KR101954641B1 - RF Cavity Filter Having Tuning Structure Using Elastic Body - Google Patents

Abstract

An RF cavity filter having a tuning structure using an elastic body is disclosed. The disclosed filter comprises: a housing in which at least one cavity is formed; A cover coupled to the upper portion of the housing; At least one resonator coupled to the bottom of the cavity; At least one bolt inserted through at least one through hole formed in the resonator; And at least one elastic body joined to the upper portion of the resonator, wherein the bolt is inserted through the through hole to provide an external force to the elastic body, and the shape of the elastic body is changed by the external force. According to the disclosed filter, it is possible to prevent the small metal debris generated during tuning from falling into the filter, deteriorate the performance of the filter PIMD, fix the tuning state without using a separate nut, There is an advantage that the yield of filter production satisfying the requirements can be improved.

Description

Technical Field [0001] The present invention relates to an RF cavity filter having a tuning structure using an elastic body,

The present invention relates to an RF cavity filter, and more particularly, to an RF cavity filter having a tuning structure using an elastic body.

An RF filter is a device for passing only signals of a desired frequency band among input signals and is implemented in various ways. The band pass frequency of the RF filter is determined by the inductance component and the capacitance component of the filter. The filter is designed to have the desired band pass characteristics by appropriately setting the size of the cavity, the number of cavities, and the structure of the resonator, but it may not have the desired band pass characteristics due to machining error or other factors. The tuning process is required after the filter fabrication.

1 is a view for explaining a tuning structure of a conventional RF cavity filter.

Referring to FIG. 1, a conventional RF cavity filter includes a housing 100, an input connector 102, an output connector 104, a cover 106, a plurality of cavities 108, and a resonator 110.

A plurality of partitions are formed in the filter and a cavity 108 is defined in which the plurality of partitions accommodate the respective resonators. The cover 106 is provided with a coupling hole for coupling the housing 100 and the cover 106 and a tuning bolt 112.

The tuning bolt 112 is coupled to the cover 106 and penetrates into the housing. The tuning bolt 112 is disposed in the cover 106 corresponding to a position corresponding to the resonator or a predetermined position inside the cavity.

The RF signal is input by the input connector 102 and output to the output connector 104, and an RF signal is transmitted through a coupling window formed in each cavity. Resonance phenomenon of the RF signal occurs by each cavity 108 and the resonator 110, and the RF signal is filtered by the resonance phenomenon.

2 is a cross-sectional view of one cavity in a conventional RF cavity filter.

Referring to FIG. 2, the tuning bolt 112 is penetrated through the cover 106. The tuning bolt 112 is made of a metal material. A thread is formed on the outer circumferential surface of the tuning bolt and the inner circumferential surface of the through hole of the cover, and the depth of insertion of the tuning bolt is determined by the rotation of the tuning bolt 112.

When the insertion depth of the tuning bolt 112 is changed, the distance between the tuning bolt and the resonator is adjusted, and tuning is performed by varying the insertion depth. The tuning bolt 112 may be manually rotated or a separate tuning machine may be used.

When tuning is completed, the tuning bolt is fixed, and finally, the tuning bolt is fixed using a nut as shown in FIG.

In the conventional tuning method using such a tuning bolt, tuning is performed while the tuning bolt is repeatedly moved up and down, so that small pieces of metal or metal material may fall into the filter. Thus, It is a major factor that deteriorates performance.

Further, after the tuning is completed, the tuning bolt is fixed through the nut. In the work of fixing the nut to the worker, it takes a considerable amount of time and cost, which increases the production cost.

The present invention proposes an RF cavity filter capable of preventing the small metal debris that may be generated during tuning from falling into the inside of the filter and deteriorating the performance of the filter PIMD.

In addition, the present invention proposes an RF cavity filter capable of fixing a tuning state without using a separate nut.

In addition, the present invention proposes an RF cavity filter capable of improving the productivity and the production yield of the filter satisfying the PIMD requirement.

