KR101917614B1 - Actuator and actuator pannel using electrostatic force - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator and an actuator panel using an electrostatic force, and more particularly, to an actuator and an actuator panel using an electrostatic force that indirectly imparts a sense of vibration to a user by vibrating a mass using an electrostatic force. A mass portion that vibrates by the electrostatic force and an electrostatic force generating portion that is disposed at a position spaced apart from the mass portion by a predetermined distance to generate an electrostatic force, and the vibration generated in the mass portion is transmitted along a predetermined vibration path, An actuator using an electrostatic force is disclosed in which vibration is indirectly transmitted.

Description

[0001] The present invention relates to an actuator and an actuator panel using electrostatic force,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator and an actuator panel using an electrostatic force, and more particularly, to an actuator and an actuator panel using an electrostatic force that indirectly imparts a sense of vibration to a user by vibrating a mass using an electrostatic force.

In general, touch refers to a tactile sensation that can be felt by a person's finger or stylus pen when touching an object, including tactile feedback that the skin touches the object surface and muscular feedback that is felt when movement of the joints and muscles is disturbed Concept.

As human sensory receptors, receptors for mechanical stimulation include Paciniancorpuscle, which senses high-frequency vibrations, Meissner's corpuscle, which senses low-frequency vibrations, Merkel's disc, which senses local pressing pressure, ), And Ruffini's ending, which detects stretching of the skin.

Various actuators such as piezo actuators, solenoid actuators, DC / AC motors, server motors, ultrasonic actuators, shape memory alloy ceramic actuators, and electroactive polymer actuators are examples of various tactile presentation devices for stimulating such sensory receptors.

Typical examples of the tactile display device include a vibrating tactile actuator that stimulates a pachinian / meister body that detects vibration of a high frequency / low frequency by generating vibration by a vibration motor in accordance with an input of a touch screen in a mobile device. 2. Description of the Related Art Vibration motors (vibratory tactile actuators) are devices that transmit a predetermined sense of vibration when applied to portable devices. Conventional techniques have been a method of outputting a sense of vibration in response to a touch of a touch panel by a user.

Such a conventional vibration generating module is composed of a solenoid coil and a permanent magnet mounted on a spring so as to generate vibration having a strength that the user can perceive with a finger, and the permanent magnet is moved up and down by the electromagnetic force, . This method has a limitation in that it can vibrate the cell phone size because of the limitation of the vibration power, but it can not transmit the vibration touch to the tablet PC and the large LCD. Further, since the vibration actuator is disposed at one corner of the mobile phone, there is a difference in the maximum vibration force that can be generated depending on the pressing position of the touch panel.

It is required to develop a vibration and tactile feedback actuator capable of confirming a user's touch input with a vibration feedback in a large LCD and facilitating various interactions. Therefore, it can be mounted thinly and wide on the back side of large LCD to generate constant and strong vibration force irrespective of the touch position of LCD, and it is possible to freely adjust the frequency and pattern of vibration, Is being demanded industrially.

Korean Patent Laid-Open Publication No. 10-2011-0039118 (entitled: Tactile feedback generating device using plural vibrators and method of generating tactile feedback using the same) U.S. Patent Application Publication No. US 2013/0307789 entitled Touch-screen device including tactile feedback actuator

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in an effort to solve the above-mentioned problems, and an object of the present invention is to provide a method and apparatus for minimizing power consumption by vibrating a mass by generating an electrostatic force by a high voltage, and maximizing vibration of a mass using a resonance frequency and a beat frequency The purpose is to provide.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

The above-described object of the present invention is achieved by an electrostatic force generating apparatus comprising: a mass portion vibrating by an electrostatic force; and an electrostatic force generating portion disposed at a position corresponding to the mass portion and spaced apart from each other by a predetermined distance, So that the vibration is indirectly transmitted to the user. The actuator can be realized by using the electrostatic force.

Also, the mass portion and the electrostatic force generating portion are sequentially arranged on the same vertical line in the vertical direction, so that the vibration generated in the mass portion is indirectly transmitted to the user along the vibration path.

In addition, the contact area that the user touches is formed on the lower area of the electrostatic force generating part on the same vertical line with reference to the mass part, so that the vibration of the mass part is indirectly transferred to the contact area.

The electrostatic force generating unit includes a mass portion that vibrates by an electrostatic force, an electrostatic force generating portion that is disposed at a position spaced apart from the mass portion by a predetermined distance to generate an electrostatic force, a high voltage power source that generates a high voltage supplied to the electrostatic force generating portion, And a charge / discharge signal generating unit for charging and discharging the charge of the electrostatic force generating unit on the supplied high voltage signal path.

Also, the charge / discharge signal generator generates the high voltage signal supplied to the electrostatic force generator by dividing the high voltage signal into the charge section and the discharge section, and the ratio of the charge / discharge section is set to be at least 20 to 80% So that the vibration of the mass portion is made within a predetermined range.

The electrostatic force generating unit may include a mass portion that vibrates by an electrostatic force, an electrostatic force generating portion that is disposed at a position corresponding to the mass portion and is spaced apart from the mass portion by a predetermined distance, and an electrostatic force generating portion that is disposed horizontally with respect to the mass portion to amplify the vibration of the mass portion by elasticity Or a vibration amplification part arranged in the vertical direction with respect to the mass part.

The mass supporting portion, the vibration amplifying portion, and the mass portion are sequentially disposed with respect to the horizontal direction so that the vibration amplifying portion is supported by the mass supporting portion and the mass supporting portion, And is disposed between the mass portions.

Further, the mass support portion, the vibration amplification portion, and the mass portion are integrally formed, and the vibration amplification portion generates elasticity by forming the slit groove in the circumferential direction in the spatial region between the mass support portion and the mass portion.

