KR101876370B1 - Carrying unit and inspection device provided with the same - Google Patents

Abstract

The present invention relates to a carrying unit and an inspection device provided with the same for carrying ductile products on a film or sheet. According to the present invention, there is provided a carrying unit including: a vacuum flow path provided in such a manner that a plurality of through-hole disc plates having slots extending in a direction orthogonal thereto at at least one side of a front surface or a rear surface are manufactured and then are combined with each other by sealing so as to configure an assembly body; at least one suction flow path and blow flow path provided in a fixing shaft in shaft directions thereof, the fixing shaft being inserted into a through-hole part of an assembly of the vacuum disc plates; and at least one circumferential slot provided within a predetermined angle in a circumferential direction of the fixing shaft, the circumferential slot corresponding to each of the suction flow paths. The carrying unit and the inspection device can be manufactured to have a large caliber and be generally applied to ductile products having many kinds of standards, thereby realizing good absorption quality and effectively preventing the blocking of the vacuum flow path.

Description

TECHNICAL FIELD [0001] The present invention relates to a transfer unit and an inspection apparatus having the transfer unit.

The present invention relates to a transfer unit for transferring a flexible article on a film or sheet, and an inspection apparatus having the transfer unit. Here, the flexible article may be formed of a single material or may have a structure in which single or different materials are stacked.

BACKGROUND OF THE INVENTION [0002] Flexible articles on a film or sheet are widely used in various industrial fields such as packaging or electronic materials. In particular, reliability inspection of a flexible circuit board on which a fine circuit pattern with a line width of 0.008 mm or less is formed is extremely important.

The automated inspection of a flexible article such as a flexible circuit board is performed by continuously feeding the flexible article provided in a roll form to the inspection area while checking the surface condition using an image device such as a line scan camera In this case, a roll-shaped transfer unit which operates in a vacuum adsorption manner for feeding and conveying the flexible article is known.

In the conventional vacuum suction type transfer unit, the outer rotary element is mounted around the inner fixed element provided with the vacuum passage and rotates, and the vacuum suction force is transmitted to the surface of the outer rotary element through the vacuum passage.

On the other hand, in such a vacuum suction type transfer unit, it is necessary to arrange a plurality of different types of inspection image devices along the circumferential direction of the transfer unit in the form of rolls. To this end, it is necessary to increase the roll diameter of the transfer unit . In this case, it is necessary to deeply process the vacuum flow path in the radial direction with respect to the rotary element or the stationary element of the transfer unit. However, since such machining is difficult in the prior art, it is practically difficult to manufacture a transfer unit with a large diameter.

In addition, since the conventional vacuum suction type transfer unit has a product specification in accordance with the width of the flexible article, there is a limit in that it can not be widely used for flexible articles of various specifications, and control for the suction force is not smooth, There is a problem that the damage of the flexible article and the reliability of the inspection are deteriorated due to excessive adsorption force, and there is also a problem that maintenance is difficult due to clogging of the internal vacuum flow path.

It is an object of the present invention to provide a flexible product which can be manufactured in a large diameter and which can be universally applied to a flexible product having various specifications to realize a good adsorption quality and effectively inhibit the clogging of the vacuum flow path, And a test apparatus having the same.

In the process of researching and developing a new transfer unit operating in a vacuum adsorption manner in connection with the above-described problem, the present inventors made a plurality of hollow disk plates having grooves extending in the radial direction on at least one side of the front surface or the back surface The plurality of hollow disc plates are hermetically coupled to each other to form an assembly so that the grooves are constituted by a vacuum flow path while one or more suction channels and blowing holes are formed in the axial direction of the stationary shaft inserted into the hollow portion of the hollow disc plate assembly, The present invention is directed to a method of forming at least one circumferential groove corresponding to each of the suction ducts in the circumferential direction of the stationary shaft at a predetermined angle range, Related mechanical design, including mechanical design with holes in the form of slots And the present invention has been reached by further specifying.