In order to achieve the above object, according to one aspect of the present invention, there is provided a semiconductor device comprising: a housing in which at least one cavity is formed; A cover coupled to the upper portion of the housing; At least one resonator coupled to the bottom of the cavity; At least one bolt inserted through at least one through hole formed in the resonator; And at least one elastic body joined to an upper portion of the resonator, wherein the bolt is inserted through the through hole to provide an external force to the elastic body, and the shape of the elastic body is changed by the external force do.

A thread is formed on an outer circumferential surface of the at least one bolt and an inner circumferential surface of the at least one through hole, and the bolt is inserted in an upward direction by rotation to provide an external force to the elastic body.

Wherein a groove for inserting the bolt is formed in the resonator, a size of the elastic body is set to be relatively larger than that of the groove, and at least one of soldering, welding, and brazing to a rim of the elastic body, And is bonded to the resonator.

The elastic body has a plate shape as a whole and has a protruding structure and a wrinkle structure in part.

The elastic body has a partial protruding structure and a wrinkle structure in a region excluding a region in contact with the bolt.

The bolt contacts the central region of the elastic body to provide an external force to the elastic body.

The wrinkle structure includes a structure in which a plurality of wrinkles are formed in the form of a concentric circle.

The RF cavity filter further includes at least one hole formed in a bottom portion of the resonator.

According to another aspect of the present invention, there is provided an electronic device comprising: a housing in which at least one cavity is formed; A cover coupled to the upper portion of the housing; At least one resonator coupled to the bottom of the cavity; And at least one elastic body joined to an upper portion of the resonator, wherein the elastic body is provided with an RF cavity filter whose shape is changed by an external force.

According to yet another aspect of the present invention, there is provided a method of manufacturing a resonator, comprising: (a) preparing a cover, a housing including at least one cavity, and a resonator; (B) coupling the resonator to the bottom of the housing; (C) bonding the plate elastic body to the upper portion of the resonator; (D) tightening the cover and the housing; And a step (e) of inserting a bolt into a through hole formed in a bottom portion of the resonator.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: a housing in which at least one cavity is formed; A cover coupled to the upper portion of the housing; At least one bolt inserted through at least one through hole formed in the cover; And at least one elastic body joined to the cover in a lower region of the through hole; And a resonator coupled to a bottom of the housing, wherein the bolt is inserted through the through hole to provide an external force to the elastic body, and the shape of the elastic body is changed by the external force.

According to the present invention, it is possible to prevent the small metal debris generated during tuning from falling into the inside of the filter and deteriorating the performance of the filter PIMD.

In addition, according to the present invention, there is an advantage that the tuning state can be fixed without using a separate nut.

In addition, according to the present invention, it is possible to improve the productivity and improve the production yield of the filter satisfying the PIMD requirement.

1 is a view for explaining a tuning structure of a conventional RF cavity filter;
2 is a cross-sectional view of one cavity in a conventional RF cavity filter;
3 is a cross-sectional view of one cavity in an RF cavity filter according to a first embodiment of the present invention.
4 is a plan view showing a structure of a plate elastic body according to an embodiment of the present invention.
5 is a sectional view showing a state before the bolts 310 are inserted in the RF cavity filter according to the first embodiment of the present invention.
6 is a view showing a case where an external force by a bolt is applied and a case where it is not applied in an RF cavity filter according to the first embodiment of the present invention.
7 is a view for explaining an effect of preventing PIMD characteristic deterioration in an RF cavity filter according to the first embodiment of the present invention.
8 is a flowchart showing an overall flow of a method of manufacturing an RF cavity filter according to the first embodiment of the present invention.
9 is a view showing another structure of the plate elastic body.
10 is a cross-sectional view showing the structure of an RF cavity filter according to a second embodiment of the present invention.
11 is a view showing a case where an external force by a bolt is applied and a case where it is not applied in a cavity filter according to a second embodiment of the present invention.
12 is a view for explaining an effect of preventing PIMD characteristic deterioration in an RF cavity filter according to a second embodiment of the present invention.
13 is a view showing a resonator portion in an RF cavity filter according to a third embodiment of the present invention.
14 is a view showing a cover portion in an RF cavity filter according to a fourth embodiment of the present invention.

