JP2002150995A - Direct-current high-pressure discharge lamp and aligner for semiconductor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high-pressure discharge lamp and a semiconductor aligner, using the high pressure discharge lamp, suitable for a large wattage and large-current type, wherein withstanding pressure strength of required fused quartz bulb is secured, generation of process failures or initial failures during transportation and handling are prevented, and reliability of sealing parts can be secured, until the end of the lamp lifetime. SOLUTION: This has a fused quartz bulb 1 is equipped with an enclosure part 1a and a sealing tube part 1b, a positive electrode 2 with a total length of L (mm), where the base end part of an electrode shaft part 2a with a diameter of d (mm) is connected to an inner end of plural sealing metal foils 4a and supported by a sealing part 4 and not less than 100 positive electrode main parts 2b having a weight of M (g) are arranged and installed, the sealing part 4 including sealing metal foils 4a, a fused quartz columnar body 4b and a fused part 1b2 of a sealing tube part 1b, an external reed member, a negative electrode 3, and a discharge medium; and these satisfy equation 1: 15×103<=L×M<=25×103, and equation 2: 400<=L×M/d2<=700.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a DC high-pressure discharge lamp having a bulb made of quartz glass and a semiconductor exposure apparatus using the same.

[0002]

2. Description of the Related Art In response to demands for miniaturization of semiconductors and improvement in throughput as a light source of a semiconductor exposure apparatus, a high-output i-line (a mercury emission line having a wavelength of 365 nm) or a g-line (a wavelength of 4 nm) is used.
In order to efficiently irradiate the silicon wafer surface with a 36 nm mercury emission line, a short arc type ultra-high pressure mercury lamp is used. However, in recent years, in order to cope with a further improvement in throughput or a further increase in exposure area, a lamp of this type is required to have a large wattage. In order to achieve this, the development of a lamp capable of passing a large current is indispensable. For example, Japanese Patent Publication No. 63-13305
As disclosed in Japanese Unexamined Patent Application Publication No. 3 (1993) -3, a high-pressure discharge lamp having a structure in which a plurality of sealing metal foils are arranged in a cylindrical shape has been developed.

Further, it is necessary to increase the size of the electrodes and the sealing portion in response to the increase in the lamp current accompanying the increase in wattage, and to increase the size of the quartz glass bulb in order to cope with the increase in the amount of heat generated. It becomes.

[0004]

However, in the case of a direct-current high-pressure discharge lamp, the temperature of the anode is greatly increased by electron collision during operation, so that the heat radiation area needs to be increased. It becomes bigger and heavier. For this reason, defects such as electrode shaft misalignment in the lamp manufacturing process, breakage of the electrode shaft due to impact during transportation after lamp completion, and damage to the electrode support of the quartz glass bulb are likely to occur. Become. Even if the quartz glass bulb is not damaged, cracks may occur on its inner surface, and the quartz glass bulb may burst due to high pressure during lighting.

The present invention is suitable for a large wattage, large current type, ensures the required pressure resistance of a quartz glass bulb, prevents a process defect or an initial defect during transportation or handling, and at the end of lamp life. It is an object of the present invention to provide a high-pressure discharge lamp capable of ensuring the reliability of a sealed portion up to this point and a semiconductor exposure apparatus using the same.

[0006]

According to a first aspect of the present invention, there is provided a direct-current high-pressure discharge lamp having a hollow surrounding portion and a sealing tube portion formed in communication with the surrounding portion and integrally formed at least at one end thereof. A glass bulb; a base end connected to the inner ends of a plurality of sealing metal foils to be described later, an intermediate part inserted into the sealing tube part of the quartz glass bulb while being separated from its inner wall, and a front end facing the surrounding part. Electrode shaft of diameter d (mm) and weight M
(G) is a substantially columnar shape of 100 or more, and has a total length L (m) including an anode main portion disposed at the tip of the electrode shaft portion.
m) the anode; a plurality of sealing metal foils whose inner ends are connected around the base end of the electrode shaft, quartz inserted between the plurality of sealing metal foils and hermetically fused to the inner surface thereof A sealing portion that is a sealing rod portion of a glass rod and a quartz glass bulb and that is formed of a portion that is hermetically fused to an outer surface of a plurality of sealing metal foils and that supports an anode at a base end of an electrode shaft portion. An external lead member connected to the outer ends of the plurality of sealing metal foils and exposed to the outside from the sealing portion; and a cathode disposed at the other end of the surrounding portion of the quartz glass bulb so as to face the anode. A discharge medium sealed in the surrounding portion of the quartz glass bulb; and a diameter d (m
m), the weight M (g) and the length L (mm) satisfy the following expression.

