KR102033796B1 - Resist composition, and method for producing resist pattern - Google Patents

Abstract

[식 중, R¹, R²는 치환기를 가지고 있어도 되는 탄소수 1~10의 알킬기, R³, R⁴는 치환기를 가지고 있어도 되는 탄소수 2~10의 알킬기, R³과 R⁴는 이것들이 결합하는 황 원자와 함께 고리를 형성하고 있어도 된다. X^-는 짝 음이온이다.］By using a novel photoreactive quencher, there is provided a resist composition capable of improving sensitivity and lithography characteristics, and a method of forming a resist pattern using the resist composition. A resist composition in which an acid is generated by exposure and the solubility in a developer is changed by the action of an acid, the resin composition containing a resin component (A) and a photoreactive quencher (D0) in which the solubility in the developer is changed by the action of an acid. And the photoreactive quencher (D0) contains a compound (D0-1) represented by the following general formula (d0).

[In formula, R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent, R <^3> , R <^4> has a C2-C10 alkyl group which may have a substituent, R <^3> and R <^4> combine these, You may form the ring with a sulfur atom. X ^- is a counter anion.]

Description

Resist composition and resist pattern formation method {RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN}

The present invention relates to a resist composition and a method of forming a resist pattern.

In the lithography technique, for example, a resist film made of a resist material is formed on a substrate, and selectively exposed to radiation such as light and electron beam through a mask having a predetermined pattern formed on the resist film, and then subjected to development treatment. A step of forming a resist pattern having a predetermined shape in the resist film is performed.

The resist material which changes to the characteristic which the exposed part changes in the characteristic which melt | dissolves in a developing solution is positive type, and the resist material which changes in the characteristic which the exposed part does not melt | dissolve in a developing solution is called negative type.

BACKGROUND ART In recent years, in the manufacture of semiconductor devices and liquid crystal display devices, pattern miniaturization is rapidly progressing due to advances in lithography technology.

As a method of miniaturization, shortening of wavelength (high energy) of an exposure light source is generally performed. Specifically, ultraviolet rays typified by g line and i line have conventionally been used, but mass production of semiconductor devices using KrF excimer lasers and ArF excimer lasers is now disclosed. In addition, studies have been conducted on electron beams, EUV (extreme ultraviolet rays), X-rays, and the like having shorter wavelengths (high energy) than these excimer lasers.

The resist material requires lithographic characteristics such as sensitivity to these exposure light sources and resolution capable of reproducing a pattern of fine dimensions.

As a resist material that satisfies such a requirement, a chemically amplified resist composition containing a base component which changes in solubility in a developing solution under the action of an acid and an acid generator component which generates an acid by exposure is conventionally used. For example, when the developing solution is an alkaline developing solution (alkali developing process), the positive chemically amplified resist composition includes a resin component (base resin) and an acid generator component which increase solubility in an alkaline developing solution due to the action of an acid. It is generally used to contain. When a resist film formed using such a resist composition is subjected to selective exposure at the time of forming a resist pattern, acid is generated from an acid generator component in an exposed portion, and the polarity of the base resin is increased by the action of the acid, and the exposed portion is exposed to an alkaline developer. Is available for. For this reason, by alkali development, the positive pattern in which an unexposed part remains as a pattern is formed. On the other hand, when the solvent development process using the developer (organic developer) containing the organic solvent is applied, when the polarity of the base resin increases, solubility in the organic developer is relatively decreased, so that the unexposed portion of the resist film is dissolved by the organic developer. The negative resist pattern in which the exposed portion remains as a pattern is removed. Thus, the solvent developing process which forms a negative resist pattern may be called a negative developing process (patent document 1).

Moreover, in recent years, mix | blending a photoreaction quencher with the chemically amplified resist composition is proposed (for example, refer patent documents 2-3). The photoreactive quencher is a salt of an anion and a cation, and has a quenching action to trap an acid generated from an acid generator or the like by an ion exchange reaction before exposure, and decomposes by exposure to lose this quenching action. For this reason, when exposing the resist film formed using the chemically amplified resist composition containing a photoreactive quencher, the exposure part loses basicity with respect to the acid generated from an acid generator or the like in the exposed portion. In an unexposed part, a photoreaction quencher traps an acid, and the diffusion of the acid from an exposed part to an unexposed part is suppressed, and the lithographic characteristic is improved.

Japanese Laid-Open Patent Publication No. 2009-025723 Japanese Patent Application Laid-Open No. 6-266100 International Publication No. 2010/147079

As further advances in lithography technology and application areas expand, further improvements in various lithography characteristics are required.

An object of this invention is to provide the resist composition which can improve a sensitivity and a lithography characteristic by using a novel photoreactive quencher, and the resist pattern formation method using this resist composition.

A first aspect of the present invention is a resist composition in which an acid is generated by exposure and the solubility in a developer is changed by the action of an acid, the resin component (A) and the light in which the solubility in the developer is changed by the action of an acid. It comprises a reactive quencher (D0), and the said photoreactive quencher (D0) contains the compound (D0-1) represented by the following general formula (d0), It is a resist composition characterized by the above-mentioned.

[In formula, R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent, R <^3> , R <^4> has a C2-C10 alkyl group which may have a substituent, R <^3> and R <^4> combine these, You may form the ring with a sulfur atom. X ^- is a counter anion.]

A second aspect of the present invention is a resist pattern forming method comprising a step of forming a resist film using the resist composition of the first aspect, a step of exposing the resist film, and a step of developing the resist film to form a resist pattern.

ADVANTAGE OF THE INVENTION According to this invention, the resist composition which can improve a sensitivity and a lithography characteristic by using a novel photoreactive quencher, and the resist pattern formation method using this resist composition can be provided.

In the present specification and the claims, “aliphatic” is defined as meaning a group, a compound, or the like having no aromaticity as a relative concept with respect to aromatics.

"Alkyl group" shall contain a linear, branched, and cyclic monovalent saturated hydrocarbon group unless there is particular notice.

"Alkylene group" shall contain a straight, branched, and cyclic divalent saturated hydrocarbon group unless there is particular notice. The alkyl group in an alkoxy group is the same.

The "halogenated alkyl group" is a group in which part or all of the hydrogen atoms of the alkyl group are substituted with halogen atoms, and examples of the halogen atoms include fluorine atom, chlorine atom, bromine atom and iodine atom.

The "fluorinated alkyl group" or the "fluorinated alkylene group" refers to a group in which part or all of the hydrogen atoms of the alkyl group or the alkylene group are substituted with fluorine atoms.

A "structural unit" means the monomeric unit (monomer unit) which comprises a high molecular compound (resin, a polymer, a copolymer).

The "structural unit derived from an acrylic acid ester" means the structural unit which the ethylenic double bond of an acrylic acid ester cleaves and is comprised.

"Acrylate ester" is a compound of hydrogen atoms of the organic carboxy-terminal-substituted acrylic acid _{(CH 2 = CH-COOH)} .

As for the acrylic ester, the hydrogen atom couple | bonded with the carbon atom of the (alpha) position may be substituted by the substituent. Substituents (R ^α ) for substituting a hydrogen atom bonded to a carbon atom at the α position are atoms or groups other than a hydrogen atom, for example, an alkyl group having 1 to 5 carbon atoms, a halogenated alkyl group having 1 to 5 carbon atoms, a hydroxyalkyl group, or the like. Can be mentioned. In addition, the carbon atom of the (alpha) position of an acrylic ester refers to the carbon atom which the carbonyl group couple | bonds unless there is particular notice.

Hereinafter, the acrylic ester in which the hydrogen atom couple | bonded with the carbon atom of the (alpha) position substituted by the substituent may be called (alpha) substituted acrylic ester. Moreover, acrylic ester and alpha substituted acrylic ester may be included and may be called "(alpha substituted) acrylic acid ester."

The "structural unit derived from a hydroxy styrene or a hydroxy styrene derivative" means the structural unit which the ethylenic double bond of a hydroxy styrene or a hydroxy styrene derivative cleaves and is comprised.

"Hydroxystyrene derivative" is taken as the concept containing the thing substituted by other substituents, such as an alkyl group and a halogenated alkyl group, in the hydrogen position of the (alpha) position of hydroxystyrene, and these derivatives. As these derivatives, the hydrogen atom of the hydroxyl group of the hydroxystyrene which the hydrogen atom of the (alpha) position may be substituted by the organic group, and the hydroxyl group in the benzene ring of the hydroxystyrene which the hydrogen atom of the (alpha) position may be substituted by the substituent The thing which other substituents couple | bonded, etc. are mentioned. In addition, an alpha position (carbon atom of an alpha position) means the carbon atom to which the benzene ring couple | bonds unless there is particular notice.

As a substituent which substitutes the hydrogen atom of the (alpha) position of hydroxy styrene, the thing similar to what was mentioned as a substituent of the (alpha) position in the said (substituted) acrylic acid ester is mentioned.

The "structural unit derived from vinyl benzoic acid or vinyl benzoic acid derivative" means a structural unit which is formed by cleaving the ethylenic double bond of vinyl benzoic acid or vinyl benzoic acid derivative.

"Vinyl benzoic acid derivative" is taken as the concept containing the thing substituted by the other substituents, such as an alkyl group and a halogenated alkyl group, in the hydrogen position of the (alpha) position of vinyl benzoic acid, and these derivatives. As these derivatives, a hydroxyl group and a carboxyl group are substituted by the hydrogen atom of the carboxy group of vinyl benzoic acid in which the hydrogen atom in the α position may be substituted with a substituent, and the benzene ring in the vinyl benzoic acid in which the hydrogen atom in the α position may be substituted by a substituent. The thing which other substituents couple | bonded, etc. are mentioned. In addition, an alpha position (carbon atom of an alpha position) means the carbon atom to which the benzene ring couple | bonds unless there is particular notice.

The term "styrene" includes a concept in which styrene and a hydrogen atom at the α position of styrene are substituted with other substituents such as an alkyl group and a halogenated alkyl group.

"Structural unit derived from styrene" and "structural unit derived from styrene derivative" mean a structural unit which is formed by cleaving ethylenic double bonds of styrene or styrene derivatives.

The alkyl group as the substituent at the α position is preferably a linear or branched alkyl group, and specifically, an alkyl group having 1 to 5 carbon atoms (methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert). -Butyl group, pentyl group, isopentyl group, neopentyl group), etc. are mentioned.

Moreover, the halogenated alkyl group as a substituent of the (alpha) position specifically, mention | raise | lifted the group which substituted one or all the hydrogen atoms of the said "alkyl group as a substituent of the (alpha) position" with a halogen atom. As this halogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is especially preferable.

Moreover, the hydroxyalkyl group as a substituent of the (alpha) position specifically, mentions the group which substituted one or all the hydrogen atoms of the "alkyl group as a substituent of the (alpha) position" with the hydroxyl group. 1-5 are preferable and, as for the number of the hydroxyl groups in this hydroxyalkyl group, 1 is the most preferable.

When indicated as "or may have a substituent", a methylene group (-CH ₂ -) in the case of replacing a hydrogen atom (-H) groups substituted monovalent When the divalent group includes both.

"Exposure" is taken as the concept containing the irradiation of the whole radiation.

The resist composition of the present invention is a resist composition in which an acid is generated by exposure and the solubility in a developer is changed by the action of an acid, and the resin component (A) and the light reactivity in which the solubility in the developer is changed by the action of an acid are changed. It consists of containing quencher (D0), and the said photoreactive quencher (D0) contains compound (D0-1) represented by the following general formula (d0), It is characterized by the above-mentioned.

[In formula, R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent, R <^3> , R <^4> has a C2-C10 alkyl group which may have a substituent, R <^3> and R <^4> combine these, You may form the ring with a sulfur atom. X ^- is a counter anion.]

The resist composition of the present invention is a resist composition in which an acid is generated by exposure and the solubility in a developer is changed by the action of an acid, and the resin component (A) in which the solubility in the developer is changed by the action of an acid (hereinafter, "Also called (A) component").

When a resist film is formed using such a resist composition, and selective exposure is performed to the resist film, an acid is generated in the exposed portion, and the solubility of the component (A) in the developer is changed by the action of the acid. Since the solubility of the component (A) in the developing solution does not change, a difference in solubility in the developing solution occurs between the exposed portion and the unexposed portion. Therefore, when the resist film is developed, the exposed portion is dissolved and removed when the resist composition is positive, and a positive resist pattern is formed. When the resist composition is negative, the unexposed portion is dissolved and removed to form a negative resist pattern. Is formed.

In the present specification, the resist composition in which the exposed portion is dissolved and removed to form a positive resist pattern is called a positive resist composition, and the resist composition in which the unexposed portion is dissolved and removed to form a negative resist pattern is referred to as a negative resist composition.

The resist composition of the present invention may be a positive resist composition or a negative resist composition.

Moreover, the resist composition of this invention may be for the alkali developing process which uses an alkaline developing solution for the developing process at the time of resist pattern formation, or for the solvent developing process which uses the developing solution (organic developing solution) containing an organic solvent for this developing process. do.

The resist composition of the present invention has an acid generating ability to generate an acid by exposure, and the component (A) may generate an acid by exposure, and the additive component blended separately from the component (A) may be acid by exposure. May be generated.

Specifically, the resist composition of the present invention

(1) may contain an acid generator component (B) (hereinafter referred to as "(B) component") which generates an acid by exposure;

(2) The component (A) may be a component which generates an acid by exposure;

(3) (A) A component is a component which generate | occur | produces an acid by exposure, and may contain the (B) component further.

That is, in the case of said (2) and (3), (A) component becomes "the base component which produces | generates an acid by exposure and changes solubility to a developing solution by the action of an acid." When the component (A) is a base component that generates an acid upon exposure and changes in solubility in a developing solution due to the action of an acid, the component (A1) described later generates an acid upon exposure and further acts as an acid. It is preferable that it is a high molecular compound in which the solubility with respect to a developing solution changes. As such a high molecular compound, resin which has a structural unit which generate | occur | produces an acid by exposure can be used. A well-known thing can be used as a structural unit which generate | occur | produces an acid by exposure.

It is especially preferable that the resist composition of this invention is a case of said (1).

<Resin component (A)>

It does not specifically limit as a resin component (A) which changes the solubility with respect to alkali by the action of an acid, The arbitrary resin which changes solubility with respect to alkali by the action of an acid can be used. Especially, it is preferable to contain at least 1 sort (s) of resin chosen from the group which consists of novolak resin (Anv1), polyhydroxy styrene resin (Aphs1), and acrylic resin (Aac1).

The resin component (A) contains an acid decomposable group whose polarity is changed by the action of an acid.

An "acid-decomposable group" is a group having an acid-decomposable property that at least a part of bonds in the structure of the acid-decomposable group can cleave by the action of an acid.

As an acid-decomposable group whose polarity increases by the action of an acid, a group which decomposes by the action of an acid and generates a polar group is mentioned.

A polar group, may be mentioned, for example carboxyl group, a hydroxyl group, an amino group, a sulfo group (-SO ₃ H) or the like. Among these, a polar group (hereinafter sometimes referred to as "OH-containing polar group") in the structure is preferable, a carboxyl group or a hydroxyl group is preferable, and a carboxyl group is particularly preferable.

As an acid-decomposable group, the group by which the said polar group was protected by the acid dissociable group (for example, the group which protected the hydrogen atom of OH containing polar group by the acid dissociable group) is mentioned.

Here, "acid dissociative group"

(i) a group having an acid dissociation property in which a bond between the acid dissociable group and an atom adjacent to the acid dissociable group can be cleaved by the action of an acid, or

(ii) refers to both groups capable of cleaving a bond between an acid dissociable group and an atom adjacent to the acid dissociable group as a result of further decarbonation reaction after cleaving some bonds by the action of an acid. .

The acid dissociable group constituting the acid-decomposable group is required to be a group having a lower polarity than the polar group produced by dissociation of the acid dissociable group, whereby when the acid dissociable group dissociates due to the action of the acid, A polar group having a polarity higher than that of a dissociable group is generated, and the polarity is increased. As a result, the polarity of the whole (A1) component increases. As the polarity increases, solubility in the developer is relatively changed, solubility increases when the developer is an alkaline developer, and solubility decreases when the developer is an organic developer.

It does not specifically limit as an acid dissociable group, The thing currently proposed as the acid dissociable group of the base resin for chemically amplified resist can be used.

As an acid dissociable group which protects a carboxyl group or a hydroxyl group among the said polar groups, the acid dissociable group represented by the following general formula (a1-r-1) (Hereinafter, it may be called "acetal acid dissociable group.") Can be mentioned.

[And wherein, Ra ^'1, Ra' ² is or an alkyl hydrogen atom, Ra ^'3 is a group hydrocarbon Ra' ³ is also combined with any one of the Ra ^'1, Ra' ² form a ring.]

In Formula (a1-r-1), at least one of Ra ' ¹ and Ra' ² is preferably a hydrogen atom, and more preferably both of them are hydrogen atoms.

In the case where Ra ' ¹ or Ra' ² is an alkyl group, examples of the alkyl group include the same alkyl groups as the substituents which may be bonded to a carbon atom at the α-position in the description of the α-substituted acrylic acid ester. The alkyl group of is preferable. Specific examples include linear or branched alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group, isopentyl group and neopentyl group. Methyl group or ethyl group is preferable, and a methyl group is especially preferable.

In the formula (a1-r-1), a hydrocarbon group of Ra ′ ³ includes a linear, branched or cyclic alkyl group. It is preferable that carbon number of this linear alkyl group is 1-5, 1-4 are more preferable, and 1 or 2 is still more preferable. Specifically, a methyl group, an ethyl group, n-propyl group, n-butyl group, n-pentyl group, etc. are mentioned. Among these, a methyl group, an ethyl group, or n-butyl group is preferable, and a methyl group or ethyl group is more preferable.

It is preferable that carbon number is 3-10, and, as for this branched alkyl group, 3-5 are more preferable. Specifically, isopropyl group, isobutyl group, tert-butyl group, isopentyl group, neopentyl group, etc. are mentioned, It is most preferable that it is an isopropyl group.

It is preferable that this cyclic alkyl group is C3-C20, and 4-12 are more preferable. Specifically, the group remove | excluding one or more hydrogen atoms from monocyclo alkanes, such as cyclopentane and a cyclohexane, and polycyclo alkanes, such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclo dodecane, etc. Can be mentioned. Some of the carbon atoms constituting the ring of the cyclic alkyl group may be substituted with an ethereal oxygen atom (-O-).

Ra in the case of forming a ring by combining with any one of 'the ^three Ra' ^1, Ra ^'2, a cyclic group include 4-7 membered rings are preferred, and more preferred is 4-6 membered ring. Specific examples of the cyclic group include tetrahydropyranyl group, tetrahydrofuranyl group and the like.

As an acid dissociable group which protects a carboxyl group among the said polar groups, the acid dissociable group represented by following General formula (a1-r-2) is mentioned, for example (acid dissociation represented by following formula (a1-r-2)). Among the groups, those constituted by alkyl groups may be referred to as &quot; tertiary alkyl ester type acid dissociable groups &quot;

[Wherein, Ra ' ⁴ to Ra' ⁶ are each a hydrocarbon group, and Ra ' ⁵ and Ra' ⁶ may be bonded to each other to form a ring.]