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all changes, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a cross-sectional view of one cavity in the RF cavity filter according to the first embodiment of the present invention.

Referring to FIG. 3, the RF cavity filter according to the first embodiment of the present invention may include a cover 300, a housing 302, a resonator 304, a bolt 310, and a plate elastic body 320.

FIG. 3 is a cross-sectional view of one cavity in the RF cavity filter according to the first embodiment of the present invention. In the RF cavity filter using the tuning structure of the present invention, Or more.

The cover 300 is made of a metal material and is coupled to the housing 302. For example, the cover 300 and the housing 302 may be coupled by bolting, soldering, or the like. The cover 300 and the housing 302 are coupled to each other to form a shielding structure in which electromagnetic waves can not penetrate the inside of the filter.

A resonator 304 is provided in each cavity 306 of the RF cavity filter according to the first embodiment of the present invention. Various types of resonators used in the RF cavity filter are known, and any type of resonator known in the art may be applied to the RF cavity filter according to the first embodiment of the present invention. Also, the material of the resonator may be variously selected depending on the required resonance mode and characteristics.

For convenience of explanation, in the first embodiment, a disk-shaped resonator having a large diameter at the upper end will be described as an example. However, it should be understood by those skilled in the art that changes in the shape of the resonator do not affect the spirit and scope of the present invention If you can understand it.

The resonator 304 is fixed to the bottom of the housing 302. Various coupling methods can be used for coupling the resonator 304 and the bottom of the housing 302. For example, FIG. 3 shows a coupling structure by screw coupling.

For example, a coupling portion between the resonator 304 and the bottom of the housing 302 is protruded, and a hole for coupling with the resonator 304 may be formed on the protrusion. The inner circumferential surface of the hole and the coupling portion of the resonator with the housing On the outer circumferential surface, a screw thread is formed and can be screwed.

5 is a cross-sectional view showing a state before the bolts 310 are inserted in the cavity filter according to the first embodiment of the present invention.

3 and 5, a through hole 340 is formed in the bottom portion 304a of the resonator 304 and the bolt 310 is inserted through the through hole 340 formed therein. A thread is formed on the inner circumferential surface of the through hole 340 and at least a part of the bolt 310 and the bolt 310 is inserted into the groove 330 formed in the resonator 304 while being rotated by screwing. The insertion depth is adjusted according to the degree of rotation of the bolt 310.

The plate elastic body 320 is bonded to the upper part of the resonator 304. The plate elastic body has a relatively larger area than the area of the groove 330 formed in the resonator 304 so that the plate elastic body 320 is bonded to the upper portion of the resonator 304 while covering the groove 330 of the resonator as a whole .

The plate elastomer 320 and the top of the resonator 304 may be bonded in a variety of ways, but may be joined by, for example, soldering, welding, brazing, and various corresponding bonding methods. However, the coupling between the plate elastic body 320 and the resonator 304 is not limited to the coupling, and the plate elastic body 320 and the resonator can be fastened by various fastening methods.

4 is a plan view showing a structure of a plate elastic body according to an embodiment of the present invention.

4 (a) is a view showing a structure of the plate elastic body, and FIG. 4 (b) is a view showing a contact portion with the bolt and a soldering region in the plate elastic body.

Referring to FIG. 4 (a), the plate elastic body 320 is formed of an elastic material which can have a circular shape and can change its shape by an external force, for example. For example, the material of the plate elastic body 320 may be beryllium copper (BeCu), stainless steel (STS 301 or STS 304). Of course, it will be apparent to those skilled in the art that various materials having elasticity can be applied to the plate elastic body 320. On the other hand, the thickness of the plate elastic body 320 may be appropriately selected to maintain elasticity and restoring force of the elastic body.

According to an embodiment of the present invention, a portion of the plate elastic body 320 may have a higher elastic modulus than other regions, and the shape distortion due to the external force can be controlled by this structure. This means that different elastic modulus can be obtained for each region, and the adjustment of the elastic modulus for each region can be appropriately performed according to the required modification type. Of course, it will be apparent to those skilled in the art that the plate elastic body 320 may be embodied as an elastic body whose elastic modulus does not differ from region to region.