(1) a fixing member; And a rotary member slidably brought into close contact with the outer circumferential surface of the fixing member and rotated by external driving means, wherein the flexible member is connected to the suction passage of the fixing member through a plurality of vacuum passages of the rotary member, A transfer unit for transferring a vacuum attraction force to an article, wherein the rotary member includes a hollow disk plate assembly in which a plurality of hollow disk plates are assembled in series, and at least one of the front surface or the back surface of each of the plurality of hollow disk plates has a diameter Wherein each of the plurality of radial grooves is formed in each of the plurality of vacuum passages provided inside the rotary member.

(2) The rotary member further includes a drum coupled to an outer circumferential surface of the hollow disk plate assembly and having a plurality of suction holes, wherein each of the plurality of vacuum channels communicates with at least one of the suction holes. (1).

(3) The transfer unit of (2), wherein the suction holes are formed to have a long diameter in the width direction of the drum.

(4) The method according to (2) or (4), wherein the outer end side of each of the plurality of radial grooves is formed to have a long diameter in the circumferential direction of the hollow disk plate and a plurality of suction holes communicate with each of the plurality of vacuum channels (3).

(5) a plurality of circumferential grooves are provided in the circumferential direction of the fixing member, the plurality of suction passages are provided so as to communicate with the plurality of circumferential grooves, respectively, and each of the plurality of circumferential grooves The conveying unit of (1) above, characterized in that a group of vacuum flow paths arranged on the same plane among the vacuum flow paths are communicated.

(6) The conveyance unit of (1) or (5), wherein the fixing member further includes a blow-off passage communicating with the plurality of vacuum flow paths.

(7) The transferring unit of (5), wherein each of the plurality of circumferential grooves is formed in a predetermined angular range in the circumferential direction.

(8) The apparatus of (1), further comprising a pair of cover plates coupled to front and rear sides of the hollow disc plate assembly, wherein an inner circumferential surface of the pair of cover plates and an outer circumferential surface of the fixing member are supported by bearings. Lt; / RTI >

(9) The transfer unit of (2), further comprising a pair of connecting plates for coupling the drum and the hollow disk plate assembly.

(10) The transfer unit of (1), further comprising a pair of end caps coupled to front and rear sides of the hollow disk plate assembly to prevent foreign matter from entering the hollow disk plate assembly.

(11) A transfer unit according to any one of (1) to (10) above. And at least one inspection unit for inspecting the flexible article, wherein the flexible article is transported in close contact with an outer peripheral surface of the rotary member.

(12) The inspection apparatus according to (11), wherein the inspection unit is a photographing unit for photographing the surface of the flexible article.

The conveying unit and the inspection apparatus according to the present invention can be manufactured in a large diameter by forming an assembly by sealingly connecting a plurality of hollow disk plates and forming a groove therebetween by a vacuum flow path, And at least one circumferential groove corresponding to each of the suction ducts in the circumferential direction of the stationary shaft is formed within a range of a predetermined angle, thereby precisely controlling the position of the vacuum region, It is possible to effectively prevent the clogging of the vacuum flow path and to achieve good adsorption quality through the mechanical design of the hollow disk plate assembly and the shape of the suction holes exposed in the drum coupled to the hollow disk plate assembly as a long hole have.

