KR101994887B1 - Discharge lamp, cable for connection, light source device, and exposure device - Google Patents

Abstract

This is a light source device having a large cooling effect on the ferrule member of the discharge lamp. A discharge lamp having a glass tube 25 containing a discharging electrode and a ferrule 28 connected to a glass tube 25 and a connecting cable 72 so that the ring shaped member 74A of the connecting cable 72 The cold air blowing path 74Ac is formed in the ring member 74A so as to be connected to the power cable 33D and the ring shaped member 74A of the connecting cable 72 The power is supplied from the power source 32 to the ferrule unit 28 and the cooling air is blown from the blower unit 34 to the ferrule unit 28 through the blowing pipe 35D of the connecting cable 72 and the ring- .

Description

TECHNICAL FIELD [0001] The present invention relates to a discharge lamp, a connection cable, a light source device, and an exposure device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge lamp, a connection cable used when a discharge lamp is connected to a power source, a light source device having a discharge lamp, and an exposure device having the light source device.

In a lithography process for manufacturing various devices (micro devices, electronic devices, etc.), a resist is applied to a pattern formed on a reticle (or a photomask, etc.) A projection exposure apparatus and a scanning stepper of a batch exposure type (stationary exposure type) such as a stepper for transferring an image onto a wafer (or a glass plate or the like) And a projection exposure apparatus of a scanning exposure type. In these exposure apparatuses, an exposure light source device comprising a discharge lamp such as a mercury lamp and a focusing mirror (condensing mirror) is used, and the discharge lamp is maintained through a predetermined attaching mechanism.

Among light source devices having a conventional discharge lamp, there is a type provided with a cooling mechanism for reducing the influence of heat generation. One example of the conventional cooling mechanism is a mechanism for supplying air cooled from the outer surface of one ferrule of the discharge lamp to the outer surface of the other ferrule through the outer surface of the bulb portion (see, for example, 1). As another example of a conventional cooling mechanism, there is known a mechanism for forming a ring-shaped groove portion in a ferrule of a discharge lamp and supplying cooled air to the bulb portion through the groove portion and a predetermined blowing tube (see, for example, Patent Document 2 Reference).

Patent Document 1: Japanese Patent Application Laid-Open No. 9-213129 Patent Document 2: Japanese Patent Application Laid-Open No. 11-283898

The cooling mechanism of the discharge lamp in the conventional light source apparatus has a problem that the cooling action against the ferrule is small since the cooling mechanism of the discharge lamp has mainly blown cool air to the bulb portion of the discharge lamp.

The discharge lamp has a fixed side ferrule and a free end side ferrule. When cooling a ferrule on the free end side by using a conventional cooling mechanism, it is necessary to install a ventilation pipe around the ferrule, There has been a problem in that much light from the lamp is blocked.

SUMMARY OF THE INVENTION In view of the above circumstances, the present invention provides a light source device having a large cooling effect on a ferrule of a discharge lamp and a small amount of light shielding against light generated from a discharge lamp when cooling a ferrule on the free end side .

It is also an object of the present invention to provide a discharge lamp and a connection cable applicable to such a light source device, and an exposure technique using such a light source device.

A discharge lamp according to the present invention is a discharge lamp in which a discharge electrode is housed in a glass member and includes a ferrule member connected to the glass member, a relay member attached to the ferrule member and made of a conductive material, A first cable fixed to the relay member and capable of supplying power for discharging to the ferrule member through the relay member, a flow path formed in the relay member for supplying the cooling medium to the ferrule member, And a second cable fixed to the member and capable of supplying the cooling medium to the ferrule member through the flow path.

The connecting cable according to the present invention is a cable for connecting a cooling medium and a device using electric power, a supply source of the cooling medium and a power source, and is formed of a conductive (conductive) material, A tubular member having one end fixed to the relay member and formed of a flexible material and having a flow path for the cooling medium, and a tubular member provided separately from the tubular member, And a conductive member having one end fixed to the relay member and made of a flexible material having conductivity.

A light source device according to the present invention is a light source device connected to a power source and a supply source of a cooling medium, the light source device comprising: a glass member containing a discharge electrode; a discharge lamp having a ferrule member connected to the glass member; And a relay member of the connection cable is mounted on the ferrule member of the discharge lamp and a flow path of the cooling medium is formed in the relay member so that the conductive member of the connection cable and the relay member Power is supplied to the ferrule member from the power source, and the cooling medium is supplied from the supply source to the ferrule member through the tubular member and the relay member of the connecting cable.

The exposure apparatus according to the present invention is an exposure apparatus that exposes a pattern on a photosensitive substrate by exposure light generated from the light source apparatus, and uses the light source apparatus of the present invention as the light source apparatus.

According to the discharge lamp of the present invention, the discharge power is supplied to the discharging electrode through the conductive member, the relay member and the ferrule member of the connecting member. Further, the cooling medium is supplied to the ferrule member through the passage formed in the connecting member and the relay member.

According to the connecting cable of the present invention, electric power from the power source is supplied to the apparatus side through the flexible conductive member and the relay member, and the cooling medium from the supply source is supplied to the apparatus side through the flexible tubular member and the relay member .

According to the light source device and the exposure device of the present invention, the power from the power source is supplied to the discharge electrode through the connection cable and the ferrule member. Further, the cooling medium from the supply source is supplied to the ferrule member through the tubular member of the connecting cable and the flow path in the relay member. Therefore, the cooling action against the ferrule member is large. The cooling medium passes through a passage formed in the relay member near the ferrule member. Therefore, when the ferrule member is on the free end side, the amount of light emitted from the discharge lamp by the cooling medium supply pipe or the like is reduced, and the utilization efficiency of the light is increased and the temperature rise of the light source device is reduced.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a diagram showing a schematic configuration of a projection exposure apparatus, which is an example of an embodiment;
FIG. 2A is a cross-sectional view of the discharge lamp 1 in FIG. 1, and FIG. 2B is a cross-sectional view taken along the line BB in FIG. 2A.
3 (A) is a plan view showing the flow path-bending member 71 on the side of the ferrule portion 28 in Fig. 2A. Fig. 3 (B) is a plan view showing the ferrule portion 28 in Fig. And Fig. 3C is a side view of the main part of Fig. 3B.
FIG. 4A is a partially cutaway view showing an example of the connection cable 72 of the embodiment, and FIG. 4B is a side view showing the connection mechanism 73A in FIG. 4A.
5 is a partially cutaway view showing a state in which the power source 32 and the air blowing device 34 are connected to the discharge lamp 1 of Fig. 3 (B) through the connection cable 72 of Fig.
6 is a partially cutaway view showing a configuration in the vicinity of a ferrule portion of a modification of the embodiment;

Hereinafter, an example of a preferred embodiment of the present invention will be described with reference to Figs. 1 to 5. Fig.

