KR102011569B1 - Device for measuring viscosity of minute volume liquids and method thereof - Google Patents

Abstract

It is an object of the present invention to provide a viscosity measuring device for microvolume liquids capable of accurately measuring the viscosity coefficient while avoiding the effect of surface tension of the liquid at the nanoliter level.
In order to achieve the above object, the present invention is a viscosity measuring device for micro-volume liquid for measuring the viscosity of the nano-liter capacity of the micro liquid, the base; A substrate unit disposed on the base and horizontally transportable; A supply unit spraying a micro liquid on an upper end of the substrate unit; An exciter disposed on the base and vertically transportable; And a processing unit having the excitation unit and calculating a viscosity of the micro liquid using the response of the excitation unit.

Description

Device for measuring viscosity and minute volume liquids and method

The present invention relates to viscous measuring devices and methods for microvolume liquids, and more particularly to viscous measuring devices and methods for microvolume liquids for measuring the viscosity of a liquid having a volume of nanoliter scale.

Viscosity corresponds to a representative physical quantity representing the physical properties of the liquid. In general, the degree of viscosity of a liquid is referred to as a viscosity coefficient, and since the flow characteristic of the liquid can be determined by the viscosity coefficient, precise measurement of the viscosity coefficient value is an indispensable requirement for determining the flow characteristic of the liquid.

It has been proposed in various ways to measure the viscosity or viscosity of a liquid by the above needs.

For example, Patent No. 1103635 is provided with a first inlet for injecting a first fluid whose viscosity is to be measured and a second inlet for injecting a second fluid whose viscosity is not mixed with the first fluid. Disclosed is a fluid viscosity measuring device including a fluid injecting part and a display channel part connected to the fluid injecting part and in which a plurality of display channels are formed to display a fluid interface due to a difference in viscosity between the first fluid and the second fluid.

In addition, Korean Patent Laid-Open No. 2014-0082124 discloses a device for measuring the damping coefficient of a viscous fluid for measuring the damping coefficient of a damper including a viscous fluid, the apparatus comprising: an exciter fixed to the ground to generate upper and lower amplitudes and frequencies of the rod; A base fixed to an end of the rod of the exciter and interlocked with the vibration characteristic of the rod; A damper having one surface fixed to a center of the upper surface of the base and including a viscous fluid in a space formed therein; A spring having one side fixed to the upper surface of the base around the damper; A vibrator fixed to the other side of the damper and the other side of the spring; A sensor mounted on the vibrator to sense vertical movement of the vibrator; And a control device for receiving a signal from the sensor and controlling the excitation device.

In addition, Japanese Patent Application Laid-Open No. 2006-0055455 discloses a liquid crystal cell having a homogeneous orientation in a method of measuring the viscosity coefficient of a liquid crystal in which the value of the viscosity coefficient is determined by fitting the Ericsson-Leslie theoretical value of the response characteristic and the measured value. As an object, first, the on-response characteristic is measured as a first step, and as a result, the value of the rotational viscosity coefficient (γ1) is determined, and then the off-response characteristic is measured as a second step, and the misfit viscosity coefficient of the microsuites from the result is A method of measuring the viscosity coefficient of a liquid crystal for determining the value of is disclosed.

On the other hand, in the case of a liquid having a small volume (for example, a volume of nanoliter level), the viscosity measurement technology of liquid is increasing in medical and life sciences. In particular, the field mainly targets liquids that can be obtained from living things, but the amount of samples that can be obtained is extremely limited.

When the viscosity of the liquid is to be measured in a liquid of a small volume, the effect of the surface tension acting on the liquid and the specimen and the amount of the liquid are limited. There is a need for a new method and method of measurement that is not affected.

The present invention has been made to overcome the disadvantages of the prior art as described above, the object of the present invention is to provide a viscosity measuring device for micro-volume liquid that can accurately measure the viscosity while avoiding the surface tension effect of the nanoliter liquid It is done.

It is another object of the present invention to provide a viscosity measuring method for microvolume liquids, which can accurately measure the viscosity while avoiding the surface tension effect of the liquid at the nanoliter level.