1 is a structural view of a testing apparatus according to an embodiment of the present invention;
2 is a front cross-sectional view of a transfer unit according to an embodiment of the present invention.
3 is a side cross-sectional structural view of the transfer unit shown along YY in Fig. 2; Fig.
FIG. 4 is an assembled state structural view of a hollow disk plate assembly according to an embodiment of the present invention. FIG.
5 is a structural view of a drum according to an embodiment of the present invention;
6 is a structural view of a hollow disc plate embodiment of the hollow disc plate assembly of FIG.
7 is a structural view of a cover plate embodiment constituting the hollow disc plate assembly of FIG.
FIG. 8 is a structural view of a coupling plate embodiment for coupling the hollow disk plate assembly of FIG. 4 and the drum of FIG. 5;
Figure 9 is a structural view of an end cap embodiment sealing the front and rear sides of the hollow disc plate assembly of Figure 4;
10 is a structural view of a fixing member (stationary shaft) according to an embodiment of the present invention;
11 is a schematic view of a communication structure between a vacuum passage (VP) of a hollow disk plate assembly and a suction hole of a drum according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same or similar reference numerals are given to the same or similar parts. Also, when an element is referred to as " including " an element throughout the specification, it does not exclude other elements unless specifically stated to the contrary. It is to be understood that the present invention may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. . Further, the drawings for the parts that do not constitute the gist of the present invention are omitted or the description of the use or operation contents of the unit or apparatus according to the present invention will be omitted.

First, the structure of the inspection apparatus according to the embodiment of the present invention and the transfer unit used therein will be described.

Fig. 1 shows a structural diagram of an inspection apparatus 1 according to an embodiment of the present invention. The inspection apparatus 1 according to the embodiment of FIG. 1 is a surface inspection apparatus for a flexible article 2 such as a flexible circuit board. The inspection apparatus 1 includes a transfer unit 10 for transferring a flexible circuit board, And an inspection unit (3) for imaging the surface of the flexible circuit board. A feeding unit 4 for feeding the inspection soft goods 2 is provided in front of the conveying unit 10 and a collecting unit 5 for collecting the inspected soft goods 2 is provided behind the feeding unit 4. The supply unit 4 and the recovery unit 5 may be, for example, winding rollers as shown in the drawing. The transfer unit 10 is operated in a vacuum adsorption manner as described later and divided into a vacuum region A (see FIG. 2) and a vacuum release region B (see FIG. 2) in the circumferential direction, The vacuum adsorption is carried out only at this time to transfer the soft goods 2. The inspection apparatus 1 may further include a tension adjusting means 6 such as a tension roller provided at the front end and the rear end of the transfer unit 10. The tension of the flexible article 2 is adjusted by the tension adjusting means 6 so that the degree of adhesion of the flexible article 2 to the transfer unit 10 is further improved and the reliability of the inspection can be enhanced.

2 and 3 each show a front and side cross-sectional structural view of the transfer unit 10 according to the embodiment of the present invention. Fig. 3 is shown along Y-Y in Fig. The conveying unit 10 includes a fixing member 100 and a rotary member 200. The suction passage SP provided in the fixing member 100 is connected to a vacuum passage VP provided in the rotary member 200, The vacuum attraction force applied from the external vacuum apparatus (not shown) is transmitted to the soft article 2 conveyed along the outer surface of the rotary member 200. In FIG. 3, the rotating member 200 is hatched to facilitate identification. The rotary member 200 basically includes a hollow disk plate assembly 220 and may further include a drum 210 selectively. The rotary member 200 is slidably brought into close contact with the outer circumferential surface of the fixing member 100 and rotated by the external driving means 300. The driving means 300 includes a driving motor 310, a belt 320 and a driving pulley 330. The driving pulley 330 is fixed to a side surface of the rotating member 200. At least one bearing (600) is interposed between the stationary member (100) and the rotary member (200) to reduce sliding friction. The transfer unit 10 is fixed to the supporting table 400 provided in the inspection apparatus 1 by the connection bracket 500.