Fig. 1 shows a projection exposure apparatus (exposure apparatus) provided with an exposure light source 30 of this embodiment. In Fig. 1, a discharge lamp 1 comprising an arc discharge mercury lamp is connected through an attachment member 31 And is fixed to a fixing plate 29 made of an insulating material. Electric power is supplied to the electrodes on the anode side and the cathode side in the discharge lamp 1 through power cables 33D and 33B, which are flexible from the power source 32, respectively. Air (hereinafter referred to as "cold air") cooled through a dustproof filter from the air blowing device 34 is blown through the flexible pipes 35D and 35B to the two ferrules of the discharge lamp 1 . As the air blowing device 34, a mechanism for blowing outside air and dust removal and cooling may be used to supply the air (or nitrogen gas blown from a nitrogen bomb) obtained at a predetermined air flow rate. As the blower unit 34, a compressed air supply unit for supplying compressed air for an air cylinder or the like in the factory may be used. The cold air may be at room temperature or may not necessarily be cooled to room temperature or lower.

Further, the elliptical mirror 2 (condensing mirror) is fixed to a bracket (not shown) so as to surround the bulb portion of the discharge lamp 1. The light emitting portion in the bulb portion of the discharge lamp 1 is disposed in the vicinity of the first focus point P1 of the elliptic mirror 2 as an example. The light source 32 including the discharge lamp 1, the elliptic mirror 2, the attaching member 31, the electric power cables 33D and 33B, the blowing pipes 35D and 35B, (Detailed later).

The luminous flux emitted from the discharge lamp 1 is collected by the elliptic mirror 2 in the vicinity of the second focus point P2 and then passes through the vicinity of the shutter 3 in the open state to become divergent light And enters into the optical path bending mirror (4). The opening and closing of the shutter 3 is performed by the shutter driving device 3a and the shutter driving device 3a is controlled under the command of the main controller 14 for controlling the operation of the entire apparatus by the stage control system 15 .

The light flux reflected by the mirror 4 is incident on the interference filter 5 and only the exposure light IL of a predetermined bright line (for example, i line at a wavelength of 365 nm) is selected by the interference filter 5 do. In addition to the i-line, g-line, h-line, mixed light thereof, etc., or a bright line of a lamp other than a mercury lamp may be used as the exposure light IL. The selected exposure light IL is incident on a fly eye lens 6 (optical integrator), and the variable aperture stop 7 disposed on the exit surface of the fly- A plurality of secondary light sources are formed on the substrate. The exposure light IL having passed through the variable aperture stop 7 is incident on the reticle blind (variable viewing aperture) 9 via the first relay lens 8. The arrangement plane of the reticle blind 9 substantially coincides with the pattern plane of the reticle R and sets the opening shape of the reticle blind 9 through the drive unit 9a, Area is defined. The stage control system 15 is configured to be able to open and close the reticle blind 9 through the driving device 9a so that unnecessary exposure light is not irradiated onto the wafer W when the wafer W is stepped.

The exposure light IL that has passed through the reticle blind 9 passes through a second relay lens 10, a dichroic mirror 11 that reflects the exposure light IL, and a condenser lens 12, And illuminates the pattern area of the pattern surface of the projection optical system R. [ The shutter 3, the mirror 4, the interference filter 5, the fly-eye lens 6, the variable aperture stop 7, the relay lenses 8 and 10, the reticle blind 9, the dichroic mirror 11 And a condenser lens 12, as shown in Fig. The light flux from the exposure light source 30 illuminates the reticle R (mask) as exposure light IL through the illumination optical system 13 and the pattern in the pattern area of the reticle R is projected through the projection optical system PL The projection magnification? (? Is, for example, 1/4, 1/5, or the like) is exposed on one shot area of the wafer W (photosensitive substrate) coated with photoresist. Hereinafter, the Z axis is taken parallel to the optical axis AX of the projection optical system PL, and the X axis is taken parallel to the plane of Fig. 1 and the Y axis is taken perpendicular to the plane of Fig. 1 in a plane perpendicular to the Z axis.

At this time, the reticle R is held on the reticle stage RST capable of fine movement in the X-, Y-, and Z-axis rotation directions on the reticle base (not shown). The position of the reticle stage RST is measured with high precision by a laser interferometer 18R which irradiates a measuring laser beam to a moving mirror 17R fixed to the reticle stage RST and this measured value is transmitted to the stage control system 15 and the main control system 14 ). The stage control system 15 controls the position of the reticle stage RST through a driving system 19R including a linear motor or the like based on the measured value and the control information from the main control system 14. [

On the other hand, the wafer W is held on the wafer stage WST through a wafer holder (not shown), and the wafer stage WST is placed on the wafer base (not shown) so as to be movable in the X direction and the Y direction. The position of the wafer stage WST is measured with high accuracy by a laser interferometer 18W for irradiating a moving laser beam for measurement to a moving mirror 17W fixed to the stage 17. The measurement values are transmitted to the stage control system 15 and the main control system 14 ). The stage control system 15 controls the position of the wafer stage WST (wafer W) through a driving system 19W including a linear motor or the like, based on the measured values and control information from the main control system 14 .

The operation of moving each shot area of the wafer W into the exposure field of the projection optical system PL by the wafer stage WST during the exposure of the wafer W and the operation of moving the light beam from the exposure light source 30 to the illumination optical system 13 to the reticle R and exposes the pattern of the reticle R to the corresponding shot area on the wafer W through the projection optical system PL is repeated in a step-and-repeat manner. As a result, an image of the pattern of the reticle R is transferred to each shot area on the wafer W. [

A reticle alignment system 20 for detecting the position of an alignment mark formed on the reticle R is provided above the reticle R in order to perform alignment in advance in this exposure, And an alignment sensor 21 for detecting the position of the alignment mark laid on each shot area on the wafer W is provided on the side surface. In the vicinity of the wafer W on the wafer stage WST, a reference mark member 22 having a plurality of reference marks for the alignment sensor 21 and the like is formed. The detection signals of the reticle alignment system 20 and the alignment sensor 21 are supplied to the alignment signal processing system 16 and the alignment signal processing system 16 performs processing And supplies the information of the array coordinate to the main controller 14. The main control system 14 performs alignment of the reticle R and the wafer W based on the information of the array coordinates.

