WO2018056511A1

WO2018056511A1 - Actuator using electrostatic force and actuator panel

Info

Publication number: WO2018056511A1
Application number: PCT/KR2016/013511
Authority: WO
Inventors: 양태헌; 우삼용; 박연규
Original assignee: 한국표준과학연구원
Priority date: 2016-09-23
Filing date: 2016-11-23
Publication date: 2018-03-29

Abstract

The present invention relates to an actuator using an electrostatic force and an actuator panel which are for indirectly transmitting vibration sensation to a user by means of vibrating a mass by using an electrostatic force. To this end, the actuator using an electrostatic force comprises: a mass portion vibrating by means of an electrostatic force; and an electrostatic force generation portion disposed a fixed distance away and at a position corresponding to the mass portion and for generating the electrostatic force, wherein the vibration generated from the mass portion is transmitted along a predetermined vibration path and thus the vibration is indirectly transmitted to the user.

Description

Actuators and Actuator Panels Using Electrostatic Force

The present invention relates to an actuator and an actuator panel using an electrostatic force, and more particularly, to an actuator and an actuator panel using an electrostatic force that delivers a sense of vibration indirectly to a user by vibrating a mass using an electrostatic force.

In general, tactile sensation is a tactile sensation that can be felt by a human finger or stylus pen when touching an object, and encompasses tactile feedback that is felt when the skin touches the surface of the object and when the movement of joints and muscles is disturbed. Concept.

As a human sensory receptor, a mechanical stimulus receptor is a Paciniancorpuscle that senses high-frequency vibration, Meissner's corpuscle that senses low-frequency vibration, and a Merkel's disc that senses local pressure. ) And Ruffini's ending, which detects stretch that presses the skin.

Various tactile presenting devices for stimulating such a sensory receptor include a piezo actuator, a solenoid actuator, a DC / AC motor, a server motor, an ultrasonic actuator, a shape memory alloy ceramic actuator, an electroactive polymer actuator, and the like.

Representative examples of the tactile display device include a vibration tactile actuator that stimulates a Pachinian / Minus body that detects high frequency / low frequency vibration by generating vibration with a vibration motor according to an input of a touch screen in a mobile device. Vibration motor (vibration tactile actuator) is a device that is applied to a portable device to deliver a predetermined sense of vibration, the prior art has been a method of outputting a sense of vibration in response to the user touches the touch panel with a finger.

The conventional vibration generating module is composed of a solenoid coil and a permanent magnet mounted on a spring to generate a vibration having a strength enough to be recognized by a user, and the permanent magnet is moved up and down by electromagnetic force to generate vibration. Let's do it. This method has a limitation of vibrating force, but the size of the mobile phone can be vibrated, but tablet PCs and large LCDs have a limitation in that it cannot deliver a vibrational touch. In addition, by placing the vibration actuator in one corner of the mobile phone had a limit that the difference in the maximum vibration force that can be generated according to the pressing position of the touch panel.

As a large touch LCD is installed in a smart car, it is required to develop a vibration tactile feedback actuator that can confirm a user's touch input by vibrating feedback from a large LCD and facilitate various interactions. Therefore, it is mounted on the back of a large LCD thinly and widely, so that it can generate a constant and strong vibration force regardless of the touch position of the LCD, and can freely adjust the frequency and pattern of the vibration and generate a low-power vibration tactile actuator with quick response speed. Development is urgently needed in the industry.

Therefore, the present invention was created in order to solve the problems as described above, to minimize the power consumption by generating the electrostatic force by the high voltage to vibrate the mass, and to maximize the vibration of the mass by using the resonant frequency and beat frequency The purpose is to provide.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

The object of the present invention described above includes a mass part vibrating by the electrostatic force, and an electrostatic force generating part disposed at a predetermined interval at a position corresponding to the mass part to generate an electrostatic force, and a vibration path in which the vibration generated from the mass part is predetermined. It can be achieved by providing an actuator using the electrostatic force, characterized in that the vibration is indirectly transmitted to the user by being delivered along.

In addition, since the mass portion and the electrostatic force generating portion are sequentially disposed on the same vertical line with each other in the vertical direction, the vibration generated in the mass portion is indirectly transmitted to the user along the vibration path.

In addition, the contact area that the user contacts is formed in the lower area of the electrostatic force generating unit on the same vertical line with respect to the mass part so that the vibration of the mass part is indirectly transmitted to the contact area.

In addition, the mass portion vibrating by the electrostatic force, the electrostatic force generating portion is disposed at a predetermined interval spaced corresponding to the mass portion to generate the electrostatic force, the high voltage power supply for generating a high voltage supplied to the electrostatic force generating portion, and from the high voltage power supply to the electrostatic force generating portion And a charge / discharge signal generation unit configured to charge and discharge the charge of the electrostatic force generation unit on the supplied high voltage signal path.

In addition, the charge-discharge signal generating unit is to generate a high voltage signal supplied to the electrostatic force generating unit divided into a charging section and a discharge section, and to discharge the charge so that the ratio between the charging and discharging section is set at least 20 to 80%. Make sure the vibration of the mass part is within the preset range.

In addition, the mass portion vibrating by the electrostatic force, the electrostatic force generating portion which is disposed at regular intervals at a position corresponding to the mass portion to generate an electrostatic force, and is disposed in the horizontal direction with respect to the mass portion to amplify the vibration of the mass portion by elasticity or Or a vibration amplifier disposed in a direction perpendicular to the mass portion.

In addition, when the vibration amplification portion is arranged in the horizontal direction further includes a mass support for supporting the mass portion in the circumferential direction, the mass support portion, the vibration amplification portion, and the mass portion is disposed sequentially relative to the horizontal direction, so that the vibration amplification portion and the mass support portion It is arranged between the mass parts.

In addition, the mass support part, the vibration amplification part, and the mass part are integrally formed, and the vibration amplification part generates elasticity by forming slit grooves in the circumferential direction in the space region between the mass support part and the mass part.

In addition, the slit groove consists of an inner slit groove and an outer slit groove.

In addition, the vibration amplifier, the stiffness (stiffness) to have a value between 1x10 ² N / m to 5x10 ⁶ N / m.

In addition, when the vibration amplification part is disposed in the vertical direction, the vibration amplification part amplifies the vibration by supporting the mass part from the lower side.

In addition, the mass portion vibrating by the electrostatic force, the electrostatic force generating portion is disposed at a predetermined interval spaced corresponding to the mass portion to generate the electrostatic force, disposed in the horizontal direction with respect to the mass portion to amplify the vibration of the mass portion by elastic or A vibration amplification part disposed in a direction perpendicular to the mass part, and a gap part disposed to have a predetermined height outside the circumferential direction of the mass part and the electrostatic force generation part to provide a predetermined separation distance between the mass part and the electrostatic force generation part. .

