KR102055263B1 - Reference device, measuring device using spectroscopic interference method, coating device, measurement accuracy assurance method of measuring device using spectroscopic interference method, and method for producing coating film - Google Patents

Abstract

A non-translucent first block body having a groove portion, and a transmissive second block body stacked on the first block body, wherein the first block body is formed through the second block body by a spectroscopic interference measuring device. The light is irradiated to the groove portion, and the predetermined interference light corresponding to the depth of the groove portion is formed by the reflected light from the surface on the side of the first block body of the second block body and the reflected light from the bottom surface of the groove portion. Configured baseline.

Description

REFERENCE DEVICE, MEASURING DEVICE USING SPECTROSCOPIC INTERFERENCE METHOD, COATING DEVICE, MEASUREMENT ACCURACY ASSURANCE METHOD OF MEASURING DEVICE USING SPECTROSCOPIC INTERFERENCE METHOD, AND METHOD FOR PRODUCING COATING FILM}

The present invention relates to a method for assuring measurement accuracy of a reference machine, a spectroscopic interference measuring device, a coating device, a spectroscopic interference measuring device, and a method for producing a coating film.

Conventionally, the coating film was manufactured by apply | coating the coating liquid to the sheet | seat. For example, a coating film was manufactured by apply | coating coating liquids, such as an adhesive, on the base material as a sheet | seat.

As a manufacturing method of this kind of coating film, using the coating part which apply | coats a coating liquid on a sheet | seat, and forms a coating film, and the coating apparatus provided with the spectral interference type measuring apparatus as a film thickness measuring part which measures the thickness of the said coating film, While measuring the thickness of a coating film, the method of apply | coating a coating liquid on a sheet and manufacturing a coating film is used.

However, in the manufacturing method of such a coating film, if the measurement precision of a spectral interference type measuring apparatus deviates from a desired precision, it will become difficult to manage film thickness sufficiently, and as a result, a fluctuation will arise in the thickness of the coating film formed. .

On the other hand, the method of improving the measurement precision of an optical measuring device is proposed.

For example, a method of using a reference reflector, irradiating light to the reference reflector, measuring the amount of light reflected, and correcting the amount of light received based on the measurement result has been proposed (Patent Document 1). Reference).

Japanese Patent Laid-Open No. 2002-39955

However, even if the amount of light received is corrected using the reference reflector described in Patent Document 1, it is difficult to say that it is possible to sufficiently ensure that the measured value of the spectroscopic interference measuring device that measures the thickness has an accuracy within a predetermined range. . In addition, when using the said reference reflecting plate, it is difficult to manufacture the reference reflecting plate corresponding to various measurement objects with high precision.

In view of the above circumstances, the present invention provides a standard that can be easily manufactured with high accuracy regardless of the measurement object, and a method of guaranteeing measurement accuracy of a spectral interference measuring device, a coating device, and a spectral interference measuring device using the same. Let it be a subject to provide the manufacturing method of a coating film.

MEANS TO SOLVE THE PROBLEM As the present inventor earnestly researched about the said subject, in the technique of the said patent document 1, since light quantity is a reference | standard and thickness itself is not a reference | standard, the measured value of a spectral interference type measuring apparatus is high-precision predetermined range I found it difficult to guarantee to get inside.

On the other hand, in order to ensure that the measured value of the spectroscopic interference measuring device falls within a predetermined range with high accuracy, it is effective that the thickness of the same level as the measurement target is used as a reference.

Here, for example, it is conceivable that the thickness of the sheet body is adopted as the reference value.

However, it is difficult to produce such a sheet body with a precision which can be referred to as a measurement object.

Therefore, the present inventors have studied more intensively, and as a reference group, a non-translucent first block body having a groove portion formed therein and a transparent second block body laminated on the first block body to cover the groove portion are used. The light is irradiated to the groove portion through the second block body by the spectroscopic interference measuring device, and the interference light formed by the reflected light from the surface on the side of the first block body of the second block body and the reflected light from the bottom surface of the groove portion. By receiving light, it was found that this interference light corresponds to the depth of the groove portion.

Then, by receiving a predetermined interference light corresponding to the depth of the groove portion, the depth of the groove portion is measured, and the depth of the groove portion is employed as the reference thickness, whereby the measured value of the spectroscopic interference measuring device is measured with a precision within a predetermined range. It has been found that it can be guaranteed and the present invention has been completed.

That is, the reference device according to the present invention,

It is a reference machine used to ensure that the measured value of the spectroscopic interference measuring device for measuring the thickness of the object has a precision within a predetermined range,

A non-translucent first block body,

It is provided with the transparent 2nd block body laminated | stacked on the said 1st block body,

The first block body has a groove portion on the side of the second block body side,

Light is irradiated to the groove portion of the first block body through the second block body by the spectroscopic interference measuring device, and reflected light from the surface on the side of the first block body of the second block body, and the groove portion. The reflected light from the bottom surface is configured to form a predetermined interference light corresponding to the depth of the groove portion.

In the reference period of the above configuration,

It is preferable that the said 1st block body is formed of a metal material.

In the reference period of the above configuration,

The metal material may contain one or more selected from the group consisting of stainless steel, iron, copper and aluminum.

In the reference period of the above configuration,

It is preferable that the transmittance | permeability of the light in wavelength 550nm of a said 2nd block body is 80% or more.

In the reference period of the above configuration,

It is preferable that both the top view and the parallelism of the surface of the first block body on the second block body side and the surface of the second block body on the first block body side are 10 μm or less.

In the reference period of the above configuration,

It is preferable to further provide a pressing portion for pressing the second block body against the first block body.

The reference machine of the said structure,

The groove portion may have a depth of 1 to 300 µm.

The spectroscopic interference measuring device according to the present invention,

It is a spectroscopic interference measuring device which irradiates light to an object, receives the interference light from the said object, and measures the thickness of the said object,

The reference unit,

A spectroscopic interference measuring unit configured to irradiate light to the object to measure the thickness of the object, to irradiate light to the groove of the reference unit, and to measure the depth of the groove;

The determination part which determines whether the measured value of the depth of the said groove part measured by the said spectral interference type measuring part falls in a predetermined range is provided.

The coating device according to the present invention,

An application portion for applying a coating liquid onto a relatively moving sheet to form a coating film;

A film thickness measuring section for measuring the thickness of the coating film formed on the sheet by the coating section;

It is provided with the control part which controls thickness measurement of the said coating film by the said film thickness measuring part, and application | coating of the said coating liquid by the said coating part,

The film thickness measuring unit is the spectroscopic interference measuring device,

The control unit is configured to apply the coating liquid to the coating part while measuring the thickness of the coating film in the film thickness measuring part when the measured value of the depth of the groove part measured by the film thickness measuring part falls within a predetermined range. It is.

