KR102054945B1 - Heating jacket with external insulation layer - Google Patents

Abstract

The present invention relates to a heating jacket with an external insulation layer and, more specifically, to a heating jacket with an external insulation layer, which can comprise a heating part in which a hot wire is provided and an insulation layer additionally disposed outside the heating part to suppress an external loss of heat generated in the heating part, thereby increasing insulation efficiency. To this end, the heating jacket with an external insulation layer can comprise: the heating jacket configured to include the heating part between a first inner cover and a first outer cover to be installed to cover an outer side of a fluid movement pipe of semiconductor equipment; and an insulation jacket configured to include an insulation material between a second inner cover and a second outer cover to be installed to cover an outer side of the heating jacket.

Description

HEATING JACKET WITH EXTERNAL INSULATION LAYER}

The present invention relates to a heating jacket provided with an outer heat insulating layer, and more particularly, the heating portion is provided with a heating wire therein and the heat insulating layer provided separately on the outside of the heating portion is lost heat generated in the heating portion to the outside The present invention relates to a heating jacket provided with an outer insulation layer which suppresses the insulation and improves the insulation efficiency.

Many semiconductor processes use gaseous chemical sources, which are either transported through pipes or discharged. However, in this process, when the temperature of the pipe through which the chemical source passes is lowered, a gaseous chemical source is deposited on the inner wall of the pipe, thereby increasing the internal pressure of the discharge pipe or lowering the exhaust force. Therefore, when the chemical source is deposited on the inner wall of the discharge pipe over a certain level, the inside of the discharge pipe should be cleaned periodically. However, since the manufacturing process must be stopped to clean the inner wall of the discharge pipe, frequent cleaning decreases the productivity of the product and increases the manufacturing cost.

Depositing a chemical source on the inner wall of the discharge pipe is an unavoidable phenomenon, but merely delaying this phenomenon as much as possible to lengthen the cleaning cycle significantly helps to improve the productivity of the product. Therefore, a heating jacket is provided on the outside of the pipe through which the chemical source passes to maintain a constant temperature of the discharge pipe.

Korean Patent No. 10-1495668 filed by the applicant of the present invention has been published as a related art regarding a heating jacket for heating a discharge pipe of a semiconductor process.

1 is a view showing a schematic configuration of a heating jacket according to the prior art.

Referring to FIG. 1, the prior art includes an inner shell 10, a heat generating unit 30, a temperature sensor 50, a heat insulator 70, and an outer shell 90, covering a fluid moving pipe of a semiconductor process while heating. This is a technology related to the heating jacket.

The prior art is provided with a heat generating portion 30 between the inner shell 10 and the outer shell 90, the heat insulating material 70 is provided between the heat generating portion 30 and the outer shell 90 in the heat generating portion 30 The generated heat is transmitted to the inner fluid movement pipe (not shown) without leaking to the outside. That is, the heat generating part 30 and the heat insulating material 70 are integrally formed in one jacket, and the heat generating part 30 and the heat insulating material 70 are sealed between the inner skin 10 and the outer skin 90 of the same length. Form.

By the way, the heat generating unit 30 is installed to be in close contact with the outer side of the fluid transfer pipe is high thermal conductivity is installed so as to be in close contact with the outer side of the fluid moving pipe as possible as possible. As such, when the heat generating unit 30 is pulled in close contact with the outside of the fluid movement pipe, the heat insulating material 70 integrally provided with the heat generating unit 30 is also pulled together by the outer shell 90. It will be installed to be in close contact. Since the heating jacket is composed of almost the same length of the inner skin and the outer skin is installed in a state where the inner skin is pulled tightly the outer skin located outside the inner skin is pulled more tightly is a structure that is installed while pressing the heat generating unit and the heat insulating unit.

By the way, since the heat insulating material is properly formed inside the air insulation material 70, the heat insulation effect is improved, such a structure has a problem in that heat energy generated in the heat generating part 30 is not effectively blocked and radiated and discharged to the outside to increase heat loss. have.

KR 10-1495668 B1 KR 10-1363976 B1

The present invention is to solve the above problems, the heating part constituting the heating jacket and the heat insulating portion is composed of a separate jacket, the heating portion is installed to be in close contact with the outside of the pipe, the heat insulating portion has an airtightness on the outside of the heating portion It is an object of the present invention to provide a heating jacket having an outer insulation layer which is installed at a somewhat loose and low density so that the air layer formed inside the insulation portion improves the insulation effect.