Examples of the hydrocarbon group for Ra ′ ⁴ to Ra ′ ⁶ include the same groups as those for Ra ′ ³ .

Ra ' ⁴ is preferably an alkyl group having 1 to 5 carbon atoms. When the Ra ^{6 '5} and Ra' form a ring by combining to each other, can be given to a group represented by formula (a1-r2-1). On the other hand, when Ra ' ⁴ to Ra' ⁶ do not bond with each other and are independent hydrocarbon groups, groups represented by the following general formula (a1-r2-2) are mentioned.

[Wherein, Ra ^'10 is C 1 -C 10 alkyl group, Ra of the' ¹¹ 'group to form an aliphatic cyclic group together with the carbon atom ¹⁰ bonded, Ra, Ra ¹² ~ Ra' ¹⁴ are each independently hydrocarbon groups Is displayed.]

In the formula (a1-r2-1), Ra is preferably an either a straight or branched chain alkyl group, the alkyl group of the alkyl group of ¹⁰ 1 to 10 carbon atoms of the of the Ra in the formula (a1-r-1) 'of the ^three. Equation (a1-r2-1) of, Ra is preferably an alkyl group as either a cyclic, an aliphatic cyclic group which has ¹¹ configured Ra in the formula (a1-r-1) ' 3.

In the formula (a1-r2-2), Ra ' 12 And and Ra ^'14 are each independently preferably an alkyl group of 1 to 10 carbon atoms, and the alkyl group is formulas (a1-r-1) Ra of the "more preferred group is either a straight chain or branched alkyl group chain of ^3, It is more preferable that it is a C1-C5 linear alkyl group, and it is especially preferable that it is a methyl group or an ethyl group.

Is formula (a1-r2-2) of, Ra is ^"13 expression (a1-r-1) Ra of the" alkyl group having a straight chain, branched chain or cyclic, exemplified as the hydrocarbon ^group which are preferable. Among these, the group mentioned as Ra <^3> cyclic alkyl group is more preferable.

The specific example of said formula (a1-r2-1) is given to the following. Hereinafter, "*" represents a bond.

The specific example of said formula (a1-r2-2) is given to the following.

Moreover, as an acid dissociable group which protects a hydroxyl group among the said polar groups, for example, an acid dissociable group represented by the following general formula (a1-r-3) (hereinafter, for convenience, a "tertiary alkyloxycarbonyl acid dissociable group) May be referred to.

[Wherein, Ra ' ⁷ to Ra' ⁹ are each an alkyl group.]

Formula (a1-r-3) of, Ra ^'7 ~ Ra' ⁹ group is an alkyl group of 1 to 5 carbon atoms are preferred, more preferably 1-3.

Moreover, it is preferable that carbon number of the sum total of each alkyl group is 3-7, It is more preferable that it is 3-5, It is most preferable that it is 3-4.

[Acrylic Resin (Aac1)]

As acrylic resin (Aac1), resin containing the structural unit represented by the following general formula (a1-1)-(a1-2) can be used.

[In formula, R is a hydrogen atom, a C1-C5 alkyl group, or a C1-C5 halogenated alkyl group. Va ¹ is a divalent hydrocarbon group which may have an ether bond, a urethane bond, or an amide bond, n _a1 is each independently 0 to 2, and Ra ¹ is the formulas (a1-r-1) to (a1-r). It is an acid dissociable group represented by -2). Wa ¹ is an n _a2 + monovalent hydrocarbon group, n _a2 is 1-3, and Ra ² is an acid dissociable group represented by the formula (a1-r-1) or (a1-r-3).]

In the formula (a1-1), the alkyl group having 1 to 5 carbon atoms is preferably linear or branched, and specifically, methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, tert- Butyl group, pentyl group, isopentyl group, neopentyl group and the like. The halogenated alkyl group having 1 to 5 carbon atoms is a group in which part or all of the hydrogen atoms of the alkyl group having 1 to 5 carbon atoms are substituted with halogen atoms. As this halogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is especially preferable.

R is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a fluorinated alkyl group having 1 to 5 carbon atoms, and most preferably a hydrogen atom or a methyl group because of industrial availability.

The divalent hydrocarbon group for Va ^{1 may be} an aliphatic hydrocarbon group or an aromatic hydrocarbon group. An aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. The aliphatic hydrocarbon group as the divalent hydrocarbon group in Va ¹ may be saturated or unsaturated, and is preferably saturated.

Specific examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group or an aliphatic hydrocarbon group containing a ring in the structure.

The roneun Va ¹ include those wherein the divalent hydrocarbon group bonded via an ether bond, a urethane bond or an amide bond.

The linear or branched aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6, still more preferably 1 to 4, and most preferably 1 to 3 carbon atoms.

As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specifically, a methylene group [-CH _2- ], an ethylene group [-(CH ₂ ) _2- ], and a trimethylene group [-(CH ₂ ) _3- ], tetramethylene group [-(CH ₂ ) _4- ], pentamethylene group [-(CH ₂ ) _5- ], and the like.

As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specifically, -CH (CH ₃ )-, -CH (CH ₂ CH ₃ )-, -C (CH ₃ ) _2- , -C ( Alkyl methylene groups such as CH ₃ ) (CH ₂ CH ₃ )-, -C (CH ₃ ) (CH ₂ CH ₂ CH ₃ )-, and -C (CH ₂ CH ₃ ) ₂ -;-CH (CH ₃ ) CH _2- , -CH (CH ₃ ) CH (CH ₃ )-, -C (CH ₃ ) ₂ CH _2- , -CH (CH ₂ CH ₃ ) CH _2- , -C (CH ₂ CH ₃ ) ₂ -CH Alkyl ethylene groups such as _2- ; alkyl trimethylene groups such as -CH (CH ₃ ) CH ₂ CH _2- , -CH ₂ CH (CH ₃ ) CH _2- ; -CH (CH ₃ ) CH ₂ CH ₂ CH ₂ - and the like can be mentioned alkyl groups, such as alkyl, such as a tetramethylene group _{-, -CH 2 CH (CH 3} ) CH 2 CH 2. As an alkyl group in an alkyl alkylene group, a C1-C5 linear alkyl group is preferable.

As the aliphatic hydrocarbon group containing a ring in the above structure, an alicyclic hydrocarbon group (group excluding two hydrogen atoms from an aliphatic hydrocarbon ring), and an alicyclic hydrocarbon group at a terminal of a linear or branched aliphatic hydrocarbon group The group which the couple | bonded group and the alicyclic hydrocarbon group interpose in the middle of a linear or branched aliphatic hydrocarbon group etc. are mentioned. The same thing as the above is mentioned as said linear or branched aliphatic hydrocarbon group.

It is preferable that carbon number is 3-20, and, as for the said alicyclic hydrocarbon group, it is more preferable that it is 3-12.

The alicyclic hydrocarbon group may be polycyclic or monocyclic. As a monocyclic alicyclic hydrocarbon group, the group remove | excluding two hydrogen atoms from monocycloalkane is preferable. As this monocycloalkane, a C3-C6 thing is preferable, A cyclopentane, a cyclohexane, etc. are mentioned specifically ,. As a polycyclic alicyclic hydrocarbon group, the group remove | excluding two hydrogen atoms from polycycloalkane is preferable, The thing of C7-12 is preferable as this polycycloalkane, Specifically, adamantane, norbornane, and isobor Egg, tricyclodecane, tetracyclo dodecane, etc. are mentioned.

An aromatic hydrocarbon group is a hydrocarbon group which has an aromatic ring.

The aromatic hydrocarbon group as the divalent hydrocarbon group in Va ¹ preferably has 3 to 30 carbon atoms, more preferably 5 to 30, still more preferably 5 to 20, and particularly preferably 6 to 15, 6-10 are the most preferable. However, this carbon number shall not contain carbon number in a substituent.

As an aromatic ring which an aromatic hydrocarbon group has, Specifically, Aromatic hydrocarbon ring, such as benzene, a biphenyl, fluorene, naphthalene, anthracene, phenanthrene; The aromatic part in which some carbon atoms which comprise the said aromatic hydrocarbon ring were substituted by the hetero atom. Heterocycles; and the like. As a hetero atom in an aromatic heterocycle, an oxygen atom, a sulfur atom, a nitrogen atom, etc. are mentioned.

Specifically as an aromatic hydrocarbon group, group which removed two hydrogen atoms from the said aromatic hydrocarbon ring (arylene group); One of the hydrogen atoms of the group (aryl group) which removed one hydrogen atom from the said aromatic hydrocarbon ring is alkyl A hydrogen atom from an aryl group in an aryl alkyl group such as a group substituted with a ethylene group (for example, a benzyl group, phenethyl group, 1-naphthylmethyl group, 2-naphthylmethyl group, 1-naphthylethyl group, 2-naphthylethyl group) And group which excluded one more; The group which removed two hydrogen atoms from the aromatic compound (for example, biphenyl, fluorene etc.) containing two or more aromatic rings; etc. are mentioned. It is preferable that carbon number of the said alkylene group (alkyl chain in an aryl alkyl group) is 1-4, It is more preferable that it is 1-2, It is especially preferable that it is 1.

In the formula (a1-2), the n _a2 + monovalent hydrocarbon group in Wa ^{1 may} be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. This aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity, may be saturated or unsaturated, and is preferably saturated. The aliphatic hydrocarbon group may be a combination of a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group containing a ring in its structure, or a linear or branched aliphatic hydrocarbon group and an aliphatic hydrocarbon group containing a ring in its structure. One group is mentioned, Specifically, the same group as Va <^1> of Formula (a1-1) mentioned above is mentioned.

2-4 tetravalent is preferable and, as for said n _a2 + 1 valency, 2 or trivalent is more preferable.

Especially as said Formula (a1-2), the structural unit represented by the following general formula (a1-2-01) is preferable.

In formula (a1-2-01), Ra ² is an acid dissociable group represented by the formula (a1-r-1) or (a1-r-3). n _a2 is an integer of 1-3, it is preferable that it is 1 or 2, and it is more preferable that it is 1. c is an integer of 0-3, It is preferable that it is 0 or 1, and it is more preferable that it is 1. R is the same as above.

Specific examples of the formula (a1-1) are shown below. In each of the following formulae, R ^alpha is a hydrogen atom, a methyl group or a trifluoromethyl group.

Specific examples of the formula (a1-2) are shown below.

In addition, the acrylic resin (Aac1) consists of a copolymer containing the structural unit derived from the polymeric compound which has an ether bond further with respect to the structural unit represented by the said General Formula (a1-1)-(a1-2). It is preferable that it is resin.

Examples of the polymerizable compound having an ether bond may include a radical polymerizable compound such as an (meth) acrylic acid derivative having an ether bond and an ester bond, and specific examples thereof include 2-methoxyethyl (meth) acrylate and 2- Ethoxyethyl (meth) acrylate, methoxytriethylene glycol (meth) acrylate, 3-methoxybutyl (meth) acrylate, ethylcarbitol (meth) acrylate, phenoxy polyethylene glycol (meth) acrylate, Methoxy polypropylene glycol (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, and the like. The polymerizable compound having an ether bond is preferably 2-methoxyethyl (meth) acrylate, 2-ethoxyethyl (meth) acrylate, and methoxytriethylene glycol (meth) acrylate. These polymerizable compounds may be used independently or may be used in combination of 2 or more type.

In addition, the acrylic resin (Aac1) may contain another polymerizable compound as a structural unit for the purpose of appropriately adjusting physical and chemical properties. As such a polymeric compound, a well-known radically polymerizable compound and an anionic polymerizable compound are mentioned. Moreover, as such a polymeric compound, For example, monocarboxylic acids, such as acrylic acid, methacrylic acid, and crotonic acid; Dicarboxylic acids, such as maleic acid, a fumaric acid, itaconic acid; 2-methacryloyloxyethyl succinic acid; Methacrylic acid derivatives having a carboxyl group and an ester bond such as 2-methacryloyloxyethyl maleic acid, 2-methacryloyloxyethyl phthalic acid and 2-methacryloyloxyethyl hexahydrophthalic acid; methyl (meta (Meth) acrylic acid alkyl esters such as) acrylate, ethyl (meth) acrylate, and butyl (meth) acrylate; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, and the like. (Meth) acrylic acid hydroxyalkyl esters; (meth) acrylic acid aryl esters such as phenyl (meth) acrylate and benzyl (meth) acrylate; dicarboxylic acid dies such as diethyl maleate and dibutyl fumarate Tere; vinyl group-containing aromatic compounds such as styrene, α-methyl styrene, chloro styrene, chloromethyl styrene, vinyl toluene, hydroxy styrene, α-methyl hydroxy styrene and α-ethyl hydroxy styrene; vinyl acetate Vinyl group-containing aliphatic compounds; conjugated diolefins such as butadiene and isoprene; nitrile group-containing polymerizable compounds such as acrylonitrile and methacrylonitrile; chlorine-containing polymerizable compounds such as vinyl chloride and vinylidene chloride; acryl Amide bond containing polymeric compounds, such as an amide and a methacryl amide; These etc. are mentioned.

(Constituent unit (a4))

Acrylic resin (Aac1) may further have a structural unit (a4) containing an acid non-cyclic cyclic group as needed. It is thought that the dry etching resistance of the resist pattern formed improves because (Aac1) component has a structural unit (a4).

The "acid non-labile cyclic group" in a structural unit (a4) is a cyclic group which remains in the said structural unit as it is, without dissociating even if this acid acts when an acid generate | occur | produces from (B) component by exposure.

As the structural unit (a4), for example, a structural unit derived from an acrylate ester containing an acid non-aliphatic alicyclic group is preferable. This cyclic group can illustrate the same thing as what was illustrated in the case of said acrylic resin (Aac1), for example, and many things conventionally known as being used for the resin component of a resist composition can be used.

In particular, at least one selected from tricyclodecyl group, adamantyl group, tetracyclododecyl group, isobonyl group and norbornyl group is preferable in view of industrial availability. These polycyclic groups may have a C1-C5 linear or branched alkyl group as a substituent.

Specifically as an acrylic resin (Aac1), the thing of the structure of the following general formula (a4-1)-(a4-7) can be illustrated.

[Wherein, R ^α is the same as above.]

1 type may be sufficient as the structural unit (a4) which a resin component (A1) contains, and 2 or more types may be sufficient as it.

When the structural unit (a4) is contained in the resin component (A1), the proportion of the structural unit (a4) is preferably 1 to 30 mol%, based on the total of all the structural units constituting the (A1) component, 10 It is more preferable that it is -20 mol%.

It is preferable to use acrylic resin (Aac1) among the said resin component (A). Among such acrylic resins (Aac1), structural units represented by the general formula (a1-1), structural units derived from (meth) acrylic acid, structural units derived from (meth) acrylic acid alkyl esters, and (meth It is preferable that it is a copolymer which has a structural unit derived from the acrylic acid aryl ester.

As such a copolymer, it is preferable that it is a copolymer represented with the following general formula (a8).

In said general formula (a8), Ra <^30> represents a hydrogen atom or a methyl group, Ra <^31> represents a C2-C4 linear or branched alkyl group, and Xa is a C5-C20 compound with the carbon atom to which it is couple | bonded. A hydrocarbon ring is formed, Ra ³² represents a linear or branched alkyl group having 1 to 6 carbon atoms or an alkoxy alkyl group having 1 to 6 carbon atoms, and Ra ³³ represents an aryl group having 6 to 12 carbon atoms.

Xa together with the carbon atom to which it is bonded form an aliphatic cyclic group having 5 to 20 carbon atoms. Specific examples of such aliphatic cyclic groups include groups excluding one or more hydrogen atoms from polycycloalkanes such as monocycloalkane, bicycloalkane, tricycloalkane, and tetracycloalkane. Specifically, at least one hydrogen from monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, cyclooctane, and polycycloalkanes such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane The group except an atom is mentioned. In particular, the group (you may further have a substituent) remove | excluding one or more hydrogen atoms from cyclohexane and adamantane is preferable.

When the aliphatic cyclic group of Xa has a substituent on its ring skeleton, examples of the substituent include a polar group such as a hydroxyl group, a carboxy group, a cyano group and an oxygen atom (= O), or a linear or branched carbon having 1 to 4 carbon atoms. And lower alkyl groups on the phases. Especially as a polar group, an oxygen atom (= O) is preferable.

In addition, in the copolymer represented by the said general formula (a8), s, t, u, v represent the molar ratio of each structural unit, s is 8-45 mol%, t is 10-65 mol%, u is 3-25 mol% and v is 6-25 mol%.

[Novolak Resin (Anv1)]

As a novolak resin (Anv1), resin containing the structural unit represented with the following general formula (anv1) can be used.

[Wherein, Ra ¹¹ is an acid dissociable group, and Ra ¹² and Ra ¹³ are each independently a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

In said general formula (anv1), Ra <^11> represents an acid dissociable group, and Ra <^12> , Ra <^13> respectively independently represents a hydrogen atom or a C1-C6 alkyl group. Ra ¹¹ is a group represented by general formula (a1-r-1) or (a1-r-3), a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, tetrahydropyranyl group, tetrafuranyl group or tree It is preferable that it is an alkylsilyl group.

The said C1-C6 alkyl group is a C1-C6 linear, branched or cyclic alkyl group, for example. Examples of the linear or branched alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group, isopentyl group and neopentyl group, and the like. Examples of the alkyl group include cyclopentyl group, cyclohexyl group, and the like.

[Polyhydroxystyrene Resin (Aphs1)]

As polyhydroxy styrene resin (Aphs1), resin containing the structural unit represented by the following general formula (aphs1) can be used.

[Wherein, Ra ¹⁸ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and Ra ¹⁹ is an acid dissociable group.]

In the above general formula (aphs1), Ra ¹⁸ is shown a hydrogen atom or an alkyl group having a carbon number of 1 ~ 6, Ra ¹⁹ represents an acid dissociable, dissolution inhibiting group.

In the above general formula (aphs1), Ra ¹⁹ and Ra may be the same groups ¹¹ in the formula (anv1).

The said C1-C6 alkyl group is a C1-C6 linear, branched or cyclic alkyl group, for example. Examples of the linear or branched alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group, isopentyl group and neopentyl group, and the like. Examples of the alkyl group include cyclopentyl group, cyclohexyl group, and the like.

