KR102008224B1 - Inspecting system being capable of inspecting curved surface - Google Patents

Abstract

Disclosed is an inspection system capable of inspecting a curved system. According to one embodiment of the present invention, the inspection system capable of inspecting the curved system comprises: a transfer device for supporting an object to be inspected including a curved surface part to be transferable; a curved surface inspection device provided adjacent to the transfer device to inspect the curved surface part of the object to be inspected; and a rear surface inspection device provided adjacent to the curved surface inspection device to inspect a rear surface part which is a lower side surface of the object to be inspected. Therefore, the present invention is capable of performing efficient inspection on the object to be inspected.

Description

Inspection system for curved surface inspection {INSPECTING SYSTEM BEING CAPABLE OF INSPECTING CURVED SURFACE}

The present invention relates to an inspection system capable of inspecting a curved surface, and more particularly, an inspection object including a curved portion can be efficiently inspected through a simple and compact structure, thereby improving the inspection precision of the inspection object. The present invention relates to an inspection system capable of surface inspection.

Recently, with the rapid development of the display industry, the form of the display is developing into a flexible display and a curved display that can be bent thin and easily in a flat display.

In addition, the existing electronic devices such as smart phones are based on a flat display device, and a variety of recent electronic display industries have developed rapidly, and thus the display device can be flexibly thin and easily bent in a flat display device. It is developing into a display device and a curved display device.

In addition, conventional electronic devices such as smart phones have provided a function that a user can access based on a flat display device. However, in response to the development of the display industry, a display device including a curved portion is provided and visible. Increasing the scope of use is increasing the utilization of electronic devices such as smartphones.

In other words, products manufactured in various industries including the display industry are manufactured including curved parts, and efforts are made to increase the completeness of products by precisely determining whether the products including curved parts are defective in the manufacturing process of each industry. .

In particular, the display device is a configuration that requires high precision, and when the foreign matter is attached to the display device or there is a defect on the display device, the quality of the entire electronic device is degraded due to a phenomenon such as distortion of an image implemented in the display device. There is.

Therefore, in a process of manufacturing a product including a flat portion and a curved portion, a process of inspecting and detecting foreign substances, defects, and defects on the flat portion and the curved portion is required.

However, when performing inspection to determine whether a foreign object, defect, or defect of the inspection object including the flat portion and the curved portion by one apparatus, the light reflected by the flat portion of the inspection object to increase the amount of light to inspect the flat portion of the inspection object The amount of light for reflecting the curved portion of the object to be inspected is reduced so that it is difficult to precisely inspect the curved portion of the object to be inspected.

In addition, when the camera is manually moved in accordance with a change in focus, such as a camera for photographing a planar portion of the inspection object and a camera for photographing a curved portion, the efficiency of inspection of the inspection object is increased due to an increase in setting time for inspection of the inspection object. There is a problem falling.

Republic of Korea Patent Publication No. 10-2016-0055349 (Samsung Display Co., Ltd.), 2016.05.18

Therefore, the technical problem to be achieved by the present invention, while supporting the inspection object to be transported, but can be efficiently inspected the inspection object including the curved portion through a simple yet compact structure, the back portion that is the lower side of the inspection object in a separate device The present invention provides an inspection system capable of inspecting curved surfaces that can improve the inspection precision of the inspection object by inspecting the back portion.

According to an aspect of the present invention, a transfer apparatus for transportably supporting an inspection object including a curved portion; A curved inspection device provided adjacent to the transfer device and inspecting a curved portion of the inspection object; And a back inspection apparatus provided adjacent to the curved inspection apparatus and inspecting a rear portion which is a lower side of the inspection object.

The curved surface inspection apparatus may include: a long side curved surface inspection apparatus configured to inspect a long side curved portion that is a long side side curved portion of the inspection object; And a short side curved surface inspection device provided adjacent to the long side curved surface inspection device to inspect a short side curved surface portion that is a short side surface portion of the inspection object.