Figs. 4 to 9 show a structural diagram of the component elements constituting the rotary member 200 or its assembled state, and Fig. 10 shows a structural view of the fixing member 100 exemplified by the fixed shaft. As described above, the rotary member 200 basically includes the hollow disk plate assembly 220 of FIG. 4 and may optionally further include the drum 210 of FIG. 5 is a structural view of the drum 210, FIG. 6 is a sectional view of the hollow disk plate assembly 220 of the hollow disk plate assembly 220 of FIG. 4, and FIG. FIG. 7 is a structural view of an embodiment of cover plates 221 and 225 constituting the hollow disk plate assembly 220 of FIG. 4, and FIG. 8 is a structural view of the hollow disk plate assembly 220 9 is an end cap 241, 245 sealing the front and rear sides of the hollow disk plate assembly 220 of FIG. 4, and FIG. Respectively. 4 to 10, the specific structure and operation contents of the component elements constituting the rotary member 200 and the fixing member 100 or their assembled state will be sequentially described.

6, 7, the hollow disk plate assembly 220 basically includes a plurality of hollow disk plates 222, 224 of FIG. 6, and optionally a cover plate 221 of FIG. 7 , 225).

The hollow disk plate assembly 220 is a basic element constituting the rotary member 200 and has a purpose of forming a vacuum passage VP of the rotary member 200 communicating with the suction passage SP of the fixing member 100 . Each of the plurality of hollow disk plates 222 and 224 of FIG. 6 constituting the hollow disk plate assembly 220 is provided with a plurality of radial grooves 222g and 224g extending in the radial direction on at least one of the front surface and the rear surface thereof Each of the radial grooves 222g and 224g is formed in each of the vacuum passages VP of the rotary member 200.

That is, in the present invention, in forming the vacuum passage VP inside the rotary member 200, the rotary member 200 is divided into the plurality of hollow disk plates 222 and 224, and the hollow disk plates 222 and 224 By applying a method of glueing the radial grooves 222g and 224g for forming the vacuum passage VP on the front surface or the back surface of the rotary element, It is possible to easily form the vacuum passage VP while increasing the diameters of the hollow disc plates 222 and 224 and increasing the diameter of the entire transfer unit 10. [

In the case of the hollow disk plate 222 according to the embodiment of FIG. 6 (a), an example in which the radial grooves 222g are formed on both the front surface and the back surface is shown, and the hollow disk plate 222 according to the embodiment of FIG. And the radial grooves 224g are formed on only one side in the case of the radial grooves 224. The plurality of radial grooves 222g and 224g are formed at regular intervals in the circumferential direction on the front surface or the rear surface of the hollow disk plates 222 and 224.

The hollow disk plate assembly 220 optionally further includes cover plates 221 and 225 of FIG. 7 that cover the exposed surfaces of the hollow disk plates 222 and 224, The vacuum passage VP is formed inside the member 220 and at the same time the sliding movement of the rotating member 200 is smoothly performed on the outer surface of the fixing member 100 via the bearing 600. [

Concretely, by using the bolt fastening holes 222b, 224b, 221b and 225b formed on the respective members in a state in which the cover plates 221 and 225 are arranged in front of and behind the one or more hollow disk plates 222 and 224 A plurality of groups of vacuum channels VP located on the same plane are formed on each of the coupling surfaces of the hollow disk plates 222 and 224 and the cover plates 221 and 225 in the coupled state.

In this case, one group of vacuum passages (VP) located on the same plane is individually controlled to be selectively connected to one of the plurality of suction passages SP provided in the fixing member 100 as described later. For example, in the embodiment, in the hollow disk plate assembly 220, a group of vacuum channels VP positioned on the same plane is provided between the front cover plate 221 and the hollow disk plate 222, the hollow disk plate 222, The vacuum plate 224 and the hollow disc plate 224 and the rear cover plate 225. Each of these three groups of vacuum channels VP is provided in the fixing member 100 The vacuum suction force is selectively applied to the three vacuum flow paths VP according to the application of the selective vacuum suction force to the three suction flow paths SP by separately communicating with the three suction flow paths SP. Accordingly, it is possible to selectively control the number of groups of vacuum channels (VP) operated according to the width of the soft goods (2) to be conveyed.