In addition, the polyhydroxystyrene resin (Aphs1) may contain other polymerizable compounds as structural units for the purpose of appropriately adjusting physical and chemical properties. As such a polymeric compound, a well-known radically polymerizable compound and an anionic polymerizable compound are mentioned. Moreover, as such a polymeric compound, For example, monocarboxylic acids, such as acrylic acid, methacrylic acid, and crotonic acid; Dicarboxylic acids, such as maleic acid, a fumaric acid, itaconic acid; 2-methacryloyloxyethyl succinic acid; Methacrylic acid derivatives having a carboxyl group and an ester bond such as 2-methacryloyloxyethyl maleic acid, 2-methacryloyloxyethyl phthalic acid and 2-methacryloyloxyethyl hexahydrophthalic acid; methyl (meta (Meth) acrylic acid alkyl esters such as) acrylate, ethyl (meth) acrylate, and butyl (meth) acrylate; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, and the like. (Meth) acrylic acid hydroxyalkyl esters; (meth) acrylic acid aryl esters such as phenyl (meth) acrylate and benzyl (meth) acrylate; dicarboxylic acid dies such as diethyl maleate and dibutyl fumarate Tere; vinyl group-containing aromatic compounds such as styrene, α-methyl styrene, chlorostyrene, chloromethyl styrene, vinyl toluene, hydroxy styrene, α-methyl hydroxy styrene and α-ethyl hydroxy styrene; vinyl acetate Vinyl group-containing aliphatic compounds; conjugated diolefins such as butadiene and isoprene; nitrile group-containing polymerizable compounds such as acrylonitrile and methacrylonitrile; chlorine-containing polymerizable compounds such as vinyl chloride and vinylidene chloride; acryl Amide bond containing polymeric compounds, such as an amide and methacrylamide; These etc. are mentioned.

As the resin component (A), a novolak resin (Anv1) and a polyhydroxystyrene resin (Aphs1) may be used in combination with an acrylic resin (Aac1), in which case the proportion of acrylic resin in the total of these resins is 5 to 100. It is preferable that it is mass%, It is more preferable that it is 50-100 mass%, It is still more preferable that it is 100 mass%.

The polystyrene reduced mass average molecular weight of the resin component (A) is preferably 5000 to 300000, more preferably 7000 to 200000, still more preferably 10000 to 200000. By setting it as such a mass average molecular weight, sufficient intensity | strength of a thick-film resist layer can be maintained without the peelability with a support body falling, and a profile at the time of plating can prevent expansion and a generation | occurrence | production of a crack.

Moreover, it is preferable that resin component (A) is resin whose dispersion degree is 1.05 or more. Here, a dispersion degree is the value which divided | diluted the mass mean molecular weight by the number average molecular weight. By such a dispersion degree, the problem that the stress tolerance to desired plating and the metal layer obtained by a plating process become easy to expand can be avoided.

Although content of a resin component (A) is not limited, For example, when used for thick film, 5-60 mass% with respect to the total mass of the resist composition which concerns on this invention, More preferably, it is 20-60 mass%, Preferably, it is preferable to set it as 30-50 mass%.

In the present invention, the resin component (A) may include the following structural units (a2), (a3) and (a5).

(Constituent unit (a2))

The resin component (A) may contain the structural unit (a2) containing a lactone containing cyclic group.

The lactone cyclic group of the structural unit (a2) is effective for enhancing the adhesion of the resist film to the substrate when the resin component (A) is used for formation of the resist film.

A "lactone containing cyclic group" shows the cyclic group containing the ring (lactone ring) containing -O-C (= O)-in the ring skeleton. When a lactone ring is counted as a 1st ring and only a lactone ring is called, it is called a monocyclic group and when it has another ring structure, it is called a polycyclic group irrespective of the structure. The lactone-containing cyclic group may be a monocyclic group or a polycyclic group.

The lactone-containing cyclic group in the structural unit (a2) can be used without any particular limitation. Specifically, group represented by the following general formula (a2-r-1)-(a2-r-7) is mentioned. Hereinafter, "*" represents a bond.

[Wherein, Ra ′ ²¹ is each independently a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR ″, —OC (═O) R ″, a hydroxyalkyl group or a cyano group; Is a hydrogen atom or an alkyl group; A "is a C1-C5 alkylene group, an oxygen atom, or a sulfur atom which may contain the oxygen atom or a sulfur atom, n 'is an integer of 0-2, m' is 0 or 1]

In the general formulas (a2-r-1) to (a2-r-7), A ″ is an alkylene group having 1 to 5 carbon atoms which may contain an oxygen atom (-O-) or a sulfur atom (-S-). Or an oxygen atom or a sulfur atom. As the alkylene group having 1 to 5 carbon atoms in A ″, a linear or branched alkylene group is preferable, and a methylene group, an ethylene group, an n-propylene group, an isopropylene group, or the like is preferable. Can be mentioned. When the alkylene group contains an oxygen atom or a sulfur atom, specific examples thereof include a group in which -O- or -S- is interposed between the terminal or carbon atom of the alkylene group, for example -O-CH ₂ -, -CH ₂ -O-CH _2- , -S-CH _2- , -CH ₂ -S-CH ₂ -and the like. A ″ is preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and most preferably a methylene group. Alkyl group, alkoxy group, halogen atom, halogenated at Ra ′ ²¹ As an alkyl group, -COOR ", -OC (= O) R", and a hydroxyalkyl group, the alkyl group, the alkoxy group, and the halogenated alkyl group which were mentioned as a substituent which the divalent cyclic group in V0 ^a1 in said general formula (a0) may have respectively , -COOR ", -OC (= O) R" and the same thing as a hydroxyalkyl group are mentioned.

Specific examples of the group represented by the following general formulas (a2-r-1) to (a2-r-7) are given.

Although the structure of another part will not be specifically limited if it has a lactone containing cyclic group as a structural unit (a2), The structural unit represented by the following general formula (a2-1) is mentioned.

[Wherein R is a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, Ya ²¹ is a single bond or a divalent linking group, and La ²¹ is -O-, -COO-, -CON ( R ')-, -OCO-, -CONHCO- or -CONHCS-, and R' represents a hydrogen atom or a methyl group. However, when La ²¹ is -O-, Ya ²¹ is not -CO-. Ra ²¹ is a lactone containing cyclic group, a carbonate containing cyclic group or a -SO ₂ -containing cyclic group.]

Although it does not specifically limit as a bivalent coupling group of Ya ²¹ , The bivalent hydrocarbon group which may have a substituent, the bivalent coupling group containing a hetero atom, etc. are mentioned as a preferable thing.

(Divalent hydrocarbon group which may have substituent)

The hydrocarbon group as the divalent linking group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.

An aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. This aliphatic hydrocarbon group may be saturated or unsaturated, and it is preferable that it is normally saturated.

Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group or an aliphatic hydrocarbon group containing a ring in the structure, and specific examples thereof include Va ¹ in Formula (a1-1). One may be mentioned.

The linear or branched aliphatic hydrocarbon group may or may not have a substituent. As this substituent, a C1-C5 fluorinated alkyl group substituted with the fluorine atom, a fluorine atom, a carbonyl group, etc. are mentioned.

Examples of the aliphatic hydrocarbon group containing a ring in the above structure include a cyclic aliphatic hydrocarbon group (a group in which two hydrogen atoms are removed from an aliphatic hydrocarbon ring) which may include a substituent containing a hetero atom in the ring structure, and the cyclic aliphatic group. The group which the hydrocarbon group couple | bonded with the terminal of a linear or branched aliphatic hydrocarbon group, the group which the said cyclic aliphatic hydrocarbon group interposes in the middle of a linear or branched aliphatic hydrocarbon group, etc. are mentioned. The same thing as the above is mentioned as said linear or branched aliphatic hydrocarbon group.

It is preferable that carbon number is 3-20, and, as for a cyclic aliphatic hydrocarbon group, it is more preferable that it is 3-12.

An aliphatic hydrocarbon cyclic group of the specific examples thereof include groups exemplified in Va ¹ in the above formula (a1-1).

The cyclic aliphatic hydrocarbon group may or may not have a substituent. An alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group etc. are mentioned as this substituent.

The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.

The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, a tert-butoxy group, and a methoxy group, Most preferred are ethoxy groups.

As a halogen atom as said substituent, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is preferable.

As a halogenated alkyl group as the said substituent, the group by which one part or all part of the hydrogen atom of the said alkyl group was substituted by the said halogen atom is mentioned.

The cyclic aliphatic hydrocarbon group may be substituted with a substituent in which part of the carbon atoms constituting the ring structure contains a hetero atom. As a substituent containing this hetero atom, -O-, -C (= O) -O-, -S-, -S (= O) _2- , -S (= O) ₂ -O- is preferable.

An aromatic hydrocarbon group as the divalent hydrocarbon group is specifically there may be mentioned the groups exemplified Va ¹ in the above formula (a1-1).

The hydrogen atom which the aromatic hydrocarbon group has may be substituted by the substituent in the said aromatic hydrocarbon group. For example, the hydrogen atom couple | bonded with the aromatic ring in the said aromatic hydrocarbon group may be substituted by the substituent. As this substituent, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group etc. are mentioned, for example.

The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.

As an alkoxy group, a halogen atom, and a halogenated alkyl group as said substituent, what was illustrated as a substituent which substitutes the hydrogen atom which the said cyclic aliphatic hydrocarbon group has is mentioned.

(Bivalent linkage containing hetero atoms)

The hetero atom in the bivalent coupling group containing a hetero atom is an atom other than a carbon atom and a hydrogen atom, For example, an oxygen atom, a nitrogen atom, a sulfur atom, a halogen atom, etc. are mentioned.

When Ya ²¹ is a divalent linking group containing a hetero atom, preferred as this linking group are -O-, -C (= 0) -O-, -C (= 0)-, -OC (= 0) -O-. , -C (= O) -NH-, -NH-, -NH-C (= NH)-(H may be substituted with a substituent such as an alkyl group, acyl group), -S-, -S (= O ) _2- , -S (= O) ₂ -O-, general formula -Y ²¹ -OY ^22- , -Y ²¹ -O-, -Y ²¹ -C (= O) -O-,-(Y ^21- C (= O) -O] _{m '} -Y ²² -or -Y ²¹ -OC (= O) -Y ²² -in the group represented by Y ²¹ and Y ²² may each independently have a substituent 2 It is a valent hydrocarbon group, O is an oxygen atom, m 'is an integer of 0-3.] Etc. are mentioned.

When the divalent linking group containing the hetero atom is -C (= O) -NH-, -NH-, -NH-C (= NH)-, the H may be substituted with a substituent such as an alkyl group or acyl. . It is preferable that carbon number of this substituent (alkyl group, acyl group, etc.) is 1-10, It is more preferable that it is 1-8, It is especially preferable that it is 1-5.

Formula -Y ²¹ -OY ^22- , -Y ²¹ -O-, -Y ²¹ -C (= O) -O-,-[Y ²¹ -C (= O) -O] _{m '} -Y ²² -or- ^{Y 21 -OC (= O) -Y} 22 - of, Y ²¹ and Y ²² are each independently a divalent hydrocarbon group which may have a substituent. As this bivalent hydrocarbon group, the thing similar to the "divalent hydrocarbon group which may have a substituent" mentioned in the description as said bivalent coupling group is mentioned.

As Y <^{21>, a} linear aliphatic hydrocarbon group is preferable, a linear alkylene group is more preferable, a C1-C5 linear alkylene group is still more preferable, and a methylene group or ethylene group is especially preferable.

As Y ^{22, a} linear or branched aliphatic hydrocarbon group is preferable, and a methylene group, an ethylene group or an alkyl methylene group is more preferable. The alkyl group in this alkyl methylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, a linear alkyl group having 1 to 3 carbon atoms is preferred, and a methyl group is most preferred.

In the group represented by the formula-[Y ²¹ -C (= O) -O] _{m '} -Y ^22- , m' is an integer of 0 to 3, preferably an integer of 0 to 2, and more preferably 0 or 1 1 is particularly preferable. That is, the group represented by the formula-[Y ²¹ -C (= O) -O] _{m '} -Y ²² -is particularly preferably a group represented by the formula -Y ²¹ -C (= O) -OY ^22- . In particular, expression is preferred group represented by _{- (CH 2) a '-C} (= O) -O- (CH 2) b'. In this formula, a 'is an integer of 1-10, the integer of 1-8 is preferable, the integer of 1-5 is more preferable, 1 or 2 is still more preferable, and 1 is the most preferable. b 'is an integer of 1-10, the integer of 1-8 is preferable, the integer of 1-5 is more preferable, 1 or 2 is more preferable, and 1 is the most preferable.

Ya ²¹ in the present invention is preferably a single bond or an ester bond [-C (= O) -O-], an ether bond (-O-), a linear or branched alkylene group or a combination thereof.

Below, the specific example of the structural unit which has a group represented by the said general formula (a2-r-1) among the structural units represented by the said general formula (a2-1) is given. In each of the following formulas, R ^α represents a hydrogen atom, a methyl group, or a trifluoromethyl group.

The structural unit (a2) which (A) component has may be 1 type or 2 or more types.

It is preferable that it is 5-70 mol% with respect to the whole structural unit which comprises (A) component, and, as for the ratio in the case where (A) component has a structural unit (a2), 10-65 mol% is more preferable, 20 60 mol% is more preferable.

By making ratio of a structural unit (a2) more than a lower limit, the effect by containing a structural unit (a2) is fully acquired, and below an upper limit can balance with other structural units, and various lithographic characteristics and pattern shapes This becomes good.

(Constituent unit (a3))

The resin component (A) may have a structural unit (a3). The structural unit (a3) is a structural unit containing a polar group-containing aliphatic hydrocarbon group (except those corresponding to the structural units (a1) and (a2) described above).

When a resin component (A) has a structural unit (a3), it is thought that the hydrophilicity of (A) component improves and contributes to the improvement of resolution.

As a polar group, a hydroxyl group, a cyano group, a carboxy group, the hydroxyalkyl group in which one part of the hydrogen atoms of an alkyl group were substituted by the fluorine atom, etc. are mentioned, Especially a hydroxyl group is preferable.

As an aliphatic hydrocarbon group, a C1-C10 linear or branched hydrocarbon group (preferably alkylene group) and cyclic aliphatic hydrocarbon group (cyclic group) are mentioned. As this cyclic group, a monocyclic group or a polycyclic group may be sufficient, For example, in resin for the resist composition for ArF excimer lasers, it can select suitably from a lot of what is proposed, and can use. As this cyclic group, it is preferable that it is a polycyclic group, and it is more preferable that carbon number is 7-30.

Especially, the structural unit derived from the acrylic acid ester containing the aliphatic polycyclic group containing the hydroxyalkyl group in which one part of the hydrogen atoms of a hydroxyl group, a cyano group, a carboxy group, or an alkyl group is substituted by the fluorine atom is more preferable. As this polycyclic group, the group etc. which removed 2 or more hydrogen atoms from bicyclo alkanes, tricyclo alkanes, tetracyclo alkanes, etc. can be illustrated. Specifically, the group remove | excluding two or more hydrogen atoms from polycyclo alkanes, such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclo dodecane, etc. are mentioned. Among these polycyclic groups, groups except two or more hydrogen atoms from adamantane, groups excluding two or more hydrogen atoms from norbornane and groups excluding two or more hydrogen atoms from tetracyclododecane are preferable industrially.

As the structural unit (a3), any one can be used without particular limitation as long as it contains a polar group-containing aliphatic hydrocarbon group.

As the structural unit (a3), a structural unit containing a polar group-containing aliphatic hydrocarbon group is preferable as a structural unit derived from an acrylate ester in which a hydrogen atom bonded to a carbon atom at the α position may be substituted with a substituent.

As a structural unit (a3), when the hydrocarbon group in a polar group containing aliphatic hydrocarbon group is a C1-C10 linear or branched hydrocarbon group, the structural unit derived from the hydroxyethyl ester of acrylic acid is preferable, and this carbonization is carried out. When a hydrogen group is a polycyclic group, the structural unit represented by a following formula (a3-1), the structural unit represented by a formula (a3-2), and the structural unit represented by a formula (a3-3) are mentioned as a preferable thing.

[Wherein R is the same as above, j is an integer of 1 to 3, k is an integer of 1 to 3, t 'is an integer of 1 to 3, l is an integer of 1 to 5, and s is Is an integer from 1 to 3.]

In formula (a3-1), j is preferably 1 or 2, and more preferably 1. When j is 2, it is preferable that the hydroxyl group couple | bonds with the 3rd and 5th positions of an adamantyl group. When j is 1, it is preferable that the hydroxyl group couple | bonds with the 3rd position of an adamantyl group. It is preferable that j is 1, and it is especially preferable that the hydroxyl group couple | bonds with 3rd position of an adamantyl group.

In formula (a3-2), it is preferable that k is 1. The cyano group is preferably bonded to the 5th or 6th position of the norbornyl group.

In formula (a3-3), t 'is preferably 1. It is preferable that l is 1. s is preferably 1. It is preferable that these couple | bond the 2-norbornyl group or 3-norbornyl group to the terminal of the carboxy group of acrylic acid. The fluorinated alkyl alcohol is preferably bound to the 5 or 6 position of the norbornyl group.

1 type may be sufficient as the structural unit (a3) which a resin component (A) contains, and 2 or more types may be sufficient as it.

It is preferable that the ratio when the resin component (A) has a structural unit (a3) is 1-50 mol% with respect to the total of all the structural units which comprise the said resin component (A), and 5-40 mol% More preferably, 5-25 mol% is more preferable.

The effect by containing a structural unit (a3) is fully acquired by making ratio of a structural unit (a3) more than a lower limit, and it becomes easy to balance with another structural unit by using below a upper limit.

(Constituent unit (a5))

A resin component (A) is -SO ₂ - may further contain a constituent unit (a5), including a containing cyclic group.

A resin component (A) may have a "-SO ₂ - containing cyclic group" that is, -SO ₂ during the ring backbone - represents a cyclic group containing a ring containing, particularly, -SO ₂ - in the The sulfur atom (S) is a cyclic group which forms part of the ring skeleton of a cyclic group. In the ring skeleton, a ring containing -SO ₂ -is counted as the first ring, and in the case of only the ring, a ring is referred to as a monocyclic group, and in the case of having another ring structure, it is called a polycyclic group irrespective of the structure. The -SO ₂ -containing cyclic group may be monocyclic or polycyclic.

The -SO ₂ -containing cyclic group is, in particular, a cyclic group containing -O-SO ₂ -in its ring skeleton, ie, a sultone ring in which -OS- in -O-SO ₂ -forms part of the ring skeleton. It is preferable that it is a cyclic group containing. Specific examples of the -SO ₂ -containing cyclic group include groups represented by general formulas (a5-r-1) to (a5-r-4) shown below.

[Wherein, Ra ′ ⁵¹ is each independently a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR ″, —OC (═O) R ″, a hydroxyalkyl group or a cyano group; Is a hydrogen atom or an alkyl group; A "is a C1-C5 alkylene group, an oxygen atom, or a sulfur atom which may contain the oxygen atom or a sulfur atom, and n 'is an integer of 0-2.]

In General Formulas (a5-r-1) to (a5-r-4), A ″ is the same as A ″ in General Formulas (a2-r-1) to (a2-r-7). As the alkyl group, alkoxy group, halogen atom, halogenated alkyl group, -COOR ", -OC (= O) R" in Ra ^'51 , and a hydroxyalkyl group, the said general formula (a2-r-1)-(a2-r- 7) the same as those of Ra ^'21.

Specific examples of the group represented by the general formulas (a5-r-1) to (a5-r-4) are given below. "Ac" in a formula represents an acetyl group.