The measurement accuracy guarantee method of the spectroscopic interference measuring device according to the present invention,

Ensuring measurement accuracy of the spectroscopic interference measuring device, which ensures that the measured value of the spectroscopic interference measuring device that irradiates light to the object, receives the interference light from the object, and measures the thickness of the object, has a predetermined range of accuracy. Way,

The spectroscopic interference measurement is performed by measuring the depth of the groove part of the reference device by the spectroscopic interference measuring device and determining whether the measured value of the measured depth of the groove part is within a predetermined range. It is a method of ensuring that the measured value of an apparatus has the precision within the said predetermined range.

The manufacturing method of the coating film which concerns on this invention,

It is a manufacturing method of the coating film which forms a coating film by apply | coating a coating liquid on the sheet which moves relatively,

The depth of the groove portion of the reference unit is measured using the spectroscopic interference measuring device, and when the measured value of the measured depth of the groove portion falls within a predetermined range, the thickness of the coating film is measured using the spectroscopic interference measuring device. It is a method of apply | coating the said coating liquid on the said sheet, measuring.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic side view which shows the coating device provided with the spectroscopic interference measuring device which has a reference machine concerning one Embodiment of this invention.
FIG. 2 is a cross-sectional view of the II-II arrow of FIG. 1. FIG.
FIG. 3 is a schematic side view illustrating a state in which a measuring part of a spectroscopic interference measuring unit of the spectroscopic interference measuring device of FIG. 2 moves. FIG.
4 is a schematic side view showing a reference machine of the present embodiment.
FIG. 5 is a partially enlarged side view showing the periphery of the groove of the reference machine of FIG.
6 is a schematic top view showing a reference machine of the present embodiment.
7 is a schematic side view illustrating a state in which the reference device of FIG. 4 is assembled.
8 is a flowchart showing a control procedure of the coating apparatus of the present embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the reference | standard machine which concerns on embodiment of this invention, the measuring accuracy guarantee method of the spectral interference measuring apparatus, the coating apparatus, the spectral interference measuring apparatus using the same, and the manufacturing method of a coating film are demonstrated, referring drawings.

First, the coating apparatus provided with the spectral interference type measuring apparatus which has a reference machine of this embodiment as a film thickness measuring part is demonstrated.

As shown in FIG. 1 and FIG. 2, the coating apparatus 1 of this embodiment is a strip | belt-shaped sheet 11 which moves the coating liquid 3 to the downstream side (refer solid line arrow) relatively along a long side direction. ), The coating part 13 which forms the coating film 40 sequentially, and the film thickness measuring part 21 which measures the thickness of the coating film 40 formed on the sheet 11 by the said coating | coating, The control part 28 which controls the thickness measurement of the coating film 40 by the film thickness measuring part 21, and application | coating of the coating liquid 3 by the coating part 13 is provided. Moreover, the coating device 1 is provided with the solidification part 15 which solidifies the coating liquid 3 apply | coated on the sheet | seat 11. As shown in FIG.

The coating device 1 includes an accommodating portion 5 containing the coating liquid 3, a pipe 9 for feeding the coating liquid 3 from the accommodating portion 5 to the coating portion 13, and the corresponding piping. It is further provided with the liquid feeding mechanism 7 arrange | positioned at (9) and conveying the coating liquid 3 from the accommodating part 5 to the application part 13.

The coating liquid 3 is applied to the sheet 11 and solidified on the sheet 11. As such a coating liquid 3, the polymer solution containing solidification components, such as a thermosetting material, an ultraviolet curable material, and an electron beam curable material, is mentioned, for example. This coating liquid 3 may be solidified by the solidifying unit 15.

The accommodating part 5 accommodates the coating liquid 3, and a metal container is mentioned as the accommodating part 5, for example.

The liquid feeding mechanism 7 has a liquid feeding portion 7a for feeding the coating liquid 3 from the container portion 5 to the coating portion 13, and a liquid feeding drive portion 7b for driving the liquid feeding portion 7a. have. As the liquid delivery part 7a, a pump etc. are mentioned, for example. As the drive part 7b for liquid feeding, a motor etc. are mentioned, for example. The liquid feeding drive unit 7b is electrically connected to the control unit 28, and configured to control driving and driving stop by the control unit 28.

The piping 9 constitutes the path | route which the coating liquid 3 moves. As the piping 9, a metal tube etc. are mentioned, for example.

As said sheet 11, a resin film is mentioned, for example. In FIG. 1, although the sheet | seat 11 is a form of the elongate shape which shows flexibility, the form which is single plate shape, and the form which has inflexibility may be employ | adopted elsewhere.

The coating part 13 is supported by a strip-like sheet 11 which moves the coating liquid 3 to a downstream side relative to the coating part 13 while being supported by a supporting part 19 such as a roller. To apply sequentially. As such an application part 13, a die coater etc. are mentioned, for example.

The solidification part 15 solidifies the coating liquid 3 applied on the sheet 11. As the solidification part 15, a drying apparatus, a heating apparatus, an ultraviolet irradiation apparatus, an electron beam irradiation apparatus, etc. are mentioned according to the kind of coating liquid 3, for example. In addition, depending on the kind of coating liquid 3, the form in which the coating device 1 does not have the solidification part 15 can also be employ | adopted.

The said support part 19 supports the sheet | seat 11 which moves to a long side direction from the opposite side to the application part 13. As such a support part 19, a roller etc. are mentioned.

As the film thickness measuring unit 21, a spectroscopic interference measuring device 21 is employed.

As shown in FIG.2 and FIG.3, the said spectral interference type measuring apparatus 21 irradiates light to the coating film 40 formed in the sheet | seat 11 as a target object, and the interference light from the coating film 40 is carried out. Is a spectroscopic interference measuring device 21 which receives light and measures the thickness of the coating film 40.

A reference device 30 having a groove portion 33, which is used to ensure that the measured value of the spectroscopic interference measuring device 21 for measuring the thickness of the object of the coating film 40 has a precision within a predetermined range;

Spectrometer configured to irradiate the coating film 40 with light to measure the thickness of the coating film 40, and to irradiate the groove 33 of the reference machine 30 with light to measure the depth of the groove 33. An interference measuring unit 23,

A determination unit 27 that determines whether or not the measured value D of the depth of the groove portion 33 measured by the spectral interference type measurement unit 23 falls within a predetermined range R,

The display part 29 which displays the determination result of the determination part 27 is provided.

In addition, in FIG.2 and FIG.3, a broken line arrow shows the light L irradiated from the spectral interference type measuring part 23. In addition, in FIG.

