KR20220065911A - Actuator using bi-directional electrostatic and electromagnetic - Google Patents

Abstract

The present invention relates to an actuator using bidirectional electrostatic force and electromagnetic force and, more specifically, to an actuator using bidirectional electrostatic force and electromagnetic force, which generates bidirectional electrostatic force and electromagnetic force in order to amplify-vibrate vibration of a vibrating body. To this end, an actuator using bidirectional electrostatic force and electromagnetic force comprises: an upper electrostatic force generation unit generating first electrostatic force due to application of a first high voltage signal; a lower electrostatic force generation unit generating second electrostatic force due to application of a second high voltage signal having a phase difference with the first high voltage signal; an upper electromagnetic force generation unit generating first electromagnetic force by application of a low voltage signal; a lower electromagnetic force generation unit generating second electromagnetic force due to application of a second low voltage signal having a phase difference with the first low voltage signal; a high voltage generation unit generating and supplying a predetermined alternating current high voltage; and a high voltage signal rectification supply unit rectifying an alternating current high voltage signal supplied from the high voltage generation unit to supply a first high voltage signal to the upper electrostatic force generation unit for a half cycle, and to supply a second high voltage signal to the lower electrostatic force generation unit for the remaining half cycle. The present invention can further increase the amplitude of the vibrating body.

Description

Actuator using bi-directional electrostatic and electromagnetic force

The present invention relates to an actuator using bidirectional electrostatic force and electromagnetic force, and more particularly, to an actuator using bidirectional electrostatic force and electromagnetic force that generates bidirectional electrostatic force and electromagnetic force to amplify and vibrate the vibration of a vibrating body.

The actuator using the unidirectional electrostatic force described in the prior patent literature (Republic of Korea Patent Publication No. 10-1861620, Republic of Korea Patent Publication No. 10-1917614) uses the unidirectional electrostatic force (especially by using the resonance frequency and the beat frequency). As shown in FIG. 6 , not only the vibration width of the vibrating body is small, but also a higher high voltage must be applied to increase the vibration width, and in particular, a high voltage of at least 1.5 kV must be applied. As the magnitude of the high voltage of the actuator increases, the complexity of the circuit and the difficulty of being applied to the device in which the actuator is mounted have problems.

Republic of Korea Patent Publication No. 10-1861620 Republic of Korea Patent Publication No. 10-1917614 Japanese publication JP 2011-206634 Republic of Korea Patent Publication No. 10-1549494 Japanese publication JP 07132598 Republic of Korea Publication 10-2016-0069752 “Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations”, WM van Spengen, J. Micromech. Microeng. 22 (2012) 074001 (2012.6.22.)

Accordingly, the present invention has been created to solve the above-described problems, and it is an object of the present invention to provide a larger amplitude even under a lower high voltage than in the prior art by providing a bidirectional electrostatic force and an electromagnetic force.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

The above-described object of the present invention is to generate an upper electrostatic force generating unit generating a first electrostatic force by application of a first high voltage signal, and generating a second electrostatic force by applying a second high voltage signal having a phase difference from the first high voltage signal. A lower electrostatic force generator, an upper electromagnetic force generator that generates a first electromagnetic force by application of the first low voltage signal, and a lower electromagnetic force generator that generates a second electromagnetic force by application of a second low voltage signal having a phase difference from the first low voltage signal A high voltage generator generating and supplying a preset AC high voltage signal, and rectifying the AC high voltage signal supplied from the high voltage generator to supply the first high voltage signal to the upper electrostatic force generator for half a cycle, and a lower electrostatic force generator for the other half cycle It can be achieved by providing an actuator using a bidirectional electrostatic force and electromagnetic force, characterized in that it includes a high voltage signal rectification supply for supplying a second high voltage signal to the.

In addition, the first high voltage signal and the second high voltage signal are applied to have a phase difference of 180 degrees, the first low voltage signal and the second low voltage signal are applied to have a phase difference of 180 degrees, the first high voltage signal and the first low voltage signal; The second high voltage signal and the second low voltage signal are applied in phase synchronization with each other.

In addition, the first high voltage signal and the low voltage signal are applied during a half cycle, and the second high voltage signal and the low voltage signal are applied during the remaining half cycle when the first high voltage signal and the first low voltage signal are not applied.

In addition, the first electrostatic force and the first electromagnetic force are generated for a half cycle, thereby pulling the vibration generating unit upward to provide an amplified elastic vibration force, and by generating the second electrostatic force and the second electromagnetic force during the remaining half cycle, the vibration generating unit moves downward An elastic vibration force amplified by pulling is provided, and a bidirectional electrostatic force is generated by the first and second electrostatic forces, and a bidirectional electromagnetic force is generated by the first and second electromagnetic forces.

