KR101980214B1 - Nozzle manufacturing method for cleaning substrate using vibrating body - Google Patents

Nozzle manufacturing method for cleaning substrate using vibrating body Download PDF

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Publication number
KR101980214B1
KR101980214B1 KR1020150132442A KR20150132442A KR101980214B1 KR 101980214 B1 KR101980214 B1 KR 101980214B1 KR 1020150132442 A KR1020150132442 A KR 1020150132442A KR 20150132442 A KR20150132442 A KR 20150132442A KR 101980214 B1 KR101980214 B1 KR 101980214B1
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South Korea
Prior art keywords
cleaning liquid
nozzle
plate
liquid flow
flow path
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KR1020150132442A
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Korean (ko)
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KR20170034135A (en
Inventor
김범진
김응서
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주식회사 일진저스템
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Priority to KR1020150132442A priority Critical patent/KR101980214B1/en
Publication of KR20170034135A publication Critical patent/KR20170034135A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Abstract

According to an embodiment of the present invention, manufacturing cost, manufacturing cost, and manufacturing time can be reduced by using a resin material, and automation work is facilitated, thereby shortening the manufacturing process. (S110) of preparing a nozzle upper plate and a lower nozzle plate made of a resin material, the method comprising the steps of: (S110) preparing a nozzle upper plate and a lower nozzle plate made of a resin material, ; (S120) forming a cleaning liquid flow path through which the cleaning liquid can flow on the upper surface of the nozzle upper plate or the upper surface of the lower nozzle plate; (S130) forming a plurality of discharge holes vertically penetrating the cleaning liquid flow path by irradiating the laser light along the cleaning liquid flow path; And a step (S140) of vertically joining the nozzle upper plate and the lower nozzle plate with the cleaning liquid flow path interposed therebetween.

Description

TECHNICAL FIELD [0001] The present invention relates to a method for manufacturing a substrate cleaning nozzle using a vibrating body,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a nozzle manufacturing method of a substrate cleaning apparatus, and more particularly, to a method of manufacturing a substrate cleaning nozzle using a vibrating body that can simplify a manufacturing process and prevent clogging of a discharge hole.

Conventional piezo electric inkjet printers have been patented and registered for many related patents since the 1980s, as Epson of Japan, which Philips developed and bought the prototype, succeeded in miniaturization and low price. (For example, Japanese Patent Application No. 1980-035964 filed on June, March 21, 1980).

On the other hand, semiconductor cleaning equipment can be divided into wet cleaning and dry cleaning, wet cleaning is various wet cleaning such as megasonic / nano-sonic wet cleaning technology and high-fine wet cleaning technology. In the above-mentioned piezo electric inkjet printer technology, There is an increasing number of cases in which semiconductor cleaning is performed by directly transferring the same method to a semiconductor cleaning apparatus (for example, Japanese Patent Application No. 2008-221157 filed on August 29, 2008, Korean Publication No. 10-2012-0099584).

That is, when the cleaning liquid is supplied to the vibrating body provided with the discharge hole such as an inkjet printer head and vibration is applied through the piezoelectric element attached to the vibrating body, the liquid droplets discharged from the discharge holes fall toward the substrate, .

In such a conventional art, generally, quartz is used, which causes quartz particles in the discharge hole drilling process to block the discharge hole, making it difficult to discharge the cleaning liquid. Moreover, when using Quartz, there is a problem that the process operation is very troublesome, troublesome and takes a long time.

SUMMARY OF THE INVENTION It is a first object of the present invention to provide a method of manufacturing a substrate cleaning nozzle using a vibrating body that can reduce a manufacturing cost and a processing time by using a resin material .

A second object of the present invention is to provide a method for manufacturing a substrate cleaning nozzle using an oscillator capable of shortening a process operation by facilitating automation work.

The above object of the present invention is also achieved by a method of manufacturing a substrate cleaning nozzle using a vibrating body for vibrating a high-pressure cleaning liquid stored therein to discharge droplets of a predetermined size to the outside, comprising: preparing a nozzle upper plate and a lower nozzle plate made of resin; Step S110: (S120) forming a cleaning liquid flow path through which the cleaning liquid can flow on the upper surface of the nozzle upper plate or the upper surface of the lower nozzle plate; (S130) forming a plurality of discharge holes vertically penetrating the cleaning liquid flow path by irradiating the laser light along the cleaning liquid flow path; And a step (S 140) of vertically joining the nozzle upper plate and the lower nozzle plate with the cleaning liquid flow path interposed therebetween.

