KR101882891B1 - A gripper - Google Patents

A gripper Download PDF

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Publication number
KR101882891B1
KR101882891B1 KR1020160008030A KR20160008030A KR101882891B1 KR 101882891 B1 KR101882891 B1 KR 101882891B1 KR 1020160008030 A KR1020160008030 A KR 1020160008030A KR 20160008030 A KR20160008030 A KR 20160008030A KR 101882891 B1 KR101882891 B1 KR 101882891B1
Authority
KR
South Korea
Prior art keywords
jaws
plate
clamping
power plate
workpiece
Prior art date
Application number
KR1020160008030A
Other languages
Korean (ko)
Other versions
KR20170088112A (en
Inventor
샤오-칭 린
푸-칭 왕
시엔-테 성
청-잉 린
신-카이 쳉
포-카이 창
야오-젠 창
Original Assignee
하이윈 테크놀로지스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하이윈 테크놀로지스 코포레이션 filed Critical 하이윈 테크놀로지스 코포레이션
Priority to KR1020160008030A priority Critical patent/KR101882891B1/en
Publication of KR20170088112A publication Critical patent/KR20170088112A/en
Application granted granted Critical
Publication of KR101882891B1 publication Critical patent/KR101882891B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00—Clamps
    • B25B5/02—Clamps with sliding jaws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00—Clamps
    • B25B5/06—Arrangements for positively actuating jaws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00—Clamps
    • B25B5/14—Clamps for work of special profile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00—Clamps
    • B25B5/16—Details, e.g. jaws, jaw attachments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers

Abstract

A driving unit, a transmission unit, and a clamping unit, wherein the transmission unit includes a first transmission plate and a second transmission plate disposed below the first transmission plate, wherein the first transmission plate, the second transmission plate, And the clamping unit includes a plurality of first jaws and a plurality of second jaws, and the first jaw and the second jaw are connected to the bottom surface of the first power plate and the second and third jaws, respectively, Respectively, and a plurality of first jaws and second jaws are alternately arranged. Thus, the first jaw and the second jaw clamp the one or more workpieces using the relative movement between the first and second rolling plates.

Description

Clamping mechanism {A GRIPPER}

The present invention relates to a clamping mechanism, and more particularly to a clamping mechanism capable of stably clamping one or more workpieces.

The clamp disclosed in Taiwan Patent Publication No. I1320010 uses two long axis levers to move the pressure spring plate and the opening and closing pressure plate, respectively, so as to clamp the workpiece in the process of moving the pressure spring plate and the opening and closing pressure plate relative to each other. However, in the above-mentioned conventional patent, since the distance between the pressing spring pressure plate and the opening and closing pressure plate can not be adjusted, only a fixed size workpiece can be clamped, and it is inconvenient and inefficient in use.

In addition, a gripper device disclosed in Taiwan Patent Publication No. I325359 uses a connecting lever to move a gripper, and a gripper uses a gas pressure to absorb a workpiece. In the conventional patent, the gap between two sets of grippers Can be finely adjusted through the connecting levers, but the actual reachable effect is not ideal since the adjusting width is limited.

It is a principal object of the present invention to provide a clamping mechanism that can stably clamp a workpiece or a plurality of workpieces of different sizes and shapes, thereby increasing operational convenience and increasing work efficiency.

In order to achieve the above object, a clamping mechanism provided in the present invention includes a driving source, a transmission unit, and a clamping unit. The transmission unit includes a first transmission plate and a second transmission plate disposed below the transmission plate. The first transmission plate and the second transmission plate are connected to the driving source, respectively, Wherein the clamping unit includes a plurality of first jaws and a plurality of second jaws, the plurality of first jaws being installed on a bottom surface of the first power transmission plate, The plurality of second jaws are disposed on the bottom surface of the second power plate, and the plurality of first jaws and the plurality of second jaws are staggered.

As will be understood from the above description, regardless of whether the first and second transmission plates are close to each other or away from each other, the clamping unit can use the relative positional relationship between the first jaw and the second jaw It is possible to clamp one workpiece or a plurality of workpieces of different sizes and shapes, thus increasing the operational convenience and increasing the working efficiency.

Preferably, each of the first jaws includes two opposing first clamping members, each of the second jaws includes two opposing second clamping members, and between the two second clamping members Is smaller than the distance between the two first clamping members and each of the first clamping member and each of the second clamping members comprises at least one ring groove, And the opening angle of the ring groove is most preferably between 45 degrees and 120 degrees. Therefore, in the process of clamping the workpiece by the first and second jaws, the position error of the workpiece is corrected through the ring groove so that the workpiece is more stably clamped by the first and second jaws .

