KR101971140B1 - Fabrication Apparatus For Liquid Crystal Display Device And Fabrication Method Of Liquid Crystal Display Device Using The Same - Google Patents

Fabrication Apparatus For Liquid Crystal Display Device And Fabrication Method Of Liquid Crystal Display Device Using The Same Download PDF

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KR101971140B1
KR101971140B1 KR1020120141793A KR20120141793A KR101971140B1 KR 101971140 B1 KR101971140 B1 KR 101971140B1 KR 1020120141793 A KR1020120141793 A KR 1020120141793A KR 20120141793 A KR20120141793 A KR 20120141793A KR 101971140 B1 KR101971140 B1 KR 101971140B1
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South Korea
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liquid crystal
crystal material
ultrasonic
display device
storage unit
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KR1020120141793A
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Korean (ko)
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KR20140073849A (en
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김원택
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엘지디스플레이 주식회사
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)

Abstract

The present invention provides a method comprising forming a gate wiring, a data wiring, a thin film transistor, a pixel electrode, and a first alignment layer in each of a plurality of cell regions on an upper surface of a first mother substrate; Forming a black matrix, a color filter layer, a common electrode, and a second alignment layer in each of the plurality of cell regions on the second mother substrate; Forming a seal pattern on each of the plurality of cell regions of one of the first and second mother substrates; Bonding the first and second mother substrates together; Cutting the bonded first and second mother substrates into the plurality of cell regions; It provides a method of manufacturing a liquid crystal display device comprising the step of forming a liquid crystal layer in the seal pattern of each of the plurality of cell regions by using the ultrasonicated liquid crystal material.

Description

Manufacturing apparatus for liquid crystal display and manufacturing method of liquid crystal display using same {Fabrication Apparatus For Liquid Crystal Display Device And Fabrication Method Of Liquid Crystal Display Device Using The Same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display device, and more particularly, to a manufacturing apparatus for a liquid crystal display device for forming a liquid crystal layer using a liquid crystal material supplied by ultrasonication and a method for manufacturing a liquid crystal display device using the same.

Liquid crystal display devices (LCDs), which are used for TVs and monitors due to their high contrast ratio and are advantageous for displaying moving images, are used for optical anisotropy and polarization of liquid crystals. To display the image.

Such a liquid crystal display is an essential component of a liquid crystal panel formed by bonding a liquid crystal layer between two substrates facing each other, and the arrangement direction of liquid crystal molecules is changed by an electric field in the liquid crystal panel, thereby allowing a difference in transmittance. Implement

In general, the liquid crystal display uses a nematic phase of a thermotropic liquid crystal. Since the liquid crystal changes in phase with temperature, the liquid crystal display is optimized for an actual environment. It is important to have a temperature range.

A phase transition of such a temperature transition liquid crystal will be described with reference to the drawings.

1 is a diagram illustrating a phase transition of a conventional temperature transition liquid crystal.

As shown in FIG. 1, the temperature-transition liquid crystal has an isotropic phase in the temperature range above the first temperature T1, wherein the liquid crystal molecules are randomly arranged to be substantially an order parameter of zero. It has a characteristic close to a liquid.

The liquid crystal has a nematic phase in a temperature range of more than the second temperature T2 and less than the first temperature T1, wherein the liquid crystal molecules are arranged substantially parallel to each other and have an order variable greater than zero. Has

In addition, the temperature transition type liquid crystal has a smectic phase in the temperature range of more than the third temperature (T3) and less than the second temperature (T2), wherein the liquid crystal molecules are arranged in parallel with each other while maintaining a layered structure. It has a larger order variable than the nematic phase.

In addition, the temperature shift type liquid crystal has a crystal phase in the temperature range below the third temperature (T3), wherein the liquid crystal molecules are fixed at a specific position and have an order variable of substantially one.

The characteristics of the transition type liquid crystal appear because as the temperature decreases, the attraction, which is an interaction between the liquid crystal molecules, becomes stronger. When the temperature is lower than the second temperature T2, the transition liquid crystal may act as a liquid crystal layer of the liquid crystal display device. The nematic phase may be lost, resulting in defects such as bright spots of the liquid crystal display device and deterioration of display quality.

Therefore, in order to use in a liquid crystal display device, the liquid crystal must maintain a nematic phase stably without transitioning to a smectic phase or a crystal phase even at a low temperature. As such, the liquid crystal does not crystallize in a low temperature region and thus maintains a nematic phase. Also called stability.