In addition, when the vibration amplification portion is disposed in the horizontal direction further includes a mass support portion disposed on the interval portion to support the mass portion in the circumferential direction, the mass body support portion, the vibration amplification portion, and the mass portion is formed integrally to sequentially based on the horizontal direction The vibration amplification part generates elasticity by forming a slit groove in the circumferential direction in the space region between the mass support part and the mass part.

In addition, the high voltage signal supplied to the electrostatic force generating portion is made of a frequency corresponding to the resonance frequency of the mass portion and the vibration amplifier.

In addition, the frequency of the high voltage signal supplied to the electrostatic force generating unit has a range within 500 Hz and is divided into a charging section and a discharge section.

In addition, the vibration generated in the mass portion is transmitted along the predetermined vibration path further comprises a base substrate for indirectly transmitting the vibration to the user, the vibration path in the order of the mass portion, the vibration amplifier, the gap portion, and the base substrate It is the path through which vibration is transmitted.

In addition, as the mass portion is electrically connected to the ground, the electrostatic force is generated by the high voltage supplied to the electrostatic force generating portion, and the mass portion vibrates vertically in a space spaced between the mass portion and the electrostatic force generating portion by the electrostatic force.

The electrostatic force generating unit may include an electrode unit receiving a high voltage signal and a dielectric layer having a predetermined dielectric constant.

In addition, the high voltage signal supplied to the electrode unit is supplied according to a predetermined charge and discharge frequency to have a charging section and a discharge section.

The electrode unit may include a first electrode unit receiving a first high voltage signal, and a second electrode unit receiving a second high voltage signal different from the first high voltage signal, wherein the frequency of the first and second high voltage signals is a charging period. It has a range within 500Hz according to the charging and discharging frequency to have an over discharge period, the frequency of the first and second high voltage signal is set so that the beat frequency is within 250Hz range so that the beat electrostatic force is generated.

The first and second electrode portions may be spaced apart from each other in the dielectric layer in the vertical direction or spaced in the lateral direction, and spaced apart in the vertical direction. The first and second electrode portions may adjust the amplitude of the beat frequency. The vertical separation distance of the liver is 1 μm to 3,000 μm.

In addition, the dielectric layer has a thickness of 1 μm to 3,000 μm, a dielectric constant of 1.5 to 30, and a material of the dielectric layer is at least one of polyimide, silicon, polyurethane, polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), and polymer composite. .

In addition, in order to control the magnitude of the electrostatic force, the air gap between the mass portion and the electrostatic force generating portion is 10 μm to 3,000 μm.

In addition, the direction of the electrostatic force is directed from the electrostatic force generating portion to the mass portion.

On the other hand, an object of the present invention is the electrostatic force, characterized in that it comprises an actuator using the electrostatic force, and a base substrate for transmitting the vibration to the user by transmitting a vibration generated by a plurality of actuators using the electrostatic force is determined along a predetermined vibration path It can be achieved by providing an actuator panel using.

In addition, the base substrate is any one of a display panel or a flexible display panel that indirectly transmits the vibration generated in the actuator using the electrostatic force to the user.

According to the present invention as described above there is an effect that can minimize the power consumption.

In addition, the present invention has the effect of maximizing the vibration of the mass by using the beat frequency and the resonant frequency.

The following drawings, which are attached to this specification, illustrate one preferred embodiment of the present invention, and together with the detailed description thereof, serve to further understand the technical spirit of the present invention. It should not be construed as limited.

1 is a view showing an actuator consisting of a single electrode according to an embodiment of the present invention,

2 is a view showing a mass, vibration amplification, and mass support according to an embodiment of the present invention;

3 is a view showing an actuator consisting of a plurality of electrodes according to an embodiment of the present invention,

4 is a view showing an FPCB double-sided substrate according to an embodiment of the present invention,

5 and 6 are views illustrating a high voltage power supply unit, a charge / discharge signal generation unit, an electrode unit according to an embodiment of the present invention;

7 is a diagram illustrating an example to specifically implement a high voltage power supply unit and a charge / discharge signal generation unit.

8 is a view showing an actuator panel according to an embodiment of the present invention,

9 is a view showing in detail the configuration of the FPCB double-sided board of Figure 4,

10 is a view showing a high voltage signal and an optocoupler charging control signal according to the present invention,

11 is a view showing a high voltage signal and an optocoupler discharge control signal according to the present invention,

12 is a view showing an optocoupler charge control signal discharge control signal according to the present invention,

FIG. 13 is a view illustrating that the optocoupler charge control signal and the discharge control signal overlap in some intervals compared to FIG. 12.

Hereinafter, with reference to the drawings will be described a preferred embodiment of the present invention. In addition, one Example described below does not unduly limit the content of this invention described in the Claim, and the whole structure demonstrated by this Embodiment is not necessarily required as a solution of this invention. In addition, the matters obvious to those skilled in the art and the art may be omitted, and the description of the omitted elements (methods) and functions may be sufficiently referred to without departing from the spirit of the present invention.

(정전기력을 이용한 액추에이터의 구성 및 기능)(Configuration and Function of Actuator Using Electrostatic Force)

An actuator using an electrostatic force according to an embodiment of the present invention is an invention that indirectly transmits a sense of vibration to a user by vibrating a mass having a predetermined mass by an electrostatic force. At this time, the indirect vibration sense transmission means that the vibration of the mass is indirectly transmitted to the user's hand along the vibration path of the preset actuator, not directly felt by the user's hand. Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the actuator using the electrostatic force according to an embodiment of the present invention.

The vibrator includes a mass part 100 and an electrostatic force generating part 200 which will be described later. As shown in FIG. 1, the mass part 100 includes a mass body 110, a vibration amplifier 120, and a mass support part 120 having a predetermined mass. The description of these components is provided for convenience of description, but the mass body 110, the vibration amplifier 120, and the mass support part 120 are preferably made of stainless steel. However, materials other than stainless steel may be used according to the use environment, and may be separately manufactured and combined with each other without being manufactured integrally.

As shown in FIG. 2, the mass body 110 has a constant mass and is preferably implemented in a circular or elliptic shape. However, the mass of the mass may vary depending on the resonance frequency set in relation to the vibration amplifier, and the shape may be implemented in various shapes without being limited to a circular or elliptic shape. In the outer circumferential direction of the mass body 110, a slit groove (or vibration amplification part 120) is formed as shown in FIG. The outer region of the slit groove 120 is the mass support 130, as described above, the mass 110, the vibration amplifier 120, and the mass support 130 are integrally formed of stainless steel. Therefore, the mass body 110 is located at the center, and the vibration amplification part 120 having elasticity is formed in the outer peripheral area of the mass by the slit groove, and the mass body supporting the mass body in the outer peripheral area of the vibration amplification part 120. The support 130 is provided. Therefore, the mass body support 130, the vibration amplifier 120, and the mass body 110 are sequentially disposed at one end point in the horizontal direction.