The detailed structure, feature, assembly or use of the clamping mechanism provided by the present invention will be described in the following detailed description of the embodiments. However, it will be understood by those skilled in the art that the specific embodiments enumerated for the detailed description and implementation of the invention are merely illustrative of the invention and are not intended to limit the scope of the invention It is not intended for.

1 is a perspective view according to a first embodiment of the present invention.
2 is a bottom view according to Embodiment 1 of the present invention.
3 is a structural plan view of the first clamping member according to the first embodiment of the present invention.
4 is a structural plan view of another form of the first clamping member according to Embodiment 1 of the present invention.
Fig. 5 is a front view according to Embodiment 1 of the present invention, and shows that a workpiece is clamped between a first jaw and a second jaw mainly when the first and second electric plates are brought close to each other.
Fig. 6 is the same as Fig. 5 and mainly shows a state in which the workpiece is unclamped when the first and second electric plates are apart from each other.
Fig. 7 is a front view according to Embodiment 2 of the present invention, and shows that when a first power plate and a second power plate are apart from each other, a workpiece is clamped between first and second jaws.
Fig. 8 is the same as Fig. 7 and shows a state in which the workpiece is unclamped mainly when the first and second electric plates are brought close to each other.
9 is a bottom perspective view according to the third embodiment of the present invention.

1 and 2, a clamping mechanism 10 according to the first embodiment of the present invention includes a driving source 20, a transmission unit 30, and a clamping unit 40. As shown in Fig.

The driving source 20 may use gas pressure, hydraulic pressure, or electric power as a power source, and is not particularly limited here.

The transmission unit 30 includes a first transmission plate 31 and a second transmission plate 32. The second transmission plate 32 is disposed below the first transmission plate 31 and includes a second transmission plate 32 and the first transmission plate 31 do not contact each other and the size of the second transmission plate 32 is smaller than that of the first transmission plate 31. [ The upper surface of the first transmission plate 31 is connected to the driving source 20 by the first connection member 33 and the upper surface of the second transmission plate 32 is connected to the driving source 20 so that the first power plate 31 and the second power plate 32 can be moved toward or away from each other through the driving of the driving source 20. [ In this embodiment, the first linking member 33 is located on the right side of the second linking member 34. In order to prevent the first and second transmission plates 31 and 32 from interfering with each other in the process of relatively moving the first transmission plate 31 and the second transmission plate 32, A hollow groove 35 is provided.

The clamping unit 40 includes a plurality of first jaws 41 and a plurality of second jaws 42, and three sets are exemplified in the present embodiment. 2, the first jaw 41 and the second jaw 42 are connected to the bottom surface of the first power plate 31 and the bottom surface of the second power plate 32, respectively, And the first jaw 41 and the second jaw 42 are staggered. The first jaw 41 also includes two opposing first clamping members 43 and the second jaw 42 includes two opposing second clamping members 44, Since the distance between the two clamping members 43 is larger than the distance between the two clamping members 44 and simultaneously the width of the second power plate 32 is larger than the distance between the two clamping members 44, It is possible to prevent collision with the first jaws 41 in the process. 3, each of the first clamping member 43 and the second clamping member 44 is provided with a ring groove 45 and the sectional shape of the ring groove 45 is a polygonal shape (for example, a triangle The opening angle θ of the ring groove 45 is the most preferable form from 45 degrees to 120 degrees and the first clamping member 43 and the second clamping member 44 have the same structural characteristics So that only the first clamping member 43 will be described.

5, the first drive plate 31 and the second drive plate 32 are driven to approach each other by using the drive source 20, and the first drive plate 31, It is possible to clamp the workpiece 12 between the first jaw 41 and the second jaw 42 of each set in the process of bringing the second motor plate 32 close to each other, 12 can be moved together to the machining position. After reaching the machining position, the first power plate 31 and the second power plate 32 are driven away from each other by using the drive source 20, As shown in the drawing, the first jaw 41 and the second jaw 42 allow the workpiece 12 to be unclamped by mutual separation of the first and second electric drive plates 31 and 32.

In Embodiment 2 of the present invention, the positions of the first linking member 33 and the second linking member 34 after assembly are opposite to those of the above-described embodiment. That is, the first connecting member 33 is located on the left side of the second connecting member 34, the upper surface of the first driving plate 31 is still connected to the driving source 20 by the first connecting member 33, The upper surface of the second electromotive plate 32 is still connected to the driving source 20 by the second connecting member 34. In this case, The workpiece 12 can be clamped by using the first jaw 41 and the second jaw 42 and the workpiece 12 can be clamped by using the first jaw 41 and the second jaw 42, The first power plate 31 and the second power plate 32 are driven to approach each other by using the driving source 20 to move the workpiece 12 ).