In addition, when a high voltage signal is applied to any one of the electrostatic force generating units during a half cycle, the order of discharging the charged charges to the other electrostatic force generating unit is cross-repeated.

In addition, the high voltage signal rectification supply unit supplies the first high voltage signal to the upper electrostatic force generating unit for a half cycle by passing only a half cycle signal among the AC high voltage signals supplied from the high voltage generating unit, and discharging the charge charged to the upper electrostatic force generating unit during the other half cycle The second high voltage signal is supplied to the lower electrostatic force generator for the remaining half cycle by passing only the remaining half-cycle signals among the AC high voltage signals supplied from the upper high voltage signal rectification supply unit and the high voltage generator, and during the half cycle, the charge charged in the lower electrostatic force generator is transferred. and a lower high voltage signal rectifying supply for discharging.

In addition, the upper high voltage signal rectifying supply unit includes a first diode unit arranged in series with respect to the high voltage generating unit to pass only a half-cycle signal among the AC high voltage signals supplied from the high voltage generating unit, and the charge charged in the upper electrostatic force generating unit during the remaining half cycle is grounded. and a first discharge resistor disposed in parallel with the upper electrostatic force generating unit so as to be discharged to

The lower high voltage signal rectification supply unit includes a second diode unit arranged in series with respect to the high voltage generating unit to pass only the remaining half-cycle signals among the AC high voltage signals supplied from the high voltage generating unit, and the charge charged in the lower electrostatic force generating unit during the half cycle is discharged to the ground and a second discharge resistor arranged in parallel with the lower electrostatic force generating unit.

In addition, the upper high voltage signal rectification supply unit is switched on so that the electric charge charged in the upper electrostatic force generating unit is discharged to the ground during the remaining half cycle, and is switched OFF during the half cycle, and further includes a first discharge switch unit arranged in parallel with the upper electrostatic force generating unit and

The lower high voltage signal rectification supply unit is switched on so that the electric charge charged in the lower electrostatic force generator is discharged to the ground during a half cycle, is switched off during the other half cycle, and further includes a second discharge switch arranged in parallel with the upper electrostatic force generator.

In addition, it further includes a vibration generator for generating vibration according to the generation of the first and second electrostatic force and the first and second electromagnetic force,

The vibration generator includes a mass part and a magnet part inserted and fixed inside the mass part to generate first and second electromagnetic forces according to the application of the first and second low voltage signals.

In addition, currents of the first low voltage signal and the second low voltage signal are applied in opposite directions to generate first and second electromagnetic forces together with the magnet unit.

According to the present invention as described above, by providing the electrostatic force and the electromagnetic force in both directions, there is an effect that can provide a larger amplitude of the vibrating body even under a high voltage lower than in the prior art.

The following drawings attached to the present specification illustrate a preferred embodiment of the present invention, and serve to further understand the technical spirit of the present invention together with the detailed description of the present invention, so the present invention is limited to the matters described in those drawings It should not be construed as being limited.
1 is a diagram schematically showing the configuration of an actuator using a bidirectional electrostatic force and an electromagnetic force according to an embodiment of the present invention;
2 is a view showing a lower electrostatic force generating unit and a lower electromagnetic force generating unit according to an embodiment of the present invention;
3 is a view showing first and second AC high voltages applied to an upper electrode part of an upper electrostatic force generator and a lower electrode part of a lower electrostatic force generator, respectively, according to an embodiment of the present invention;
4 is a diagram schematically showing a drive circuit for generating first and second AC high voltages according to a first embodiment of the present invention;
5(a) and 5(b) are diagrams showing the applied signal and vibration width of an actuator using a conventional unidirectional electrostatic force, and FIGS. 5(c) and 5(d) are diagrams according to an embodiment of the present invention. It is a diagram showing the applied signal and the vibration width of the actuator using the bidirectional electrostatic force,
6 is a view showing the vibration width and acceleration force of a bidirectional electrostatic force actuator and a conventional unidirectional electrostatic force actuator according to an embodiment of the present invention;
7 shows signals applied to the electrostatic force upper electrode part, the electrostatic force lower electrode part, the electromagnetic force upper electrode part, and the electromagnetic force lower electrode part according to an embodiment of the present invention;
8 is a diagram schematically illustrating a drive circuit for generating first and second AC high voltages according to a second embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, one embodiment described below does not unreasonably limit the content of the present invention described in the claims, and it cannot be said that the entire configuration described in the present embodiment is essential as a solution for the present invention. In addition, descriptions of the prior art and matters obvious to those skilled in the art may be omitted, and the description of the omitted components (methods) and functions may be sufficiently referenced within the scope not departing from the technical spirit of the present invention.