4 (b), the edge region 400 of the plate elastic body 320 is shown in a bold shape, and when the plate elastic body 320 is bonded to the resonator 304 by soldering or the like, . It is preferable that the joining through the soldering or the like is performed only in the edge region so that the shape change due to the elasticity of the plate elastic body is possible and the soldering region can be selected in consideration of the required degree of deformation and bonding force.

In FIG. 4B, the central region 410 of the plate elastic body 320 is shown in bold, and the region is a region pressed by the bolt.

3 and 4, the plate elastic body 320 basically has a plate shape, but a part of the plate elastic body 320 has a bent and protruded structure and a wrinkle structure. According to an embodiment of the present invention, the central region to be in contact with the tuning bolt does not protrude, and the outer region has a folded structure and a folded structure. Of course, the area of the protruding area and the wrinkle structure may be set differently as needed.

When the protruding structure and the wrinkle structure are not applied, the degree of deformation of the elastic body due to the external force of the tuning bolt is limited. Particularly, as will be described in more detail later, the plate elastomer needs to implement a larger shape change in the central region. In order to secure a wider tuning range, it is necessary to increase the degree of deformation of the elastic body, and the protruding structure and the wrinkle structure are applied to the plate elastic body according to the necessity.

Therefore, the structure of the plate elastic body 320 can have a structure that basically bends a part of the plate while maintaining the plate shape according to the required tuning range.

3, the bolt 310 is inserted in the upward direction through the through hole. The bolt 310 is pressed in the plate elastic body 320 while the bolt 310 is inserted in the upward direction. When an external force due to the bolts 310 is applied to the plate elastic body 320, the shape of the plate elastic body 320 changes due to elasticity.

For example, as the bolt 310 applies an external force in the upward direction, the plate elastic body 320 also extends in the upward direction. Such a change in the shape of the plate elastic body 320 changes the resonant frequency of the filter, thereby enabling tuning.

On the other hand, the bent portion for forming the protruding structure and the wrinkle structure may have a proper rounding structure.

3 shows a state before the bolt 310 presses the plate elastic body 320. Hereinafter, a detailed description will be given of the change occurring when the bolt 310 presses the plate elastic body 320 do.

6 is a view showing a case where an external force by a bolt is applied and a case where the external force is not applied in the RF cavity filter according to the first embodiment of the present invention.

6 (a) is a view showing a case where an external force by a bolt is not applied, and Fig. 6 (b) is a view showing a case where an external force by a bolt is applied.

Referring to FIG. 6, when an external force by the bolt is not applied, the plate elastic body 320 maintains the initial state. When the bolt 310 is continuously rotated, the bolt 310 is inserted upward and starts to press the plate elastic body 320 when it comes into contact with the plate elastic body 320.

6 (b) that the bolt 310 presses the central region of the plate elastic body 320 and the plate elastic body 320 extends in the upward direction corresponding to the degree to which the bolt is pressed, as described above Can be confirmed.

As the plate elastic body 320 is stretched in the upward direction, the distance between the plate elastic body 320 and the cover 300 changes. Since the plate elastic body 320 is coupled to the resonator 304 so that the plate elastic body 320 and the resonator 304 are substantially integral structures and the change in distance between the plate elastic body 320 and the cover 300 is caused by the resonator 304 Quot ;, and " cover "

As the bolt 310 is inserted deeper, the plate elastic body 320 is elongated larger in the upward direction, so that the distance between the plate elastic body 320 and the cover 300 is further reduced.

When the distance between the plate elastic body 320 and the cover 300 changes, the capacitance component between the plate elastic body 320 and the cover 300 is changed, and as a result, the resonant frequency can be changed. The resonant frequency may be tuned to match the required conditions by adjusting the insertion depth of the bolt. The resonant frequency can be varied by the capacitance value, where the capacitance is determined by the distance between the plate elastic body and the cover. Normally, when the distance between the plate elastic body and the cover is reduced, the resonant frequency is moved downward and upward when the resonant frequency is increased and decreased.