According to the plurality of vacuum channels VP and a plurality of suction channels SP corresponding to the plurality of vacuum channels VP, the number of hollow discs 222 and 224 is increased to increase the number of vacuum channels VP It is possible to easily increase the number of suction passages SP in the fixing member 100 and to improve the flexibility of the flexible member 100 in terms of the width direction of the transfer unit 220 and the expandability of the flexible product 2 applicable thereto. Do.

Alternatively, the outer end sides 222ge and 224ge of each of the plurality of radial grooves 222g and 224g provided in the hollow disk plates 222 and 224 of FIG. 6 may extend in the circumferential direction of the hollow disk plates 222 and 224 It is preferable that it is formed as a long diameter. This provides a maximum vacuum absorption area in the circumferential direction of the hollow disk plate assembly 220 while minimizing the number of the intervals of the plurality of radial grooves 222g and 224g so that the hollow disk plate assembly The drum 210 is installed in each of the vacuum channels VP formed from the respective radial grooves 222g and 224g in the case of selectively providing the drum 210 of FIG. It is advantageous that a plurality of suction holes 212, which are densely packed in the discharge port 212, are communicated with each other.

One or more bearings 600 may be inserted into the inner side surfaces 221s and 225s of the cover plates 221 and 225. The bearings 600 may be inserted into the outer surface of the rotary member 200 Is more smoothly mediated. The bearings 600 inserted into the cover plates 221 and 225 are prevented from being axially separated from the end caps 241 and 245 of FIG.

Referring to Figures 2, 3, 5, 8 and 9, the rotating member 200 optionally further includes the drum 210 of Figure 5 in the hollow disc plate assembly 220 of Figure 4 . The coupling between the hollow disc plate assembly 220 and the drum 210 is achieved by the coupling plates 231 and 232 of FIG. 235). The end caps 241 and 245 of FIG. 9 can be selectively coupled to the front and rear sides of the hollow disk plate assembly 220.

5, the drum 210 has a ring shape having an inner diameter and a width corresponding to the outer diameter and the width of the hollow disk plate assembly 220, and has a plurality of suction holes 212 along the circumferential direction Respectively. At least one of the suction holes 212 may communicate with each of the plurality of vacuum passages VP formed in the hollow disc plate assembly 220.

In this case, as described above, the outer end sides 222ge and 224ge of each of the radial grooves 222g and 224g forming the vacuum passage VP are formed into a long diameter in the circumferential direction of the hollow disk plates 222 and 224, It is possible to reduce the number of the vacuum channels VP and increase the density of the suction holes 212 so that the suction holes 212 of the soft goods 2 can be easily connected to the one vacuum channel VP. It is advantageous to transmit a uniform vacuum suction force without local damage. In the embodiment, as shown in FIG. 2, three suction holes 212 communicate with one vacuum path VP in the circumferential direction.

Alternatively, the outermost end side 212 e of the suction hole 212 may be formed to have a long diameter in the width direction of the drum 210. As a result, the suction holes 212 are densely formed in the circumferential direction of the drum 210 to transmit the uniform attraction force to the soft articles 2 in the circumferential direction, The outer end side 212e is formed to have a long diameter in the width direction so that even when the suction holes 212 are formed in the width direction of the drum 210, It is possible to deliver.

11 is a schematic view showing a communication structure between the vacuum passage VP of the hollow disk plate assembly 220 and the suction holes 212 of the drum 210 according to the embodiment of the present invention. Since the vacuum passage VP is hidden by the drum 210, it is indicated by a hidden line. 11 shows a configuration in which the outer end sides 222ge and 224ge of each of the radial grooves 222g and 224g formed by the above described vacuum path VP are formed to have a long diameter in the circumferential direction of the hollow disk plate And the suction holes 212 are formed to have a long diameter in the width direction of the drum 210 (x direction in FIG. 11). The outer end sides 222ge and 224ge of each of the radial grooves 222g and 224g formed by the electron vacuum path VP are formed to have a long diameter in the circumferential direction to form a plurality of suction holes 212 in the circumferential direction, The radius grooves 222g and 224g formed by the vacuum path VP can be formed in a circumferential direction while reducing the formation interval of the suction holes 212 The density can be increased and the uniformity of adsorption in the circumferential direction can be improved. In addition, when the suction holes 212 are formed in the widthwise direction, the adsorption holes 212 can be uniformly applied even in the width direction.