15 × 10 ³ ≦ L × M ≦ 25 × 10 ³ (Formula 1) 400 ≦ L × M / d ² ≦ 700 (Formula 2) In the present invention and each of the following inventions, definitions of terms unless otherwise specified And the technical meaning is as follows.

<Regarding the Quartz Glass Bulb> The quartz glass bulb is integrally provided with a surrounding portion and a sealing tube at least at one end thereof. The surrounding part is hollow inside,
A discharge space is formed there. And the shape is spindle shape,
Oval sphere, sphere, oval sphere, etc. are allowed.
The sealing tube portion supports an anode described later and provides a configuration for airtightly introducing a lamp current. That is, the sealing tube portion has at least a portion to be fused that forms the sealing portion and the anode support portion. Further, although the sealing tube portion is integrated with the surrounding portion, it may be integrally formed in advance, or may be integrated after forming a sealing portion and an anode support portion described later.

<Anode> The anode includes an electrode shaft and an anode main portion provided at the tip of the electrode shaft. The electrode shaft portion has its base end connected to the inner ends of a plurality of sealing metal foils to be described later, an intermediate portion inserted through the sealing tube portion in a state separated from its inner wall, and the front end portion facing the surrounding portion. In. The electrode shaft portion is made of a refractory metal such as tungsten or molybdenum, and has a rod-shaped cross section with a diameter d (mm) having a circular cross-section, and has other portions. The base end portion of the electrode shaft portion may have a disk-shaped portion if necessary for connection to a plurality of sealing metal foils. In this case, the board-shaped portion may be formed integrally with the bar-shaped portion by forging or the like, or may be formed separately and then connected by welding, pressure welding, or the like.

The anode main part has a substantially cylindrical shape having a weight M (g), and the weight M must be at least 100 g or more. Further, the anode main portion may be forged and formed integrally with the electrode shaft portion, or may be separately formed and connected to a tip portion of the electrode shaft portion by welding or the like. Furthermore, in order to improve the heat dissipation by increasing the heat dissipation area of the anode main part,
A plurality of peripheral steps can be formed on the side surface of the columnar shape, and a coil can be wound. Then, the total length of the anode, that is, the distance from the base end of the electrode shaft portion to the front surface of the anode main portion is L (mm).

Next, a configuration in which the base end of the electrode shaft is supported by the sealing tube will be described. That is, the electrode shaft portion of the anode is cantilevered at the base portion at the sealing portion. Therefore, if necessary, if a disk-shaped portion is formed at the base end of the electrode shaft portion, the height of the disk-shaped portion is reduced, the sealing tube portion is reduced in the middle portion of the electrode shaft portion, and the anode is supported. It can be larger than it would be.

<About the Sealing Portion> The sealing portion is composed of a plurality of sealing metal foils, a quartz glass rod, and a sealing portion of the sealing tube portion. The plurality of sealing metal foils are made of a high-melting-point metal foil such as molybdenum or tungsten, and the inner ends thereof are connected to the periphery of the base end of the electrode shaft portion by welding or the like. And it can be arrange | positioned so that it may be concentric about the extended virtual line of an electrode shaft part, and may form a cylinder or a square tube with a clearance gap between adjacent sealing metal foils. In addition,
The “inner end of the sealing metal” refers to the end of the sealing metal foil on the electrode side.