3 to 5, the reference unit 30 is a reference used to ensure that the measured value of the film thickness measuring unit 21 as the spectroscopic interference measuring device 21 has a precision within a predetermined range R. 30,

A non-translucent first block body 31,

The light-transmitting 2nd block body 35 laminated | stacked on the said 1st block body 31 is provided,

The first block body 31 has a groove portion 33 on the surface 31a on the side of the second block body 35,

Light is irradiated to the groove portion 33 of the first block body 31 through the second block body 35 by the spectroscopic interferometric measuring device 21. The predetermined interference light corresponding to the depth of the groove portion 33 is formed by the reflected light from the surface 35a on the side of the first block body 31 and the reflected light from the bottom surface 33a of the groove portion 33. It is configured to be.

That is, the reflected light from the surface 35a on the side of the first block body 31 of the second block body 35 and the bottom face 33a of the groove part 33 are caused by the spectroscopic interference measuring device 21. The interference light formed by the reflected light from the light beams is received so that the depth of the groove portion 33 is measured as the reference thickness.

In addition, the reference device 30 further includes a pressing unit 37 for pressing the second block body 35 against the first block body 31.

The 1st block body 31 should just have a non-translucent property, and the formation material is not specifically limited.

For example, the first block body 31 is preferably formed of a metal material.

Since the first block body 31 is formed of a metal material, deformation due to environmental conditions such as solvent atmosphere, environmental temperature, environmental humidity and the like can be suppressed.

Therefore, the reference device can be used to more accurately guarantee the measured value of the spectroscopic interference measuring device with a precision within a predetermined range.

As a metal material which forms the 1st block body 31, 1 or more selected from the group which consists of stainless steel, iron, copper, and aluminum is mentioned.

Here, when the formation material of the 1st block body 31 does not reflect light enough, the bottom face 33a of the groove part 33 of the said 1st block body 31 will not reflect light enough, As a result, there exists a possibility that the measurement precision of the said interference light may fall.

However, since the first block body 31 is formed of a metal material containing at least one selected from the group consisting of stainless steel, iron, copper and aluminum, light is seen from the bottom face 33a of the groove portion 33. Since it becomes easy to reflect, the said interference light can be measured more accurately.

Thus, the reference device 30 can be used in the configuration with higher precision.

Among these metal materials, the metal material is preferably stainless steel in view of strength and ease of processing.

The size of the first block body 31 is not particularly limited and may be appropriately set according to the size (width, length and depth) of the groove portion 33.

The shape of the first block body 31 is also not particularly limited. For example, in the form shown in FIG. 6, the 1st block body 31 is formed in rectangular plate shape.

The groove part 33 is formed so that the center part of the bottom face 33a may be parallel to the surface 31a of the side of the 2nd block body 35 of the 1st block body 31. As shown in FIG. Thereby, the reflected light reflected by the bottom surface 33a of the groove part 33 interferes with the reflected light reflected by the surface 35a of the side of the 1st block body 31 of the 2nd block body 35, The depth of the groove 33 can be measured with high precision (measured value D).

The size (width and length) and the shape of the groove 33 are not particularly limited.

The depth of the groove portion 33 is also not particularly limited.

For example, the depth of the groove part 33 may be 1-300 micrometers.

Since the depth of the groove part 33 is 1-300 micrometers, when the coating film 40 on the sheet | seat 11 is about 1-300 micrometers, the reference machine 30 is suitable for the film thickness measuring part 21. do.

The second block body 35 is light-transmitting and is laminated on the first block body 31 while covering the groove portion 33 of the first block body 31.

The second block body 35 should just have a light transmittance, and its formation material is not specifically limited.

For example, it is preferable that the transmittance | permeability of the light in wavelength 550nm of the 2nd block body 35 is 80% or more.

This transmittance is a value measured by spectral transmittance measurement at normal temperature.

Here, when the 2nd block body 35 does not fully transmit light, there exists a possibility that the measurement precision of the said interference light may fall.

However, when the light transmittance of the second block body 35 at a wavelength of 550 nm is 80% or more, the second block body 35 can sufficiently transmit light, so that the interference light is measured with higher accuracy. .

Therefore, the reference device 30 can be used to more accurately guarantee the measured value of the film thickness measurement unit 21 within a predetermined range R.

As a formation material of such a 2nd block body 35, a glass material, a resin material, etc. are mentioned, for example.

The size of the second block body 35 is not particularly limited and may be appropriately set according to the size of the first block body 31.

The shape of the second block body 35 is also not particularly limited. For example, in the form shown in FIG. 6, the 2nd block body 35 is formed in disk shape.

The second block body 35 may be laminated directly on the first block body 31 or may be laminated via another member.

In the case where the second block body 35 is laminated on the first block body 31 through another member, when the through hole is formed at a position corresponding to the groove portion 33 of the other member, The depth of the groove portion 33 corresponds to the sum of the depth of the groove portion 33 itself and the thickness of the other member.

In the reference unit 30 of the present embodiment, the surface 31a on the side of the second block body 35 of the first block body 31, and the first block body 31 of the second block body 35. It is preferable that both the top view and parallelism of the side surface 35a are 10 micrometers or less. In addition, such a top view is each top view of the surface 31a and the surface 35a. The parallelism of the plane 31a is the parallelism of the plane 31b on the side opposite to the plane 31a of the plane 31a and the first block body 31, and the parallelism of the plane 35a is the plane 35a. ) And the surface 35b on the opposite side to the surface 35a in the second block body 35.

Such parallelism and plan view are the values measured by a three-dimensional measuring instrument at normal temperature.

As for the top view and parallelism of the surface 31a of the 2nd block body 35 side of the 1st block body 31, it is more preferable that all are 3 micrometers or less. The 1st block body 31 which has such a surface 31a is obtained by grinding | polishing the surface and back surface of the block body formed with the formation material, for example.

As for the top view and parallelism of the surface 35a of the 1st block body 31 side of the 2nd block body 35, it is more preferable that all are 3 micrometers or less. As a 2nd block body 35 which has such a surface 35a, the brand name optical parallel (planar view: 0.1 micrometer, parallelism: 0.2 micrometer) by Mitsutoyo Corporation is mentioned, for example.

In addition, in the reference machine 30 of this embodiment, in addition to the above, it is preferable that the top view and parallelism of the bottom face 33a of the groove part 33 of the 1st block body 31 are all 10 micrometers or less. . In addition, the parallelism of the bottom surface 33a is the parallelism of the bottom surface 33a and the surface 31b on the opposite side to the surface 31a in the first block body 31.

Such parallelism and a top view are the values measured similarly to the above.