The actuator 10 using the bidirectional electrostatic force and electromagnetic force according to an embodiment of the present invention is an actuator that further amplifies elastic vibration by providing the bidirectional electrostatic force and electromagnetic force to the vibrating unit 310 elastically vibrating in the vertical direction. In this case, bidirectional means that the directions of one electrostatic force and the other electrostatic force are opposite to each other, and the directions of one electromagnetic force and the other electromagnetic force are opposite to each other. Therefore, the direction of one electrostatic force and the electromagnetic force is the same, and the direction of the other electrostatic force and the direction of the electromagnetic force is the same. Hereinafter, an actuator 10 using a bidirectional electrostatic force and an electromagnetic force according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIGS. 1, 2 and , the upper electrostatic force generating unit 100, the upper electromagnetic force generating unit 700, the upper spacer 200, the vibration generating unit 300, the lower spacer 400, the lower electrostatic force It includes a generating unit 500 and a lower electromagnetic force generating unit 800 . In addition, as shown in FIG. 4 , a high voltage generator 610 generating a high voltage signal applied to the electrostatic force generator 100 and 500 , a controller 620 , an upper electrode high voltage signal generator 630 , and a lower electrode high voltage signal are generated Part 640 includes rules. In addition, as shown in FIG. 7 , an upper electrode low voltage signal generator 650 and a lower electrode low voltage signal generator 660 are included.

First, referring to FIG. 1 , an upper electrostatic force generator 100 , an upper electromagnetic force generator 700 , a lower electrostatic force generator 500 , and a lower electromagnetic force generator 800 are disposed inside the base substrates 11 and 12 . do. In the space between the upper electrostatic force generating unit 100 and the lower electrostatic force generating unit 500 or the upper electromagnetic force generating unit 700 and the lower electromagnetic force generating unit 800, the mass unit 310 is disposed to generate bidirectional electrostatic force and electromagnetic force. Accordingly, the mass part 310 vibrates up and down. At this time, the upper electrostatic force generating unit 100 generates an upper electrostatic force _Fe1 based on the mass part 310 , and the upper electromagnetic force generating unit 700 is an upper electrostatic force generating unit 700 based on the mass part 310 . (F _m1 ) is generated. The lower electrostatic force generating unit 500 generates an electrostatic force F _e2 in a downward direction based on the mass part 310 , and the lower electrostatic force generating unit 800 is an electromagnetic force F in the lower direction based on the mass part 310 . _m2 ) is generated.

Therefore, when the mass part 310 elastically vibrates in the upward direction, the electrostatic force F _e1 and the electromagnetic force F _m1 in the upward direction are provided to further amplify the elastic vibration of the mass part 310 in the upward direction, and the mass part When the 310 elastically vibrates in the downward direction, the elastic vibration of the mass part 310 is further amplified in the downward direction by providing an electrostatic force F _e2 and an electromagnetic force F _m2 in the downward direction.

The upper electrostatic force generating unit 100 includes an electrostatic force upper electrode unit 110 and an upper insulating film unit 120 . The electrostatic force upper electrode part 110 is included in the upper insulating film part 120 . The upper electrostatic force generating unit 100 is disposed in an upper direction with respect to the mass unit 310 . In addition, the lower electrostatic force generating unit 500 corresponding to the upper electrostatic force generating unit 100 includes an electrostatic force lower electrode unit 510 and a lower insulating film unit 520 . The electrostatic force lower electrode part 510 is included in the lower insulating film part 520 . The lower electrostatic force generating unit 500 is disposed in the lower direction with respect to the mass unit 310 .

The upper electromagnetic force generating unit 700 includes an electromagnetic force upper electrode unit 710 . The electromagnetic force upper electrode part 710 is included in the upper insulating film part 120 and is located above the electrostatic force upper electrode part 110 with reference to FIG. 1 . In addition, the lower electromagnetic force generating unit 800 includes an electromagnetic force lower electrode unit 810 . The electromagnetic force lower electrode part 810 is included in the lower insulating film part 520 and is located below the electrostatic force lower electrode part 110 with reference to FIG. 1 .

Meanwhile, the upper electrostatic force generating unit 100 and the upper electromagnetic force generating unit 700 are referred to as upper vibration generating units, and the lower electrostatic force generating unit 500 and lower electromagnetic force generating unit 800 are referred to as lower vibration generating units. For the upward elastic vibration of the mass unit 310 , a preset upward vibration space (a distance between the upper vibration generating unit and the mass unit) is formed between the upper vibration generating unit and the mass unit 310 . In addition, a preset downward vibration space (a distance between the mass part and the lower vibration generating unit) is formed between the mass part 310 and the lower vibration generating unit for the downward elastic vibration of the mass unit 310 .

