KR102085359B1 - Manufacturing method for chamber frame - Google Patents

Abstract

The present invention relates to a chamber frame manufacturing method which enhances a cleaning effect by further strengthening cleaning operation in a manufacturing process. The present invention comprises: a first step of cutting and bending a material; a second step of bonding and finishing the cut and bent material; a third step of manufacturing a product by assembling the finished material, and inspecting the product; a fourth step of performing post-processing operation including at least one of painting, plating, and re-tapping processing on the inspection-finished product; a fifth step of cleaning the post-processed product; and a sixth step of packaging the cleaned product. The fifth step includes at least one of air wash, fine grinding, and IPA cleaning.

Description

Manufacturing method for improved cleaning effect {Manufacturing method for chamber frame}

The present invention relates to a method for manufacturing a chamber frame, and more particularly, to a method for manufacturing a chamber frame that enhances a cleaning effect by further strengthening a cleaning operation in the manufacturing process.

In a series of processes related to the manufacture of displays, including thin films and etching, a series of processes for semiconductor production, and a series of processes for the production of other electronic devices, substrates and devices go through numerous processes, and each process It needs to be carried out sequentially according to the designed specifications. In order to execute each of these processes, a chamber is required. The chamber is provided with a single number or a number depending on the process, and the chamber is generally completed by cutting a frame to a predetermined length, bending a specific area, and assembling.

Such a chamber frame manufacturing method largely includes cutting and bending steps of materials, bonding and finishing steps of materials, assembling and inspection of products, post-processing steps, and packaging steps. And also deteriorates aesthetics, and consequently, deteriorates quality, resulting in deterioration of consumer satisfaction.

Therefore, in the completion state of the chamber frame, the cleaning effect on the chamber frame must be strengthened to improve product quality and enhance consumer reliability.

On the other hand, as a conventional technique for manufacturing a chamber frame, there is a registered patent No. 10-0578552 (May 03, 2006) (hereinafter referred to as the prior art), the prior art welds each member constituting the chamber for heat treatment. In order to prevent the shape deformation of the members in the process, the sealing method is improved, and the manufacturing method of the chamber for heat treatment of LCD glass is proposed.

However, even in the prior art, a method for strengthening the above-mentioned cleaning effect is not provided.

The present invention is intended to solve the above problems, and to improve the cleaning effect by further strengthening the cleaning operation in the manufacturing process, and to improve the product quality and consumer reliability through this.

The present invention for solving the above problems is a first step of cutting and bending the material, a second step of bonding and mapping the cut and bent material, and assembling the mapped material to manufacture a product and inspect it. Step 3, and a fourth step of performing a post-processing operation including at least one of painting, plating, and re-tapping processing on the finished product, and a fifth step of cleaning the post-processed product, and the cleaned product It comprises a sixth step of packaging, the fifth step is characterized in that it comprises at least one of air wash, fine grinding, IPA cleaning.

The present invention having the above steps and features improves the cleaning effect through processes such as air wash, fine grinding, and IPA cleaning, thereby improving product quality and enhancing consumer reliability.

1 is a schematic diagram of each step of the present invention.
2 is a view showing a specific step of the cleaning step.
3 shows a further embodiment of the invention.

The present invention can be applied to a variety of changes and can have a variety of forms, the implementation (態 樣, aspect) (or embodiments) to be described in detail in the text. However, it is not intended to limit the present invention to a specific disclosure form, it should be understood to include all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

The terminology used herein is only used to describe a specific embodiment (sun, 態 樣, aspect) (or embodiment), and is not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as ~ include ~ or ~ consist of ~ are intended to designate the existence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and one or more other features. It should be understood that the existence or addition possibilities of fields or numbers, steps, actions, components, parts or combinations thereof are not excluded in advance.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person skilled in the art to which the present invention pertains. Terms such as those defined in a commonly used dictionary should be interpreted as having meanings consistent with meanings in the context of related technologies, and should not be interpreted as ideal or excessively formal meanings unless explicitly defined in the present application. Does not.

~ 1 ~, ~ 2 ~, etc. described in this specification will be referred to only to distinguish that they are different components, and are not limited to the order in which they are manufactured, and the names in the detailed description and claims of the invention It may not match.

The present invention relates to a method for manufacturing a chamber frame with improved cleaning effect.

Hereinafter, a method of manufacturing a chamber frame according to the present invention (hereinafter, the present method) will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the method includes a first step (S1), which is a cutting and bending step, a second step (S2), a bonding and finishing step, a third step (S3), an assembly and inspection step, and a post-processing step. And a fourth step (S4), a fifth step (S5), which is a washing step, and a sixth step (S6), which is a packaging step.

