KR102029928B1 - Fabrication method of polymer film-based micro mirror array using organic patterning - Google Patents

Abstract

The present invention relates to a method for fabricating a polymer film-based micromirror array using organic patterning, and more particularly, to a method for fabricating a micromirror array used for a floating display. The present invention discloses a method for fabricating a micro mirror array in which a rectangular concave well structure pattern is formed on a polymer film layer using a PDMS stamp, and a metal thin film is deposited on the side surface of the well structure. Moreover, in this invention, a micromirror array can be manufactured easily using the method of sticking ultraviolet peeling resin using the same PDMS stamp. According to the present invention, a floating display with high precision can be manufactured at low cost.

Description

Polymer film-based micro mirror array manufacturing method using organic patterning {FABRICATION METHOD OF POLYMER FILM-BASED MICRO MIRROR ARRAY USING ORGANIC PATTERNING}

The present invention relates to a method for fabricating a polymer film-based micromirror array using organic patterning, and more particularly, to a method for fabricating a micromirror array used for a floating display. The present invention discloses a method for fabricating a micro mirror array in which a rectangular concave well structure pattern is formed on a polymer film layer using a PDMS stamp, and a metal thin film is deposited on the side surface of the well structure. Moreover, in this invention, a micromirror array can be manufactured easily using the method of sticking ultraviolet peeling resin using the same PDMS stamp. According to the present invention, a floating display with high precision can be manufactured at low cost.

Recently, the demand for three-dimensional display is increasing due to the increase in the size of the display and the increase in the amount of information due to the development of the Internet, the increase in the amount of information due to the development of the Internet, the spread of virtual reality devices, and the increase in the spread of 3D printers.

Since there are still many technical obstacles to implementing hologram technology, three-dimensional spatial projection technology has been developed before entering hologram technology, and it is widely used in various industries such as automobile, outdoor broadcasting, digital signage, exhibition, and performance. have.

However, the conventional floating display system has a problem in that the resolution of the output image is reduced due to the optical loss, such as the system is complicated by the optical lens, the image is distorted and chromatic aberration occurs due to the characteristics of the lens. In addition, due to the complicated optical structure, the volume is spread and there are many limitations in the installation conditions are not yet widely used.

In particular, in order to develop a 3D image display device for a small vehicle, it is necessary to improve the manufacturing process of the micro mirror array, which is a key component of the floating display system, with a precise and simple process.

Korean Patent Publication No. 10-1721460 discloses an optical imaging apparatus for forming a three-dimensional image by arranging a band-shaped planar light reflector at a constant pitch. The exposure process used for a semiconductor process and a metal vapor deposition process can be used, and the groove | channel with a higher precision can be formed simply than a conventional process. On the other hand, it is a complicated process using a semiconductor process, there is a problem that the amount of light that can be used by using two plate materials is reduced.

Korean Patent Publication No. 10-1698779 “Micromirror Array and Manufacturing Method Thereof and Floating Display Comprising Such Micromirror Array” is a method of manufacturing a micromirror array for a floating display that can be manufactured at low cost and has a low amount of light. This is disclosed. Disclosed is a structure and method in which a mirror surface is formed on a polymer film, and then bonded and cut to fabricate a primary micromirror array, and then a mirror surface is formed on the side surfaces of the quadrangle by further forming, bonding and cutting the mirror surface. . However, there is a problem that it is difficult to obtain a uniform quality during the bonding and cutting of the polymer.

Meanwhile, the method of forming a micropattern on a polymer thin film using a soft PDMS and a rigid PDMS composite mold is disclosed in Korean Patent Publication No. 10-0879790 “Method for Forming Various Fine Patterns Using Polymer Mold”. Patterning technology is being actively researched.

Korean Patent Publication No. 10-1721460 "Method of manufacturing light control panel having parallel reflection light reflecting portion" Korean Patent Publication No. 10-1698779 “Micromirror Array and Manufacturing Method Thereof and Floating Display Including Such Micromirror Array” Korean Patent Publication No. 10-0879790 “Method for Forming Various Fine Patterns Using Polymer Mold”

SUMMARY OF THE INVENTION An object of the present invention is to provide a method capable of accurately and inexpensively producing a micro mirror ray pattern used in a floating display.