The separation distance between the upper vibration space and the lower vibration space is controlled by the upper spacer (upper spacer) 200 and the lower spacer (lower spacer 400) shown in FIG. 1 . The upper spacer 200 is disposed in the space between the upper vibration generating unit and the vibration generating unit 300 to provide an upper vibration space, and the lower spacer 400 is disposed between the vibration generating unit 300 and the lower vibration generating unit. It is disposed in the space to provide a downward vibration space. Each separation distance between the upper vibration space and the lower vibration space may be applied differently depending on the mounting environment of the actuator 10 .

As shown in Fig. 1, in the upper vibration space, the electrostatic force (F _e1 ) and the electromagnetic force (F _m1 ) in the upper direction are generated by the upper vibration generating unit 100,700, and in the lower vibration space, the lower vibration generating unit ( 500,800), an electrostatic force (F _e2 ) and an electromagnetic force ((F _m2 ) in the downward direction are generated.

The vibration generator 300 includes a mass part (mass body 310 ), an elastic part (radial beam spring part 320 ), a support part 330 , and a magnet part 311 . The mass part 310 is a body having mass and is electrically connected to the ground.

A magnet part 311 is disposed inside the mass part 310 as shown in FIG. 1 . The magnet unit 311 is a permanent magnet and is interlocked with the above-described upper and lower electromagnetic force generating units 700 and 800 to generate a bidirectional electromagnetic force.

The elastic part 320 is formed to include a slit groove (not shown) in the outer circumferential direction of the mass part 310 so that the mass part 310 elastically vibrates. The support part 330 allows the mass part 310 to be elastically supported through the elastic part 320 . That is, the support part 330 is disposed at the outermost part of the vibration generating part 300 , the mass part 310 is disposed at the center, and the elastic part 320 is disposed in the space between the mass part 310 and the support part 330 . ) is formed.

2 is a lower vibration generator. FIG. 2( a ) shows an electrostatic force lower electrode part 510 and a lower insulating film part 520 , to which a high voltage signal is applied, and FIG. 2( b ) shows an electromagnetic force lower electrode part 810 and a lower insulating film part 520 . ), a low voltage signal is applied. The upper vibration generating unit is the same as the lower vibration generating unit of FIG. 2, only the phase of the applied signal is 180 degrees different (refer to FIG. 7).

The electromagnetic force lower electrode part 810 is formed so that the current of the applied second low voltage signal rotates in the circumferential direction as shown in FIG. 7(b) . The electromagnetic force upper electrode part 710 is formed such that the applied current of the first low voltage signal rotates in the circumferential direction. However, it is preferable that the current direction of the first low voltage signal and the current direction of the second low voltage signal flow in opposite directions.

The high voltage signal applied to the above-described upper and lower vibration generating units is a high voltage signal for generating an electrostatic force, and the low voltage signal is a low voltage signal for generating an electromagnetic force. However, as described above, when the low voltage signal is applied to the upper and lower vibration generators, the directions of current are different from each other.

As shown in FIG. 3 , a first AC high voltage (HVcos(2πft+θ)) having a phase ahead of 180 degrees during a half cycle with respect to one cycle T is applied to the electrostatic force upper electrode unit 110, and during the other half cycle, the first AC high voltage (HVcos(2πft+θ)) is applied. A second AC high voltage HVcos(2πft), which is 180 degrees out of phase with the first AC high voltage, is applied to the electrostatic force lower electrode unit 510 . Here, the phase advance by 180 degrees means that, as shown in FIG. 3 , the first AC high voltage is first applied for half a cycle, and then the second AC high voltage is subsequently applied for the other half cycle. Accordingly, the electrostatic force upper electrode unit 110 and the electrostatic force lower electrode unit 510 each have a phase difference of 180 degrees and a positive alternating current high voltage is applied for half a cycle, which is sequentially and repeatedly applied.

On the other hand, in order to cross-repeatedly apply the first AC high voltage and the second AC high voltage sequentially for half a cycle while having a phase difference of 180 degrees, the electrostatic force is applied to the upper electrode part 110 and the electrostatic force lower electrode part 510 by precisely matching the phases. shall.

As for the voltage magnitude of the first and second AC high voltages in FIG. 3 , a voltage of about 0.5 k to 4 kV may be applied depending on the installation environment. However, in the present invention, since a bidirectional electrostatic force is generated to elastically amplify and vibrate the mass unit 310 , there is an advantage in that a lower high voltage can be applied and a larger vibration can be performed compared to the conventional one.

FIG. 4 illustrates a drive circuit unit generating an AC high voltage signal applied to the electrostatic force upper electrode unit 110 and the electrostatic force lower electrode unit 510, respectively, as a first embodiment. A second embodiment of the drive circuit unit is shown in FIG. 8 and will be described later. First, as shown in FIG. 4 , the high voltage generator 610 generates a DC high voltage of approximately 1.5 kV and supplies it to the upper electrode first switching unit 633 .