As for the top view and parallelism of the bottom face 33a of the groove part 33 of the 1st block body 31, it is more preferable that all are 3 micrometers or less. The groove part 33 having such a bottom face 33a is obtained by, for example, polishing the bottom face 33a.

Here, each plan view of the surface 31a of the side of the second block body 35 of the first block body 31 and the surface 35a of the side of the first block body 31 of the second block body 35 is shown. When too large or when these parallelisms are too large, there exists a possibility that the measurement precision of the said interference light may fall.

However, the top view and parallelism of the surface 31a of the 2nd block body 35 side of the 1st block body 31, and the surface 35a of the 1st block body 31 side of the 2nd block body 35 are shown. When all are 10 micrometers or less, the fall of the measurement precision of the said interference light can be suppressed.

Moreover, when the top view of the bottom face 33a of the groove part 33 of the 1st block body 31 is too big, or when parallelism is too big, there exists a possibility that the measurement precision of the said interference light may fall.

However, since both the top view and parallelism of the bottom face 33a are 10 micrometers or less, the fall of the measurement precision of the said interference light can be suppressed.

The pressing portion 37 presses the second block body 35 toward the first block body 31.

Since the second block body 35 is fixed to the first block body 31 by the reference device 30 having the pressing portion 37, the second block body 35 is the first block body 31. In the case of not being fixed to), a decrease in the measurement accuracy of the interference light can be suppressed.

Therefore, the reference device 30 can be used to more accurately assure the measured value of the film thickness measurement unit 21 with a precision within a predetermined range.

Moreover, in the reference | standard 30 provided with such the press part 37, the surface 31a of the side of the 2nd block body 35 of the 1st block body 31, and the agent of the 2nd block body 35 are made. 1st planarity and parallelism of the surface 35a by the side of a block body 31 are larger than 10 micrometers (that is, when the surface 31a and the surface 35a are rough), when it presses by the press part 37, the 2nd The block 35 may be damaged, and as a result, the measurement accuracy of the interference light may be lowered.

However, in the reference device 30 including the pressing portion 37, the surface 31a on the side of the second block body 35 of the first block body 31 and the second block body 35 are formed. When both the plan view and parallelism of the surface 35a of the side of the 1st block body 31 are 10 micrometers or less, the fall of the measurement precision by such a damage can be suppressed.

As the pressing part 37, the second block body 35 is hooked to the periphery of the surface (outer surface) 35b on the side opposite to the first block body 31 of the second block body 35 so that the first block body ( A locking portion 37a fixed to the first block body 31 while being pressed against the first block 31; a fixing portion 37b for fastening the locking portion 37a to the first block body 31 to be fixed; The thing which has the opening part 37c which passes the light irradiated from the interference type measuring apparatus 21 through the 2nd block body 35 and the 1st block body 31 is mentioned.

In addition, a vis is adopted as the fixing part 37b.

Specifically, the locking portion 37b penetrates through the through hole 37aa of the locking portion 37a and is fastened to the pinned portion (here, the bishole) 31c of the first block body 31 to thereby lock the locking portion. 37a is fixed to the first block 31 while pressing the second block 35 to the first block 31.

Moreover, the press part 37 is comprised so that it may contact the 2nd block body 35 through the interposition member 39, such as a packing.

That is, as shown in FIG. 4, the 2nd block body 35 is laminated | stacked on the 1st block body 31, and the press part 37 is attached to the 2nd block body 35 through the interposition member 39. As shown in FIG. While being in contact, the locking portion 37a of the pressing portion 37 is caught in the peripheral portion of the surface 35b on the opposite side to the first block body 31 of the second block body 35, and in this state, the locking portion ( 37a) and the 1st block body 31 are fastened and fixed by the fixing part 37b, and the 2nd block body 35 is fixed, being pressed by the 1st block body 31. FIG.

Although the shape of the interposition member 39 is not specifically limited, For example, it can be set suitably according to the shape of the 2nd block body 35, and the shape of the opening part 37c. In the form shown in FIG. 6, the interposition member 39 is formed in an annular shape.

In this embodiment, the reference machine 30 is arrange | positioned at the outer side of the sheet 11 in the width direction of the sheet 11, and spaced apart from the said sheet 11.

The spectroscopic interference measuring unit 23 irradiates the coating film 40 with light to measure the thickness of the coating film 40, and also irradiates light into the groove part 33 of the reference device 30 so as to measure the thickness of the groove part 33. It is configured to measure the depth.

That is, the spectral interference type measurement part 23 irradiates light to the sheet 11 in which the coating film 40 was formed, and reflects light from the outer surface of the coating film 40 and the coating film 40 side of the sheet 11. It is comprised so that the interference light formed by the reflected light from a surface may be received, and the thickness of the said coating film 40 may be measured. In addition, the spectral interference measuring unit 23 irradiates the groove 33 of the reference unit 30 with light, and the surface on the side of the first block body 31 of the second block body 35 of the reference unit 30. The reflection light from 35a and the interference light formed by the reflection light from the bottom face 33a of the groove 33 are received to measure the depth of the groove 33 (measured value D).

As shown in FIG. 2 and FIG. 3, the spectroscopic interference measuring unit 23 is configured to irradiate light and to receive light, and to measure the light emitter 23a and the light source 23b for generating light irradiated from the measurer 23a. And a connection for optically connecting the spectroscopic section 23c for spectroscopy the light received by the measuring section 23a and obtaining it as a waveform of interference light, and the measuring section 23a, the light source section 23b, and the spectroscopic section 23c. The computing section 23e and the measuring section 23a which are electrically connected to the cable 23d and the spectroscopic section 23c and calculate the depth of the groove section 33 from the waveform of the interference light acquired by the spectroscopic section 23c. It has the moving mechanism 25 to move.

The measuring part 23a is the 1st position A which can measure the thickness of the coating film 40 along the width direction of the sheet 11, and the 2nd position which can measure the depth of the groove part 33 of the reference machine 30. In B, it is movable by the moving mechanism 25.

In the form of FIG. 3, the 1st position A includes the position A1 and the position A2 which can measure the thickness of the one end part of the coating film 40, and the other end part. 2nd position B is a position spaced apart from the said sheet 11 in the width direction outer side of the sheet 11, and the measuring part 23a is the 1st block through the 2nd block body 35 of the reference machine 30. It can be made into the position which can irradiate light to the center part of the bottom face 33a of the groove part 33 of the sieve 31. FIG.

The measuring part 23a, the light source part 23b, the spectroscopic part 23c, and the connection cable 23d are not specifically limited, For example, each commercial item can be employ | adopted.

