JP3264046B2 - High pressure discharge lamp, semiconductor exposure apparatus and projection apparatus including the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a short arc type high-pressure discharge lamp such as a xenon lamp or an ultra-high pressure mercury lamp, and more particularly to a high-pressure discharge lamp having an improved bulb sealing structure, and The present invention relates to a semiconductor exposure apparatus and a projection apparatus including the same.

[0002]

2. Description of the Related Art In general, short arc discharge lamps having a particularly short distance between electrodes among high pressure discharge lamps are close to point light sources and have a high unit input. It is widely used as a light source for ultraviolet irradiation treatment in manufacturing processes.

Conventionally, this type of high-pressure discharge lamp has a pair of electrodes disposed opposite to each other in a light-emitting space of a quartz glass bulb, and one end of each of internal lead rods having these electrodes formed at the tip. In the annular sealing tube portion formed integrally with the valve, the one end portion of the external lead rod is disposed so as to be opposed to one end thereof, and is coaxially incorporated and supported and fixed.

[0004] Further, an annular separate glass, which is a closed cylindrical body made of quartz glass, is fitted into the inside of the sealing tube, and the outer peripheral surface of the separate glass and the inner peripheral surface of the sealing tube are connected to each other. A plurality of conductive metal foils such as molybdenum foil are interposed at equal pitches in the circumferential direction, and the external lead rods are electrically connected to the internal lead rods via the metal foils.

Then, a large current exceeding, for example, 50 A is applied to each metal foil through an external lead rod to heat the metal foil, and the interface between the sealing tube and the separate glass in contact with the metal foil is fused and hermetically sealed.

[0006]

However, in such a conventional high-pressure discharge lamp, when the sealing tube is sealed,
For example, since the distance between the metal foils is too small, there is a problem that a current leaks between the metal foils adjacent in the circumferential direction and the metal foils are fused to each other to lower the reliability or to result in a defective product. .

Further, since the distance between the metal foils is too large, the temperature does not rise to the melting temperature required for sealing the boundary surface between the sealing tube and the separate glass, resulting in insufficient hermetic sealing. For this reason, in addition to the occurrence of airtight leaks, there is a problem that cracks are generated due to partial non-welding, which also lowers the reliability or leads to defective products.

Therefore, the present invention has been made in view of such circumstances, and an object of the present invention is to control both the interval between the conductive foils and the like to a predetermined value, thereby improving both the yield and the reliability. An object of the present invention is to provide a high-pressure discharge lamp, a semiconductor exposure apparatus and a projection apparatus including the same.

[0009]

The present invention is configured as follows to solve the above-mentioned problems.

The invention described in claim 1 of the present application (hereinafter referred to as the first
Of the present invention), a sealing tube is integrally connected to both ends of a quartz glass bulb forming a light emitting space, and one end of an internal lead rod and one end of an external lead rod are connected in the sealing tube. While being inserted and supported, a quartz glass closing cylinder is fitted, and a plurality of conductive foils are interposed between the closing cylinder and the sealing tube at circumferentially equal positions. In a high-pressure discharge lamp in which the external lead rod is electrically connected to the internal lead rod via a conductive foil, the width of each conductive foil is set to WH.
Where WI / W is the distance between the conductive foils.
H is set to a value satisfying 0.15 ≦ WI / WH ≦ 0.40.

The invention described in claim 2 of the present application (hereinafter referred to as a second invention) is characterized in that the diameter of the closing cylinder is 25 mm or less.

Further, the invention according to claim 3 of the present application (hereinafter referred to as a third invention) is characterized in that xenon is sealed in the bulb of the high pressure discharge lamp according to claim 1 or 2. .

Further, the invention according to claim 4 of the present application (hereinafter referred to as a fourth invention) is characterized in that it has a projection device main body and a xenon lamp according to claim 3.

According to a fifth aspect of the present invention (hereinafter referred to as a fifth aspect), the bulb of the high-pressure discharge lamp according to the first or second aspect is characterized in that mercury is sealed at an extremely high pressure. Features.

Further, an invention according to claim 6 of the present application (hereinafter referred to as a sixth invention) is characterized in that it has a semiconductor exposure apparatus main body and an extra-high pressure mercury lamp according to claim 5.

[0016]

[Action]

<First invention> When the width of a plurality of conductive foils is WH and the interval between the conductive foils is WI, WI / WH is 0.15 ≦
It is set to a value that satisfies WI / WH ≦ 0.40.

For this reason, since the interval between the conductive foils is set appropriately, welding between the conductive foils due to a leak current generated when the interval between the conductive foils is too small can be prevented. It is possible to prevent the occurrence of cracks due to hermetic leaks and partial non-welding that occur when the distance between the members is too large, thereby improving the yield and reliability.

<Second Invention> Since the diameter of the closing cylinder according to the first invention is 25 mm or less, airtight leakage due to insufficient airtightness due to an increase in the diameter of the closing cylinder and partial failure are caused. Cracks due to welding can be prevented from occurring.