Next, the basic configuration of the exposure light source 30 including the discharge lamp 1 of the projection exposure apparatus of this embodiment will be described.

2 (A) is a cross-sectional view of the discharge lamp 1 and its attaching mechanism in the exposure light source 30 shown in Fig. 1. In Fig. 2 (A), the discharge lamp 1 A glass tube 25 composed of a bulb portion 25a and two substantially symmetrically shaped cylindrical bar portions 25b and 25c fixed to sandwich the bulb portion 25a therebetween and a cathode 25b connected to an end portion of one rod- And a ferrule portion 28 on the positive electrode side connected to an end portion of the rod portion 25c on the free end side where the diameter of the ferrule portion 26 is reduced stepwise toward the outside of the other side. The cathode EL1 and the cathode EL2 for forming a light emitting portion in the bulb portion 25a are opposed to each other and the cathode EL2 and the anode EL1 are connected to the ferrite portions 26 and 28, Portions 26 and 28 are made of metal having good electrical conductivity and thermal conductivity. The ferrule portion 26, the glass tube 25 and the ferrule portion 28 are arranged on one straight line passing through the center of the light emitting portion following the center axis of the rod portions 25b and 25c of the glass tube 25. And the direction parallel to the straight line connecting the center axes of the rod portions 25b and 25c is the longitudinal direction L of the discharge lamp 1. [

The ferrite portions 26 and 28 are basically used as a power supply and reception terminal for supplying power to the cathode EL2 and the anode EL1 from the power source 32 through the power cables 33B and 33D . In addition, the ferrule portion 26 is also used as a held portion for holding the glass tube 25 (discharge lamp 1), and the ferrule portions 26 and 28 are all provided with heat that is conducted from the glass tube 25 And a mechanism for flowing a gas for cooling.

That is, the ferrule portion 26 connected to the cathode EL2 is provided with a flange portion 26a, a cylindrical shaft portion 26b, a cylindrical concave portion 26f, Which is slightly larger than the shaft portion 26b and which has a surface substantially perpendicular to the longitudinal direction L at the boundary between the recess 26f and the fixing portion 26h, A surface 26g is formed.

When the discharge lamp 1 is fixed, the shaft portion 26b of the discharge lamp 1 is fitted to the opening 31b of the attachment member 31 indicated by the two-dot chain line, and the flange portion 26a is fitted to the attachment member 31 On the upper surface 31a. As shown in Fig. 2B, circular openings 27A and 27B are formed in the flange portion 26a, and these openings 27A and 27B are formed in the upper surface 31a of Fig. (Not shown) having a fixed cylindrical shape is inserted and passed to make positioning in the rotational direction of the discharge lamp 1. [

In addition, a groove portion 26d is formed on the outer surface of the shaft portion 26b in a spiral shape around an axis parallel to the longitudinal direction L. Cooling air is supplied to the groove portion 26d through the blowing pipe 35B having flexibility and the blowing passage 31c formed in the attaching member 31 from the blowing device 34. [ The terminal 38 is fixed to the metal attaching member 31 of good conductivity by the bolt 39 and the terminal 38 is connected to the power supply 32 by the power cable 33B. With this configuration, the cathode EL2 of the discharge lamp 1 is supplied from the power source 32 through the power cable 33B, the terminal 38, the attachment member 31 and the flange portion 26a of the ferrule portion 26, As shown in Fig.

The pressing members 36A, 36B and 36C are fixed so as to be rotatable at three positions below the attaching member 31 and to be pressed downward by the tension coil springs 37A, 37B and 37C. The peripheral portion 26 (and further the discharge lamp 1) is pressed against the mounting member 31 by pressing the pressed surface 26g of the ferrule portion 26 downward at the tip end portions of the pressing members 36A to 36C, . The discharge lamp 1 can be easily removed from the attaching member 31 by pulling up the pressing members 36A to 36C upward by a lever mechanism (not shown).

2 (A), the schematic structure of the ferrule portion 28 of the anode side (also in this example, the free end side) of the discharge lamp 1 has a substantially columnar shaft portion 28a And the groove portion 28b is formed in a spiral shape around the axis parallel to the longitudinal direction L. As shown in Fig. Further, a substantially cylindrical cover member 50 made of a metal (for example, copper, brass, aluminum, etc.) having good conductivity is fixed so as to cover the ferrule portion 28 from the outside. And a flow path member 71 made of a metal having good conductivity is fixed on the cover member 50. [

3 (B) is an enlarged cross-sectional view showing the configuration near the anode side ferrule portion 28 of the discharge lamp 1 of Fig. 2 (A), Fig. 3 (A) Fig. 3C is a side view of the main part of Fig. 3B. Fig. 3B, a disk-shaped mount portion 28c is formed at the upper end of the shaft portion 28a on which the groove portion 28b of the ferrule portion 28 is formed with a ring-shaped notch portion 28d interposed therebetween And a ventilation groove portion 28e is formed outward from the center portion of the mount portion 28c.

The cover member 50 has a ring-shaped flat plate portion 50a placed on the upper surface of the mount portion 28c and a cylindrical portion 50c covering the side surface of the ferrule portion 28, The distal end portion 50ca of the glass tube 50c further extends from the ferrule portion 28 toward the rod portion 25c side of the glass tube 25. [ In Fig. 3 (B), a clearance is defined between the shaft portion 28a and the cylindrical portion 50c, but the clearance may be actually made extremely small.

A cylindrical protrusion 71d is formed on the bottom surface of the flat plate portion 71a of the flow path bending member 71 fixed on the cover member 50 so as to protrude from the opening 50b at the center of the flat plate portion 50a of the cover member 50. [ And a cylindrical fitting portion 71b is formed on the upper surface of the flat plate portion 71a. Then, from the central portion of the protruding portion 71d of the flow path-bending member 71 to the position of the substantially middle height of the fitting portion 71b, the opening 71e on the side of the fitting portion 71b (See Fig. 7C), so that cool air for cooling the ferrule portion 28 is supplied from the opening 71e to the air passage 71c. A counter boring portion 71f is formed at four positions on the upper surface of the flow path bending member 71 and the bolts 53 in the counter boring portion 71f The flow path bending member 71 and the cover member 50 (formed with openings for the bolts 53) are integrally fixed to the ferrule portion 28 as shown in Fig. 3 (B) .

