KR102082685B1 - Apparatus for Production of Metal Alloy and Method for Production of Metal alloy using the same - Google Patents

Abstract

The present invention relates to a manufacturing apparatus and a manufacturing method of an alloy powder, the manufacturing apparatus of the present invention, a solid metal material is placed, the evaporation chamber is provided with an evaporation mechanism for evaporating the metal is evaporated metal material in a vacuum atmosphere; A metal evaporation mechanism provided in the evaporation chamber for evaporating the solid metal in the gas phase; A reaction chamber provided adjacent to the evaporation chamber and in which a crystal in which an alloy crystal, which becomes a material of an alloy powder, grows under a vacuum atmosphere, occurs; Made of ceramic or metal, having a surface circulating between the evaporation chamber and the reaction chamber, particles of gaseous metal evaporated in the evaporation chamber are deposited on the surface, and the surface on which the particles of metal are deposited enters the reaction chamber An alloy forming member in which crystals of the alloy are grown to form a thin film of the alloy; A peeling mechanism for peeling the alloy from the thin film of the alloy formed on the surface of the alloy forming member; And a collecting mechanism for collecting the powder of the alloy peeled from the alloy forming member by the peeling mechanism.

Description

Apparatus for Production of Metal Alloy and Method for Production of Metal alloy using the same}

TECHNICAL FIELD This invention relates to the manufacturing apparatus and manufacturing method of an alloy powder. Specifically, It is related with the manufacturing method of the alloy powder used as materials, such as a magnet.

High performance and small size and light weight have been achieved for home appliances, information devices, and various electronic products. Accordingly, magnets used in such products require high magnetic flux density and coercive force.

As a material of a magnet having high magnetic flux density and high coercive force, an alloy based on iron, in particular, an alloy of rare earth metal and iron is used, which sinters, magnetizes and forms alloy powder or distributes powder of alloy to resin and cures resin. The molded product is used.

As disclosed in Korean Patent Publication No. 10-0535946, the alloy powder, which is a material of the magnet, is melted and agitated in a molten metal material, which is a component of the alloy, and cooled in the form of an ingot or a strip, followed by a cooled solid phase. It is prepared by grinding the alloy of.

It is preferable that the alloy powder used as the material of the magnet has a uniform crystal and a uniform particle diameter, and in particular, an alloy powder having a particle size in nano units may be required.

In order to prepare the alloy powder, first, the component metal constituting the alloy must be melted and stirred in the molten metal or reacted with other necessary elements, and the molten alloy is cooled and manufactured in an ingot or strip form. During the process, the temperature must be adjusted to achieve the necessary crystals of the alloy.

In addition, after the ingot or strip of the alloy is formed to form a powder through a process such as pulverized and powdered or melted and sprayed again.

Putting ingots or chips of constituent metals into the melt, heating them, and stirring them to achieve a uniform distribution entails a very demanding process and makes the installation huge, requiring additional equipment to cool the melt into ingots or strips. do.

In addition, pulverizing the ingot or strip of the alloy to make the powder for magnet production requires additional equipment and processing costs, and it is very difficult and considerable to obtain a nanoparticle powder of uniform particle size by conventional grinding or spraying. It is accompanied by cost.

For this reason, alloy powder, which is a material of magnets having high coercive force and magnetic flux density, becomes very expensive, and there is a problem that it is difficult to manufacture without having various facilities.

Republic of Korea Patent Publication No. 10-0535946

The present invention is to provide an apparatus and a manufacturing method for the alloy powder, specifically, to obtain the alloy powder from the component metal in a single facility without having to equip each of the necessary equipment for each process, such as melting and forming and grinding the metal It is an object of the present invention to provide a production apparatus and a method for producing alloy powder in such a production apparatus.

In particular, it is an object of the present invention to provide a manufacturing apparatus and a manufacturing method suitable for producing nano-scale alloy powders used for the production of high performance magnets.