A first pick and place device disposed between the transfer device and the long side curved surface inspection device to extract the inspection object from the transfer device and to mount the inspection object on the long side curved surface inspection device; And a second pick and place device provided between the transfer device and the short side curved surface inspection device to extract the test object from the transfer device and to mount the test object on the short side curved surface inspection device.

Any one of the first pick and place device and the second pick and place device may be a pick and place device for rotation that extracts and rotates a test object on the transfer device.

The apparatus may further include a review inspection apparatus provided adjacent to the rear inspection apparatus to inspect whether the inspection object is good or defective.

The object to be inspected is a long side curved surface inspection device, a short side surface inspection device, a short side surface surface inspection device, a back side surface inspection device, and a rear surface inspection device, and a review surface inspection device in order to be inspected sequentially. The device may be deployed.

The long side curved surface inspection apparatus and the short side curved surface inspection apparatus move the inspection object to an inspection object inspection position, which is an inspection position of the inspection object, based on scanning reference data which is reference data for scanning the inspection object. Inspection object moving unit; And an inspection object scanning unit configured to be spaced apart from the inspection object moving unit to scan the surface of the inspection object.

The inspection object scanning inspection unit may include an inspection object photographing module provided on an axis intersecting with a horizontal plane to scan and photograph a curved portion of the inspection object.

The inspection object scanning inspection unit may further include a light source provided adjacent to the inspection object photographing module to irradiate light toward the inspection object.

The inspection object scanning inspection unit may further include an integrated support module coupled to the inspection object photographing module and the light source to support the inspection object photographing module and the light source.

The integrated support module includes a light source support block coupled to the light source to support the light source; And a photographing module support plate coupled to the inspecting object photographing module, the photographing module supporting plate being provided to be adjustable at a predetermined angle with respect to the gravity direction.

The inspection object scanning inspection unit may further include a focus movement module connected to the integral support module to move the integral support module such that the inspection object photographing module is positioned on a predetermined focus on the inspection object.

The focus shift module may include a vertical frame that stands upright; An L block coupled to the rail formed along the vertical direction of the vertical frame to be slidably movable; A support plate coupled to the M block and the integrated support module to support the integrated support module; And it may include a vertical drive unit for driving the L block in the vertical direction.

Moving the inspected object includes rotating the inspected object, wherein the inspected object moving unit rotates the inspected object about a rotation axis that is an axis parallel to the curvature central axis of the curved portion based on the scanning reference data. It may include a test object rotation module.

The inspection object moving unit may further include an adsorption method inspection object support module coupled to the inspection object rotating module to support the inspection object by an adsorption method.

The adsorption method inspection object support module, the inspection object support block for adsorbing and supporting the inspection object; A support block guide rail configured to guide the inspection object support block in a forward and backward direction; And a support block rotating shaft unit configured to penetrate the inspection object support block and the support block guide rail, and the inspection object support block is rotatably coupled thereto.

The test object moving unit may further include a front and rear moving stage connected to the test object rotating module to support the test object rotating module and move the position of the test object in the front and rear directions.

According to the present invention, it is possible to efficiently inspect the inspection object including the curved portion through a simple yet compact structure while supporting the inspection object to be transportable, and by inspecting the rear surface that is the lower side of the inspection object in a separate device It is possible to improve the inspection precision of the inspection and to effectively reduce the inspection time of the inspection object.

1 is a schematic plan view of an inspection system capable of inspecting curved surfaces according to an exemplary embodiment of the present invention.
FIG. 2 is a perspective view of a long side and a short side curved surface inspection apparatus of FIG. 1. FIG.
3 is a front view of a long side and a short side curved surface inspection apparatus of FIG.
Figure 4 is a side view of the long side and short side curved surface inspection apparatus of FIG.
5 is a plan view of the long side and short side curved surface inspection apparatus of FIG.
6 is a perspective view of the inspection object moving unit of the long side and short side curved surface inspection apparatus of FIG.
FIG. 7 is an enlarged perspective view illustrating an adsorption method inspection object supporting module of the long side curved surface inspection apparatus of FIG. 1.
8 is an enlarged perspective view of an adsorption method inspection object support module of the short side curved surface inspection apparatus of FIG. 1.
FIG. 9 is a schematic diagram of a state in which the long side and short side inspection object scanning units of FIG. 1 scan an inspection object.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

In general, the inspection object including the curved portion may be a product manufactured in various industries, but for the convenience of description, the following description will be limited to the display device including the curved portion.