3B, the electric power supplied to the flow path-folding member 71 through the power cable 33D in Fig. 1 flows through the cover member 50 and the ferrule portion 28 to the anode in the glass tube 25 . The cool air supplied to the opening 71e of the flow path bending member 71 through the blowing pipe 35D shown in Fig. 1 flows through the air passage 71c, the opening 50b of the cover member 50, the groove 28e, And the notch portion 28d to the groove portion 28b of the ferrule portion 28. The air that has flowed through the groove portion 28b is supplied from between the rod top portion 25c and the tip end portion 50ca of the cover member 50 2 to the bulb portion 25a side of the glass tube 25 of (A). Thereby, the ferrule portion 28 and the glass tube 25 are efficiently cooled.

4 (A) is a partially cutaway view showing the connecting cable 72 of this example including the power cable 33D and the ventilation pipe 35D of Fig. 1, and the connecting cable 72 A first connecting mechanism 73A, a power cable 33D and a blowing pipe 35D, and a second connecting mechanism 73B. 4 (B) is a side view showing the first connection mechanism 73A in Fig. 4 (A).

4A, the first connecting mechanism 73A has a ring 73A having a through hole 74Aa to be loosely fitted to the fitting portion 71b of the flow path bending member 71 of Fig. 3B, A shape member 74A, a lever 75A formed with a threaded portion at the tip thereof, and a setscrew 79A. The ring-shaped member 74A is made of a metal having good conductivity. A slotting portion 74Ab is formed so as to traverse the through hole 74Aa along the plane including the central axis of the through hole 74Aa and the through hole and the thread portion 74Ae (See Fig. 4 (B)). The lever 75A is mounted on the ring-shaped member 74A so that the threaded portion of the tip of the lever 75A is screwed to the threaded portion 74Ae through the through hole. With this configuration, as shown in Fig. 4 (B), in the state in which the fitting portion 71b of the flow path bending member 71 is fitted to the through hole 74Aa of the ring-shaped member 74A, 75A, the ring-shaped member 74A can be quickly and easily stably fixed to the flow-path-forming member 71. [0086]

The upper surface and the lower surface of the ring-shaped member 74A (the surface placed on the flat plate portion 71a of the passage bending member 71) are processed in a plane, and in the vicinity of the slotting portion 74Ab on the upper surface thereof, B, a threaded portion 74Ag is formed. A T-shaped blowing passage 74Ac having a first open end communicating with the through hole 74Aa is formed at a substantially middle height position of the ring-shaped member 74A, and a second opening of the blowing passage 74Ac And the third open end of the air passage 74Ac is closed by a setscrew 79A. The required air passage in the ring-shaped member 74A is an air passage communicating with the inner through hole 74Aa and one side of the side surface. However, since it is difficult to process the air passage having only two open ends, After the T-shaped blowing passage 74Ac is formed, the unnecessary third open end is closed with the detent screw 79A. Thus, the connection mechanism 73A can be easily manufactured.

4B, the height of the blower passage 74Ac communicating with the through hole 74Aa of the ring-shaped member 74A from the bottom surface of the first open end is larger than the height of the air passage bent member 71 Is equal to the height from the flat plate portion 71a of the opening 71e formed in the fitting portion 71b (communicating with the air passage 71c in FIG. In this example, the first open end of the air blowing passage 74Ac is in contact with the through-hole 74Aa of the ring-shaped member 74A while the fitting portion 71b of the air- The rotation angle of the ring-shaped member 74A relative to the flow path-bending member 71 is adjusted so as to face the opening 71e of the flow path member 71. [ This allows the cool air supplied from the threaded portion 74Ad side of the air passage 74Ac of the ring member 74A to pass through the air passage 71c of the air passage bending member 71, (28).

4A, the threaded portion 74Ag formed on the upper surface 74Af of the ring-shaped member 74A and the threaded portion 74Ad communicating with the airflow path 74Ac are provided with a slot portion 74Ab As shown in Fig. With this configuration, the power cable 33D and the ventilation pipe 35D can be connected substantially parallel to the ring-shaped member 74A in the lateral direction.

The second connection mechanism 73B includes a ring-shaped member 74B made of metal having good through-hole 74Ba and having good conductivity, and a slotting portion 74Bb connected to the ring- And a detent screw 79B for closing the third open end of the T-shaped blowing passage 74Bc in the ring-shaped member 74B.

The power cable 33D of this example is a member having flexibility in which a plurality of elongated wires are woven into a mesh-like shape of a cylinder. First and second terminals 77A and 77B having a flat plate portion having openings are fixed to both ends of the power cable 33D. The blowing pipe 35D is a flexible, elongated cylindrical member made of a soft synthetic resin (e.g., soft polyvinyl chloride, low density polyethylene, etc. hereinafter) or synthetic rubber, The cold air is blown. First and second air blowing terminals 76A and 76B having a blowing passage 76Aa and the like are formed in cylindrically shaped openings at both ends of the air blowing pipe 35D in an airtight manner. A screw portion 76Ab for screwing the screw portion 74Ad of the ring shaped member 74A is formed at the tip end of the first air blowing terminal 76A and a ring shaped member 74B The threaded portion is screwed into the threaded portion of the open end of the blowing passage 74Bc of the blowing passage 74Bc.

When the flat plate portion of the first terminal 77A is placed on the upper surface 74Af of the ring-shaped member 74A of the first connection mechanism 73A, the bolt 78A is inserted into the screw portion 74Ag through the opening of the flat plate portion The first terminal 77A is fixed to the ring-shaped member 74A by screwing. Similarly, by securing the second terminal 77B to the ring-shaped member 74B by the bolt 78B, the ring-shaped member 74A of the first connection mechanism 73A and the ring-shaped member 74B of the second connection mechanism 73B The ring-shaped member 74B is connected in a state of being electrically conducted through the power cable 33D.