The coupling plates 231 and 235 shown in FIG. 8 are disposed at front and rear sides of the hollow disk plate assembly 220 to connect and fix the drum 210. The front connecting plate 231 is bolted to the front cover plate 221 and the front side of the drum 210 and the rear connecting plate 235 is bolted to the rear cover plate 225 and the rear side of the drum 210 Bolt-bonded. Accordingly, the coupling plates 231 and 235, the hollow disc plate assembly 220, and the drum 210 integrally constitute a part of the rotary member 200.

The end caps 241 and 245 shown in FIG. 9 are disposed on the front and rear sides of the hollow disk plate assembly 220 to allow external foreign substances to flow into the hollow disk plate assembly 220 or the fixing member 100 inserted therein, The inner side surfaces 221s and 225s depressed by the cover plates 221 and 225 serve to prevent the internal flow path of the suction path VP and the suction path SP from clogging, It also acts to prevent departure. In the embodiment, the front end cap 241 is bolted to the front cover plate 221 and the rear end cap 245 is bolted to the rear cover plate 225. The end plates 241 and 245 are formed integrally with the connecting plates 231 and 235, the hollow disk plate assembly 220 and the drum 210 as a part of the rotating member 200.

10, the fixing member 100 is inserted into the center of the rotary member 200 to support the rotation of the rotary member 100. To this end, the fixing member 100 is provided with a bearing And an outer surface 100s for inserting and supporting the outer tube 600 is provided. The bearing 600 is supported between the outer surface 100s of the fixing member 100 and the inner surfaces 221s and 225s of the cover plates 221 and 225 to fix the fixing member 100 and the rotating member 200 Mediates sliding movement. The process member 100 basically transmits external vacuum suction force to the vacuum passage VP formed in the rotary member 200. To this end, the fixing member 100 is provided with a suction channel SP Respectively.

Each of the suction passages SP is divided into a plurality of suction passages SP and the suction passages SP are formed by pairs of horizontal suction passages SPh, SPh ', SPh "and vertical suction passages SPv, SPv', SPv" Lt; / RTI > In the embodiment, three horizontal suction channels and vertical suction channel pairs (SPh, SPv; SPh ', SPv'; SPh ", SPv") are illustrated. A plurality of circumferential grooves 102 separated from each other correspond to the outer peripheral surface of the processing member 100. Each of the plurality of circumferential grooves 102 is formed so as to correspond to the same plane as the plane on which the plurality of groups of the vacuum paths VP are arranged and the plurality of horizontal suction flow paths and the pair of vertical suction flow paths SPh, ', SPv'; SPh ', SPv' '). In the embodiment, the three circumferential grooves 102 correspond to the three vacuum channels VP and three horizontal suction channels and the pair of vertical suction channels SPh, SPv, SPh ', SPv', SPh ", SPv" . As a result, by selectively controlling the vacuum suction force for each of the three horizontal suction flow paths and the vertical suction flow path pairs SPh, SPv, SPh ', SPv', SPh ", SPv" It is possible to selectively control the vacuum suction force for the group of three vacuum channels (VP), thereby enabling selective control of the vacuum suction force in the width direction of the transfer unit 10, Can be ensured. 2 and 10, the circumferential groove 102 is formed at a predetermined angle in the circumferential direction of the fixing member, so that the vacuum region A and the vacuum release region B), it is possible to apply a selective vacuum suction force.