It is also an object of the present invention to provide a manufacturing apparatus and a method of manufacturing a alloy powder having crystals suitable for magnet production, with a relatively small process and relatively easy process control.

The above-mentioned problem of this invention is achieved by the manufacturing apparatus of the alloy powder which concerns on this invention, and the manufacturing method using this manufacturing apparatus.

An apparatus for producing an alloy powder according to the present invention includes: an evaporation chamber in which a solid metal material is placed, and an evaporation mechanism for evaporating a metal is provided to evaporate the metal material under a vacuum atmosphere; A metal evaporation mechanism provided in the evaporation chamber for evaporating the solid metal in the gas phase; A reaction chamber provided adjacent to the evaporation chamber and in which a crystal in which an alloy crystal, which becomes a material of an alloy powder, grows under a vacuum atmosphere, occurs; Made of ceramic or metal, having a surface circulating between the evaporation chamber and the reaction chamber, particles of the gaseous metal evaporated in the evaporation chamber are deposited on the surface, and the surface on which the particles of metal are deposited enters the reaction chamber An alloy forming member in which crystals of the alloy are grown to form a thin film of the alloy; A peeling mechanism for peeling the alloy from the thin film of the alloy formed on the surface of the alloy forming member; And a collecting mechanism for collecting the powder of the alloy peeled from the alloy forming member by the peeling mechanism.

In the manufacturing apparatus of such a structure, an alloy powder is manufactured through the following process.

First, a metal material is loaded into the metal evaporation mechanism in the evaporation chamber. Subsequently, the evaporation chamber and the reaction chamber are evacuated under reduced pressure, and then the metal material loaded in the evaporation chamber is evaporated by induction heating, resistive heating, or sputtering.

At the same time, the surface of the alloy forming member is cyclically driven between the evaporation chamber and the reaction chamber, and the gaseous metal vaporized in the evaporation chamber is deposited on the surface of the alloy forming member.

In the reaction chamber, a precursor of an element which reacts with the metal deposited on the surface of the alloy forming member to form an alloy is supplied in the gas phase, and the element reacts with the metal deposited on the surface of the alloy forming member to form an alloy crystal. .

As the alloy forming member is cyclically driven between the evaporation chamber and the reaction chamber, the deposition step and the alloy thin film growth step are repeated on the surface of the alloy forming member to grow crystals of the alloy, and when the alloy thin film having a predetermined thickness is formed, the peeling mechanism And the thin film of alloy is peeled off from the surface of the alloy forming member by the peeling mechanism.

The alloy to be peeled off is collected by a collecting mechanism in the form of powder or flakes, and the captured alloy is a powder having a particle size required by a separate grinding device.

The present invention as described above is an apparatus for producing an alloy powder and a method for producing an alloy powder using the production apparatus, apparatus for melting and stirring the metals of the alloy, the apparatus for cooling the alloy to form ingots or strips and alloys It is possible to obtain flakes and powders of alloys with a simple device without separately providing a device for grinding.

In addition, according to the present invention, the alloy powder or flakes to be produced has a very thin thickness of nano-units, it is possible to obtain nano-alloy powders used for the production of high-performance magnets by a simple small scale equipment.

1 is a view showing a schematic configuration of an apparatus for producing an alloy powder according to an embodiment of the present invention.

Hereinafter, the structure of the manufacturing apparatus of the alloy powder which concerns on the Example of this invention as specific content for implementing this invention is demonstrated, and the method of manufacturing an alloy powder using such a manufacturing apparatus is demonstrated.

First, with reference to FIG. 1, the structure of the manufacturing apparatus of the alloy powder which concerns on the Example of this invention is demonstrated.

The manufacturing apparatus of this embodiment is provided with a chamber housing 10 that seals the internal space from the outside, and the internal space of the chamber housing 10 is placed by a partition wall 11 so that a solid metal material is placed in a vacuum atmosphere. It is separated into an evaporation chamber 13 in which a metal material is evaporated under a reaction chamber 14 in which crystals of an alloy which becomes a material of an alloy powder grow under vacuum atmosphere.