The screw portion 76Ab of the first air blowing terminal 76A is screwed to the screw portion 74Ad of the ring member 74A and the screw portion of the second air blowing terminal 76B is connected to the ring member 74B (Not shown). As a result, the through-hole 74Aa of the ring-shaped member 74A of the first connection mechanism 73A and the through-hole 74Ba of the ring-shaped member 74B of the second connection mechanism 73B are connected to the air- 35D.

The power supplied from the power source 32 of Fig. 1 to the ring-shaped member 74B of the second connection mechanism 73B in the connection cable 72 of Fig. 4 (A) And is supplied to the passage-bending member 71 of Fig. 3 (B) through the ring-shaped member 74A of the connecting mechanism 73A. The cool air supplied from the air blowing device 34 in Fig. 1 to the air blowing passage 74Bc in the ring-shaped member 74B of the second connection mechanism 73B in Fig. 4A is blown through the air blowing pipe 35D and Is blown into the blowing passage 71c of the passage bending member 71 of Fig. 3 (B) through the blowing passage 74Ac in the ring-shaped member 74A of the first connecting mechanism 73A.

4A, the connection mechanisms 73A and 73B are regarded as a part of the connection cable 72. However, the connection mechanism 73A is not limited to the channel bending of the discharge lamp 1 of Fig. It is also possible to regard the connection mechanism 73A as one constituent member of the discharge lamp 1 by mounting it on the member 71. [

The second connection mechanism 73B may be omitted from the connection cable 72 of Fig. 4 (A). In this case, the second terminal 77B of the power cable 33D is directly connected to the terminal of the power source 32 of Fig. 1 and the second blowing terminal 76B of the blowing pipe 35D is connected to the terminal It may be connected directly to the air supply pipe of the air blowing device 34. [

Next, Fig. 5 is a sectional view showing the flow path bending member 71 of the discharge lamp 1 shown in Fig. 3 (B), the power supply 32 and the blowing device 34 shown in Fig. 1, 5 shows a state in which the power source 32 is connected through the power cable 46 and the terminal fixed by the bolt 44 to the metal attaching member 40 of good conductivity. Respectively. The mounting member 40 is fixed to the passage member 47 by a bolt (not shown), which has the same structure as that of the passage-bending member 71 shown in Fig. 3 (B) and has good electrical conductivity.

The channel bending member 47 has a flat plate portion 47a fixed to the attachment member 40 and a cylindrical fitting portion 47b protruding outward from the flat plate portion 47a, An air blowing passage 47c is formed so as to communicate with the opening of the side surface of the fitting portion 47b after extending from the bottom surface to a middle height position of the fitting portion 47b. Cool air is supplied to the air blowing path 47c from the ventilation device 34 through the concave portion 40a of the attachment member 40 and the pipe 45 arranged in the air passage.

5, in order to connect the connecting cable 72 to the flow path-folding member 71 of the discharge lamp 1, the ring portion of the first connecting mechanism 73A is connected to the fitting portion 71b of the flow path- The first open end of the air blowing passage 74Ac of Fig. 4A and the opening 71e of the air passage bending member 71 of Fig. 3B are fitted into the through hole 74Aa of the shape member 74A, The lever 75A shown in Fig. 4A is fastened.

Similarly, in order to connect the connection cable 72 to the power supply side flow path bending member 47 of Fig. 5, the ring member 47 of the second connection mechanism 73B is connected to the fitting portion 47b of the flow path bending member 47 74B of the flow passage member 74B of the flow path member 47 shown in Fig. 5 and the first open end of the air passage 74Bc of Fig. 4A and the air passage 47c of the air passage bending member 47 of Fig. The lever 75B of FIG. 4A is fastened in the state of being opposed. By using the connecting cable 72 in this way, it is possible to connect the power source 32 and the blower unit 34 and the discharge lamp 1 very easily and quickly.

5, the electric power supplied from the power source 32 to the flow path-bending member 47 through the power cable 46 and the attachment member 40 is transmitted to the channel bending member 47 in the ring shape of the second connection mechanism 73B of the connection cable 72 The flow path forming member 74A of the discharge lamp 1 is connected to the discharge lamp 1 through the ring member 74A of the member 74B, the second terminal 77B, the electric power cable 33D, the first terminal 77A and the first connecting mechanism 73A, (71). The electric power supplied to the passage bending member 71 is supplied to the anode in the glass tube 25 through the cover member 50 and the ferrule portion 28.

On the other hand, as indicated by arrows A1, A2, A3 and A4, the cool air supplied from the air blowing device 34 of Fig. 5 to the air blowing passage 47c in the air passage bending member 47 through the pipe 45 flows through the second connection The blowing passage 74Bc, the second blowing terminal 76B, the blowing pipe 35D, the first blowing terminal 76A and the first connecting mechanism 73A in the ring-shaped member 74B of the mechanism 73B, The air is blown to the blowing passage 71c in the passage bending member 71 through the blowing passage 74Ac in the ring-shaped member 74A. The cool air supplied to the air blowing path 71c flows through the opening 50b, the groove portion 28e, the notch portion 28d and the ferrule portion 28 of the cover member 50 as indicated by arrows A5, A6, The bulb portion 25a of the glass tube 25 (see (A) of Fig. 2) passes through the space between the groove portion 28b and the rod portion 25c of the glass tube 25 and the front end portion of the cylindrical portion 50c of the cover member 50 . Thereby, the ferrule portion 28 and the glass tube 25 are efficiently cooled.

5, when the connection cable 72 is disconnected from the discharge lamp 1 in order to perform maintenance of the discharge lamp 1, for example, as shown in Fig. 4A, The ring 75A of the first connecting mechanism 73A may be loosened and the ring shaped member 74A of the first connecting mechanism 73A may be detached from the fitting portion 71b of the flow path bending member 71. [ Similarly, in order to separate the connecting cable 72 from the power source 32 and the blower unit 34 of Fig. 5, the lever 75B of Fig. 4 (A) is loosened, The ring-shaped member 74B of the second connecting mechanism 73B may be detached from the first connecting member 47b. By using the connecting cable 72 in this way, it is possible to separate the discharge lamp 1 from the power source 32 and the air blowing device 34 extremely easily and quickly.

Effects of the exposure light source 30 and the exposure apparatus of the present embodiment are as follows.