Another object of the present invention is to provide a method for attaching an ultraviolet peeling resin to reduce the amount of light in a micro mirror array manufacturing process using a PDMS stamp.

The object of the present invention is not limited to the above-mentioned object, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

According to one aspect for achieving the above object, the present invention provides a method for manufacturing a polymer film-based micromirror array using organic patterning, comprising: (a) forming a mold mold having a plurality of rectangular concave well structures; (b) pouring PDMS, which is a stamp material, into the mold mold to remove bubbles and harden them to form a first stamp and a second stamp having a plurality of rectangular convex protrusion structures; (c) spincoating and curing the developer material over the first stamp to attach the developer onto the rectangular convex protrusion structure of the first stamp; (d) spin coating and curing the polymer coating solution on a transparent substrate to form a polymer film layer; (e) stamping the polymer film layer using the first stamp to which the developer is attached, to form a polymer film layer having a rectangular concave well structure; (f) contacting the second stamp with a flat panel UV peeling resin to attach the UV peeling resin on the rectangular convex protrusion structure of the second stamp; (g) stamping such that the convex protrusion structure of the second stamp with the ultraviolet peeling resin is bonded to the concave well structure of the polymer film layer having the rectangular concave well structure, thereby forming ultraviolet light on the underside of the rectangular concave well structure of the polymer film layer. Attaching a release resin; (h) vacuum depositing a metal thin film on the polymer film layer to which the ultraviolet peeling resin is attached; and (i) irradiating ultraviolet rays to the ultraviolet release resin on the transparent substrate side of the polymer film layer on which the metal thin film is deposited to remove the metal thin film deposited on the ultraviolet release resin of the polymer film layer.

As the polymer film layer, any one or more materials of polymethyl methacrylate, polystyrene, polycarbonate, polypropylene, polyethylene, polyethylene terephthalate, and polyvinyl chloride resin may be used.

As the metal thin film, any one or more materials of gold, silver, aluminum, and copper can be used.

The method of manufacturing a polymer film-based micromirror array using the organic patterning may further include, after the step (d), further spin coating and curing the polymer coating solution on the polymer film layer (d-1) to form a polymer film layer. It may further include.

The plurality of rectangular concave well structures and the plurality of rectangular convex protrusion structures may be formed with an array of chessboard shapes.

In the method of manufacturing a polymer film-based micromirror array using the organic patterning, before the step (h), (f-1) a flat UV peeling of a third stamp made of a flat PDMS block having the same size as the second stamp. Contacting the resin to attach the ultraviolet release resin to the third stamp; (g-1) stamping a third stamp having the UV release resin attached to the polymer film layer having the rectangular concave well structure, and attaching the UV release resin to the top surface of the rectangular concave well structure of the polymer film layer; It may further include.

The micromirror array according to the present invention can be repeatedly produced precisely and inexpensively by using a PDMS stamp.

The micromirror array according to the present invention can simplify the attachment of the ultraviolet ray peeling resin by the PDMS stamp, thereby reducing the loss of light amount.

According to the present invention, a floating display with high precision can be manufactured at low cost.

1 is a perspective view illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to an embodiment of the present invention.
2 is a perspective view showing a method of manufacturing a polymer film-based micromirror array using organic patterning according to another embodiment of the present invention.
3 is a flowchart illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to an embodiment of the present invention.
4 is a flowchart illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to another embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings and the contents described below. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed subject matter is thorough and complete, and that the scope of the invention to those skilled in the art will fully convey. Like numbers refer to like elements throughout. Meanwhile, the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular forms also include the plural unless specifically stated otherwise in the text. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements in which the mentioned components, steps, operations and / or elements are known. Or does not exclude additions.

Hereinafter, a method of manufacturing a polymer film-based micromirror array using organic patterning according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4.

1 is a perspective view illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to an embodiment of the present invention.

FIG. 1A (a) is a perspective view showing the mold mold 900. FIG. The mold mold has a plurality of rectangular concave well structures 910. A PDMS stamp can be obtained by inserting polydimethylsiloxane (PDMS), which is a stamping material, into the mold mold and removing the bubbles to harden them. Multiple identical PDMS stamps can be obtained with the same template in the same way.

Figure 1a (b) is a perspective view of the first stamp 100, which is one of the PDMS stamps thus obtained. The first stamp 100 has a plurality of rectangular convex protrusion structures 110.