In the chamber housing 10, a hollow cylinder 30 is arranged as an alloy forming member. The cylinder 30 is configured to rotate about the rotating shaft 31, and the surface 32 is composed of a single crystal magnesium oxide (MgO), the metal is deposited thereon and various reactions occur, the crystal of the alloy grows. To form a thin film.

On the other hand, although not shown in the figure, a door (not shown) for charging a metal material is provided on the evaporation chamber 13 side in the chamber housing 10.

In the present embodiment, the alloy forming member is constituted by a cylinder, but the alloy forming member is not limited to a cylinder but may be configured to be in a strip form in which a metal is deposited and growth of alloy crystals is formed on one surface.

In addition, in this embodiment, the single crystal magnesium oxide forms the surface of the cylinder, but the entire cylinder may be made of magnesium oxide, or may be composed of other single crystal ceramics, polycrystalline ceramics, amorphous ceramics, or metals in addition to magnesium oxide.

The cylinder 30 has a rotating shaft 31 disposed in the reaction chamber 14, and the evaporation chamber 13 and the reaction chamber 14 are separated by the partition wall 11, but the partition wall 11 is an evaporation chamber ( 13) and the reaction chamber 14 are not completely separated from each other, but an opening is formed so that a part of the surface 32 of the cylinder is exposed to the evaporation chamber 13 through the opening. The surface 32 of the cylinder exposed to the evaporation chamber 13 is a deposition region 33 of metal, and the surface 32 of the cylinder exposed to the reaction chamber 14 is a crystal growth in which alloy crystals grow to form a thin film. Region 34.

The slits 15 and 16 are formed between the partition 11 and the surface 32 of the cylinder without contacting each other between the partition 11 and the surface 32 of the cylinder 30.

On the other hand, although not shown in the figure, the cylinder 30 is provided with a heater (not shown) that heats the surface 32 of the cylinder by electric power supplied from the outside. The surface 32 of the cylinder is heated by the heater, and the heating temperature may be adjusted according to the type of metal to be deposited on the surface 32 of the cylinder and the alloy to be manufactured or the type of reaction in the reaction chamber 14. .

On the lower side of the evaporation chamber 13, a crucible 21 and an induction heating coil 22 are provided as a metal evaporation mechanism 20 for evaporating solid metal in the gas phase.

The metal material 1 to be heated and evaporated by the metal evaporation mechanism 20 is placed in the crucible 21 and the metal material 1 of the induction heating coil 22 is evaporated by induction heating.

In addition, although only one induction heating coil is illustrated in FIG. 1, when there are a plurality of metal components constituting the alloy, a crucible and an induction heating coil on which the material of each metal is placed may be configured to evaporate each metal material. .

In the present embodiment, an induction heating coil is used as a mechanism for evaporating the metal. In addition, the metal material can also be evaporated by resistive heating or sputtering.

Further, in this embodiment, the metal material is loaded into the metal evaporation mechanism in the form of an ingot, but may be supplied in the form of chips or powder.

The evaporation chamber 13 and the reaction chamber 14 should be in a vacuum atmosphere during operation. In the chamber housing 10, the lower part surrounding the evaporation chamber 13 and the upper part surrounding the reaction chamber 14 are evacuated, respectively. The mechanisms 40 and 50 are provided.

The vacuum exhaust mechanisms 40 and 50 are respectively coupled to the chamber housing 10 to communicate with the interior of the first tubes 41 and 51, the vacuum pumps 42 and 52 coupled to the first tube, and the exhaust gas to the outside. It comprises a second tube (43, 53) for discharging, the vacuum pump (42, 52) is operated to exhaust the evaporation chamber 13 and the reaction chamber 14 to form a vacuum atmosphere.