(1) The first connecting mechanism 73A (ring-shaped member 74A) of Fig. 4 (A) is connected to the flow path bending member 71 of the discharge lamp 1 of Fig. 3 (B) The lamp includes a ferrule portion 28 connected to the glass tube 25, a ring-shaped member 74A attached to the ferrule portion 28 (through the passage bending member 71) and made of a conductive material, A power cable 33D fixed to the member 74A and capable of supplying power to the ferrule portion 28 through the ring member 74A and a power cable 33D formed on the ring member 74A, And a blowing pipe 35D which is fixed to the ring-shaped member 74A and is capable of supplying cool air to the ferrule portion 28 through an air blowing passage 74Ac have.

Therefore, the discharge power is supplied to the discharging electrode through the power cable 33D, the ring-shaped member 74A and the ferrule portion 28, and the cold air flows through the air blowing pipe 35D and the air in the ring- And is supplied to the ferrule portion 28 through the passage 74Ac. Thereby, the ferrule portion 28 is efficiently cooled.

(A) of Fig. 4A is connected to the upper surface 74Af (first terminal portion) to which the electric power cable 33D is connected and the blowing pipe 35D, and at the same time, And a threaded portion 74Ad (second terminal portion) formed with an opening communicating with the second arm portion 74Ac. Therefore, the power cable 33D and the ventilation pipe 35D can be easily connected.

5, the ferrule portion 28 is connected to the longitudinal direction L side of the glass tube 25 and the threaded portion 74Ad of the ring-like member 74A ) Is attached to the ring-shaped member 74A so as to face the direction orthogonal to the longitudinal direction L (which may be an intersecting direction). 4A can be connected to the ring-shaped member 74A (first connection mechanism 73A) in a direction perpendicular to the longitudinal direction L of the ring-shaped member 74A (first connection mechanism 73A) It is possible to dispose the ventilation piping 35D away from the second focus P2 of the elliptic mirror 2 in Fig. Therefore, since the amount of light from the discharge lamp 1 can be reduced by the blowing pipe 35D (connecting cable 72), the utilization efficiency of light can be increased and the amount of heat generated by the exposure light source 30 can be reduced do.

Since the power cable 33D is connected to the ring-shaped member 74A substantially in parallel with the ventilation pipe 35D in this example, the power cable 33D is also connected to the second focus P2 of the elliptical mirror 2 As shown in Fig. Therefore, the light amount of the light from the discharge lamp 1 can be further reduced.

(4) The threaded portion 74Ad of the ring-shaped member 74A shown in FIG. 4A is engaged with the threaded portion 76Ab of the first air-blowing terminal 76A of the air-blowing pipe 35D. Therefore, the air blowing pipe 35D can be quickly and stably connected to the ring-shaped member 74A by the screwing of screws.

(5) The upper surface 74Af of the ring-shaped member 74A is a flat portion having a threaded portion 74Ag for screwing the first terminal 77A of the power cable 33D. Thus, the power cable 33D can be quickly and stably connected to the ring-shaped member 74A.

(6) In this example, a flow path bending member 71 having a fitting portion 71b is provided on the ferrule portion 28 of Fig. 3 (A) through the cover member 50, The ring-shaped member 74A of the housing A has a through hole 74Aa to be fitted to the fitting portion 71b and a slotting portion 74Ab formed to cross the through hole 74Aa, And a lever 75A for fastening the slotting portion 74Ab with the through hole 74Aa fitted in the fitting portion 71b. Therefore, only by fastening or loosening the lever 75A, the ring-shaped member 74A can be easily attached and detached to and from the passage-defining member 71 in a short time.

(7) Further, the blowing passage 74Ac of the ring-shaped member 74A communicates with the cover member 50 and the ferrule portion 28. [ Therefore, the ferrule portion 28 can be efficiently cooled.

(8) In this example, cool air is supplied to the glass tube 25 side through the space between the cover member 50 and the ferrule portion 28 in Fig. 3 (B). By supplying the air cooled in the ferrule portion 28 to the glass tube 25 side, the glass tube 25 can also be cooled. In this regard, it is possible to enhance the cooling effect on the glass tube 25 by extending the distal end portion 50ca of the cylindrical portion 50c of the cover member 50 beyond the ferrule portion 28. [ However, for example, when the blowing amount is large, it is not always necessary to extend the distal end portion 50ca beyond the ferrule portion 28. [

Instead of the cold wind (or other gas), a cooled liquid (pure water, fluorine-based inert liquid, etc.) may be used. In this case, a recovery path may be provided for recovering the liquid flowing on the surface of the ferrule portion 28, cooling it again, and supplying it to the blowing pipe 35D (in this case, the liquid supply pipe).

(9) On the surface of the shaft portion 28a of the ferrule portion 28 between the cover member 50 and the ferrule portion 28 in Fig. 3B, a groove portion 28b as an air passage is formed in a spiral shape Respectively. By blowing in a spiral shape on the surface of the ferrule portion 28, the cooling efficiency of the ferrule portion 28 can be improved.

Instead of forming the groove portion 28b on the shaft portion 28a side of the ferrule portion 28 as described above, the spiral portion 28a may be formed in the region facing the shaft portion 28a of the cylindrical portion 50c of the cover member 50 A groove portion may be formed. With this configuration, the cooling efficiency of the ferrule portion 28 can be improved.

(10) A mounting portion 28c is provided on the upper end of the ferrule portion 28 of Fig. 3B. The helical groove portion 28b is formed by a groove portion 28e formed on the side surface of the mount portion 28c, Respectively. Therefore, the cover member 50, the passage bending member 71, the ring-shaped member 74A, and the like can be provided on the mount portion 28c, and the air passage 74Ac of the ring- The cold air from the air blowing passage 71c of the bending member 71 can be guided to the groove portion 28b on the side face of the ferrule portion 28 through the opening 50b of the cover member 50 and the groove portion 28e .

4A is a connection cable for connecting the discharge lamp 1 using cold wind and electric power to the air blowing device 34 and the power source 32. The connection cable 72 is made of a conductive material Shaped member 74A having one end fixed to the ring-shaped member 74A and detachable from the discharge lamp 1 (the passage bending member 71) and formed of a flexible material, And a power cable 33D formed separately from the air blowing pipe 35D and formed of a flexible material having one end fixed to the ring shaped member 74A and having conductivity .