In the step of forming the cleaning liquid flow path (S120), the cleaning liquid flow path may have a width equal to or smaller than that of the upper end, and the cross-sectional surface may have a shape of at least one of a rectangular shape, a trapezoid shape, and a semicircular shape.

Further, in the step S140 of joining the nozzle upper plate and the nozzle lower plate, the nozzle upper plate and the lower nozzle plate may be joined by ultrasonic welding. The nozzle upper plate may have a supply port for supplying the cleaning liquid and a discharge port for discharging the cleaning liquid And the like.

In addition, the step (S140) of joining the lower nozzle plate and the nozzle upper plate may be such that the piezoelectric element is mounted on the upper surface of the nozzle upper plate.

According to one embodiment of the present invention, the manufacturing cost, the manufacturing cost, and the manufacturing time can be reduced by using the resin material, and the automation work is facilitated, thereby shortening the manufacturing process.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flowchart showing a nozzle manufacturing process according to an embodiment of the present invention,
FIG. 2 is a plan view of a bottom plate of a nozzle manufactured according to an embodiment of the present invention,
FIG. 3 is a plan view of a nozzle top plate manufactured according to an embodiment of the present invention,
4 is a cross-sectional view taken along a direction A-A 'shown in FIG. 2,
FIG. 5 is a cross-sectional view taken along the line B-B 'in FIG. 3,
6 is a perspective view of a nozzle manufactured in accordance with an embodiment of the present invention,
7 is a cross-sectional view taken along the line C-C 'shown in FIG.

In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. The terminologies used herein are terms used to properly represent preferred embodiments of the present invention, which may vary depending on the user, the intent of the operator, or the practice of the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification. The same reference numerals in the drawings denote the same components.

≪ Method for manufacturing substrate cleaning nozzle using oscillator >

FIG. 1 is a flowchart sequentially illustrating a nozzle manufacturing process according to an embodiment of the present invention. As shown in FIG. 1, a method of manufacturing a nozzle of a substrate cleaning apparatus provided with a hydrophilized nozzle for vibrating a high-pressure cleaning liquid stored therein to discharge droplets of a predetermined size to the outside, The nozzle lower plate 200 is prepared (S110). Here, the nozzle lower plate 200 may be prepared as a disc having a predetermined thickness using quartz, sapphire made of aluminum oxide, engineering plastic, and the material, thickness, shape, And the nozzle top plate 100 may have a supply port for supplying the cleaning liquid and a discharge port for discharging the cleaning liquid.

The engineering plastics described above have a tensile strength of 500 kgf / cm 2 or more, a flexural modulus of 20,000 kgf / cm 2 or more, heat resistance of 100 ° C or more, and are thermoplastic entrapers capable of being formed by heating and thermosetting entrapers . Examples of such thermoplastic encapses include polyamides, POM (polyacetal), polybutylene terephthalate (PBT), polyethylene terephthalate (PET), synthetically polystyrene (SPS), polyether sulfone (PES), and polyetheretherketone (PEEK) Examples include phenol, urea, melamine, alkyd, unsaturated polyester, epoxy, diaryl phthalate, silicone, and polyurethane.

In this embodiment, PEEK in thermoplastic ENP is used, which is produced by solution shrinkage reaction of benzophenone halide and hydroquinone, and is excellent in heat resistance, toughness, salt resistance, chemical resistance and the like. Also, grades containing 10, 20 and 30% of glass fiber are contained for high strength, high rigidity and high precision. For GF20% reinforced products, the heat distortion temperature is about 300 ℃ and the long term heat resistance is 240 ℃ to be. In addition, despite its excellent heat resistance, it can be molded by a general injection molding machine or an extrusion molding machine, and resistance to irradiation with gamma rays is also good.

Next, the cleaning liquid flow paths 300a and 300b, through which the cleaning liquid can flow, are formed on the lower surface of the nozzle upper plate 100 or the upper surface of the lower nozzle plate 200 (S120). The cleaning liquid flow paths 300a and 300b are formed on both the lower surface of the nozzle upper plate 100 and the upper surface of the lower nozzle plate 200. However, the lower surface of the nozzle upper plate 100 and the lower nozzle plate 200 The width of the cleaning liquid flow paths 300a and 300b may be formed to be at least one of a rectangular shape, a trapezoid shape, and a semicircular shape with the lower end formed to be equal to or smaller than the upper end. And may be formed to have a length of several millimeters, and may be processed to be tapered from the upper end to the lower end to hurry the cleaning liquid toward the discharge hole 310. In addition, the cleaning liquid flow paths 300a and 300b may have a shape in which the O type is repeatedly formed in the shape viewed from the plane, and will be described in more detail later with reference to FIG. 2 to FIG.