Further, the slit grooves are composed of the inner slit grooves and the outer slit grooves.

Further, the vibration amplifying section has a stiffness value between 1 x 10 ² N / m and 5 x 10 ⁶ N / m.

Further, when the vibration amplifying section is arranged in the vertical direction, the vibration amplifying section amplifies the vibration by supporting the mass section from below.

The electrostatic force generating unit may include a mass portion that vibrates by an electrostatic force, an electrostatic force generating portion that is disposed at a position corresponding to the mass portion and is spaced apart from the mass portion by a predetermined distance, an electrostatic force generating portion that is disposed in a horizontal direction with respect to the mass portion to amplify the vibration of the mass portion by elasticity A vibration amplifying portion disposed in a vertical direction with respect to the mass portion, and an interval portion disposed at a predetermined height on a circumferential outer side of the mass portion and the electrostatic force generating portion to provide a predetermined spacing distance between the mass portion and the electrostatic force generating portion .

The mass support portion, the vibration amplification portion, and the mass portion are integrally formed so that when the vibration amplification portion is disposed in the horizontal direction, the mass support portion is disposed over the gap portion to support the mass portion in the circumferential direction, And the vibration amplifying part generates elasticity by forming a slit groove in the circumferential direction in the spatial region between the mass support and the mass part.

Further, the high voltage signal supplied to the electrostatic force generating portion is composed of a frequency corresponding to the resonance frequency of the mass portion and the vibration amplifying portion.

In addition, the frequency of the high voltage signal supplied to the electrostatic force generating section is within a range of 500 Hz, and is divided into a charging section and a discharging section.

The vibration path may further include a mass portion, a vibration amplifying portion, a gap portion, and a base material layer in order from the base portion to the base portion. The base portion may include a base portion that transmits vibration generated in the mass portion along a predetermined vibration path, It is the path through which vibration is transmitted.

Also, as the mass portion is electrically connected to the ground, an electrostatic force is generated by the high voltage supplied to the electrostatic force generating portion, and the space portion between the mass portion and the electrostatic force generating portion is vibrated in the vertical direction by the electrostatic force.

The electrostatic force generating portion includes an electrode portion to which a high voltage signal is supplied, and a dielectric layer having a predetermined permittivity.

Also, the high voltage signal supplied to the electrode unit is supplied in accordance with a predetermined charge / discharge frequency so as to have a charging period and a discharging period.

The electrode unit includes a first electrode unit receiving a first high voltage signal and a second electrode unit receiving a second high voltage signal different from the first high voltage signal, The frequency of the first and second high voltage signals is set so that the beat frequency is within a range of 250 Hz to generate a beating electrostatic force.

The first and second electrode portions may be arranged in the dielectric layer in the vertical direction or spaced apart from each other in the left and right direction. When the first and second electrode portions are vertically spaced from each other, Vertical spacing distance is 1 占 퐉 to 3,000 占 퐉.

The dielectric layer has a thickness of 1 to 3,000 μm and a dielectric constant of 1.5 to 30. The dielectric layer is made of at least one of polyimide, silicon, polyurethane, PDMS (polydimethylsiloxane), PET (polyethylene terephthalate) .

Further, in order to adjust the magnitude of the electrostatic force, the air gap between the mass portion and the electrostatic force generating portion is 10 mu m to 3,000 mu m.

Further, the direction of the electrostatic force is directed from the electrostatic force generating portion to the mass portion.

According to another aspect of the present invention, there is provided an electrostatic force sensor comprising: an actuator using an electrostatic force; and a base substrate for transmitting vibrations generated by arranging a plurality of actuators using electrostatic force along a predetermined vibration path, And the like.

The base substrate is either a display panel or a flexible display panel that indirectly transmits vibration generated in the actuator using the electrostatic force to the user.

According to the present invention as described above, power consumption can be minimized.

Further, according to the present invention, there is an effect that the vibration of the mass body can be maximized by using the beat frequency and the resonance frequency.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description, serve to further the understanding of the technical idea of the invention, It should not be construed as limited.
FIG. 1 is a view illustrating an actuator having a single electrode according to an embodiment of the present invention,
FIG. 2 is a view showing a mass, a vibration amplifying part, and a mass supporting part according to one embodiment of the present invention,
3 is a view illustrating an actuator including a plurality of electrodes according to an embodiment of the present invention,
4 is a view illustrating an FPCB double-sided substrate according to an embodiment of the present invention,
5 and 6 are views showing a high voltage power supply unit, a charge / discharge signal generator, and an electrode unit according to an embodiment of the present invention,
7 is a diagram for explaining an embodiment for embodying a high voltage power supply unit and a charge / discharge signal generator,
8 is a view illustrating an actuator panel according to an embodiment of the present invention,
Fig. 9 is a detailed view showing the configuration of the FPCB double-sided board of Fig. 4,
10 is a diagram showing a high voltage signal and an optocoupler charge control signal according to the present invention,
11 is a diagram showing a high voltage signal and an optocoupler discharge control signal according to the present invention,
12 is a diagram showing an optocoupler charge control signal discharge control signal according to the present invention,
13 is a diagram showing that an optocoupler charge control signal and a discharge control signal are overlapped in a certain section in comparison with FIG.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims, and the entire structure described in this embodiment is not necessarily essential as the solution means of the present invention. In addition, the description of the prior art and those obvious to those skilled in the art may be omitted, and the description of the omitted components and the function may be sufficiently referred to within the scope of the technical idea of the present invention.

