KR102093860B1 - Test connector and manufacturing method of the test connector - Google Patents

Abstract

According to an embodiment of the present invention, provided is a connector for inspection which is disposed between a device under test and test equipment to electrically connect the device under test with the test equipment. The connector for inspection comprises: a sheet formed by mixing silicone rubber and an iron oxide; and a conductive portion extending in a vertical direction in the sheet to enable conductivity in the vertical direction.

Description

Inspection connector and manufacturing method of inspection connector {TEST CONNECTOR AND MANUFACTURING METHOD OF THE TEST CONNECTOR}

The present disclosure relates to an inspection connector disposed between the device under test and the test equipment, and a method for manufacturing the inspection connector.

In an inspection process for determining whether a device under test, such as a manufactured semiconductor device, is defective, an inspection connector is disposed between the device under test and test equipment. It is known that an inspection connector electrically connects the device under test and the test equipment to determine whether the device under test is defective based on whether the device under test and the test equipment are energized.

If the terminal of the device under test is directly in contact with the terminal of the test equipment without the connector for inspection, it may occur that the terminal of the test equipment is worn or damaged in the repetitive inspection process and the entire test equipment needs to be replaced. Conventionally, the occurrence of the need to replace the entire test equipment is prevented by using an inspection connector. Specifically, when the connector for inspection is worn or damaged by repeated contact with the terminal of the device under test, only the corresponding connector for inspection can be replaced.

The conventional inspection connector includes a conductor electrically connecting the terminal of the device under test and the terminal of the test equipment, and a sheet of insulator on which the conductor is arranged. A plurality of the conductors of the connector for inspection are arranged to correspond to the spacing or pitch between a plurality of terminals of the device under test, thereby electrically connecting a plurality of terminals of the device under test and corresponding terminals of the test equipment. Order.

As the material of the sheet, a silicone rubber material is known. The test connector can be placed in a thermal environment, and it is known that the thermal stability of conventional silicone rubber can be applied at about -40 ° C to 130 ° C. In the case of the connector for inspection of a fine pitch, the range of use temperature may be approximately -25 ° C to 120 ° C. In particular, in the burn-in test, which is one of the finished product tests for the thermal environmental stability of the test connector, the test connector is tested for a long time in a temperature range of 120 to 170 ° C (for example, at least continuous Temperature exposure time of 10 hours or more).

Embodiments of the present disclosure provide an inspection connector with improved heat resistance.

Embodiments of the present disclosure, while improving the heat resistance, provides a connector for inspection and a method for manufacturing the same, which enables manufacturing convenience and accurate formation of a conductive portion.

When a sheet formed of a silicone material for an inspection connector expands and contracts with heat, the electrical spacing may change or the electrical resistance may be changed due to deformation of the conductor (for example, a deformation between conductor particles). Increasing problems can occur. Particularly, in the case of a fine-pitch inspection connector, this problem may be further increased. Embodiments of the present disclosure solve this problem.

When polydimethylmethylphenylsiloxane (PMPS) is used as the silicone material of the sheet, the heat resistance of the sheet may be improved, but when a phenyl group is added as a silicone material, the plastic properties increase as the content increases, so that the terminal may There is a problem that the function of the inspection connector to prevent damage is reduced. Embodiments of the present disclosure solve this problem, and improve heat resistance while maintaining the elastic characteristics of the connector for inspection.

One aspect of the present disclosure provides embodiments of an inspection connector. A connector for inspection according to a representative embodiment includes a sheet formed by mixing silicon rubber and iron oxide; And a conductive portion extending in the vertical direction in the sheet to enable energization in the vertical direction.

The silicone rubber may be liquid silicone rubber (LSR).

The sheet may include 100 parts by weight of the silicone rubber and 50 parts by weight or less of the iron oxide.

The sheet may include up to 26 parts by weight of the iron oxide.

The conductive portion may include a plurality of magnetizable conductive particles arranged in the vertical direction.