The present invention as a technical means for solving the above problems, the heating jacket is configured to include a heat generating portion between the first endothelial and the first outer shell is installed to surround the outside of the fluid movement pipe of the semiconductor device; The insulation may be configured to include a heat insulating material between the second inner skin and the second outer skin to cover the outer side of the heating jacket.

In a preferred embodiment of the present invention, the heat insulation jacket is configured such that one side in the longitudinal direction is fixed to one side in the longitudinal direction of the heating jacket and the other side in the longitudinal direction of the heating jacket and the heat insulation jacket is composed of the free end, After the other end in the longitudinal direction of the fluid movement pipe wrapped in the heating jacket fixing portion provided on one side in the longitudinal direction of the heat insulating jacket, the heat insulation jacket is fixed in the heating jacket after the other side in the longitudinal direction wrapped the heating jacket It may be configured to be fixed to the heat insulating jacket fixing provided on the other side of the.

In the preferred embodiment of the present invention, the hitang jacket may be coupled to separate both sides of the width direction so that both sides of the heating jacket and the heat insulation jacket in the longitudinal direction are fixed.

In a preferred embodiment of the present invention, the length in the width direction of the second inner shell of the insulating jacket is the same as or longer than the length in the width direction of the first outer jacket of the heating jacket, the width direction of the second outer jacket of the insulating jacket The length of the may be the same as or longer than the circumference of the heat insulating material may be formed so that the air layer is formed between the heat insulating jacket and the heating jacket and the second jacket does not compress the heat insulating material.

In a preferred embodiment of the present invention, the length of the width direction of the second endothelial is calculated by the formula (3), the length of the width direction of the second shell is in the range of ± 5mm from the value calculated by the formula (4) The pipe specification variable may be determined by a value calculated by the formula of 5 + ((diameter of pipe-45) * 0.03).

In a preferred embodiment of the present invention, the heat insulating jacket is further provided with a temperature checking unit, the temperature checking unit may be configured to expose a portion of the inner heating jacket is separated or peeled off a specific portion of the heat insulating jacket.

In a preferred embodiment of the present invention, the variable according to the piping standard is 5 when the diameter of the fluid movement pipe is 25.4 ~ 63.5mm, and 6.5 when the diameter of the fluid movement pipe is 76.3 ~ 101.6mm, When the diameter of the fluid movement pipe is 127 ~ 165.2mm, it is 8, and when the diameter of the fluid movement pipe is 216.3 ~ 267.4mm, it is characterized by 11.

In a preferred embodiment of the present invention, the heat insulating jacket is composed of two or more, the length of the width direction of the endothelial of the second heat insulating jacket provided on the outer side in the relationship with the first heat insulating jacket provided on the inside It is determined in the range of ± 5mm from the value calculated by, the length of the width direction of the outer jacket of the second insulating jacket may be determined in the range of ± 5mm in the value calculated by the formula (6).

According to the heating jacket provided with the outer heat insulating layer according to the present invention, since the heating portion is installed to be in close contact with the outside of the pipe, such as the discharge pipe, to improve the heat transfer efficiency for the pipe, and the heat insulating portion provided on the outside of the heating portion has airtightness By installing a little loose so that many air layers are formed therein, it is possible to improve the thermal insulation effect and to save energy as compared to the prior art under the same conditions, as well as to suppress the occurrence of chemical vapor deposition inside the discharge pipe.

1 is a view showing a schematic configuration of a heating jacket according to the prior art.
2 is a view showing the configuration of a heating jacket provided with an outer insulation layer according to the present invention.
3 is a view showing the configuration of a heating jacket provided with an outer insulation layer according to a first embodiment of the present invention.
4 is a view showing a configuration of a heating jacket provided with an outer insulation layer according to a second embodiment of the present invention.
5 is a view showing a state in which the temperature check unit is provided in the insulating jacket.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a view showing the configuration of a heating jacket provided with an external insulation layer according to an embodiment of the present invention, Figure 3 is a view showing the configuration of a heating jacket provided with an external insulation layer according to a first embodiment of the present invention. 4 is a view showing the configuration of a heating jacket provided with an outer insulation layer according to a second embodiment of the present invention.

Referring to FIG. 2, the heating jacket provided with the outer insulation layer according to the present invention can be seen that the heating jacket 100 and the insulation jacket 200 are provided separately.

The heating jacket 100 includes a heat generating unit 130 and a temperature sensor 150 between the first inner shell 110 and the first outer shell 170. The first endothelium 110 is in contact with the outside of the fluid movement pipe (not shown) flowing through the gaseous chemical source in the semiconductor manufacturing apparatus is contacted by the heat generated in the heat generating unit 130, the temperature of the fluid movement pipe is constant To be maintained. The first endothelial 110 is made of a material having excellent heat conductivity and heat resistance and flexibility. The first shell 170 is preferably made of a flexible material having excellent heat resistance and heat insulation. The first inner shell 110 and the first outer shell 170 are fixed in the circumferential direction to form one heating jacket 100 in which the heat generating unit 130 is located.