1 is a schematic plan view of an inspection system capable of inspecting a curved surface according to an embodiment of the present invention, FIG. 2 is a perspective view of a long side and a short side curved surface inspection apparatus of FIG. 1, and FIG. 3 is a long side and short side curved surface inspection apparatus of FIG. 1. 4 is a side view of the long side and short side curved surface inspection apparatus of FIG. 1, FIG. 5 is a plan view of the long side and short side curved surface inspection apparatus of FIG. 1, and FIG. 6 is a test table of the long side and short side curved surface inspection apparatus of FIG. 2. 7 is an enlarged perspective view of an adsorption method inspection object support module of the long side curved surface inspection apparatus of FIG. 1, and FIG. 8 is an enlarged view of an adsorption method inspection object support module of the short side curved surface inspection apparatus of FIG. 1. 9 is a schematic view of a state in which the long side and short side scanning object scanning units of FIG. 1 scan the inspection object.

As shown in these figures, the inspection system 1 capable of inspecting the curved surface of the present embodiment includes a curved surface inspection apparatus 100, a transfer apparatus 200, a backside inspection apparatus 300, and a first inspection apparatus. Pick and place (Pick and Place) device 400, the second pick and place (Pick and Place) device 500, and review (review) inspection device 600 is included.

In the inspection system 1 capable of inspecting the curved surface according to the present embodiment, the inspection object s includes a long side curved surface inspection device 100a, a short side curved surface inspection device 100b, a rear surface inspection device 300, and a review inspection device. The long side curved surface inspection apparatus 100a, the short side curved surface inspection apparatus 100b, the back side inspection apparatus 300, and the review inspection apparatus 600 are disposed to sequentially inspect the 600 while moving.

That is, in the inspection system (1) capable of curved inspection, the inspection object (s) includes a long side curved surface inspection device (100a), a short side curved surface inspection device (100b), a rear surface inspection device (300) and a review inspection device (600). Since the inspection is carried out in sequence, it is possible to inspect a plurality of inspection objects (s) at the same time, it is possible to shorten the time of the inspection process of the inspection object (s) has the effect of increasing the efficiency of the inspection process.

The curved surface inspection apparatus 100 according to the present exemplary embodiment is provided adjacent to the transfer apparatus 200 to inspect the curved portion of the inspection object, and includes a long side curved surface inspection apparatus 100a and a short side curved surface inspection apparatus 100b.

The long side curved surface inspection apparatus 100a inspects a long side curved portion, which is a long side side curved portion of the inspection object s, and the short side curved surface inspection apparatus 100b is provided adjacent to the long side curved surface inspection apparatus 100a and has a short side of the inspection object s. Inspect the short side curved side, which is the side curved portion.

On the other hand, the long side curved surface inspection apparatus 100a and the short side curved surface inspection apparatus 100b are different from inspecting the long side side curved portion of the inspection object s and the short side side curved surface portion of the inspection object s. In the following description, the contents common to the long side curved surface inspection apparatus 100a and the short side curved surface inspection apparatus 100b will be described as the curved surface inspection apparatus 100.

The curved surface inspection apparatus 100 of the present embodiment includes an inspection object moving unit 110 and an inspection object scanning inspection unit 120.

The inspection object moving unit 110 according to the present embodiment is an inspection position of the inspection object s based on scanning reference data which is reference data for scanning the inspection object s including the curved portion cp. Move the target object to the test position.

On the other hand, the scanning reference data according to the present embodiment is provided based on the design original data of the inspection object (s). And the design original data according to the present embodiment is prepared in a computer aided design (CAD). That is, the scanning data according to the present embodiment is profile data of the inspection object s prepared based on computer aided design (CAD) design original data. However, the scope of the present invention is not limited thereto, and the scanning reference data may be provided in various ways as necessary.