FIG. 1A (c) is a perspective view illustrating a form in which a developer 150 is attached on the first stamp 100. When the developer liquid is buried on the first stamp and spin-coated, the developer liquid is cured. The developer 150 is attached onto the rectangular convex protrusion structure of the first stamp 100.

On the other hand, as shown in (d) of Figure 1, by coating a polymer coating liquid on the transparent substrate 500 and cured to form a polymer film layer 600.

In order to increase the thickness of the polymer film layer, the polymer coating solution may be spin-coated and cured on the cured polymer film layer 600 to further generate a polymer film layer.

The transparent substrate 500 includes polymethyl methacrylate (PMMA), polystyrene (PS), polycarbonate (PC), polypropylene (PP), polyethylene (PE), polyethylene terephthalate (PET), polyvinyl chloride resin ( PVC) any one or more materials can be used.

The polymer film layer 600 is polymethyl methacrylate (PMMA), polystyrene (PS), polycarbonate (PC), polypropylene (PP), polyethylene (PE), polyethylene terephthalate (PET), polyvinyl chloride resin Any one or more materials of (PVC) can be used.

FIG. 1A (e) is a perspective view illustrating a form in which a rectangular concave well structure is formed in the polymer film layer 600 by a first stamp. The first stamp 100 with the developer attached to the polymer film layer 600 is placed and stamping is performed to perform a physical and chemical reaction under a predetermined temperature and pressure. The developer 150 may react with the polymer film layer 600 to form a pattern in the polymer film layer 600. As a result, a rectangular concave well structure 650 is formed in the polymer film layer 600.

1B (f) is a perspective view showing a state in which the ultraviolet release resin 250 is attached to the rectangular convex protrusion structure of the second stamp 200. The second stamp 200 is made of the same material PDMS under the same conditions using the same mold mold 900 as the first stamp 100. When the second stamp 200 is contacted with the UV peeling resin coated on the flat plate and then peeled off, the UV peeling resin 250 may be attached onto the rectangular convex protrusion structure of the second stamp.

FIG. 1B (g) is a perspective view illustrating a state in which the ultraviolet release resin 250 is attached to the bottom surface of the rectangular concave well structure of the polymer film layer 600. Since the second stamp is manufactured in the same mold as the first stamp and has the same size, the rectangular convex protrusion structure of the second stamp may be coupled to the rectangular concave well structure 650 of the polymer film layer. As a result, the UV peeling resin 250 attached to the rectangular convex protrusion structure of the second stamp may be attached to the bottom surface of the rectangular concave well structure of the polymer film layer.

In order to transfer and attach the UV peeling resin by stamping, the UV peeling resin 250 should have better adhesion with PDMS than the flat plate, and has better adhesion with the transparent substrate, which is the bottom surface of the rectangular concave well structure of the polymer film layer, than PDMS. Should be used.

FIG. 1B (h) is a perspective view illustrating a metal thin film 700 coated by vacuum deposition on the polymer film layer 600. Gold, silver, aluminum, copper, etc. can be used individually or together as a material of a metal thin film. After the vacuum deposition is completed, when the ultraviolet ray is emitted to the ultraviolet release resin from the transparent substrate side, the ultraviolet release resin attached to the bottom surface of the rectangular concave well structure of the polymer film layer is removed together with the metal attached thereon.

Figure 1b (i) is a perspective view showing the structure of a polymer film-based micro mirror array using the organic patterning completed according to an embodiment of the present invention. At the bottom, there is a transparent substrate 500, a polymer film layer 600 thereon, and a vacuum thin metal film 700 thereon.

The bottom surface 570 of the rectangular concave well structure of the polymer film layer may remove the metal thin film to transmit light to the transparent substrate 500. The side surface 780 of the rectangular concave well structure of the polymer film layer may be coated with a metal thin film to reflect light. The top surface 790 of the rectangular concave well structure of the polymer film layer is also coated with a metal thin film like the side surface.

Among the light incident from the bottom surface or the top surface, the light incident toward the rectangular concave well of the polymer film layer may be reflected from the side surface 780 of the rectangular concave well structure of the polymer film layer to create a three-dimensional focus.

2 is a perspective view showing a method of manufacturing a polymer film-based micromirror array using organic patterning according to another embodiment of the present invention.