The controller 620 generates the first and second high voltage control signals to generate the first AC high voltage HVcos(2πft+θ) and the second AC high voltage HVcos(2πft). The generated first high voltage control signal is transmitted to the upper electrode charge signal generator 631 and the upper electrode discharge signal generator 632 , respectively. In addition, the generated second high voltage control signal is transmitted to the lower electrode charge signal generator 641 and the lower electrode discharge signal generator 642 , respectively.

The upper electrode high voltage signal generating unit 630 generates a first high voltage AC signal having a positive value according to the first high voltage control signal and supplies the electrostatic force to the upper electrode unit 110 . In addition, the lower electrode high voltage signal generating unit 640 generates a second high voltage AC signal having a positive value and having a phase difference of 180 degrees from the first high voltage AC signal according to the second high voltage control signal to generate an electrostatic force lower electrode unit ( 510) is supplied. The upper electrode high voltage signal generator 630 and the lower electrode high voltage signal generator 640 will be described in more detail.

The upper electrode high voltage signal generating unit 630 includes the upper electrode charging signal generating unit 631 , the upper electrode discharging signal generating unit 632 , the upper electrode first switching unit 633 , and the upper electrode second switching unit 634 . include

The upper electrode charging signal generating unit 631 generates an upper electrode charging signal according to the first high voltage control signal received from the controller 620 . The upper electrode discharge signal generator 632 generates an upper electrode discharge signal according to the first high voltage control signal received from the controller 620 . The upper electrode charging signal generating unit 631 and the upper electrode discharging signal generating unit 632 may be specifically configured of a digital-to-analog converter and an amplifier, respectively.

The upper electrode first switching unit 633 generates a first AC high voltage by switching the DC high voltage provided from the high voltage generator according to the input of the upper electrode charging signal. In this case, the generated first AC high voltage is an AC high voltage signal having a positive value (ie, not having a negative value).

The upper electrode second switching unit 634 supplies the first AC high voltage provided from the upper electrode first switching unit 633 to the electrostatic force upper electrode unit 110 for a half cycle, and according to the input of the upper electrode discharge signal, the electrostatic force upper part The electrode part 110 is electrically connected to the ground during the remaining half cycle to discharge charges charged in the electrostatic force upper electrode part 110 . At this time, by electrically connecting the electrostatic force upper electrode unit 110 to the ground, the electric charge charged in the electrostatic force upper electrode unit 110 can be momentarily and rapidly discharged, so that the upper electrostatic force F _e1 is quickly dissipated and cross generated. There is an advantage in that it does not prevent the mass part 310 from being elastically amplified and vibrated in the downward direction by the electrostatic force F _e2 in the downward direction.

The lower electrode high voltage signal generating unit 640 includes the lower electrode charging signal generating unit 641 , the lower electrode discharging signal generating unit 642 , the lower electrode first switching unit 643 , and the lower electrode second switching unit 644 . include

The lower electrode charging signal generating unit 641 generates a lower electrode charging signal according to the second high voltage control signal received from the controller 620 . The lower electrode discharge signal generator 642 generates a lower electrode discharge signal according to the second high voltage control signal received from the controller 620 . In detail, the lower electrode charging signal generating unit 641 and the lower electrode discharging signal generating unit 642 may be configured of a digital-to-analog converter and an amplifier, respectively.

The lower electrode first switching unit 643 switches the DC high voltage provided from the high voltage generator according to the input of the lower electrode charging signal to generate a second AC high voltage having a phase difference of 180 degrees from the first AC high voltage. In this case, the generated second AC high voltage is an AC high voltage signal having a positive value (ie, not having a negative value).

The lower electrode second switching unit 644 applies the second AC high voltage provided from the lower electrode first switching unit 643 during a half cycle in which the phase is delayed by 180 degrees compared to the first AC high voltage (ie, the first AC high voltage is applied). During the half cycle in which the 180 degree phase is delayed), the electrostatic force is supplied to the lower electrode part 510, and the electrostatic force lower electrode part 510 is electrically connected to the ground during the remaining half cycle according to the input of the lower electrode discharge signal to the electrostatic force lower electrode The charge charged in the unit 510 is discharged. The reason for discharging is as described above.

5 is a diagram illustrating a comparison between vibration by a conventional unidirectional electrostatic force actuator and vibration by a bidirectional electrostatic force actuator according to the present invention. It can be seen that the vibration generated by the bidirectional electrostatic force actuator of Figs. 5(c) and 5(d) is much larger than the vibration generated by the unidirectional electrostatic force actuator of Figs. In addition, as can be seen from the simulation results shown in FIG. 6 , it can be seen that the vibration and acceleration forces are much larger in both directions compared to the conventional one-way.