Although not shown in the drawing, the mass body 110 is electrically connected to a ground. That is, in order to generate the electrostatic force 1 shown in FIG. 1, a high voltage is supplied to the electrostatic force generation unit 200 and the mass body 110 must be electrically connected to the ground. Referring to FIG. 1, the mass body 110 is positioned at the uppermost side and sequentially positioned on the same vertical line with each other in the order of the electrostatic force generating unit 200 and the base substrate 20. At this time, the mass body 110 is preferably located in the center region on the same vertical line. Accordingly, the mass body 110 vibrates vertically spaced space regions (or air gap regions) between the mass body 110 and the electrostatic force generating unit 200 by the electrostatic force. As described above, the user indirectly feels the vibration generated in the mass body 110 by contacting the hand with the base substrate 20.

The vibration amplification part 120 is formed in the space region between the mass body 110 and the mass support part 130, and the vibration amplification part 120 is formed because the slit groove 120 is formed in the outer circumferential direction of the mass body 110. Has elasticity that can amplify the vibration of 110. Stiffness is preferably 10 ² N / m ~ 5x10 ⁶ N / m in consideration of the separation distance between the mass body 110 and the electrostatic force generating unit 200. According to the rigidity described above, as shown in FIG. 2, the slit groove 120 may be formed of the inner slit groove 121 and the outer slit groove 122, and a double slit groove may be formed in the circumferential direction. The slit groove 120 may be formed by wire cutting, or the like, and a single slit groove or two or more slit grooves may be formed according to the elastic modulus. The vibration amplifier 120 further amplifies the vibration of the mass body 110 existing in the center region by placing the vibration amplifier 120 having elasticity between the mass body 110 and the mass support part 130 supporting the mass body. Can be.

The above-described vibration amplifier 120 is described as being implemented in a substantially horizontal direction with respect to the mass body 110, but may be provided in a vertical direction with respect to the mass body 110. That is, although not shown in the drawing, the vibration amplifier 120 may be embodied by elastic means such as a spring, and may be provided in a vertical direction in the space between the mass body 110 and the electrostatic force generating unit 200.

The spacer (or spacer) 300 is disposed below the mass support 130 as shown in FIG. 1, and the spacer 300 includes the mass 110 and the electrostatic force generating unit 200 in the inner region. Is placed. That is, the spacer 300 is preferably disposed in the outer circumferential direction of the mass body 110 and the electrostatic force generating unit 200. The height of the gap 300 may vary depending on the vertical separation distance between the mass body 110 and the electrostatic force generating unit 200 or the area of the air gap. That is, as an example, when the vertical separation distance is further, the height of the gap 300 is higher, and when it is lower, the height of the gap 300 is also lower. However, the height of the gap 300 may vary depending on the vertical separation distance or the area of the air gap as described above.

The air gap 30 is related to the strength (or magnitude) of the electrostatic force, and the area or area of the air gap 30 is a vertical separation distance between the mass body 110 and the electrostatic force generating unit 200 as shown in FIG. 1. Depends on. The air gap 30 is a capacitance applied between the mass body 110 and the electrostatic force generating unit 200. As the capacitance is increased, the strength of the electrostatic force increases. Therefore, it is preferable to increase the three-dimensional area of the air gap 30, but in the present invention, the vertical separation distance (or air gap) between the mass body 110 and the electrostatic force generating unit 200 in consideration of the strength of the electrostatic force is 10㎛ ~ 3,000㎛ It is preferable to set it as. Formulas relating to the strength of the electrostatic force described above can be referred to within the scope without departing from the spirit of the present invention, the strength of the electrostatic force is proportional to the area of the air gap or the capacity of the capacitance.

The electrostatic force generating unit 200 includes an electrode unit 210 and a dielectric layer 220. The electrode unit 210 may be implemented as a single electrode unit as shown in FIG. 1 and a plurality of electrode units as shown in FIG. 3. In the case of implementing a plurality of electrode parts to increase the amplitude of the vibration (or increase the strength of the electrostatic force) by the beat frequency to generate a variety of vibration patterns by generating a mixed vibration by the beat frequency and the carrier frequency.

First, as shown in FIG. 1, the electrostatic force generating unit 200 secures the vibration region of the air gap and the mass body 110 in the vertical downward direction of the mass body 110 based on the mass body 110 positioned at the uppermost side. In order to be spaced apart a certain distance. The electrostatic force generating unit 200 includes the electrode unit 210 and the dielectric layer 220, and the electrode unit 210 is included in the dielectric layer 220. The vertical separation distance between the electrode portion 210 and the upper surface of the dielectric layer has a value between about 1 μm and 3,000 μm, and a dielectric constant between 1.5 and 30 may be applied in relation to the strength of the electrostatic force. Preferably, the vertical separation distance between the electrode portion 210 and the top surface of the dielectric layer is 37 μm or 55 μm, and the thickness of the entire dielectric layer 220 is 300 μm. In addition, the dielectric constant is preferably 3.5. In addition, the vertical separation distance between the first electrode and the second electrode, which will be described later, may be approximately 45 μm. The above-mentioned preferred value is a value applied in consideration of the strength of the electrostatic force determined by the vertical separation distance and permittivity between the parts.

The material of the dielectric layer 220 may be implemented by applying at least one material of polyimide, silicon, polyurethane, polymer composite, polydimethylsiloxane (PDMS), and polyethylene terephthalate (PET) in consideration of a dielectric constant value.

The high voltage signal supplied to the single electrode unit 210 as shown in FIG. 1 is a signal having a specific frequency f and the magnitude of the high voltage when referring to the high voltage signal supplied to the first electrode unit of FIG. 4. At this time, it is preferable that the specific frequency f of the high voltage signal has a frequency within approximately 500 Hz. In addition, the voltage of the high voltage signal is preferably about 0.5 kV to 4 kV. However, the high voltage signal is not limited to the shape of the signal such as a pulse wave, cosine wave, sine wave, etc., and any high voltage signal having a predetermined frequency rather than a DC component may be applied. However, preferably, signals such as cosine waves or sine waves, rather than pulse waves, can significantly reduce noise generation of vibration. In this case, the high voltage signal supplied to the electrode part has a predetermined frequency to charge and discharge the charge of the electrode part, and details will be described later.

In this case, in the case of a single electrode, a resonance frequency may be used to increase the intensity of vibration as much as possible. The resonance frequency is inversely proportional to the square root of the weight of the mass described above and is proportional to the square root of the stiffness of the vibration amplifier. Therefore, the resonance frequency can be derived from the weight of the mass and the design value of the spring coefficient, and the strength of vibration can be maximized by applying the resonance frequency to the frequency f of the high voltage signal supplied to the electrode unit 210. have. That is, when the applied frequency f is adjusted to the resonance frequency as shown in Equation 1 below, the magnitude of the vibration force may be further amplified.