Alternatively, the fixing member 10 may be provided with a blow-off flow path BP. This blow-off flow path BP serves to prevent the inside of the vacuum flow path VP from being clogged with foreign substances as the use time elapses. In this embodiment, the blow-by flow path BP is formed from one horizontal blow- And branched into three vertical blow-off flow paths (BPv). In this case, the vertical blowing flow path BPv is branched into the vacuum releasing region B, that is, the region where the circumferential groove 102 is not formed and directly communicates with the vacuum flow path BP, The vacuum path VP is cleaned by the air pressure introduced through the blow-by flow path BP at the time when the positional orientation of the vacuum path VP reaches the vacuum release area B. [

Next, the operation of the transfer unit 10 according to the embodiment of the present invention will be described. The operation contents of the transfer unit 10 include a cleaning function, in particular, the transfer of vacuum suction force to the object to be inspected 2, the selective control in the circumferential direction and the width direction, in the transferring process.

In the transfer unit 10, the drum 210, the hollow disk plate assembly 220 (the hollow disk plates 222 and 224, the cover plates 221 and 225) The connecting plates 231 and 235, the end caps 241 and 245 and the driving pulley 330 are integrally rotating rotary members 200 and the fixing member 100 is a fixed element. The bearing 600 mediates the sliding flow between the stationary member 100 and the rotary member 200. The rotating force of the driving motor 310 is transmitted to the driving pulley 330 connected by the belt 320 in a state where a vacuum pressure is applied from an external vacuum source And integrally rotates on the fixing member 100 and rotates. The vacuum suction force of the external vacuum source passes through the suction passage SP and the circumferential groove 102 in the fixing member 100 and is supplied to the vacuum passage VP located in the vacuum region A And is then transferred to the soft goods 2 wrapped around a part of the surface of the drum 210 via the suction holes 212 communicating with the corresponding vacuum passages VP.

In this case, the selective control of the vacuum suction force in the circumferential direction of the drum 210 is performed in the circumferential direction in accordance with the forming angle of the circumferential groove 102 in the fixing member 100, B, and the selective control of the vacuum suction force in the width direction of the drum 210 is performed by dividing each of the plurality of circumferential grooves 102 into a plane in which each of a plurality of groups of vacuum channels (VP) (SPh, SPv '; SPh', SPv '') of the horizontal suction flow path and the vertical suction flow path (SPh, SPv ' By selectively controlling the vacuum suction force for each of the suction flow paths SPh, SPv; SPh ', SPv'; SPh ', SPv' '.

The cleaning function for the transfer unit 10 forms a blow-by flow path BP directly communicating with the vacuum path VP in the vacuum release area B inside the fixing member 100, ). In this case, the external air pressure can be applied through the blow-by flow path BP at any time or at any time.

As described above, the transfer unit 10 according to the present invention and the inspection apparatus 1 including the transfer unit 10 are formed by sealingly connecting a plurality of hollow disk plates 222 and 224 to form an assembly 220, And at least one suction passage SP and a blow passage BP are formed in the axial direction of the stationary shaft 100 and the stationary shaft 100 is fixed to the stationary shaft 100. [ By forming at least one circumferential groove 102 corresponding to each of the suction passages SP in the circumferential direction of the vacuum region A and the vacuum release region B in a predetermined angle range, The hollow disk plate assembly 220 and the drum 210 coupled to the hollow disk plate assembly 220 can be effectively prevented from being clogged with the vacuum passage VP, Mechanism to make the shape of the adsorption hole into a long hole Better adsorption quality can be achieved through design.