<Third and Fourth Inventions> Since a xenon lamp is composed of a high-yield and highly reliable high-pressure discharge lamp, it is possible to improve both the yield and the reliability of the xenon lamp and a projector having this lamp. it can.

<Fifth and sixth inventions>
Since the high-pressure mercury lamp and the semiconductor exposure apparatus having the lamp can be improved in both the yield and the reliability because the high-pressure discharge lamp has a high yield and high reliability.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a longitudinal sectional view of an essential part of an embodiment of a high-pressure discharge lamp according to the present invention. FIG. 2 is a sectional view taken along the line II-II of FIG.
In these figures, a high-pressure discharge lamp 1 is configured, for example, as a short-arc type or the like with a double-necked die, and one electrode 3 such as an anode and the like in a quartz glass bulb 2 forming a light emitting space. The other electrode such as a cathode, which is not provided, is built in opposition, and an appropriate amount of a rare gas and a luminescent material are sealed at an appropriate pressure.

The valve 2 has axial ends at both ends.
The annular sealing tube portions 2a are integrally coupled with each other,
The inner end of the sealing tube 2a is slightly reduced in diameter to form a neck 2b.
Is formed.

Inside the neck portion 2b, an internal lead rod 4 is provided.
Is inserted, and the holding tube 5 is tightly fitted around a part of the outer periphery of the insertion portion and is fixed in the neck portion 2b. An electrode 3 such as an anode is formed at the tip of the internal lead rod 4.

The sealing tube 2a is fitted with a cylindrical separate glass 6 which is a closed cylindrical body made of quartz glass from an outer opening end thereof, and has an outer peripheral surface of the separate glass 6;
As shown in FIG. 2, a plurality of conductive metal foils 7a, 7b, 7c, 7d such as molybdenum foils are provided in the annular minute gap with the inner peripheral surface of the sealing tube 2a at equal pitches in the circumferential direction. Is interposed.

Further, an annular inner cylinder 8 is densely fitted in the separate glass 6, and a distal end portion of the external lead rod 9 is further densely fitted in the inner cylinder 8. The outer opening of the sealing tube 2a is sealed by the flange 9a of the lead rod 9.

A base (not shown) is attached to the outer periphery of the outer end of the external lead rod 9 so that required electric power is supplied. The external lead rod 9 has a plurality of metal foils 7a to 7d.
Is electrically connected to the inner lead rod 4 through the outer lead rod 9 during the sealing step of thermally sealing the boundary surface between the inner peripheral surface of the sealing tube 2a and the outer peripheral surface of the separate glass 6. A large lamp current exceeding, for example, 50 A flows through each of the metal foils 7a to 7d.

When the distance between the metal foils 7a to 7d in the circumferential direction is WI and the width of each of the metal foils 7a to 7d is WH, the values are set to satisfy the following expression.

[0029]

0.15 ≦ WI / WH ≦ 0.40 In other words, as shown in the graph of the relationship between WI / WH and the life defect rate in FIG. 3, when WI / WH is less than 0.15, the circumferential direction Since the gap between the adjacent metal foils 7a to 7d is too small, when a large current is applied for heat sealing from the external lead rod 9, the current leaks between the adjacent metal foils 7a to 7d. Then, while the adjacent metal foils 7a to 7d are welded to each other, an airtight leak occurs.

That is, the metal foils 7a to 7d are thermally connected to the electrodes 3 and the electrodes 3 are not heated during the sealing step, so that the sealing tube portions 2a close to the metal foils 7a to 7d are not connected. Since heating to the interface with the separate glass 6 is radiated from the electrode 3 through the metal foils 7a to 7d, the temperature does not rise to the melting temperature necessary for sealing the interface,
An unwelded portion occurs, and an airtight leak occurs.

On the other hand, when WI / WH exceeds 0.40,
Since the interval between the metal foils 7a to 7d adjacent in the circumferential direction is too large, the volume of the quartz glass increases, and the temperature does not rise to the melting temperature required for sealing. A partial unwelded portion occurs at the interface. For this reason, an airtight leak is generated, and a crack is generated due to partial non-welding.

Therefore, according to the present embodiment, WI / WH
Is set to 0.15 to 0.40, so that welding due to current leak between the adjacent metal foils 7a to 7d can be prevented, and the boundary surface between the sealing tube portion 2a and the separate glass 6 is set in the circumferential direction. It can be melted and sealed over the entire length. For this reason, an airtight leak can be prevented, and both the yield and the reliability can be improved.

Further, the diameter D of the separate glass 6 may be set to 25 mm or less, and the increase in the volume of quartz glass can be suppressed. Can be prevented.

