KR102050105B1 - Regular position checking apparatus for moving part of robot - Google Patents

Regular position checking apparatus for moving part of robot Download PDF

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Publication number
KR102050105B1
KR102050105B1 KR1020130039176A KR20130039176A KR102050105B1 KR 102050105 B1 KR102050105 B1 KR 102050105B1 KR 1020130039176 A KR1020130039176 A KR 1020130039176A KR 20130039176 A KR20130039176 A KR 20130039176A KR 102050105 B1 KR102050105 B1 KR 102050105B1
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KR
South Korea
Prior art keywords
unit
robot
coupled
positioning device
main body
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KR1020130039176A
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Korean (ko)
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KR20140122463A (en
Inventor
손병우
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현대중공업지주 주식회사
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Priority to KR1020130039176A priority Critical patent/KR102050105B1/en
Publication of KR20140122463A publication Critical patent/KR20140122463A/en
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Publication of KR102050105B1 publication Critical patent/KR102050105B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Fuzzy Systems (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a driving part positioning device installed in the moving part of the robot, the main body when both the sensor dog coupled to the main frame of the driving unit and both sides of the sensing surface provided at the front end of the sensor dog unit is detected It consists of a sensing unit equipped with a plurality of sensors to recognize the correct position of the main body, so that the main body is a process equipment or a cassette for storing the substrate even in the case of malfunction due to damage or damage of the power transmission device of the driving unit provided in the running unit The present invention relates to a robot positioning part positioning device capable of stopping at an accurate position corresponding to the same, and preventing secondary accidents caused by arm operation at an incorrect position.

Description

Regular position checking apparatus for moving part of robot}

The present invention relates to a running part positioning device installed in the running part of the robot, and more specifically, by installing a positioning device consisting of a sensor dog and a sensing unit for detecting the moving part in the running part of the robot, body position confirmation Improves the accuracy and reliability of the arm and enables the body to stop at the correct position corresponding to the process equipment or the cassette for storing the board even in the event of a malfunction caused by damage to the drive unit provided in the driving unit. The present invention relates to a robot positioning unit positioning device that can prevent unexpected secondary accidents.

In general, clean robots are used to manufacture equipment such as liquid crystal displays (LCDs) or solar panels manufactured by processing substrates, and are used in an automatic substrate processing process line to handle substrates. It is one of the equipment.

That is, the manufacturing process of a liquid crystal display device or a solar panel is composed of a plurality of unit processes different from each other, and since the equipment for performing each unit process is different from each other, the clean robot transfers the substrate, or inserts it into the process equipment or the cassette. It is installed to automatically perform a process such as storing the substrate in the (Cassette).

Hereinafter, a general clean robot will be briefly described with reference to FIG. 1.

As shown in the drawing, the robot may be divided into a driving unit 100 and a main body 200 installed in the driving unit 100.

The driving unit 100 serves to reciprocate the main body 200 in the horizontal direction, and a servo motor, which is a driving motor, is installed.

At this time, the main body 200 is composed of a rotating unit 210, the lifting unit 220 and the arm unit 230, it is installed to be horizontally movable on the running unit (100).

Here, the rotating part 210 rotates the lifting part 220 and the arm part 230 based on the 'Z' axis, and the lifting part 220 lifts the arm part 230 in the up and down directions, thereby The arm unit 230 may accommodate the substrate in a specific process equipment or a cassette.

Therefore, the driving unit 100 serves to move the main body 200 to the correct position so that the arm unit 230 can accurately input, receive or withdraw the substrate into the process equipment or the cassette.

Conventionally, the method of moving the main body 200 to a specific position on the driving unit 100 by controlling the rotation speed of the driving motor installed in the driving unit 100 is performed by positioning the main body 200.

However, in the conventional body position control as described above, if the rotation of the drive motor is not transmitted accurately due to damage or breakage of the connection part or the gear part of the drive motor and the reducer, even if the drive motor rotates normally, the main body is actually fixed. There was a problem that a secondary accident such as a collision occurs due to the execution of the secondary operation (arm operation) because the vehicle does not stop at the position but stops at the incorrect position.

Publication No. 10-2007-0057475 (2001.06.07)

The present invention has been made in order to solve the above problems, by installing a positioning device composed of a sensor dog coupled to the main frame of the driving unit and a sensing unit for detecting the front end of the sensor dog unit, The exact positioning device can accurately detect the correct position of the main body to prevent secondary accidents caused by the arm operation in the incorrect position through the correct position control of the main body even in the case of malfunction of the drive unit provided in the driving unit It is to provide a positioning device for the robot running part that can be.