 The foregoing is a description of specific embodiments of the present invention. While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments or constructions. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. It should be understood that this is possible. For example, in the embodiment of the inspection apparatus 1, the inspection unit 3 is exemplified as an imaging unit for judging the presence or absence of defects through surface imaging like a camera. However, the inspection unit 3 is not limited to the imaging unit but may be other physical, Type inspection unit. Also, in the embodiment of the inspection apparatus 1, the supply unit 4 and the collection unit 5 exemplify the roll type, but it is also possible that the flexible article 2 is supplied and recovered in the form of a plate-like sheet having a predetermined length . In the embodiment of the inspection apparatus 1, the conveying unit 10 and the inspection unit 3 are illustrated as one set, but it is also possible to arrange the conveying unit 10 and the inspection unit 3 May be provided in plural. It is therefore to be understood that all such modifications and alterations are intended to fall within the scope of the invention as disclosed in the following claims or their equivalents.

1: Inspection device 2: Flexible article
3: Inspection unit 4: Supply unit
5: recovery unit 6: tension adjusting means
10: Feed unit
100: fixing member 102: circumferential groove
200: rotating member
210: drum 212: suction hole
212e: outermost long side of the adsorption hole
220: hollow disc plate assembly
222, 224: hollow disc plate
222 g, 224 g: radius groove
222ge, 224ge: radial groove outermost long side
221, 225: Cover plate
231, 235: connection plate
241, 245: end cap
300: driving means 310: driving motor
320: Belt 330: Driving pulley
400: support 500: connection bracket
600: Bearings
A: vacuum region B: vacuum release region
SP: Suction Euro BP: Bloo Euro
VP: Vacuum channel

Claims (12)

A fixing member; And a rotary member slidably brought into close contact with the outer circumferential surface of the fixing member and rotated by external driving means, wherein the flexible member is connected to the suction passage of the fixing member through a plurality of vacuum passages of the rotary member, A transfer unit for transferring vacuum attraction force to an article,
Wherein the rotating member includes a hollow disk plate assembly in which a plurality of hollow disk plates are assembled in series, and a plurality of radial grooves extending radially in at least one side of a front surface or a rear surface of each of the plurality of hollow disk plates, Each of the radial grooves being formed in each of the plurality of vacuum passages provided inside the rotary member,
Wherein a plurality of suction passages are provided in the circumferential direction of the fixing member, and the suction passages are provided in pluralities so as to communicate with the plurality of circumferential grooves, respectively, and each of the plurality of circumferential grooves And a group of vacuum flow paths disposed on the same plane communicate with each other. The apparatus of claim 1, wherein the rotary member further comprises a drum coupled to an outer circumferential surface of the hollow disc plate assembly and having a plurality of suction holes, wherein each of the plurality of vacuum channels communicates with at least one suction hole . The conveying unit according to claim 2, wherein the suction holes are formed to have a long diameter in the width direction of the drum. The apparatus according to claim 3, wherein the outer end side of each of the plurality of radial grooves is formed into a long diameter in a circumferential direction of the hollow disk plate, and a plurality of suction holes are communicated with each of the plurality of vacuum channels . delete The conveyance unit according to claim 1, wherein the fixing member further comprises a blow-off passage communicating with the plurality of vacuum flow paths. The conveying unit according to claim 1, wherein each of the plurality of circumferential grooves is formed in a predetermined angular range in the circumferential direction. The hollow disc plate assembly according to claim 1, further comprising a pair of cover plates coupled to front and rear sides of the hollow disc plate assembly, wherein an inner peripheral surface of the pair of cover plates and an outer peripheral surface of the holding member are supported by bearings unit. 3. The transfer unit of claim 2, further comprising a pair of connecting plates for coupling the drum and the hollow disk plate assembly. The transfer unit according to claim 1, further comprising a pair of end caps coupled to front and rear sides of the hollow disc plate assembly to prevent foreign matter from entering the hollow disc plate assembly. 10. A transfer unit according to any one of claims 1 to 4 or 6 to 10; And at least one inspection unit for inspecting the flexible article, wherein the flexible article is transported in close contact with an outer peripheral surface of the rotary member. 12. The inspection apparatus according to claim 11, wherein the inspection unit is a photographing unit for photographing the surface of the flexible article.

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