The conductive portion may be formed by aligning liquid silicone rubber (LSR), iron oxide, and a plurality of magnetizable conductive particles in a state where the plurality of conductive particles are aligned at predetermined positions by generating a magnetic field. The sheet may be formed by curing the mixture of the liquid silicone rubber and the iron oxide.

Another aspect of the present disclosure provides embodiments of a method of manufacturing a connector for inspection. A method of manufacturing a connector for inspection according to a representative embodiment includes a mixing step of mixing liquid silicone rubber (LSR), iron oxide, and a plurality of magnetizable conductive particles; And an alignment step of generating a magnetic field so that the plurality of conductive particles are aligned at predetermined positions, thereby forming a conductive portion in which the plurality of conductive particles extend in the vertical direction and enable electric current in the vertical direction.

In the mixing step, 100 parts by weight of the liquid silicone rubber and 50 parts by weight or less of the iron oxide may be mixed.

In the mixing step, 100 parts by weight of the liquid silicone rubber and 26 parts by weight or less of the iron oxide may be mixed.

According to embodiments of the present disclosure, it is possible to improve the heat resistance of the connector for inspection.

According to the embodiments of the present disclosure, while improving the heat resistance, it is possible to easily manufacture and accurately form the conductive portion.

According to embodiments of the present disclosure, conductivity may be improved in a high temperature environment.

According to embodiments of the present disclosure, it is possible to reduce the thermal shrinkage and thermal expansion of the sheet of the connector for inspection.

According to the embodiments of the present disclosure, the heating loss temperature of the sheet of the inspection connector can be increased.

1 is a partial cross-sectional view of an inspection connector 100 according to an embodiment, and shows an inspection connector 100 disposed between the device 10 to be tested and the test equipment 20.
2A and 2B show an inspection connector (Q) according to an embodiment having a sheet containing iron oxide and an inspection connector (O) according to a comparative example having a sheet not containing iron oxide, of an inspection connector This graph shows the change in resistance (R) of the test connector according to the pressing depth.
3 is a plan view of a specimen used in a thermal expansion and contraction test example of a specimen (TQ) formed by mixing silicon rubber and iron oxide and a specimen (TO) formed only of silicone rubber.
4A to 4C are graphs of heating loss results with different contents of iron oxide contained in a sheet, and show weight percent according to temperature.
5A to 5C are graphs of heat loss results obtained by varying the composition of silicone rubber in a sheet containing 9% by weight of iron oxide compared to silicone rubber, and show weight percent according to temperature.
6A is a bar graph showing the 1% weight loss temperature of each experimental group (A, B, C, B1, B2, B3) of FIGS. 4A to 5C.
6B is a bar graph showing the 2% weight loss temperature of each experimental group (A, B, C, B1, B2, B3) of FIGS. 4A to 5C.
7 is a graph measuring viscosity before curing of a mixture of iron oxide and liquid silicone according to the content of iron oxide (RW).
8A and 8B are cross-sectional photographs showing a state in which conductive parts are formed by arranging conductive particles using a magnetic field in liquid silicon containing iron oxide, and FIGS. 8A and 8B have 30% and 60% by weight of iron oxide, respectively. It is the result of the experiment using the sheet.

The embodiments of the present disclosure are exemplified for the purpose of illustrating the technical spirit of the present disclosure. The scope of rights according to the present disclosure is not limited to the embodiments presented below or to specific descriptions of these embodiments.

All technical terms and scientific terms used in the present disclosure, unless defined otherwise, have a meaning generally understood by a person skilled in the art to which this disclosure belongs. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure and are not selected to limit the scope of the rights according to the present disclosure.

As used in this disclosure, expressions such as “comprising”, “having”, “having,” etc., are open terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. (open-ended terms).

Expressions such as “consisting of only” used in the present disclosure should be understood as closed-ended terms that exclude the possibility of including other configurations in addition to the corresponding configuration.