In order to achieve the above object, the present invention is provided with an exact positioning device to the running unit to detect the exact position of the main body when the main body of the robot moves on the running portion, the exact position checking device is the main portion of the running portion When the sensor dog coupled to the frame and both ends of the front end of the sensor dog is detected, it is composed of a sensing unit provided with a plurality of sensors to recognize the correct position of the main body.

Here, the sensor dog part is composed of a main support body coupled to one side of the main frame of the driving unit and a dog member protruding from the front end of the main support body with a sensing surface having a predetermined width to correspond to the sensor interval of the sensing unit. .

In addition, the main support may be composed of a profile of a predetermined length coupled to the main frame of the driving unit in a horizontal direction and a support plate coupled to the upper profile of the profile and supporting the dog member.

At this time, it is preferable that the support plate is formed with a plurality of long holes through which the coupling position can be adjusted, and the front side is provided with a bent portion to which the dog member is coupled.

In addition, the dog member may be provided with a bent portion formed with a plurality of long holes through the rear end to be coupled to the bent portion of the support plate, the front end may be formed so that the sensing surface protrudes a predetermined length forward.

In addition, the sensing unit may be provided with a support bracket coupled to the main body and two photosensors installed parallel to the front surface of the support bracket in the horizontal direction to sense both ends of the sensing surface of the dog member.

As described above, the present invention is able to control the exact position of the main body by the positioning device installed in the running unit to prevent secondary accidents due to the operation of the arm (arm) in the incorrect position of the main body in advance There is an effect that can be done, and this also has the effect of improving productivity through improved reliability and precision of the robot.

1 is a schematic configuration diagram of a robot;
2 is a configuration diagram of a driving unit of FIG. 1;
3 is a plan view and a side view of a driving unit in a state where an exact positioning device of the present invention is installed;
4 is an enlarged view of 'A' of FIG. 3,
5 is a configuration diagram of an exact positioning device of the present invention,
6 is an operation state diagram of the position confirmation device of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

First, the structure and the driving unit of the robot will be briefly described with reference to FIGS. 1 and 2.

1 is a schematic configuration diagram of a robot, and FIG. 2 is a configuration diagram of the driving unit of FIG. 1.

As shown in FIG. 1, the robot includes a driving unit 100 and a main body 200 installed on the driving unit 100, wherein the main body 200 includes a rotating unit 210, a lifting unit 220, And an arm part 230.

Here, the rotating part 210 of the main body 200 serves to rotate the main body 100 on the basis of the 'Z' axis, and the lifting part 220 inserts the substrate into the process equipment or the cassette for storing the substrate. , The arm portion 230 for storing or withdrawing is lifted up and down.

Meanwhile, the driving unit 100 is installed below the main body 200 and serves to reciprocate the main body 200 in a horizontal direction. As shown in FIG. 2, the driving unit 100 includes a driving unit 120 and a transfer unit 110. do.

The driving unit 120 includes a driving motor (Servo Motor) 130, a reduction gear 140, a pinion gear, and the like, and a rotation shaft 180 serving as a 'Z' axis by coupling the main body 200. ) Is installed.

Meanwhile, the transfer unit 110 is provided with a main frame 115, an LM guide 117, a rack 150 geared to the pinion gear, and the like.

Therefore, the driving unit 100 is to transfer the driving unit 120 along the main frame 115 by using the driving force of the driving motor 130.

On the other hand, Figure 3 shows a plan view and a side view of the driving unit in the state where the exact positioning device of the present invention is installed.

As shown, the driving unit 100 is installed in both sides of the main frame 115 of the transfer unit 110 in parallel, the driving unit 120 is supported by the two main frame 115 so that both sides are slidably. It is installed to be mobile.

Here, the exact position confirming device 10 of the present invention is installed in the driving unit 100, but is mounted to check the relative position of the main frame 115 and the drive unit 120 of the transfer unit 110, the drive unit 120 ) To control the position.

Hereinafter, the positioning device 10 of the present invention will be described in detail with reference to FIGS. 4 to 6.

4 is an enlarged view of 'A' of FIG. 3, FIG. 5 is a block diagram of the exact positioning device of the present invention, Figure 6 is a view showing the operation state of the exact positioning device of the present invention. .