In addition, the inspection object moving unit 110 according to the present embodiment includes an inspection object rotating module 111, an adsorption method inspection object support module 112, a left and right moving stage 113, and a forward and backward moving stage 114. ).

The inspection object rotating module 111 rotates the inspection object s about the rotation axis 111a which is an axis parallel to the central axis of curvature of the curved portion cp based on the scanning reference data. As such, the inspection object rotating module 111 may rotate the inspection object s to position the curved portion cp of the inspection object s at the correct inspection position. Therefore, the curved portion of the inspection object can be inspected efficiently by preventing the reduction of the amount of light reflected by the curved portion cp of the inspection object s. As a result, the accuracy of the scanning inspection for scanning the surface of the inspection object can be improved. There is an advantage to improve.

That is, as shown in detail in FIG. 9, the inspection object rotating step S110 according to the present embodiment rotates the inspection object s about the rotation axis 110a based on the scanning reference data, thereby photographing the inspection object. The photographing angle of the inspection object s of the module 121 is at the tangent of the curved portion cp of the inspection object s while preventing a decrease in the amount of light reflected by the curved portion cp of the inspection object s. Can be arranged to cross.

Adsorption method The inspection object support module 112 is coupled to the inspection object rotation module 111 to support the inspection object s by the adsorption method so that the inspection object s stably without shaking when the inspection object s rotates. It includes a test object support block 112a, a support block guide rail 112b, and a support block rotation shaft portion 112c, which can be supported and which attract and support the test object s.

The support block guide rail 112b guides the inspection object support block 112a in a forward and backward direction so that fine adjustment of the front and rear positions of the inspection object support block 112a is possible, thereby enabling inspection objects of various sizes (s). The inspection object support block 112a may be positioned corresponding to In addition, the support block guide rail 112b according to the present embodiment is provided to be movable in the left and right directions corresponding to the size of the inspection object s. Therefore, the support block guide rail 112b according to the present embodiment has an advantage in that the inspection object s of various sizes can be applied.

The support block rotating shaft portion 112c passes through the inspection object support block 112a and the support block guide rail 112b, but the inspection object support block 112a is rotatably coupled to correspond to the inspection object s of various sizes. The inspection object support block 112a may be positioned.

The front and rear movement stage 114 according to the present embodiment is connected to a lower portion of the front and rear movement upper plate 114a and the front and rear movement upper plate 114a to support the front and rear movement upper plate 114a. The forward and backward directions of the forward and backward movement lower plate 114c and the forward and backward movement lower plate 114c provided on the opposite side of the forward and backward movement upper plate with the support block 114b and the upper plate support block 114b interposed therebetween. A lower plate LM Block (LM Block, 114d) coupled to the rail 114e formed along the slide movement is included.

The front and rear movement stage 114 is connected to the inspection object rotation module 111 to support the inspection object rotation module 111, but can move the position of the inspection object s in the front and rear directions, thereby inspecting the inspection object s. It can be precisely positioned at the inspection position, there is an advantage that facilitates the forward and backward scanning (Scanning) inspection of the surface of the inspection object (s).

On the other hand, the inspection object scanning (Scanning) inspection unit is provided to be spaced apart from the inspection object moving unit 210 to scan the entire surface of the inspection object (s) by scanning (Scanning) inspection so that the inspection object (s) There is an effect of improving inspection accuracy, and includes an inspection object photographing module 121, a light source 122, an integral support module 123, and a focus shift module 124.

The inspection object photographing module 121 is provided on an axis that intersects a horizontal plane to photograph by scanning a curved portion of the inspection object s. The axis intersecting with the horizontal plane on which the inspection object photographing module 121 is provided is provided at an angle determined based on the amount of light reflected on the inspection object s to improve photographing accuracy of the inspection object of the inspection object s and at the same time. (s) Shorten the shooting time on the inspection surface has the effect of increasing the efficiency of the inspection process.