The high-pressure discharge lamp 1 thus configured may be formed into an ultra-high pressure mercury lamp by sealing an appropriate amount of mercury in the glass bulb 2 at an ultra-high pressure (several tens of atmospheres). FIG. 4 shows an example in which the ultra-high pressure mercury lamp 10 is applied to a semiconductor exposure apparatus A. The semiconductor exposure apparatus A reflects light emitted from the ultra-high pressure mercury lamp 10 by an elliptical mirror 11 and a reflection mirror 12 and collects the light by a condenser lens 13, and then passes through a reflection mirror 14 and a condenser lens 15. Photoresist 16
Through the reduction projection lens 17 and the wafer 1
8 is exposed.

The high-pressure discharge lamp 1 is connected to its bulb 2
A xenon lamp may be formed by filling an appropriate amount of xenon gas or the like at an appropriate pressure therein. FIG. 5 shows an example in which the xenon lamp 20 is applied to a projection apparatus B. The projection device B reflects the light emitted from the xenon lamp 20 by the elliptical mirror 21 and collects the light on the lenses 22a and 22b.
Then, the condensed light is transmitted through the film 23 as parallel light, and then is enlarged through the magnifying lens 24.
5 is projected onto the film 23.

Therefore, by applying the ultrahigh-pressure mercury lamp 10 of the first and second embodiments to the semiconductor exposure apparatus A and the xenon lamp 20 to the projection apparatus B, the yield of the semiconductor exposure apparatus A and the projection apparatus B can be improved. And reliability can be improved together.

[0037]

As described above, according to the first invention of the present application, when the width of a plurality of conductive foils is WH and the interval between these conductive foils is WI, WI / WH is 0.15 ≦ WI.
/ WH ≤0.40, so that fusion between adjacent conductive foils can be prevented, and the boundary surface between the sealing tube and the closed cylinder is securely sealed. As a result, the yield and reliability can both be improved.

Further, in the second invention of the present application, since the diameter of the closing cylinder is set to 25 mm or less, an airtight leak due to insufficient hermetic sealing due to an increase in the diameter of the closing cylinder and a partial non-welding Cracks can be prevented from occurring.

Further, in the third and fourth inventions of the present application, the xenon lamp is constituted by the high-yield and highly-reliable high-pressure discharge lamp. Therefore, the yield and reliability of the xenon lamp and the projector having the xenon lamp are improved. And can be increased together.

Further, in the fifth and sixth aspects of the present invention, the ultra-high pressure mercury lamp is constituted by a high yield and highly reliable high-pressure discharge lamp. Therefore, the yield of the ultra-high pressure mercury lamp and the semiconductor exposure apparatus having this lamp is improved. And reliability can be improved together.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a main part of an embodiment of a high-pressure discharge lamp according to the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a graph showing the relationship between WI / WH and the lamp life failure rate.

FIG. 4 is a configuration diagram of a semiconductor exposure apparatus having an ultra-high pressure mercury lamp as another embodiment of the high pressure discharge lamp according to the present invention.

FIG. 5 is a configuration diagram of a projection device having a xenon lamp according to another embodiment of the high-pressure discharge lamp according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High-pressure discharge lamp 2 Bulb made of quartz glass 2a Sealing tube part 2b Neck part 3 Electrode 4 Internal lead rod 5 Holding tube 6 Separate glass 7a, 7b, 7c, 7d Metal foil 8 Inner cylinder 9 External lead rod 10 Ultra-high pressure mercury Lamp 20 Xenon lamp

──────────────────────────────────────────────────の Continuation of the front page (51) Int.Cl. ⁷ Identification code FI H01J 61/86 H01J 61/86 (56) References JP-A-6-60960 (JP, U) JP 49-18192 (JP) , B1) Jiko 3-50608 (JP, Y2) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01J 61/36

Claims (6)

(57) [Claims] 1. A sealing tube is integrally connected to both ends of a quartz glass bulb forming a light emitting space, and one end of each of an internal lead rod and an external lead rod is inserted into the sealing tube. At the same time, it is supported at the same time, and a closing cylinder made of quartz glass is fitted. A plurality of conductive foils are interposed between the closing cylinder and the sealing tube at equal positions in the circumferential direction. In a high-pressure discharge lamp in which the external lead bar is electrically connected to the internal lead bar via a foil, when the width of each conductive foil is WH and the interval between the conductive foils is WI, WI / WH
Is set to a value satisfying 0.15 ≦ WI / WH ≦ 0.40. 2. The high-pressure discharge lamp according to claim 1, wherein the diameter of the closing cylinder is 25 mm or less. 3. A xenon lamp characterized in that xenon is sealed in a bulb of the high pressure discharge lamp according to claim 1. 4. A projection apparatus according to claim 3, comprising a projection apparatus main body and the xenon lamp according to claim 3. 5. An ultra-high pressure mercury lamp, wherein mercury is sealed at an ultra high pressure in the bulb of the high pressure discharge lamp according to claim 1. 6. A semiconductor exposure apparatus comprising: a semiconductor exposure apparatus main body; and the ultra-high pressure mercury lamp according to claim 5.