As shown in the present invention, the positioning device 10 includes a sensor dog part 40 and a sensing part 50.

The sensor dog part 40 is installed on one side of the main frame 115 of the transfer part 110, and the sensing part 50 of the moving frame 160 of the driving part 120 corresponds to the sensor dog part 40. It is installed on one side.

In this case, the sensor dog part 40 is composed of a main support body 20 and a dog member 30.

The main support 20 is coupled to the main frame 115 and serves to support the dog member 30, and is composed of a predetermined length aluminum profile 21 and the support plate 25.

The profile 21 is installed in the horizontal direction on the side of the main frame 115, the support plate 25 is coupled to the upper surface.

At this time, the profile 21 is provided so as to adjust the engagement position of the support plate 25 by forming a coupling groove 22 in the longitudinal direction on the upper surface.

On the other hand, the support plate 25 has a bent portion 27 in the vertical direction is formed in the front end portion so as to stably support the dog member 30, the rear side portion has two long hole-shaped coupling holes ( 26 is preferably formed through.

Therefore, the support plate 25 may be fixed to the profile 21 using a bolt.

Meanwhile, as shown in FIGS. 5 and 6, the dog member 30 has a bent portion 37 formed at a rear side thereof so that the dog member 30 can be closely attached to the bent portion 27 of the support plate 25. 32 is formed to protrude to a certain width.

At this time, the support plate 25 and the dog member 30 can also be coupled using a bolt, and at least one of the bent portions 27 and 37 so that the upper and lower coupling positions of the bent portions 27 and 37 can be adjusted. ), It is preferable to form a coupling hole in the form of a long hole.

On the other hand, the sensing unit 50 serves to determine the stop position of the driving unit 120 by detecting the position of the sensing surface 32 provided in the dog member 30, the support bracket 55 and two sensors ( 51).

The support bracket 55 is coupled to one side of the moving frame 160 of the driving unit 120 to support the sensor 51. As shown in FIG. 6, the support bracket 55 may be provided in a bent shape at the center thereof. Two sensors 51 are spaced at regular intervals and installed in parallel.

The support bracket 55 is also preferably formed with a fastening hole 56 in the form of a long hole so that the position can be adjusted when the bolt is coupled.

On the other hand, the sensor 51 is spaced apart to correspond to the width of the sensing surface 32 to simultaneously detect both ends of the sensing surface 32 of the dog member 30, the sensing surface 32 can pass through the center portion The sensing groove 52 is formed in the horizontal direction so that it is.

Here, the sensor 51 may be a general photo sensor.

Hereinafter, an operation process of the positioning device of the present invention will be described in detail with reference to FIG.

As shown, since the sensing unit 50 is installed in the moving frame 160 of the driving unit 120, the sensing unit 50 moves along the longitudinal direction of the main frame 115 of the transfer unit 110 together with the moving frame 160. do.

Accordingly, when the driving motor 130 is rotated by the driving signal of the robot controller, the driving unit 120 moves along the main frame 115 of the transfer unit 110, and at the same time, the sensing unit 50 also drives the driving unit 120. Will be moved with).

The sensing unit 50 moves along the main frame 115 to the position of the sensor dog unit 40 installed in the main frame 115, where the sensing surface 32 of the dog member 30 is two sensors. The sensor 51 is sequentially entered into the sensing groove 52, and when the two sensors 51 detect both ends of the sensing surface 32 of the dog member 30 at the same time, the sensor 51 sends a signal to the controller. 200 will inform the control unit that the stop at the correct position.

Therefore, when the main body 200 stops at a specific position, if a signal is detected from the sensor 51 of the sensing unit 50 as described above, the control unit commands a second operation, and if a signal is not detected, a warning is issued. Or secondary operations are not performed.

In this case, since the position of the sensor dog part 40 is set in the driving part 100 to correspond to the process equipment or the cassette, the control part can check the exact position of the main body 200 and prevent the secondary accident by the arm operation. It will be possible.

In addition, the precise positioning device 10 of the present invention is the rotation of the drive motor 130 is fixed in the state in which power transmission is inaccurate due to damage or damage of the reduction gear 140 or the coupling part of the drive unit 120 (coupling part) Even when operating as many as two sensors 51 to ensure that the main body 200 is stopped at the correct position only when both sides of the sensing surface 32 of the dog member 30 at the same time.