The light source 122 is provided adjacent to the inspection object photographing module to irradiate light toward the inspection object s, and may be provided as a white light LED (light emitting diode) lamp, a three wavelength lamp, and a seven wavelength lamp. On the other hand, the light source 122 according to the present embodiment may include a band pass filter to pass only the wavelength of the predetermined specific region of the light irradiated toward the inspection object (s). Therefore, it may be provided to inspect the defect of the inspection object (s) detected at the wavelength of the specific region of the light irradiated from the light source 122 according to the present embodiment. That is, if necessary, a band pass filter for transmitting only a wavelength of a specific region to another light source 122 is provided in this embodiment to classify the light irradiated toward the inspection object s by wavelength, and the inspection object ( The inspection precision of s) can be improved.

The integrated support module 123 is coupled to the inspection object photographing module 121 and the light source 122 to support the inspection object photographing module 121 and the light source 122, and supports the light source support block 123a and the photographing module. Frame 123b.

As such, the inspection object photographing module 121 and the light source 122 according to the present exemplary embodiment are coupled to the integrated support module 123 to adjust the focus on the inspection surface of the inspection object s because the vertical direction can be adjusted integrally. It can shorten the time and increase the inspection efficiency.

On the other hand, the light source support block 123a is coupled to the light source 122 to support the light source 122, and the photographing module support frame 123b is coupled to the inspection object photographing module 121 to inspect the inspection object photographing module 121. It is provided to be adjustable at a predetermined angle with respect to the gravity direction.

The focus shift module 124 is connected to the unitary support module 123 to move the unitary support module 13 so that the test object photographing module 121 is positioned on a predetermined focus on the test object s, and is placed upright. The vertical frame 124a, the LM block 124b slidably coupled to the rail 124e formed along the vertical direction of the vertical frame 124a, the LM block 124b and the integral support module ( And a support plate 124c coupled to 123 to support the integral support module 123, and a vertical drive unit 124d for driving the L block 124b in the vertical direction.

Inspection object photographing module 121 and the light source 122 according to the present embodiment is coupled to the integral support module 123 can be vertically adjusted up and down to shorten the focusing time for the inspection surface of the inspection object (s) As described above, the focus shift module 124 according to the present embodiment is connected to the integrated support module 123 and is provided on a predetermined focus on the inspection object s. The integrated support module 13 can be moved to have this effect.

Meanwhile, the transfer device 200 supports the inspection object s so as to be transportable, and supports the inspection object s by the curved surface inspection device 100, the back inspection device 300, and a review. In and out of the inspection apparatus 600 is arranged.

The rear inspection apparatus 300 inspects a rear portion which is a lower side of the inspection object. As such, the rear inspection apparatus 300 is provided adjacent to the curved inspection apparatus 100 to shorten the inspection time of the inspection object s and increase the inspection efficiency.

The first pick and place device 400 is provided between the transfer device 200 and the long side curved surface inspection device 110a to take out the inspection object s on the transfer device 200, and then the long side curved surface inspection device 100a. ) On the

The first pick and place device according to the present embodiment is a pick and place device for rotation that picks out and rotates the inspection object s on the transfer device 200. Therefore, the inspection object s can be taken out from the transfer apparatus 200 and rotated so that the long side side curved portion of the inspection object s can be mounted to be inspected. However, the scope of the present invention is not limited thereto, and a pick and place device for rotating a second pick and place device, which will be described below, in response to a receiving direction of the inspection object s as necessary. Place can be arranged as a device.

The second pick and place device 500 is provided between the transfer device 200 and the short-side curved surface inspection device 100b to take out the inspection object s on the transfer device 200, and thus the short-sided surface inspection device 100b. ) On the

The review inspection apparatus 600 is provided adjacent to the rear inspection apparatus 300 to inspect whether the inspection object s is good or bad.

Hereinafter, a method of using an inspection system capable of inspecting curved surfaces having such a configuration will be described.

As described above, in the inspection system 1 capable of inspecting curved surfaces according to the present embodiment, a plurality of inspection objects s are received through the transfer device 200. The first pick and place device 400 picks up the received inspection object s from the transfer device 200 and rotates it to be mounted on the long side curved surface inspection device 100a.