According to the connection cable 72, the power from the power source 32 is supplied to the discharge lamp 1 side through the power cable 33D and the ring-shaped member 74A, and the cool air from the air blowing device 34 is blown And is supplied to the discharge lamp 1 through the pipe 35D and the ring-shaped member 74A (blowing passage 74Ac). Therefore, power and cool air can be easily supplied to the discharge lamp 1 through the single ring-shaped member 74A.

(12) Further, since the power cable 33D is a member in which a plurality of wires are woven in a mesh shape, the flexibility and the conductivity can both be easily achieved.

The outside of the power cable 33D may be covered with an insulating material having flexibility. As the power cable 33D, a lead wire coated with a normal insulating material may be used.

(13) The ring-shaped member 74A is connected to the upper surface 74Af to which the electric power cable 33D is connected and the air blowing pipe 35D, and also has a threaded portion 74Ad). Therefore, the power cable 33D and the blowing pipe 35D can be easily connected to the ring-shaped member 74A.

(14) The ring-shaped member 74A is a disc-shaped member having a through hole 74Aa formed at the center thereof, and a screw portion 74Ad to which a blowing pipe 35D is connected is formed on the side surface of the disc-shaped member . Therefore, when the ring-shaped member 74A is mounted on the discharge lamp 1, the direction perpendicular to the longitudinal direction L (see Fig. 2A) of the discharge lamp 1, that is, The piping 35D for blowing air can be connected in a direction away from the second focus P2 of the blowing pipe 2 so that the light shielding amount of the light from the discharge lamp 1 by the blowing pipe 35D can be reduced.

(15) A hollow first blowing terminal 76A having a threaded portion 76Ab formed at one end of a blowing pipe 35D is fixed and a threaded portion 74Ad of the ring-shaped member 74A is fixed 1 to the screw portion 76Ab of the air blowing terminal 76A. Therefore, the blowing pipe 35D can be easily connected to the ring-shaped member 74A through the first blowing terminal 76A.

The upper surface 74Af of the ring shaped member 74A is fixed to the flat surface of the first terminal 77A of the first terminal 77A, And a screw portion 74Ag for screwing the portion. Therefore, the power cable 33D can be easily and stably fixed to the upper surface 74Af thereof through the flat plate portion.

(17) The exposure light source 30 of this example is a device connected to the power source 32 and the air blowing device 34 in Fig. 5, and includes a glass tube 25 in which a discharge electrode is housed, A discharge lamp 1 having a ferrule portion 28 connected to the glass tube 25 and a connecting cable 72. The ring shaped member 74A of the connecting cable 72 is connected to the ferrule of the discharge lamp 1, And a cool air blowing path 74Ac is formed in the ring member 74A so that the power cable 32D of the connecting cable 72 and the ring shaped member 74A are connected to the power source 32 To supply the cold wind to the ferrule portion 28 from the blower 34 through the blowing pipe 35D and the ring member 74A of the connecting cable 72 have.

Therefore, the power from the power source 32 is supplied from the paralle 28 to the discharge electrode in the glass tube 25, and the cool air from the blower 34 is supplied to the ferrule portion 28. Therefore, the cooling action against the ferrule portion 28 is large. The cool air passes through the blowing passage 74Ac formed in the ring-shaped member 74A in the vicinity of the ferrule portion 28. [ Therefore, when the ferrule portion 28 is on the free end side as in the present embodiment, the light shielding amount of the light generated from the discharge lamp 1 by the cold air supply pipe or the like is reduced and the utilization efficiency of light is increased, The temperature rise of the fuel cell 30 is also reduced.

(18) The exposure apparatus of the present embodiment is an exposure apparatus for exposing a pattern of a reticle R to a wafer W (photosensitive substrate) by exposure light generated from a discharge lamp 1, and as an exposure light source, (30) is used. Accordingly, the light amount of the light from the discharge lamp 1 is reduced, and the illuminance of the exposure light is increased, thereby increasing the throughput of the exposure process. In addition, since the discharge lamp 1 can be cooled efficiently and thermal deformation is reduced, the imaging characteristics and the like can be improved.

3 (B), a spiral groove portion 28b is formed between the ferrule portion 28 and the cover member 50 in the above-described embodiment. However, as shown in Fig. 6, it is also possible to use a ferrule portion 28A in which a groove portion or the like is not formed in the cylindrical shaft portion 28a. 6, the air in the air passage 71c of the flow path bending member 71 is guided to the shaft portion 28a and the cover member 28a through the groove portion 28e formed in a part of the mount portion 28c of the ferrule portion 28A 50, and the surface of the shaft portion 28a flows directly toward the rod portion 25c side.

In the projection exposure apparatus (exposure apparatus) of the above-described embodiment, the illumination optical system and the projection optical system, which are composed of an exposure light source, a plurality of lenses, and the like, are assembled in the main body of the exposure apparatus to perform optical adjustment, Or by attaching a wafer stage to the main body of an exposure apparatus to connect wires and pipes, and performing comprehensive adjustment (electrical adjustment, operation confirmation, and the like). The projection exposure apparatus is preferably manufactured in a clean room where temperature, cleanliness, etc. are managed.

In addition, a micro device such as a semiconductor device includes a step of designing a function and a performance of a micro device, a step of manufacturing a mask (reticle) based on the design step, a step of manufacturing a substrate which is a substrate of the device, A step of exposing the pattern of the reticle to a substrate (wafer or the like) by the projection exposure apparatus of one embodiment, a step of developing the exposed substrate, a substrate processing step including heating (curing) and etching of the developed substrate, A bonding step (including a dicing step, a bonding step, and a packaging step), and an inspection step.

Further, the light source apparatus of the present invention is also applicable to an exposure light source of a step-and-scan type scan exposure type projection exposure apparatus (such as a scanning stepper) in addition to the step-and-repeat type projection exposure apparatus Can be applied. The light source device of the present invention can also be applied to an exposure light source of a liquid immersion type exposure apparatus disclosed in, for example, International Publication WO99 / 49504 pamphlet, International Publication WO 2004/019128 pamphlet and the like. Further, the light source device of the present invention can be applied to a light source device of a proximity-type or contact-type exposure apparatus that does not use a projection optical system, or a light source of an apparatus other than the exposure apparatus.

Further, in the above-described embodiment, a reticle (mask) having a transfer pattern is used. Instead of this reticle, as disclosed in, for example, U.S. Patent No. 6,778,257, An electronic mask for forming a transmission pattern or a reflection pattern based on the data may be used.