( Electrostatic force  Configuration of Actuator Used And function )

An actuator using an electrostatic force according to an embodiment of the present invention is an invention in which a mass having a certain mass is vibrated by an electrostatic force to indirectly transmit a sense of vibration to a user. In this case, the indirect vibration transmission means that the vibration of the mass is indirectly transmitted to the user's hands along the vibration path of the predetermined actuator, not directly by the user's hand. Hereinafter, an actuator using an electrostatic force according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The vibrating part includes a mass part 100 and an electrostatic force generating part 200 which will be described later. 1, the mass unit 100 includes a mass body 110 having a predetermined mass, a vibration amplification unit 120, and a mass support unit 120. The mass member 110, the vibration amplification unit 120, and the mass support unit 120 are preferably integrally formed of stainless steel. However, materials other than stainless steel may be used depending on the use environment, and they may be separately manufactured and assembled without being integrally manufactured.

As shown in FIG. 2, the mass body 110 has a constant mass, and is preferably implemented as a circular or elliptical shape. However, the mass of the mass may vary depending on the resonance frequency set in relation to the vibration amplifying part, and the shape is not limited to the circular or elliptical shape, but may be embodied in various shapes. In the outer circumferential direction of the mass body 110, a slit groove (or an oscillation amplification unit 120) is formed as shown in FIG. The mass region 110, the vibration amplification portion 120, and the mass support portion 130 are formed integrally with each other by stainless steel as described above as the mass body support portion 130 as described above. Accordingly, the mass body 110 is positioned at the center, the vibration amplification unit 120 having elasticity by the slit groove is formed in the outer peripheral region of the mass body, and the mass- A support portion 130 is provided. Accordingly, the mass body support 130, the vibration amplification unit 120, and the mass body 110 are sequentially arranged at one end in the horizontal direction.

The mass body 110 is not shown in the drawing, but is electrically connected to a ground. That is, in order to generate the electrostatic force 1 shown in FIG. 1, a certain high voltage is supplied to the electrostatic force generating unit 200 and the mass body 110 is electrically connected to the ground. Referring to FIG. 1, the mass body 110 is positioned on the uppermost side and sequentially positioned on the same vertical line in the order of the electrostatic force generating unit 200 and the base substrate 20. At this time, it is preferable that the mass body 110 is located in the central region on the same vertical line. Accordingly, the mass body 110 vibrates in a vertical direction a space (or an air gap region) vertically spaced between the mass body 110 and the electrostatic force generating unit 200 by an electrostatic force. As described above, the user indirectly senses the vibration generated in the mass body 110 by contacting the base substrate 20 with the hand.

Since the vibration amplifying part 120 is formed in the spatial region between the mass body 110 and the mass supporting part 130 and the slit groove 120 is formed in the outer circumferential direction of the mass body 110, And has the elasticity capable of amplifying the vibration of the vibrator 110. The stiffness is preferably 10 < ² > N / m to 5 x 10 < ⁶ > N / m in consideration of the separation distance between the mass body 110 and the electrostatic force generating part 200. [ 2, the slit grooves 120 may be formed of inner slit grooves 121 and outer slit grooves 122 to form a double slit groove in the circumferential direction. The slit grooves 120 may be formed by wire cutting or the like, and a single slit groove or two or more slit grooves may be formed depending on the elastic modulus. The vibration amplifying part 120 having elasticity is positioned between the mass body 110 and the mass supporting part 130 supporting the mass body so that the vibration amplifying part 120 further amplifies the vibration of the mass body 110 existing in the central area .

Although the vibration amplifying unit 120 is described as being mounted in a substantially horizontal direction with respect to the mass body 110, it may be provided in a direction perpendicular to the mass body 110. That is, although not shown in the drawing, the vibration amplifying unit 120 may be embodied as an elastic means such as a spring, and may be provided in a vertical direction in a space between the mass 110 and the electrostatic force generating unit 200.

1, the spacing part 300 is disposed on the lower side of the mass body supporting part 130, and the space part 300 includes the mass body 110 and the electrostatic force generating part 200 in the inner side area . That is, the spacing portion 300 is preferably disposed in the outer circumferential direction of the mass body 110 and the electrostatic force generating portion 200. The height of the gap portion 300 may vary depending on the vertical spacing distance between the mass body 110 and the electrostatic force generating portion 200 or the region of the air gap. That is, for example, when the vertical spacing distance is further away, the height of the spacing portion 300 becomes higher, and when the vertical spacing distance is further lowered, the height of the spacing portion 300 becomes lower. However, the height of the gap portion 300 may vary depending on the vertical spacing distance and the area of the air gap as described above.

The air gap 30 is related to the strength (or size) of the electrostatic force. The area or area of the air gap 30 is a distance between the mass body 110 and the electrostatic force generating part 200, ≪ / RTI > The air gap 30 is a capacitance between the mass body 110 and the electrostatic force generating part 200. The greater the capacitance of the air gap 30, the stronger the electrostatic force becomes. Therefore, in the present invention, the vertical distance (or air gap) between the mass body 110 and the electrostatic force generating unit 200 is set to 10 to 3,000 mu m . The formula relating to the intensity of the above-described electrostatic force can be referred to within the scope of the technical idea of the present invention, and the intensity of the electrostatic force is proportional to the area of the air gap or the capacitance of the capacitance.

The electrostatic force generating unit 200 includes an electrode unit 210 and a dielectric layer 220. The electrode unit 210 may be implemented as a single electrode unit as shown in FIG. 1 and a plurality of electrode units as shown in FIG. In the case of a plurality of electrode units, the vibration frequency is increased by the beat frequency (or the intensity of the electrostatic force is increased), and mixed vibrations are generated by the beat frequency and the carrier frequency.