The expressions of the singular forms described in this disclosure may include the meaning of the plural forms unless otherwise stated, and the same applies to the expressions of the singular forms described in the claims.

Expressions such as “first” and “second” used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of the components.

As used in the present disclosure, "direction", "up", and the like, refer to the direction in which the terminal 11 of the device under test 10 is disposed based on the connector 100 for inspection, and "down", " The direction directives such as "lower" means the direction in which the terminals 21 of the test equipment 20 are disposed based on the connector 100 for inspection. The "thickness direction" of the connector 100 for inspection referred to in the present disclosure means an up-down direction. This is a reference for explaining the present disclosure so that it can be clearly understood, and depending on where the standard is placed, the up and down direction Of course, it can be defined differently.

Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In the accompanying drawings, identical or corresponding elements are given the same reference numerals. In addition, in the following description of the embodiments, the same or corresponding elements may be omitted. However, although descriptions of components are omitted, it is not intended that such components are not included in any embodiment.

Referring to FIG. 1, the device 10 to be inspected may be a semiconductor device or the like. The device 10 to be inspected includes a plurality of terminals 11. The plurality of terminals 11 are arranged on the lower surface of the device under test 10. When inspecting the device under test 10, the plurality of terminals 11 may contact the upper surface of the connector 100 for inspection.

The test equipment 20 includes a plurality of terminals 21. The plurality of terminals 21 corresponds to the plurality of terminals 11. The plurality of terminals 21 are arranged on the upper side of the device under test 10. When inspecting the device under test 10, the plurality of terminals 21 may contact the lower surface of the connector 100 for inspection.

In this embodiment, each of the plurality of terminals 21 is arranged at a position facing each of the plurality of terminals 11 in the vertical direction. Although not shown, in another embodiment in which the plurality of conductive parts 130 are inclined with respect to the up and down direction, each of the plurality of terminals 21 may include each of the plurality of terminals 11 of the plurality of conductive parts 130. It may be arranged in a position facing the inclined direction.

The test connector 100 is disposed between the device under test 10 and the test equipment 20 and is configured to electrically connect the device under test 10 and the test equipment 20 to each other. The test connector 100 is a conductive portion 130 configured to electrically connect the sheet 110 of an insulating material, the terminal 11 of the device 10 to be tested, and the terminal 21 of the test equipment 20. ).

The conductive portion 130 may extend in the vertical direction. The conductive portion 130 extends in the vertical direction within the sheet 110 to enable energization in the vertical direction.

The conductive portion 130 is disposed on the sheet 110. The conductive portion 130 may be supported by the sheet 110.

The plurality of conductive parts 130 are spaced apart from each other in a direction perpendicular to the vertical direction. The plurality of conductive parts 130 may be arranged to be substantially spaced apart from each other.

Both ends of the conductive portion 130 in the vertical direction are exposed on the vertical surface of the sheet 110. The upper end of the conductive portion 130 is exposed to the upper surface of the sheet 110, and the lower end of the conductive portion 130 is exposed to the lower surface of the sheet 110. The upper end of the conductive portion 130 is configured to be able to contact the terminal 11 of the device under test 10, and the lower end of the conductive portion 130 is configured to be able to contact the terminal 21 of the test equipment 20. .

The conductive portion 130 includes an exposed portion (not shown) exposed on the surface of the sheet 110. The exposed portion is located at both ends of the conductive portion 130. The sheet 110 may be configured to surround the conductive portion 130 excluding the exposed portion.

The conductive portion 130 is formed of a conductive material. One conductive portion 130 extending up and down may include a plurality of conductive particles. Here, it is needless to say that the conductive part 130 may include other components in addition to the plurality of conductive particles.

The sheet 110 has a thickness in the vertical direction. The thickness of the sheet 110 (length in the thickness direction) is smaller than the length in the direction perpendicular to the thickness direction of the sheet 110.