The heating unit 130 provided inside the heating jacket 100 converts electrical energy into heat to heat the fluid moving pipe, and various known heating wires may be applied. In addition, at least one temperature sensor 150 may be provided along the heat generating unit 130 to configure a temperature inside the heating jacket 100 or around the heat generating unit 130. The heating jacket 100 having the above configuration may be applied in a known configuration, for example, in a configuration similar to Korean Patent No. 10-1495668 (prior art) filed by the applicant of the present invention. However, in the present invention, as in the prior art, the heat insulating material 230 is not provided with the heat generating unit 130, but is provided as a main feature separately from the heat generating unit 130. This is because preferred installation conditions of the heat generating unit 130 and preferred installation conditions of the heat insulator 230 are different, and as described below, according to their installation method, the thermal insulation performance and the energy efficiency thereof are different. However, the present invention does not completely exclude the provision of the heat insulator 230 between the heat generating unit 130 and the first shell 170 as in the prior art, and the heat insulator 230 in the heating jacket 100 as in the prior art. ) And may be used in the form of having a heat insulating jacket 200 on the outside of the heating jacket 100 as described above. That is, the present invention is characterized in that the thermal insulation jacket 200 and the heating jacket 100 are installed with high efficiency while separately providing the thermal insulation jacket 200. Hereinafter, matters not specifically mentioned in the construction or material of the present invention are the same as or similar to the prior art or known prior art.

The heat insulation jacket 200 is configured to include a heat insulating material 230 between the second endothelial 210 and the second outer skin 270. That is, in the related art, the heat generating unit 130, the temperature sensor 150, and the heat insulating material 230 were provided together between the inner skin and the outer skin. In the present invention, the heat generating unit 130 and the temperature sensor 150 have a first endothelial ( It is provided between the 110 and the first outer shell 170, the heat insulating material 230 is provided between the second inner shell 210 and the second outer shell 270, respectively, the heating jacket 100 and the insulating jacket 200 Will be configured. Thus, the two jackets are overlapped and configured to surround the outside of the fluid transfer pipe. In a preferred embodiment of the present invention, the second endothelial 210 may be made of a thermal insulator having low thermal conductivity and excellent thermal insulation. The heat insulating material 230 may be applied to a variety of materials, for example, the heat insulating material 230 may be applied in the form of powder or silica in fiber form.

Conventionally, the heat generating unit 130 and the temperature sensor 150 and the heat insulating material 230 is configured in a form that is embedded together between the inner skin and the outer shell, the heating jacket is heat of the heat generating unit 130 is well in the fluid movement pipe of the inner side Since the heat generating unit 130 is to be delivered to be installed by pulling the endothelial and the outer sheath tightly to the fluid movement pipe as close as possible. By the way, the configuration and installation method as described above helps the heat of the heat generating unit 130 to be transferred to the pipe, but rather becomes a disadvantageous structure for the heat insulation of the heat generated from the heat generating unit 130. In other words, the heat insulating material 230 is basically effective to have an appropriate air layer, the configuration as described above because the pressure is fixed to the heat insulating portion as well as the heat generating portion 130, the heat insulating performance is reduced, and to compensate for the heat lost more A lot of energy is consumed.

In the present invention, the heat generating part 130 is formed by the heating jacket 100 to closely adhere to the outside of the pipe to increase the thermal conductivity, and the heat insulating material 230 is formed as a separate insulating jacket 200 of the heating jacket 100 While having an airtightness on the outside, the heat insulating material 230 was installed so as not to be compressed to increase the heat insulating performance.

Referring to Figure 3, the heating jacket is provided with a heat insulating layer according to the first embodiment of the present invention in the structure of the heating jacket 100 and the heat insulating jacket 200, the heat insulating jacket 200 in the longitudinal direction (fluid moving pipe When installed at one side of the fluid movement pipe (referring to any one of the left and right sides of the direction (length direction) surrounding the fluid movement pipe) to be fixed to one side of the longitudinal direction of the heating jacket (100). It is configured, the other side in the longitudinal direction can be such that both the heating jacket 100 and the heat insulating jacket 200 is configured as a free end. Thus, after wrapping the other end of the heating jacket 100 to be in close contact with the fluid movement pipe tightly, the other end of the heat insulation jacket 200 can be relatively loosely wrapped around the outer side of the heating jacket 100. A heating jacket fixing part may be provided on an outer side of one side of the insulating jacket 200, and an insulating jacket fixing part may be provided on the other side of the heating jacket fixing part to the outside of the insulating jacket 200. Thus, the other side of the heating jacket 100 surrounding the fluid transfer pipe is fixed to the heating jacket fixing part, and the other side of the insulating jacket 200 wrapping the outside of the heating jacket 100 is fixed to the insulating jacket fixing part. Can be.