In the chamber housing 10 surrounding the reaction chamber 14, a gas supply mechanism 60 for supplying a reaction gas from the outside into the reaction chamber 14 is disposed.

The gas supply mechanism 60 is comprised from the nozzle 63 which injects gas into the reaction chamber 14, the valve 62, and the gas supply source 61. As shown in FIG. Although only one nozzle, valve and gas source are shown in the figure, a plurality of valves and nozzles respectively supplying a plurality of gas sources having different kinds of gases and gases from each gas source to the reaction chamber 14, respectively. This can be arranged.

The gas supply mechanism 60 may supply a gas that makes the reaction chamber 14 in an inert atmosphere, and may supply a precursor of a component element forming a alloy by reacting with a metal deposited on the surface 32 of the cylinder to form a gas. .

On the other hand, although not shown in the internal structure, the electrode that is supplied with power from an external power source (not shown) is disposed inside the nozzle 63 of the gas supply mechanism, and is supplied to the reaction chamber 14 through the nozzle 63 The gas can be converted into plasma while passing between the electrodes.

When the gas as a precursor of the element is supplied through the nozzle 63, an electrode (not shown) operates to dissociate the gas supplied to the reaction chamber 14 to react with the metal deposited on the surface 32 of the cylinder. To make it possible.

On the other hand, in the state shown in FIG. 1, the cylinder 30 rotates counterclockwise, and the gas supply mechanism 60 disposed on the reaction chamber 14 side has the surface 32 of the cylinder from the evaporation chamber 13. It is disposed opposite the position immediately after moving to the reaction chamber 14, so that the surface of the cylinder at the position immediately after moving the surface 32 of the metal-deposited cylinder from the evaporation chamber 13 to the reaction chamber 14 The metal deposited at 32 forms an atmosphere in which the metal can be directly reacted with the gas supplied from the gas supply mechanism 60 in the reaction chamber 14.

On the other hand, the scraper 80 is disposed as a peeling mechanism on the opposite side of the gas supply mechanism, that is, at the position where the surface 32 of the cylinder returns from the reaction chamber 14 to the evaporation chamber 13.

The scraper 80 is a plurality of blades 81 each extending in the radial direction are arranged spaced apart in the circumferential direction, the front end of each blade 81 is rotated while the scraper 80 rotates (32) ), A thin film of alloy formed and adhered to the cylinder surface 32 is peeled off.

The alloy thin film is formed into a thin thin film of several hundred nm units, and is crushed while falling from the cylinder surface 32 by contact with the tip of the blade 81 to fall into a powdered state.

On the other hand, although not shown in the figure, the scraper 80 is configured to be movable between a position where the tip of the blade 81 contacts the surface 32 of the cylinder and spaced from each other, thereby peeling off the thin film of the alloy. In operation it moves to the contacting position and is in the spaced apart position while the alloy thin film is growing on the cylinder surface 32.

Below the scraper 80, there is provided a guide tube 91 which receives the alloy flakes or alloy powder that peels off from the cylinder surface 32 and is discharged to the outside.

The guide tube 91 extends over the entire width of the cylinder 30 and opens upwards under the blade 81 of the scraper, and becomes tubular on the side adjacent to the chamber housing 10 to penetrate the chamber housing to the outside. The collecting box 92 is disposed at the end of the guide tube 91 so that the thin film of the alloy powder or the alloy thin film that falls through the guide tube 92 and exits to the outside is accommodated in the collecting box 92. The guide tube 91 and the collection box 92 constitute the collection mechanism 90.

On the other hand, although the scraper 80 provided with the blade which removes the alloy thin film in contact with the surface 32 of the cylinder as the peeling mechanism in this embodiment is used, a commercially available laser cleaner can be used as the peeling mechanism.

The laser cleaner applies energy to a portion to which the laser is irradiated by irradiating a laser of constant intensity and width. Laser cleaners are attached to the surface of any product by the energy applied by the laser when other materials or contaminants and other materials or contaminants adhere to the surface of the product. Allow other materials to peel off the surface of the product.