In order to evaluate the low temperature stability of the liquid crystal, the complete liquid crystal display is left at a temperature of about -20 degrees for about 240 hours, and then an inspection process is performed to check whether or not phase change occurs.

However, such an inspection process has a disadvantage of requiring a long time, and if a defect occurs, the already completed liquid crystal display device needs to be discarded and the liquid crystal is improved and applied to the liquid crystal display device again.

In addition, it is necessary to increase the dielectric anisotropy of the liquid crystal for low voltage driving, and as the dielectric anisotropy of the liquid crystal increases, the low temperature stability of the liquid crystal deteriorates, which requires more time and effort.

The present invention has been made to solve this problem, and by forming a liquid crystal layer using a liquid crystal material having a cavity formed between the liquid crystal molecules by ultrasonic treatment, thereby improving the low temperature stability of the liquid crystal material and An object of the present invention is to provide a manufacturing apparatus for a liquid crystal display device having improved display quality and a manufacturing method of the liquid crystal display device using the same.

To this end, the present invention comprises the steps of forming a gate wiring, a data wiring, a thin film transistor, a pixel electrode and a first alignment layer in each of the plurality of cell regions on the first mother substrate; Forming a black matrix, a color filter layer, a common electrode, and a second alignment layer in each of the plurality of cell regions on the second mother substrate; Forming a seal pattern on each of the plurality of cell regions of one of the first and second mother substrates; Bonding the first and second mother substrates together; Cutting the bonded first and second mother substrates into the plurality of cell regions; It provides a method of manufacturing a liquid crystal display device comprising the step of forming a liquid crystal layer in the seal pattern of each of the plurality of cell regions by using the ultrasonicated liquid crystal material.

The liquid crystal material may include a plurality of liquid crystal molecules, and a plurality of cavities may be formed between the plurality of liquid crystal molecules.

In addition, the liquid crystal material may have a nematic phase.

The liquid crystal material may be supplied with ultrasonic vibration having a frequency of 10 kHz to 20 kHz for 20 minutes or more.

The forming of the liquid crystal layer may include: ultrasonicating the liquid crystal material; And dropping the sonicated liquid crystal material into the seal pattern of one of the first and second substrates.

The forming of the liquid crystal layer may include: ultrasonicating the liquid crystal material; And injecting the sonicated liquid crystal material into the seal pattern cut into the plurality of cell regions.

On the other hand, the present invention, the storage unit for storing the liquid crystal material; A pumping unit providing a withdrawal pressure to the liquid crystal material of the storage unit; A connection tube to which the liquid crystal material is supplied to the storage unit; A dropping unit converting the liquid crystal material into a liquid crystal droplet form and dropping the liquid crystal material onto the substrate; It provides a liquid crystal dropping device for a liquid crystal display device including an ultrasonic wave unit for supplying ultrasonic vibration to the liquid crystal material of the storage unit.

The ultrasonic unit may supply ultrasonic vibration of 10 kHz to 20 kHz to the liquid crystal material of the storage unit for 20 minutes or more.

On the other hand, the present invention, the storage unit for storing the liquid crystal material to be injected to the liquid crystal material is bonded to the first and second substrate; An ultrasonic unit for supplying ultrasonic vibration to the liquid crystal material of the storage unit; Provided is a liquid crystal injection device for a liquid crystal display device including a vacuum chamber in which the storage unit and the ultrasonic unit is disposed.

The ultrasonic unit may supply ultrasonic vibration of 10 kHz to 20 kHz to the liquid crystal material of the storage unit for 20 minutes or more.

According to the present invention, by forming a liquid crystal layer using a liquid crystal material having a cavity formed between liquid crystal molecules by ultrasonic treatment, the low temperature stability of the liquid crystal material is improved and the display quality of the liquid crystal display device is improved.

1 is a view showing a phase transition of a conventional temperature transition type liquid crystal.
2 is a flowchart illustrating a manufacturing method of a liquid crystal display device according to a first embodiment of the present invention.
3 is a view illustrating a liquid crystal layer forming step in a method of manufacturing a liquid crystal display device according to a first embodiment of the present invention.
4 is a view for explaining the low temperature stability improvement of the liquid crystal material according to the first embodiment of the present invention.
5 is a flowchart illustrating a method of manufacturing a liquid crystal display device according to a second embodiment of the present invention.
6 is a view illustrating a liquid crystal layer forming step in a method of manufacturing a liquid crystal display device according to a second embodiment of the present invention.