One side of the heating jacket 100 and the heat insulation jacket 200 in the longitudinal direction may be fixed semi-permanently by the lockstitch or may be fixed to be detachable, such as a fixed button or a zipper. And the heating jacket fixing and the insulating jacket fixing may be applied a removable means such as a buckle or Velcro tape. The configuration as described above is a different state of the heating jacket 100 and the heat insulating jacket 200, that is, the heating jacket 100 is tightly fixed in close contact with the heat insulating jacket 200 to be installed relatively loosely so that the air layer is formed therein. To do so. In addition, the fluid transfer pipe for transporting the chemical source in the semiconductor manufacturing apparatus is complicatedly installed in the height of several meters to several tens of meters, the heating jacket 100 and the insulation jacket 200 are separately installed in the above environment, respectively Rather than doing so, one side is fixed and the other side is made in a removable form because it is easy to work or to prevent safety accidents.

Referring to FIG. 4, the heating jacket provided with the outer insulation layer according to the second embodiment of the present invention may be configured such that both sides of the heating jacket 100 and the heat insulation jacket 200 in the longitudinal direction are semi-permanently fixed by a stitching or the like. have. In this case, the second inner shell 210 of the heat insulating jacket 200 is configured to be longer than the circumference of the first outer skin 170 of the heating jacket 100 so that an air layer is formed between the heating jacket 100 and the heat insulating jacket 200. do.

As described above, the heating jacket provided with the outer insulation layer according to the present invention has the heating jacket 100 fixed as tightly as possible so as to be in close contact with the pipe, and the insulation jacket 200 is loosely fixed so that an air layer is formed therein. to be. However, as a result of the experiment, the same structure as the first embodiment of the present invention described above has a problem in that the length of the insulating jacket 200 varies depending on the skill and installation method of the operator. That is, it is preferable that the insulation jacket 200 is fixed only to the extent that the heat insulating material is not compressed. When the worker installs the heat insulation jacket 200 too tightly or too loosely, there is a problem in that the heat insulation performance falls. Therefore, it is necessary to specify the length of the heat insulating jacket 200 in comparison to the heating jacket 100 in advance and fix both sides in the longitudinal direction with a stitch, etc. so that a uniform effect can be obtained regardless of the knowledge or skill of the operator. The heating jacket provided with the outer heat insulating layer according to the second embodiment of the present invention has a predetermined length or ratio which is specified in advance in comparison with the length of the heating jacket 100 in the length from one side in the longitudinal direction of the heat insulating jacket 200 to the other side. By fixing them, the effect is uniform regardless of the knowledge or skill of the operator.

In the heating jacket according to the second embodiment of the present invention, the heating jacket 100 is tightly installed on the outer side of the fluid movement pipe with the coupling length of the heating jacket 100 and the insulation jacket 200 at a constant ratio. The jacket 200 has a gas tightness on the outside of the heating jacket 100 but is loosely coupled so as not to compress the heat insulator 230. At this time, the heating jacket 100 corresponds to the circumferential length of the fluid movement pipe so that the heat generating unit 130 does not overlap with the other heat generating unit 130, and the heat insulating jacket 200 is a heating jacket so that the heat insulating material 230 does not overlap each other. It is suitable for maintaining a uniform temperature and heat insulation provided in the outer side of (100). Hereinafter, a description will be given of the length of the heating jacket 100 and the heat insulating jacket 200 suitable for the above coupling conditions and the calculation method for the respective bonding ratio. The standard calculated below is for the region provided with the heat generating unit 130 and the heat insulating material 230. Therefore, in order to fix or couple the heating jacket in the standard calculated by the following method, one side and / or the other side may be further provided with a length consisting only of the outer skin and / or the inner skin without the heat generating unit 130 and the heat insulator 230 The extra length is ignored. In addition, the "length" mentioned below refers to the length in the circumferential direction of the fluid transfer pipe as a distance between both sides (left and right) in the longitudinal direction unless otherwise specified.

In an embodiment of the present invention, the length of the first endothelial 110 may be calculated by the method shown in Equation 1 below.