2A is a perspective view of a mold mold 901 in which a plurality of rectangular concave well structures have a chessboard arrangement. Like a chessboard, a well is not formed in a portion 913 adjacent to the rectangular concave well structure 911.

2B is a perspective view of a first stamp 101 in which a plurality of rectangular convex protrusion structures have a chessboard arrangement. Like a chessboard, no protrusions are formed in the place 113 adjacent to the rectangular convex protrusion structure 111.

(C) to 2b (g) of FIG. 2a may be performed in the same process except that the structure of the projection or the well of (g) of FIG. 1a (c) to 1b is a chessboard shape.

(B-1) of FIG. 2B is a perspective view which shows the ultraviolet-ray peeling resin 353 attached to the upper surface of a polymer film layer.

The third stamp (not shown) is manufactured in the form of a flat plate having the same size as that of the second stamp and having no irregularities using PDMS. When the third stamp is brought into contact with the flat panel type UV peeling resin, the UV peeling resin adheres to the entire surface of the third stamp.

When the third stamp with the UV peeling resin is attached and stamped by contacting the polymer film layer having the rectangular concave well structure, the UV peeling resin 353 of the third stamp abuts on the upper surface of the rectangular concave well structure of the polymer film layer 600. It can attach to the upper surface of the rectangular concave well structure of a polymeric film layer.

Thereafter, the metal thin film may be vacuum deposited as shown in FIG. 2B (h). When ultraviolet rays are emitted to the UV peeling resin from the transparent substrate, UV peeling resin 251 attached to the bottom surface of the rectangular concave well structure of the polymer film layer and UV peeling resin 353 attached to the upper surface of the rectangular concave well structure Can be removed. At this time, the metal deposited thereon is also removed.

2B (i) is a perspective view showing the structure of a polymer film-based micromirror array using organic patterning completed according to another embodiment of the present invention. It can be seen that not only the bottom surface 571 of the rectangular concave well structure of the polymer film layer 600 but also the metal thin film on the top surface 691 of the rectangular concave well structure is removed.

When the metal thin film on the upper surface of the rectangular concave well structure is removed, when the transparent polymer film layer is used, it is reflected through the side surface 781 of the rectangular concave well structure and then through the bottom surface 571 of the rectangular concave well structure. Not only the light incident on the transparent substrate but also the light incident on the upper surface 693 may be reflected on the side surface 783 of the adjacent rectangular concave well structure to be incident on the transparent substrate, thereby transmitting more light.

3 is a flowchart illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to an embodiment of the present invention.

Referring to FIG. 3, a process of fabricating a polymer film-based micromirror array using organic patterning is as follows.

First, a mold mold having a plurality of rectangular concave well structures is made (S100).

Using the mold mold, PDMS is used to make the first stamp S200 and the second stamp S300 having a plurality of rectangular convex protrusion structures.

Spin coating and curing the developer material on the first stamp to coat the developer on the rectangular convex protrusion structure of the first stamp (S250).

On the other hand, spin coating and curing the polymer coating solution on a transparent substrate to make a polymer film layer (S400).

The developer-coated first stamp is stamped onto the polymer film layer, thereby forming a pattern of a rectangular concave well structure in the polymer film layer (S500).

The pattern is naturally dried or hardened by heat or ultraviolet rays according to the type of polymer (S550).

The second stamp is brought into contact with the flat UV peeling resin to attach the UV peeling resin on the rectangular convex protrusion structure of the second stamp (S350).

The convex protrusion of the second stamp with the UV peeling resin is stamped on the bottom of the rectangular concave well structure of the polymer film layer (S600), and the UV peeling resin is attached to the bottom of the rectangular concave well structure of the polymer film layer.

The metal thin film is vacuum deposited on the polymer film layer having the UV peeling resin (S800).

The UV thin film is irradiated with UV light from the transparent substrate side of the polymer film layer on which the metal thin film is deposited (S900), and the metal thin film deposited on the UV light peeling resin of the polymer film layer may be removed (S950).

According to the above method, a polymer film-based micromirror array using organic patterning may be manufactured.

In order to increase the thickness of the mirror, that is, the thickness of the polymer film layer, the polymer film layer manufacturing process (S400) may be repeated.