Roneun constituent unit (a5) -SO ₂ - contained as long as the structure of the other parts having the cyclic group is not particularly limited, and the Ra is ²¹ in the formula (a2-1) wherein formula (a5-r-1) ~ ( The structural unit represented by either of a5-r-4) is mentioned.

-SO ₂ - containing polycyclic group is the formula groups are preferred, and represented by (a5-r-1) the above formula (r-sl-1-1), (r-sl-1-18), among the above, ( It is more preferable to use at least one selected from the group consisting of groups represented by any one of r-sl-3-1) and (r-sl-4-1), and the above formula (r-sl-1-1) The group represented by is most preferable.

The structural unit (a5) which (A) component has may be 1 type or 2 or more types.

When (A) component has a structural unit (a5), it is preferable that the ratio of a structural unit (a5) is 5-70 mol% with respect to the total of all the structural units which comprise the said (A) component, and is 5- 60 mol% is more preferable, and 10-55 mol% is further more preferable.

By making ratio of a structural unit (a5) more than a lower limit, the effect by containing a structural unit (a2) is fully acquired, and below the upper limit can balance with other structural units, and various lithographic characteristics and pattern shapes This becomes good.

<Alkali-soluble resin (C)>

It is preferable that the resist composition of this invention contains alkali-soluble resin (C) further in order to improve crack resistance. Here, with alkali-soluble resin, the resin film (solvent: propylene glycol monomethyl ether acetate) of 20 mass% of resin concentration formed the resin film of 1 micrometer of film thickness on the board | substrate, and was immersed in 2.38 mass% of TMAH aqueous solution for 1 minute. When melt | dissolves, it means to melt | dissolve 0.01 micrometers or more. It is preferable that it is at least 1 sort (s) of resin chosen from the group which consists of novolak resin (Cnv1), polyhydroxy styrene resin (Cphs1), and acrylic resin (Cac1) as alkali-soluble resin (C).

[Novolak Resin (Cnv1)]

Novolak resin (Cnv1) is obtained by addition condensation of, for example, an aromatic compound having a phenolic hydroxyl group (hereinafter simply referred to as "phenols") and aldehydes under an acid catalyst.

Examples of the phenols include phenol, o-cresol, m-cresol, p-cresol, o-ethyl phenol, m-ethyl phenol, p-ethyl phenol, o-butyl phenol, m-butyl phenol and p-butyl Phenol, 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol, 2,3,5-trimethyl phenol, 3,4,5-trimethyl phenol, p-phenyl phenol, resorcinol, hydroquinone, hydroquinone monomethyl ether, pyrogarol, phloroglycinol, hydroxydiphenyl, bisphenol A, gallic acid, a gallic acid ester, (alpha)-naphthol, (beta) -naphthol, etc. are mentioned.

Examples of the aldehydes include formaldehyde, furfural, benzaldehyde, nitrobenzaldehyde, acetaldehyde, and the like.

The catalyst in the addition condensation reaction is not particularly limited. For example, hydrochloric acid, nitric acid, sulfuric acid, formic acid, oxalic acid, acetic acid and the like are used as the acid catalyst.

In addition, it is possible to further improve the flexibility of the novolak resin by using o-cresol, substituting a hydrogen atom of a hydroxyl group in the resin with another substituent, or by using bulky aldehydes.

It is preferable that the mass average molecular weight of this novolak resin (Cnv1) is 1000-50000.

[Polyhydroxystyrene Resin (Cphs1)]

Examples of the hydroxystyrene-based compound constituting the polyhydroxystyrene resin (Cphs1) include p-hydroxy styrene, α-methyl hydroxy styrene, α-ethyl hydroxy styrene, and the like.

Moreover, it is preferable to make polyhydroxy styrene resin (Cphs1) into a copolymer with a styrene resin. Examples of the styrene compounds constituting such styrene resins include styrene, chloro styrene, chloromethyl styrene, vinyl toluene, and α-methyl styrene.

It is preferable that the mass mean molecular weights of this polyhydroxy styrene resin (Cphs1) are 1000-50000.

[Acrylic Resin (Cac1)]

The acrylic resin (Cac1) preferably includes a structural unit derived from a polymerizable compound having an ether bond and a structural unit derived from a polymerizable compound having a carboxyl group.

As a polymeric compound which has the said ether bond, 2-methoxyethyl (meth) acrylate, methoxy triethylene glycol (meth) acrylate, 3-methoxybutyl (meth) acrylate, ethylcarbitol (meth) acryl (Meth) acrylic acid derivatives having ether bonds and ester bonds, such as latex, phenoxy polyethylene glycol (meth) acrylate, methoxy polypropylene glycol (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, etc. Can be. The polymerizable compound having an ether bond is preferably 2-methoxyethyl acrylate and methoxy triethylene glycol acrylate. These polymerizable compounds may be used independently or may be used in combination of 2 or more type.

Examples of the polymerizable compound having a carboxyl group include monocarboxylic acids such as acrylic acid, methacrylic acid and crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid and itaconic acid; 2-methacryloyloxyethyl succinic acid and 2-metha; The compound which has carboxyl groups and ester bonds, such as a chryloyl oxyethyl maleic acid, 2-methacryloyl oxyethyl phthalic acid, and 2-methacryloyl oxyethyl hexahydrophthalic acid; etc. can be illustrated. The polymerizable compound having the carboxyl group is preferably acrylic acid or methacrylic acid. These polymerizable compounds may be used independently or may be used in combination of 2 or more type.

It is preferable that the mass mean molecular weights of this acrylic resin (Cac1) are 50000-800000.

Content of alkali-soluble resin (C) becomes like this. Preferably it is 5-200 mass parts with respect to 100 mass parts of said resin components (A), More preferably, it is 10-180 mass parts. By setting the content of alkali-soluble resin (C) to 5 parts by mass or more with respect to 100 parts by mass of the resin component (A), crack resistance can be improved, and by setting it as 200 parts by mass or less, there is a tendency to prevent film reduction during development. have.

In addition, when using alkali-soluble resin (C), it is preferable to use novolak resin (Cnv1) and polyhydroxy styrene resin (Cphs1) in combination with the said acrylic resin (Aac1). In this case, it is preferable that the ratio of the acrylic resin to the sum total of these resin is 5-80 mass%, It is more preferable that it is 10-70 mass%, It is further more preferable that it is 10-40 mass%. Moreover, it is preferable that the ratio of novolak resin is 5-80 mass%, It is more preferable that it is 20-70 mass%, It is still more preferable that it is 45-65 mass%. Moreover, it is preferable that the ratio of polyhydroxy styrene resin is 5-60 mass%, It is more preferable that it is 5-35 mass%, It is still more preferable that it is 5-30 mass%. By setting it as such a ratio, an acid generator can be disperse | distributed more uniformly in a thick film resist layer.

<Photoreactive quencher (D0)>

The resist composition of this invention contains photoreaction quencher (D0) (henceforth a "(D0) component").

The "quencher" traps an acid generated from an acid diffusion control agent, that is, the component (B) described later by exposure.

"Photoreactive quencher" acts as a quencher before exposure (or in an unexposed part), and does not act as a quencher after exposure (irradiation of radiation, such as EB and EUV).

The resist composition of this invention contains compound (D0-1) represented by the following general formula (d0) at least as a (D0) component. Thereby, the sensitivity and pattern shape at the time of forming a resist pattern become favorable.

[In formula, R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent, R <^3> , R <^4> has a C2-C10 alkyl group which may have a substituent, R <^3> and R <^4> combine these You may form the ring with a sulfur atom. X ^- is a counter anion.]

In formula (d0), R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent. Examples of the alkyl group having 1 to 10 carbon atoms in R ¹ and R ² include a linear alkyl group having 1 to 5 carbon atoms. Specifically, a methyl group, an ethyl group, n-propyl group, n-butyl group, n-pentyl group, etc. are mentioned. Among these, a methyl group, an ethyl group, or n-butyl group is preferable, and n-butyl group is more preferable.

In formula (d0), a C1-C10 alkyl group in R <^1> , R <^2> may be a branched or cyclic alkyl group.

It is preferable that carbon number is 3-10, and, as for this branched alkyl group, 3-8 are more preferable. Specifically, isopropyl group, isobutyl group, tert-butyl group, isopentyl group, neopentyl group, etc. are mentioned, It is most preferable that it is an isopropyl group.

It is preferable that this cyclic alkyl group is C3-C10, and 4-10 are more preferable. Specifically, the group remove | excluding one or more hydrogen atoms from monocyclo alkanes, such as cyclopentane and a cyclohexane, and polycyclo alkanes, such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclo dodecane, etc. Can be mentioned. Some of the carbon atoms constituting the ring of the cyclic alkyl group may be substituted with an ethereal oxygen atom (-O-).

In formula (d0), an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group etc. are mentioned as a substituent which R <^1> , R <^2> may have.

The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.

The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, a tert-butoxy group, and a methoxy group, Most preferred are ethoxy groups.

As a halogen atom as said substituent, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is preferable.

As a halogenated alkyl group as the said substituent, the group by which one part or all part of the hydrogen atom of the said alkyl group was substituted by the said halogen atom is mentioned.

The cyclic aliphatic hydrocarbon group may be substituted with a substituent in which part of the carbon atoms constituting the ring structure contains a hetero atom. As a substituent containing this hetero atom, -O-, -C (= O) -O-, -S-, -S (= O) _2- , -S (= O) ₂ -O- is preferable.

In the present invention, R ¹ and R ² are preferably 1 to 8 carbon atoms, more preferably 1 to 5 carbon atoms, and most preferably an alkyl group having 3 to 5 carbon atoms. Moreover, it is preferable that it is a branched or chain alkyl group, and it is more preferable that it is a chain alkyl group. Moreover, it is preferable that it is an unsubstituted alkyl group.

In formula (d0), R <^3> , R <^4> is a C2-C10 alkyl group which may have a substituent, and R <^3> and R <^4> may form the ring with the sulfur atom which these bond.

Examples of the alkyl group having 2 to 10 carbon atoms which may have a substituent in R ³ and R ⁴ include a linear alkyl group having 2 to 5 carbon atoms. As a C2-C5 linear alkyl group, an ethyl group, n-propyl group, n-butyl group, n-pentyl group, etc. are mentioned. Among these, a methyl group, an ethyl group, or n-butyl group is preferable, and n-butyl group is more preferable.

R ³ and R ⁴ may be branched or cyclic alkyl groups having 1 to 10 carbon atoms. Description of the C1-C10 branched or cyclic alkyl group in R <^3> , R <^4> is the same as that of the said R <^1> , R <^2> .

R <^3> , R <^4> may have a substituent and the description about the substituent which R <^3> , R <^4> may have is the same as that of the said R <^1> , R <^2> .

In the present invention, R ³ and R ⁴ in the formula (d0) are preferably 2 to 8 carbon atoms, more preferably 2 to 6 carbon atoms, and most preferably an alkyl group having 3 to 5 carbon atoms. Moreover, it is preferable that it is a branched or chain alkyl group, and it is more preferable that it is a chain alkyl group. Moreover, it is preferable that it is an unsubstituted alkyl group.

In General Formula (d0), X ⁻ is a counter anion. The counter anion of X ⁻ is not particularly limited, and for example, a counter anion known as an anion part such as a photodegradable base (photoreaction type quencher) used in a quencher of a resist composition can be used. It is preferable that it is an anion represented by either of following general formula (d1-1) (d1-3) as a counter anion.

[Formula (d1-1) ~ (d1-3) of, Rd Rd ¹ ~ ⁴ is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent. However, it is assumed that a fluorine atom is not bonded to a carbon atom adjacent to the S atom in Rd ² in the formula (d1-2). Yd ¹ is a single bond or a divalent linking group.]

Anion represented by (d1-1)

Formula (d1-1) of, Rd ¹ is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent, it is the same as R ^101.

Among these, as Rd ¹ , an aromatic hydrocarbon group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain hydrocarbon group which may have a substituent is preferable. As a substituent which these groups may have, a hydroxyl group, a fluorine atom, or a fluorinated alkyl group is preferable.

As said aromatic hydrocarbon group, a phenyl group or a naphthyl group is more preferable.

As said aliphatic cyclic group, it is more preferable that the group remove | excluding one or more hydrogen atoms from polycycloalkanes, such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclo dodecane.

As said chain hydrocarbon group, a chain alkyl group is preferable. The linear alkyl group preferably has 1 to 10 carbon atoms, specifically, straight chain such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, etc. Alkyl group; 1-methyl ethyl group, 1-methyl propyl group, 2-methyl propyl group, 1-methyl butyl group, 2-methyl butyl group, 3-methyl butyl group, 1-ethyl butyl group, 2-ethyl butyl group, 1 And branched alkyl groups such as -methyl pentyl group, 2-methyl pentyl group, 3-methyl pentyl group and 4-methyl pentyl group.

When the chain alkyl group is a fluorinated alkyl group having a fluorine atom or a fluorinated alkyl group as a substituent, the carbon number of the fluorinated alkyl group is preferably 1 to 11, more preferably 1 to 8, and still more preferably 1 to 4 of the fluorinated alkyl group. You may contain atoms other than an atom. As atoms other than a fluorine atom, an oxygen atom, a carbon atom, a hydrogen atom, a sulfur atom, a nitrogen atom, etc. are mentioned, for example.

Rd ¹ is preferably a fluorinated alkyl group in which some or all of the hydrogen atoms constituting the linear alkyl group are substituted with fluorine atoms, and fluorinated alkyl groups in which all of the hydrogen atoms constituting the linear alkyl group are substituted with fluorine atoms (linear Perfluoro alkyl group).

The preferable specific example of the anion represented by general formula (d1-1) below is shown.

Anion represented by (d1-2)

In the formula (d1-2), Rd ² is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent, it is the same as R ^101.

However, it is assumed that a fluorine atom is not bonded (not substituted with fluorine) to a carbon atom adjacent to the S atom in Rd ² . Thereby, the anion of component (d1-2) becomes a suitable weak acid anion, and the hardening ability of (D) component improves.

It is preferable that it is an aliphatic cyclic group which may have a substituent as Rd <^2> , and may have group (substituent group remove | excluding one or more hydrogen atoms from adamantane, norbornane, isobornane, tricyclodecane, tetracyclo dodecane, etc. It is more preferable that the group remove | excluding one or more hydrogen atoms from camphor etc.

A hydrocarbon Rd ² group is optionally has a substituent, the substituents may be the same as the substituent group which may have a hydrocarbon group (the aromatic hydrocarbon group, aliphatic hydrocarbon group) in Rd ¹ of the formula (d1-1).

The preferable specific example of the anion represented by general formula (d1-2) below is shown.

Anion represented by (d1-3)

Formula (d1-3) of, Rd ³ is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent, there may be mentioned the same ones as R ^101, fluorine It is preferable that they are a cyclic group containing an atom, a linear alkyl group, or a linear alkenyl group. Among them, a fluorinated alkyl group and more preferably the same as that of the fluorinated alkyl group Rd ^1.

In the formula (d1-3), Rd ⁴ is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent, it is the same as R ^101.

Especially, it is preferable that they are an alkyl group, an alkoxy group, an alkenyl group, and a cyclic group which may have a substituent.

The alkyl group in Rd ⁴ is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group , Pentyl group, isopentyl group, neopentyl group and the like. A part of the hydrogen atoms of the alkyl group of Rd ⁴ may be substituted by hydroxyl group, cyano group, or the like.

The alkoxy group in Rd ⁴ is preferably an alkoxy group having 1 to 5 carbon atoms, and specifically, as the alkoxy group having 1 to 5 carbon atoms, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group and an n-butoxy group and tert-butoxy groups. Especially, a methoxy group and an ethoxy group are preferable.

Alkenyl Rd in the ⁴ groups may include the same as the R ^101, a vinyl group, a propenyl group (allyl group), 1-methyl propenyl group, preferably a 2-propenyl group These groups having a carbon number of 1 as a substituent in more You may have a C5-5 alkyl group or a C1-C5 halogenated alkyl group.

Examples of the cyclic group for Rd ⁴ include the same as those described above for R ^101, and include 1 from cycloalkane such as cyclopentane, cyclohexane, adamantane, norbornane, isobornane, tricyclodecane and tetracyclododecane. An alicyclic group except two or more hydrogen atoms, or an aromatic group such as a phenyl group or a naphthyl group is preferable. In the case where Rd ⁴ is an alicyclic group, the lithographic characteristics are improved by dissolving the resist composition in an organic solvent satisfactorily. Also, Rd is ⁴ when an aromatic group, in the EUV lithography, such as the exposure light source is a resist composition becomes good sensitivity and the lithographic properties and excellent light absorption efficiency.

In formula (d1-3), Yd ¹ is a single bond or a divalent linking group.

Group connection divalent in Yd ¹ is not particularly limited, but there may be mentioned a divalent hydrocarbon group which may have a substituent (the aliphatic hydrocarbon group, an aromatic hydrocarbon group), a divalent connecting group, such as containing a hetero atom. These are the same as those described in the description of the divalent linking group of Ya ²¹ in the formula (a2-1), respectively.

Yd ¹ is preferably a carbonyl group, an ester bond, an amide bond, an alkylene group or a combination thereof. As an alkylene group, it is more preferable that it is a linear or branched alkylene group, and it is still more preferable that it is a methylene group or an ethylene group.

The preferable specific example of an anion represented by general formula (d1-3) below is shown.

Below, the specific example of a compound represented by general formula (d0) is given.

It is preferable that content of (D0) component is 0.01-10 mass parts with respect to 100 mass parts of (A) component, It is more preferable that it is 0.05-5.0 mass parts, It is still more preferable that it is 0.1-3.0 mass parts. If it is more than the lower limit of the said range, especially favorable lithography characteristic and a resist pattern shape will be obtained. If it is below the upper limit of the said range, a sensitivity can be maintained favorable and throughput is also excellent.

((D2) component)

The component (D) may further contain a nitrogen-containing organic compound component (hereinafter referred to as component (D2)) which does not correspond to the component (D0).

The component (D2) is not particularly limited as long as it acts as an acid diffusion control agent and does not correspond to the component (D1), and may be used arbitrarily from known ones. Especially, aliphatic amines, especially secondary aliphatic amine and tertiary aliphatic amine are preferable.

An aliphatic amine is an amine which has one or more aliphatic groups, and it is preferable that this aliphatic group has 1-12 carbon atoms.

Examples of the aliphatic amines include amines (alkylamines or alkylalcoholamines) or cyclic amines in which at least one hydrogen atom of ammonia NH ₃ is substituted with an alkyl group having 12 or less carbon atoms or a hydroxyalkyl group.

Specific examples of alkylamines and alkylalcoholamines include monoalkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine and n-decylamine; diethylamine and di-n-propylamine , Dialkylamines such as di-n-heptylamine, di-n-octylamine, dicyclohexylamine; trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n- Trialkylamines such as pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine and tri-n-dodecylamine Alkyl alcohol amines such as diethanolamine, triethanolamine, diisopropanolamine, triisopropanolamine, di-n-octanolamine, and tri-n-octanolamine. Among these, trialkylamines having 5 to 10 carbon atoms are more preferable, and tri-n-pentylamine or tri-n-octylamine is particularly preferable.