Such a laser cleaner is suitable for peeling from the surface of the cylinder while applying energy to an alloy thin film deposited and grown on the surface 32 of the cylinder formed of ceramic and grinding it into powder.

The method of forming an alloy powder using the manufacturing apparatus which has the above structures is demonstrated.

A rare earth metal and an alloy of iron or nitrogen are combined, and an alloy having a composition formula of SmFe ₁₂ or SmFe ₁₂ Nx becomes a material of a magnet having a very high coercive force and magnetic flux density, of which SmFe is an alloy of samarium, iron and nitrogen. The manufacturing method of ₁₂ Nx is demonstrated.

In the manufacturing apparatus shown in FIG. 1, two metal evaporation mechanisms 20 are provided which respectively heat and evaporate samarium and iron, and open the door of the chamber housing 10 and each of the crucibles 21 has high purity. After loading the samarium (Sm) and iron to be placed between the induction heating coil 22, the door is closed.

In the state where the chamber housing 10 is sealed, the vacuum exhaust mechanisms 40 and 50 are operated to depressurize the evaporation chamber 13 and the reaction chamber 14 to 10 ^-5 Torr and 10 ^-3 Torr, respectively, to vacuum them. While forming an atmosphere, nitrogen is supplied to the reaction chamber 14 through the gas supply mechanism 60.

On the other hand, slits 15 and 16 are formed between the evaporation chamber 13 and the reaction chamber 14 and are not completely isolated from each other, but the slits 15 and 16 are partition walls 11 and the cylinder surface 32. It has a very narrow width that ensures no interference or contact between the two chambers so that the vacuum levels of both chambers can be maintained differently despite leakage through these slits.

The cylinder 30 is heated with the formation of a vacuum to keep the temperature of the surface 32 at, for example, 800 ° C. or higher and lower depending on the type of alloy to be formed. The surface 32 of the cylinder may be left at room temperature, but when the surface temperature of the cylinder is low, crystallization of the metal atoms deposited on the surface 32 of the cylinder proceeds too late to properly disperse the alloys of samarium and iron. It may not be done properly or the reaction with nitrogen atoms in the reaction chamber may not be performed properly.

After the vacuum atmosphere is formed in the chamber housing 10 and the temperature of the cylinder surface 32 is increased, the induction heating coil 22 of the metal evaporation mechanism 20 is supplied with electric power to heat the samarium and the iron placed therein. To evaporate.

When the metal materials are sufficiently heated to start evaporation, the gas supply mechanism 60 is operated while rotating the cylinder 30 to supply nitrogen gas from the nozzle 63 to the reaction chamber 14.

In the evaporation chamber 13, gaseous samarium and iron evaporated by heating are attached to the surface 31 of the cylinder, and the cylinder 30 rotates so that the surface 32 of the cylinder on which the samarium and iron are deposited is the reaction chamber 14. Go to).

Nitrogen gas (N ₂ ) passing through the nozzle (63) of the gas supply mechanism is dissociated to an atomic state by supplying plasma to the reaction chamber (14). The dissociated atomic nitrogen is highly reactive and combines with samarium and iron deposited on the cylinder surface 32 to form alloy crystals.

As the cylinder 30 rotates, samarium and iron vaporized from the evaporation chamber 13 are deposited in the deposition region 33 of the cylinder surface 32, and crystals of the alloy grow in the reaction region 34, and the cylinder surface As the 32 passes through the evaporation region 33 and the reaction region 33 repeatedly, crystals of the alloy grow to form a thin film.

When the time that the thin film grows to the required thickness elapses, the operation of the metal evaporation mechanism 20 is stopped, the scraper 80 moves to the contact position and rotates so that the blade 81 contacts the surface of the cylinder 30. The alloy thin film on the surface 32 is peeled off.