4 is a flowchart illustrating a method of manufacturing a polymer film-based micromirror array using organic patterning according to another embodiment of the present invention.

The flowchart of FIG. 4 is a method of adding third stamp related methods to the flowchart of FIG. 3.

The third stamp may be made of a flat PDMS block having the same size as the second stamp (S700), and the third stamp may be contacted with the flat UV peeling resin to attach the UV peeling resin to the third stamp (S750). .

The third stamp with the UV peeling resin is stamped on the top surface of the rectangular concave well structure of the polymer film layer, and the UV peeling resin may be attached to the top surface of the rectangular concave well structure of the polymer film layer (S770).

In this case, when the ultraviolet thin film is irradiated with ultraviolet rays from the transparent substrate side of the polymer film layer on which the metal thin film is deposited (S900), and the metal thin film deposited on the ultraviolet peeling resin of the polymer film layer is removed (S950), the transparent polymer film layer Light incident on the upper surface of the rectangular concave well structure may also reflect light in the metal thin film layer and pass through the transparent substrate layer, thereby increasing the amount of light.

Although the present invention has been described in detail with reference to exemplary embodiments above, those skilled in the art to which the present invention pertains can make various modifications to the above-described embodiments without departing from the scope of the present invention. I will understand. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by all changes or modifications derived from the claims and the equivalent concepts as well as the following claims.

100: first stamp
200: second stamp
500: transparent substrate
600: polymer film layer
700: metal thin film
900: Mold Mold

Claims (6)

(a) making a mold mold having a plurality of rectangular concave well structures;
(b) pouring PDMS, which is a stamp material, into the mold mold to remove bubbles and harden them to form a first stamp and a second stamp having a plurality of rectangular convex protrusion structures;
(c) spincoating and curing the developer material over the first stamp to attach the developer onto the rectangular convex protrusion structure of the first stamp;
(d) spin coating and curing the polymer coating solution on a transparent substrate to form a polymer film layer;
(e) stamping the polymer film layer using the first stamp to which the developer is attached, to form a polymer film layer having a rectangular concave well structure;
(f) contacting the second stamp with a flat panel UV peeling resin to attach the UV peeling resin on the rectangular convex protrusion structure of the second stamp;
(g) stamping such that the convex protrusion structure of the second stamp with the UV peeling resin is bonded to the concave well structure of the polymer film layer having the rectangular concave well structure, thereby forming ultraviolet light on the underside of the rectangular concave well structure of the polymer film layer. Attaching a release resin;
(h) vacuum depositing a metal thin film on the polymer film layer to which the ultraviolet peeling resin is attached;
(i) irradiating ultraviolet rays to the ultraviolet release resin on the transparent substrate side of the polymer film layer on which the metal thin film is deposited, and removing the metal thin film deposited on the ultraviolet release resin of the polymer film layer; Polymer film based micro mirror array manufacturing method. The method of claim 1,
The polymer film layer is a polymer film-based micromirror using organic material patterning, characterized in that any one or more materials of polymethyl methacrylate, polystyrene, polycarbonate, polypropylene, polyethylene, polyethylene terephthalate, and polyvinyl chloride resin are used. How to make an array. The method of claim 1,
The metal thin film, a method of manufacturing a polymer film-based micro mirror array using organic patterning, characterized in that any one or more of gold, silver, aluminum, copper. The method of claim 1,
After step (d),
(D-1) further spin-coating and curing the polymer coating solution on the polymer film layer to form a polymer film layer; polymer film-based micro-mirror manufacturing method using organic patterning, characterized in that it further comprises. The method of claim 1,
The plurality of rectangular concave well structures and the plurality of rectangular convex protrusion structures include
A method of manufacturing a polymer film-based micromirror array using organic patterning, characterized in that formed with an array of chessboard shapes. The method of claim 5,
After step (g),
(g-1) attaching the UV peeling resin to the third stamp by contacting the third stamp composed of the plate type PDMS blocks having the same size as the second stamp with the plate UV peeling resin; And
(g-2) stamping a third stamp having the UV release resin attached to the polymer film layer having the rectangular concave well structure, and attaching the UV release resin to the top surface of the rectangular concave well structure of the polymer film layer; Polymer film-based micro mirror array manufacturing method using organic patterning, characterized in that it further comprises.

Images