Hereinafter, a liquid crystal display and a manufacturing method thereof according to the present invention will be described with reference to the accompanying drawings.

2 is a flowchart illustrating a method of manufacturing a liquid crystal display device according to a first embodiment of the present invention.

As shown in FIG. 2, in the method of manufacturing a liquid crystal display device according to the first embodiment of the present invention, a gate wiring, a data wiring, and a thin film are formed in each of a plurality of cell regions of a first mother substrate. A first mother substrate is completed by forming a transistor, a pixel electrode, and a first alignment layer (st10), and a second mother substrate is completed by forming in each of a plurality of cell regions of the second mother substrate (st20).

Thereafter, a seal pattern is formed in each of the plurality of cell regions of one of the first and second mother substrates (st30).

The seal pattern is formed along the edges of the plurality of cell regions, and the spacers may be distributed in the seal pattern.

Thereafter, a liquid crystal layer is formed in the seal pattern of the plurality of cell regions of one of the first and second mother substrates (st40).

The liquid crystal layer is formed by a dispensing method for dropping the liquid crystal material on the substrate at a predetermined interval, wherein the liquid crystal material is supplied in a sonicated state.

Ultrasonic treatment refers to a process of supplying vibration to a liquid crystal material using an ultrasonic device. When ultrasonic vibration is applied to the liquid crystal material, a cavitation effect and a shear force effect occur, By the effect, a cavity is formed between the liquid crystal molecules.

For example, an ultrasonic device driven at a frequency of about 10 kHz to about 20 kHz may supply a vibration to the liquid crystal material for about 20 minutes or more to form a cavity between the liquid crystal molecules. As a result, a liquid crystal material having improved low temperature stability may be used. To form a liquid crystal layer.

Subsequently, the first and second mother substrates are bonded to each other (st50) with the liquid crystal layer interposed therebetween in a vacuum state, and the first and second mother substrates are cut into a plurality of cell area units to complete a plurality of liquid crystal display devices. (St60).

A method of manufacturing a liquid crystal display device and a dropping device used therein according to the first embodiment of the present invention will be described with reference to the drawings.

FIG. 3 is a view illustrating a liquid crystal layer forming step in a method of manufacturing a liquid crystal display device according to a first embodiment of the present invention. FIG. 3 illustrates an example of forming a liquid crystal layer on a first mother substrate.

As shown in FIG. 3, liquid crystals are disposed in a plurality of cell regions 12 of the first mother substrate 10 on which the gate wiring, the data wiring, the thin film transistor, the pixel electrode, and the first alignment layer are formed using a dropping device. The drop 22a is dripped.

The dropping device includes a stage (not shown), a storage unit 20, a pumping unit 24, a connecting pipe 26, a dropping unit 28, and an ultrasonic unit 30.

The first mother substrate 10 is placed in the stage, and the storage unit 20 stores the liquid crystal material 22.

The pumping unit 24 provides the withdrawal pressure to the liquid crystal material 22 of the storage unit 20, and the connection pipe 26 supplies the liquid crystal material 22 of the storage unit 20 to the dropping unit 28. It acts as a pathway.

The dropping unit 28 converts the supplied liquid crystal material 22 into a liquid crystal drop form and drops the liquid crystal material 22 onto the first mother substrate 10. The ultrasonic unit 30 generates vibrations of about 10 kHz to about 20 kHz to store the storage unit ( 20 to the liquid crystal material 22.

A vibrator (not shown) is formed on the bottom surface of the ultrasound unit 30, and the storage unit 20 may be fixed while being immersed in the water 32 of the ultrasound unit 30.

A cavity is formed between the liquid crystal molecules of the liquid crystal material 22 supplied through the dropping device, and the low temperature stability of the liquid crystal material is improved by the cavity.

The cavity formation between such liquid crystal molecules will be described with reference to the drawings.

4 is a view for explaining the low temperature stability improvement of the liquid crystal material according to the first embodiment of the present invention.

As shown in FIG. 4, the nematic liquid crystal material 22 includes a plurality of liquid crystal molecules 22a arranged substantially parallel to each other, and a plurality of liquid crystal molecules 22a are disposed between the plurality of liquid crystal molecules 22a by ultrasonic treatment. 22b) is formed.

