KR101922035B1 - 습도 센서 및 그를 위한 센서 요소 - Google Patents

습도 센서 및 그를 위한 센서 요소 Download PDF

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Publication number
KR101922035B1
KR101922035B1 KR1020137035170A KR20137035170A KR101922035B1 KR 101922035 B1 KR101922035 B1 KR 101922035B1 KR 1020137035170 A KR1020137035170 A KR 1020137035170A KR 20137035170 A KR20137035170 A KR 20137035170A KR 101922035 B1 KR101922035 B1 KR 101922035B1
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conductive electrode
humidity sensor
sensor element
humidity
porous
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KR20140040182A (ko
Inventor
스테판 에이치. 지스카
마이클 씨. 팔라쪼토
크르지츠토프 에이. 르윈스키
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/048—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance for determining moisture content of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020137035170A 2011-06-08 2012-05-30 습도 센서 및 그를 위한 센서 요소 Expired - Fee Related KR101922035B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161494578P 2011-06-08 2011-06-08
US61/494,578 2011-06-08
PCT/US2012/039996 WO2012170248A1 (en) 2011-06-08 2012-05-30 Humidity sensor and sensor element therefor

Publications (2)

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KR20140040182A KR20140040182A (ko) 2014-04-02
KR101922035B1 true KR101922035B1 (ko) 2018-11-26

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Country Link
US (1) US9599583B2 (https=)
EP (1) EP2718706B1 (https=)
JP (1) JP5908069B2 (https=)
KR (1) KR101922035B1 (https=)
CN (1) CN103547915B (https=)
WO (1) WO2012170248A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
CN104583763B (zh) 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
US9506887B2 (en) * 2014-12-08 2016-11-29 Symbol Technologies, Llc Field replaceable desiccant cartridge and device, method and system therefor
US10677747B2 (en) * 2015-02-17 2020-06-09 Honeywell International Inc. Humidity sensor
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9983171B2 (en) * 2015-07-28 2018-05-29 Ppg Industries Ohio, Inc. Aerospace transparency having moisture sensors
WO2017165907A1 (en) * 2016-03-30 2017-10-05 University Of South Australia Humidity sensors and uses thereof
RU2647168C2 (ru) * 2016-07-19 2018-03-14 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Датчик влажности
WO2019001776A1 (de) * 2017-06-28 2019-01-03 E+E Elektronik Ges.M.B.H Sensorvorrichtung
US10466201B2 (en) 2018-02-01 2019-11-05 FPG Industries Ohio, Inc. Complex impedance moisture sensor and sensing method
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
FR3098914B1 (fr) * 2019-07-19 2021-09-24 St Microelectronics Rousset Procede de detection d’humidite dans un circuit integre et circuit integre associe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040121210A1 (en) 2002-12-19 2004-06-24 3M Innovative Properties Company Polymer electrolyte membrane
JP2006250579A (ja) 2005-03-08 2006-09-21 Denso Corp 湿度センサの検査装置及び特性調整方法

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2016699A (en) 1978-03-15 1979-09-26 Dow Chemical Co Determining quantitatively the concentration of chemical compounds in afluid
DE2848034A1 (de) * 1978-11-06 1980-05-14 Siemens Ag Kapazitiver feuchtefuehler
JPS61264247A (ja) 1985-05-17 1986-11-22 Agency Of Ind Science & Technol 感湿素子の製造法
US4662220A (en) * 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
US4681855A (en) * 1985-08-05 1987-07-21 The United States Of America As Represented By The Secretary Of Commerce Humidity sensing and measurement employing halogenated organic polymer membranes
US4858063A (en) 1987-12-31 1989-08-15 California Institute Of Technology Spiral configuration of electrodes and dielectric material for sensing an environmental property
US4920451A (en) * 1988-05-23 1990-04-24 Yamatake-Honeywell Co., Ltd. Moisture-sensitive element
DE3919864A1 (de) * 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
US5014908A (en) 1989-11-27 1991-05-14 Emerson Electric Co. Control circuit using a sulphonated fluorocarbon humidity sensor
CN1016896B (zh) * 1989-12-26 1992-06-03 华东师范大学 一种温湿双功能敏感薄膜元件及其制造方法
US5036704A (en) 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
CN2080670U (zh) 1990-11-27 1991-07-10 北京工业大学 电容式有机膜湿度传感器
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
US5408381A (en) * 1994-04-28 1995-04-18 Johnson Service Company Capacitance humidity sensor
DE10002707A1 (de) 2000-01-22 2001-08-02 Bosch Gmbh Robert Gassensor
WO2002073178A1 (en) * 2001-03-13 2002-09-19 Tdk Corporation Humidity sensor element and method for manufacture thereof
US6724612B2 (en) * 2002-07-09 2004-04-20 Honeywell International Inc. Relative humidity sensor with integrated signal conditioning
US20040036394A1 (en) * 2002-08-21 2004-02-26 3M Innovative Properties Company Process for preparing multi-layer proton exchange membranes and membrane electrode assemblies
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
TWI242639B (en) * 2003-10-21 2005-11-01 Ind Tech Res Inst Humidity sensor element, device and method for manufacturing thereof
US7285349B2 (en) * 2003-10-30 2007-10-23 3M Innovative Properties Company Polymer electrolyte membrane and method of making
US7060738B2 (en) 2003-12-11 2006-06-13 3M Innovative Properties Company Polymer electrolytes crosslinked by ultraviolet radiation
CN1327215C (zh) 2005-03-08 2007-07-18 东南大学 Cmos工艺兼容的相对湿度传感器
JP2006071647A (ja) * 2005-09-26 2006-03-16 Nippon Soken Inc 湿度センサ用感湿素子
DE102006033251A1 (de) * 2006-07-18 2008-02-07 Testo Ag Schutzeinrichtung für einen Feuchtesensor in aggresiver Atmosphäre
US7906223B2 (en) 2006-09-11 2011-03-15 3M Innovative Properties Company Permeable nanoparticle reflector
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
EP2208058B1 (en) 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
JP2010540966A (ja) 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
CN101447576A (zh) 2007-11-27 2009-06-03 思柏科技股份有限公司 具湿度感测装置的燃料电池
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
CN202794129U (zh) 2009-01-29 2013-03-13 3M创新有限公司 用于检测环境空气中有机被分析物存在情况的监控器
US8537358B2 (en) 2009-05-22 2013-09-17 3M Innovative Properties Company Multilayer colorimetric sensor arrays
CN102460119B (zh) 2009-05-22 2015-01-28 3M创新有限公司 多层比色传感器
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
CN101949878B (zh) 2010-09-03 2013-05-01 兰州交通大学 一种聚酰亚胺膜微型快速响应湿度传感元件及其制作方法
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
CN103477217B (zh) 2011-04-13 2015-12-23 3M创新有限公司 包含校准信息的电子器件及其使用方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040121210A1 (en) 2002-12-19 2004-06-24 3M Innovative Properties Company Polymer electrolyte membrane
JP2006250579A (ja) 2005-03-08 2006-09-21 Denso Corp 湿度センサの検査装置及び特性調整方法

Also Published As

Publication number Publication date
WO2012170248A1 (en) 2012-12-13
KR20140040182A (ko) 2014-04-02
EP2718706A1 (en) 2014-04-16
JP5908069B2 (ja) 2016-04-26
US9599583B2 (en) 2017-03-21
US20140076048A1 (en) 2014-03-20
EP2718706B1 (en) 2015-03-11
JP2014516165A (ja) 2014-07-07
CN103547915A (zh) 2014-01-29
CN103547915B (zh) 2015-11-25

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