At this time, the gas supply mechanism 60 stops supplying power to the electrode of the nozzle 63 and stops plasma formation and continues to supply nitrogen gas to form an inert atmosphere in which the cylinder surface 32 does not oxidize the thin film. It is also preferable to supply an inert gas to the collection box 92 to prevent oxidation of the alloy.

The flakes and powder of the alloy peeled off by the scraper 80 fall to the lower guide tube 91 and are collected in the collecting box 92, and the operation of the apparatus for producing alloy powder of this embodiment is finished.

The alloy powder or the flakes of the alloy collected in the collecting box 92 is subjected to an additional grinding process to produce an alloy powder having a particle size to be obtained. Since the flakes of the alloy have a thickness of microns or nano units, even a small capacity grinding device is pulverized into a powder having a desired particle size.

On the other hand, in the present embodiment has been described as producing an alloy powder of samarium, iron and nitrogen, other rare earth metals such as neodymium (Nd) or gadolinium (Gd) other than samarium and iron and the like by the manufacturing apparatus and method described above An alloy of nitrogen may be prepared, and titanium (Ti), vanadium (V), manganese (Mn), cobalt (Co), molybdenum (Mo), or silicon (Si), which are substituted elements, may be used to stabilize the crystal phase of the alloy. Can be used additionally.

In addition, in this embodiment, although nitrogen gas is supplied to the reaction chamber 14 and nitrogen is dissociated by the plasma to react with metals, highly reactive ammonia gas may be supplied as a source of nitrogen.

On the other hand, in the case of producing a powder of an alloy of samarium and iron (SmF ₁₂ ) that is not an alloy of samarium, iron and nitrogen, the evaporation chamber 13 and the reaction chamber 14 are supplied without supplying nitrogen gas or other inert gas. All can be produced with alloys of samarium and iron in a vacuum atmosphere of 10 ^-5 Torr.

In the present embodiment, the alloy powder of samarium, iron and nitrogen has been described. However, SmCo ₅ or Sm ₂ Co ₁₇ , which is an alloy of samarium and cobalt (Co), may be produced by the above-described apparatus and method.

Next, an alloy powder of rare earth metal, iron and boron (B) may be manufactured in the manufacturing apparatus according to the embodiment of the present invention.

Rare earth metals used as components of magnet alloys include neodymium (Nd), samarium (Sm), gadolinium (Gd), dysprosium (Dy) holmium (Ho) and terbium (Tb), and one of these rare earth metals and iron And the alloy powder of boron can be produced through the apparatus for producing an alloy powder shown in FIG. 1 and the manufacturing method described above.

For example, an alloy having a composition of Nd ₂ Fe ₁₄ B may be prepared as an alloy of neodium (Nd) and iron and boron, which is then evaporated by the metal evaporation mechanism 20 to the cylinder surface 32. The boron hydrate (B ₂ H ₆ ) or boron trichloride (BCl ₃ ) called 'diborane' is supplied to the reaction chamber 14 through the gas supply mechanism 60 to the reaction chamber 14 to the surface of the cylinder. The deposited neodium, iron and boron combine to form alloy crystals.

In the production apparatus and the production method of the present embodiment, an alloy powder of iron and nitrogen can be produced.

The high purity iron is loaded into the metal evaporation mechanism 20, and the gas supply mechanism 60 is supplied with nitrogen gas (N ₂ ) to maintain dissociated atomic nitrogen generated by plasma at 300 ° C. or lower. Reaction with iron deposited on surface 32 produces crystals of an alloy of iron and nitrogen (Fe ₁₆ N ₂ ).

On the other hand, the alloy powder of iron and nitrogen may further contain cobalt (Co), titanium (Ti) or manganese (Mn) in order to improve the properties, such metal is evaporated with the metal evaporation mechanism 20 with iron. And deposits on the cylinder surface 32, which then combine with nitrogen in the reaction chamber to form alloy crystals.