The first envelope 170 may be calculated by the following Equation 1 based on the first endothelial 110.

The first endothelial 110 and the first outer skin 170 of the heating jacket 100 may be calculated by the above method, the first endothelial 110 and the first outer skin 170 of the calculated in the same manner as described above As described above, the length refers to the length of the heating jacket 100 provided with the heating unit 130 necessary for the heating unit 130 to wrap all of the fluid movement pipes without overlapping each other. As described above, the heating jacket 100 surrounding the circumference of the fluid movement pipe is coupled to overlap with one side of the heating jacket 100 or the insulation jacket 200 again, and thus the additional part for fixing may be varied as necessary. It may be included in the length calculated by the above formula. However, the specification of the heating jacket 100 as described above represents a preferred embodiment of the present invention and does not completely exclude the overlapping of the heating part 130 of the heating jacket 100 from the scope of rights. The length of the first endothelial 110 and the first outer shell 170 is preferably determined in the range of ± 5mm from the above-described numerical value, the length of the first outer shell 170 is the length of the first endothelial 110 It will be longer.

If the heat insulation jacket 200 is too tightly adhered to the radiant heat increases the heat insulation performance, and if too loosely installed, a gap is generated between the heat jacket 100 and the heat insulation performance is reduced. Therefore, the heat insulating jacket 200 is preferably installed to the extent that the heat insulating material 230 is not compressed while maintaining the airtightness on the outside of the heating jacket 100. The standard of the thermal insulation jacket 200 can be calculated by the following method. The standard calculated by the following formula is for the section that is provided with the heat insulator 230, the section consisting of only the inner and / or outer skin without the heat insulator 230 is ignored.

First, the width direction length of the second endothelial 210 of the heat insulation jacket 200 can be calculated by the method of the formula (3).

And the width direction length of the second outer jacket 270 of the insulating jacket 200 can be calculated by the formula (4).

The length of the second endothelial 210 and the second outer skin 270 calculated by the above method is determined in an error range of ± 5 mm, and at the same time the first inner skin 170 is installed in the second endothelial 210. It is configured to be the same or longer than the circumference, and the second shell 270 is configured to be the same or longer than the circumference of the heat insulating material 230.

In the formula for calculating the length of the second endothelial 210, 'variable according to the piping standard' is a value calculated by the formula of 5 + ((diameter of the pipe -45) * 0.03). The variable by pipe standard formulates the result obtained through many tests, and the variable is calculated whenever the diameter of the pipe is changed by setting the variable to 5 in the pipe having a diameter of 45 mm.

The method of calculating the inner and outer skins of the heating jacket 100 and the insulating jacket 200 described above is to be applied to the fluid transfer pipe for transporting or discharging the chemical source used in the semiconductor process. The fluid transfer pipe of the semiconductor process to which the present invention is applied is composed of various standards, mainly 25.4mm ~ 267.4mm standards are used. As described above, in order to precisely calculate a value according to the above-described formula for manufacturing a heating jacket to be applied to pipes of various standards, there is a problem in that the production cost increases due to the size of the heating jacket to be manufactured. Therefore, in the present invention, the following categories and corresponding piping standard parameters were calculated in the range in which the insulation effect was maintained relatively uniformly. The specification of the fluid movement pipe shown in the following table is classified into a range that has a small impact on the insulation effect of the standard used as the fluid movement pipe in the semiconductor manufacturing process. The test results show that the thermal insulation effect remains constant within the range of the table below.

division Fabric, heating wire, power wire (mm) Insulation (mm) Variables by Piping Standards 25.4 ~ 63.5 76.3-101.6 127-165.2 216.3-267.4 value 3 10 5 6.5 8 11

In other words, Table 1 grouped the piping standard parameters for the major standard bands of pipes used for the transfer or discharge of chemical gas in the semiconductor manufacturing process.If the piping standard is in the range of 25.4 ~ 63.5mm, the pipe standard variable is 5 In the range of 76.3 ~ 101.6mm, 6.5, 127 ~ 165.2mm was 8, and 216.3 ~ 267.4mm was 11 as the pipe standard parameter. The variable values in the table above are values for the main piping specifications that can be grouped while maintaining thermal insulation performance.