The sheet 110 is formed of an electrically insulating material. The sheet 110 may be formed of an elastically deformable material.

For example, the sheet 110 may be made of an insulating elastic polymer material. The elastic polymer material may be a polymer material having a crosslinked structure. Examples of the curable polymer material forming material that can be used to obtain the crosslinked polymer material include conjugated diene systems such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, and acrylonitrile-butadiene copolymer rubber. Block copolymer rubbers such as rubbers and hydrogenated products thereof, styrene-butadiene-diene block copolymer rubbers, styrene-isoprene block copolymers, and hydrogenated products thereof, chloroprene, urethane rubbers, polyester rubbers, epichlorohydrin rubbers , Silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, and the like.

The sheet 110 includes silicone rubber. The sheet 110 may include silicon rubber and iron oxide. The sheet 110 may be formed by mixing silicon rubber and iron oxide. The sheet 110 may be composed of only silicone rubber and iron oxide.

For example, the silicone rubber may be a polysiloxane material. The silicone rubber may be liquid silicone rubber (LSR). The iron oxide may be Fe ₂ O ₃ .

The sheet 110 may be formed by mixing iron oxide powder having a predetermined weight of silicone rubber. In the present disclosure, the weight part or weight ratio of iron oxide indicates the weight of iron oxide compared to the weight of silicone rubber when the weight of silicone rubber of sheet 110 is 100.

2A and 2B show an inspection connector (Q) according to an embodiment having a sheet containing iron oxide and an inspection connector (O) according to a comparative example having a sheet not containing iron oxide, of an inspection connector This graph shows the change in resistance (R) of the test connector according to the pressing depth. Figure 2a is the result of the experiment at room temperature (room temperature), Figure 2b is the result of the experiment at a temperature of 150 ° C higher than room temperature. Hereinafter, this experimental example will be described with reference to FIGS. 2A and 2B.

The silicone rubber used in this experimental example is an addition reaction type two-liquid liquid silicone rubber. The two-part form of the addition reaction type refers to a mixture of Part A and Part B. Here, Part A means a main material, and Part B means a cured material. For example, the curing material may be platinum.

In this experimental example, the sheet of the inspection connector (Q) according to an embodiment is formed by mixing the above silicon rubber and iron oxide in a weight ratio of 6%, and the sheet of the inspection connector (O) according to the comparative example is It is formed of only silicone rubber. Here, the pressing depth (stroke) is the depth at which the upper surface of the connector for inspection is pressed, and is in mm, and the unit of the value of the measured resistance R is mΩ.

Table 1 below shows the experimental results of FIG. 2A as a table, and Table 2 below shows the experimental results of FIG. 2B as a table.

Stroke
(mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 Q R (mΩ) 28771.0 265.5 130.9 69.2 56.5 47.2 43.1 41.2 39.4 38.5 36.9 O R (mΩ) 671.5 215.4 162.2 116.3 96.0 84.9 80.8 75.3 70.1 68.1 66.7

Stroke
(mm) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2 Q R (mΩ) 72372.5 44180.5 586.8 236.1 175.5 150.4 142.1 135.4 131.7 129.3 124.8 O R (mΩ) 3969.8 2368.5 1105.2 601.2 432.5 398.2 321.9 292.8 279.7 268.9 295.4

Referring to the point in which the pressing depth is in the range of 0.08 to 0.14 mm in the general situation in which the upper side of the connector for inspection by the terminal is pressed, analysis of the experimental results is as follows.

In general, the test connector requires a resistance of 300 mΩ or less. Referring to Figure 2a and Table 1, at room temperature, both the resistance according to the pressing depth of the inspection connector Q for inspection and the connector O for inspection is sufficiently low to satisfy the resistance value required by the specification. Specifically, at room temperature, a resistance of 300 mΩ or less is measured in a range of 0.02 to 0.2 mm in pressing depth of the connector Q for inspection and the connector O for inspection.