As the temperature decreases, the attraction force, which is an interaction between the plurality of liquid crystal molecules 22a of the liquid crystal material 22, increases, and the cavity 22b generated by the ultrasonic treatment interacts between the plurality of liquid crystal molecules 22a. By decreasing the low temperature stability of the liquid crystal material 22 is improved.

For example, the liquid crystal material 22 subjected to a frequency of about 10 kHz to about 20 kHz and sonicated for about 20 minutes or more can still maintain the nematic phase even after standing at a temperature of about -20 degrees and about 240 hours.

The improvement of the low temperature stability of the liquid crystal material by the ultrasonic treatment may be applied to the liquid crystal layer formation by the injection method, which will be described with reference to the drawings.

5 is a flowchart illustrating a method of manufacturing a liquid crystal display device according to a second embodiment of the present invention.

As shown in FIG. 5, in the manufacturing method of the liquid crystal display according to the second embodiment of the present invention, a gate wiring, a data wiring, and a thin film are formed in each of a plurality of cell regions of a first mother substrate. The first mother substrate is completed by forming a transistor, a pixel electrode, and a first alignment layer (st110), and a black matrix, a color filter layer, a common electrode, and a second alignment layer are formed in each of the plurality of cell regions of the second mother substrate. Complete the motherboard (st120).

Thereafter, a seal pattern is formed in each of the plurality of cell regions of one of the first and second mother substrates (st130).

In this case, the seal pattern may have a liquid crystal injection hole and may be formed along edges of a plurality of cell regions, and the spacer may be scattered in the seal pattern.

Thereafter, the first and second mother substrates are bonded to each other so that the pixel electrode and the common electrode face each other (st140), and the first and second substrates are cut by cutting the bonded first and second mother substrates into a plurality of cell regions. To form (st150).

Thereafter, the inside of the seal pattern of the bonded first and second substrates is made into a vacuum state, and then a liquid crystal material is formed by injecting a liquid crystal material into the seal pattern through the liquid crystal injection hole of the seal pattern, thereby completing a liquid crystal display device ( st160).

The liquid crystal layer is formed by an injection method for injecting a liquid crystal material between the first and second substrates by using a capillary phenomenon and a pressure difference, wherein the liquid crystal material is supplied in a sonicated state. .

Ultrasonic treatment refers to a process of supplying vibration to a liquid crystal material using an ultrasonic device. When ultrasonic vibration is applied to the liquid crystal material, a cavitation effect and a shear force effect occur, By the effect, a cavity is formed between the liquid crystal molecules.

For example, an ultrasonic device driven at a frequency of about 10 kHz to about 20 kHz may supply a vibration to the liquid crystal material for about 20 minutes or more to form a cavity between the liquid crystal molecules. As a result, a liquid crystal material having improved low temperature stability may be used. To form a liquid crystal layer.

A method of manufacturing a liquid crystal display device according to a second embodiment of the present invention and an injection device used therein will be described with reference to the drawings.

6 is a view illustrating a liquid crystal layer forming step in a method of manufacturing a liquid crystal display device according to a second embodiment of the present invention.

As shown in FIG. 6, the inside of the seal patterns 114 of the first and second substrates 112 and 113 bonded to each other using an injection device is vacuumed, and then the liquid crystal injection hole 114a of the seal pattern 114 is vacuumed. ) Is immersed in the liquid crystal material 122, thereby injecting the liquid crystal material 122 into the seal pattern 114.

The injection device includes a storage unit 120 for storing the liquid crystal material 122, an ultrasound unit 130 for generating a vibration of about 10 kHz to about 20 kHz and supplying the vibration to the liquid crystal material 122 of the storage unit 120, The storage unit 120 and the ultrasonic unit 130 are disposed therein and include a vacuum chamber (not shown) capable of forming a vacuum state.

A vibrator (not shown) is formed on the bottom surface of the ultrasound unit 130, and the storage unit 120 may be fixed while being immersed in the water 132 of the ultrasound unit 130.

A cavity is formed between the liquid crystal molecules of the liquid crystal material 122 supplied through the injection device, and the low temperature stability of the liquid crystal material is improved by the cavity.

In the first and second embodiments, the ultrasonic liquid crystal material is supplied to the liquid crystal layer when the liquid crystal layer is formed as an example. In another embodiment, after the liquid crystal display is completed by forming the liquid crystal layer, Vibration may be supplied to the liquid crystal material of the liquid crystal layer, and a cavity may be generated between the liquid crystal molecules of the liquid crystal layer.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art various modifications and changes of the present invention without departing from the spirit and scope of the present invention described in the claims below I can understand that you can.