Table 2 is a table showing a test sample of the previous product and the present invention and a heating jacket having a variety of structures (first test). In Table 1, Sample 1 is a conventional technology provided with a heating part (heat wire, 130) and a 10 mm insulation material 230 between the inner skin and the outer shell together, and Sample 2 is a heating jacket of a similar structure as before. Insulation material 230 is a structure in which a coating of the same material is added, and Sample 3 is provided with a heating jacket 100 and an insulation jacket 200 separately and completely separated (hereinafter referred to as a 'removable jacket'). ) Is 10mm, and sample 4 is a structure in which two layers of insulation jackets 200 of 10 mm thickness are installed as a detachable jacket, and sample 5 is a structure in which two layers of 8 mm insulation jackets 200 are installed as a separate jacket, and sample 6 is It is a structure in which all four surfaces of the heat insulating jacket 200 and the heating jacket 100 are fixed by sewn, etc., and Sample 7 is a shape in which only both sides of the heat insulating jacket 200 and the heating jacket 100 are longitudinally fixed. Sample 7 here is the main embodiment of the present invention.

The heat insulating material 230 was a silica needle mat (Silica Needle Mat) was applied, it was carried out under the conditions of resistance 165Ω, power supply 208V, current 1.26A, power 262.21W. The test product is the same as the thickness of the heat insulating material 230 except for Sample 4 (10mm 2 ply) and Sample 5 (8mm 2ply). In addition, the size of the pipe to which the test heating jacket was applied was NW160 * 500L, and both sides were sealed with the end cap closed. Temperature and power consumption were measured at least three points after the heating jacket was installed in the above structure and condition. At this time, all the samples are to maintain the temperature of the chemical source transfer pipe of the actual semiconductor process, the difference in power consumption is a difference in performance. Table 3 shows the power consumption of each sample under the above conditions. Other data on the outside temperature of the heat insulation jacket are omitted since they show the common sense result as the heat insulation performance increases.

The lowest power consumption in the test was Sample 4 and Sample 5, followed by Sample 3, followed by Sample 6 and Sample 7. However, since the sample 4 and the sample 5 is thicker than the other samples and is composed of two layers of heat insulating materials 230, it is a natural result. In addition, as will be described later, in the case of other samples, when the insulation jacket 200 is doubled, a better result can be obtained, and thus it cannot be called a meaningful test result.

Sample 3 has a structure in which the heating jacket 100 and the insulation jacket 200 are completely separated and installed separately. Sample 3 showed better results than Samples 6 and 7 in the test results, but it was determined that it was difficult to apply to the actual site due to the serious change in installation and the installation method. The heating jacket of the present invention is installed outside the pipe to which the chemical source is supplied or the pipe from which the chemical source is discharged in the semiconductor manufacturing process. However, the pipes supplied with chemical sources in the semiconductor manufacturing process are very complicated and widely installed. In fact, a large number of pipes are complicatedly arranged from several meters to several tens of meters in height, and simple scaffolding or simple passages are installed in the periphery of the pipes, so dangerous work must be done on the scaffold and the like. In such a work environment, since the worker has to work on a narrow footboard depending on the safety rope, it is very difficult and dangerous to install the heating jacket 100 and the insulation jacket 200 separately. And when the sample 3 is actually installed in the manufacturing process, the test result was also very different from the test result. The test is a result of accurately installed in consideration of the length ratio of the heating jacket 100 and the insulation jacket 200 in the test pipe of a limited length in the laboratory. By the way, as described above, the heating jacket 100 and the insulation jacket 200 are completely separated from each other depending on the skill or installation method of the operator to install. That is, when the worker firmly secures the insulation jacket 200 or is too loosely fixed, the insulation performance is significantly reduced. In fact, when sample 3 was installed at the work site of the semiconductor manufacturing process, it was confirmed that in most cases, the same effect as in the laboratory was not achieved. This is because the worker should be installed in a dangerous and difficult posture on a narrow footing, and the worker does not recognize the difference in effect according to the installation conditions. Furthermore, Sample 3 was very difficult to install in a narrow and dangerous workplace. In conclusion, it was judged that the sample 3 was not practical because the variation of the insulation performance was large depending on the installation difficulties, the installation method, and the proficiency of the installer.

In the case of sample 6, the fabrication method is difficult and a lot of difference in insulation performance appeared according to the fabrication result. In the case of Sample 6, all four surfaces of the heating jacket 100 and the insulating jacket 200 were fixed by sewning, etc. This structure had the advantage that the heating jacket was easy to install in a narrow and complicated semiconductor manufacturing process. Therefore, considering the installation work can be said to be the most desirable form. However, as described above, the heating jacket according to the present invention has a length in the width direction of the thermal insulation jacket 200 that is somewhat longer than the heating jacket 100. Therefore, when fixing the four sides of the heating jacket 100 and the insulation jacket 200 in the sewn, there is no problem when fixing both sides in the longitudinal direction, but when fixing both sides in the width direction longer than the heating jacket 100 Insulation jacket 200 is bound to be fixed in some folded or overlapping form. When the width direction of the insulation jacket 200 is fixed to overlap or fold as described above, it is difficult to achieve the purpose of improving the insulation performance using the length difference, and the variation or change of the insulation effect is severe depending on the manufactured samples even in actual various test results. appear. Since both sides of the width direction is fixed, it is assumed that the heat insulation jacket 200 is also pulled together in the process of fixing the heating jacket 100 in close contact with the pipe.