First, the electrostatic force generating unit 200 as shown in FIG. 1 secures an air gap and a vibration region of the mass body 110 vertically below the mass body 110 based on that the mass body 110 is positioned on the uppermost side And is spaced a certain distance. The electrostatic force generating unit 200 includes the electrode unit 210 and the dielectric layer 220 and the electrode unit 210 is included in the dielectric layer 220. The vertical distance from the electrode part 210 to the upper surface of the dielectric layer has a value between approximately 1 mu m and 3,000 mu m and the dielectric constant of the dielectric layer is approximately 1.5 to approximately 30 in terms of the strength of the electrostatic force. Preferably, the vertical distance from the electrode part 210 to the upper surface of the dielectric layer is 37 占 퐉 or 55 占 퐉, and the total thickness of the dielectric layer 220 is 300 占 퐉. It is also preferable that the dielectric constant is 3.5. It is also preferable that a vertical separation distance between the first electrode and the second electrode to be described later is approximately 45 mu m. The preferred numerical values described above are applied in consideration of the strength of the electrostatic force determined by the vertical spacing distance and permittivity between the respective parts.

The dielectric layer 220 may be formed of at least one material selected from the group consisting of polyimide, silicon, polyurethane, polymer composite, PDMS (Polydimethylsiloxane), and PET (polyethylene terephthalate).

The high voltage signal supplied to the single electrode unit 210 as shown in FIG. 1 is a signal having a specific frequency f and a high voltage magnitude when a high voltage signal supplied to the first electrode unit of FIG. 4 is partially referred to. At this time, it is preferable that the specific frequency f of the high voltage signal has a frequency within approximately 500 Hz. The voltage of the high voltage signal is preferably about 0.5 kV to 4 kV. However, the high voltage signal is not limited to the shape of the pulse wave, the cosine wave, the sine wave, or the like, and can be applied to any high voltage signal having a certain frequency other than the DC component. However, preferably, a signal such as a cosine wave or a sine wave rather than a pulse wave can significantly reduce the generation of vibration noise. The reason why the high voltage signal supplied to the electrode unit has a predetermined frequency is that the charge of the electrode unit is charged and discharged, and the details will be described later.

At this time, in case of a single electrode, a resonance frequency can be used to maximize the intensity of vibration. The resonance frequency is inversely proportional to the square root of the weight of the above-mentioned mass and proportional to the square root of the stiffness of the vibration amplification part. Therefore, the resonance frequency value can be derived from the design value of the weight of the mass and the spring coefficient, and the resonance frequency value can be applied to the frequency (f) of the high voltage signal supplied to the electrode unit 210, have. That is, when the applied frequency f is set to the resonance frequency as shown in the following Equation 1, the magnitude of the vibration force can be further amplified.

The electrostatic force generating unit 200 described above can be embodied as an FPCB electrode shielded by a polyimide film (dielectric layer) (see FIG. 4). When a plurality of electrode units are formed as described later, Can be embodied as a double-sided FPCB electrode shielded with a mid film (dielectric layer). That is, the first electrode unit 211 is implemented on the front surface of FIG. 4, the second electrode unit 212 is implemented on the rear surface, and the electrode unit is shielded by the polyimide film.

The base substrate 20 or the actuator panel 40 is disposed at the bottom (or bottom) of the FPCB double-sided substrate (approximately 300 μm thick) of FIG. 4 with reference to FIG. The actuator panel 40 may be an LCD module as an example. Hereinafter, the base substrate 20 will be described as an example. A bottom shield reinforcing plate 50 is provided on the base substrate 20. The dielectric layer 220 is composed of an upper (or upper) shielding PI film 221, a stop shielding PI film 222, and a lower (or lower) shielding PI film 223, which are sequentially laminated or attached . Here, the PI film is described as an example, and a variety of films having a permittivity can be applied. The first electrode portion 211 is disposed on the upper shielding PI film 221 and the second electrode portion 212 is disposed on the lower shielding PI film 223. [ However, when a plurality of electrode portions are arranged in the left-right direction, the electrode portions are arranged in the left-right direction in the PI film. The PI film 222 for interrupting shielding is provided in the vertical spacing distance space between the first electrode unit 211 and the second electrode unit 212. The PI film 222 for interrupting shielding has a thickness equal to a vertical separation distance between the first electrode portion 211 and the second electrode portion 212, and is preferably about 45 占 퐉.

As shown in FIG. 3, when a plurality of electrode units 210 are provided, for example, by supplying different frequencies to a plurality of electrodes, the intensity of vibration can be increased by using the beat frequency, It is also possible to increase the intensity of vibration by supplying the same frequency to the electrode portions (the first electrode portion and the second electrode portion). The number of the electrodes may be two or more in the left-right direction or may be stacked with a certain distance in the vertical direction.

3, the first electrode part 211 and the second electrode part 212 included in the dielectric layer 220 are arranged to be spaced apart from each other in the vertical direction. As the coupling capacitance is generated between the plurality of insulated electrodes, the intensity of the electrostatic force shown in the following Equation 1 can be adjusted. In addition, when the same frequency is supplied to a plurality of electrodes, the magnitude of the voltage applied by Equation (1) is increased by overlapping, so that the magnitude of the vibration power can be increased by amplifying the electrostatic force.

, (여기서, ε: 유전율)

, (Where?: Dielectric constant)

4, the first electrode unit 211 is supplied with a cosine wave corresponding to the first frequency f1 and the second electrode unit 212 is supplied with a second frequency f1 f2) are supplied and superimposed on each other, beat frequencies suitable for various tactile stimuli are generated as shown in Equation (2) below. The intensity of the electrostatic force is increased by the superposition of the electric field, and the magnitude of the vibration force is amplified by adjusting the carrier frequency ((f1 + f2) / 2) to the resonance frequency.

Here, the beat frequency is the absolute value of f1-f2, and the carrier frequency is (f1 + f2) / 2.