In order to ensure an appropriate tuning range, the plate elastic body 320 also needs to provide an appropriate degree of deformation. To this end, a protruding structure and a wrinkle structure are applied to the plate elastic body 320 of the present invention. More preferably, the wrinkle structure may include a plurality of wrinkle structures forming a concentric circle. By forming the corrugated structure and the protruded structure in various regions, more deformation can be induced even if the same external force is applied to the overall flat shape.

7 is a view for explaining an effect of preventing PIMD characteristic deterioration in an RF cavity filter according to an embodiment of the present invention.

Referring to FIG. 7, small metal debris 700 may occur as the bolt is inserted or withdrawn as it rotates. The conventional RF cavity filter described with reference to FIGS. 1 and 2 does not disclose a structure that prevents such metal fragments from flowing into the filter and deteriorating the PIMD characteristics.

According to the first embodiment of the present invention, since the metal debris 700 can not flow into the filter elastomer 320, the deterioration of the PIMD characteristics due to the metal debris 700 does not occur.

On the other hand, when the plate elastic body 320 is stretched upward, a restoring force in a downward direction is generated, and the bolt can be self-locked without any fixing means such as a nut due to such restoring force.

FIG. 8 is a flowchart showing an overall flow of a method of manufacturing an RF cavity filter according to the first embodiment of the present invention.

Referring to FIG. 8, a housing, a cover, and a resonator of a cavity-formed filter are independently manufactured (step 800).

Once the housing, the cover, and the resonator are fabricated independently, the resonator is coupled to the cavity bottom of the filter and secured (step 802). The coupling of the resonator with the housing can be done in a variety of ways, and soldering to the housing of the resonator can be additionally performed to secure the coupling structure. For example, the resonator and the housing are coupled by a bolt, and the solder is additionally performed on the contact portion between the resonator and the housing.

The housing to which the resonator is coupled is fixed, and solder paste is applied to the bonding site of the resonator with the plate elastic body (step 804).

The plate elastomer is bonded to a fixation device such as a jig (step 806).

The fixing device in which the plate elastic body is fixed is brought into close contact with the resonator so that the plate elastic body is positioned on the resonator (step 808). For example, a jig for fixing the plate elastic body and a resonator may be fastened with a bolt or the like to place the plate elastic body on the resonator.

In the state where such bonding is maintained, bonding is performed by soldering by applying heat (step 810). The heating operation can be performed in various ways, for example, heating can be performed in an apparatus such as an oven.

When the soldering due to the heating is completed, the fixing device such as the jig is released (step 912).

When the resonator and plate elastomer are coupled, the cover and the housing are coupled (step 914).

A bolt is inserted into the through hole of the resonator to perform tuning until a desired resonance frequency is secured (step 916). On the other hand, after tuning is completed, the bolt may be fixed by applying a bond between the through hole and the bolt.

9 is a view showing another structure of the plate elastic body.

9 (a) and 9 (b), a plate-shaped plate elastic body is shown, unlike FIG. The shape of the plate elastic body may be appropriately selected according to need, and is not limited to a circle and a square as shown in Figs. 4 and 9. For example, if the resonator is in the form of a quadratic pole, it may be preferable to use a plate-shaped plate-like elastic body as shown in Fig.

10 is a cross-sectional view showing a structure of an RF cavity filter according to a second embodiment of the present invention.

Referring to FIG. 10, the RF cavity filter according to the second embodiment of the present invention includes a cover 300, a housing 302, a resonator 500, a bolt 310, and a plate elastic body 320 can do.

Unlike the first embodiment shown in FIGS. 3 to 7, the RF cavity filter of the second embodiment has a structure in which the plate elastic body 320 is coupled to the lower portion of the cover 300.

A plurality of through holes 340 are formed in the cover 300, and the bolts 310 are inserted through the through holes 340. For example, threads may be formed on the outer circumferential surface of the bolt 310 and the inner circumferential surface of the through hole 340, and the bolt 310 is inserted into the through hole 340 while rotating the bolt 310.