In conclusion, Sample 7 was the most desirable form considering both the test results for insulation performance and energy efficiency and the convenience of installation in the actual site. Sample 7, after specifying the length of the heating jacket 100 and the heat insulating jacket 200 in the manner described above, and fixed both sides in the longitudinal direction of the heating jacket 100 and the heat insulating jacket 200, such as sewn in the width direction, Both sides are unfixed. As a result of the test, Sample 7 showed an energy saving effect of 16% at the same thickness compared to the conventional heating jacket, and since both sides of the longitudinal direction are fixed, it can be installed at the outside of the fluid transfer pipe at once. In addition, since the heating jacket 100 and the heat insulating jacket 200 are fixed according to a preset ratio, even if the heating jacket 100 is pulled and installed, the heat insulating jacket 200 does not compress the heat insulating material 230 therein. It may be installed in a structure surrounding the outside of the heating jacket 100. Therefore, no matter who installs it, it shows uniform performance.

Table 4 shows the test (2nd test) which advanced with the heat insulation jacket 200 two layers in the form of the sample 7 demonstrated above.

Sample 2 in Table 4 is a double layer of a 5mm thermal insulation jacket 200, Sample 3 is a test by applying a double layer of thermal insulation jacket 200 of 10mm. The heat insulation jacket 200 and the heating jacket 100 are fixed to both sides in the longitudinal direction as in Sample 7 of the first test. Sample 1 is prior art. The test conditions were somewhat different from those in Table 1. The pipe size was NW160 * 2380L, resistance was 44.19Ω, power was 208V, current was 4.71A, and power was 979.05W.

Table 5 shows test results using the sample of Table 4. Referring to Table 5, it was found that in the case of two layers of 5 mm insulation material 230 (Sample 2), the energy saving effect was about 20% compared to the prior art, and the energy saving effect of 33% was achieved in the case of 10 mm double layer. Appeared to be. In the test results of Tables 4 and 5, the first insulating jacket 200 is also provided between the insulation jacket (1 insulation jacket) provided inside and the insulation jacket (second insulation jacket) provided outside. ) And the dimensions of the inner skin and the outer skin of the second insulation jacket 200.

That is, when two or more insulation jackets 200 are provided, the insulation jacket 200 located inwardly based on any one is called a first insulation jacket, and the insulation jacket provided outside the first insulation jacket is referred to as a first insulation jacket. If it is a 2nd heat insulation jacket, the length of the width direction of the inner shell of the said 2nd heat insulation jacket and the width direction of the outer shell can be calculated by the following formula.

The length of the inner shell of the second insulating jacket 200 is

The length of the outer jacket of the second insulating jacket 200

In conclusion, Sample 7 of the first test was judged to be the most preferable form in terms of uniformity of insulation performance and ease of maintenance or installation. In addition, when sample 7 of the first test was manufactured in two layers with the same thickness as sample 2 of the second test, the performance was improved by about 4%, but sample 2 of the second test was the sample of the first test. Compared to 7, there is a disadvantage in that the manufacturing cost increases a lot.

5 is a view showing a state in which the temperature check unit is provided in the insulating jacket according to the present invention.

Referring to FIG. 5, the heating jacket provided with the outer insulation layer according to the present invention is further provided with a temperature checking unit 250 in the insulation jacket 200. The temperature checking unit 250 is a part of the heat insulating jacket 200 in a state in which the heat insulating jacket 200 is fixed or peeled off so that a part of the heating jacket 100 provided inside the heat insulating jacket 200 is exposed. It is configured to be. The temperature checking unit 250 may be provided at various positions of the heat insulation jacket 200. The temperature checking unit 250 may be configured to be detachably detached by a part of the heat insulation jacket 200 or may be configured to be detachably connected to one side of the thermally connected side and the other three sides may be cut to form a combined side. .