Further, the present invention is not limited to the exposure apparatus for semiconductor device manufacturing, but may be applied to an exposure apparatus for transferring a device pattern used for manufacturing a display including a liquid crystal display element or a plasma display or the like onto a glass plate, a method for manufacturing a thin film The present invention can also be applied to an exposure apparatus for transferring a device pattern to be used on a ceramic wafer and an exposure apparatus used for manufacturing an imaging element (such as a CCD), an organic EL, a micromachine, a MEMS (Microelectromechanical Systems) The present invention can also be applied to an exposure apparatus for transferring a circuit pattern to a glass substrate, a silicon wafer or the like in order to manufacture a mask used in a light exposure apparatus, EUV exposure apparatus, and the like as well as microdevices such as semiconductor elements.

The connecting cable 72 of Fig. 4A of the above embodiment is different from the connecting cable 72 of Fig. 4 in that when the power supply 32 and the air blowing device 34 are connected to each other, Can also be used.

As described above, the present invention is not limited to the above-described embodiments, and various configurations can be adopted without departing from the gist of the present invention. In addition, all disclosures of U.S. Serial No. 60 / 907,654, filed April 12, 2007, including the specification, claims, drawings and summary, are incorporated herein by reference in their entirety.

As described above, the present invention is applicable to a discharge lamp, a connection cable used for connecting a discharge lamp and a power source, a light source device provided with a discharge lamp, and an exposure apparatus including the light source device.

One … Discharge lamp, 2 ... Ellipse mirror (ellipse), 25 ... Glass tube, 25a ... Bulb part, 25c ... Bar-shaped part, 26 ... Ferrell, 28 ... Ferrule part, 28b ... The room, 30 ... Exposure light source, 31 ... The attachment member, 32 ... Power, 33D ... Power cable, 34 ... Blowers, 35D ... Piping for ventilation, 50 ... A cover member 71, The duct bending member, 71c ... Air duct, 72 ... Connecting cables, 73A, 73B ... The connection mechanism, 74A, 74B ... Ring-shaped member, 75A, 75B ... Lever, 76A, 76B ... Ventilating terminal

Claims (15)

A discharge lamp detachably mounted on an exposure apparatus for exposing a substrate using exposure light, the discharge lamp being used as a light source of the exposure light,
A glass portion covering an anode and a cathode arranged opposite to each other in a predetermined direction,
A shaft portion disposed so as to cover an end portion on one side of the glass portion with respect to the predetermined direction,
And a cover portion covering the shaft portion so as to cover at least the side surface of the shaft portion and the one end side end portion of the shaft portion, the cover portion having a through-
Wherein the through hole is provided at a position different from a connecting position at which the exposure unit and the cover unit are connected to supply power to the positive electrode or the negative electrode with respect to the predetermined direction,
Wherein the cover portion forms a flow path between the flow portion and the shaft portion so that a gas flowing into the cover portion from the flow hole flows from the one side to the other side along the side surface of the shaft portion, And covers the shaft portion to be exhausted from the end of the other side to the outside of the cover portion. The method according to claim 1,
And a power cable connecting the cover portion and the exposure device at the connection position and supplying power from the exposure device to the cover portion. The method according to claim 1,
And the shaft portion is electrically connected to the anode. The method according to claim 1,
And a blowing pipe connected to the flow hole to supply gas into the cover through the flow hole. The method according to any one of claims 1 to 4,
A second shaft portion which is disposed so as to cover the other end portion of the glass portion with respect to the predetermined direction and is electrically connected to the cathode and mounted on the exposure apparatus,
And a flange portion provided on the second shaft portion and protruding in a direction intersecting the predetermined direction. The method of claim 5,
Wherein the flange portion is in contact with the attaching member when the second shaft portion is mounted on the attaching member of the exposure apparatus. A first ferrule member connected to one end of the glass member in the first direction; a second ferrule member connected to one end of the glass member in the first direction; And a second ferrule member connected to the other end of the glass member in the first direction,
A relay member attached to the first ferrule member and covering at least a part of the first ferrule member;
A first terminal portion attached to the relay member and connected to a first cable for transmitting power for discharging to the first ferrule member;
And a second terminal portion which is attached to the relay member and to which a second cable for supplying a cooling medium to be supplied between the first ferrule member and the relay member is connected,
The second ferrule member
A flange portion projecting in a second direction orthogonal to the first direction,
Wherein the flange portion is provided on a side away from the glass member with respect to the first direction, the outer shape with respect to the second direction is smaller than the outer shape of the flange portion, A discharge lamp having a long first shaft portion. The method of claim 7,
And the second terminal portion is attached in a direction crossing the first direction. The method of claim 7,
And a threaded portion engaging with an end of the second cable is formed in the second terminal portion. The method of claim 7,
And a threaded portion for screwing an end portion of the first cable is formed in the first terminal portion of the relay member. The method according to any one of claims 7 to 10,
Wherein the second ferrule member is provided between the first shaft portion of the second ferrule member and the end of the second ferrule member and the outer shape with respect to the second ferrule member is a second Discharge lamp with shaft. The method of claim 11,
Wherein the second ferrule member is provided on the end side of the second ferrule member with respect to the second shaft portion and the outer shape with respect to the second direction is smaller than the outer shape of the flange portion, A discharge lamp comprising a third shaft portion. The method of claim 12,
And the third shaft portion has an outer shape with respect to the second direction being equal to or smaller than the first shaft portion. The method according to any one of claims 7 to 10,
Wherein the flange portion is provided with a positioning portion at a predetermined position around an axis along the first direction. A light emitting part having an anode and a cathode provided opposite to each other in the first direction; a glass member covering the light emitting part; a first ferrule member connected to one end of the glass member in the first direction; And a second ferrule member connected to the other end of the member in the first direction,
In the first ferrule member,
A first terminal portion to which a first cable for transmitting discharge power to be supplied to the first ferrule member is connected, and a second terminal portion to which a second cable for transferring the cooling medium is connected, In addition,
The second ferrule member
A flange portion projecting in a second direction orthogonal to the first direction,
Wherein the flange portion has a first shaft portion whose outer shape with respect to the second direction is smaller than the outer shape of the flange portion and whose length with respect to the first direction is longer than the flange portion, Discharge lamp.

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