The long side curved surface inspection apparatus 100a may provide scanning data as profile data of the inspection object s based on computer aided design (CAD) design original data.

Thereafter, the inspection object s is moved to the inspection object inspection position based on the scanning reference data.

That is, the inspection object s is rotated about the rotation axis 110a based on the scanning reference data, and the position of the inspection object s is moved forward and backward.

In other words, the position of the inspection object s is moved in the front and rear direction, and the inspection object s is positioned at the correct inspection position while rotating the inspection object s. Therefore, the entire surface of the inspection object s can be efficiently scanned.

 Meanwhile, since scanning is performed while rotating the inspection object s, a reduction in the amount of light reflected by the curved portion cp of the inspection object s can be prevented and the curved portion of the inspection object can be efficiently inspected. This may improve the accuracy of the scanning inspection for scanning the surface of the inspection object.

Next, the long side curved surface inspection apparatus 100a scans the surface of the inspection object s based on the scanning reference data, and is provided on an axis that intersects with a predetermined horizontal plane to form the curved surface of the inspection object s. The inspection object photographing module 121, which scans the unit cp, photographs the image, and moves the focal point so that the inspection object photographing module 121 is positioned on a predetermined focus on the inspection object.

The focus movement of the inspection subject photographing module 121 is adjusted by moving the integral support module 123. That is, the inspection object photographing module 121 and the light source 122 according to the present embodiment are coupled to the integrated support module 123 to adjust the up-down direction integrally, thereby reducing the focusing time for the inspection surface of the inspection object s. As described above, it is possible to shorten and increase the inspection efficiency. The focus shift module 124 according to the present embodiment is connected to the integrated support module 123 to determine a predetermined focus image for the inspection object s. By moving the integral support module 123 to be located in this can have this effect.

When the long side curved surface inspection of the inspection object s is completed in the long side curved surface inspection device 100a, the first pick and place device 400 transmits the inspection object s to the transfer device 200.

The second pick and place device 500 extracts the inspection object s from the transfer device 200 and mounts the same on the short side curved surface inspection device 100b. Thereafter, the short side curved surface inspection apparatus 100b inspects the short side curved portion of the inspection object s. The short side curved surface inspection device 100b of the short side curved surface inspection device 100b is inspected, but the inspection method is the same as the long side curved surface inspection device 100a described above.

When the short side curved portion inspection of the inspection target object s is completed in the short side curved inspection device 100b, the second pick and place device 500 extracts the inspection object s and transfers it to the transfer device 200. do.

Thereafter, the transfer apparatus 200 transmits the inspection object s to the back inspection apparatus 300. The back inspection apparatus 300 inspects the presence or absence of foreign matters and defects on the planar portion of the inspection object s.

When the back surface inspection apparatus 300 completes the inspection of the plane portion of the inspection object s, the transfer device 200 transmits the inspection object s to the review inspection device 600.

A review inspection apparatus 600 performs a standard inspection such as height and width of the inspection object s and transmittance measurement to inspect whether the inspection object s is good or bad. That is, the review inspection apparatus 600 according to the present embodiment may selectively re-inspect the inspection object s by performing standard inspection and transmittance measurement such as height and width of the inspection object s.

As described above, the inspection system 1 capable of inspecting the curved surface of the present embodiment includes a plurality of inspection objects s as a long side curved surface inspection device 100a, a short side curved surface inspection device 100b, a back surface inspection device 300 and a review. (Review) Since the inspection apparatus 600 is moved in sequence and inspected at the same time, it is possible to shorten the time of the inspection process of the inspection object (s), it is effective to increase the efficiency of the inspection process.