The heating jacket has a heating element 130 and the heat insulating material 230 as an essential configuration. In addition, a temperature sensor 150 may be provided around the heat generating unit 130. However, the main role of the temperature sensor 150 is to determine whether the temperature of the portion adjacent to the pipe is maintaining the temperature necessary to suppress the deposition. Therefore, it is not necessary to be installed on the basis of the heating jacket, and it is sufficient that the heating jacket provided with the temperature sensor 150 at regular intervals based on the fluid movement pipe. Checking whether the heating unit 130 of the heating jacket 100 operates normally using the temperature sensor 150 is a secondary function. That is, it is not necessary to provide a temperature sensor in all heating jackets because the heating process does not immediately cause problems in the semiconductor manufacturing process even if one of the heating jackets surrounding one fluid transfer pipe is damaged or broken. Even if equipped, it is impossible to monitor temperature sensors of all heating jackets individually. In fact, even when the heating jacket is installed in the semiconductor manufacturing process, only a part of the heating jacket is provided with the temperature sensor 150. By the way, it is necessary to periodically check whether or not the heated jacket is not normally provided with the temperature sensor 150. Conventionally, when the heat insulating performance of the heat insulating jacket 200 is approached to the outer surface of the heating jacket, the heating unit 130 can be easily checked whether the heating unit 130 is normally operated by the radiant heat or the surface temperature of the heating jacket. By the way, as the present invention improves the heat insulating performance it becomes difficult to check from the outside whether the heat generating unit 130 is operating normally. That is, since the temperature around the fluid movement pipe is basically high and similar, it is difficult to distinguish whether the heating unit 130 operates normally with a small surface temperature difference. However, it is not preferable to have a temperature sensor 150 in all the heating jacket is expensive and difficult to monitor. Therefore, in the present invention, a part of the heat insulating jacket 200 is provided with a temperature checking unit 250 that separates or peels off, and when the temperature checking unit 250 is separated, the internal heating jacket 100 is exposed to check the temperature. Through the unit 250, it is possible to check whether the heat generating unit 130 operates normally. The temperature check unit 250 is sufficient to allow a part of the finger or palm to touch or access.

The temperature checking unit 250 may be implemented in various ways as long as a part of the insulating jacket 200 is peeled off and the heating jacket 100 is exposed. For example, part or part of the inner side or edge of the insulating jacket 200 may be peeled off, and at this time, a part of the temperature checking unit 250 may be rotatably connected to the surrounding insulating jacket 200. It is possible to apply a structure that can be detached and detached completely.

As described above, in the detailed description of the present invention, specific embodiments have been described, but various modifications are possible without departing from the scope of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims below and equivalents thereof.

100: heating jacket
110: first inner skin
130: heating unit
150: temperature sensor
200: insulation jacket
210: second inner shell
230: insulation
250: temperature check unit
270: second envelope

Claims (8)

A heating jacket configured to include a heat generation unit between the first endothelial and the first outer sheath to cover the outside of the fluid movement pipe of the semiconductor device; It is configured to include a heat insulating material is configured to include a heat insulating material between the second inner shell and the second outer shell to cover the outer side of the heating jacket,
The insulation jacket is configured such that both sides of the longitudinal direction is fixed to both sides of the longitudinal direction of the heating jacket, both sides of the width direction are coupled to separate,
The length in the width direction of the second endothelial is

Determined by the formula of
The length in the width direction of the second shell is

Determined by the formula of,
The piping specification variable is a heating jacket with an outer insulation layer is determined by a value calculated by the formula of 5 + ((pipe diameter-45) * 0.03).
A heating jacket configured to include a heat generation unit between the first endothelial and the first outer sheath to cover the outside of the fluid movement pipe of the semiconductor device; It is configured to include a heat insulating material is configured to include a heat insulating material between the second inner shell and the second outer shell to cover the outer side of the heating jacket,
The insulation jacket is configured such that both sides of the longitudinal direction is fixed to both sides of the longitudinal direction of the heating jacket, both sides of the width direction are coupled to separate,
The length in the width direction of the second endothelial is

Determined by the formula of
The length in the width direction of the second shell is

Determined by the formula of,
The variable according to the piping standard is 5 when the diameter of the fluid movement pipe is 25.4 to 63.5 mm, 6.5 when the diameter of the fluid movement pipe is 76.3 to 101.6 mm, and the diameter of the fluid movement pipe is 127. The heating jacket with an outer insulation layer, characterized in that 8 when ~ 165.2mm, and 11 when the diameter of the fluid transfer pipe is 216.3 ~ 267.4mm.
delete delete delete The method according to claim 1 or 2,
The heat insulating jacket is further provided with a temperature checking unit, the temperature checking unit is a heating jacket having an outer heat insulating layer configured to expose a portion of the inner heating jacket by separating or peeling a specific portion of the heat insulating jacket.


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