As for the movement mechanism 25, the moving part 25b, such as the movable part 25a to which the measuring part 23a is fixed, and which can move to the width direction of the sheet | seat 11, and the motor which drives the said moving part 25a, is carried out, for example. Has

The calculating part 23e is comprised so that the measured value D of the depth of the groove part 33 may be calculated from the waveform of the interference light acquired by the spectroscopic part 23c.

A personal computer etc. are mentioned as the calculating part 23e.

The determination part 27 determines whether the measured value D of the depth of the groove part 33 measured by the spectral interference type measuring part 23 is in the predetermined range R. As shown in FIG.

Specifically, the determination unit 27 receives the measured value D of the depth of the groove portion 33 transmitted from the calculating unit 23e of the spectral interference measuring unit 23, and determines whether the measured value D is within a predetermined range R. Determine.

The determination unit 27 includes a predetermined range (S ± ΔS), that is, (S-ΔS) or more and (S + ΔS) or less, including the reference value S of the thickness and the error ΔS allowed for the reference value S. R is stored.

The reference value S is obtained beforehand by using the calibrated separate measuring device with higher precision than the spectroscopic interference measuring part 23, and measuring the depth D of the groove part 33 by the said measuring device.

When the determining unit 27 receives the measured value D of the depth of the groove 33 measured by the spectral interference measuring unit 23, whether or not D falls within a predetermined range R, that is, (S-ΔS) ≦ D It is determined whether or not to fall within the range of ≤ (S + ΔS).

As for allowable error (DELTA) S, 1 to 10% of reference value S is preferable, for example, 3 to 7% is more preferable.

Further, for example, when the reference value S is 1 to 300 m (that is, the depth of the groove 33 is 1 to 300 m), the allowable error ΔS may be set to about 0.5 to 15 m.

As such a determination part 27, a programmable logic controller (PLC) etc. are mentioned. In this embodiment, the determination unit 27 is stored in the control unit 28. That is, the determination part 27 performs one of the functions of the control part 28, and determines whether the measured value D of the depth of the groove part 33 exists in the predetermined range R. As shown in FIG.

When the control part 28 receives the determination result from the determination part 27 of the film thickness measuring part 21, and it is determined by the determination part 27 that the measured value D of the depth of the groove part 33 falls in the predetermined range R, The measuring device 23a of the spectral interference measuring unit 23 is moved to the first position A by the moving mechanism 25, and the thickness of the coating film 40 is measured by the spectral interference measuring unit 23. The coating liquid 3 is transferred to the coating portion 13 from the receiving portion 5 by the mechanism 7, and the coating liquid 3 is applied onto the sheet 11 to the coating portion 13 (coating film ( 40).

On the other hand, when the control part 28 determines that the measured value D of the depth of the groove part 33 is not in the predetermined range R in the determination part 27, the control part 28 makes the thickness of the coating film 40 into the film thickness measuring part 21. Without measuring, the coating liquid 3 is not apply | coated to the application | coating part 13 on the sheet | seat 11 (it does not form the coating film 40).

The control unit 28 determines whether the quantity of the coating film 40 has reached a predetermined quantity, that is, whether to terminate the application.

In addition, in the coating device 1, the form which the control part 28 does not have the function to control application | coating of the application | coating part 13 and stop of application | coating based on the determination result of the determination part 27 may be employ | adopted. . In this aspect, when the application device 1 is used, the application and the stop of the application of the application portion 13 can be controlled by the worker.

Specifically, as shown in FIG. 8, when the operation of the coating device 1 is started, the control unit 28 provides the second measuring unit 23a to the moving mechanism 25 of the spectral interference measuring unit 23. It moves to the position B (step S1), and the spectral interference type measuring part 23 measures the depth of the groove part 33 of the reference machine 30 in 2nd position B (step S2).

Subsequently, the controller 28 determines whether the measured value D of the depth of the groove 33 measured by the spectroscopic interference measuring unit 23 falls within the predetermined range R, that is, (S- It is determined whether or not to fall within the range of ΔS) ≦ D ≦ (S + ΔS) (step S3).

When it is determined that the measured value D of the depth of the groove portion 33 is within the predetermined range R, the control unit 28 moves the measuring unit 23a to the first position A in the moving mechanism 25 of the spectral interference measuring unit 23. While moving and measuring the thickness of the coating film 40 in the spectral interference measuring unit 23, the liquid feeding mechanism 7 is fed to the coating part 13 from the receiving part 5 to the liquid feeding mechanism 7, and the coating part 13 is applied. The coating liquid 3 is applied onto the sheet 11 to form a coating film 40 (step S4).

Subsequently, the control unit 28 determines whether or not the application is finished (step S5). When it is determined that the application is not finished, the control unit 28 returns to step S4 and repeats step S4. In the case where it is determined in step S5 that the application is terminated, the control unit 28 stops the thickness measurement of the coating film 40 on the spectral interference type measurement unit 23 and applies the application to the liquid feeding mechanism 7 from the container 5. The liquid feeding of the coating liquid 3 to the part 13 is stopped, the application | coating of the coating liquid 3 is stopped to the coating part 13, and the operation | movement of the coating apparatus 1 is complete | finished.

On the other hand, in step S3, when the determination part 27 determines that the measured value D of the depth of the groove part 33 does not fall in the predetermined range R, the control part 28 will contact the spectral interference type measuring part 23. The coating liquid 3 is not applied to the application part 13 without measuring the thickness of the coating film 40 (step S7). In this case, when measurement by the spectral interference type measurement part 23 and application | coating by the application | coating part 13 are performed, the said measurement and application | coating are stopped. Moreover, the control part 28 displays "abnormal stop" on the display part 29 (step S8), and complete | finishes the operation | movement of the coating device 1. As shown in FIG. In addition, in step S8, instead of displaying the "abnormal stop", the display part 29 may generate a warning sound, such as an alarm, with this.

As such a control part 28, a programmable logic controller (PLC) etc. are mentioned.

In addition, in this embodiment, although the coating device 1 shows the aspect provided with the control part 28 which controls the film thickness measuring part 21 and the coating part 13, the coating device 1 elsewhere, You may further include the other control part which controls the film thickness measuring part 21.

The display unit 29 displays the determination result in the determination unit 27.

Specifically, when the display unit 29 is electrically connected to the determination unit 27, and it is determined by the determination unit 27 that the measured value D of the depth of the groove 33 does not fall within the predetermined range R. In order to show that the measurement by the spectral interference type measurement part 23 and the application by the application part 13 are stopped, "abnormal stop" is displayed. In addition, as mentioned above, instead of displaying the "abnormal stop", the display part 29 may generate a warning sound, such as an alarm, with this.

In addition, the display unit 29 is also electrically connected to the control unit 28 to display a control state or the like by the control unit 28.