In this case, when the carrier frequency is set to the resonance frequency in Equation (2) above, the magnitude of the vibration force can be further amplified.

However, the high voltage signal supplied to each of the electrode units is not limited to the shape of the pulse wave, the cosine wave, the sine wave, the triangle wave and the like, and can be applied to any high voltage signal having a certain frequency other than the DC component. However, preferably, a signal such as a cosine wave or a sine wave rather than a pulse wave can significantly reduce the generation of vibration noise. The reason why the high voltage signal supplied to the electrode unit has a predetermined frequency is that the charge of the electrode unit is charged and discharged, and the details will be described later.

In FIG. 3, the first electrode units 211 are positioned above the second electrode units 212, but they may be arranged in different positions as needed. In order to generate a beat frequency, a plurality of electrode portions may be arranged vertically away from each other as shown in Fig. 3. Although not shown in the drawing, a plurality of electrode portions may be arranged so as to be spaced apart from each other in the horizontal direction. However, in the embodiment of the present invention, the plurality of electrode portions are arranged in the vertical direction, but the arrangement in the horizontal direction is also within the technical scope of the present invention.

The vertical separation distance between the first electrode portion 211 and the second electrode portion 212 is related to the magnitude of the amplitude of the beat frequency. That is, the vertical separation distance between the first electrode unit 211 and the second electrode unit 212 is related to the coupling capacitance value between the two electrodes. As the coupling capacitance value increases, the amplitude of the beat frequency increases, The intensity of the magnetic field is increased. In an embodiment of the present invention, it is preferable that the perpendicular distance between the first electrode unit 211 and the second electrode unit 212 is set to a value between 1 mu m and 3,000 mu m considering the strength of the electrostatic force. On the other hand, the vertical distance from the electrode part 210 to the upper surface of the dielectric layer has a value of approximately 1 mu m to 3,000 mu m, and the dielectric constant of the dielectric layer is approximately 1.5 to 30 in relation to the strength of the electrostatic force. Preferably, the vertical distance from the electrode part 210 to the upper surface of the dielectric layer is 37 占 퐉 or 55 占 퐉, and the total thickness of the dielectric layer 220 is 300 占 퐉. It is also preferable that the dielectric constant is 3.5. It is also preferable that the vertical separation distance between the first electrode and the second electrode is approximately 45 mu m. The preferred numerical values described above are applied in consideration of the strength of the electrostatic force determined by the vertical spacing distance and permittivity between the respective parts.

The above-described mathematical expression relating to the beat frequency can be referred to within a range not departing from the technical idea of the present invention, and the amplitude of the beat frequency is proportional to the coupling capacitance value.

In the case of generating a beat frequency using a plurality of electrode portions, the intensity of the electrostatic force may be increased as compared with the case of using a single electrode portion, and the beat frequency (absolute value of f1-f2 in FIG. 4) and the carrier frequency f1 + f2) / 2) can be generated by various vibration patterns.

The high voltage signals supplied to the first electrode unit 211 and the second electrode unit 212 to generate the beat frequency are supplied to the respective electrode units with high voltage signals having different frequencies f1 and f2 as shown in FIG. do. That is, a high voltage signal having a frequency of f1 is supplied to the first electrode unit 211, and a high voltage signal having a frequency of f2 is supplied to the second electrode unit 212. [ At this time, it is preferable that f1, f2, and the carrier frequency ((f1 + f2) / 2) have values within 500 Hz, and f1 and f2 are different frequencies for generating the beat frequency. It is also preferable that the beat frequency (absolute value of f1-f2) has a value within 250 Hz. Therefore, various beating vibration patterns can be generated by changing the frequency of f1 and f2 according to the operating environment of the actuator.

At this time, in case of a plurality of electrodes, a resonance frequency can be used to maximize the intensity of vibration. The resonance frequency is inversely proportional to the mass of the above-mentioned mass and is proportional to the spring coefficient (or spring constant) of the vibration amplification part. Therefore, it is possible to derive the resonance frequency value through the weight of the mass and the design value of the spring coefficient. By matching the carrier frequency ((f1 + f2) / 2) to the resonance frequency, And secondly, the intensity of vibration can be further maximized.

The high voltage power supply unit and the charge / discharge signal generation unit are provided corresponding to the number of the electrode units 210. However, in the embodiment of the present invention shown in FIGS. 5 and 6, two electrode units 210 are provided.

The first and second high voltage power supplies 410 and 420 generate a high voltage of the high voltage signal supplied to the first and second electrode units 211 and 212, respectively, and supply the high voltage to the first and second charge and discharge signal generators 510 and 520. That is, the high voltage generated by the first and second high voltage power sources 410 and 420 is a voltage of 3.5 kV as an example of the DC component. However, the magnitude of the voltage is not limited to this, and may have a value between 0.5 kV and 4 kV. The high voltage of the DC component is supplied to the first and second charge and discharge signal generators 510 and 520, respectively.

The first and second charge / discharge signal generators 510 and 520 generate a high voltage signal having a predetermined frequency. That is, the first and second charge / discharge signal generators 510 and 520 generate a cosine wave, which is a high voltage signal having a predetermined frequency, by switching the high voltage of the DC component supplied from the first and second high voltage power sources 410 and 420, respectively. The high-voltage signal has a high frequency and a certain frequency according to the switching (refer to the formula of the high-voltage signal supplied to the first and second electrode units in FIG. 4). However, the frequencies supplied to the respective electrode portions are different from each other by f1 and f2 (frequency f in the case of a single electrode portion), and may be a signal having various frequencies such as a pulse wave, a triangle wave, and a saw tooth wave in addition to a cosine wave.