The quartz glass rod is inserted so as to fill the internal space formed by the plurality of sealing metal foils. In other words, the plurality of sealing metal foils are arranged at equal intervals as much as possible around the quartz glass rod. The quartz glass rod and the inner surface of the sealing metal foil are hermetically sealed by fusing the quartz glass rod. In addition, the shape of the quartz glass rod can be a cylindrical shape or a truncated conical cylindrical shape. In the former case,
The diameter at the base end of the electrode shaft portion is substantially the same as the diameter of the disk-shaped portion. In the latter case, the diameter of the front surface of the truncated portion is substantially the same as the diameter of the disk-shaped portion of the electrode shaft.

The portion to be sealed of the sealing tube portion surrounds the outside of the plurality of sealing metal foils and is fused to the outer surface exposed between the sealing metal foil and the adjacent sealing metal of the quartz glass rod. are doing. As a result, the sealing metal foil and the portion where the sealing tube is fused are hermetically sealed. In order to fuse the portion to be fused of the sealing tube portion to the outer surface of the sealing metal foil, and further to the exposed portion of the quartz glass rod which is not opposed to the sealing metal foil, a vacuum sealing method is used. Is preferred. The “pressure reduction sealing method” means that the inside of the quartz glass bulb is evacuated to a reduced pressure or vacuum state, and the portion to be sealed of the sealing tube portion is heated and melted, thereby reducing the diameter of the portion and melting the portion. It refers to a sealing method in which a portion to be attached is formed and sealing is performed in order to weld to the sealing metal foil and the quartz glass rod.

Thus, the sealing portion seals the inside of the quartz glass bulb against the outside air, supports the anode, and can introduce a required value of lamp current from the outside by the above configuration. .

<Regarding the external lead member> The external lead member has a part connected to the sealing metal foil, and another part exposed to the outside from the sealing portion to introduce a current from the outside. It will be the receiving department. The external lead member may have any configuration, but is connected to the outer end of the sealing metal foil using, for example, a conductive metal rod such as molybdenum. Note that the “outer end” of the sealing metal foil refers to an end opposite to the inner end.

<Regarding the Cathode> The cathode is provided at the other end of the surrounding portion of the quartz glass bulb so as to face the anode. However, since the weight is relatively small, the cathode is provided in any configuration. You may. However, in order to allow a large lamp current to flow, it is desirable that the structure of the electrode shaft be configured similarly to that of the anode. Accordingly, it is desirable that the configuration of the sealing portion be the same as the configuration of the sealing portion on the anode side.

Thus, an appropriate distance between the electrodes is set between the anode and the cathode sealed in the quartz glass bulb. Generally, the distance between the electrodes is small so as to exhibit a short arc structure, and is preferably set to 12 mm or less.

<Regarding the Discharge Medium> The discharge medium is a medium which is sealed inside the quartz glass bulb and generates a predetermined radiation by discharge, and can be selected from the following various configurations. That is, (1) noble gas, (2) mercury +
Rare gas, (3) metal halide + mercury + rare gas,
(4) An embodiment of a metal halide + a rare gas can be adopted.

The mode (1) is used to obtain a high-pressure gas discharge lamp, and white light can be obtained by using xenon as a rare gas.

The mode (2) is used for obtaining a high-pressure mercury vapor discharge lamp, and can emit i-line or g-line light for semiconductor exposure. As the rare gas, argon or the like can be used.

The mode (3) is used for obtaining a metal halide lamp, and various luminescence can be obtained according to the type of metal constituting the metal halide. As the rare gas, argon or the like can be used.

The mode (4) is almost the same as the mode (3), but the pressure in the surrounding portion can be reduced, and if necessary, the vapor pressure which contributes little to the pressure in the surrounding portion but contributes to the main light emission is high. Metal halides can be added.