The first jaw 41 and the second jaw 42 can be guided by the opening of the ring groove 45 in a guiding effect on the workpiece 12 Thereby correcting the position of the workpiece 12, so that the workpiece 12 can be stably clamped. 4, the number of the ring grooves 45 can be increased to two according to the actual necessity, and the two ring grooves 45 are arranged in parallel in the vertical direction to form the first jaws 41, And the second jaws 42 provide a correction function to the workpieces 12 and 14 by using one of the ring grooves 45, thereby improving work efficiency. 9, the first jaws 41 and the second jaws 42 are installed on the bottom surface of the first power transmission plate 31 and the bottom surface of the second power transmission plate 32 in such a manner as to be spaced apart from each other It is possible. In this case, the workpieces 12 and 14 of different sizes and shapes can be clamped according to actual needs.

The clamping mechanism 10 of the present invention utilizes the relative operation of the first and second electromotive plates 31 and 32 and provides a staggered installation between the first jaw 41 and the second jaw 42, Not only can the clamping unit 40 clamp the plurality of workpieces 12 and 14 at one time but also the workpieces 12 and 14 of various sizes and shapes can be clamped by the first jaws 41 and second The distance between the jaws 42 can be further adjusted so that the clamping unit 40 can provide good clamping stability and in the process of clamping the workpieces 12 and 14, Thereby correcting the positions of the workpieces 12 and 14 and reducing the position error of the workpieces 12 and 14, thereby achieving the object of increasing the operability and increasing the working efficiency.

10: Clamping mechanism
12, 14: workpiece
20:
30: Electric power unit
31: first electric plate
32: second electric plate
33: second connecting member
34: second connecting member
35: hollow groove
40: Clamping unit
41: First.
43: a first clamping member
42: The second one.
44: second clamping member
45: ring groove
θ: opening angle

Claims (10)

A driving source;
The first power plate and the second power plate are connected to the drive source and are moved closer to each other by driving the drive source, and the first power plate and the second power plate are located below the first power plate. A moving power unit; And
The apparatus of claim 1, further comprising a plurality of first jaws and a plurality of second jaws, wherein the plurality of first jaws are installed on a bottom surface of the first power plate, A clamping unit installed on a bottom surface of the second electromotive plate, wherein the plurality of first jaws and the plurality of second jaws are staggered;
/ RTI >
Each of said first jaws including two opposing first clamping members, each said second jaw comprising two opposing second clamping members, the distance between said two second clamping members being such that said two clamping members Smaller than the distance between the first clamping members,
Clamping mechanism. The method according to claim 1,
Each of said first clamping member and each of said second clamping members each having at least one ring groove. 3. The method of claim 2,
Wherein the opening angle of the ring groove is between 45 degrees and 120 degrees. 3. The method of claim 2,
Wherein the cross-sectional shape of the ring groove is polygonal. The method according to claim 1,
Wherein the plurality of first jaws and the plurality of second jaws are both equally spaced or non-uniformly spaced. The method according to claim 1,
The upper surface of the first transmission plate is connected to the driving source by a first connection member, the upper surface of the second transmission plate is connected to the driving source by a second connection member, and the first transmission plate is provided with a hollow groove And the second connecting member is installed inside the hollow groove. The method according to claim 1,
The first jaws and the plurality of second jaws clamp the workpiece, and when the drive source moves the first power plate and the second power plate toward each other, The second jaws unclamping the workpiece by driving the second motorized plates away from each other. The method according to claim 1,
The first jaws and the plurality of second jaws clamp the workpiece, and when the driving source moves the first power plate and the second power plate away from each other, And wherein the plurality of first jaws and the plurality of second jaws unclamp the workpiece when the second motorized plate is driven close to each other. delete delete
KR1020160008030A 2016-01-22 2016-01-22 A gripper KR101882891B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160008030A KR101882891B1 (en) 2016-01-22 2016-01-22 A gripper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160008030A KR101882891B1 (en) 2016-01-22 2016-01-22 A gripper

Publications (2)

Publication Number Publication Date
KR20170088112A KR20170088112A (en) 2017-08-01
KR101882891B1 true KR101882891B1 (en) 2018-07-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160008030A KR101882891B1 (en) 2016-01-22 2016-01-22 A gripper

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000033588A (en) * 1998-07-21 2000-02-02 Mita Ind Co Ltd Chucking device
JP2015082570A (en) 2013-10-22 2015-04-27 株式会社ディスコ Wafer processing system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050118906A (en) * 2004-06-15 2005-12-20 삼성전자주식회사 Apparatus and method for supplying charge on semiconductor substrates
KR20110059179A (en) * 2009-11-27 2011-06-02 세메스 주식회사 Gripping member and apparatus for reversing a wafer having the gripping member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000033588A (en) * 1998-07-21 2000-02-02 Mita Ind Co Ltd Chucking device
JP2015082570A (en) 2013-10-22 2015-04-27 株式会社ディスコ Wafer processing system

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