As explained above, in the manufacturing apparatus of the alloy powder of this embodiment and the manufacturing method of the alloy powder using this manufacturing apparatus, each material can be put into an apparatus and the powder of an alloy or the flake of an alloy can be obtained in a single apparatus.

In particular, in the manufacturing apparatus and the manufacturing method of the present embodiment, alloy flakes that can be powdered into a powder or a small pulverizing apparatus of an alloy in a single apparatus can be obtained without the process of melting, crystallizing and crushing materials that are huge and difficult to manage the process. ,

The configuration and operation of the apparatus and method for producing an alloy powder according to the embodiment of the present invention have been described above, but the present invention is not limited to the embodiment, and various modifications, variations, and components within the scope of the claims are described. Addition is possible,

10 chamber chamber 20 metal evaporation mechanism
30: cylinder 40, 50: vacuum exhaust mechanism
60: gas supply mechanism 80: scraper
90: collecting apparatus

Claims (14)

As an apparatus for producing alloy powder,
An evaporation chamber in which the solid metal material is placed and provided with an evaporation mechanism for evaporating the metal to evaporate the metal material under vacuum atmosphere;
A metal evaporation mechanism provided in the evaporation chamber for evaporating the solid metal in the gas phase;
A reaction chamber provided adjacent to the evaporation chamber and in which a crystal in which an alloy crystal, which becomes a material of an alloy powder, grows under a vacuum atmosphere, occurs;
Made of ceramic or metal, having a surface circulating between the evaporation chamber and the reaction chamber, particles of the gaseous metal evaporated in the evaporation chamber are deposited on the surface, and the surface on which the particles of metal are deposited enters the reaction chamber An alloy forming member in which crystals of the alloy grow, and are cyclically driven between the evaporation chamber and the reaction chamber to repeat deposition of metal particles and growth of the alloy crystals to form a thin film of the alloy;
A peeling mechanism for peeling the alloy from the thin film of the alloy formed on the surface of the alloy forming member; And
Collecting mechanism for collecting the powder of the alloy peeled from the alloy forming member by the peeling mechanism
Apparatus for producing an alloy powder comprising a. The method according to claim 1,
The reaction chamber further comprises a gas supply mechanism for supplying a precursor of an element forming an alloy by reacting with the metal deposited on the alloy forming member in the evaporation chamber in the gas phase,
And the gas supply mechanism is configured to generate a plasma that dissociates a precursor of an element constituting the alloy. The method according to claim 1,
The alloy forming member is composed of a cylinder having a cylindrical surface and rotating, the surface of the cylinder is alternately placed in the evaporation chamber and the reaction chamber by the rotation of the cylinder. The method according to claim 1,
And the alloy forming member is formed of a strip having a surface on which a gaseous metal is deposited and an alloy thin film is grown. The method according to claim 1,
The evaporation of the metal material in the evaporation chamber is made by induction heating, resistive heat heating or sputtering. The method according to claim 1,
The peeling mechanism is arranged in contact with the surface of the alloy forming member and a plurality of blades separating the thin film of the alloy generated on the surface of the alloy forming member in the circumferential direction, the blade is sequentially rotated with the surface of the alloy forming member Apparatus for producing an alloy powder, which is configured to be in contact. The method according to claim 1,
The peeling mechanism is comprised of the laser cleaner which irradiates a laser to the surface of an alloy forming member, and isolate | separates an alloy thin film from the surface of an alloy forming member. As a manufacturing method of the alloy powder using the alloy powder manufacturing apparatus as described in any one of Claims 1-7,
A metal material loading step of loading the metal material into the metal evaporation mechanism in the evaporation chamber;
Evacuating the evaporation chamber and the reaction chamber under reduced pressure;
An evaporation step of evaporating the metal material placed in the evaporation chamber by induction heating, resistive heating or sputtering;