Therefore, the positioning device 10 of the present invention is to prevent the secondary accident in advance by allowing the control unit to check the correct position of the main body 200 through the signal transmitted from the sensor 51.

Here, the exact positioning device 10 is not limited to the position as shown, and may be installed in various places capable of detecting the relative position, such as the upper and lower portions of the driving unit 120 and the main frame 115.

Therefore, according to the present invention, the sensor dog 40 and the sensing unit 50 check the position on the driving unit 100 in synchronization with the movement of the driving unit 120 and then feed back the driving unit. Accurate position control of the main body 200 is possible even in the case of malfunction due to damage or damage of the reducer 140, coupling, gear, etc. of the drive unit 120 provided in the 100, and thus inaccurate position It is possible to prevent secondary accidents caused by the arm operation of the arm.

As described above, the exemplary embodiments are merely described as examples for convenience of description, and thus are not intended to limit the scope of the claims, and various modifications may be made within the technical scope of the present invention.

Explanation of symbols on the main parts of the drawings
10: positioning device 20: main support
21: profile 22: coupling groove
25: support plate 26: coupling hole
27,37: bend portion 30: dog member
32: sensing face 40: sensor dog part
50: sensor 51: sensor
52: sensing groove 55: support bracket
56: fastening hole 100: running part
110: transfer unit 115: main frame
117: LM guide 120: drive unit
130: drive motor 140: reducer
150: rack 160: moving frame
180: rotating shaft 200: main body
210: rotating part 220: lifting part
230: arm part

Claims (6)

As the body of the robot is mounted on the moving frame 160 to move the position on the moving unit 100 to detect the exact position of the robot main body,
A main support body 20 having a support plate 25 coupled to one side of the main frame 115 of the traveling part 100;
A dog member 30 coupled to the front surface of the support plate 25 of the main support body 20 and having a sensing surface 32 protruding from a front end thereof;
A sensing unit (50) having a plurality of sensors (51) installed in the movable frame (160) to recognize the correct position of the main body when both ends of the front end of the dog member (30) are detected; Including;
The support plate 25 is formed through the plurality of coupling holes 26 of the long hole shape to be able to adjust the coupling position, the front surface is provided with a bent portion 27 to which the dog member 30 is coupled Positioning device for robot running part. delete The method of claim 1,
The main support 20 further includes a profile 21 having a predetermined length coupled to the main frame 115 of the traveling part 100 in a horizontal direction;
Robotic running part positioning device, characterized in that the support plate 25 is coupled to the upper surface of the profile (21). delete The method of claim 1,
The dog member 30 has a bent portion 37 through which a plurality of long holes are penetrated at a rear end thereof so as to be coupled to the bent portion 27 of the support plate 25, and the sensing surface 32 is formed at the front end thereof. Robot running portion positioning device, characterized in that the predetermined length protruding forward. The method of claim 1,
The sensing unit 50 includes a support bracket 55 coupled to the robot body,
The sensor 51 is installed in parallel with the horizontal spaced apart on the front surface of the support bracket 55, the robot running unit comprising two photosensors for detecting both ends of the sensing surface of the dog member 30 Positioning device.
KR1020130039176A 2013-04-10 2013-04-10 Regular position checking apparatus for moving part of robot KR102050105B1 (en)

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KR1020130039176A KR102050105B1 (en) 2013-04-10 2013-04-10 Regular position checking apparatus for moving part of robot

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Application Number Priority Date Filing Date Title
KR1020130039176A KR102050105B1 (en) 2013-04-10 2013-04-10 Regular position checking apparatus for moving part of robot

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KR102050105B1 true KR102050105B1 (en) 2019-11-28

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KR102491718B1 (en) * 2016-03-04 2023-01-27 주식회사 케이씨텍 Wafer transfer apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101243659B1 (en) * 2012-09-04 2013-03-15 주식회사아이로보 Cocking structure of actuator sliding block

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070057475A (en) 2005-12-02 2007-06-07 엘지.필립스 엘시디 주식회사 Transferring robot control system to provent damage of substrate and method for proventing damage of substrate using thereof
KR20120138337A (en) * 2011-06-15 2012-12-26 현대중공업 주식회사 Driving position inspection apparatus of lcd transfer robot and inspection method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101243659B1 (en) * 2012-09-04 2013-03-15 주식회사아이로보 Cocking structure of actuator sliding block

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