As such a display part 29, the all-optical display apparatus like a liquid crystal display which has a voice output function, etc. are mentioned, for example.

Next, the measuring accuracy guarantee method of the spectroscopic interference measuring device 21 which ensures that the measured value of the spectroscopic interference measuring device 21 of this embodiment has the precision within a predetermined range is demonstrated.

The measuring accuracy guarantee method of this embodiment irradiates light to the sheet 11 in which the coating film 40 as an object was formed, receives the interference light from the sheet 11 which permeate | transmitted the coating film 40, and It is a measurement accuracy guarantee method of the film thickness measurement part (spectral interference type measuring apparatus) 21 which measures the thickness of the coating film 40,

Using the reference device 30, the film thickness measurement unit 21 measures the depth of the groove portion 33 of the reference device 30, and the measured value D of the measured depth of the groove portion 33 is within a predetermined range R. It is a method of ensuring that the measured value of the film thickness measuring part 21 has the precision in the predetermined range R by determining whether it exists.

Specifically, at the second position B, light is directed to the central portion of the bottom surface 33a of the groove portion 33 of the first block body 31 by the spectral interference measuring unit 23 via the second block body 35. This irradiation is carried out, and the interference light formed by the reflected light from the bottom face 35a on the side of the first block body 31 of the second block body 35 and the reflected light from the bottom face 33a of the groove part 33 is received. Thereby, the depth of the groove part 33 is measured by the spectral interference type measuring part 23, and the measured value D of this depth is employ | adopted as thickness of a reference | standard.

The determination part 27 determines whether the measured value D of the depth of the groove part 33 measured by the spectral interference type measuring part 23 is in the predetermined range R. As shown in FIG.

Next, the manufacturing method of the coating film 40 of this embodiment is demonstrated.

The manufacturing method of the coating film 40 of this embodiment is

It is a manufacturing method of the coating film 40 which forms the coating film 40 by apply | coating the coating liquid 3 on the sheet 11 which moves relatively,

The depth of the groove portion 33 of the reference device 30 is measured using the film thickness measurement portion (spectral interference type measurement device) 21, and the measured value D of the measured depth of the groove portion 33 falls within a predetermined range R. At this time, the coating liquid 3 is applied onto the sheet 11 while measuring the thickness of the coating film 40.

Specifically, at the second position B, light is directed to the central portion of the bottom surface 33a of the groove portion 33 of the first block body 31 by the spectral interference measuring unit 23 via the second block body 35. This irradiation is carried out, and the interference light formed by the reflected light from the bottom face 35a on the side of the first block body 31 of the second block body 35 and the reflected light from the bottom face 33a of the groove part 33 is received. Thereby, the depth of the groove part 33 is measured as a reference thickness by the spectral interference type measuring part 23. As shown in FIG.

The determination part 27 determines whether the measured value D of the depth of the groove part 33 measured by the spectral interference type measuring part 23 is in the predetermined range R. As shown in FIG.

When it is determined by the determination unit 27 that the measured value D of the depth of the groove 33 falls within the predetermined range R, the control unit 28 determines the thickness of the coating film 40 by the spectral interference measurement unit 23. While the measurement is carried out, the coating film 40 is formed by applying the coating liquid 3 on the sheet 11 by the coating unit 13.

On the other hand, when the determination part 27 determines that the measured value D of the depth of the groove part 33 is not in the predetermined range R, the thickness measurement of the coating film 40 by the spectral interference type measuring part 23 is not performed. Application | coating of the coating liquid 3 by the coating part 13 is not performed, and the coating film 40 is not formed accordingly. In this case, when the measurement by the spectral interference type measurement part 23 and the application by the application part 13 are performed, the measurement by the spectral interference type measurement part 23 and the application by the application part 13 are performed. Is stopped.

As mentioned above, the reference machine 30 of this embodiment is

In order to ensure that the measured value of the spectroscopic interference measuring device (here, the film thickness measuring unit) 21 for measuring the thickness of the object (here, the coating film formed on the sheet 11) 40 has a precision within a predetermined range R, The reference machine 30 used,

A non-translucent first block body 31,

The light-transmitting 2nd block body 35 laminated | stacked on the said 1st block body 31 is provided,

The first block body 31 has a groove portion 33 on the surface 31a on the side of the second block body 35,

Light is irradiated to the groove portion 33 of the first block body 31 through the second block body 35 by the spectroscopic interference measuring device 21, and the light of the second block body 35 is increased. The reflection light from the surface 35a on the side of the first block body 31 and the reflection light from the bottom surface 33a of the groove portion 33 are configured to form a predetermined interference light corresponding to the depth of the groove portion. have.

According to such a structure, when light is irradiated to the groove part 33 of the 1st block body 31 through the 2nd block body 35 by the spectral interference type measuring apparatus 21, the 2nd block body 35 will be carried out. The reflected light from the surface 35a on the side of the first block body 31 of the first block body 31 and the reflected light from the bottom surface 33a of the groove portion 33 form a predetermined interference light corresponding to the depth of the groove portion 33. When the interference light is received, the depth of the groove portion 33 (that is, the thickness of the air layer in the groove portion 33) is measured, and the depth of the groove portion 33 can be employed as the reference thickness.

And by confirming that the measured value D of the measured depth of the groove part 33 falls in the predetermined range R, it can be ensured that the measured value of the spectral interference type measuring apparatus 21 is the precision in the predetermined range R. As shown in FIG.

In addition, since the reference unit 30 can be formed by forming the groove portion 33 in the first block body 31, the reference unit 30 corresponding to the thickness of the desired measurement object is simply manufactured.

In the reference machine 30 of this embodiment,

It is preferable that the said 1st block body 31 is formed with the metal material.

According to such a structure, since the 1st block body 31 is formed with the metal material, deformation by environmental conditions, such as solvent atmosphere, environmental temperature, environmental humidity, can be suppressed.

Therefore, the reference device 30 can be used to more accurately assure the measured value of the spectral interference measuring device 21 with a precision within a predetermined range R.

In the reference machine 30 of this embodiment,

The metal material may contain one or more selected from the group consisting of stainless steel, iron, copper and aluminum.

Here, when the formation material of the 1st block body 31 does not reflect light enough, the bottom face 33a of the groove part 33 of the said 1st block body 31 will not reflect light enough, As a result, there exists a possibility that the measurement precision of the said interference light may fall.

However, since the first block body 31 is formed of a metal material containing at least one selected from the group consisting of stainless steel, iron, copper, and aluminum, the bottom face 33a of the groove portion 33 sees light. Since it becomes easy to reflect, the said interference light can be measured more accurately.

In the reference machine 30 of this embodiment,

It is preferable that the transmittance | permeability of the light in wavelength 550nm of the said 2nd block body 35 is 80% or more.