Of course, it will be apparent to those skilled in the art that various structures capable of inserting the bolt into the hole may be employed, although this is not the case.

The plate elastic body 320 is joined to the filter cover 300 at the lower portion of the through hole (inside the filter when the cover is fastened).

The size of the plate elastic body 320 is set to be larger than the through hole, so that when the through hole is viewed from the outside of the filter, the filter is shielded from the outside. The plate elastic body 320 and the cover may be joined in a variety of ways, but may be fastened to the filter cover by, for example, soldering, welding, brazing, and various corresponding bonding methods. However, the coupling between the plate elastic body 320 and the cover 302 is not limited to the coupling, and the plate elastic body 320 and the resonator can be coupled by various coupling methods.

The bolt 310 is inserted in the downward direction by the rotation of the bolt 310, and presses the plate elastic body 320.

The structure of the plate elastic body of the second embodiment is the same as that shown in Fig. In short, the plate elastic body can have a protruding structure and a plurality of wrinkle structures by bending. For example, a plurality of corrugated structures may be formed in the form of concentric circles. Further, according to a preferred embodiment of the present invention, a plurality of concentric corrugated structures may be formed in the resonator region, and outside the resonator region, a corrugated structure may not be formed.

11 is a view showing a comparison between a case where an external force by a bolt is applied and a case where an external force by a bolt is not applied in the RF cavity filter according to the second embodiment of the present invention.

11 (a) is a view showing a case where no external force by a bolt is applied, and (b) is a view showing a case where an external force by a bolt is applied.

Referring to FIG. 11, it can be seen that the shape of the plate elastic body 320 changes when an external force is applied to the plate elastic body 320 by inserting the bolt deeper. 6 (b) that an external force is applied to the central region where an external force is applied to the plate elastic body 320 due to the insertion of the bolts 310, thereby causing the elastic body 320 to extend in the downward direction have.

The distance between the plate elastic body 320 and the resonator changes due to the extension of the plate elastic body 320 in the downward direction. Comparing FIG. 11A and FIG. 11B, the distance between the plate elastic body and the resonator becomes shorter in FIG. 11B than in FIG. 11A.

The resonance frequency can be tuned by changing the distance between the resonator 500 and the plate elastic body 320.

12 is a view for explaining an effect of preventing PIMD characteristic deterioration in an RF cavity filter according to a second embodiment of the present invention.

Referring to FIG. 12, small metal fragments 700 may occur as the bolt is inserted or withdrawn as it rotates. In the case of the conventional RF cavity filter, no structure has been proposed that can prevent such metal fragments from flowing into the filter and deteriorating the PIMD characteristics.

However, according to the second embodiment of the present invention, the plate elastic body 320 serves as a kind of shielding film for preventing the metal debris 700 from falling into the filter, .

13 is a view showing a resonator portion in an RF cavity filter according to a third embodiment of the present invention.

The RF cavity filter according to the third embodiment of the present invention has a structure in which two holes 1300 and 1302 are added to the bottom of the resonator in the RF cavity filter according to the first embodiment of the present invention.

The first hole 1300 and the second hole 1302 are holes for discharging the metal fragments existing in the resonator 304 to the outside. For example, a nozzle for injecting air is connected to the first hole 1300, and a nozzle for sucking is connected to the second hole 1302, so that the metal fragments are sucked and discharged to the outside.

13 shows a case in which two holes are formed, it will be apparent to those skilled in the art that only one hole is formed and only the nozzles sucking air into the holes are connected to discharge the metal fragments.

14 is a view showing a cover portion in an RF cavity filter according to a fourth embodiment of the present invention.

The RF cavity filter according to the fourth embodiment of the present invention has a structure in which two holes 1400 and 1402 are added to the cover in the RF cavity filter according to the second embodiment of the present invention. Two holes 1400 and 1402 can be formed on both sides of the bolt and are formed in the region of the plate elastic body.

The first hole 1400 and the second hole 1402 are holes formed for discharging the metal debris located between the cover and the plate elastic body to the outside. For example, a nozzle for injecting air is connected to the first hole 1400, and a suction nozzle is connected to the second hole 1402 to suck up the metal fragments to be discharged to the outside.