<Regarding Expressions 1 and 2> Expression 1 (15)
× 10 ³ ≦ L × M ≦ 25 × 10 ³ ) is the total length L of the anode
(Mm) and the weight M (g) of the anode main part define the conditions for regulating the influence of the moment on the base end of the electrode shaft, that is, the support part of the anode, within a predetermined range. That is,
When L × M is less than 15 × 10 ³ , when the lamp current is set to a required value, there is no problem in mechanical support of the anode. This is not possible because it causes excessive heating. Also, L
When xM exceeds 25 × 10 ³ , the above-mentioned excessive temperature rise can be suppressed, which is preferable. On the other hand, stress on the anode support formed at the base end of the electrode shaft is increased, resulting in a process failure or during transportation or handling. This is not possible because the initial failure is likely to occur.
On the other hand, if Expression 1 is satisfied, there is no problem.

Equation 2 (400 ≦ L × M / d²≦ 700)
Is the total length L (mm) and weight M (g) of the anode
The effect of the moment on the electrode part is determined by the diameter d (m
m) specifies the conditions to regulate within a predetermined range.
You. That is, L × M / d²Is less than 400,
There is no problem with the mechanical support of the pole, but if the anode temperature is too high
Rises or the electrode shaft becomes unnecessarily thick.
is there. Also, L × M / d ²Exceeds 700, the electrode axis
The strength of the electrode shaft formed at the base end of the part is weaker than the anode
Process failure or initial failure during transportation or handling
It is impossible because it is easy to do. In contrast, Equation 2
If you are satisfied, there is no problem.

<Other Configurations> Although not an essential requirement of the present invention, the following configurations can be adopted as necessary.

1. About electrode terminals Electrode terminals can be attached to both ends of the quartz glass bulb. In this case, power can be supplied to the external lead member via the electrode terminal, and the high-pressure discharge lamp can be mechanically supported. The electrode terminal is fixed to the sealing portion by an inorganic adhesive, and is connected to an external lead member via a suitable conductive member. Also, the electrode terminal can lead out a power supply conductor for power supply.

2. Condensing Mirror When a condensing mirror is used to collect and project the light emitted from the high-pressure discharge lamp, the mirror can be integrated in advance.

<Operation of the Present Invention> In the present invention, the total length L (mm) of the anode, the weight M (g) of the main part of the anode,
By setting the diameter d (mm) of the electrode shaft portion in the range of Expressions 1 and 2, even if the DC high-pressure discharge lamp has a large wattage and a large current, the anode support portion is strengthened. In addition to securing the pressure resistance of the quartz glass bulb, it is possible to prevent the occurrence of process failures or initial failures during transportation or handling, and to ensure the reliability of the sealed portion until the end of the lamp life. Therefore, according to the present invention, for example, a high-pressure discharge lamp having a lamp current of 50 A or more and a lamp power of 2 kW or more can be easily obtained.

Further, by forming the sealing portion, the anode can be supported. Therefore, it is not necessary to reduce the diameter of the intermediate portion of the electrode shaft portion to form the electrode supporting structure, thereby facilitating the sealing operation. .

The DC high-pressure discharge lamp according to the second aspect of the present invention
The direct-current high-pressure discharge lamp according to claim 1, wherein the anode comprises:
A disk-shaped portion having a diameter D (mm) is provided at the base end of the electrode shaft portion; the rated lamp current is I (A); and the following formula is satisfied.

4 ≦ I / D ≦ 8 According to the present invention, in the case where a disk-shaped portion is provided at the base end of the electrode shaft portion in addition to the structure of claim 1, the diameter D (mm) of the disk-shaped portion is provided. And the rated lamp current. That is, since the diameter D of the disc-shaped portion supports the moment of the anode and is related to the number of sealing metal foils that can be welded, it can be said that it is a function of the anode support strength and the allowable value of the rated lamp current. . Therefore, if I / D is set so as to satisfy Equation 2, it is possible to obtain a DC high-pressure discharge lamp having appropriate anode support strength and a required large current. On the other hand, if the I / D is less than 4, the weight of the anode becomes too large, the anode support becomes unreasonable, and the sealing portion is easily broken, which is not possible. On the other hand, if the I / D exceeds 8, the anode temperature rises excessively, which is not possible.