In detail for each step, the first step (S1), which is a cutting and bending step, is a step of cutting and bending the material, and a frame corresponding to the material is cut into a predetermined length according to a design specification of a chamber to be manufactured. This is a step of bending a specific part.

Since the first step (S1) can be carried out with reference to well-known techniques and general common knowledge of a person skilled in the art, detailed description will be omitted.

Next, the second step (S2), which is the bonding and finishing step, is a step of bonding and mapping the cut and bent material, and the bonding means a bonding operation between frames for chamber production, preferably made through welding, The idea is to trim the welded part through a grinder.

In a specific embodiment, the joining process in the second step is performed through welding, setting the current strength of the welder according to the material characteristics, setting the pressure of argon gas, and maintaining the torch angle between 40 and 50 degrees and welding. It may include steps.

In each step, in the step of setting the current strength of the welding machine according to the material characteristics, the current strength is set according to the material characteristics, and it is necessary to set an appropriate level of current since excessive current causes damage to the frame. As a specific example, in the case of a Sus Pipe, the intensity of the current is preferably 100 to 150 A, and in the case of a general Steel Pipe, the intensity of the current is preferably 150 to 250 A.

In the step of setting the pressure of argon gas, the pressure of argon gas, which is an inert gas that is a means of welding, is appropriately adjusted. When the argon gas is insufficient, the frame is damaged and unnecessary beads are generated. desirable. The preferred pressure of argon gas is 10 to 15Mpa, and argon gas should be replaced below 5Mpa.

And the welding step while maintaining the torch angle of 40 to 50 degrees is a step of substantially performing joining between frames through welding. When the angle of the torch is 40 to 50 degrees, the optimal welding quality can be guaranteed, and the most desirable The angle of the torch is 45 degrees.

On the other hand, when the CO ₂ welding machine is used as the welding machine, the carbon dioxide pressure should be replaced when the pressure of the carbon dioxide is 0.1 Mpa or less.

In addition, in the second step, in the finishing process, a grinder, abrasive stone, wing sandpaper, etc. may be utilized, and are mapped according to the welded bead direction, and are characterized by horizontally aligning the grinder on the bead. The direction of the grinder is a condition that directly affects the finishing quality, and the grinder must be horizontally aligned on the bead, and further, the excessive finishing operation causes damage to the appearance and deterioration of quality, so that the flatness of the outer surface of the welded bead can be secured. You should think only to the minimum extent possible.

Next, the third step (S3), an assembly and inspection step, is a step of assembling the finished material to manufacture a product and inspecting it, assembling the frame according to the chamber design specifications to be produced, and for this, the frame is docked A docking hole is provided through the formation of a tab for the assembly, and the assembly of the camber is assembled using bolts or the like in a state where the docking hole between each frame is fitted.

In addition, the inspection of the condition of assembly and the overall state may include a regular inspection, a diagonal inspection, a main base inspection, a docking hole inspection, and the like after the post-treatment, cleaning, and packaging steps described later, cleaning state, and packaging. Further inspections may be conducted.

Next, the fourth step (S4), which is a post-processing step, is a step of performing a post-processing operation including at least one process of painting, plating, and re-tapping processing on the finished product.

In this fourth step (S4), painting means to perform a painting operation to give a specific color to the outer surface of the frame, and plating is to perform plating on the outer surface of the frame for reasons of strengthening rigidity, preventing corrosion, etc. Meaning, the re-tapping process means that the part that has been tapped by painting or plating is blocked and then drilled again.

In particular, re-tapping may be performed as a work of piercing the clogging of the tab-processed portion due to other factors besides reasons such as painting and plating.

Next, the fifth step (S5), which is a cleaning step, is a step of cleaning the post-processed product. In the present invention, in order to improve the cleaning effect, the fifth step (S5) is air wash (S51), IPA cleaning (S52) ), May include at least one of the fine grinding (S53).

Specifically, the air wash (S51) is a process of removing dust, foreign substances, etc. existing on the outer surface of the chamber frame, and consists of a process of injecting high-pressure air using an air gun, preferably the upper part of the chamber frame, It is performed in the order of inner and lower. This is to prevent foreign matter, dust, etc. from the upper part from falling and sticking to the lower part. In addition, it is preferable that the air wash (S52) necessarily includes an air washing operation for the inside of the tab, because by-products (eg, powder) generated during the tap operation must be removed through the air wash.