Referring to the first high voltage signal supplied to the first electrode unit 211 of the first and second electrode units 211 and 212, the first high voltage signal has a voltage magnitude of approximately 3.5 kV and a frequency of f1 . 6, the first charging unit 511 is operated to charge the first electrode unit 211, and during the remaining half period (the discharging period), the first electrode unit 211 is charged. The first discharging unit 512 is operated to discharge the charges charged in the first electrode unit 211. Accordingly, the frequency f1 of the high voltage signal is determined according to the switching operation between the first charging unit 511 and the first discharger 512. [ However, in the above description, only the cases where the charging interval and the discharging interval are 50% are described, but the present invention is not limited to this and can be adjusted according to the use environment. That is, it is possible to make the maximum charging time longer by making the charging section longer, or to shorten the charging section shorter than the maximum charging (i.e., when the maximum charging is 3.5kV, the ratio of the charging / adjustment). By adjusting the ratio of the charging / discharging interval, the maximum high voltage value charged in the electrode portion can be adjusted and the intensity of the electrostatic force can be adjusted accordingly. That is, the higher the value of the high voltage charged, the greater the strength of the electrostatic force, and the lower the value of the high voltage, the lower the strength of the electrostatic force.

As shown in FIG. 7, the first high voltage power supply unit 410 includes a first high voltage power supply unit 410, a first charging unit 511, and a first discharge unit 512. The first high voltage power supply unit 410 includes a high voltage And supplies a high voltage of the DC component to the first optocoupler 511. The first and second optocouplers 511 and 512 are controlled by the optocoupler charge / discharge control signals 720 and 730 of the controller 600.

10 and 11, the first optocoupler 511 is turned on by the optocoupler charge control signal 720 in the charging period of the high voltage signal 710, and the second optocoupler 512 Is turned off by the optocoupler discharge control signal 730. [ The second optocoupler 512 is turned on by the optocoupler discharge control signal 730 and the first optocoupler 511 is turned on by the optocoupler charge control signal 720 in the case of the high voltage signal 720. [ Quot; OFF " The high voltage signal 710 described above has a specific frequency f or f1 and f2 as described above according to the on / off operation of the first and second optocouplers 511 and 512 and is a charge and discharge signal for charging and discharging the electrode portion. Although the high voltage signal 710 having the specific frequency shown in FIGS. 10 and 11 is shown in the form of a triangular wave, the first and second optocouplers 511 and 512 may generate various signals such as a sine wave, a cosine wave, It can be implemented in a waveform shape.

12 and 13 illustrate an optocoupler charge control signal 720 for controlling the first optocoupler 511 and an optocoupler discharge control signal 730 for controlling the second optocoupler 512. 12 shows that there is no signal overlap between the optocoupler charge control signal and the optocoupler discharge control signal. FIG. 13 illustrates an optocoupler charge control signal and an optocoupler discharge control signal to start discharging before the end of the charge period. So that there is an overlapping interval between control signals. By controlling the first and second optocouplers 511 and 512 so as to form the overlap period, it is possible to generate the waveform of the high voltage signal 710 as a sine wave or a gentle waveform close to the cosine wave. The above-described optocoupler can be replaced with an On / Off control element such as a MOSFET.

The second optocoupler 512 is electrically connected to the ground. When the second optocoupler 512 is turned on in the discharge interval, the first electrode unit 211 is electrically connected to the ground, So that the charge charged in the portion 211 is instantaneously discharged. If the charge stored in the first electrode unit 211 is discharged by setting the discharge interval as in the present invention, the high voltage signal remains in the dielectric layer 220 even if the high voltage signal is not supplied with a voltage for a predetermined period by the AC component The charge does not disappear promptly and the electrostatic force is not extinguished so that the vibration of the mass 110 is prevented. Therefore, in the present invention, the charging and discharging periods are set so that the charge remaining in the dielectric layer is quickly discharged, thereby optimizing the vibration of the mass body 110.

Accordingly, the high voltage signal supplied to each electrode part of the present invention has a predetermined frequency (f or f1, f2). In this case, the f frequency is a case in which the electrode unit is one, and in the case of f1 and f2, there are two electrode units for the beat frequency. The f frequency is a frequency at which the user can feel a vibration sensation indirectly by the vibration of the mass body 110 As an example, it means a charge period during the half period and a discharge period during the remaining half period.

In addition, the frequencies f1 and f2 are frequencies supplied to the first and second electrode units 211 and 212, respectively, to generate the beat frequency, and the user feels a sense of vibration of the beat frequency (the absolute value of f1-f2) , the charging and discharging frequencies for the half period of each of the frequencies f1 and f2, and the discharging period for the remaining half cycles. At this time, the charging period and the discharging period may partially overlap to generate a gentle high voltage waveform (see FIG. 13), and the ratio of the charging period to the discharging period may be set to be at least 20 to 80%.

The frequency of f1 and f2 is a frequency supplied to the first and second electrode units 211 and 212 to generate a beat frequency. The user inputs a beat frequency (an absolute value of f1-f2) and a carrier frequency f1 And the average of f2). In each frequency channel, the charging period is the half period of f1, the discharging period is the half period of f2, the charging period is the half period of f2, Discharge interval.

The second high voltage signal supplied to the second electrode unit 212 of the first and second electrode units 211 and 212 has a voltage magnitude of approximately 3.5 kV and a frequency of f2 and the second charging unit 521 and the second The operation of the discharging part 522 is to be replaced with the description of the operations of the first charging part 511 and the first discharging part 512 described above.