The aforementioned electrostatic force generating unit 200 may be embodied as an FPCB electrode shielded with a polyimide film (dielectric layer) (see FIG. 4). It can be embodied as a double-sided FPCB electrode shielded with a mid film (dielectric layer). That is, the first electrode portion 211 is implemented on the front surface of FIG. 4, the second electrode portion 212 is implemented on the rear surface, and the electrode portion is shielded by the polyimide film.

Looking at the configuration of the FPCB double-sided substrate (about 300㎛ thickness) of Figure 4 in more detail with reference to Figure 9, the base substrate 20 or the actuator panel 40 is disposed on the bottom (or bottom). The actuator panel 40 may be an LCD module as an example. Hereinafter, the base substrate 20 will be described as an example. The lower shield reinforcement plate 50 is provided above the base substrate 20. The dielectric layer 220 is composed of a PI film 221 for upper (or top) shielding, a PI film 222 for interrupted shielding, and a PI film 223 for lower (or bottom) shielding, and are sequentially stacked or attached, respectively. . Herein, the PI film is described as an example, and various films which may have a dielectric constant may be applied. The first electrode part 211 is disposed on the upper shielding PI film 221, and the second electrode part 212 is disposed on the lower shielding PI film 223. However, when the plurality of electrode parts are disposed in the left and right directions, the electrode parts are disposed in the left and right directions in the PI film. The PI film 222 for stopping shielding is provided in the vertical separation distance space between the first electrode part 211 and the second electrode part 212. The PI film 222 for the interruption shielding has a thickness equal to the vertical separation distance between the first electrode portion 211 and the second electrode portion 212, and is preferably about 45 μm.

As shown in FIG. 3, when a plurality of electrode units 210 are provided, for example, by supplying different frequencies to the plurality of electrodes, the intensity of vibration may be increased by using the beat frequency, and as another example, the plurality of electrodes may be provided. The same frequency may be supplied to the electrode portions (the first electrode portion and the second electrode portion) of the to increase the intensity of vibration. The number of electrodes may be two or more provided in the left or right direction or stacked at a predetermined distance in the vertical direction.

3 illustrates that the first electrode 211 and the second electrode 212 included in the dielectric layer 220 are spaced apart from each other in the vertical direction. As the coupling capacitance is generated between the plurality of insulated electrodes, the strength of the electrostatic force shown in Equation 1 below may be adjusted. In addition, when the same frequency is supplied to the plurality of electrodes, the magnitude of the voltage applied by Equation 1 below is increased so that the strength of the vibration force may be increased by amplifying the electrostatic force.

, Where ε: permittivity

As shown in FIG. 4, a cosine wave corresponding to the first frequency f1 is supplied to the first electrode part 211, and a second frequency different from the first frequency f1 is supplied to the second electrode part 212. When cosine waves corresponding to f2) are supplied and overlapped with each other, beat frequencies suitable for various tactile stimuli are generated as shown in Equation 2 below. The strength of the electrostatic force is increased by the superposition of the electric field, and the strength of the vibration force is increased. When the carrier frequency ((f1 + f2) / 2) is adjusted to the resonance frequency, the magnitude of the vibration force is further amplified.

Here, the beat frequency is the absolute value of f1-f2, and the carrier frequency is (f1 + f2) / 2.

At this time, when the carrier frequency is adjusted to the resonance frequency in Equation 2, the magnitude of the vibration force may be further amplified.

However, at this time, the high voltage signal supplied to each electrode unit is not limited to the shape of the signal such as pulse wave, cosine wave, sine wave, triangular wave, etc., and any high voltage signal having a certain frequency rather than a DC component may be applied. However, preferably, signals such as cosine waves or sine waves, rather than pulse waves, can significantly reduce noise generation of vibration. In this case, the high voltage signal supplied to the electrode part has a predetermined frequency to charge and discharge the charge of the electrode part, and details will be described later.

In FIG. 3, the first electrode portion 211 is positioned above the second electrode portion 212, but the arrangement positions of the first electrode portions 211 may be changed. Further, in order to generate the beat frequency, a plurality of electrode parts may be spaced apart from each other in the vertical direction as shown in FIG. 3, and although not shown in the drawing, the plurality of electrode parts may be disposed away from each other in the horizontal direction. However, in the exemplary embodiment of the present invention, the plurality of electrode parts will be described based on the arrangement in the vertical direction, but the arrangement in the horizontal direction is also within the scope of the technical idea of the present invention.

The vertical separation distance between the first electrode portion 211 and the second electrode portion 212 is related to the magnitude of the amplitude of the beat frequency. That is, the vertical separation distance between the first electrode portion 211 and the second electrode portion 212 is related to the coupling capacitance value between the two electrodes, and as the value of the coupling capacitance increases, the amplitude of the beat frequency increases and thus the electrostatic force Will increase the intensity. In one embodiment of the present invention, in consideration of the strength of the electrostatic force, it is preferable to make the vertical separation distance between the first electrode portion 211 and the second electrode portion 212 to have a value between 1 μm and 3,000 μm. On the other hand, the vertical separation distance between the electrode portion 210 and the upper side of the dielectric layer has a value of approximately 1㎛ ~ 3,000㎛, the dielectric constant of the dielectric layer may be applied in relation to the strength of the electrostatic force. Preferably, the vertical separation distance between the electrode portion 210 and the top surface of the dielectric layer is 37 μm or 55 μm, and the thickness of the entire dielectric layer 220 is 300 μm. In addition, the dielectric constant is preferably 3.5. In addition, the vertical separation distance between the first electrode and the second electrode is preferably about 45㎛. The above-mentioned preferred value is a value applied in consideration of the strength of the electrostatic force determined by the vertical separation distance and permittivity between the parts.

The above formula relating to the beat frequency can be referred to within the scope without departing from the spirit of the present invention, the amplitude of the beat frequency is proportional to the coupling capacitance value.

In the case of generating the beat frequency using a plurality of electrode parts, the strength of the electrostatic force may be increased than when using a single electrode part, and the beat frequency (absolute value of f1-f2 in FIG. 4) and the carrier frequency ( There is an advantage that can generate a variety of vibration patterns by the mixed vibration between f1 + f2) / 2).

The high voltage signals supplied to the first electrode portion 211 and the second electrode portion 212 to generate the beat frequency are supplied to the respective electrode portions with high voltage signals having different frequencies f1 and f2 as shown in FIG. 4. do. That is, a high voltage signal having a frequency of f1 is supplied to the first electrode portion 211, and a high voltage signal having a frequency of f2 is supplied to the second electrode portion 212. In this case, f1, f2, and the carrier frequency ((f1 + f2) / 2) preferably have a value within 500 Hz, and f1 and f2 are different frequencies to generate beat frequency. In addition, the beat frequency (absolute value of f1-f2) preferably has a value within 250 Hz. Therefore, various beat vibration patterns can be generated by changing the frequencies of f1 and f2 according to the use environment of the actuator.