As a cyclic amine, the heterocyclic compound containing a nitrogen atom as a hetero atom is mentioned, for example. The heterocyclic compound may be monocyclic (aliphatic monocyclic amine) or polycyclic (aliphatic polycyclic amine).

Specific examples of the aliphatic monocyclic amines include piperidine and piperazine.

The aliphatic polycyclic amine preferably has 6 to 10 carbon atoms, specifically 1,5-diazabicyclo [4.3.0] -5-nonene and 1,8-diazabicyclo [5.4.0] -7 -Undecene, hexamethylenetetramine, 1,4-diazabicyclo [2.2.2] octane, etc. are mentioned.

Other aliphatic amines include tris (2-methoxymethoxyethyl) amine, tris {2- (2-methoxyethoxy) ethyl} amine, tris {2- (2-methoxyethoxymethoxy) ethyl} Amine, tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-ethoxyethoxy) ethyl} amine, tris {2- (1-ethoxypropoxy) ethyl} amine, Tris [2- {2- (2-hydroxyethoxy) ethoxy} ethyl] amine, triethanolamine triacetate, and the like, and triethanolamine triacetate is preferable.

Moreover, you may use an aromatic amine as (D2) component.

Aromatic amines include aniline, pyridine, 4-dimethylaminopyridine, pyrrole, indole, pyrazole, imidazole or derivatives thereof, diphenylamine, triphenylamine, tribenzylamine, 2,6-diisopropylaniline, N -tert-butoxycarbonylpyrrolidine etc. are mentioned.

(D2) A component may be used independently and may be used in combination of 2 or more type.

(D2) A component is normally used in 0.01-5.0 mass parts with respect to 100 mass parts of (A) component. By setting it as the said range, a resist pattern shape, atmospheric stability with time, etc. will improve.

As the component (D), one type may be used alone, or two or more types may be used in combination.

When the resist composition of this invention contains (D) component, it is preferable that it is 0.1-15 mass parts with respect to 100 mass parts of (A) component, It is more preferable that it is 0.3-12 mass parts, 0.5 It is more preferable that it is -12 mass parts. If it is more than the lower limit of the said range, when it is set as a resist composition, lithographic characteristics, such as LWR, will improve more. In addition, a better resist pattern shape can be obtained. Sensitivity can be kept favorable as it is below the upper limit of the said range, and its throughput is also excellent.

<Acid generator component; (B) component>

It is preferable that the resist composition of this invention contains the acid generator component (B) (henceforth (B) component) which generate | occur | produces an acid by exposure. It does not specifically limit as (B) component, The thing currently proposed as an acid generator for chemically amplified resist can be used.

Such acid generators include onium salt acid generators such as iodonium salts and sulfonium salts, oxime sulfonate acid generators, bisalkyl or bisarylsulfonyl diazomethanes, and poly (bissulfonyl) diazomethanes. And various kinds such as diazomethane-based acid generators, nitrobenzyl sulfonate-based acid generators, iminosulfonate-based acid generators, and disulfone-based acid generators. Especially, it is preferable to use an onium salt type acid generator.

As the onium salt-based acid generator, for example, a compound represented by the following general formula (b-1) (hereinafter also referred to as "(b-1) component") and a compound represented by general formula (b-2) (hereinafter " (b-2) component ") or a compound represented by the general formula (b-3) (hereinafter also referred to as" (b-3) component ") can be used.

[In formula, R <^101> , R <^104> -R <^108> is respectively independently the cyclic group which may have a substituent, the chain alkyl group which may have a substituent, or the chain alkenyl group which may have a substituent. R ¹⁰⁴ and R ¹⁰⁵ may be bonded to each other to form a ring. Any two of R ¹⁰⁶ to R ¹⁰⁷ may be bonded to each other to form a ring. R ¹⁰² is a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. Y ¹⁰¹ is a divalent linking group containing a single bond or an oxygen atom. V ¹⁰¹ to V ¹⁰³ are each independently a single bond, an alkylene group, or a fluorinated alkylene group. L ¹⁰¹ to L ¹⁰² each independently represent a single bond or an oxygen atom. L ¹⁰³ to L ¹⁰⁵ are each independently a single bond, -CO-, or -SO _2- . M ^{'m +} is an m-valent organic cation (other than the cations of the compounds of the formula (b1-1)).]

｛Anion zone

Anion part of (b-1) component

In formula (b-1), R ¹⁰¹ is a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent.

(Cyclic group which may have substituent)

It is preferable that the said cyclic group is a cyclic hydrocarbon group, and this cyclic hydrocarbon group may be an aromatic hydrocarbon group, or an aliphatic hydrocarbon group may be sufficient as it.

The aromatic hydrocarbon group for R ¹⁰¹ is aryl excluding one hydrogen atom from an aromatic hydrocarbon ring or an aromatic compound containing two or more aromatic rings contained in a divalent aromatic hydrocarbon group in Va ¹ of Formula (a1-1). A group is mentioned, A phenyl group and a naphthyl group are preferable.

The cyclic aliphatic hydrocarbon group for R ¹⁰¹ includes a group in which one hydrogen atom is removed from monocycloalkane or polycycloalkane contained in the divalent aliphatic hydrocarbon group in Va ¹ of formula (a1-1). Monomethyl group and norbornyl group are preferable.

Moreover, the cyclic hydrocarbon group in R <^101> may contain a hetero atom like a heterocyclic ring, and specifically, the lactone containing cyclic group represented by said general formula (a2-r-1)-(a2-r-7), respectively And -SO ₂ -containing cyclic groups represented by general formulas (a5-r-1) to (a5-r-4), and the following heterocyclic groups, respectively.

As a substituent in the cyclic hydrocarbon group of R <^101> , an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, etc. are mentioned, for example.

As an alkyl group as a substituent, a C1-C5 alkyl group is preferable and it is most preferable that they are a methyl group, an ethyl group, a propyl group, n-butyl group, and a tert- butyl group.

The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, a tert-butoxy group, a methoxy group, Most preferred are ethoxy groups.

As a halogen atom as a substituent, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is preferable.

As a halogenated alkyl group as a substituent, the group in which one part or all part of hydrogen atoms, such as a C1-C5 alkyl group, for example, a methyl group, an ethyl group, a propyl group, n-butyl group, tert- butyl group, etc. was substituted by the said halogen atom is mentioned. .

(Chain alkyl group which may have a substituent)

The linear alkyl group of R ¹⁰¹ may be either linear or branched.

It is preferable that carbon number is 1-20, as a linear alkyl group, it is more preferable that it is 1-15, and 1-10 are the most preferable. Specifically, for example, methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, nonyl, decanyl, undecyl, dodecyl, tridecyl, isotridecyl, Tetradecyl group, pentadecyl group, hexadecyl group, isohexadecyl group, heptadecyl group, octadecyl group, nonadecyl group, isocyl group, hencosyl group and docosyl group.

The branched alkyl group preferably has 3 to 20 carbon atoms, more preferably 3 to 15, and most preferably 3 to 10 carbon atoms. Specifically, for example, 1-methyl ethyl group, 1-methyl propyl group, 2-methyl propyl group, 1-methyl butyl group, 2-methyl butyl group, 3-methyl butyl group, 1-ethyl butyl group, 2- Ethyl butyl group, 1-methyl pentyl group, 2-methyl pentyl group, 3-methyl pentyl group, 4-methyl pentyl group, etc. are mentioned.

(Chain alkenyl group which may have a substituent)

The linear alkenyl group of R ¹⁰¹ may be either linear or branched, preferably 2 to 10 carbon atoms, more preferably 2 to 5, still more preferably 2 to 4, and particularly preferably 3 Do. As a linear alkenyl group, a vinyl group, a propenyl group (allyl group), butynyl group etc. are mentioned, for example. As a branched alkenyl group, a 1-methylpropenyl group, 2-methylpropenyl group, etc. are mentioned, for example.

Especially as a chain alkenyl group, a propenyl group is especially preferable.

As a substituent for R ¹⁰¹ of the alkyl or alkenyl groups of the chain, it may be mentioned, for example, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, a cyclic group etc. in the R ^101.

Especially, R ¹⁰¹ is preferably a cyclic group which may have a substituent, and more preferably a cyclic hydrocarbon group which may have a substituent. More specifically, a group except one or more hydrogen atoms from a phenyl group, a naphthyl group and a polycycloalkane, a lactone-containing cyclic group represented by the formulas (a2-r-1) to (a2-r-7), respectively, the general formula The -SO ₂ -containing cyclic group represented by (a5-r-1) to (a5-r-4) is preferable.

In formula (b-1), Y ¹⁰¹ is a divalent linking group containing a single bond or an oxygen atom.

When Y ¹⁰¹ is a divalent linking group containing an oxygen atom, this Y ¹⁰¹ may contain an atom other than an oxygen atom. As atoms other than an oxygen atom, a carbon atom, a hydrogen atom, a sulfur atom, a nitrogen atom, etc. are mentioned, for example.

As a bivalent coupling group containing an oxygen atom, an oxygen atom (ether bond: -O-), an ester bond (-C (= O) -O-), an oxycarbonyl group (-OC (= O)-), for example And hydrogen atom-based oxygen atom-containing linking groups such as amide bonds (-C (= O) -NH-), carbonyl groups (-C (= O)-), and carbonate bonds (-OC (= O) -O-) The combination of this hydrocarbon type oxygen atom containing coupling group and alkylene group etc. are mentioned. The sulfonyl group (-SO _2- ) may be further connected to the combination. As said combination, the coupling group represented, for example by following formula (y-al-1)-(y-al-7) is mentioned, for example.

[In formula, ^V'101 is a single bond or a C1-C5 alkylene group, ^V'102 is a C1-C30 divalent saturated hydrocarbon group.]

V 'group is a divalent saturated hydrocarbon in the ¹⁰² is preferably an alkylene group of 1 to 30 carbon atoms.

V is an alkylene group include straight-chain alkylene of the contribution of the ^"101 and V" ^102, and the contribution of alkylene branched alkyl, it is preferably an alkylene group of a straight chain.

V specifically, methylene group as the alkylene group in the ^'101 and _{^{V' 102 [-CH 2 -]}} ; - CH (CH 3) -, -CH (CH 2 CH 3) -, -C (CH 3) 2 _{-, -C (CH 3) (} CH 2 CH 3) -, -C (CH 3) (CH 2 CH 2 CH 3) -, -C (CH 2 CH 3) 2 - a methylene group of the alkyl and the like; an ethylene group [-CH ₂ CH _2- ]; -CH (CH ₃ ) CH _2- , -CH (CH ₃ ) CH (CH ₃ )-, -C (CH ₃ ) ₂ CH _2- , -CH (CH ₂ CH ₃ Alkyl ethylene groups such as CH _2- ; trimethylene group (n-propylene group) [-CH ₂ CH ₂ CH _2- ]; -CH (CH ₃ ) CH ₂ CH _2- , -CH ₂ CH (CH ₃ ) Alkyl trimethylene groups such as CH _2- ; tetramethylene group [-CH ₂ CH ₂ CH ₂ CH _2- ]; -CH (CH ₃ ) CH ₂ CH ₂ CH _2- , -CH ₂ CH (CH ₃ ) CH ₂ and the like - pentamethylene group _{[-CH 2 CH 2 CH 2 CH} 2 CH 2]; - CH 2 such alkyl tetramethylene group.

The group may be a part of the methylene in the alkyl group of the V 'or ¹⁰¹ V' ¹⁰² is replaced with a divalent cycloaliphatic group having a carbon number of 5-10. The aliphatic cyclic group is preferably a divalent group excluding one hydrogen atom from the cyclic aliphatic hydrocarbon group of Ra ′ ³ in the formula (a1-r-1), and a cyclohexylene group, 1,5-a However, a styrene group or a 2, 6-adamantylene group is more preferable.

As Y ^101, a divalent linking group containing an ester bond or an ether bond is preferable, and a linking group represented by the formulas (y-al-1) to (y-al-5), respectively, is preferable.

In formula (b-1), V ¹⁰¹ is a single bond, an alkylene group, or a fluorinated alkylene group. Alkylene group, the fluorinated alkylene group of from ¹⁰¹ V group is preferably a group having from 1 to 4 carbon atoms. ^Examples of the fluorinated alkylene group for V ¹⁰¹ include groups in which part or all of the hydrogen atoms of the alkylene group for V ¹⁰¹ are substituted with fluorine atoms. Among these, V ¹⁰¹ is preferably a single bond or a fluorinated alkylene group having from 1 to 4 carbon atoms.

In formula (b-1), R ¹⁰² is a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. R ¹⁰² is preferably a fluorine atom or a C 1-5 perfluoroalkyl group, and more preferably a fluorine atom.

Specific examples of the anion portion of the component (b-1) include, for example,

When Y ¹⁰¹ becomes a single bond, fluorinated alkylsulfonate anions such as trifluoromethanesulfonate anion and perfluorobutanesulfonate anion may be mentioned; when Y ^{1 01} is a divalent linking group containing an oxygen atom. And an anion represented by any one of the following formulas (an-1) to (an-3).

[Wherein, R ″ ¹⁰¹ is an aliphatic cyclic group which may have a substituent, a chain alkyl group which may have a group or a substituent represented by the formulas (r-hr-1) to (r-hr-6), respectively; R " ¹⁰² is an aliphatic cyclic group which may have a substituent, a lactone-containing cyclic group represented by the formulas (a2-r-1) to (a2-r-7) or the general formulas (a5-r-1) to (a5), respectively; -r-4) with -SO ₂ represent each-containing cyclic group and; R "is an alkenyl group of chain ¹⁰³ which may have a substituent or an aliphatic ring group which may have an aromatic ring group, substituents may have a substituent; V ″ ¹⁰¹ is a fluorinated alkylene group; L ″ ¹⁰¹ is —C (═O) — or —SO ₂ —; and v ″ are each independently an integer of 0 to 3, and q ″ is each independently 1 to 20 Integer, and n "is 0 or 1.]

R ^"101, R" ¹⁰² and R "aliphatic cyclic group which may have a ¹⁰³ substituent group is preferably a group exemplified as the cyclic aliphatic hydrocarbon groups in the R ^101. As the substituent of the cyclic in R ¹⁰¹ The same thing as the substituent which may substitute the aliphatic hydrocarbon group is mentioned.

The aromatic cyclic group which may have a substituent in R ″ ¹⁰³ is preferably a group exemplified as the aromatic hydrocarbon group in the cyclic hydrocarbon in R ^101. As the substituent, this aromatic hydrocarbon in R ¹⁰¹ is preferable. The same thing as the substituent which may substitute a group is mentioned.

The chain alkyl group which may have a substituent in R ″ ¹⁰¹ is preferably a group exemplified as the chain alkyl group in R ^101. The chain alkenyl group which may have a substituent in R ″ ¹⁰³ is represented by R ¹⁰¹ . The group exemplified as the chain alkenyl group of is preferable. V ″ ¹⁰¹ is preferably a fluorinated alkylene group having 1 to 3 carbon atoms, particularly preferably —CF ₂ —, —CF ₂ CF ₂ —, —CHFCF ₂ —, —CF (CF ₃ ) CF ₂ —, —CH (CF ₃ ) CF _2- .

Anion part of (b-2) component

In formula (b-2), R <^104> , R <^105> is respectively independently a cyclic group which may have a substituent, the chain alkyl group which may have a substituent, or the chain alkenyl group which may have a substituent, respectively, Formula (b- The same thing as R <^101> in 1) is mentioned. However, R ¹⁰⁴ and R ¹⁰⁵ may be bonded to each other to form a ring.

R ¹⁰⁴ and R ¹⁰⁵ are each preferably a linear alkyl group which may have a substituent, and more preferably a linear or branched alkyl group or a linear or branched fluorinated alkyl group.

It is preferable that carbon number of this linear alkyl group is 1-10, More preferably, it is C1-C7, More preferably, it is C1-C3. Carbon number of the linear alkyl group of R <^104> , R <^105> is more preferable because it is in the range of the said carbon number, so that solubility to a resist solvent is also good. In the chain alkyl groups of R ¹⁰⁴ and R ^105, the higher the number of hydrogen atoms substituted with fluorine atoms, the stronger the strength of the acid, and the higher the transparency to high energy light and electron beams of 200 nm or less are preferable. The proportion of the fluorine atoms in the chain alkyl group, that is, the fluorination rate, is preferably 70 to 100%, more preferably 90 to 100%, most preferably a perfluoroalkyl group in which all hydrogen atoms are substituted with fluorine atoms.

In formula (b-2), V ¹⁰² and V ¹⁰³ are each independently a single bond, an alkylene group, or a fluorinated alkylene group, and the same ones as those of V ¹⁰¹ in the formula (b-1) may be mentioned.

In formula (b-2), L ¹⁰¹ to L ¹⁰² each independently represent a single bond or an oxygen atom.

Anion part of (b-3) component

In formula (b-3), R ¹⁰⁶ to R ¹⁰⁸ are each independently a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, respectively. The same thing as R <^101> in 1) is mentioned.

L ¹⁰³ to L ¹⁰⁵ are each independently a single bond, -CO-, or -SO _2- .

Cationic ions

In formulas (b-1), (b-2) and (b-3), M ' ^{m +} is an m-valent organic cation other than the cation in the compound of the formula (b1-1), and among them sulfonium It is preferable that it is a cation or an iodonium cation, and the cation represented by the following general formula (ca-1) (ca-4)-respectively is especially preferable.

[Wherein, R ²⁰¹ to R ²⁰⁷ and R ²¹¹ to R ²¹² each independently represent an aryl group, alkyl group or alkenyl group which may have a substituent, and R ²⁰¹ to R ²⁰³ , R ²⁰⁶ to R ²⁰⁷ , R ²¹¹ to R ²¹² may combine with each other to form a ring together with a sulfur atom in the formula. R ²⁰⁸ to R ²⁰⁹ each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R ²¹⁰ is an aryl group, alkyl group, alkenyl group or -SO ₂ -containing cyclic group which may have a substituent, and L ²⁰¹ is- C (= O) - or -C (= O) represents a -O-, Y ²⁰¹ each independently represent an allyl group, an alkylene group, or represents an alkenylene group, and x is 1 or 2, W ²⁰¹ is (x + 1) valent It shows a connector.]

As an aryl group in R <^201> -R <^207> and R <^211> -R <^212> , a C6-C20 unsubstituted aryl group is mentioned, A phenyl group and a naphthyl group are preferable.

As an alkyl group in R <^201> -R <^207> and R <^211> -R <^212> , a C1-C30 thing is preferable as a linear or cyclic alkyl group.

As an alkenyl group in R <^201> -R <^207> and R <^211> -R <^212> , it is preferable that carbon number is 2-10.

Examples of the substituent which R ²⁰¹ to R ²⁰⁷ and R ²¹⁰ to R ²¹² may have include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, an arylthio group, and the following formula (ca-r And groups represented by -1) to (ca-r-7), respectively.

As an aryl group in the arylthio group as a substituent, it is the same as what was mentioned in R <^101> , Specifically, a phenylthio group or a biphenylthio group is mentioned.