The control unit 600 may be implemented by a microcontroller, an analog circuit, or a digital circuit. At this time, the above-mentioned optocoupler is composed of an opto-diode and an infrared LED, and the control unit 600 supplies a control signal to the infrared LED to operate the optocoupler. Accordingly, the control unit 600 controls the first and second optocouplers 511 and 511 according to the frequency f or f1 and f2 of the high voltage signal supplied to the single electrode unit 210 or the first and second electrode units 211 and 212, And controls the coupler 512 for switching. The above-described optocoupler can be further referred to as a technical specification without departing from the technical idea of the present invention.

On the other hand, when the resonance frequency is used, the control unit 600 controls the above-described f to be a resonance frequency, or controls the charger unit and the discharge unit such that the carrier frequency of the beat frequency is a resonance frequency.

(Configuration of Actuator Panel And function )

The actuator panel further includes a base substrate 20 in addition to the above-described actuator. The base substrate 20 is a contact portion to which a user touches to receive a sense of vibration, and the user indirectly receives the sense of vibration by touching one area (contact area) of the base substrate 20 with a finger. The base substrate 20 is disposed on the lowermost surface to support the spacing portion 300 and the electrostatic force generating portion 200 as shown in Figs. That is, the base substrate 20 may be an LCD panel, a reinforced plastic (for example, fiberglass reinforced plastics (Peek, Poly Carbonate or the like), a flexible display panel, The actuator 10 may be attached to one surface of the base 20 to transmit vibration to the user indirectly. However, the actuator 10 may further include additional components as needed when the actuator 10 is attached to the base substrate 20. For example, A double-sided tape or the like for attaching the base material 20 to the base material 20.

The actuator panel 40 may be provided with a plurality of actuators 10 as shown in Fig. 8 to indirectly provide a sense of vibration to the entire region of the base substrate 20. [ 8, the first actuator 10 and the second actuator 10 'are disposed on one surface of the base substrate in the housing 3, and the first actuator 10 and the second actuator 10' By operating the actuator, the sense of vibration can be indirectly transmitted to the user. At this time, the controller of the actuator panel 40 recognizes the detection of the contact area of the user's finger, and sends a control signal to the controller 600 of the actuator to generate a vibration in the actuator corresponding to the contact area, Vibration can be generated.

On the other hand, the control unit of the actuator panel 40 can change the vibration frequency by transmitting a control signal for changing the frequency (f or f1 and f2) of the high voltage signal to the control unit 600 of the actuator.

(Vibration transmission path and Electrostatic  direction)

In the present invention, an indirect path is used to give a sense of vibration to the contact area of the user. That is, the vibrations generated in the mass body 110 are not directly contacted to the mass body 110 where vibrations actually occur, but the vibrations generated by the vibration amplification part 120, the mass body support part 130, the gap part 300, (20) to indirectly convey the feeling to the user.

The configuration and functions of the above-described components have been described separately from each other for convenience of description, and any of the components and functions may be integrated with other components or may be further subdivided as needed.

On the other hand, the electrostatic force is generated so as to face the grounded mass body 110 by the configuration of the actuator 10 described above. That is, as shown in FIGS. 1 and 3, the electrostatic force is generated so as to face the grounded mass body 110 at the electrode unit 210 to which the high voltage signal is supplied.

Although the present invention has been described with reference to the embodiment thereof, the present invention is not limited thereto, and various modifications and applications are possible. In other words, those skilled in the art can easily understand that many variations are possible without departing from the gist of the present invention. In the following description, well-known functions or constructions relating to the present invention as well as specific combinations of the components of the present invention with respect to the present invention will be described in detail with reference to the accompanying drawings. something to do.

1: Electrostatic force
2: user's finger
3: Housing
10, 10 ': Actuator using electrostatic force
20: base substrate
30: air gap
40: Actuator panel
50: reinforcing plate for bottom shield
100: mass part
110: mass
120: a vibration amplifying part (or a slit groove)
121: inner slit groove
122: outer slit groove
130: mass support
200: Electrostatic force generator
210:
211: first electrode portion
212: second electrode portion
220: dielectric layer
221: PI film for upper shielding
222: PI film for interruption shielding
223: PI film for lower sealing
300: Spacing (or spacer)
410: first high voltage power supply unit
420: a second high voltage power source
510: a first charge / discharge signal generating unit
511:
512: first discharge unit
520: second charge /
521:
522: second discharging part
600:
710: High voltage signal
720: Optocoupler charge control signal
730: Optocoupler discharge control signal

Claims (28)