Here, when the 2nd block body 35 does not fully transmit light, there exists a possibility that the measurement precision of the said interference light may fall.

However, since the second block body 35 can transmit the light more sufficiently by the light transmittance at the wavelength of 550 nm of the second block body 35 being 80% or more, the interference light can be measured with higher accuracy. do.

Therefore, the reference device 30 can be used to more accurately assure the measured value of the spectral interference measuring device 21 with a precision within a predetermined range R.

In the reference machine 30 of this embodiment,

A plan view of the surface 31a of the first block body 31 on the second block body 35 side and the surface 35a of the second block body 35 on the first block body 31 side. And it is preferable that all the parallelism is 10 micrometers or less.

Here, each plan view of the surface 31a of the side of the second block body 35 of the first block body 31 and the surface 35a of the side of the first block body 31 of the second block body 35 is shown. As it becomes larger, or as the parallelism thereof becomes larger, there is a fear that the measurement accuracy of the interference light is lowered.

However, the top view and parallelism of the surface 31a of the 2nd block body 35 side of the 1st block body 31, and the surface 35a of the 1st block body 31 side of the 2nd block body 35 are shown. When all are 10 micrometers or less, the fall of the measurement precision of the said interference light can be suppressed.

Therefore, the reference device 30 can be used to guarantee the measured value of the spectroscopic interference measuring device 21 with higher accuracy within a predetermined range.

In the reference machine 30 of this embodiment,

It is preferable to further include a pressing part 37 for pressing the second block body 35 against the first block body 31.

According to such a structure, since the 2nd block body 35 is fixed to the 1st block body 31 by providing the presser 37 with the said press part 37, the 2nd block body 35 is made into the 1st block body. The fall of the measurement accuracy of the said interference light can be suppressed rather than the case where it is not fixed to the 1 block body 31. FIG.

Therefore, the reference device 30 can be used to more accurately assure the measured value of the spectroscopic interference measuring device 21 with a precision within a predetermined range R.

Moreover, in the reference | standard 30 provided with such the press part 37, the surface 31a of the side of the 2nd block body 35 of the 1st block body 31, and the agent of the 2nd block body 35 are made. When both the plan view and the parallelism of the surface 35a on the side of the first block body 31 are larger than 10 μm (rough surface), the second block body 35 easily breaks when pressed by the pressing unit 37, As a result, there exists a possibility that the measurement precision of the said interference light may fall.

However, in the reference device 30 including the pressing portion 37, the surface 31a of the side of the second block body 35 of the first block body 31 and the second block body 35 are formed. Since both the top view and parallelism of the surface 35a of the side of the 1st block body 31 are 10 micrometers or less, the fall of the measurement precision by such a damage can be suppressed.

In the reference machine 30 of this embodiment,

1 to 300 micrometers of the depth of the said groove part 33 may be sufficient.

According to such a structure, the spectral interference type measuring apparatus (here film thickness measuring part) 21 which measures the target object (here, the coating film 40 formed in the sheet 11) which has a thin film thickness of 1-300 micrometers. It is suitable for.

As described above, in order to ensure the measured value of the spectroscopic interference measuring device 21 with high accuracy and within the predetermined range R, it is effective to use the same thickness as a reference as a reference as a reference.

Under the present circumstances, when the thickness of a sheet | seat body is employ | adopted as a reference value as mentioned above, when the film thickness of an object is 1-300 micrometers, it is necessary to produce the comparatively thin sheet body accordingly.

However, it is difficult for a sheet body such as a glass plate or a resin plate to be made relatively thin with high precision, and the sheet body is easily broken by being made so thin.

On the other hand, rather than the case where the thickness of sheet bodies, such as a glass plate and a resin plate, is formed in desired thickness, the one in which the depth of the said groove part 33 is formed to desired depth is easily formed in high precision easily. In particular, in the case where the form in which the reference device 30 is formed of a metal material is adopted, the metal material is processed so that the depth of the groove portion 33 is desired than the case where the thickness of the sheet body is formed to a desired thickness. It is more easy to be formed more precisely with high precision.

Therefore, as the reference | standard 30 when measuring the object 40 which has a thin film thickness of 1-300 micrometers in thickness, the measured value of the spectral interference measuring device 21 is more precisely within the predetermined range R. It is possible to guarantee the accuracy.

The spectral interference type measuring apparatus 21 of this embodiment is

A spectroscopic interferometric measuring device (here, irradiated with light) to an object (here, the coating film formed on the sheet 11), and receiving the interference light from the object 40 to measure the thickness of the object 40 (here Film thickness measurement unit) 21,

The reference unit 30,

The object 40 is irradiated with light to measure the thickness of the object 40, and the groove 33 of the reference machine 30 is irradiated with light to measure the depth of the groove 33. Configured spectral interference measurement unit 23,

The determination part 27 which determines whether the measured value D of the depth of the said groove part 33 measured by the said spectral interference type measuring part 23 has the precision in the predetermined range R is provided.

According to this structure, the depth of the groove part 33 of the reference machine 30 is measured as a reference thickness by the spectral interference type measuring part 23, and the measured value D of the measured depth of the groove part 33 is the predetermined range R. It is determined whether or not to enter. Thereby, it is ensured that the measured value by the spectral interference type measuring part 23 is the precision within predetermined range R. Then, the thickness of the object 40 can be measured by the spectral interference measuring unit 23 having a guaranteed accuracy.

Accordingly, the spectroscopic interference measuring device 21 can measure the thickness of the object 40 with high accuracy.

The coating device 1 of this embodiment is

An application part 13 for applying the coating liquid 3 onto the relatively moving sheet 11 to form a coating film 40,

A film thickness measuring section 21 for measuring the thickness of the coating film 40 formed on the sheet 11 by the coating section 13,

It is provided with the control part 28 which controls the measurement of the said coating film 40 by the said film thickness measuring part 21, and application | coating of the said coating liquid 3 by the said coating part 13,

The film thickness measuring unit 21 is the spectroscopic interference measuring device 21,

The control unit 28 is configured to apply the coating film 40 to the film thickness measuring unit 21 when the measured value D of the depth of the groove 33 measured by the film thickness measuring unit 21 falls within a predetermined range R. It is comprised so that the coating liquid 3 may be apply | coated to the said coating part 13, measuring thickness.

According to such a structure, the thickness of the coating film 40 by the film thickness measuring part 21 in the state in which the measured value of the film thickness measuring part 21 was ensured with the precision within the predetermined range R using the said reference machine 30. While is measured, the coating liquid 3 may be applied onto the sheet 11 to form the coating film 40.