[Wherein, R ′ ²⁰¹ each independently represents a hydrogen atom, a cyclic group which may have a substituent, a chain alkyl group or a chain alkenyl group.]

R 'ring which may have a substituent, ^201. Tableware, alkyl chain which may be substituted, or alkenyl chain which may have a substituent group other that can include the same as R ¹⁰¹ in the formula (b-1) And the same as the acid dissociable group represented by the formula (a1-r-2) as the cyclic group which may have a substituent or the chain alkyl group which may have a substituent.

When R ²⁰¹ to R ²⁰³ , R ²⁰⁶ to R ²⁰⁷ , R ²¹¹ to R ²¹² are bonded to each other to form a ring together with a sulfur atom in the formula, hetero atoms such as sulfur atom, oxygen atom, nitrogen atom, carbonyl group,- _{SO-, -SO 2 -, -SO 3} -, -COO-, -CONH- , or -N (RN) - may be bonded through a functional group such as (RN is an alkyl group of 1 to 5 carbon atoms.). As a ring formed, it is preferable that one ring which contains the sulfur atom in a formula in the ring skeleton contains a sulfur atom, It is preferable that it is a 3-10 membered ring, It is especially preferable that it is a 5-7 membered ring. Specific examples of the ring formed include, for example, thiophene ring, thiazole ring, benzothiophene ring, thianthrene ring, benzothiophene ring, dibenzothiophene ring, 9H-thioxanthene ring, thioxanthone ring and thianthrene ring. , Phenoxatiin ring, tetrahydrothiophenium ring, tetrahydrothiopyranium ring and the like.

R ²⁰⁸ to R ²⁰⁹ each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and in the case of an alkyl group, may be bonded to each other to form a ring.

R ²¹⁰ is -SO _2, which may have an alkenyl group, or a substituent group, may have a substituent which may have an aryl group, substituents may have a substituent-containing cyclic group.

As an aryl group in R <^210> , a C6-C20 unsubstituted aryl group is mentioned, A phenyl group and a naphthyl group are preferable.

As an alkyl group in R <^210> , a C1-C30 thing is preferable as a linear or cyclic alkyl group.

As an alkenyl group in R <^210> , it is preferable that carbon number is 2-10.

Examples of the -SO ₂ -containing cyclic group which may have a substituent in R ²¹⁰ include the same as those represented by "-SO ₂ -containing cyclic group" of Ra ²¹ in the general formula (a2-1). The group represented by a5-r-1) is preferable.

Y ²⁰¹ 's each independently represent an allylene group, an alkylene group, or an alkenylene group.

Examples of the allylene group in Y ²⁰¹ include a group in which one hydrogen atom is removed from the aryl group exemplified as the aromatic hydrocarbon group in R ¹⁰¹ in the formula (b-1).

Examples of the alkylene group and alkenylene group for Y ²⁰¹ include the same aliphatic hydrocarbon group as the divalent hydrocarbon group for Va ¹ in General Formula (a1-1).

In said formula (ca-4), x is 1 or 2.

W ²⁰¹ is (x + 1), that is, a divalent or trivalent linking group.

As the divalent linking group for W ²⁰¹ , a divalent hydrocarbon group which may have a substituent is preferable, and the same hydrocarbon group as Ya ²¹ in General Formula (a2-1) can be exemplified. The divalent linking group in W ²⁰¹ may be any of linear, branched, and cyclic, and is preferably cyclic. Among them, a group in which two carbonyl groups are combined at both ends of the allylene group is preferable. A phenylene group, a naphthylene group, etc. are mentioned as an allylene group, A phenylene group is especially preferable.

Trivalent groups connected in the W ²⁰¹ may be those groups bonded the divalent connecting group in addition to the group, the divalent connecting group other than a hydrogen atom from the divalent linking group in the above-mentioned W ^201. As the trivalent linking group for W ²⁰¹ , a group in which two carbonyl groups are bonded to an allylene group is preferable.

Specific examples of the preferred cation represented by the formula (ca-1) include cations represented by the following formulas (ca-1-1) to (ca-1-63).

[In formula, g1, g2, g3 represents a repeating number, g1 is an integer of 1-5, g2 is an integer of 0-20, g3 is an integer of 0-20.]

[Wherein, R ″ ²⁰¹ is a hydrogen atom or a substituent, and the substituents are the same as those mentioned in the substituents which R ²⁰¹ to R ²⁰⁷ and R ²¹⁰ to R ²¹² may have.

Specifically as a preferable cation represented by said formula (ca-3), the cation shown by the following formula (ca-3-1)-(ca-3-6) j respectively is mentioned.

As a preferable cation represented by said Formula (ca-4), the cation shown by the following formula (ca-4-1)-(ca-4-2) is mentioned specifically ,.

Moreover, it is preferable that the resist composition of this invention contains the acid generator (B1) containing the compound represented by the following general formula (b1-1).

[In formula, R <^1> , R <^2> is a C1-C10 alkyl group which may have a substituent, R <^3> , R <^4> has a C2-C10 alkyl group which may have a substituent, R <^3> and R <^4> combine these, You may form the ring with a sulfur atom. X ^- is a counter anion.]

Formula (b1-1) of, R ^1, R ^2, a description of the R ³ and R ⁴ are the same as those described for R ^1, R ^2, R ³ and R ⁴ in the general formula (d0).

In General Formula (b1-1), X ⁻ is a counter anion.

As an anion of X <^-> in general formula (b1-1), a sulfonic acid anion, a carboxylic acid anion, an imide anion, a meted anion, a carbo anion, a borate anion, a halogen anion, a phosphate anion, an antimonic anion, a non-acidic anion, etc. Anion of is mentioned.

For example, the anion part represented by the following general formula (b-an1) and the same anion part as the anion part contained in the said general formula (b-1)-(b-3) are mentioned.

[In formula, R <^11> -R <^14> is a fluorine atom, the alkyl group which may have a substituent, or an aryl group each independently.]

The general formula (b-an1) of, R ¹¹ ~ R to a group in ¹⁴ is of the same chain or cyclic and Ra ^'3 having a carbon number of 1 to 20 alkyl are preferred, and the formula (a1-r-1) Alkyl group is mentioned.

As an aryl group in R <^11> -R <^14> , a phenyl group or a naphthyl group is preferable.

As a substituent which you may have when R <^11> -R <^14> is an alkyl group or an aryl group, a halogen atom, a halogenated alkyl group, an alkyl group, an alkoxy group, an alkyl thi group, a hydroxyl group, a carbonyl group, etc. are mentioned. Examples of these substituents include groups represented by general formulas (a2-r-1) to (a2-r-7). Moreover, a C1-C4 thing is mentioned as an alkyl thi group. Especially, a halogen atom, a halogenated alkyl group, an alkyl group, an alkoxy group, and an alkyl thi group are preferable.

It is a group represented by the general formula (b-an1) of, R ¹¹ ~ R ¹⁴ preferably a fluorine atom, a fluorinated alkyl group or the following formula (b-an1 ') for being preferred.

[Wherein, R ^'11 ~ R' ¹⁵ are each independently a hydrogen atom, a fluorine atom, trifluoromethyl, alkyl, alkoxy or alkylthio group having from 1 to 4 carbon atoms.]

In said general formula (b-an1 '), a C1-C4 alkyl group specifically, can mention a methyl group, an ethyl group, n-propyl group, n-butyl group, etc. Among these, a methyl group, an ethyl group, or n-butyl group is preferable, and a methyl group or ethyl group is more preferable.

In said general formula (b-an1 '), a C1-C4 alkoxy group specifically, has a methoxy group, an ethoxy group, n-propoxy group, an iso-propoxy group, n-butoxy group, tert-butoxy group is preferable. And a methoxy group and an ethoxy group are more preferable.

In the general formula (b-an1 '), the alkyl thi group having 1 to 4 carbon atoms is methyl thio group, ethyl thio group, n-propyl thio group, iso-propyl thio group, n-butyl thio group, tert-butyl thio Group is preferable, and methyl thi group and ethyl thi group are more preferable.

Preferable specific examples of the anion moiety represented by general formula (b-an1) include tetrakis (pentafluorophenyl) borate ([B (C ₆ F ₅ ) ₄ ] ^- ), tetrakis [(trifluoromethyl) phenyl] Borate ([B (C ₆ H ₄ CF ₃ ) ₄ ] ^- ), difluorobis (pentafluorophenyl) borate ([(C ₆ F ₅ ) ₂ BF ₂ ] ^- ), trifluoro (pentafluoro Phenyl) borate ([(C ₆ F ₅ ) BF ₃ ] ^- ), tetrakis (difluorophenyl) borate ([B (C ₆ H ₃ F ₂ ) ₄ ] ^- ), and the like. Among these, tetrakis (pentafluorophenyl) borate ([B (C ₆ F ₅ ) ₄ ] ^- ) is particularly preferable.

The counter anion of X ⁻ may be a halogen anion, a phosphate anion, an antimony acid anion (SbF ₆ ⁻ ), or a non ^- acidic anion (AsF ₆ ⁻ ). Examples of the halogen anion include chlorine and bromine, and examples of the phosphate anion include PF ₆ ⁻ and an anion represented by the following general formula (b-an2).

[In formula, R <^15> is a C1-C8 fluorinated alkyl group each independently. q is 1 to 6.]

In the general formula (b-an2), specific examples of the fluorinated alkyl group having 1 to 8 carbon atoms include CF ₃ , CF ₃ CF ₂ , (CF ₃ ) ₂ CF, CF ₃ CF ₂ CF ₂ , CF ₃ CF ₂ CF ₂ CF ₂ , (CF ₃ ) ₂ CFCF ₂ , CF ₃ CF ₂ (CF ₃ ) CF, C (CF ₃ ) ₃ .

An acid generator (B1) may be used independently and may be used in combination of 2 or more type. It is preferable to make content of an acid generator (B1) into 0.1-10 mass% with respect to the total mass of the resist composition which concerns on this invention, It is more preferable to set it as 0.5-5 mass%, and to set it as 0.5-3 mass% More preferred.

As the acid generator (B), other acid generators other than the above may be used in combination.

The first aspect in other acid generators is 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (2-furyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-methyl-2-furyl) ethenyl] -s-triazine , 2,4-bis (trichloromethyl) -6- [2- (5-ethyl-2-furyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2 -(5-propyl-2-furyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (3,5-dimethoxyphenyl) ethenyl] -s- Triazine, 2,4-bis (trichloromethyl) -6- [2- (3,5-diethoxyphenyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (3,5-dipropoxyphenyl) ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (3-methoxy-5-ethoxyphenyl) Ethenyl] -s-triazine, 2,4-bis (trichloromethyl) -6- [2- (3-methoxy-5-propoxyphenyl) ethenyl] -s-triazine, 2,4- Bis (trichloromethyl) -6- [2- (3,4-methylenedioxyphenyl) ether Nil] -s-triazine, 2,4-bis (trichloromethyl) -6- (3,4-methylenedioxyphenyl) -s-triazine, 2,4-bis-trichloromethyl-6- ( 3-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) phenyl-s-triazine, 2,4 -Bis-trichloromethyl-6- (2-bromo-4-methoxy) styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6- (3-bromo-4-meth Methoxy) styrylphenyl-s-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl ) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- [2- (2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3 , 5-triazine, 2- [2- (5-methyl-2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- [2- ( 3,5-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- [2- (3,4-dimethoxyphenyl) ethenyl]- 4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4-methylenedioxyphenyl) -4 , 6-bis (trichloromethyl) -1,3,5-triazine, tris (1,3-dibromopropyl) -1,3,5-triazine, tris (2,3-dibromopropyl And halogen-containing triazine compounds represented by the following general formula (b3) such as halogen-containing triazine compounds such as) -1,3,5-triazine and tris (2,3-dibromopropyl) isocyanurate Can be.

In the above general formula ^{(b3), Rb 9, Rb} 10, Rb 11 represents a halogenated alkyl group each independently.

Moreover, as 2nd aspect in another acid generator, (alpha)-(p-toluenesulfonyloxyimide) -phenylacetonitrile, (alpha)-(benzenesulfonyloxyimino) -2,4- dichlorophenyl acetonitrile, (alpha)- (Benzenesulfonyloxyimino) -2,6-dichlorophenylacetonitrile, α- (2-chlorobenzenesulfonyloxyimino) -4-methoxyphenylacetonitrile, α- (ethylsulfonyloxyimino) -1- The compound represented by the following general formula (b4) containing cyclopentenyl acetonitrile and an oxime sulfonate group is mentioned.

In the general formula (b4), Rb ¹² represents a monovalent, divalent or trivalent organic group, Rb ¹³ represents a substituted or unsubstituted saturated hydrocarbon group, unsaturated hydrocarbon group or aromatic compound group, n is in parentheses The repeating unit number of the structure inside is shown.

In said general formula (b4), an aromatic compound group represents group of the compound which shows the physical and chemical property peculiar to an aromatic compound, For example, Heteroaryl, such as aryl groups, such as a phenyl group and a naphthyl group, and a furyl group, thienyl group, etc. The group can be mentioned. These may have one or more substituents suitable for cyclic, for example, a halogen atom, an alkyl group, an alkoxy group, a nitro group. Moreover, as Rb ¹³ , a C1-C6 alkyl group is especially preferable, and a methyl group, an ethyl group, a propyl group, and a butyl group are mentioned. In particular, the ¹² Rb is an aromatic compound, and Rb ¹³ are preferred alkyl group having from 1 to 4 carbon atoms.

The acid generator represented by the general formula (b4) is when n = 1, Rb ¹² are a phenyl group, any one of methyl group, a methoxy phenyl group, Rb is a methyl group in compound ^13, specifically, α- (methylsulfonyl Oxyimino) -1-phenylacetonitrile, α- (methylsulfonyloxyimino) -1- (p-methylphenyl) acetonitrile, α- (methylsulfonyloxyimino) -1- (p-methoxyphenyl) aceto Nitrile, [2- (propylsulfonyloxyimino) -2,3-dihydroxythiophen-3-ylidene] (o-tolyl) acetonitrile, and the like. When n = 2, the acid generator represented by the said general formula (b4) specifically, the acid generator represented by a following formula is mentioned.

Moreover, the onium salt which has a naphthalene ring in a cation part is mentioned as a 3rd aspect in another acid generator. This "having a naphthalene ring" means having a structure derived from naphthalene, and means that the structure of at least two rings and these aromatics are maintained. This naphthalene ring may have substituents, such as a C1-C6 linear or branched alkyl group, a hydroxyl group, a C1-C6 linear or branched alkoxy group. Although the structure derived from a naphthalene ring may be monovalent (one free valence is 1) or divalent (two free valences) may be sufficient, it is preferable that it is monovalent (except the part couple | bonded with the said substituent at this time). The free valence is counted). As for the number of naphthalene rings, 1-3 are preferable.

As a cation part of the onium salt which has a naphthalene ring in such a cation part, the structure represented by following General formula (b5) is preferable.

In the general formula (b5), at least one of Rb ¹⁴ , Rb ¹⁵ and Rb ¹⁶ represents a group represented by the following general formula (b6), and the rest may have a linear or branched alkyl group having 1 to 6 carbon atoms or a substituent. The phenyl group, hydroxyl group, or C1-C6 linear or branched alkoxy group to be represented is shown. Or one of Rb ¹⁴ , Rb ¹⁵ , and Rb ¹⁶ is a group represented by the following General Formula (b6), and the other two are each independently a linear or branched alkylene group having 1 to 6 carbon atoms, and these terminals are bonded to form a ring; This may be done. In the following formulae, "*" represents a bonding hand.

In the general formula (b6), Rb ¹⁷ and Rb ¹⁸ each independently represent a hydroxyl group, a linear or branched alkoxy group having 1 to 6 carbon atoms, or a linear or branched alkyl group having 1 to 6 carbon atoms, and Rb ¹⁹ is The C1-C6 linear or branched alkylene group which may have a bond or a substituent is shown. 1 and m respectively independently represent the integer of 0-2, and l + m is 3 or less. However, if Rb ¹⁷ are a plurality is present, they may be the same or different from each other. In the case where Rb ¹⁸ The presence of a plurality, they may be the same or different from each other.

The number of groups represented by the general formula (b6) in the Rb ¹⁴ , Rb ¹⁵ , and Rb ¹⁶ is preferably one from the viewpoint of the stability of the compound, and the remainder is a linear or branched alkylene group having 1 to 6 carbon atoms, These terminals may be bonded to form a ring. In this case, the two alkylene groups constitute a 3 to 9 membered ring including a sulfur atom. The number of atoms (including sulfur atoms) constituting the ring is preferably 5-6.

Moreover, as a substituent which the said alkylene group may have, an oxygen atom (in this case, a carbonyl group is formed with the carbon atom which comprises an alkylene group), a hydroxyl group, etc. are mentioned.

Moreover, as a substituent which the phenyl group may have, a hydroxyl group, a C1-C6 linear or branched alkoxy group, a C1-C6 linear or branched alkyl group, etc. are mentioned.

Preferable examples of these cationic moieties include those represented by the following formulas (b7) and (b8), and particularly preferably the structures represented by the following formulas (b8).

The cation moiety may be an iodonium salt or a sulfonium salt, but a sulfonium salt is preferable in view of acid generation efficiency.

Therefore, as an anion part of the onium salt which has a naphthalene ring in a cation part, the anion which can form a sulfonium salt is preferable.

The anion portion of such an acid generator is a fluoroalkyl sulfonic acid ion or an aryl sulfonic acid ion in which part or all of the hydrogen atoms are fluorinated.

The alkyl group in the fluoroalkyl sulfonic acid ion may be linear, branched or cyclic, having 1 to 20 carbon atoms, and preferably 1 to 10 carbon atoms from the large volume of the generated acid and its diffusion distance. In particular, the branched or annular one is preferable because the diffusion distance is short. Moreover, a methyl group, an ethyl group, a propyl group, a butyl group, an octyl group etc. are mentioned as a preferable thing from the point which can synthesize | combine inexpensively.

The aryl group in an aryl sulfonic acid ion is a C6-C20 aryl group, The phenyl group and naphthyl group which may or may not be substituted by an alkyl group and a halogen atom are mentioned. In particular, a C6-C10 aryl group is preferable at the point which can be synthesize | combined cheaply. Preferable specific examples include phenyl group, toluene sulfonyl group, ethyl phenyl group, naphthyl group, methyl naphthyl group and the like.

In the fluoroalkyl sulfonic acid ion or the aryl sulfonic acid ion, the fluorination rate in the case where some or all of the hydrogen atoms are fluorinated is preferably 10 to 100%, more preferably 50 to 100%, particularly hydrogen It is preferable to replace all the atoms with fluorine atoms because the strength of the acid becomes stronger. Specific examples of the same include trifluoromethanesulfonate, perfluorobutanesulfonate, perfluorooctanesulfonate, perfluorobenzenesulfonate, and the like.

Among these, what is represented by the following general formula (b9) as a preferable anion part is mentioned.