However, referring to FIG. 2B and Table 2, when the use environment of the inspection connector is a high temperature environment of 150 ° C, the resistance R of the inspection connector Q under the same pressing depth condition is higher than that at room temperature. Although it was long, it is still measured at a value of 300 mΩ or less, and satisfies the conditions required by the specification. On the other hand, when the use environment of the test connector is a high temperature environment of 150 ° C, the resistance R of the test connector O exceeds 300 mΩ or is out of the range of required specifications or is relatively less than 300 mΩ. It is measured at a value close to 300 mΩ. Through this, it can be seen that the inspection connector Q having a sheet in which iron oxide is mixed has an effect of having excellent conductivity even in a high temperature environment.

3 is a plan view of a specimen used in a thermal expansion and contraction test example of a specimen (TQ) formed by mixing silicon rubber and iron oxide and a specimen (TO) formed only of silicone rubber. The length (dy) of the specimen is 150 mm, the width (dx) of the specimen is 20 mm, and the thickness of the specimen is 2 mm. Hereinafter, this experimental example will be described with reference to FIG. 3 and Table 3 below.

Table 3 below is a table showing the experimental results according to the present experimental example. In this experimental example, the specimen (TQ) is formed by mixing the above silicon rubber and iron oxide in a weight ratio of 6%, and the specimen (TO) is formed only of the above silicon rubber. The silicone rubber forming the specimens (TQ, TO) is the same as the silicone rubber used in the experimental examples of FIGS. 2A and 2B described above.

division D1 (mm) D2 (mm) Shrinkage / expansion rate (%) TQ 126.6030 126.5128 -0.0712 TO 126.7746 126.5752 -0.1572

으로 계산된 값이다. 측정 거리(D1) 대비 측정 거리(D2)가 짧아진다.본 실험예에서 시편(TQ) 및 시편(TO)의 실험 결과를 비교할 때, 시편(TO) 대비 시편(TQ)의 수축율의 절대값이 약 45.3% 수준으로 현저하게 낮아졌음을 알 수 있다. 즉, 산화철을 함유한 시편(TQ)가 산화철을 함유하지 않은 시편(TO) 대비 열 안정성이 향상된 것을 알 수 있다. 검사용 커넥터의 상술한 번인테스트(Burn-In Test)에서 120~170˚C의 환경에 시트(110)가 놓여지기 때문에, 이와 비슷한 180˚C의 온도로 가열 후 식힘 과정에서 수축율이 감소하는 시편(TQ)의 재질은, 검사용 커넥터의 시트의 재질로서 유리하다.In the above, each test result value for the specimen TQ and the specimen TO is an average value of the test results measured through six specimens. Measurement distance (D1) and measurement distance (D2) is a distance (Dm) between the display portion in the specimen of FIG. 3 is measured in mm to the nearest four decimal places. Measurement distance (D1), the specimen (TQ, TO) 150 ° C hot press (Hot Press) for 10 minutes primary curing, 150 ° C oven (oven) for 240 minutes secondary curing and room temperature After cooling, it is the measured value. The measurement distance D2 is a value measured after exposing the specimens (TQ, TO) measuring the distance D1 in an oven at 180 ° C for 360 minutes and cooling to room temperature. The contraction / expansion rate is the change rate (%) of the measurement distance (D2) compared to the measurement distance (D1),

Is the calculated value. The measured distance (D2) is shorter compared to the measured distance (D1) .When comparing the experimental results of the specimen (TQ) and the specimen (TO) in this example, the absolute value of the shrinkage of the specimen (TQ) compared to the specimen (TO) is It can be seen that it was significantly lowered to about 45.3%. That is, it can be seen that the thermal stability of the specimen (TQ) containing iron oxide was improved compared to that of the specimen (TO) containing no iron oxide. Since the sheet 110 is placed in an environment of 120 to 170 ° C in the burn-in test described above for the test connector, a test piece having a shrinkage reduction rate during cooling after heating to a temperature of 180 ° C similar thereto The material of (TQ) is advantageous as the material of the sheet of the inspection connector.