According to a third aspect of the present invention, there is provided a semiconductor exposure apparatus comprising: a semiconductor exposure apparatus main body; and a DC high-pressure discharge lamp according to the first or second aspect, which is mounted in the semiconductor exposure apparatus main body as an exposure light source. It is characterized by having.

The semiconductor exposure apparatus is an apparatus for exposing a semiconductor wafer to ultraviolet rays for etching a predetermined pattern. The present invention is directed to a large current, large watt type i-line or g-line in which the weight of the anode is particularly large. Suitable for an exposure apparatus provided with a high-pressure discharge lamp for use. The “semiconductor exposure apparatus main body” refers to the remaining portion of the semiconductor exposure apparatus excluding the DC high-pressure discharge lamp.

[0035]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view showing an embodiment of the DC high-pressure discharge lamp of the present invention.

FIG. 2 is an enlarged end view taken along the line II-II 'of FIG.

FIG. 3 is an enlarged end view taken along the line III-III 'of FIG.

FIG. 4 is an enlarged front view of the anode.

FIG. 5 is an enlarged bottom view of the anode.

In each figure, 1 is a quartz glass bulb, 2
Is an anode, 3 is a cathode, 4 is a sealing portion, 5 is an anode terminal,
6 is a cathode terminal.

<Regarding the Quartz Glass Bulb 1> The quartz glass bulb 1 has an enclosure 1a and a pair of sealing pipes 1b,
1b. The surrounding part 1a has a spindle shape and the inside is hollow. The sealing tube portion 1b has a substantially cylindrical shape and is integrally connected to both ends of the surrounding portion. In addition, the sealing tube portion 1b includes a first portion 1b1 having a large inner diameter shown in FIG.
And a second portion 1b having a relatively small inner diameter shown in FIG.
Two.

<Regarding Anode 2 and Cathode 3> Anode 2
Is made of tungsten, and has an electrode shaft portion 2a and an anode main portion 2
b. The electrode shaft 2a has a rod-shaped portion 2a1 having a diameter d (mm) and a disk-shaped portion 2a having a diameter D (mm).
Consists of two. The disk-shaped portion 2a2 is welded to the base end of the rod-shaped portion 2a1. The anode main part 2b is composed of a body part having a large diameter and a weight M (g) with respect to the electrode shaft part 2a.
a is welded to the front end. The entire length of the anode 2 is L (mm).

The cathode 3 is made of tungsten.
a and the cathode main part 3b. The electrode shaft 3a
Consists of a rod-shaped portion 3a1 and a disk-shaped portion 3a2.
The disk-shaped portion 3a2 is welded to the base end of the rod-shaped portion 3a1. The cathode main part 3b includes a rod-shaped part 3a1 and a coil 3a2. The rod-shaped portion 3a1 is composed of a rod-shaped body 3b1 slightly thicker than the rod-shaped body 3a1 whose tip protrudes in a conical shape, and a coil 3b2 wound on the outer periphery on the base end side. The base end of the rod-shaped body 3b1 is It is welded to the tip of the rod 3b1.

In each of the anode 2 and the cathode 3, the disk-shaped portions 2a2, 3a2, which are the base ends of the electrode shaft portions 2a, 3a, are connected to the inner end of a sealing metal foil 4a, which will be described later.
And the intermediate part is a sealed tube part 1
b is separated from the inner surface of the first portion 1b1. As a result, the anode main part 2b and the cathode main part 3b face each other with a relatively small distance between the electrodes.

<About the Sealing Portion 4> The sealing portion 4 includes four sheets, that is, a plurality of sealing metal foils 4a, a quartz glass rod 4b, and a second portion 1b2 of the sealing tube portion 1b.

The inner ends of the plurality of sealing metal foils 4a are welded at equal intervals around the disk-shaped portions 2a2 and 3a2 of the electrode shaft portions 2a and 3a. The outer end of the sealing metal foil 4a is welded to an external lead member (not shown).