In this case, in the case of the plurality of electrodes, a resonance frequency may be used to increase the intensity of vibration as much as possible. The resonant frequency is inversely proportional to the weight of the mass described above and is proportional to the spring coefficient (or spring constant) of the vibration amplifier. Therefore, the resonance frequency can be derived from the weight of the mass and the design value of the spring coefficient, and the amplitude of vibration according to the beat frequency is primarily amplified by matching the carrier frequency ((f1 + f2) / 2) to the resonance frequency. And secondly, the intensity of vibration can be further maximized.

The high voltage power supply unit and the charge / discharge signal generation unit are provided correspondingly according to the number of configurations of the electrode unit 210. However, in the exemplary embodiment of the present invention illustrated in FIGS. 5 and 6, two electrode units 210 will be described as a reference.

The first and second high voltage power supplies 410 and 420 generate high voltages of the high voltage signals supplied to the first and

second electrode parts

211 and 212, respectively, and supply them to the first and second charge and discharge signal generators 510 and 520. That is, the high voltage generated by the first and second high voltage power supplies 410 and 420 is 3.5 kV as an example of the DC component. However, the magnitude of the voltage is not necessarily limited thereto and may have a value between 0.5kV and 4kV. The high voltage of the DC component is supplied to the first and second charge and discharge signal generators 510 and 520, respectively.

The first and second charge and discharge signal generators 510 and 520 generate a high voltage signal having a predetermined frequency. That is, the first and second charge and discharge signal generators 510 and 520 generate cosine waves that are high voltage signals having a predetermined frequency by switching high voltages of DC components supplied from the first and second high voltage power supplies 410 and 420, respectively. The high voltage signal has a high voltage and has a predetermined frequency according to switching (see the equation of the high voltage signal supplied to the first and second electrode portions of FIG. 4 for reference). However, the frequency supplied to each electrode part is different from each other (f1 and f2 in the case of a single electrode part) and may be a signal having a predetermined frequency of various shapes such as pulse wave, triangle wave, sawtooth wave, etc. in addition to cosine wave.

Referring to the first high voltage signal supplied to the first electrode part 211 among the first and

second electrode parts

211 and 212 described above, the first high voltage signal has a voltage magnitude of about 3.5 kV and a frequency of f1. . At this time, as shown in FIG. 6, the first charging unit 511 is operated to charge the first electrode unit 211 during the half cycle (charge interval) of the frequency of f1, and the charge is charged to the first electrode portion 211 during the remaining half cycle (discharge interval). The first discharge part 512 is operated to discharge charges charged in the first electrode part 211. Accordingly, the frequency f1 of the high voltage signal is determined according to the switching operation between the first charging unit 511 and the first discharge unit 512. However, in the above description, only the case where the charging section and the discharge section are 50% each is described, but the present invention is not limited thereto and may be adjusted according to the use environment. That is, the charging section may be longer to allow maximum charging, or the charging section may be shorter than the maximum charging (ie, if the maximum charging is 3.5 kV, the charging / discharging section may be charged to be 3.5 kV or less. adjustment). By adjusting the ratio of such charge / discharge sections, it is possible to adjust the maximum high voltage value charged in the electrode unit, and thus the intensity of the electrostatic force can be adjusted. That is, the higher the high voltage value charged, the higher the strength of the electrostatic force, and the lower the high voltage value, the lower the strength of the electrostatic force.

As a specific implementation example of the first high voltage power supply unit 410, the first charging unit 511, and the first discharge unit 512, as illustrated in FIG. 7, the first high voltage power supply unit 410 is a high voltage of 3.5 kV by a high voltage amplifier. Generates and supplies a high voltage of the DC component to the first optocoupler 511. The first and

second optocouplers

511 and 512 are controlled by the optocoupler charge /

discharge control signals

720 and 730 of the controller 600.

10 and 11, in the charging section of the high voltage signal 710, the first optocoupler 511 is “ON” by the optocoupler charging control signal 720, and the second optocoupler 512 is used. ) Is "OFF" by the optocoupler discharge control signal 730. In the discharge section of the high voltage signal 720, the second optocoupler 512 is "ON" by the optocoupler discharge control signal 730, the first optocoupler 511 is the optocoupler charge control signal 720 "OFF" by The high voltage signal 710 described above has a specific frequency f or f1 and f2 as described above according to the on / off operation of the first and

second optocouplers

511 and 512, and is a charge / discharge signal for charging and discharging the electrode unit. However, although the high voltage signal 710 having the specific frequency shown in FIGS. 10 and 11 is illustrated in a triangular wave shape, the sine wave, cosine wave, pulse wave, etc. may vary according to various operations of the first and

second optocouplers

511 and 512. It may be implemented in a waveform shape.

12 and 13 illustrate an optocoupler charge control signal 720 for controlling the first optocoupler 511 and an optocoupler discharge control signal 730 for controlling the second optocoupler 512. 12 illustrates that there is no overlap of the signal between the optocoupler charge control signal and the optocoupler discharge control signal, and FIG. 13 illustrates the optocoupler charge control signal and the optocoupler discharge in order to start discharging before the charging period ends. There is an overlap section between control signals. By controlling the first and

second optocouplers

511 and 512 so that the overlapping chip section is formed, the waveform of the high voltage signal 710 may be generated to have a gentle waveform close to a sine wave or cosine wave. The optocoupler described above may be replaced by an On / Off control element such as a MOSFET.

On the other hand, the second optocoupler 512 is electrically connected to the ground, and when the second optocoupler 512 is "ON" in the discharge period, the first electrode portion 211 is electrically connected to the ground, the first electrode The charge charged in the unit 211 is discharged momentarily. If the charges charged in the first electrode portion 211 are not discharged by setting a discharge period as in the present invention, even if the high voltage signal is not supplied for a certain period by the AC component, the charge remains in the dielectric layer 220. Since the charge is not quickly dissipated, the electrostatic force is not dissipated, thereby preventing the vertical vibration of the mass body 110. Therefore, the present invention has an advantage of optimizing the vibration of the mass body 110 by quickly discharging the charge remaining in the dielectric layer by setting the charging section and the discharge section.

Accordingly, the high voltage signal supplied to each electrode portion of the present invention has a constant frequency f or f1, f2. In this case, the f frequency is a case of one electrode part, and in the case of f1 and f2, there are two electrode parts for the beat frequency, and the f frequency is a vibration in which the user can feel the vibration indirectly due to the vibration of the mass body 110. At the same time as the frequency, for example, the half period is a charging period and the remaining half period is a discharge period.

In addition, the frequencies of f1 and f2 are the frequencies supplied to the first and

second electrode parts

211 and 212 to generate the beat frequency, respectively, and the user may feel the vibration of the beat frequency (absolute value of f1-f2), which is the vibration frequency. , f1 and f2 are the charge periods for each half period, and the charge / discharge frequency for the discharge period for the other half periods. In this case, the charging section and the discharge section may partially overlap for generating a gentle high voltage waveform (see FIG. 13), and the ratio between the charging section and the discharge section may be set between at least 20 to 80%.

second electrode portions

211 and 212 to generate the beat frequency, respectively, and the user is the beat frequency (absolute value of f1-f2) and the carrier frequency f1, which are vibration frequencies. And the average of f2), and each of the frequency channels in each frequency channel is a charging period during the half cycle of f1, discharge period for the remaining half cycle, the charging period for the half cycle of f2, It is a discharge section.