In order to achieve the above object, the present invention is a viscosity measuring device for micro-volume liquid for measuring the viscosity of the nano-liter capacity of the micro liquid, the base; A substrate unit disposed on the base and horizontally transportable; A supply unit spraying a micro liquid on an upper end of the substrate unit; An exciter disposed on the base and vertically transportable; And a processing unit having the excitation unit and calculating a viscosity of the micro liquid using the response of the excitation unit.

Preferably, the excitation portion comprises: an oscillator consisting of a crystal vibrating fork; One end of the body of the oscillator is attached, the vertical conveying body for vertically conveying the oscillator; Two cantilevers formed at the other end of the oscillator; An extension tip attached to one of the two cantilevers; An excitation line to which a signal having the oscillator is input; And an output line for outputting a response signal of the oscillator.

More preferably, the extension tip is a glass fiber material of a circular cross section is 0.8 to 1.2 mm in length, the diameter of the cross section is characterized in that 100 to 500㎛.

More preferably, the processing unit is characterized in that for inputting a signal with the oscillator, when the end surface of the extension tip and the sample is in the form of a bridge.

More preferably, the processing unit outputs a signal for vibrating the cantilever with the extension tip horizontally to the excitation line at regular intervals, and receives a response signal to the output line to calculate the viscosity of the fine sample. It is characterized by.

Preferably, the processing unit outputs a stop signal to the excitation line after a signal for vibrating the cantilever attached to the extension tip horizontally for a predetermined period of time at a predetermined period, and receives a response signal to the output line of the fine sample It is characterized by calculating the viscosity.

Preferably, the processing unit does not output any signal to the excitation line, and receives a thermal noise signal to the output line, characterized in that to calculate the viscosity of the fine sample.

In addition, the present invention is a viscosity measurement method for micro-volume liquid for measuring the viscosity of the nano-liter volume of the micro liquid, comprising: a sample preparation step of discharging the liquid of the small volume to the upper end of the substrate through the supply; A sample transfer step of transferring the position of the discharged sample to a lower part of the oscillator including a quartz vibrating fork; An oscillator lowering step of lowering the oscillator such that the extension tip attached to one of the two cantilevers of the crystal vibrating fork contacts the sample in the form of a bridge; An excitation and response sensing step of sensing a response between the extension tip and the sample after exciting the oscillator; And a viscosity calculation step of calculating the viscosity of the sample based on the response characteristics of the detected sample.

Preferably, the vibration of the oscillator in the excitation and response sensing step is characterized in that the oscillating cantilever horizontally attached to the extension tip, and detects a response signal thereto.

Preferably, in the excitation and response detection step, the excitation of the oscillator is characterized in that for stopping the oscillating cantilever attached to the extension tip for a predetermined time horizontally, and then detect the response signal thereto.

Preferably, the excitation of the oscillator in the excitation and response detection step is characterized in that it detects a thermal noise signal for this without vibrating the cantilever attached to the extension tip.

Viscosity measuring apparatus for microvolume liquids according to the present invention is characterized in that after measuring the optical fiber tip attached to the crystal oscillator with the liquid, the tip is mechanically disturbed and the response characteristic of the tip is sensed to measure the viscosity of the microvolume liquid. It can be mounted on an atomic force microscope (AFM) to provide an effect that can be applied to liquids on the order of nanoliters, furthermore, to fine-tune viscosity by offsetting the surface tension acting between the liquid and the substrate. There is a measurable effect.

BRIEF DESCRIPTION OF THE DRAWINGS It is a block diagram explaining the structure of the viscosity measuring apparatus for microvolume liquids which concerns on this invention,
2 is an explanatory diagram showing an operating state of the supply unit shown in FIG.
3 is an explanatory diagram for explaining the configuration of the oscillator shown in FIG.
4 is a configuration diagram of the excitation part shown in FIG.
5 is an explanatory diagram illustrating a state in which a sample is disposed between an extension tip and a substrate.
6 is a flow chart of the viscosity measurement method for microvolume liquids according to the present invention.

Hereinafter, some embodiments of the present invention will be described through exemplary drawings. In describing the reference numerals in the components of each drawing, the same components are denoted by the same reference numerals as much as possible even though they are shown in different drawings.