The quartz glass rod 4b has a columnar shape, and has a diameter equal to that of the disk-shaped portion 2a of the electrode shafts 2b, 3b.
It is almost equal to the diameter of 2, 3a2. The length of the quartz glass rod 4b is equal to the distance between the disk-shaped portions 2a2, 3a2 and the external lead members. Further, the quartz glass rod 4b includes a plurality of sealing metal foils 4a, a disc-shaped portion 2a2,
It is inserted into the space formed between 3a2 and the external lead member, and is hermetically fused to the inner surface of the sealing metal foil 4a.

The second portion 1b2 of the sealing tube 1b hermetically surrounds the plurality of sealing metal foils 4a and the quartz glass rods 4b from outside thereof. That is, the second part 1
The inner surface of b2 is hermetically fused to the outer surface of the sealing metal foil 4a and the outer surface exposed from between the adjacent sealing metal foils 4a of the quartz glass rod 4b.

<Regarding the Anode Terminal 5> The anode terminal 5 is fixed to the outer end of the sealing tube portion 1b with an inorganic adhesive, and is connected to an external lead member. Further, the anode terminal 5 is provided with a connecting lead 5
a, a crimp terminal 5b and a mounting bolt / nut 5c connected to the distal end of the connection conductor 5a.

<Regarding the Cathode Terminal 6> The cathode terminal 6 is fixed to the outer end of the sealing tube portion 1b with an inorganic adhesive, and is connected to an external lead member on the cathode side. The cathode terminal 6 has a mounting bolt / nut 6a. The high pressure discharge lamp is mechanically fixed using the mounting bolts and nuts 6a, and the cathode is connected to the lighting circuit.

Example: Quartz glass bulb: outer diameter of the surrounding part 80 mm,
Wall thickness 3mm, internal volume 300cm³  Anode: Total length L80 (mm), outer diameter 22 (m) of main part of anode
m), length 35 (mm), weight M240 (g), electrode shaft
Diameter of rod-shaped part d6 (mm), diameter D1 of disk-shaped part
4 (mm) Distance between electrodes: 7 mm Discharge medium: mercury, Ar Rating: lamp power: 5 kW, lamp current: 77 A
It turned on without any problem.

FIG. 6 is a conceptual diagram showing one embodiment of the semiconductor exposure apparatus of the present invention.

In the drawing, 11 is the high-pressure discharge lamp shown in FIG. 1, 12 is an elliptical mirror, 13 is a regular reflection mirror, 14 is an aspheric lens, 15 is a condenser lens, 16 is a regular reflection mirror, 17 is a condenser lens, 18 is a photoresist,
19 is a reduction projection lens, and 20 is a semiconductor wafer.

Ultraviolet rays (i-line) radiated from the high-pressure discharge lamp 11 are reflected by the elliptical mirror 12 and the specular reflection mirror 13 and condensed by the aspheric lens 14 and the condensing lens 15, and then are reflected by the specular reflection mirror 16. , Condenser lens 17
After that, the semiconductor wafer 20 passes through the photoresist 18 and further passes through the reduction projection lens 19 to expose the semiconductor wafer 20 in a predetermined pattern.

[0055]

According to the first and second aspects of the present invention, a quartz glass bulb having a hollow surrounding portion and a sealing tube portion, and a base end portion connected to inner ends of a plurality of sealing metal foils described later. The diameter d (m) of which the middle portion is inserted into the sealing tube portion of the quartz glass bulb in a state of being separated from the inner wall thereof and the front end faces the surrounding portion.
m) an anode having an overall length L (mm) including an anode main portion which is substantially cylindrical and has a weight M (g) of not less than 100 and includes an anode main portion provided at the tip of the electrode shaft; It consists of a plurality of sealing metal foils connected to the base end, a quartz glass rod, and a fused part of the sealing tube of the quartz glass bulb, and supports the anode at the base end of the electrode shaft. A sealing portion, an external lead member, a cathode, and a discharge medium;
(Mm), weight M (g) and total length L (mm) satisfy the following formula, suitable for a large wattage and large current type, while ensuring the required pressure resistance of a quartz glass bulb and a process defect or It is possible to provide a direct-current high-pressure discharge lamp that can prevent the occurrence of initial failure during transportation or handling and can ensure the reliability of the sealed portion until the end of the lamp life.