In addition, IPA cleaning (S52) is a cleaning operation using IPA (isopropyl alcohol), which refers to a task of wiping the outer surface of the frame by applying IPA to a woolen fabric such as a cloth. The IPA cleaning (S52) is also preferably made in the order of the upper, inner, and lower portions of the chamber frame, which is also to prevent foreign matters and the like from being transferred to the lower portion.

In addition, the fine grinding (S53) is an operation to remove foreign substances on the surface of the product using a physical friction force, and refers to an operation of removing foreign substances existing on the surface of the chamber frame with sandpaper. Particularly, in the process of fine grinding (S53), since debris is generated by friction, it is preferable to follow IPA cleaning (S52) after fine grinding (S53).

Next, the sixth step (S6), which is a packaging step, is a step of packaging the cleaned product, and may include wrapping the outside of the frame with a cover material such as vinyl, wrap, etc., and a buffer material (preferably for product protection). Can be added.

Specifically, in the sixth step (S6), during the packaging operation, an expiration number label may be attached to an individual chamber frame, and it is preferable to first wrap the product and then wrap it using plastic wrap.

In particular, when wrapping the wrap, it is preferable to wrap it up from the bottom of the product to the top, and wrap the two chamber frames in one set, so that a buffer material can be inserted therebetween.

In addition, after packaging is completed, it is desirable to additionally use external packaging materials such as blue wrap to additionally wrap at the top, middle, and bottom to minimize packaging damage during delivery movement.

In addition, it is desirable to avoid the packaging operation in the rain as much as possible, but when it is inevitable to perform the packaging operation in the rain, it is preferable to secure the waterproofness by enclosing the above-mentioned outer packaging material all over the product.

On the other hand, in the present invention, the chamber frame needs to be protected during transportation, and the present invention intends to present a case in which the chamber frame is accommodated so as to enhance the protection of the chamber frame. Such a case is particularly provided with a rigid material for enhanced protection, and is characterized in that a protective film is provided on the outer surface.

Specifically, as shown in FIG. 3, the present invention includes a process of receiving the product in which the sixth step (S6), which is the packaging step, is cleaned, and the case further includes a protective film G provided on the outer surface. However, the protective film (G) is in contact with the outer surface of the casing (G1), the heating layer (G2) provided on the upper portion of the penetration layer (G1) and the protective layer (G3) provided on the heating layer (G2) Characterized in that it may include.

This protective film (G) is not only excellent in its own buffering and waterproofing effect, but in particular, when electricity is applied to the heating layer (G2), it heats up to about 300 ℃ and melts the permeable layer (G1), thereby preventing micropores or fine bends on the outer surface. By being sintered after filling, it not only has an improved bonding strength, but also prevents a lifting phenomenon, thereby providing more robust protection and waterproofing (in the attached drawings, micropores and micro bends are exaggerated)

In a specific embodiment, the penetration layer (G1) comprises 20 parts by weight of a polyvinyl acetate-based low shrinkage agent and 50 parts by weight of an adhesive comprising a hydrogenated Rosentester resin and polybtenene, compared to 100 parts by weight of polyethylene.

For each composition, polyethylene is a component that is fractionated from naphtha of petroleum, and is adopted as a thermoplastic resin, having excellent water resistance and a melting point of about 130 ° C. Each composition of the penetration layer (G1) is determined based on 100 parts by weight of this polyethylene.

In addition, the polyvinyl acetate-based low-shrinkage agent is added as a shrinkage-preventing agent to prevent the phenomenon of lifting due to excessive shrinkage during sintering of the penetration layer (G1). It is preferable that the polyvinyl acetate-based low-shrinkage agent contains 20 parts by weight, and if it is less than the above range, the effect of preventing shrinkage is insufficient, and when it exceeds the above range, there is a problem that sintering is poor.

In addition, the adhesive is added to enhance adhesion to micropores, micro bends and the like by imparting tack to the permeable layer (G1), in particular, it includes a hydrogenated ester of Resin and polybutene. . Hydrogenated Rosenster provides initial adhesiveness, contributes to heat resistance after sintering, and polybutene gives adhesive properties. It is preferred that the pressure-sensitive adhesive includes 50 parts by weight, and if it is less than the above-mentioned range, the adhesive force decreases, and if it exceeds the above-mentioned range, there is a problem that the adhesion after sintering rapidly decreases.

The penetration layer (G1) is formed by stirring and then sintering each composition into a polyethylene solution under a temperature of 130 ° C. or higher at which polyethylene can be melted.

Next, the heating layer (G2) contains 200 parts by weight of silver, 200 parts by weight of silver, and 200 parts by weight of a functional binder comprising titanium dioxide and molybdenum disulfide. It characterized in that the heating layer (G2) is applied to the top of the penetration layer (G1) in the form of a paste.