In addition, in describing the components of the embodiments of the present disclosure, terms such as first, second, A, B, (a), and (b) may be used. These terms are only for distinguishing the components from other components, and the nature, order or order of the components are not limited by the terms. When a component is described as being "connected", "coupled" or "connected" to another component, the component may be directly connected, coupled or connected to the other component, but the component and its other components It is to be understood that another component may be "connected", "coupled" or "connected" between the elements.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the viscosity measuring device 100 for a microvolume liquid according to the present invention includes a base 2 for supporting the entire apparatus, a supply part 10 for supplying a liquid sample 1 of a microvolume, and The substrate part 20 in which the sample 1 supplied by the supply part 10 is located, the excitation part 50 which is located at the upper end of the substrate part 20 and contacts a part of the sample, and the excitation part 50. It is configured to include a processor (90) for supplying electricity to generate a motion in the excitation section 50, and detects the movement characteristics of the excitation section (50).

First, the base 2 serves as a structure for supporting the entire apparatus, preferably made of a material having appropriate rigidity, and may be configured in various forms, and if necessary, a casing may be added.

On the other hand, since the viscosity of the liquid changes depending on the temperature, the base 2 may be configured to include a temperature control device for maintaining the temperature of the substrate portion 20 on which the sample 1 is seated, if necessary.

The supply unit 10 serves to supply the liquid sample 1 separately collected to the device, and may be implemented automatically or manually in a configuration for transporting or transporting a liquid such as a micro pipe or a syringe. When only the conveying function of the liquid is spherical, the embodiment is not limited.

The liquid sample 1 has a microvolume of about a nanoliter, but may be a liquid having a microliter volume of a low volume if necessary.

On the other hand, the substrate portion 20 is configured to include a substrate 21 and the horizontal conveying body 22 for transporting the substrate 21 horizontally.

Since the upper surface of the substrate 21 is formed in a planar shape, and the liquid sample 1 is seated on the upper surface of the substrate 21, the substrate 21 is configured as flat as possible, and the surface roughness is also maintained at a low value.

In addition, the material of the substrate 21 is preferably a hydrophilic surface material, when considering the flatness is most preferably a freshly cleaved and rinsed mica sheet.

One end of the horizontal conveying member 22 is fixed to the base 2, and the other end of the horizontal conveying member 22 is fixed to the lower end of the substrate 21 to transfer the substrate 21 to the left and right by an external power source. A separate fixing configuration for fixing the substrate 21 may be added.

The horizontal conveying body 22 may employ a conventional electric linear actuator, or a screw method, and if necessary, a manual actuator mechanism that operates manually.

As the sample 1 derived by the supply unit 10 is seated on the top of the substrate 21 at the lower end of the supply unit, as shown in FIG. 2, the horizontal carrier 22 is operated (or operated) for viscosity measurement. ) To be positioned at the bottom of the excitation section 50 to be described later.

If necessary, the horizontal carrier 22 to which the electric linear actuator is applied may be configured such that its operation is controlled by the processing unit 90.

On the other hand, the excitation portion 50 is configured to include a vertical conveying body 51, the oscillator 60 and an extension tip 65 attached to one end of the oscillator 60.

One end of the vertical carrier 51 is fixed to the base 2, and the other end thereof is fixed to one end of the oscillator 60.

Therefore, when the vertical conveying body 51 operates, the oscillator 60 conveys up and down.

The vertical conveying body 51 is also configured by applying an electric linear actuator, it is possible to apply a manually operated actuator if necessary.

At this time, if necessary, the vertical conveying body 51 to which the electric linear actuator is applied may be configured such that the operation is controlled by the processing unit 90.

The oscillator 60 is implemented with a quartz tuning fork (QTF), as shown in FIG.

The QTF has two cantilevers 62 extending from the body portion 61, an excitation line 63 for the excitation of the cantilever 62, and an output line for outputting an electrical signal generated by the vibration of the cantilever 62. 64, wherein the cantilever 62 vibrates in the horizontal direction in the state shown in FIG.

That is, when the oscillator 60 applied to the viscosity measuring device 100 for microvolume liquid according to the present invention is applied with power through the excitation line 63, the cantilever 62 vibrates in conjunction with its resonance frequency. At the same time, it is preferable to apply a QTF capable of simultaneously performing excitation and sensing in which an electrical signal corresponding to the vibration of the cantilever 62 is output through the output line 64. Since there is no need for a separate measuring device to measure, there is an advantage that the viscosity measuring device can be implemented with a relatively simple configuration.