15 × 10 ³ ≦ L × M ≦ 25 × 10 ³ (Equation 1) 400 ≦ L × M / d ² ≦ 700 (Equation 2) According to the invention of claim 2, the anode is formed on the electrode shaft. At the base end, there is a disk-shaped part with a diameter D (mm).
When (A) satisfies the following expression, a DC high-pressure discharge lamp suitable for a large current can be provided.

4 ≦ I / D ≦ 8 According to the invention of claim 3,
A semiconductor exposure apparatus having the effects of the first and second aspects can be provided.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a DC high-pressure discharge lamp of the present invention.

FIG. 2 is an enlarged end view taken along the line II-II ′ of FIG. 1;

FIG. 3 is an enlarged end view taken along the line III-III ′ of FIG. 1;

FIG. 4 is an enlarged front view of the anode.

FIG. 5 is an enlarged bottom view of the anode.

FIG. 6 is a conceptual diagram showing one embodiment of a semiconductor exposure apparatus of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Quartz glass bulb 1a ... Surrounding part 1b ... Sealing tube part 1b1 ... 1st part 1b2 ... 2nd part 2 ... Anode 2a ... Electrode shaft part 2a1 ... Bar-shaped part 2a2 ... Disk-shaped part 2b ... Anode main part 3 ... Cathode 3a ... Electrode shaft part 3a1 ... Bar-shaped part 3a2 ... Disc-shaped part 3b ... Cathode main part 3b1 ... Bar-shaped body 3b2 ... Coil 4 ... Sealing part 4a ... Sealing metal foil 4b ... Quartz glass rod-shaped body 5 ... Anode terminal 5a ... Connection lead wire 5b ... Crimping terminal 5c ... Mounting bolt / nut 6 ... Cathode terminal 6a ... Mounting bolt / nut

Claims (3)

[Claims] 1. A hollow surrounding portion and a surrounding portion communicating with the surrounding portion.
At least one end was provided with a sealing tube part integrally formed
A quartz glass bulb; the base end of a plurality of sealing metal foils
Connects to the inner end and the middle part is the sealing tube of the quartz glass bulb.
Is inserted away from the inner wall of the
The electrode shaft of diameter d (mm) and the weight M (g)
More than 100, almost cylindrical, arranged at the tip of the electrode shaft
Of total length L (mm) including the main anode part
A plurality of inner ends connected around the base end of the electrode shaft
Sealing metal foil, inserted between a plurality of sealing metal foils and the
Quartz glass rods and quartz glass airtightly fused to the inner surface
The outer surface of the sealing metal foil in the sealing tube of the valve
The anode is composed of air-tightly fused parts and the anode is
A sealing portion supported at an end; an outer end of a plurality of sealing metal foils;
External lead member that is connected to and exposed to the outside from the sealing part
And the other end of the surrounding portion of the quartz glass bulb facing the anode
And a cathode arranged inside the enclosure of the quartz glass bulb
With a discharge medium inserted therein; a diameter d (mm); a weight
M (g) and total length L (mm) satisfy the following formula.
Characteristic DC high-pressure discharge lamp. 15 × 10³≦ L × M ≦ 25 × 10³  400 ≦ L × M / d²≦ 700 The anode has a diameter D at the base end of the electrode shaft.
The DC high-pressure discharge lamp according to claim 1, comprising a disc-shaped portion of (mm); a rated lamp current is I (A); 4 ≦ I / D ≦ 8 3. A semiconductor exposure apparatus comprising: a semiconductor exposure apparatus main body; and the DC high-pressure discharge lamp according to claim 1 mounted as an exposure light source in the semiconductor exposure apparatus main body. .