In addition, the iron oxide can improve thermal stability of the sheet 110 by preventing thermal decomposition of Si-O-Si bonds of siloxane of silicone rubber.

4A to 4C are graphs of heating loss results with different contents of iron oxide contained in a sheet, and show weight percent according to temperature. FIG. 4A is a graph showing the result of heating loss of a sheet (A) containing 5.0% by weight of silicon rubber, and FIG. 4B is a graph showing results of loss of heat of a sheet (B) containing 9.0% by weight of silicon rubber. , Figure 4c is a graph showing the result of heating loss of a sheet (C) containing 13.0% by weight of iron oxide compared to the weight of silicone rubber.

5A to 5C are graphs of heat loss results obtained by varying the composition of silicone rubber in a sheet containing 9% by weight of iron oxide compared to silicone rubber, and show weight percent according to temperature. Figure 5a is a graph showing the result of heat loss of a sheet (B1) containing a silicone rubber with a composition according to one embodiment, Figure 5b is a sheet (B2) containing a silicone rubber with a composition according to another embodiment It is a graph of the result of the heat loss, and FIG. 5C is a graph of the result of the heat loss of the sheet B3 including the silicone rubber having the ingredient combination according to another embodiment.

6A is a bar graph showing the 1% weight loss temperature of each experimental group (A, B, C, B1, B2, B3) of FIGS. 4A to 5C. 6B is a bar graph showing the 2% weight loss temperature of each experimental group (A, B, C, B1, B2, B3) of FIGS. 4A to 5C.

Referring to the experimental examples of FIGS. 4A to 5C and the graphs of FIGS. 6A and 6B, it can be seen that the heating loss temperature tends to increase as the weight ratio of iron oxide increases. Specifically, it is confirmed through experiment results that the temperature of 1% weight loss (1% loss) and the temperature of 2% weight loss (2% loss) tend to increase as the weight ratio increases. It is preferable to use the test connector in a temperature environment in which the weight decreases below the predetermined value, since a weight loss of a predetermined value or more may cause a change in the physical properties of the sheet and cause a quality change of the test connector. Specifically, it is preferable to use a connector for inspection in a temperature environment in which weight loss is less than 1%.

7 is a graph measuring viscosity before curing of a mixture of iron oxide and liquid silicone rubber (LSR) according to the content of iron oxide (RW). Here, the viscosity is measured in cSt. (Centi-stroke). The liquid silicone rubber used in the viscosity-related experimental example of FIG. 7 is the same as the silicone rubber used in the experimental examples of FIGS. 2A and 2B described above. Here, the content (RW) means the weight ratio described above.

7, it can be seen that as the iron oxide content (RW) of the mixture of iron oxide and liquid silicone rubber (LSR) increases, the viscosity before curing of the mixture increases. In an embodiment in which the conductive portion 130 is formed by arranging a plurality of conductive particles in the mixture in a vertical position at a specific position by a magnetic field before curing, in order to move the plurality of conductive particles in the mixture before curing, The lower the viscosity of the mixture before curing, the better. When the viscosity of the mixture rises above a predetermined value, it is difficult or impossible to accurately arrange a plurality of conductive particles in a predetermined position using a magnetic field. Therefore, it is preferable that the weight ratio of the iron oxide of the sheet 110 is equal to or less than a predetermined value. The conductive particles may be formed by plating a conductive material on a magnetic core.

In addition, when the weight ratio of the iron oxide in the sheet 110 rises above a predetermined value, there is a problem in that the force received by the device under test when the device under test depresses the connector for inspection when using the connector for inspection increases. Therefore, it is preferable that the weight ratio of the iron oxide of the sheet 110 is equal to or less than a predetermined value.