On the other hand, in an embodiment of the present invention, since the electrostatic force and the electromagnetic force are used together, a larger vibration can be generated compared to the vibration shown in FIGS. 5 and 6 .

3 and 7, the first AC high voltage signal (HV|cos(2πft+ θ)|) is applied to the electrostatic force upper electrode part 110 for a half cycle (for T/2 time) and , a second AC high voltage signal HV|cos(2πft)|) is applied to the electrostatic force lower electrode part 510 for the remaining half cycle (time T/2). At this time, during the remaining half cycle, the electrostatic force upper electrode unit 110 is discharged while the second AC high voltage signal is applied, and sequentially, during the next half cycle, the first AC high voltage signal is applied and the electrostatic force lower electrode unit 510 is discharged at the same time. Therefore, during a half cycle, the alternating high voltage signal is applied to any one electrode part and the charged charges are discharged to the other electrode part cross-repeat each other.

On the other hand, as shown in FIG. 7 , the first AC low voltage signal (V|cos(2πft+ θ)|) is applied to the electromagnetic force upper electrode part 710 for a half cycle (for T/2 time), and the electromagnetic force lower electrode part ( 810), the second AC low voltage signal Vh|cos(2πft)|) is applied during the remaining half cycle (for T/2 time). Therefore, when an AC low voltage signal is applied to one electrode part for half a cycle, the AC low voltage signal is applied to the other electrode part for the next half cycle, thereby repeating the sequence cross-repeat.

Also, the first AC high voltage signal and the first AC low voltage signal have the same phase of the applied voltage, and thus, the electrostatic force upper electrode unit 110 and the electromagnetic force upper electrode unit 710 are respectively applied at the same time. The phase of the applied voltage of the second AC high voltage signal and the second AC low voltage signal is the same, and therefore, the electrostatic force lower electrode unit 510 and the electromagnetic force lower electrode unit 810 are respectively applied at the same time. However, it is preferable that the first AC high voltage signal and the first AC low voltage signal be applied such that the second AC high voltage signal and the second AC low voltage signal have a phase difference of 180 degrees from each other.

Meanwhile, the controller 620 generates first and second high voltage control signals and first and second low voltage control signals. The upper electrode low voltage signal generating unit 650 generates a first AC low voltage signal having a positive value for a half cycle according to the input of the first low voltage control signal from the controller 620 , and supplies the electromagnetic force to the upper electrode unit 710 .

The lower electrode low voltage signal generation unit 660 generates a second AC low voltage signal having a positive value for the remaining half cycle (180 degree phase difference from the first low voltage signal) according to the second low voltage control signal of the control unit 620 to generate electromagnetic force. It is supplied to the lower electrode part 810 .

In this case, it is preferable that the current direction of the first AC low voltage signal and the current direction of the second AC low voltage signal be applied so that the current directions are opposite to each other in order to generate a bidirectional electromagnetic force.

8 is a second embodiment of a drive circuit unit generating first and second AC high voltage signals applied to the electrostatic force upper electrode unit 110 and the electrostatic force lower electrode unit 510, respectively. As shown in FIG. 8 , the high voltage generator 910 generates an AC high voltage signal. As an example, it is assumed that HVcos (2πft) is generated by the high voltage generator 910 . The rectification described in the present invention means that the current flows in only one direction.

The upper high voltage signal rectification supply unit includes a first diode unit 921 , a first discharge resistor unit 931 , and a first discharge switch unit 932 .

The first diode unit 921 rectifies and passes only the positive half cycle of the HVcos(2πft) signal, and is connected in series with the high voltage generator 910 so as not to pass the negative half cycle of the HVcos(2πft) signal.

The first discharge resistance part 931 is connected and connected in parallel to the electrostatic force upper electrode part 110 . The AC high voltage signal HVcos(2πft) for a positive half cycle passing through the first diode unit 921 is applied to the electrostatic force upper electrode unit 110 to generate a first electrostatic force. On the other hand, the AC high voltage signal HVcos(2πft) cannot pass through the first diode unit 921 during the negative half cycle, and thus the electrostatic force upper electrode unit 110 through the first discharge resistor unit 931 during the negative half cycle ) is discharged to the ground.

The first discharge switch unit 932 is connected and connected in parallel to the first discharge resistance unit 931 , and may be switched ON/OFF according to a control signal of the control unit 620 . When the charge charged in the electrostatic force upper electrode part 110 through the first discharge resistor part 931 is not sufficiently discharged, the charge charged to the ground by turning the switch of the first discharge switch part 932 "ON" It can be added so that it discharges well. The first discharge switch unit 932 turns the switch “ON” for a negative half cycle to discharge, and turns the switch “OFF” for a positive half cycle to give the electrostatic force upper electrode unit 110 a first high voltage AC signal (HVcos(2πft) signal) A signal for a positive half cycle) is applied to generate a first electrostatic force.