The second high voltage signal supplied to the second electrode part 212 among the first and

second electrode parts

211 and 212 has a voltage magnitude of approximately 3.5 kV and a frequency of f 2, and the second charging part 521 and the second charge signal are provided. The operation of the discharge unit 522 will be replaced with the description of the operations of the first charging unit 511 and the first discharge unit 512 described above.

The controller 600 may be implemented by a microcontroller, an analog circuit, or a digital circuit. At this time, the optocoupler described above is an element composed of an optodiode and an infrared LED, and the control unit 600 supplies a control signal to the infrared LED to operate the optocoupler. Accordingly, the control unit 600 according to the frequency (f or f1 and f2) of the high voltage signal supplied to the single electrode unit 210 or the first and

second electrode units

211 and 212, the first optocoupler 511 and the second opto Switching control of the coupler 512. The above-described optocoupler may further be referred to technical specifications within the scope not departing from the technical spirit of the present invention.

On the other hand, when using the resonant frequency, the controller 600 controls the above-described f to be the resonant frequency, or controls the charging unit and the discharging unit so that the carrier frequency of the beat frequency becomes the resonant frequency.

(액추에이터 패널의 구성 및 기능)(Configuration and Function of Actuator Panel)

The actuator panel further includes a base substrate 20 in addition to the actuator described above. The base substrate 20 is a contact portion where the user contacts to receive a sense of vibration, and the user indirectly receives a sense of vibration by touching a finger with one region (contact area) of the base substrate 20. As shown in FIGS. 1 and 3, the base substrate 20 is disposed at the lowermost surface to support the spacer 300 and the electrostatic force generating unit 200. That is, the base substrate 20 may be an LCD panel, a reinforced plastic (for example, fiberglass reinforced plastics (Peek, Poly Carbonate, etc.), or a flexible display panel, etc.) The actuator 10 according to the present invention may therefore be a base substrate. It is attached to one surface of 20 to indirectly transmit vibration to a user, but additional components may be further included as necessary when attaching the actuator 10 to the base substrate 20. As an example, the actuator 10 may be included. ) May be a double-sided tape or the like for attaching the base substrate 20.

As shown in FIG. 8, the actuator panel 40 may be provided with a plurality of actuators 10 to indirectly provide a sense of vibration to the entire area of the base substrate 20. That is, as shown in FIG. 8, the first actuator 10 and the second actuator 10 ′ are disposed on one surface of the base substrate in the housing 3, and correspond to the contact area where the user's finger 2 contacts. By operating the actuator, the vibration can be indirectly transmitted to the user. At this time, the detection of the contact area that the user's finger touches is recognized by the control unit of the actuator panel 40, the actuator by transmitting a control signal to generate the vibration to the actuator corresponding to the contact area to the actuator 600 of the actuator by It can generate vibrations.

Meanwhile, the controller of the actuator panel 40 may change the vibration frequency by transmitting a control signal for changing the frequencies f or f1 and f2 of the high voltage signal to the controller 600 of the actuator.

(진동전달 경로 및 정전기력의 방향)(Vibration transmission path and direction of electrostatic force)

In the present invention, an indirect path is used to give a vibration feeling to the contact area of the user. That is, the user does not directly contact the mass body 110 in which the vibration is actually generated, but the vibration generated from the mass body 110 is the vibration amplifier 120, the mass body support 130, the spacer 300, and the base substrate. Vibration is transmitted to the user indirectly via the (20).

Description of the configuration and functions of the above-described parts have been described separately from each other for convenience of description, and any configuration and function may be implemented by being integrated into other components, or may be further subdivided as necessary.

On the other hand, by the above-described configuration of the actuator 10, the electrostatic force is generated to face the grounded mass (110). That is, as shown in FIGS. 1 and 3, the electrostatic force is generated to face the mass body 110 grounded from the electrode unit 210 to which the high voltage signal is supplied.

As mentioned above, although demonstrated with reference to one Embodiment of this invention, this invention is not limited to this, A various deformation | transformation and an application are possible. That is, those skilled in the art will readily appreciate that many modifications are possible without departing from the spirit of the invention. In addition, when it is determined that the detailed description of the known function and its configuration or the coupling relationship for each configuration of the present invention may unnecessarily obscure the subject matter of the present invention, it should be noted that the detailed description is omitted. something to do.

[Description of the code]

1: electrostatic force

2: user finger

3: housing

10, 10 ': actuator using electrostatic force

20: base base material

30: air gap

40: actuator panel

50: reinforcing plate for the lower shield

100: mass part

110: mass

120: vibration amplifier (or slit groove)

121: inner slit groove

122: outer slit groove

130: mass support

200: electrostatic force generating unit

210: electrode portion

211: first electrode portion

212: second electrode portion

220: dielectric layer

221: PI film for upper shielding

222: PI Film for Interrupted Shielding

223: PI film for lower shielding

300: spacing (or spacer)

410: first high voltage power supply

420: second high voltage power supply

510: first charge and discharge signal generation unit

511: first charging unit

512: first discharge unit

520: the second charge and discharge signal generation unit

521: second charging unit

522: second discharge unit

600: control unit

710: high voltage signal

720: Optocoupler charge control signal

730: optocoupler discharge control signal

Claims

A mass part vibrating by an electrostatic force, and

It is disposed at a predetermined interval spaced corresponding to the mass portion includes an electrostatic force generating unit for generating the electrostatic force,

Actuator using the electrostatic force, characterized in that the vibration generated in the mass portion is transmitted along the predetermined vibration path indirectly transmitted to the user.
The method of claim 1,

And the mass portion and the electrostatic force generating portion are sequentially disposed on the same vertical line in the vertical direction so that vibration generated in the mass portion is indirectly transmitted to the user along the vibration path.
The method of claim 2,

Actuator using the electrostatic force, characterized in that the vibration of the mass portion is indirectly transmitted to the contact region by forming a contact region that the user contacts the same area on the same vertical line with respect to the mass portion.
Mass part vibrating by electrostatic force,

An electrostatic force generating unit disposed at a predetermined interval apart from the position corresponding to the mass unit to generate the electrostatic force;

A high voltage power supply unit generating a high voltage supplied to the electrostatic force generating unit, and

And a charge / discharge signal generation unit configured to charge and discharge the charge of the electrostatic force generation unit on the high voltage signal path supplied from the high voltage power supply unit to the electrostatic force generation unit.
The method of claim 4, wherein

The charge and discharge signal generation unit,

To generate the high voltage signal supplied to the electrostatic force generating unit divided into a charging section and a discharge section,