The excitation line 61 and the output line 62 are connected to the processing unit 90, the processing unit 90 controls the vibration of the oscillator 60 by applying an alternating current to the excitation line 61, The vibration characteristic of the oscillator 60 is recognized using the signal of the output line 62.

As mentioned above, many QTFs capable of simultaneously performing excitation and measurement are available on the market. The ECS-.327-12.5-13X model of the company is mentioned. Since the quality and specifications of different manufacturers' QTFs on the market are almost standardized, the present invention is irrelevant to the use of a specific manufacturer's QTF, and the same result is obtained using any QTF.

On the other hand, the cantilever 62 of one of the oscillator 60 is attached to the extension tip 65 which is arranged in a rectangular shape of the cantilever 62. Therefore, the vibration of the oscillator 60 is transmitted to the extension tip 65, the lower end of the extension tip 65 is in contact with the sample (1).

The extension tip 65 is attached to the cantilever 62 after cutting the optical fiber, the optical fiber used is a circular cross section of 0.8 to 1.2 mm in length, the diameter of the cross section is preferably 100 to 500㎛. .

In this case, when the length of the optical fiber is less than 0.8mm, it is difficult to attach to the oscillator 60. When the length of the optical fiber exceeds 1.2mm, vibration in the longitudinal direction is inappropriate because it affects the interlocking with the actual microvolume.

In addition, the diameter of the optical fiber, as described above, has an advantage of excellent contact properties with the liquid (sample 1) of the nanoliter in the range of 100 to 500㎛.

The oscillator 60 is moved up and down by the vertical actuator 51, the extension tip 65 attached to the oscillator 60 by the processing unit 90 applies the vibration, and also the extension tip 65 Electromotive force generated by the vibration of the attached cantilever 62 is transmitted to the processing unit 90 and has a characteristic of grasping the vibration characteristic of the extension tip 65.

On the other hand, as shown in Figure 4, when the sample 1 is injected onto the substrate 21 by the supply unit 10, by driving the horizontal conveying member 22, the sample 1 is the excitation Position the bottom of the extension tip 65 of the portion 50.

Thereafter, the vertical conveying member 51 is driven so that the end of the extension tip 65 comes into contact with the sample 1.

In the above state, as illustrated in FIG. 5, the sample 1 is deformed into a bridge shape between the substrate 21 and the end of the extension tip 65.

At this time, the end surface of the extension tip 65 is configured to be in contact with the liquid sample 1, in the case of penetrating some of the sample (1) after a certain period of time after the evaporation of the sample (1), such as the bridge form The vibration of the oscillator 60 is then performed in a bridge configuration.

Viscosity measuring apparatus 100 for a microvolume liquid according to the present invention inputs a vibration signal of a specific frequency to the oscillator 60 in the above state (bridge shape), the actual extension tip 65 and the sample (1) After receiving the response signal of the oscillator 60 according to the reaction between), the viscosity of the sample 1 is measured based on the input signal and the response signal.

As described above, the vibration signal is input to the oscillator 60, and the response signal of the oscillator 60 is performed by the processor 90, and the processor 90 may be implemented by a computer, a tablelet, or a dedicated board. And of course includes a user interface.

In addition, if necessary, a camera system may be added to visually determine the vibration characteristics of the oscillator 60. In this case, the vibration characteristics of the extension tip 65 may be additionally determined in real time using the camera system.

The processor 90 receives response characteristics of the oscillator 60 based on the electromotive force output from the oscillator 60 as opposed to the vibration signal applied to the oscillator 60. One of the ways.

Method 1) A vibration force is applied to the extension tip 65 of the oscillator 60 in the horizontal direction, and the amplitude and phase variation of the vibration of the extension tip 65 are measured.

Method 2) After applying the vibration force to the extension tip 65 of the oscillator 60 in the horizontal direction, immediately change the applied force to 0, and measure the transient state of the extension tip 65 at this time.

Method 3) After the extension tip 65, the substrate 2, and the sample 1 are placed in the bridge state, the thermal noise spectrum of the extension tip 65 is measured.