Wherein in the formula (b9), ²⁰ Rb is a group represented by the formula (b12) group or represented by the formula (b10), (b11). In the following formulae, "*" represents a bonding hand.

In said general formula (b10), x represents the integer of 1-4. Further, in the general formula (b11), Rb ²¹ is an alkoxy group a linear or branched alkyl group or a group having 1 to 6 carbon atoms straight-chain or branched a hydrogen atom, a hydroxyl group, having 1 to 6 carbon atoms, y is from 1 to 3 Represents an integer. Among them, trifluoromethanesulfonate and perfluorobutanesulfonate are preferable from the viewpoint of safety.

Moreover, it is preferable to use the thing containing nitrogen represented by following General formula (b13) and (b14) as an anion part.

In General Formula (a13), Xb represents a linear or branched alkylene group in which at least one hydrogen atom is substituted with a fluorine atom, and the alkylene group has 2 to 6 carbon atoms, preferably 3 to 5, most preferably Has 3 carbon atoms. In the general formula (a14), Yb and Zb each independently represent a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and the alkyl group has 1 to 10 carbon atoms, preferably 1 to 7, More preferably, it is 1-3.

The smaller the carbon number of the alkylene group of Xb or the carbon number of the alkyl group of Yb and Zb, the better the solubility in the organic solvent is preferable.

Moreover, in the alkylene group of Xb or the alkyl group of Yb and Zb, since the number of hydrogen atoms substituted with the fluorine atom increases, the intensity | strength of an acid becomes strong, and it is preferable. The proportion of the fluorine atoms in the alkylene group or the alkyl group, that is, the fluorination rate is preferably 70 to 100%, more preferably 90 to 100%, most preferably a perfluoroalkylene group in which all hydrogen atoms are substituted with fluorine atoms or Perfluoroalkyl group.

As an onium salt which has a naphthalene ring as such a cation part, the compound represented by following formula (b15) and (b16) is mentioned.

In a fourth embodiment of the other acid generator, bis (p-toluenesulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane and bis (cyclohexylsulfonyl) diazomethane Bissulfonyl diazomethanes, such as bis (2,4-dimethylphenylsulfonyl) diazomethane; p-toluenesulfonic acid 2-nitrobenzyl, p-toluenesulfonic acid 2,6-dinitrobenzyl and nitrobenzyl Nitrobenzyl derivatives such as tosylate, dinitrobenzyltosylate, nitrobenzylsulfonate, nitrobenzyl carbonate, and dinitrobenzyl carbonate; pyrogarotrimesylate, pyrogarotritosylate, benzyltosylate Sulfonic acid esters such as benzylsulfonate, N-methylsulfonyloxysuccinimide, N-trichloromethylsulfonyloxysuccinimide, N-phenylsulfonyloxymaleimide, and N-methylsulfonyloxyphthalimide Tripleru such as N-hydroxyphthalimide and N-hydroxy naphthalimide Romethane sulfonic acid esters; diphenyl iodonium hexafluorophosphate, (4-methoxyphenyl) phenyl iodonium trifluoromethanesulfonate, bis (p-tert-butylphenyl) iodonium trifluoromethanesulfonate, Onium salts such as triphenylsulfonium hexafluorophosphate, (4-methoxyphenyl) diphenylsulfonium trifluoromethanesulfonate, and (p-tert-butylphenyl) diphenylsulfonium trifluoromethanesulfonate; Benzointosylates such as benzointosylate and α-methylbenzointosylate; other diphenyl iodonium salts, triphenylsulfonium salts, phenyldiazonium salts, benzyl carbonates, and the like.

Preferred as the other acid generator that is the values of the preferred n is a compound represented by the above general formula (b4) is 2, Further, preferred Rb ¹² are a divalent group having 1 to 8 carbon atoms or a substituted or unsubstituted alkylene group or a substituted or beach hwandoen an aromatic group, and preferred is Rb ^13, but a substituted or unsubstituted alkyl group or substituted or unsubstituted aryl group having a carbon number of 1-8, but are not limited to.

The use ratio in the case of using such another acid generator together is not specifically limited unless the effect of this invention is impaired. Usually, another acid generator is 1-300 mass parts with respect to 100 mass parts of acid generators containing the cation part represented by the said general formula (b5), and the anion part represented by the said general formula (b-an1). 10-100 mass parts.

An acid generator (B) may be used independently and may be used in combination of 2 or more type. It is preferable to set it as 0.1-10 mass% with respect to the total mass of the resist composition which concerns on this invention, and, as for content of an acid generator (B), it is more preferable to set it as 0.5-3 mass%.

<Optional component>

[(E) component]

The resist composition of the present invention contains at least one compound selected from the group consisting of organic carboxylic acids and oxo acids of phosphorus and derivatives thereof as arbitrary components for the purpose of preventing sensitivity deterioration, improving the resist pattern shape, atmospheric stability over time, and the like. (E) (henceforth (E) component) can be contained.

As the organic carboxylic acid, acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, salicylic acid and the like are very suitable.

Phosphoric acid, phosphonic acid, phosphinic acid, etc. are mentioned as an oxo acid of phosphorus, Among these, phosphonic acid is especially preferable.

As a derivative of the oxo acid of phosphorus, the ester etc. which substituted the hydrogen atom of the said oxo acid with a hydrocarbon group, etc. are mentioned, As said hydrocarbon group, a C1-C5 alkyl group, a C6-C15 aryl group, etc. are mentioned, for example. Can be mentioned.

Phosphoric acid esters, such as phosphoric acid di-n-butyl ester and phosphoric acid diphenyl ester, are mentioned as a derivative of phosphoric acid.

Examples of the derivatives of phosphonic acid include phosphonic acid dimethyl esters, phosphonic acid-di-n-butyl esters, phosphonic acid esters such as phenylphosphonic acid, phosphonic acid diphenyl esters, and phosphonic acid dibenzyl esters.

Examples of the derivatives of phosphinic acid include phosphinic acid esters and phenyl phosphinic acid.

(E) A component may be used individually by 1 type and may use 2 or more types together.

(E) component is normally used in 0.01-5.0 mass part with respect to 100 mass parts of resin solid content (the sum total of (A) component and (C) component).

[Other additives]

The resist composition of the present invention may further contain appropriately miscible additives, such as additional resins, dissolution inhibitors, plasticizers, stabilizers, colorants, antihalation agents, dyes, etc., as desired, to improve the performance of the resist film. You can.

[(S) component]

The resist composition of this invention can be manufactured by melt | dissolving a material in the organic solvent (Hereinafter, it may be called (S) component.).

What is necessary is just to be able to melt | dissolve each component to be used as a (S) component, and to make it a uniform solution, and arbitrary 1 type (s) or 2 or more types can be suitably selected from the well-known as a solvent of the conventional chemically amplified resist, and can be used.

For example, lactones, such as (gamma) -butyrolactone (GBL); Ketones, such as acetone, methyl ethyl ketone (MEK), cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; Polyhydric alcohols such as ethylene glycol, diethylene glycol, propylene glycol and dipropylene glycol; compounds having ester bonds such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate or dipropylene glycol monoacetate, the above polyhydric Derivatives of polyhydric alcohols such as alcohols or compounds having ether bonds such as monoalkyl ethers such as monomethyl ether, monoethyl ether, monopropyl ether and monobutyl ether or monophenyl ethers of the compounds having the above ester bonds [these In propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl PGME is preferred]; cyclic ethers such as dioxane, methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate and ethyl ethoxypropionate. Esters such as anisole, ethyl benzyl ether, cresyl methyl ether, diphenyl ether, dibenzyl ether, phentol, butyl phenyl ether, ethyl benzene, diethyl benzene, pentyl benzene, isopropyl benzene, toluene, xylene, Aromatic organic solvents, such as cymene and mesitylene, dimethyl sulfoxide (DMSO), etc. are mentioned.

Moreover, the organic solvent can be mix | blended suitably for the viscosity adjustment to the resist composition of this invention. Specific examples of the organic solvent include ketones such as methyl isoamyl ketone; ethylene glycol, ethylene glycol monoacetate, diethylene glycol, diethylene glycol monoacetate, propylene glycol, propylene glycol monoacetate, dipropylene glycol and dipropylene glycol monoacetate. Polyhydric alcohols and derivatives thereof such as monomethyl ether, monoethyl ether, monopropyl ether, monobutyl ether or monophenyl ether; cyclic ethers such as dioxane; methyl acetoacetic acid, ethyl acetoacetic acid, ethyl pyruvate and ethoxyacetic acid Ethyl, Methyl 2-hydroxypropionate, Ethyl 2-hydroxypropionate, Ethyl 2-hydroxy-2-methylpropionate, Methyl 2-hydroxy-3-methylbutanoic acid, 3-methoxybutyl acetate, 3-methyl- Esters such as 3-methoxybutyl acetate; aromatic hydrocarbons such as toluene and xylene The small flow is mentioned. These may be used independently and may mix and use 2 or more types.

These organic solvents may be used independently and may be used as 2 or more types of mixed solvents. Especially, PGMEA and 3-methoxybutyl acetate are preferable.

The usage-amount of (S) component is not specifically limited, It is set suitably according to the coating film thickness in the density | concentration which can be apply | coated to a board | substrate. Generally, it is used so that solid content concentration of a resist composition may be in the range of 1-65 mass%, Preferably it is 2-65 mass%, The solid content concentration in the case of the resist composition for thick films is 30 mass% or more, It is 30 mass It is more preferable that it is the range used as% to 65 mass%.

"etc"

In order to improve reversibility, the resist composition of the present invention may further contain a polyvinyl resin. It is preferable that it is 10,000-200,000, and, as for polyvinyl resin, it is more preferable that it is 50,000-100,000.

Such polyvinyl resin is poly (vinyl lower alkyl ether), and consists of a polymer or copolymer obtained by superposing | polymerizing the vinyl lower alkyl ether individually or mixture of 2 or more types represented by the following general formula (Vi-1).

In the above general formula ^(Vi-1), Rvi 1 represents an alkyl group a linear or branched group having 1 to 6 carbon atoms.

Such polyvinyl resin is a polymer obtained from a vinyl compound. Specific examples of such polyvinyl resins include polyvinyl chloride, polystyrene, polyhydroxystyrene, polyvinyl acetate, polyvinyl benzoic acid, polyvinyl methyl ether, polyvinyl ethyl ether, polyvinyl alcohol, polyvinyl pyrrolidone, poly Vinyl phenol and copolymers thereof. The polyvinyl resin is preferably polyvinyl methyl ether in that the glass transition point is low.

Moreover, in order to improve the adhesiveness with a board | substrate, the resist composition of this invention can also be made to contain an adhesion | attachment adjuvant. As the adhesion aid to be used, a functional silane coupling agent is preferable. As a functional silane coupling agent, the silane coupling agent which has reactive substituents, such as a carboxyl group, a methacryloyl group, an isocyanate group, an epoxy group, is mentioned. Specific examples of the functional silane coupling agent include trimethoxysilyl benzoic acid, γ-methacryloxypropyl trimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, and γ-glycidoxypropyl trimethoxysilane. and β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane. It is preferable that content of this adhesion | attachment adjuvant is 20 mass parts or less with respect to 100 mass parts of total masses of the said resin (A) and alkali-soluble resin (C).

Moreover, in order to improve applicability | paintability, antifoaming property, leveling property, etc., the resist composition of this invention can also contain surfactant further. Examples of the surfactant include BM-1000, BM-1100 (all manufactured by BM Chemi Corporation), Megapack F142D, Megapack F172, Megapack F173, Megapack F183 (all manufactured by Nippon Ink Chemical Co., Ltd.), FULORAD FC-135, FULORAD FC-170C, FULORAD FC-430, FULORAD FC-431 (all made by Sumitomo 3M company), Supron S-112, Supron S-113, Supron S-131, Supron S-141, Supron S- Commercially available fluorine-based surfactants such as 145 (all made by Asahi Glass Co., Ltd.), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428 (all are manufactured by Toray Silicone Co., Ltd.), It is not limited.

In addition, the resist composition of the present invention may further contain an acid, an acid anhydride or a high boiling point solvent in order to fine-tune the solubility in the alkaline developer.

Examples of acids and acid anhydrides include monocarboxylic acids such as acetic acid, propionic acid, n-butyric acid, isobutyric acid, n-valeric acid, isovaleric acid, benzoic acid, cinnamic acid; lactic acid, 2-hydroxybutyric acid, 3-hydroxybutyric acid, Hydroxy monocarboxylic acids such as salicylic acid, m-hydroxybenzoic acid, p-hydroxybenzoic acid, 2-hydroxycinnamic acid, 3-hydroxycinnamic acid, 4-hydroxycinnamic acid, 5-hydroxyisophthalic acid, and ciring acid Oxalic acid, succinic acid, glutaric acid, adipic acid, maleic acid, itaconic acid, hexahydrophthalic acid, phthalic acid, isophthalic acid, terephthalic acid, 1,2-cyclohexane dicarboxylic acid, 1,2,4-cyclohexane tricarboxylic Polyhydric carboxylic acids such as acid, butane tetracarboxylic acid, trimellitic acid, pyromellitic acid, cyclopentane tetracarboxylic acid, butane tetracarboxylic acid, 1,2,5,8-naphthalene tetracarboxylic acid; itaconic anhydride, succinic anhydride, citraconic anhydride , Dodecenylsuccinic anhydride, tricarbanic anhydride, maleic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, hymic anhydride, 1,2,3,4-butane tetracarboxylic anhydride, cyclopentane tetracarboxylic dianhydride, And acid anhydrides such as phthalic anhydride, pyromellitic anhydride, trimellitic anhydride, benzophenone tetracarboxylic acid, ethylene glycol bis trimellitate, and glycerin tris trimellitate.

In addition, examples of the high boiling point solvent include N-methylformamide, N, N-dimethylformamide, N-methylformanilide, N-methylacetamide, N, N-dimethylacetamide, N-methylpyrrolidone, and dimethyl. Sulfoxide, benzyl ethyl ether, dihexyl ether, acetonyl acetone, isophorone, caproic acid, capuric acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate , γ-butyrolactone, ethylene carbonate, propylene carbonate, phenyl cellosolve acetate, and the like.

The amount of the compound used for finely adjusting the solubility in the alkaline developer as described above can be adjusted depending on the use and the application method, and is not particularly limited as long as the composition can be uniformly mixed. It is 60 mass% or less, Preferably you may be 40 mass% or less.

For the preparation of the resist composition of the present invention, for example, only the above-mentioned components are mixed and stirred in a conventional manner, and are dispersed and mixed using a disperser such as a resolver, a homogenizer, a three-roll mill, and the like, if necessary. You may also Moreover, after mixing, you may filter using a mesh, a membrane filter, etc. further.

The resist composition of the present invention is suitable for forming a thick film photoresist layer having a thickness of about 5 to about 200 mu m, preferably about 10 to about 120 mu m, more preferably about 10 to about 100 mu m, on a support.

It does not specifically limit as a support body, A conventionally well-known thing can be used, For example, the board | substrate for electronic components, the thing in which the predetermined wiring pattern was formed, etc. can be illustrated. As this board | substrate, the board | substrate made of metal, such as silicon, silicon nitride, titanium, tantalum, palladium, titanium, tungsten, copper, chromium, iron, aluminum, a glass substrate, etc. are mentioned, for example. In particular, the thick film chemically amplified positive photoresist composition according to the present embodiment can form a resist pattern well on a copper substrate. As a material of a wiring pattern, copper, soldering, chromium, aluminum, nickel, gold, etc. are used, for example.

`` Resist Pattern Formation Method ''

The resist pattern formation method of the 2nd aspect of this invention can be implemented more specifically, for example as follows.

First, the resist composition is coated on a support with a spinner or the like, and the baking (post-applied bake (PAB)) treatment is performed for 40 to 120 seconds, preferably 60 to 90 seconds, for example, at a temperature of 80 to 150 ° C. To form a resist film. Next, this resist film is exposed through a mask (mask pattern) on which a predetermined pattern is formed, or through a mask pattern, using an exposure apparatus such as an ArF exposure apparatus, an electron beam drawing apparatus, an EUV exposure apparatus, or the like. After performing selective exposure by drawing or the like by direct irradiation of an electron beam, the baking (post exposure bake (PEB)) treatment is performed, for example, at a temperature condition of 80 to 150 ° C. for 40 to 120 seconds, preferably 60 to Run for 90 seconds. After developing this resist film using an organic type developing solution, Preferably it rinses using a rinse liquid containing an organic solvent, and performs drying.

You may perform the process which removes the developer or rinse liquid adhering on a pattern after the said image development process or the rinse process with a supercritical fluid.

In some cases, after the development treatment, the rinse treatment or the treatment with a supercritical fluid, a bake (post bake) treatment may be performed to remove the remaining organic solvent.

It does not specifically limit as a support body, A conventionally well-known thing can be used, For example, the board | substrate for electronic components, the thing in which predetermined wiring pattern was formed, etc. can be illustrated. More specifically, a metal substrate, such as a silicon wafer, copper, chromium, iron, aluminum, a glass substrate, etc. are mentioned. As a material of a wiring pattern, copper, aluminum, nickel, gold, etc. can be used, for example.

As the support, an inorganic and / or organic film may be provided on the substrate as described above. An inorganic film is an inorganic antireflection film (inorganic BARC). As an organic film | membrane, organic films, such as an organic antireflection film (organic BARC) and the lower layer organic film in a multilayer resist method, are mentioned.

Here, in the multilayer resist method, at least one organic film (lower layer organic film) and at least one resist film (upper layer resist film) are provided on a substrate, and the lower layer is formed by using a resist pattern formed on the upper layer resist film as a mask. It is a method of patterning an organic film, and it is thought that the pattern of a high aspect ratio can be formed. That is, according to the multilayer resist method, since the required thickness can be ensured by the lower organic film, the resist film can be thinned and fine pattern formation with a high aspect ratio becomes possible.

The multilayer resist method is basically a two-layer structure of an upper resist film and a lower organic film (two-layer resist method) and three or more multilayers provided with one or more intermediate layers (metal thin films, etc.) between the upper resist film and the lower organic film. It can be divided into a method of structure (three-layer resist method).

The wavelength used for exposure is not specifically limited, ArF excimer laser, KrF excimer laser, F ₂ excimer laser, EUV (extreme ultraviolet), VUV (vacuum ultraviolet), EB (electron beam), X-ray, soft X-ray It can carry out using such radiation. The resist composition has high utility for KrF excimer laser, ArF excimer laser, EB or EUV, and is particularly useful for ArF excimer laser, EB or EUV.

The exposure method of a resist film may be normal exposure (dry exposure) performed in inert gas, such as air and nitrogen, or liquid immersion lithography (Liquid Immersion Lithography).

Liquid immersion exposure is an exposure method which fills between the resist film and the lens of the lowest position of an exposure apparatus previously with the solvent (immersion medium) which has refractive index larger than the refractive index of air, and performs exposure (immersion exposure) in that state.

As the liquid immersion medium, a solvent having a refractive index larger than that of air and smaller than the refractive index of the resist film exposed is preferable. The refractive index of such a solvent is not particularly limited as long as it is within the above range.

