrel discharge position.

Here, the'barrel discharge position' refers to a position adjacent to the barrel mounting part 120 and overlapping copper lines of the first and second barrel moving parts 151 and 152.

Therefore, the first barrel moving part 151 is a cylindrical member gripping part 151a capable of gripping the outer surface of the cylindrical member 12 of the barrel and a cover member gripping part 151e holding the cover member 14 ) And an installation block 151b in which the cylindrical member gripping part 151a and the cover member gripping part 151e are installed, and the gripping part elevating means 151f for elevating the installation block 151b and And horizontal moving means (151c, 151d) for horizontally moving the gripping part lifting means (151f) left and right.

Particularly, the cover member gripping part 151e is lowered in the direction of the cylindrical member 12 by the gripping part elevating means 151f while the cover member 14 is gripped, and the cover member 14 Pressing to perform a function of coupling to the cylindrical member 12, and also a function of pulling the cover member 14 coupled to the cylindrical member 12 upward to open it.

Next, the second barrel moving part 152 receives the barrel 10 from the first barrel moving part 151 at the discharge position of the barrel 10 to the position of the object unloading part 140. It is a component that moves and reverses the barrel 10 by 180°. That is, after the second barrel moving part 152 receives the completed barrel 10 from the first barrel moving part 151, moves it to the object unloading part 140 and flips it over. The fine particulate matter to be treated contained in the barrel 10 is discharged to the unloading unit 140. At this time, for smooth transmission of the barrel 10, the cylindrical member gripping part 151a grips the upper part of the cylindrical member 12, and the second cylindrical member gripping part 152a is the cylindrical member 12 Grips the lower part of the.

Particularly, in the process of receiving the barrel 10 from the first barrel moving part 151, the cover member 14 of the barrel is separated from the cylindrical member 12. In this way, the cover member 14 gripped on the cover member gripping part 151e moves back to the object loading part 130 and is combined with the next cylindrical member 12 to be used in the next process.

And in the present embodiment, the second barrel moving part 152 is a second cylindrical member gripping part 152a for gripping the side surface of the cylindrical member 12 of the barrel, as shown in FIGS. 2 and 3. It comprises a reversing portion (152b) for reversing the second cylindrical member gripping portion (152a) in the vertical direction and a horizontal moving means (152c) for horizontally moving the reversing portion (152b).

Meanwhile, it is preferable that a third barrel moving part (not shown in the drawing) is further provided in the barrel moving part 150 according to the present embodiment. The third barrel moving part is a component that unloads the fine particulate matter to be processed by the second barrel moving part 152 and moves the empty barrel 10 to the object loading part 130. The third barrel moving part is installed under the barrel plasma processing apparatus 100 according to the present embodiment, and may have various structures capable of horizontally moving the cylindrical member 12.

In addition, the barrel plasma processing apparatus 100 according to the present embodiment is preferably further provided with a barrel cleaning unit 160. 1, the barrel cleaning unit 160 is installed adjacent to the unloading unit 140 to be processed, and the barrel 10 reversed by the second barrel moving unit 152 is installed. It is a component that removes the fine particulate matter to be treated remaining inside the barrel 10 by spraying a high-pressure gas into the interior. The fine particulate matter to be treated contained in the barrel 10 is entirely discharged to the unloading part 140, but a part may remain inside the cylindrical member 12. In this case, by moving to the barrel cleaning unit 160 and spraying high-pressure gas from the lower side, the fine particulate matter to be treated may be completely removed.

100: barrel plasma automatic processing apparatus according to an embodiment of the present invention
110: plasma processing unit 120: barrel mounting unit
130: loading part to be processed 140: unloading part to be processed
150: Barrel moving part 160: Barrel cleaning part
10: Barrel

Claims (4)

Plasma processing unit for plasma treatment on the surface of the fine particulate material to be treated contained in the barrel;
The barrel, which is vertically erected, receives the barrel supplied from the outside, mounts and rotates the barrel in the horizontal state in the horizontal direction, and the plasma-completed barrel separates from the plasma treatment part and stands vertically. Mounting part;
An object loading unit installed adjacent to the barrel mounting unit and loading a predetermined amount of the fine particulate matter to be treated into the barrel in a vertically standing state;
A processing object unloading unit installed at a position adjacent to the plasma processing unit, and inverting the barrel in a vertically standing state to unload the processed microparticulate material that has been processed in the barrel;
It includes; a barrel moving part that moves between the object loading part, the barrel mounting part, and the object unloading part, and moves the barrel in a vertically standing state to each process position;
The plasma processing unit,
A processing chamber having a cylindrical interior space with an open front;
An electrode unit installed at the center of the processing chamber and applying a high voltage to inject plasma gas in the barrel direction mounted on the processing chamber;
It is installed in the processing chamber, the exhaust portion for sucking the gas inside the processing chamber and discharged to the outside; includes,
The barrel mounting portion,
A mounting plate on which the barrel is seated on an upper surface and in close contact with an open front surface of the processing chamber to make the processing chamber interior space an enclosed space;
A pair of barrel rotating rods rotatably installed through the mounting plate and rotating while supporting the barrel;
It is installed on the rear surface of the mounting plate, the rotating rod rotating portion for rotating the barrel rotating rod;
A plate rotating part rotating the mounting plate and the rotating rod rotating part in the vertical direction and the processing chamber direction;
A plate forward and backward portion for moving the plate rotation portion forward and backward in the direction of the processing chamber;
Barrel fixed portion of the mounting plate is installed on the other side of the barrel rotating rod, having a structure that can be tilted to fix the barrel mounted on the mounting plate in the rotation process of the mounting plate; Plasma automatic processing device. delete delete According to claim 1,
The plasma processing unit and the barrel mounting unit is composed of a pair, a plurality of pairs of automatic plasma plasma processing apparatus characterized in that the adjacent installation.

Images