The processor 90 measures the response characteristic of the selected one of the three methods and extracts the 'elastic' coefficient component of the response characteristic (generally, the response signal can be separated into elasticity and damping coefficient). Specifically, the elastic modulus component k _int for the method 1) can be obtained by the following equation, and the equation for extracting the elastic modulus component can be derived from the response signals of the methods 2) and 3) as well.

Equation 1]

Where k is the QTF's own modulus of elasticity, A ₀ is the amplitude at the resonant frequency f ₀ of the vibrator coupled with the extension tip, and f is the driving frequency. Q is also the quality factor of the vibrator with the fiber tip attached. A and θ are amplitude and phase values, respectively, when the extension tip and the liquid sample contact each other to form a bridge. Substituting the elastic modulus component k _int of the response signal obtained above into the following formula gives the viscosity η of the liquid.

Equation 2]

Where σ is the area where the tip is in contact with the liquid (usually the bottom surface area of the extension tip), and ρ is the density of the liquid.

That is, after measuring the responsiveness of the extension tip 65, and according to the extension tip 65 through the method 1, method 2 or method 3, using the measured value elasticity by using Equation 1 component to obtain the value k _int (seek _int k values using equation 1 for the method 1), using the calculated k _int value and calculates the final value of viscosity η of the liquid through the equation (2).

Next, the viscosity measuring method for the microvolume liquid according to the present invention will be described in detail with reference to the above-described viscosity measuring apparatus 100 for the microvolume liquid. However, description of some overlapping contents is omitted if necessary.

Of course, the viscosity measuring method for the microvolume liquid according to the present invention may use the above-described viscosity measuring apparatus for the microvolume liquid, but may be used as the device implemented in another embodiment form, it is not limited thereto.

Viscosity measuring method for the micro-volume liquid according to the present invention, as shown in Figure 6, the sample preparation step (S1), the sample transfer step (S2), the oscillator lowering step (S3), the excitation and response detection step (S4) and And a viscosity calculation step S5.

Hereinafter, each step will be described in detail.

Sample Preparation Step (S1)

The sample preparation step (S1) is a step of discharging the nano-liquid level liquid obtained in a specific region to the top of the substrate 21 through the supply unit 10.

In this case, as shown in FIG. 2, the sample 1 is seated on a portion of the substrate 21 positioned at the lower end of the supply unit 10.

Sample transfer step (S2)

When the sample preparation step (S1) is completed, the sample 1 is located at the bottom of the supply unit 10, as shown in Figure 2, by transporting the substrate 21 so that the sample 1 is located at the bottom of the oscillator The substrate 21 is transferred.

Oscillator descent stage (S3)

When the sample transfer step S2 is performed, the sample 1 is located at the bottom of the oscillator 60, and as shown in FIG. 4, the extension tip 65 attached to the oscillator 60. The oscillator 60 is lowered so that the bottom surface of the sample 1 contacts the sample 1.

At this time, the lower end surface of the extension tip 65 and the sample 1 and the upper surface of the substrate 21 are in the form of a bridge.

Excitation and response detection step (S4)

The excitation and response detection step (S4) is a step of outputting an excitation signal to the oscillator 60 through the processor 90 to excite the oscillator 60, thereby sensing the response of the oscillator 60.

The excitation and response measurements then select one of the three methods described above.

Viscosity Calculation Step (S5)

The viscosity calculation step S5 is a step of finally calculating the viscosity using the response value of the oscillator 60 received through the excitation and response detection step S4.

The viscosity is finally calculated using equations (1) and (2).

In the above description, all elements constituting the embodiments of the present invention are described as being combined or operating in combination, but the present invention is not necessarily limited to the embodiments. In other words, within the scope of the present invention, all of the components may be selectively operated in combination with one or more. In addition, the terms "comprise", "comprise" or "having" described above mean that the corresponding component may be inherent unless specifically stated otherwise, and thus excludes other components. It should be construed that it may further include other components instead. All terms, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. Terms used generally, such as terms defined in a dictionary, should be interpreted to coincide with the contextual meaning of the related art, and shall not be interpreted in an ideal or excessively formal sense unless explicitly defined in the present invention.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1: sample 2: base
10: supply part 20: substrate part
21: substrate 22: horizontal carrier
50: excitation section 51: vertical conveying body
60: oscillator 61: body
62: cantilever 63: excitation line
64: output line 65: extension tip
90: processing unit 100: viscosity measuring device