As a solvent which has a refractive index larger than the refractive index of air and smaller than the refractive index of the said resist film, water, a fluorine-type inert liquid, a silicone solvent, a hydrocarbon solvent, etc. are mentioned, for example.

Specific examples of fluorine-based inert liquids include C ₃ HCl ₂ F ₅ , C ₄ F ₉ OCH ₃ , C ₄ F ₉ OC ₂ H ₅ , C ₅ H ₃ F ₇ The liquid etc. which have a fluorine compound as a main component etc. are mentioned, It is preferable that boiling point is 70-180 degreeC, and it is more preferable that it is 80-160 degreeC. If the fluorine-based inert liquid has a boiling point in the above range, it is preferable in that the medium used for the liquid immersion can be removed by a simple method after the end of the exposure.

Especially as a fluorine-type inert liquid, the perfluoroalkyl compound in which all the hydrogen atoms of the alkyl group were substituted by the fluorine atom is preferable. Specifically as a perfluoroalkyl compound, a perfluoroalkyl ether compound and a perfluoroalkyl amine compound are mentioned.

Specifically, the perfluoroalkyl ether compound may include perfluoro (2-butyl-tetrahydrofuran) (boiling point 102 ° C.), and the perfluoroalkyl amine compound may include perfluorotributyl amine (Boiling point 174 degreeC) is mentioned.

As the immersion medium, water is preferably used from the viewpoint of cost, safety, environmental problems, versatility, and the like.

As an organic solvent which the organic solvent used for image development contains, what is necessary is just what can melt | dissolve base material component (A) (base material component (A) before exposure), and it can select suitably from well-known organic solvents. Specific examples thereof include polar solvents such as ketone solvents, ester solvents, and nitrile solvents. As the ester solvent, butyl acetate is preferable. As a ketone solvent, methyl amyl ketone (2-heptanone) is preferable.

Ketone solvents are organic solvents containing C-C (= 0) -C in its structure. The ester solvent is an organic solvent containing C-C (= O) -O-C in its structure. An alcoholic solvent is an organic solvent containing an alcoholic hydroxyl group in a structure, and an "alcoholic hydroxyl group" means the hydroxyl group couple | bonded with the carbon atom of an aliphatic hydrocarbon group. Amide solvents are organic solvents containing an amide group in its structure. The ether solvent is an organic solvent containing C-O-C in its structure. Among the organic solvents, there are also organic solvents containing a plurality of functional groups that characterize the above solvents in the structure, but in this case, it is assumed that they correspond to any solvent species containing the functional groups of the organic solvents. For example, the diethylene glycol monomethyl ether shall correspond to any one of the alcohol solvent and the ether solvent in the above classification. Moreover, a hydrocarbon solvent is a hydrocarbon solvent which consists of hydrocarbon and does not have a substituent (group or atom other than a hydrogen atom and a hydrocarbon group).

As a specific example of each solvent, for example, 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 4-heptanone, 1-hexanone, 2-hexane On, diisobutyl ketone, cyclohexanone, methylcyclohexanone, phenylacetone, methyl ethyl ketone, methyl isobutyl ketone, acetyl acetone, acetonyl acetone, ionone, diacetonyl alcohol, acetyl carbinol, acetophenone, Methyl naphthyl ketone, isophorone, propylene carbonate, (gamma) -butyrolactone, methyl amyl ketone (2-heptanone), etc. are mentioned.

As an ester solvent, for example, methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, amyl acetate, isoamyl acetate, ethyl methoxy acetate, ethoxy acetate ethyl, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl Ether acetate, ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate, ethylene glycol monophenyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monopropyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene Glycol monophenyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, 2-methoxybutyl acetate, 3-methoxybutyl acetate, 4-methoxybutyl Cetate, 3-methyl-3-methoxybutyl acetate, 3-ethyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, 2-ethoxy Butyl acetate, 4-ethoxybutyl acetate, 4-propoxybutyl acetate, 2-methoxypentyl acetate, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-methyl-3-methoxypentyl acetate, 3 -Methyl-3-methoxypentyl acetate, 3-methyl-4-methoxypentyl acetate, 4-methyl-4-methoxypentyl acetate, propylene glycol diacetate, methyl formate, ethyl formate, butyl formate, propyl formate, lactic acid Ethyl, butyl lactate, propyl lactate, ethyl carbonate, propyl carbonate, butyl carbonate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, butyl pyruvate, acetoacetic acid Methyl, ethyl acetoacetic acid, methyl propionate, ethyl propionate, propyl propionate, isopropyl propionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, methyl-3-methoxypropionate, ethyl-3-methoxyprop Cypionate, ethyl-3-ethoxy propionate, propyl-3-methoxy propionate, etc. are mentioned.

Examples of the nitrile solvents include acetonitrile, propionitrile, valeronitrile and butyronitrile.

A well-known additive can be mix | blended with an organic developing solution as needed. As this additive, surfactant is mentioned, for example. The same thing as the above is mentioned as surfactant, A nonionic surfactant is preferable and A fluorine-type surfactant or silicone type surfactant is more preferable.

The developing treatment using the organic developer can be carried out by a known developing method, and for example, a method of immersing the support in the developing solution for a predetermined time (dip method), and the developer is heated on the surface of the support by surface tension for a predetermined time. Method of stopping (paddle method), spraying of developer on the surface of the support (spray method), method of deriving the developer while scanning the developer extracting nozzle at a constant speed on the support rotating at a constant speed (dynamic dosing method) Can be mentioned.

After the development treatment, the rinse treatment may be performed using a rinse liquid containing an organic solvent before drying. By rinsing, favorable pattern formation can be performed.

As an organic solvent used for a rinse liquid, what is difficult to melt | dissolve a resist pattern can be selected suitably from the organic solvent used as the organic solvent used for the said organic developer, for example. Usually, at least 1 type of solvent chosen from a hydrocarbon solvent, a ketone solvent, an ester solvent, an alcohol solvent, an amide solvent, and an ether solvent is used. Among these, at least one kind selected from a hydrocarbon solvent, a ketone solvent, an ester solvent, an alcohol solvent and an amide solvent is preferable, and at least one kind selected from an alcohol solvent and an ester solvent is more preferable. Alcoholic solvents are particularly preferred.

The alcohol solvent used for the rinse liquid is preferably a monohydric alcohol having 6 to 8 carbon atoms, and the monohydric alcohol may be linear, branched or cyclic. Specifically, 1-hexanol, 1-heptanol, 1-octanol, 2-hexanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, 4- Octanol, benzyl alcohol, etc. are mentioned. Among these, 1-hexanol, 2-heptanol, 2-hexanol is preferable, and 1-hexanol or 2-hexanol is more preferable.

Any one of these organic solvents may be used alone, or two or more thereof may be mixed and used. Moreover, you may mix and use with the organic solvent and water of that excepting the above. However, in consideration of the development characteristics, the blending amount of water in the rinse liquid is preferably 30% by mass or less, more preferably 10% by mass or less, still more preferably 5% by mass or less, and 3% by mass or less with respect to the total amount of the rinse liquid. Is particularly preferred.

A well-known additive can be mix | blended with a rinse liquid as needed. As this additive, surfactant is mentioned, for example. The same thing as the above is mentioned as surfactant, A nonionic surfactant is preferable and A fluorine-type surfactant or silicone type surfactant is more preferable.

When mix | blending surfactant, the compounding quantity is 0.001-5 mass% normally with respect to whole quantity of a rinse liquid, 0.005--2 mass% is preferable, and its 0.01-0.5 mass% is more preferable.

A rinse treatment (rinsing treatment) using a rinse liquid can be carried out by a known rinsing method, for example, a method of continuously drawing a rinse liquid on a support that is rotating at a constant speed (rotary coating method). And a method of immersing the support in the rinse liquid for a predetermined time (dip method), a method of spraying the rinse liquid on the surface of the support (spray method), and the like.

The resist composition of this invention is excellent in a sensitivity and a pattern shape by containing (D0) component. Although the reason is not clear, it is inferred that it is a structure which the alkyl group couple | bonded through the sulfur atom to the specific position of a naphthyl group.

EXAMPLE

Hereinafter, although an Example demonstrates this invention more concretely, this invention is not limited to the following Example.

[Compound of Compound (B) -1 Synthesis Example ]

The following compound (B) -1 (1- (2,7-di-n-butoxynaphthyl) di-n-butylsulfonium di (1,1,2,2,3,3,4,4,4 -Nonafluoro-n-butanesulfon) imide)) was prepared by the following method.

Operation 1

In the reaction vessel, diphosphate pentoxide (1.7 g) and methane sulfonic acid (11.5 g) were added. 2,7-di-n-butoxynaphthalene (8.2 g) and di-n-butyl sulfoxide (6.3 g) were further added, and the mixture was stirred at room temperature for 16 hours. 20% NaOH aqueous solution (30g) was dripped, maintaining the temperature in reaction container at 0-10 degreeC, dichloromethane (80g) was added, left still to separate and the aqueous layer was removed, and the organic layer was obtained. After wash | cleaning the obtained organic layer with deionized water (30g), it left still and partitioned, the aqueous layer was removed, and the reaction solution of the condensation reaction product was obtained.

Operation 2

Deionized water (30 g) and bis (nonnafluoro-n-butanesulfone) imide potassium salt (18.6 g) were added to another reaction vessel, and the whole amount of the reaction solution obtained in step 1 was further added, followed by stirring at room temperature for 20 minutes. After that, the insoluble matter was filtered out. The obtained reaction solution was left to stand and separated, and the aqueous layer was removed to obtain an organic layer.

Operation 3

Dichloromethane was distilled off from the organic layer obtained by the said organic layer 2, and methyl tert- butyl ether (hereinafter referred to as MTBE) (17 g) and hexane (34 g) were crystallized at 50 degreeC to the obtained concentrate, and compound (B) -1 18.8 g was obtained.

About the white crystal of obtained compound (B) -1, it confirmed that it was the following structure by the following analysis result using <^1> H-NMR and LC-MS.

¹ H-NMR (400 MHz, DMSO-d ₆ , internal standard tetramethylsilane): δ (ppm) 0.82 (t, J = 7.3 Hz, 6H), 0.97 (t, J = 7.3 Hz, 3H), 1.00 ( t, J = 7.3 Hz, 3H), 1.30-1.65 (m, 12H), 1.74-1.96 (m, 4H), 3.81-4.04 (m, 4H), 4.18 (t, J = 6.6 Hz, 2H), 4.44 (t, J = 6.6 Hz, 2H), 7.24 (dd, J = 2.2 and 9.0 Hz, 1H), 7.50 (d, J = 2.2 Hz, 1H), 7.57 (d, J = 9.0 Hz, 1H), 8.01 (d, J = 9.0 Hz, 1H), 8.36 (d, J = 9.0 Hz, 1H)

MS (LC / ESI (+) Spectrum): M ⁺ 417

MS (LC / ESI (-) Spectrum): M ^- 580

[Compound ( D0 ) -1 Synthesis Example ]

The following compound (D0-1) (1- (2,7-di-n-butoxynaphthyl) di-n-butylsulfonium (1S, 4R) -7,7-dimethyl-2-oxobicyclo [2.2 .1] heptan-1-yl methanesulfonate) was prepared by the following method.

Operation 1

Diphosphate pentoxide (3.41 g) and methane sulfonic acid (23.07 g) were added to the reaction vessel. 2,7-di-n-butoxynaphthalene (16.34g) and di-n-butylsulfoxide (12.66g) were further added and it stirred at room temperature for 16 hours. Deionized water (100 g) was added and 20% NaOH aqueous solution (80 g) was dripped, maintaining the temperature in the reaction container at 0-10 degreeC. After dropping, dichloromethane (80 g) was added thereto, and the mixture was left to stand, and the aqueous layer was removed. The obtained organic layer was washed with deionized water (60 g), then partitioned, the aqueous layer was removed, and a reaction solution of a condensation reaction product was obtained.

Operation 2

In another reaction vessel, deionized water (70 g), (1S, 4R) -7,7-dimethyl-2-oxobicyclo [2.2.1] heptan-1-yl methanesulfonic acid (13.94 g) and sodium hydroxide (2.4 g) ), The entire amount of the reaction solution of the condensation reaction product was added and stirred at room temperature for 20 minutes. The reaction solution was left to stand and partitioned, and the aqueous layer was removed to obtain an organic layer.

Operation 3

In another reaction vessel, deionized water (70 g), (1S, 4R) -7,7-dimethyl-2-oxobicyclo [2.2.1] heptan-1-yl methanesulfonic acid (0.70 g) and sodium hydroxide ( 0.12g) was added, and the whole amount of the organic layer obtained by the said operation 2 was added, and it stirred at room temperature for 20 minutes. The obtained solution was left to stand and partitioned, and the aqueous layer was removed to obtain an organic layer.

Operation 4

The organic layer obtained by the said operation 3 was filtered and wash | cleaned with deionized water, and the organic layer was fractionated. Dichloromethane was distilled off from this organic layer, and the obtained concentrate was crystallized by adding t-butyl methyl ether (MTBE) (156g) at 50 degreeC, and 35.05g of compounds (D0) -1 were obtained.

The white crystals obtained in the above operations 1 to 4 are R ¹ , R ² , R ³ , and R ⁴ in the general formula (1), which are n-butyl groups, and X ⁻ is (1S, 4R) -7,7- It was confirmed by the following analysis result using ¹ H-NMR and LC-MS that it was dimethyl-2- oxobicyclo [2.2.1] heptan-1-yl methanesulfonate.

¹ H-NMR (400 MHz, DMSO-d ₆ , internal standard tetramethylsilane): δ (ppm) 0.75 (s, 3H), 0.82 (t, J = 7.3 Hz, 6H), 0.97 (t, J = 7.3 Hz, 3H), 1.00 (t, J = 7.3 Hz, 3H), 1.07 (s, 3H), 1.22-1.66 (m, 14H), 1.74-1.98 (m, 7H), 2.24 (m, 1H), 2.38 (d, J = 14.6 Hz, 1H), 2.73 (m, 1H), 2.89 (d, J = 14.6 Hz, 1H), 3.84-4.04 (m, 4H), 4.18 (t, J = 6.5 Hz, 2H) , 4.45 (t, J = 6.5 Hz, 2H), 7.24 (dd, J = 2.2 and 9.0 Hz, 1H), 7.52 (d, J = 2.2 Hz, 1H), 7.59 (d, J = 9.3 Hz, 1H) , 8.02 (d, J = 9.0 Hz, 1H), 8.38 (d, J = 9.3 Hz, 1H)

MS (LC / ESI (+) Spectrum): M ⁺ 417

MS (LC / ESI (-) Spectrum) ： M ^- 231

[Preparation of Resist Composition]

The positive type resist composition (Example 1, Reference Examples 1-2) for thick films which mix | blended each component by the compounding ratio shown in Table 1 was prepared.

And these were melt | dissolved uniformly, and it filtered through the membrane filter of 1 micrometer of pore diameters, and obtained the positive resist composition for thick films of 30-60 mass% of solid content mass concentration.

In Table 1, each symbol has the following meanings respectively, and the numerical value in [] is a compounding quantity (mass part).

(A) -1; 12.5 parts by mass of the compound represented by the following Formula (1) (l / m / n / o = 45/35/10/10) (molecular weight 200,000) and the following Formula (2) (l / m 25 parts by mass of a mixed resin represented by (n / o / p = 25/20/5/10/40) (molecular weight 50,000)

(C) -1; 52.5 parts by mass of a novolak resin (2/88 novolak resin molecular weight obtained by addition condensation in the presence of m / p-cresol = 6/4 and formaldehyde and an acid catalyst), polyhydroxystyrene resin 10 parts by mass of the following formula (3) (l / m = 85/15)

(B) -1; Compound (B) -1

(4); The compound represented by following formula (4).

(D0) -1; compound (D0) -1.

(D0) -2; tri-n-pentylamine.

(E) -1; salicylic acid.

(S) -1; mixed solvent of PGMEA / 3-methoxybutyl acetate (mass ratio 40/60).

<Formation of Resist Pattern>

( EXAMPLE  1 and Reference Example  1 ~ 2)

The positive type photoresist composition for thick films of each example and each reference example obtained as described above was applied onto an 8 inch copper substrate using a spinner, and the applied photoresist composition was dried to have a film thickness of about 50 μm. A thick film photoresist layer was obtained. Next, this thick film resist layer was placed on a hot plate and prebaked at 140 ° C. for 5 minutes.

After prebaking, it exposed using exposure apparatus NSR-i14E (made by Nikon Corporation, NA: 0.54, (sigma): 0.59). Next, it mounted on the hotplate and performed post-exposure heating (PEB) for 3 minutes at 85 degreeC. Then, the 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution was dripped at the thick film photoresist layer, it was left at 23 degreeC for 60 second, and this was repeated 4 times and developed. Thereafter, flowing water was washed and nitrogen blown to obtain a thick film resist pattern having a line and space pattern of 100 µm and a large area (10000 µm ² ) pattern.

The minimum exposure amount from which the resist film of the large area pattern disappeared was measured as Eth (mJ / cm <2>). The results are shown in Table 2.

[Evaluation of Resist Pattern Shape]

The cross-sectional shape of the LS pattern formed by said <formation of a thick film resist pattern> was observed using the scanning electron microscope (brand name: SU-8000, the Hitachi High-Technologies company), and the shape was evaluated by the following evaluation criteria. . The result is shown in Table 2 as a 10 micrometer L / S shape.

◎ ： Head shape is good vertically

○: A little pattern is medium thickness, hair form is good

×: Medium thickness, hair pattern rounded

From the above results, it was confirmed that the resist composition of Example 1 had good sensitivity and a good pattern shape as compared with the resist compositions of Reference Examples 1-2.

Claims (5)

A resist composition in which an acid is generated by exposure and the solubility in a developer is changed by the action of an acid, the resin composition (A) and the photoreactive quencher (D0) in which the solubility in the developer is changed by the action of an acid. and,
The photoresist quencher (D0) contains a compound (D0-1) represented by the following general formula (d0), and the following X ⁻ is an anion represented by the following general formula (d1-2).

[In the formula, R ^1, R ² is an alkyl group having 1 to 10 carbon atoms which may have a substituent, R ^3, R ⁴ is a chain alkyl group having 2 to 10 carbon atoms which may have a substituent.]

Of the formula (d1-2), Rd ² is an alkenyl group which may have a branched alkyl group, or a substituent in the chain which may have a ring group, substituents may have a substituent. However, it is assumed that a fluorine atom is not bonded to a carbon atom adjacent to the S atom in Rd ² in the formula (d1-2).] The method according to claim 1,
The resist composition which further contains the acid generator component (B) which generate | occur | produces an acid by exposure. The method according to claim 1,
The said resin component (A) is a resist composition containing at least 1 sort (s) of resin chosen from the group which consists of novolak resin, a polyhydroxy styrene resin, and an acrylic resin. A resist pattern forming method comprising the step of forming a resist film using the resist composition according to any one of claims 1 to 3 on the support, the step of exposing the resist film, and the step of developing the resist film to form a resist pattern. delete