According to the present embodiment having the structure and action as described above, the test object including the curved portion can be efficiently inspected through a simple and compact structure while supporting the test object so as to be transportable, and the test object in a separate device. The inspection of the flat portion of the inspection object can improve the inspection accuracy, and the inspection time of the inspection object can be effectively reduced.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

1: Surface inspection system 100: Surface inspection device
110: inspection object moving unit 111: inspection object rotation module
112: adsorption method inspection object support module 114: front and rear movement stage
120: scanning object scanning unit
121: inspection object photographing module 122: light source
123: integrated support module 124: focus shift module
200: transfer device 300: back inspection device
400: first pick and place (Pick and Place) device
500: second pick and place (Pick and Place) device
600: review inspection device

Claims (17)

A transfer device for supporting a test object including a curved portion to be transportable;
It is provided adjacent to the transfer device to inspect the curved portion of the inspection object, the long side curved inspection device for inspecting the long side curved portion, which is the long side side curved portion of the inspection object and provided to be adjacent to the long side curved surface inspection device short side side curved surface of the inspection object A curved surface inspection device including a short side surface inspection device for inspecting a non-uniform short side curved portion;
A rear inspection apparatus provided adjacent to the curved inspection apparatus and inspecting a rear portion which is a lower side of the inspection object;
A first pick and place device disposed between the transfer device and the long side curved surface inspection device to extract the inspection object from the transfer device and to mount the inspection object on the long side curved surface inspection device; And
A second pick and place device provided between the transfer device and the short-side curved surface inspection device to take out the inspection object from the transfer device and to mount the inspection object on the short-side curved surface inspection device;
The long side curved surface inspection device and the short side curved surface inspection device,
An inspection object moving unit which moves the inspection object to an inspection object inspection position which is an inspection position of the inspection object based on scanning reference data which is reference data for scanning the inspection object; And
An inspection object scanning unit provided to be spaced apart from the inspection object moving unit to scan the surface of the inspection object;
The inspection object scanning inspection unit,
An inspection object photographing module provided on an axis intersecting with a horizontal plane to scan and photograph a curved portion of the inspection object;
A light source provided adjacent to the inspection object photographing module and irradiating light toward the inspection object;
An integrated support module coupled to the inspection object photographing module and the light source to support the inspection object photographing module and the light source; And
A focus shift module connected to the unitary support module to move the unitary support module such that the test object photographing module is positioned on a predetermined focus on the test object;
The integrated support module,
A light source support block coupled to the light source to support the light source; And
And a photographing module support frame coupled to the inspecting object photographing module, the photographing module supporting frame being provided to adjust the inspecting object photographing module at a predetermined predetermined angle with respect to gravity direction.
Moving the inspected object includes rotating the inspected object,
The inspection object moving unit,
And an inspection object rotating module configured to rotate the inspection object about an axis of rotation that is an axis parallel to the center of curvature of the curved portion based on the scanning reference data. delete delete The method of claim 1,
Any one of the first pick and place device and the second pick and place device is a rotating pick and place device for picking and rotating a test object on the transfer device. . The method of claim 4, wherein
And a review inspection apparatus provided adjacent to the rear inspection apparatus for inspecting whether the inspection object is good or defective. The method of claim 5,
The object to be inspected is a long side curved surface inspection device, a short side surface inspection device, a short side surface surface inspection device, a back side surface inspection device, and a rear surface inspection device, and a review surface inspection device in order to be inspected sequentially. Surface inspection system, characterized in that the device is arranged. delete delete delete delete delete delete The method of claim 1,
The focus shift module,
A vertical frame standing up;
An L block coupled to the rail formed along the vertical direction of the vertical frame to be slidably movable;
A support plate coupled to the M block and the integrated support module to support the integrated support module; And
And a vertical inspection unit configured to drive the L block in a vertical direction. delete The method of claim 1,
The inspection object moving unit,
And an adsorption method inspection object support module coupled to the inspection object rotating module to support the inspection object by an adsorption method. The method of claim 15,
The adsorption method inspection object support module,
An inspection object support block for adsorbing and supporting the inspection object;
A support block guide rail configured to guide the inspection object support block in a forward and backward direction; And
And a support block rotating shaft portion configured to penetrate the inspection object support block and the support block guide rail, and the inspection object support block is rotatably coupled to the inspection object support block and the support block guide rail. The method of claim 16,
The inspection object moving unit,
And a front and rear movement stage connected to the inspection object rotating module to support the inspection object rotating module and to move the position of the inspection object in the front and rear directions.

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