Claims (11)

delete delete delete A viscosity measuring device for microvolume liquids for measuring the viscosity of a nanoliter capacity microliquid,
Base;
A substrate portion disposed on the base and movable horizontally in a first direction;
A supply unit spraying a micro liquid on an upper end of the substrate unit;
A vertically transferable excitation part disposed on the base and being in a second direction perpendicular to the first direction; And
And a processing unit having the excitation unit and calculating a viscosity of the liquid sample using the response of the excitation unit,
The exciting part,
An oscillator consisting of a crystal oscillating fork;
One end of the body of the oscillator is attached, the vertical conveying body for vertically conveying the oscillator;
Two cantilevers formed at the other end of the oscillator;
An extension tip of an optical fiber material attached to one of the two cantilevers and extending downward of the cantilever;
An excitation line to which a signal having the oscillator is input; And
An output line for outputting a response signal of the oscillator;
The extension tip is a glass fiber material of a circular cross section is 0.8 to 1.2 mm in length, the diameter of the cross section is 100 to 500㎛,
The cantilever vibrates in a horizontal direction which is a direction corresponding to the first direction when contacted with the liquid sample,
The processing unit, when the end surface of the extension tip and the liquid sample is in the form of a bridge, and inputs a signal with the oscillator,
The treatment unit extracts an elastic component (k _int ) value among the response characteristics of the extension tip to exclude the surface tension between the liquid sample and the substrate, thereby calculating the viscosity of the liquid sample. Viscosity measuring device.
The method according to claim 4, wherein the processing unit outputs a signal for vibrating the cantilever attached to the extension tip horizontally at a predetermined period to the excitation line, and receives a response signal to the output line to calculate the viscosity of the liquid sample A viscosity measuring device for microvolume liquids, characterized in that.
The liquid sample of claim 4, wherein the processing unit outputs a stop signal to the excitation line after a signal for vibrating the cantilever with the extension tip horizontally for a predetermined time at a predetermined cycle, and receives a response signal to the output line. A viscosity measuring device for microvolume liquids, characterized in that the viscosity of the liquid is calculated.
The viscosity measuring device for micro-volume liquid according to claim 4, wherein the processor does not output any signal to the excitation line but receives a thermal noise signal to the output line to calculate the viscosity of the liquid sample.
In the viscosity measurement method for a microvolume liquid for measuring the viscosity of a nanoliter capacity of a microliquid,
A sample preparation step of discharging a small volume of liquid to the top of the substrate through a supply unit;
A sample transfer step of transferring the position of the discharged sample in a first direction, which is a lower end of an oscillator including a crystal vibrating fork;
An oscillator lowering step of lowering the oscillator in a second direction perpendicular to the first direction such that an extension tip attached to one of the two cantilevers of the quartz crystal fork is in contact with the sample in the form of a bridge;
An excitation and response sensing step of sensing a response between the extension tip and the sample after the processor excites the oscillator; And
A viscosity calculation step of calculating the viscosity of the sample based on the response characteristics of the detected sample,
The cantilever vibrates in a horizontal direction which is a direction corresponding to the first direction when contacted with the liquid sample,
The extension tip is a glass fiber material of a circular cross section is 0.8 to 1.2 mm in length, the diameter of the cross section is 100 to 500㎛,
The processing unit, when the end surface of the extension tip and the liquid sample is in the form of a bridge, and inputs a signal with the oscillator,
The treatment unit extracts an elastic component (k _int ) value among the response characteristics of the extension tip to exclude the surface tension between the liquid sample and the substrate, thereby calculating the viscosity of the liquid sample. How to measure viscosity.
The method of claim 8, wherein the excitation of the oscillator in the excitation and response detection step vibrating the cantilever attached to the extension horizontally, and detects a response signal thereto.
The method according to claim 8, wherein the excitation of the oscillator in the excitation and response sensing step for vibrating the cantilever attached to the extension tip for a certain time horizontally and then stop, and detects a response signal for the viscous liquid for micro-volume liquid How to measure.
10. The method of claim 8, wherein the excitation of the oscillator in the excitation and response sensing step detects a thermal noise signal thereto without vibrating the cantilever with the extension tip.

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