A mass body which is electrically connected to the ground and is elastically vibrated by the electrostatic force by being elastically supported in the circumferential direction,
And an electrostatic force generating part having a dielectric layer having a predetermined permittivity and electrode parts provided in the dielectric layer, the electrostatic force generating part being spaced apart at a predetermined distance so as to form an air gap at a position corresponding to the mass,
Wherein the air gap is a capacitance between the mass body and the electrostatic force generating unit,
The mass body elastically vibrates between spaces formed with the air gap by the electrostatic force generated by the grounded mass and the electrode portions supplied with a high voltage,
As the mass is electrically connected to the ground, an electrostatic force is generated by the high voltage supplied to the electrostatic force generating unit,
Wherein the mass is oscillated in a vertical direction in a space separated by the electrostatic force between the mass body and the electrostatic force generating unit.
The method according to claim 1,
Wherein the mass body and the electrostatic force generating unit are sequentially arranged on the same vertical line in a vertical direction so that vibrations generated in the mass body are indirectly transmitted to a user along a vibration path.
3. The method of claim 2,
Wherein a contact area with which the user contacts is formed on the lower surface area of the electrostatic force generating part on the same vertical line with respect to the mass body so that the vibration of the mass body is indirectly transferred to the contact area.
The method according to claim 1,
A high voltage power supply for generating a high voltage supplied to the electrostatic force generating unit,
And a charging / discharging signal generating unit for charging / discharging the electrostatic force generating unit on the high voltage signal path supplied from the high voltage power supply unit to the electrostatic force generating unit.
5. The method of claim 4,
Wherein the charge /
A high voltage signal supplied to the electrostatic force generating unit is divided into a charge section and a discharge section,
Wherein the ratio of the charging period to the discharging period is set to be at least 20 to 80% so that the charge is discharged, so that the vibration of the mass is made within a predetermined range.
The method according to claim 1,
Further comprising a vibration amplification part having a slit groove formed in the circumferential direction so as to amplify the vibration of the mass by elasticity.
The method according to claim 6,
Further comprising a mass support unit for supporting the mass body in a circumferential direction when the vibration amplification unit is disposed in a horizontal direction,
Wherein the vibration amplifying part is disposed between the mass supporting part and the mass body by sequentially arranging the mass supporting part, the vibration amplifying part, and the mass body with respect to the horizontal direction.
8. The method of claim 7,
The mass support, the vibration amplification unit, and the mass body are integrally formed,
Wherein the vibration amplifying part generates elasticity by forming a slit groove in a circumferential direction in a space region between the mass body supporting part and the mass body.
9. The method of claim 8,
Wherein the slit groove comprises an inner slit groove and an outer slit groove.
9. The method of claim 8,
The vibration amplifying unit includes:
And the stiffness is set to a value between 1 x 10 ² N / m and 5 x 10 ⁶ N / m.
The method according to claim 6,
Wherein when the vibration amplification unit is disposed in the vertical direction, the vibration amplification unit amplifies the vibration by supporting the mass body from below.
The method according to claim 6,
And an interval portion disposed at a predetermined height on a circumferential outer side of the mass body and the electrostatic force generating portion to provide a predetermined spacing distance between the mass body and the electrostatic force generating portion.
13. The method of claim 12,
Further comprising a mass support portion disposed on the gap portion to support the mass member in a circumferential direction when the vibration amplification portion is disposed in the horizontal direction,
The mass support unit, the vibration amplification unit, and the mass body are integrally formed, and are sequentially disposed with respect to the horizontal direction,
Wherein the vibration amplifying part generates elasticity by forming a slit groove in a circumferential direction in a space region between the mass body supporting part and the mass body.
14. The method of claim 13,
Wherein the high voltage signal supplied to the electrostatic force generating unit is a frequency corresponding to the resonance frequency of the mass body and the vibration amplifying unit.
14. The method of claim 13,
Wherein the frequency of the high voltage signal supplied to the electrostatic force generating unit is within a range of 500 Hz and is divided into a charging period and a discharging period.
13. The method of claim 12,
And a base substrate for transferring the vibration indirectly to a user by transmitting vibration generated in the mass body along a predetermined vibration path,
Wherein the vibration path is a path through which vibration is transmitted in the order of the mass body, the vibration amplifying part, the gap part, and the base material.
delete delete The method according to claim 1,
Wherein the high voltage signal supplied to the electrode unit is supplied to the electrode unit according to a predetermined charge / discharge frequency so as to have a charge interval and a discharge interval.
The method according to claim 1,
The electrode unit includes:
A first electrode portion to which a first high voltage signal is supplied, and
And a second electrode unit receiving a second high voltage signal different from the first high voltage signal,
The frequency of the first and second high voltage signals has a range of 500 Hz or less depending on the charging / discharging frequency so as to have a charging interval and a discharging interval,
Wherein the frequency of the first and second high voltage signals is set to have a beat frequency within a range of 250 Hz to generate a beating electrostatic force.
The method according to claim 1,
The electrode unit includes:
The first and second electrode units receiving the same high voltage signal,
The magnitudes of the voltages of the plurality of high-voltage signals applied to the first and second electrode units overlap each other, thereby increasing the strength of the electrostatic force,
Wherein the frequency of the high voltage signal is within a range of 500 Hz and is divided into a charge section and a discharge section.
22. The method according to claim 20 or 21,
The first and second electrode units may include:
Wherein the dielectric layers are vertically spaced apart from each other in the dielectric layer,
In the case of being vertically spaced,
Wherein the perpendicular spacing distance between the first and second electrode portions is 1 mu m to 3,000 mu m in order to adjust amplitude magnitude of the beat frequency or intensity of the electrostatic force.
The method according to claim 1,
The thickness of the dielectric layer is 1 mu m to 3,000 mu m,
The dielectric constant is 1.5 to 30,
Wherein the material of the dielectric layer is at least one of polyimide, silicon, polyurethane, PDMS (polydimethylsiloxane), PET (polyethylene terephthalate), and a polymer composite.
The method according to claim 1,
Wherein an air gap between the mass body and the electrostatic force generating unit is 10 mu m to 3,000 mu m for controlling the magnitude of the electrostatic force.
The method according to claim 1,
Wherein the direction of the electrostatic force is directed to the mass body in the electrostatic force generating portion.
An actuator using the electrostatic force according to claim 1,
And a base substrate for transmitting the vibration to a user by transmitting a vibration generated by arranging a plurality of actuators using the electrostatic force along a predetermined vibration path.
27. The method of claim 26,
The base substrate may include:
Wherein the actuator panel is one of a display panel or a flexible display panel that indirectly transmits vibration generated in the actuator using the electrostatic force to the user.
27. The method of claim 26,
The electrostatic force generating unit according to claim 1,
A lower reinforcing plate provided on the upper portion of the base substrate,
A lower dielectric layer provided on the reinforcing plate,
A second electrode portion provided in the lower dielectric layer,
An intermediate dielectric layer provided on the second electrode portion,
An upper dielectric layer provided on the intermediate dielectric layer, and
And a first electrode part provided in the upper dielectric layer.

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