The lower high voltage signal rectification supply unit includes a second diode unit 922 , a second discharge resistor unit 941 , and a first discharge switch unit 942 .

The second diode unit 922 rectifies and passes only the negative half cycle of the HVcos(2πft) signal, and is connected in series with the high voltage generator 910 so that the positive half cycle of the HVcos(2πft) signal does not pass. Accordingly, the first diode part 921 and the second diode part 922 are connected in series with the high voltage generator 910 so that the passing directions of current are opposite to each other.

The second discharge resistance unit 941 is connected and connected in parallel to the electrostatic force lower electrode unit 510 . The AC high voltage signal HVcos(2πft) during the negative half cycle passing through the second diode unit 922 is applied to the electrostatic force lower electrode unit 510 to generate a second electrostatic force. On the other hand, the AC high voltage signal HVcos(2πft) cannot pass through the second diode unit 922 during the positive half cycle, and thus the electrostatic force lower electrode unit 510 through the second discharge resistor unit 941 during the positive half cycle. ) is discharged to the ground.

The second discharge switch unit 942 is connected and connected in parallel to the second discharge resistance unit 941 , and may be switched ON/OFF according to a control signal of the control unit 620 . When the charge charged in the electrostatic force lower electrode unit 510 through the second discharge resistor unit 941 is not sufficiently discharged, the second discharge switch unit 942 is turned "ON" to charge the electric charge to the ground. It can be added so that it discharges well. The second discharge switch unit 942 turns the switch “ON” for a positive half cycle to discharge, and turns the switch “OFF” for a negative half cycle to give the electrostatic force lower electrode unit 510 a second high voltage AC signal (HVcos(2πft) signal. signal during a negative half cycle) is applied to generate a second electrostatic force.

In the description of the present invention, the description may be omitted for matters obvious to those skilled in the art and those skilled in the art, and the description of these omitted components (methods) and functions will be sufficiently referenced within the scope not departing from the technical spirit of the present invention. will be able In addition, the above-described components of the present invention have been described for convenience of description of the present invention, and components not described herein may be added within the scope without departing from the technical spirit of the present invention.

The description of the configuration and function of each part described above has been described separately for convenience of description, and if necessary, any configuration and function may be implemented by integrating into other components, or may be implemented more subdivided.

In the above, although described with reference to one embodiment of the present invention, the present invention is not limited thereto, and various modifications and applications are possible. That is, those skilled in the art will readily understand that many modifications are possible without departing from the gist of the present invention. In addition, it should be noted that, when it is determined that a detailed description of a known function related to the present invention and its configuration or a coupling relationship for each configuration of the present invention may unnecessarily obscure the gist of the present invention, the detailed description is omitted. something to do.

10: Bi-directional electrostatic force actuator
11, 12: base material
100: upper electrostatic force generating unit
110: electrostatic force upper electrode part
120: upper insulating film part
200: upper gap portion
300: vibration generating unit
310: parts by mass
311: magnet part
320: elastic part or radial beam spring part
330: support
400: lower gap part
500: lower electrostatic force generating unit
510: electrostatic force lower electrode part
520: lower insulating film part
610: high voltage generator
620: control unit
630: upper electrode high voltage signal generator
631: upper electrode charging signal generating unit
632: upper electrode discharge signal generating unit
633: upper electrode first switching unit
634: upper electrode second switching unit
640: lower electrode high voltage signal generator
641: lower electrode charging signal generating unit
642: lower electrode discharge signal generating unit
643: lower electrode first switching unit
644: lower electrode second switching unit
650: upper electrode low voltage signal generator
660: lower electrode low voltage signal generator
700: upper electromagnetic force generating unit
710: electromagnetic force upper electrode part
800: lower electromagnetic force generating unit
810: electromagnetic force lower electrode part
910: high voltage generator
921: first diode unit
922: second diode unit
931: first discharge resistor unit
932: first discharge switch unit
941: second discharge resistor unit
942: second discharge switch unit

Claims (10)