Next, a plurality of discharge holes 310 vertically penetrating the cleaning liquid flow paths 300a and 300b are formed by irradiating laser light along the cleaning liquid flow paths 300a and 300b (S130). The plurality of discharge holes 310 are formed at regular intervals along the cleaning liquid flow paths 300a and 300b, which will be described later in more detail with reference to FIG. 2 to FIG.

Next, a method for manufacturing a nozzle of a substrate cleaning apparatus having a nozzle having hydrophilized processing is performed by vertically joining the nozzle upper plate 100 and the lower nozzle plate 200 with the cleaning liquid flow paths 300a and 300b therebetween (S140) . More specifically, the nozzle upper plate 100 and the lower nozzle plate 200 may be joined by ultrasonic welding. Here, the ultrasonic welding is a process in which two or more plastic bonding surfaces come into close contact with each other due to heat generation, softening and melting phenomenon due to ultrasonic vibration of the plastic itself, and a diffusion action occurs thereon, And can be classified into a method such as welding, sealing, inserting, swaging, and slitting. The ultrasonic welding machine for ultrasonic welding is to convert the power of 100 ~ 250V, 50 ~ 60Hz into the electric energy of 20KHz and 35KHz through the generator, convert it into mechanical vibration energy through the converter, Booster), and the ultrasonic vibration energy thus generated is transmitted to the welding compound through the horn, and instantaneous frictional heat is generated from the bonding surface of the welding product, thereby dissolving and bonding the plastic. .

In the present embodiment, the hydrophilic treatment is performed by dipping the lower nozzle plate 200 in a phenyl ring chemical solution, and then the lower nozzle plate 200 is immersed in an acryl The nozzle lower plate 200 is ultrasonically cleaned using an organic solvent, and then the lower nozzle plate 200 is rinsed with DIWater, that is, a clean The surface of the lower nozzle plate 200 may be hydrophilized by rinsing the lower nozzle plate 200 with water and finally drying the lower nozzle plate 200. [ By this process, the contact angle between the lower surface of the lower nozzle plate 200 and the cleaning liquid to be discharged does not decrease or does not occur in the lower nozzle plate 200 which has been hydrophilized. More specifically, since the cleaning liquid does not develop on the lower surface of the lower nozzle plate 200, the nozzle can maintain a uniform size and a constant speed, thereby minimizing damage to the substrate. Thus, unlike the present embodiment, The hydrophilization treatment can be performed.

The nozzle top plate 100 manufactured according to the present embodiment may have a piezoelectric element mounted on the top surface thereof, which imparts vibration generated by the piezoelectric element to a cleaning liquid flowing through the cleaning liquid flow paths 300a and 300b, (Not shown).

FIG. 2 is a plan view of a nozzle lower plate 200 manufactured according to an embodiment of the present invention. FIG. 3 is a plan view of a nozzle upper plate 100 manufactured in accordance with an embodiment of the present invention. FIG. 5 is a cross-sectional view taken along the line B-B 'of FIG. 3, FIG. 6 is a perspective view of a nozzle manufactured according to an embodiment of the present invention, and FIG. 7 is a cross-sectional view taken along the C-C 'direction shown in FIG. 2 to 7, the nozzle upper plate 100 and the lower nozzle plate 200 are formed in a cylindrical shape and have a circular shape in plan view. In contrast, the nozzle upper plate 100 and the nozzle lower plate 200 are formed in a circular shape in accordance with design conditions such as square shape, triangle shape, It may be changed into various shapes. The cleaning liquid flow paths 300a and 300b are formed on the lower surface of the nozzle upper plate 100 and on the upper surface of the lower nozzle plate 200. The cleaning liquid flow paths 300a and 300b have at least one O- Or may be formed in a shape having a symmetrical structure such as H, S, X, or may be variously changed depending on the droplet to be discharged, the discharge hole 310, and the like.

A plurality of discharge holes 310 vertically penetrating the cleaning liquid flow paths 300a and 300b by irradiating laser light may be formed. In this embodiment, the shapes of the discharge holes 310 are formed in a circle having a minute size and are arranged at regular intervals, but this can be changed in consideration of the type of the cleaning liquid and the shape of the cleaning liquid flow paths 300a and 300b.

As described above, the widths of the cleaning liquid flow paths 300a and 300b may be at least one of a rectangular shape, a trapezoid shape, and a semicircular shape with the lower end being formed to be equal to or smaller than the upper end, and the nozzle upper plate 100, The width and shape of the cleaning liquid flow paths 300a and 300b formed in the cleaning liquid flow path 200 may or may not be the same and may be changed according to design conditions and the like.

