KR102041881B1 - 3 자유도 평면 정렬 장치 - Google Patents

3 자유도 평면 정렬 장치 Download PDF

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Publication number
KR102041881B1
KR102041881B1 KR1020180124041A KR20180124041A KR102041881B1 KR 102041881 B1 KR102041881 B1 KR 102041881B1 KR 1020180124041 A KR1020180124041 A KR 1020180124041A KR 20180124041 A KR20180124041 A KR 20180124041A KR 102041881 B1 KR102041881 B1 KR 102041881B1
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KR
South Korea
Prior art keywords
absolute position
stage
binary code
dimensional
section
Prior art date
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KR1020180124041A
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English (en)
Korean (ko)
Inventor
김종안
김재완
이재용
우제흔
Original Assignee
한국표준과학연구원
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Priority to KR1020180124041A priority Critical patent/KR102041881B1/ko
Priority to CN201910982764.8A priority patent/CN111060003B/zh
Application granted granted Critical
Publication of KR102041881B1 publication Critical patent/KR102041881B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/52—Combining or merging partially overlapping images to an overall image

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020180124041A 2018-10-17 2018-10-17 3 자유도 평면 정렬 장치 KR102041881B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020180124041A KR102041881B1 (ko) 2018-10-17 2018-10-17 3 자유도 평면 정렬 장치
CN201910982764.8A CN111060003B (zh) 2018-10-17 2019-10-16 3自由度平面对准装置及其操作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020180124041A KR102041881B1 (ko) 2018-10-17 2018-10-17 3 자유도 평면 정렬 장치

Publications (1)

Publication Number Publication Date
KR102041881B1 true KR102041881B1 (ko) 2019-11-27

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ID=68729639

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180124041A KR102041881B1 (ko) 2018-10-17 2018-10-17 3 자유도 평면 정렬 장치

Country Status (2)

Country Link
KR (1) KR102041881B1 (zh)
CN (1) CN111060003B (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060238776A1 (en) * 2005-04-22 2006-10-26 Chu David C System for sensing an absolute position in two dimensions using a target pattern
KR20120015936A (ko) * 2010-08-13 2012-02-22 삼성전자주식회사 노광 장치와 이를 이용한 정렬 오차 보정 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8441648B2 (en) * 2008-02-07 2013-05-14 Fujifilm Corporation Calibration jig for optical tomographic imaging apparatus and method for generating a calibration conversion table
US9511496B2 (en) * 2014-06-20 2016-12-06 The Boeing Company Robot alignment systems and methods of aligning a robot
CN105509644B (zh) * 2016-01-14 2018-01-12 哈尔滨工业大学 基于两个平面光栅的气浮台三自由度位移测量系统
CN207833315U (zh) * 2017-12-29 2018-09-07 华南理工大学 一种视觉伺服的平面三自由度宏微复合定位系统

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060238776A1 (en) * 2005-04-22 2006-10-26 Chu David C System for sensing an absolute position in two dimensions using a target pattern
KR20120015936A (ko) * 2010-08-13 2012-02-22 삼성전자주식회사 노광 장치와 이를 이용한 정렬 오차 보정 방법

Also Published As

Publication number Publication date
CN111060003B (zh) 2021-10-15
CN111060003A (zh) 2020-04-24

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