An electrostatic force generating unit that generates an electrostatic force in both directions by application of a high voltage signal;
An electromagnetic force generating unit that generates a bidirectional electromagnetic force by application of a low voltage signal;
A high voltage generator for generating and supplying a preset AC high voltage signal;
A high voltage signal rectification supply unit for rectifying the AC high voltage signal supplied from the high voltage generating unit to supply a first high voltage signal to the electrostatic force generating unit for a half cycle and supplying a second high voltage signal to the electrostatic force generating unit for the remaining half cycle Actuator using bidirectional electrostatic force and electromagnetic force, characterized in that.
The method of claim 1,
The electrostatic force generating unit
an upper electrostatic force generating unit for generating a first electrostatic force by application of a first high voltage signal;
and a lower electrostatic force generator for generating a second electrostatic force by application of a second high voltage signal having a phase difference from the first high voltage signal;
The electromagnetic force generating unit,
an upper electromagnetic force generating unit for generating a first electromagnetic force by application of the first low voltage signal;
and a lower electromagnetic force generator for generating a second electromagnetic force by application of a second low voltage signal having a phase difference from the first low voltage signal.
3. The method of claim 2,
The first high voltage signal and the second high voltage signal are applied to have a phase difference of 180 degrees,
The first low voltage signal and the second low voltage signal are applied to have a phase difference of 180 degrees,
The first high voltage signal, the first low voltage signal, the second high voltage signal, and the second low voltage signal are applied in phase synchronization with each other;
The first high voltage signal and the low voltage signal are applied for a half cycle,
The actuator using the bidirectional electrostatic force and electromagnetic force, characterized in that the second high voltage signal and the low voltage signal are applied during the remaining half cycle in which the first high voltage signal and the first low voltage signal are not applied.
4. The method of claim 3,
The first electrostatic force and the first electromagnetic force are generated during the half cycle to provide an amplified elastic vibration force by pulling the vibration generator upward,
The second electrostatic force and the second electromagnetic force are generated during the remaining half cycle, thereby pulling the vibration generating unit downward to provide an amplified elastic vibration force,
Bidirectional electrostatic force is generated by the first and second electrostatic forces,
An actuator using a bidirectional electrostatic force and electromagnetic force, characterized in that a bidirectional electromagnetic force is generated by the first and second electromagnetic forces.
4. The method of claim 3,
An actuator using bidirectional electrostatic force and electromagnetic force, characterized in that when a high voltage signal is applied to one of the electrostatic force generating units during a half cycle, the order of discharging charged charges to the other electrostatic force generating unit is cross-repeated.
6. The method of claim 5,
The high voltage signal rectification supply unit,
The upper high voltage for supplying the first high voltage signal to the upper electrostatic force generating unit for a half cycle by passing only a half cycle signal among the AC high voltage signals supplied from the high voltage generating unit, and discharging the charge charged to the upper electrostatic force generating unit for the other half cycle signal rectification supply;
The second high voltage signal is supplied to the lower electrostatic force generating unit during the remaining half cycle by passing only the remaining half-cycle signal among the AC high voltage signals supplied from the high voltage generating unit, and the charge charged in the lower electrostatic force generating unit during the half cycle An actuator using a bidirectional electrostatic force and electromagnetic force, characterized in that it comprises a lower high voltage signal rectification supply for discharging.
7. The method of claim 6,
The upper high voltage signal rectification supply unit,
a first diode unit arranged in series with respect to the high voltage generating unit to pass only a half-cycle signal among the AC high voltage signals supplied from the high voltage generating unit;
a first discharging unit disposed in parallel with the upper electrostatic force generating unit so that the charges charged in the upper electrostatic force generating unit are discharged to the ground during the remaining half cycle;
The lower high voltage signal rectification supply unit,
a second diode unit arranged in series with respect to the high voltage generating unit so as to pass only the remaining half-cycle signals among the AC high voltage signals supplied from the high voltage generating unit;
and a second discharging unit disposed in parallel with the lower electrostatic force generating unit so that the charges charged in the lower electrostatic force generating unit are discharged to the ground during the half cycle.
8. The method of claim 7,
The upper high voltage signal rectification supply unit,
During the remaining half cycle, the switch is turned on so that the electric charge charged in the upper electrostatic force generator is discharged to the ground, and is switched off during the half cycle, further comprising a first discharge switch unit arranged in parallel with the upper electrostatic force generator,
The lower high voltage signal rectification supply unit,
During the half cycle, the switch is turned on so that the charge charged in the lower electrostatic force generating unit is discharged to the ground, and is switched OFF during the other half cycle, characterized by further comprising a second discharge switch unit arranged in parallel with the upper electrostatic force generating unit. Actuator using bidirectional electrostatic force and electromagnetic force.
3. The method of claim 2,
Further comprising a vibration generator for generating vibration according to the generation of the first and second electrostatic forces and the first and second electromagnetic forces,
The vibration generating unit,
mass part,
and a magnet part inserted and fixed inside the mass part to generate the first and second electromagnetic forces according to the application of the first and second low voltage signals.
10. The method of claim 9,
The actuator using a bidirectional electrostatic force and electromagnetic force, characterized in that the electric current of the first low voltage signal and the second low voltage signal is applied in opposite directions to generate the first and second electromagnetic forces together with the magnet part.

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