In FIG. 7, the box LA shows the viscosity range of the silicone rubber for low viscosity generally used for the sheet 110, and the box LA shows the viscosity range of the silicone rubber for high viscosity commonly used for the sheet 110. It shows. In this example, the viscosity before curing of the mixture of 0% weight ratio of iron oxide and liquid silicone rubber is measured to be 263,000 cSt., And when 10% weight ratio of iron oxide is mixed, viscosity is measured to be 402,400 cSt., 20%. When mixing iron oxide in a weight ratio, the viscosity is measured at 473,600 cSt., And when mixing iron oxide in a 30% weight ratio, the viscosity is measured at 645,000 cSt. In addition, when 40% by weight of iron oxide is mixed, viscosity is measured at 870,700cSt., When 50% by weight iron is mixed, viscosity is measured at 1,232,000cSt., When 60% by weight iron is mixed. The viscosity is measured at 2,452,000 cSt.

Referring to the experimental results in FIG. 7, it is preferable that the sheet 110 of the connector 100 for inspection includes 100 parts by weight of liquid silicone rubber and 50 parts by weight or less of iron oxide. Referring to FIG. 7, it can be seen that the viscosity increase ratio rapidly increases compared to the weight increase ratio of iron oxide with respect to 50 parts by weight of iron oxide. When the sheet 110 contains more iron oxide than 50 parts by weight of iron oxide, the mixture before curing The viscosity of the product increases rapidly and the manufacturability decreases rapidly. The sheet 110 includes 50 parts by weight or less of iron oxide, thereby improving heat resistance of the sheet 110, while arranging a plurality of conductive particles magnetizable using a magnetic field in the vertical direction to accurately conduct the conductive portion ( 130).

In order for the plurality of conductive particles to move more smoothly in the mixture before curing, the sheet preferably contains 26 parts by weight or less of the iron oxide. Referring to FIG. 7, when the sheet 110 contains 26 parts by weight or less of iron oxide, the viscosity level of the mixture before curing becomes a viscosity range of the silicone rubber for low viscosity, and is more desirable in the mixture using a magnetic field. It is possible to move a plurality of conductive particles. Through this, a plurality of conductive particles can be more accurately arranged at a predetermined position, and a plurality of conductive particles arranged in the vertical direction can be in close contact with each other.

8A and 8B are cross-sectional photographs showing a state in which conductive parts are formed by arranging conductive particles using a magnetic field in liquid silicon containing iron oxide. Figure 8a is a result of using a mixture of less than 50% 30% by weight of iron oxide and 100% by weight of liquid silicone rubber, Figure 8b is more than 50% 60% by weight of iron oxide and 100% by weight of liquid This is the result of using a mixture of silicone rubber before curing. The liquid silicone rubber used in the viscosity-related experimental example of FIG. 8 is the same as the silicone rubber used in the experimental example of FIG. 7 described above. In this experimental example, a plurality of conductive parts are manufactured according to a pitch design of 0.3 mm.

Referring to Figure 8a, when using a 30% weight ratio of iron oxide and liquid silicone rubber of 50% or less, it is confirmed that a plurality of conductive particles form a conductive portion in the correct position. Referring to FIG. 8B, when using iron oxide and liquid silicone rubber having a weight ratio of more than 50% and 60%, the shape of the conductive portion is not properly formed, and as the conductive particles remain between the plurality of conductive portions to be spaced , It is confirmed that the insulation between the plurality of conductive parts may not be maintained (bad Shrot / Bridge).

On the other hand, it is preferable that the sheet 110 of the connector 100 for inspection includes at least 3 parts by weight of iron oxide.

Hereinafter, a method of manufacturing the connector for inspection will be described. The manufacturing method includes a mixing step of mixing liquid silicone rubber, iron oxide, and a plurality of conductive particles. In the mixing step, the plurality of conductive particles are magnetizable particles. In the mixing step, the liquid silicone rubber and the iron oxide powder are first mixed, and then a plurality of conductive particles may be added to the mixture of the liquid silicone rubber and the iron oxide.