14 shows a case where two holes are formed, it will be apparent to those skilled in the art that only one hole is formed and only the nozzles sucking air into the holes are connected to discharge the metal fragments.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be.

In particular, it will be apparent to those skilled in the art that bolts 310 may be replaced by bars in the embodiments described above.

It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

Claims (19)

A housing in which at least one cavity is formed;
A cover coupled to the upper portion of the housing;
At least one resonator coupled to the bottom of the cavity;
At least one bolt inserted through at least one through hole formed in the resonator; And
And at least one elastic body joined to an upper portion of the resonator,
Wherein the bolt is inserted through the through hole to provide an external force to the elastic body, and the shape of the elastic body is changed by the external force.
The method according to claim 1,
A screw thread is formed on an outer circumferential surface of the at least one bolt and an inner circumferential surface of the at least one through hole, and the bolt is inserted in an upward direction by rotation to provide an external force to the elastic body.
The method according to claim 1,
Wherein a groove for inserting the bolt is formed in the resonator, a size of the elastic body is set to be relatively larger than that of the groove, and at least one of soldering, welding, and brazing to a rim of the elastic body, And the resonator is bonded to the resonator.
The method according to claim 1,
Wherein the elastic body has a plate shape as a whole and partially has a protruding structure and a wrinkle structure.
5. The method of claim 4,
Wherein the elastic body has a partial protruding structure and a wrinkle structure in a region excluding a region in contact with the bolt.
The method according to claim 1,
And the bolt contacts the central region of the elastic body to provide an external force to the elastic body.
5. The method of claim 4,
Wherein the wrinkle structure includes a structure in which a plurality of wrinkles are formed in a concentric shape.
The method according to claim 1,
And at least one hole formed in a bottom portion of the resonator.
A housing in which at least one cavity is formed;
A cover coupled to the upper portion of the housing;
At least one resonator coupled to the bottom of the cavity;
And at least one elastic body joined to an upper portion of the resonator,
Wherein the shape of the elastic body is changed by an external force.
10. The method of claim 9,
Wherein the resonator is provided with a through hole, a bar is inserted through the through hole, and an external force is applied to the elastic body while the bar is inserted.
11. The method of claim 10,
Wherein the elastic body has a plate shape as a whole and partially has a protruding structure and a wrinkle structure.
12. The method of claim 11,
Wherein the elastic body has a partial protruding structure and a wrinkle structure in a region except the region in contact with the bar.
10. The method of claim 9,
And at least one hole formed in the bottom of the resonator for discharging debris generated during tuning.
(A) fabricating a housing, a housing including at least one cavity, and a resonator;
(B) coupling the resonator to the bottom of the housing;
(C) bonding the plate elastic body to the upper portion of the resonator;
(D) tightening the cover and the housing; And
(E) inserting a bolt into a through hole formed in a bottom portion of the resonator.
15. The method of claim 14,
The step (c)
Applying a solder paste to the resonator or the plate elastic body;
Bonding the plate elastic body to the resonator in a predetermined area; And
And finally bonding the plate elastic body to the resonator through heating.
16. The method of claim 15,
Wherein the elastic body has a plate shape as a whole and partially has a protruding structure and a wrinkle structure.
A housing in which at least one cavity is formed;
A cover coupled to the upper portion of the housing;
At least one bolt inserted through at least one through hole formed in the cover; And
At least one elastic body joined to the cover in a lower region of the through hole; And
And a resonator coupled to the bottom of the housing,
The bolt is inserted through the through hole to provide an external force to the elastic body, the shape of the elastic body is changed by the external force,
Wherein the elastic body has a plate shape as a whole, a partially protruding structure and a wrinkle structure,
Wherein the wrinkle structure includes a structure in which a plurality of wrinkles are formed in a concentric circle shape, and the concentric wrinkle structure is formed in the resonator region.
18. The method of claim 17,
Wherein at least one hole for discharging fragments generated during tuning is formed in the cover.





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