For each composition, ruthenium dioxide is a platinum group transition metal, and is provided in a powder form to form a paste-like heating layer (G2). When the ruthenium dioxide is excessively used, it is preferable not to exceed 20% by weight compared to the total composition of the heating layer (G2) because the heating temperature is too high and can damage the protective layer (G3) described later. Each composition of the heating layer (G2) is determined based on 100 parts by weight of this ruthenium dioxide.

And silver (Ag), like ruthenium dioxide, is a transition metal, and is also provided in a powder form to form a paste-like heating layer (G2). It is preferable that the silver contains 200 parts by weight, and when used below the above range, it is difficult for the heating layer G2 to have a sufficiently low resistance value for generating current, and when used in excess of the above range, the heating temperature is excessive. There is.

In addition, a functional binder is added for the combination of ruthenium dioxide and silver, and additionally facilitates dispersion between components, and also shortens the exothermic saturation time and provides a sustained exothermic effect. Functional binders include titanium dioxide and molybdenum disulfide. Titanium dioxide contributes to the sustained exothermic effect. Particularly, molybdenum disulfide is a compound composed of a molar ratio of molybdenum and silicon of 1: 2, which has a high melting point and has a high melting point (G2). It prevents the heating layer (G2) from being melted during the heating, and forms silica under high temperature to shorten the heating effect and significantly shorten the heating saturation time. It is preferable that such a functional binder contains 200 parts by weight, but when used below the above range, the effect is insufficient, and when used above the above range, there is a problem in that the electric flow during high temperature heat generation becomes unstable.

The heating layer (G2) is ethylene glycol (terpene), butyl carbitol, ethyl cellosolve, ethylbenzene, isopropylbenzene, methyl ethyl ketone, dioxane, acetone, cyclohexanone, 3-methoxybutyl acetate, etc. After mixing the above composition in an organic solvent, it is prepared through a kneading process.

Next, the protective layer (G3) includes 300 parts by weight of a filler containing calcium carbonate and bentonite, 100 parts by weight of naphthene oil, and 50 parts by weight of a heat-resistant agent comprising barium aluminate and zirconia, compared to 100 parts by weight of butyl synthetic rubber. do.

For each composition, butyl synthetic rubber was employed in that it has adequate cold resistance and heat resistance, relatively high elasticity, and excellent heat insulation effect. The protective layer (G3) is determined based on 100 parts by weight of butyl synthetic rubber.

In addition, the filler includes calcium carbonate and bentonite. Calcium carbonate is used to add water resistance, and bentonite has a relatively good cation exchange ability, so that it can be firmly bonded, and when a crack occurs in the protective layer (G3), it absorbs moisture. It has the effect of preventing leakage while expanding through. In particular, all of the fillers are composed of a composition having excellent bonding strength, so that the compatibility between the protective layer (G3) and the penetration layer (G1) can be excellent. The amount of such a filler is not particularly limited, but it is preferable that 300 parts by weight is included in terms of increasing bonding strength and economic efficiency.

And naphthene oil was added as a plasticizer, was adopted in that it has little evaporation loss at high temperature, excellent cold resistance, and can add an elasticity retention effect. The naphthene oil is preferably included in 100 parts by weight, when used below the above range, the flexibility and constructability decreases, and when used above the above range, the viscosity is excessively lowered when the heating layer (G2) is operated. Flows down and also causes a crying phenomenon of the protective layer G3.

In addition, the heat-resistant agent is added to add heat-resistant characteristics to the heat-resistant layer G2 so that the protective layer G3 does not melt, and in particular, allows the protective layer G3 to withstand high temperatures of 300 ° C or higher. The heat-resistant agent includes barium aluminate and zirconia, barum aluminate is added as a bonding material that combines zirconia with other compositions, and zirconia has a melting point of about 2700 ° C, which is excellent in resistance to rapid temperature changes, and at least 1000 It is added in order to be able to withstand the protective layer (G3) through low thermal conductivity, heat resistance, and fire resistance even at high temperatures above ℃. In particular, the protective layer (G3) has a plurality of internal pores by the heat-resistant agent, and these pores lower the thermal conductivity and add heat resistance. It is preferred that the heat-resistant agent includes 50 parts by weight, and when used outside the above range, a phenomenon in which the heat-resistant properties are deteriorated rather appears.

The protective layer (G3) is prepared by mixing each composition with naphthene oil in a powder form, and may further include a predetermined functional additive as necessary.