Therefore, it is possible to form the coating film 40 while sufficiently managing the thickness, whereby the coating film 40 in which the variation in thickness is suppressed can be manufactured.

The measurement accuracy guarantee method of the spectral interference type measuring apparatus 21 of this embodiment is

A spectroscopic interferometric measuring device (here, irradiated with light) to an object (here, the coating film formed on the sheet 11), and receiving the interference light from the object 40 to measure the thickness of the object 40 (here It is a measuring accuracy guarantee method of the spectral interference type measuring apparatus 21 which ensures that the measured value of the film thickness measuring part) 21 has the precision in the predetermined range R,

The reference value 30 is used, the depth of the groove part 33 of the reference device 30 is measured by the spectroscopic interference measuring device 21, and the measured value of the measured depth of the groove part 33 is measured. It is a method of ensuring that the measured value of the said spectral interference type measuring apparatus 21 has the precision in the said predetermined range R by determining whether D falls in the predetermined range R. As shown in FIG.

According to such a structure, it becomes possible to ensure that the measured value of the spectral interference type measuring apparatus 21 has the precision in the predetermined range R using the said reference | standard 30.

The manufacturing method of the coating film 40 of this embodiment is

It is a manufacturing method of the coating film 40 which forms the coating film 40 by apply | coating the coating liquid 3 on the sheet 11 which moves relatively,

When the depth of the groove portion 33 of the reference device 30 is measured using the spectroscopic interference measuring device 21, and the measured value D of the measured depth of the groove portion 33 falls within a predetermined range R, It is a method of apply | coating the said coating liquid 3 on the said sheet 11, measuring the thickness of the coating film 40 using the said spectral interference type measuring apparatus 21. As shown in FIG.

According to such a structure, since the said coating film 40 can be formed, measuring the thickness of the coating film 40 with high precision using the spectral interference type measuring apparatus 21, the coating film in which the fluctuation of the thickness was suppressed It becomes possible to manufacture 40.

As mentioned above, according to this embodiment, irrespective of a measurement object, the reference | standard 30 which can be manufactured with high precision easily, and the spectral interference measuring device 21, the coating device 1, and the measurement accuracy guarantee using this are guaranteed The method and the manufacturing method of the coating film 40 are provided.

As mentioned above, although embodiment and Example of this invention were described, it is also planned from the beginning to combine suitably the characteristic of each embodiment and Example. In addition, it should be thought that embodiment and Example which were disclosed this time are an illustration and restrictive at no points. The scope of the present invention is shown not by the above-described embodiments and examples but by the claims, and is intended to include the meanings of the claims and equivalents and all modifications within the scope.

1: coating device
3: coating liquid
13 application part
21: film thickness measurement unit (spectral interference type measurement device)
23: spectral interference measuring unit
23a: measuring part
23b: light source
23c: Spectroscope
23d: connection cable
25: moving mechanism
27: judgment unit
28: control unit
29: display unit
30: standard
31: first block
31a: surface on the side of the second block body of the first block body
31b: surface opposite to the second block body side of the first block body
33: groove
33a: bottom
35: second block body
35a: surface on the side of the first block body of the second block body
35b: Surface opposite to the first block body of the second block body
37: pressure part
D: Measured value of depth of groove
S: reference value
40: coating film

Claims (11)

It is a reference machine used to ensure that the measured value of the spectroscopic interference measuring device for measuring the thickness of the object has a precision within a predetermined range,
A non-translucent first block body,
It is provided with the transparent 2nd block body laminated | stacked on the said 1st block body,
The said 1st block body has a groove part in the surface on the said 2nd block body side,
Light is irradiated to the groove portion of the first block body through the second block body by the spectroscopic interference measuring device, and reflected light from the surface on the side of the first block body of the second block body, and the groove portion. And a reference device configured to form predetermined interference light corresponding to the depth of the groove portion by the reflected light from the bottom surface. The reference group according to claim 1, wherein the first block body is formed of a metal material. The base group of claim 2, wherein the metal material comprises at least one selected from the group consisting of stainless steel, iron, copper, and aluminum. The reference group according to claim 1, wherein the transmittance of light at a wavelength of 550 nm of the second block body is 80% or more. The reference machine according to claim 1, wherein the plan view and parallelism of the surface on the second block body side of the first block body and the surface on the first block body side of the second block body are both 10 µm or less. The reference machine according to claim 1, further comprising a pressing unit for pressing the second block body against the first block body. The reference machine according to claim 1, wherein the groove portion has a depth of 1 to 300 µm. It is a spectroscopic interference measuring device which irradiates light to an object, receives the interference light from the said object, and measures the thickness of the said object,
The reference group according to any one of claims 1 to 7,
A spectroscopic interference measuring unit configured to irradiate light to the object to measure the thickness of the object, to irradiate light to the groove of the reference unit, and to measure the depth of the groove;
A spectroscopic interference measuring device, comprising: a judging unit for determining whether a measured value of the depth of the groove portion measured by the spectroscopic interference measuring unit falls within a predetermined range. An application portion for applying a coating liquid onto a relatively moving sheet to form a coating film;
A film thickness measuring section for measuring the thickness of the coating film formed on the sheet by the coating section;
It is provided with the control part which measures the measurement of the thickness of the said coating film by the said film thickness measuring part, and application | coating of the said coating liquid by the said coating part,
The said film thickness measuring part is a spectral interference type measuring apparatus of Claim 8,
The control unit is configured to apply the coating liquid to the coating part while measuring the thickness of the coating film in the film thickness measuring part when the measured value of the depth of the groove part measured by the film thickness measuring part falls within a predetermined range. , Applicator. Of the spectroscopic interferometric measuring device for ensuring that the measured value of the spectroscopic interferometric measuring device for irradiating light to the object and receiving the interference light from the object to measure the thickness of the object has a predetermined range of accuracy. Is the measurement accuracy guarantee method,
The reference apparatus according to any one of claims 1 to 7 is used, the depth of the groove portion of the reference instrument is measured by the spectroscopic interference measuring device, and the measured value of the measured depth of the groove portion is within a predetermined range. The method of guaranteeing the measurement accuracy of the spectroscopic interference measuring device which determines that the measured value of the said spectroscopic interference measuring device has the precision within the said predetermined range by judging whether it exists. It is a manufacturing method of the coating film which forms a coating film by apply | coating a coating liquid on the sheet which moves relatively,
The depth of the groove portion of the reference unit is measured using the spectroscopic interference measuring device according to claim 8, and when the measured value of the measured depth of the groove portion falls within a predetermined range, the spectroscopic interference measuring device is used. The manufacturing method of a coating film which apply | coats the said coating liquid on the said sheet, measuring the thickness of a coating film.

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