Actuator using the electrostatic force, characterized in that the ratio between the charge section and the discharge section is set to at least 20 to 80% to discharge the charge so that the vibration of the mass portion is within a predetermined range.
Mass part vibrating by electrostatic force,

An electrostatic force generating unit disposed at a predetermined interval apart from the position corresponding to the mass unit to generate the electrostatic force, and

Actuator using an electrostatic force, characterized in that it comprises a vibration amplifier disposed in the horizontal direction relative to the mass or perpendicular to the mass so as to amplify the vibration of the mass by elasticity.
The method of claim 6,

When the vibration amplifier is disposed in the horizontal direction further comprises a mass support for supporting the mass in the circumferential direction,

And the vibration amplification part is disposed between the mass support and the mass part by sequentially placing the mass support part, the vibration amplification part, and the mass part based on a horizontal direction.
The method of claim 7, wherein

The mass support part, the vibration amplification part, and the mass part are integrally formed,

The vibration amplifier is an actuator using an electrostatic force, characterized in that to generate elasticity by forming a slit groove in the circumferential direction in the space region between the mass support and the mass.
The method of claim 8,

The slit groove is an actuator using an electrostatic force, characterized in that consisting of the inner slit groove and the outer slit groove.
The method of claim 8,

The vibration amplifier,

Actuator using electrostatic force, characterized in that the stiffness has a value between 1x10 2 N / m ~ 5x10 6 N / m.
The method of claim 6,

When the vibration amplifier is disposed in the vertical direction, the vibration amplifier is an actuator using an electrostatic force, characterized in that for amplifying the vibration by supporting the mass portion from the lower side.
Mass part vibrating by electrostatic force,

An electrostatic force generating unit disposed at a predetermined interval apart from the position corresponding to the mass unit to generate the electrostatic force;

A vibration amplification part disposed in a horizontal direction with respect to the mass part or in a vertical direction with respect to the mass part so as to amplify the vibration of the mass part by elasticity, and

And a spacing portion disposed to have a predetermined height outside the circumferential direction of the mass portion and the electrostatic force generating portion to provide a predetermined separation distance between the mass portion and the electrostatic force generating portion.
The method of claim 12,

When the vibration amplification portion is disposed in the horizontal direction further comprises a mass support portion disposed on the spacing portion to support the mass portion in the circumferential direction,

The mass support part, the vibration amplification part, and the mass part are integrally formed so as to be sequentially arranged based on a horizontal direction.

The vibration amplifier is an actuator using an electrostatic force, characterized in that to generate elasticity by forming a slit groove in the circumferential direction in the space region between the mass support and the mass.
The method of claim 13,

The high voltage signal supplied to the electrostatic force generating unit is an actuator using the electrostatic force, characterized in that the frequency corresponding to the resonance frequency of the mass portion and the vibration amplifier.
The method of claim 13,

Actuator using the electrostatic force, characterized in that the frequency of the high voltage signal supplied to the electrostatic force generating unit has a range within 500Hz and divided into a charging section and a discharge section.
The method of claim 12,

Further comprising a base substrate for transmitting the vibration indirectly to the user by transmitting the vibration generated in the mass portion along a predetermined vibration path,

The vibration path is an actuator using an electrostatic force, characterized in that the path in which vibration is transmitted in the order of the mass portion, the vibration amplifier, the gap portion, and the base substrate.
The method according to any one of claims 1, 4, 6, and 12,

As the mass part is electrically connected to the ground, the electrostatic force is generated by the high voltage supplied to the electrostatic force generating unit,

The actuator using the electrostatic force, characterized in that the mass portion oscillates in the vertical direction in the space spaced between the mass portion and the electrostatic force generating portion by the electrostatic force.
The method according to any one of claims 1, 4, 6, and 12,

The electrostatic force generating unit,

An electrode unit receiving a high voltage signal, and

Actuator using the electrostatic force, characterized in that it comprises a dielectric layer having a predetermined dielectric constant.
The method of claim 18,

The high voltage signal supplied to the electrode unit is an actuator using an electrostatic force, characterized in that supplied to the electrode unit in accordance with a predetermined charge and discharge frequency to have a charging section and a discharge section.
The method of claim 18,

The electrode unit,

A first electrode part receiving a first high voltage signal, and

And a second electrode part receiving a second high voltage signal different from the first high voltage signal,

The frequency of the first and second high voltage signals is within a range of 500 Hz according to the charge and discharge frequency to have a charging section and a discharge section.

Actuator using the electrostatic force, characterized in that the frequency of the first, second high-voltage signal is set so that the beat frequency is within the range of 250 Hz so that the beat electrostatic force is generated.
The method of claim 18,

The electrode unit,

The first and second electrode parts are supplied with the same high voltage signal,

The strength of the electrostatic force is increased by overlapping the magnitudes of the voltages of the high voltage signals applied to the first and second electrode parts.

Actuator using the electrostatic force, characterized in that the frequency of the high voltage signal has a range within 500Hz and divided into a charging section and a discharge section.
The method of claim 20 or 21,

The first and second electrode parts,

Spaced apart from each other in the dielectric layer in the vertical direction or spaced apart in the left and right directions,

When spaced apart in the vertical direction,

Actuator using the electrostatic force, characterized in that the vertical separation distance between the first and second electrode portions in order to adjust the amplitude size of the beat frequency or the strength of the electrostatic force is 1㎛ ~ 3,000㎛.
The method of claim 18,

The dielectric layer has a thickness of 1 μm to 3,000 μm,

The dielectric constant is 1.5 to 30,

The material of the dielectric layer is an actuator using electrostatic force, characterized in that at least one of polyimide, silicon, polyurethane, PDMS (Polydimethylsiloxane), PET (Polyethylene terephthalate), and a polymer composite.
The method according to any one of claims 1, 4, 6, and 12,

In order to adjust the magnitude of the electrostatic force, the air gap between the mass portion and the electrostatic force generating unit is an actuator using an electrostatic force, characterized in that 10㎛ ~ 3,000㎛.
The method according to any one of claims 1, 4, 6, and 12,

The direction of the electrostatic force is an actuator using the electrostatic force, characterized in that toward the mass portion from the electrostatic force generating unit.
The actuator using the electrostatic force in any one of Claims 1, 4, 6, and 12, and

The actuator panel using the electrostatic force is characterized in that it comprises a base substrate for transmitting the vibration to the user by transmitting a vibration generated by a plurality of actuators using the electrostatic force along a predetermined vibration path.
The method of claim 26,

The base base material,

Actuator panel using the electrostatic force, characterized in that any one of a display panel or a flexible display panel for indirectly transferring the vibration generated by the actuator using the electrostatic force.
The method of claim 26,

The electrostatic force generating unit according to any one of claims 1, 4, 6, and 12,

A lower reinforcement plate provided on an upper portion of the base substrate,

A lower dielectric layer provided on the reinforcing plate,

A second electrode part provided in the lower dielectric layer,

An intermediate dielectric layer provided on the second electrode part,

An upper dielectric layer provided on the middle dielectric layer, and

Actuator panel using the electrostatic force comprising a first electrode portion provided in the upper dielectric layer.
Vibration unit for vibrating the mass by the electrostatic force, and

And a controller for controlling the electrostatic force to be generated by outputting a high voltage signal supplied to the vibrator to correspond to a predetermined charge / discharge frequency.