Further, the nozzle top plate 100 may be provided with a supply port for supplying a cleaning liquid and a discharge port for discharging the cleaning liquid. Further, a piezoelectric element may be further mounted on the upper surface of the nozzle top plate 100, So that high-pressure cleaning liquid flowing through the flow paths 300a and 300b is discharged through the discharge holes 310. [

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

100: nozzle top plate
200: nozzle bottom plate
300a and 300b:
310: Discharge hole
W: welded mountain

Claims (5)

A method of manufacturing a substrate cleaning nozzle using a vibrating body for vibrating a high-pressure cleaning liquid stored in an interior thereof through a piezoelectric element to discharge droplets of a predetermined size to the outside,
Preparing a nozzle top plate and a nozzle bottom plate formed of a resin material selected from the group consisting of polyetheretherketone (PEEK), POM, PET, silicone, and polyurethane (S110);
(S120) forming a cleaning liquid flow path through which the cleaning liquid can flow on the upper surface of the lower nozzle plate;
Forming a plurality of discharge holes vertically through the cleaning liquid flow path by irradiating laser light at regular intervals (S130); And
(S140) of vertically joining the nozzle upper plate and the lower nozzle plate by ultrasonic welding with the cleaning liquid flow path interposed therebetween,
In the step S110 of preparing the nozzle upper plate and the lower nozzle plate,
Wherein the nozzle top plate is provided with a supply port for supplying the cleaning liquid and a discharge port for discharging the cleaning liquid,
In the step of forming the cleaning liquid flow path (S120)
The cleaning liquid flow path is formed such that its width is smaller than the upper end and is inclined from the upper end to the lower end so as to converge the cleaning liquid toward the discharge hole, and the shape viewed from the upper surface of the lower nozzle plate is O- Formed,
In the step of forming the discharge hole (S130)
Wherein the discharge hole is vertically penetrated by irradiating the laser light along the cleaning liquid flow path that is inclined from the upper end to the lower end so that the high-pressure cleaning liquid flowing into the cleaning liquid flow path is discharged through the discharge hole. A method of manufacturing a nozzle for cleaning substrates. delete delete delete The method according to claim 1,
In the step (S140) of joining the lower nozzle plate and the nozzle upper plate,
Wherein the nozzle top plate has a piezoelectric element mounted on an upper surface thereof.
KR1020150132442A 2015-09-18 2015-09-18 Nozzle manufacturing method for cleaning substrate using vibrating body KR101980214B1 (en)

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Publication number Priority date Publication date Assignee Title
KR101909984B1 (en) * 2017-11-30 2018-10-19 주식회사 쓰리디프리욜 Nozzle for cleaning substrate
KR102116534B1 (en) * 2018-06-25 2020-05-28 주식회사 에이치에스하이테크 Nozzle for cleaning substrate and method of manufacturing the same
KR102102990B1 (en) * 2018-08-22 2020-04-21 주식회사 에이치에스하이테크 Nozzle for cleaning substrate
KR102011937B1 (en) 2018-09-20 2019-08-20 주식회사 에이치에스하이테크 Nozzle for cleaning substrate
KR20210126216A (en) 2020-04-10 2021-10-20 주식회사 엘지에너지솔루션 Battery cell for evaluating the lithium-plating and its manufacturing method

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Publication number Priority date Publication date Assignee Title
JP2000252248A (en) * 1999-02-26 2000-09-14 Shibaura Mechatronics Corp Ultrasonic wave washing device
JP2013115181A (en) 2011-11-28 2013-06-10 Asahi Sunac Corp Spray nozzle and resist deposition apparatus

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Publication number Priority date Publication date Assignee Title
KR100839775B1 (en) * 2006-06-20 2008-06-19 다이니폰 스크린 세이조우 가부시키가이샤 Coating nozzle and method for manufacturing the same
JP5261077B2 (en) * 2008-08-29 2013-08-14 大日本スクリーン製造株式会社 Substrate cleaning method and substrate cleaning apparatus
KR101536722B1 (en) * 2012-11-06 2015-07-15 세메스 주식회사 Method for treating substrate

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2000252248A (en) * 1999-02-26 2000-09-14 Shibaura Mechatronics Corp Ultrasonic wave washing device
JP2013115181A (en) 2011-11-28 2013-06-10 Asahi Sunac Corp Spray nozzle and resist deposition apparatus

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