The surface of the alloy forming member is driven to circulate between the evaporation chamber and the reaction chamber. A vapor deposition step in which a vaporized metal vaporized in an evaporation chamber is deposited on the surface of the alloy forming member;
In the reaction chamber, a precursor of an element that reacts with the metal deposited on the surface of the alloy forming member to form an alloy is supplied in the gas phase, and the element reacts with the metal deposited on the surface of the alloy forming member to form crystals of the alloy. That, alloy crystal forming step;
As the alloy forming member is cyclically driven between the evaporation chamber and the reaction chamber, the deposition step and the alloy thin film growth step are repeated on the surface of the alloy forming member so that crystals of the alloy grow to form an alloy thin film having a predetermined thickness. A peeling step of peeling the thin film of the alloy by; And
A collecting step in which the exfoliated alloy is collected by a collecting device
That includes, a method of producing an alloy powder. The method according to claim 8
In the metal material loading step, iron (Fe) is loaded as a metal material to the evaporation mechanism,
In the step of forming the alloy crystal, nitrogen gas is supplied to the reaction chamber and the nitrogen gas supplied by the plasma is dissociated or ammonia gas is supplied, and nitrogen atoms derived from nitrogen gas or ammonia gas are deposited on the surface of the alloy forming member. A method for producing an alloy powder, wherein crystals of an alloy of iron and nitrogen are formed while reacting with iron to form an alloy of iron and nitrogen. The method according to claim 9,
In the metal material loading step, one metal of cobalt (Co), titanium (Ti), and manganese (Mn) is further loaded as the metal material,
In the alloy crystal forming step, crystals of an alloy of iron and cobalt and nitrogen, an alloy of iron and titanium and nitrogen or an alloy of iron, manganese and nitrogen are formed. As a manufacturing method of the alloy powder using the alloy powder manufacturing apparatus as described in any one of Claims 1-7,
Loading a rare earth metal and iron (Fe) or cobalt (Co) as the metal material into the evaporation chamber;
Evacuating the evaporation chamber and the reaction chamber under reduced pressure;
Evaporating the rare earth metal and iron loaded in the evaporation chamber by induction heating, resistive heating or sputtering;
The surface of the alloy forming member is driven to circulate between the evaporation chamber and the reaction chamber. A deposition step in which the rare earth metal and iron or cobalt evaporated in the evaporation chamber are deposited on the surface of the alloy forming member;
In the reaction chamber, the rare earth metal deposited on the surface of the alloy forming member and the iron or cobalt form crystals of the alloy;
As the alloy forming member is cyclically driven between the evaporation chamber and the reaction chamber, the deposition step and the alloy crystal forming step are repeated on the surface of the alloy forming member so that the crystals of the alloy grow to form an alloy thin film having a predetermined thickness. A peeling step of peeling the thin film of the alloy by; And
A collecting step in which the exfoliated alloy is collected by a collecting device
That includes, a method of producing an alloy powder. The method according to claim 11,
In the metal material loading step, rare earth metal and iron are loaded,
In the step of forming the alloy crystal, nitrogen gas is supplied to the reaction chamber and the nitrogen gas supplied by the plasma is dissociated or ammonia gas is supplied, and nitrogen atoms derived from nitrogen gas or ammonia gas are deposited on the surface of the alloy forming member. Reacting with metals to form crystals of an alloy of rare earth metals, iron and nitrogen. The method according to claim 12,
In the step of forming the alloy crystal, a boron-containing gas is supplied to the reaction chamber, and boron atoms derived from the boron-containing gas react with metals deposited on the surface of the alloy forming member to form an alloy of rare earth metal, iron and boron. To form a crystal of the alloy powder manufacturing method. The method according to claim 12,
In the metal material loading step, any one of titanium (Ti), vanadium (V), manganese (Mn), cobalt (Co), molybdenum (Mo) and silicon (Si) as a substitution type element for stabilization of the phase of the alloy. Is loaded more,
In the alloy crystal forming step, an alloy thin film of any one of titanium, vanadium, manganese, cobalt, molybdenum and silicon, a rare earth metal and iron is grown, the method for producing an alloy powder.

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