The high voltage signal has a charging section and a discharge section according to the charge and discharge frequency to generate an electrostatic force by charging and discharging the electric charge of the vibrating unit, characterized in that the actuator using the electrostatic force.
The method of claim 29,

The vibrating unit,

The mass vibrating by an electrostatic force, and

And an electrostatic force generating unit including an electrode unit and a dielectric layer disposed to be spaced apart from the mass in a vertical direction to generate an electrostatic force according to the frequency of the high voltage signal.
The method of claim 30,

Actuator using the electrostatic force, characterized in that the frequency of the high voltage signal having a charging section and a discharge section is a charge and discharge frequency within 500Hz.
Vibration unit for vibrating the mass by the electrostatic force, and

And a controller for controlling the electrostatic force to be generated by outputting a high voltage signal supplied to the vibrator to correspond to a preset resonance frequency.

The high voltage signal has a charging section and a discharge section to charge and discharge the electric charge of the vibrator to generate an electrostatic force, characterized in that the actuator using the electrostatic force.
The method of claim 32,

The vibrating unit,

The mass vibrating by an electrostatic force, and

An electrostatic force generating unit including an electrode unit and a dielectric layer disposed to be spaced apart from the mass in a vertical direction to generate an electrostatic force according to the frequency of the high voltage signal,

Further comprising a vibration amplifier for amplifying the vibration of the mass by elastic,

The frequency of the high voltage signal is an actuator using an electrostatic force, characterized in that the charge and discharge frequency corresponding to the resonance frequency determined by the mass and the vibration amplifier.
The method of claim 33, wherein

Further comprising a mass support for supporting the mass in the circumferential direction,

The mass support portion, the vibration amplification portion, and the mass body are integrally formed,

The vibration amplifier is an actuator using an electrostatic force, characterized in that to generate elasticity by forming a slit groove in the circumferential direction in the space region between the mass support and the mass.
Vibration unit for vibrating the mass by the beat electrostatic force, and

It includes a control unit for generating a beat frequency by generating a beat frequency by outputting a plurality of high voltage signals supplied to the vibrator corresponding to a predetermined charge and discharge frequency,

The high voltage signal has a charging section and a discharge section having an electrostatic force, characterized in that for generating an electrostatic force by charging and discharging the charge of the vibrating unit.
36. The method of claim 35 wherein

The vibrating unit,

The mass vibrating by an electrostatic force, and

An electrostatic force generating unit including an electrode unit and a dielectric layer disposed to be spaced apart from the mass in a vertical direction to generate an electrostatic force according to the frequency of the high voltage signal,

The electrode unit,

A first electrode part receiving a first high voltage signal, and

The second electrode unit receives a second high voltage signal different from the first high voltage signal to generate the beat frequency.

And the first electrode portion and the second electrode portion are disposed in the dielectric layer.
The method of claim 36,

The frequency of the first and second high voltage signals is within 500 Hz to have a charging section and a discharge section.

The frequency of the first and second high voltage signal is set so that the beat frequency is within a range of 250Hz so that the beat electrostatic force is generated, the actuator using the electrostatic force, characterized in that.
The method of claim 36,

Further comprising a vibration amplifier for amplifying the vibration of the mass by elastic,

The carrier frequency according to the generation of the beat frequency is an actuator using an electrostatic force, characterized in that the frequency corresponding to the resonance frequency determined by the mass and the vibration amplifier.
The method of claim 38,

Further comprising a mass support for supporting the mass in the circumferential direction,

The mass support portion, the vibration amplification portion, and the mass body are integrally formed,

The vibration amplifier is an actuator using an electrostatic force, characterized in that to generate elasticity by forming a slit groove in the circumferential direction in the space region between the mass support and the mass.
The method of claim 38,

The vibration is an actuator using an electrostatic force, characterized in that the mixed vibration of the beat frequency and the carrier frequency.
A high voltage power supply for generating a high voltage

A charge / discharge signal generator configured to receive the high voltage and generate a high voltage signal corresponding to a preset charge / discharge frequency;

A vibrator configured to receive the high voltage signal to generate an electrostatic force, and to vibrate a mass by the electrostatic force; and

It includes a control unit for controlling the charge and discharge signal generation unit,

The high voltage signal has a charging section and a discharge section according to the charge and discharge frequency to generate an electrostatic force by charging and discharging the electric charge of the vibrating unit, characterized in that the actuator using the electrostatic force.
42. The method of claim 41 wherein

The vibrating unit,

The mass vibrating by an electrostatic force, and

An electrostatic force generating unit including an electrode unit and a dielectric layer disposed to be spaced apart from the mass in a vertical direction to generate an electrostatic force according to the frequency of the high voltage signal,

The charge and discharge signal generation unit,

A charging unit generating a charging section of the high voltage signal to charge the electrode unit according to the charging control signal of the controller;

And a discharge unit for generating a discharge section of the high voltage signal to discharge electric charges in the electrode unit according to the discharge control signal of the control unit.
The method of claim 42,

The discharge unit,

Actuator using the electrostatic force, characterized in that for discharging the electric charge of the electrode portion by causing the electrode portion to be electrically connected to the ground during the discharge period.
The method of claim 42,

The charge control signal and the discharge control signal actuator using an electrostatic force, characterized in that the overlapping section is generated.
The method according to any one of claims 29, 32, 35, and 41,

The vibration is indirectly transmitted to the user,

Actuator using the electrostatic force, characterized in that the vibration of the mass portion is indirectly transmitted to the contact region by forming a contact region that the user contacts the same area on the same vertical line with respect to the mass portion.
The method according to any one of claims 29, 32, 35, and 41,

As the mass part is electrically connected to the ground, the electrostatic force is generated by the high voltage supplied to the electrostatic force generating unit,

The actuator using the electrostatic force, characterized in that the mass portion oscillates in the vertical direction in the space spaced between the mass portion and the electrostatic force generating portion by the electrostatic force.
An actuator using an electrostatic force according to any one of claims 29, 32, 35, and 41, and

The actuator panel using the electrostatic force is characterized in that it comprises a base substrate for transmitting the vibration to the user by transmitting a vibration generated by a plurality of actuators using the electrostatic force along a predetermined vibration path.
The method of claim 47,

The base base material,

Actuator panel using the electrostatic force, characterized in that any one of a display panel or a flexible display panel for indirectly transferring the vibration generated by the actuator using the electrostatic force.