Examples of mixing the liquid silicone rubber and iron oxide powder are as follows. As an example, the particles of iron oxide powder can be selected and added directly to the liquid silicone rubber. As another example, iron oxide may be mixed with a silicone polymer and added to the liquid silicone rubber. As another example, iron oxide may be mixed in a liquid silicone rubber and then milled. For example, iron oxide powder is added to the B Part of the liquid silicone rubber to be mixed in a mixing machine (eg, 3-roll) at least once or less than 20 times, preferably 2 to 15 times, more preferably It can be mixed 3 to 10 times.

In the mixing step, 100 parts by weight of the liquid silicone rubber and 50 parts by weight or less of the iron oxide may be mixed. In the mixing step, 100 parts by weight of the liquid silicone rubber and 26 parts by weight or less of the iron oxide may be mixed. In the mixing step, the iron oxide may be 3 parts by weight or more.

The manufacturing method includes an alignment step in which the plurality of conductive particles form the conductive portion 130 by generating a magnetic field so that the plurality of conductive particles are aligned at predetermined positions after the mixing step. In the alignment step, the plurality of conductive parts extend in the vertical direction and form a conductive part 130 that enables energization in the vertical direction. In the alignment step, the iron oxide may be interposed between the plurality of conductive parts of one conductive part 130 extending in the vertical direction. Specifically, in the manufacturing process, a gap between the plurality of conductive parts may be interposed with particles of the iron oxide powder or liquid silicone rubber. It may serve to improve the heat resistance performance of the connector 100 for the iron oxide inspection interposed between a plurality of conductive particles of the conductive portion 130.

The conductive portion 130 may be formed by aligning liquid silicone rubber (LSR), iron oxide, and a plurality of magnetizable conductive particles in a state where the plurality of conductive particles are aligned at predetermined positions by generating a magnetic field. The sheet 110 may be formed by curing a mixture of liquid silicone rubber and iron oxide.

Although the technical spirit of the present disclosure has been described by the examples shown in the accompanying drawings and some embodiments, the technical spirit and scope of the present disclosure can be understood by those skilled in the art to which the present disclosure pertains. It will be appreciated that various substitutions, modifications and changes can be made in the range. In addition, such substitutions, modifications and variations should be considered within the scope of the appended claims.

10: device under test, 20: test equipment, 100: connector for inspection,
110: sheet, 130: conductive portion

Claims (9)

In the test connector is disposed between the device under test and the test equipment to electrically connect the device under test and the test equipment,
A sheet formed by curing a mixture of liquid silicone rubber and iron oxide; And
It includes a conductive portion extending in the vertical direction in the sheet to enable energization in the vertical direction, and includes a plurality of magnetizable conductive particles arranged in the vertical direction,
The iron oxide powder is interposed between the plurality of conductive particles,
The sheet,
100 parts by weight of the silicone rubber; And
26 parts by weight or less containing 3 parts by weight or more of the iron oxide,
Inspection connector. delete delete delete delete According to claim 1,
The conductive portion is formed by aligning the liquid silicone rubber, the iron oxide, and the plurality of conductive particles in a state where the plurality of conductive particles are aligned at predetermined positions by generating a magnetic field.
Inspection connector. In the manufacturing method of the test connector for arranging between the device under test and the test equipment to electrically connect the device under test and the test equipment,
A mixing step of mixing 100 parts by weight of liquid silicone rubber, 26 parts by weight or less and 3 parts by weight or more of iron oxide and a plurality of magnetizable conductive particles; And
By generating a magnetic field so that the plurality of conductive particles are aligned at predetermined positions, a conductive portion that extends in the vertical direction and enables energization in the vertical direction is formed, and the conductive particles are interposed between the plurality of conductive particles. Including an alignment step in which the powder of iron oxide is interrupted,
Manufacturing method of inspection connector. delete delete

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