10: first mother substrate 20: storage unit
22: liquid crystal material 24: pumping unit
26: connector 28: loading part
30: ultrasonic unit

Claims (10)

Forming a gate wiring, a data wiring, a thin film transistor, a pixel electrode, and a first alignment layer in each of the plurality of cell regions on the first mother substrate;
Forming a black matrix, a color filter layer, a common electrode, and a second alignment layer in each of the plurality of cell regions on the second mother substrate;
Forming a seal pattern on each of the plurality of cell regions of one of the first and second mother substrates;
Bonding the first and second mother substrates together;
Cutting the bonded first and second mother substrates into the plurality of cell regions;
Forming a liquid crystal layer inside the seal pattern of each of the plurality of cell regions by using an ultrasonically treated liquid crystal material
Including,
The liquid crystal material includes a plurality of liquid crystal molecules,
A plurality of cavities are formed between the plurality of liquid crystal molecules by the ultrasonic treatment,
And the plurality of cavities are held between the plurality of liquid crystal molecules of the liquid crystal layer.
delete The method of claim 1,
And a liquid crystal material having a nematic phase.
The method of claim 1,
10. A method of manufacturing a liquid crystal display device, wherein the ultrasonic material is supplied with ultrasonic vibration at a frequency of 10 kHz to 20 kHz for at least 20 minutes.
The method of claim 1,
Forming the liquid crystal layer,
Ultrasonicating the liquid crystal material;
Dropping the sonicated liquid crystal material into the seal pattern of one of the first and second mother substrates
Method of manufacturing a liquid crystal display device comprising a.
The method of claim 1,
Forming the liquid crystal layer,
Ultrasonicating the liquid crystal material;
Injecting the ultrasonicated liquid crystal material into the seal pattern cut into the plurality of cell regions
Method of manufacturing a liquid crystal display device comprising a.
A storage unit storing a liquid crystal material;
A pumping unit providing a withdrawal pressure to the liquid crystal material of the storage unit;
A connection tube to which the liquid crystal material is supplied to the storage unit;
A dropping unit converting the liquid crystal material into a liquid crystal droplet form and dropping the liquid crystal material onto the substrate;
Ultrasonic unit for supplying ultrasonic vibration to the liquid crystal material of the storage unit
Including,
The ultrasonic unit stores water,
And the storage part is fixed while being immersed in the water of the ultrasonic part.
The method of claim 7, wherein
The ultrasonic wave unit, the liquid crystal dropping device for a liquid crystal display device for supplying the ultrasonic vibration of 10kHz to 20kHz to the liquid crystal material of the storage unit for 20 minutes or more.
A storage unit for storing the liquid crystal material such that the liquid crystal material is injected into the bonded first and second substrates;
An ultrasonic unit for supplying ultrasonic vibration to the liquid crystal material of the storage unit;
A vacuum chamber in which the storage unit and the ultrasonic unit are disposed
Including,
The ultrasonic unit stores water,
The storage unit is a liquid crystal injection device for a liquid crystal display device is fixed in a state of being submerged in the water of the ultrasonic unit.
The method of claim 9,
The ultrasound unit, a liquid crystal injection device for a liquid crystal display device for supplying the ultrasonic vibration of 10kHz to 20kHz to the liquid crystal material of the storage unit for 20 minutes or more.
KR1020120141793A 2012-12-07 2012-12-07 Fabrication Apparatus For Liquid Crystal Display Device And Fabrication Method Of Liquid Crystal Display Device Using The Same KR101971140B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100932297B1 (en) * 2009-08-10 2009-12-16 한국생산기술연구원 Apparatus of dispensing liquid crystal using the ultrasonic wave
JP2010204405A (en) * 2009-03-04 2010-09-16 Epson Imaging Devices Corp Method for manufacturing in plane switching liquid crystal display panel

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100369778B1 (en) * 2000-10-04 2003-01-29 삼성전자 주식회사 Device for injecting a liquid crystal material, and Methods for manufacturing a liquid crystal panel using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010204405A (en) * 2009-03-04 2010-09-16 Epson Imaging Devices Corp Method for manufacturing in plane switching liquid crystal display panel
KR100932297B1 (en) * 2009-08-10 2009-12-16 한국생산기술연구원 Apparatus of dispensing liquid crystal using the ultrasonic wave

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