As an example of the construction of the protective film (G), a penetration layer (G1) is laminated on a test block in which micro-pores and micro-curves are formed, a heating layer (G2) is applied thereon, and a protective layer is applied thereon. After (G3) was stacked, a protective film (G) was formed by applying electricity to the heating layer (G2). As a result of observing the cross section by cutting the test block on which the protective film (G) was formed, it was confirmed that the penetration layer (G1) penetrated into the micropore and the microcurvature and cured. In addition, as a result of performing the cross-cut test, scratching test, and internal invasion test through water spray on the formed protective film (G), the peel rate was less than 0.5%, the breakage rate was less than 3%, and the inside No invasion was detected.

The present invention described above with reference to the accompanying drawings can be variously modified and changed by a person skilled in the art, and such modifications and variations should be interpreted as being included in the scope of the present invention.

Claims (4)

A first step of cutting and bending the material frame;
A second step of bonding and mapping the cut and bent material;
A third step of assembling the finished material to manufacture a product and inspecting it;
A fourth step of performing a post-processing operation including at least one of painting, plating, and re-tapping processing on the finished product;
A fifth step of cleaning the post-treated products; And
A sixth step of packaging the cleaned product;
Including,
The bonding process in the second step is made through welding,
The joining process includes setting the current strength of the welding machine according to the material characteristics, setting the pressure of argon gas, and welding while maintaining the torch angle between 40 and 50 degrees,
The mapping process of the second step is mapped according to the welded bead direction, and the grinder is horizontally mapped onto the bead,
The frame is provided with a docking hole through the formation of a tab for docking, and the assembly of the chamber frame in the third step is performed by utilizing a bolt in a state where the docking hole between each frame is fitted,
The inspection in the third step includes the inference inspection, diagonal inspection, main base inspection and docking hole inspection,
The fifth step includes air wash, fine grinding and IPA cleaning,
The air wash (S51) includes a process in which high pressure air is injected using an air gun,
The air wash is performed in the order of the upper, inner and lower parts of the chamber frame,
The air wash is performed outside the chamber frame and inside the tab,
In the fifth step, the fine grinding includes a process of removing foreign substances on the surface of the product with sandpaper, and the IPA cleaning includes removing the foreign substances with a cloth moistened with IPA alcohol,
IPA cleaning (S52) is performed after the fine grinding (S53),
The sixth step includes receiving the cleaned product in the case,
In the sixth step, the expiration number label is attached to the individual chamber frame, and the upper and lower parts of the product are first subjected to plastic packaging and then wrapped using a wrap.
When wrapping the wrap, wrap it up from the bottom of the product to the top, and wrap the two chamber frames that have been packaged into one set to insert a buffer between them.
After the packaging is completed, additional packaging such as blue wrap is used to additionally wrap the top, middle, and bottom.
The case further includes a protective film (G) provided on the outer surface, the protective film (G) is a penetrating layer (G1) in contact with the outer surface of the case, a heating layer (G2) provided on top of the penetrating layer (G1) And a protective layer G3 provided on the heating layer G2,
The penetration layer (G1), compared to 100 parts by weight of polyethylene, 20 parts by weight of a polyvinyl acetate-based low-shrinkage agent and 50 parts by weight of a pressure-sensitive adhesive comprising a hydrogenated rosenester resin and polybutene,
When electricity is applied to the heating layer (G2), it is heated to 300 ° C. and the penetration layer (G1) is melted and then sintered after filling the outer surface with fine pores or fine bends.
The heating layer (G2) comprises 200 parts by weight of the functional binder comprising 200 parts by weight of silver and titanium dioxide and molybdenum disulfide, compared to 100 parts by weight of ruthenium dioxide,
The heating layer (G2) is one of ethylene glycol (terpene), butyl carbitol, ethyl cellosolve, ethylbenzene, isopropylbenzene, methyl ethyl ketone, dioxane, acetone, cyclohexanone or 3-methoxybutyl acetate. It is prepared by mixing the ruthenium dioxide, the silver and the functional binder in an organic solvent composed of eggplant and then kneading,
The protective layer (G3) comprises 100 parts by weight of butyl synthetic rubber, 300 parts by weight of a filler comprising calcium carbonate and bentonite, 100 parts by weight of naphthenic oil, and 50 parts by weight of a heat-resistant agent comprising barium aluminate and zirconia,
The protective layer (G3) is a method for manufacturing a chamber frame, characterized in that the butyl synthetic rubber, filler and heat-resistant agent are prepared in a powder form to be mixed with naphthenic oil. delete delete delete

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