KR101872143B1 - Flexible touch screen panel and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a flexible touch screen panel capable of providing rich operation application on a touch screen and a manufacturing method thereof. According to one embodiment of the present invention, the flexible touch screen panel comprises: an upper electrode pattern formed on an upper substrate to be parallel with each other; a lower electrode pattern formed on a lower substrate and formed parallel to each other in a direction perpendicular to the upper electrode pattern; and a dielectric layer including an oxidized graphene island disposed between intersection points on a ground plan of the upper electrode pattern and the lower electrode pattern on a dielectric.

Description

TECHNICAL FIELD [0001] The present invention relates to a flexible touch screen panel and a method of manufacturing the flexible touch screen panel.

The present invention relates to a flexible touch screen panel and a method of manufacturing the same.

The touch screen panel is largely resistive type and capacitive type. In the resistive film type, two sheets of substrates coated with transparent electrodes are bonded together, and the position is recognized by electrical signals generated by contacting the upper and lower plates by applying pressure to the upper plate. Even though there is no static electricity, the touch is possible, but since the substrate is two sheets, the transmittance is low and the durability due to contact between the upper and lower plates is lowered. Currently, the electrostatic capacitive touch method that is the most used by the smartphone touch method uses the static electricity in the human body. When touching the touch panel, the amount of current flowing through the panel changes, It is easy to implement multi-touch and is resistant to durability and surface contamination. The capacitance type is divided into two types according to the structure of the panel, the surface type and the projection type. Most of the projection type is used because the surface type is difficult to process noise, multi-touch is not available, and the unit price is not cheap. In this method, electrodes are arranged in a row (Tx or driving line) The electrode and the Rx electrode can be patterned in one layer through etching, or they can be patterned vertically in two different layers. It is possible to detect whether or not the user touches by measuring the difference in the amount of capacitance generated when the signal sent from the Tx channel is input to the Rx channel. At this time, when the general user uses the touch device, the pressure is accompanied by whether the size is large or small. For example, some people may touch a light touch while others may consciously push and input. Also, there may be cases where the same person touches lightly in some cases, or presses the lightly. Although research has been conducted in various ways to enable pressure sensing with simple touch position recognition, it has not been possible to provide a method using a touch pressure to be touched by a user.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to provide a touch panel which can sensitively detect a change in a pressure magnitude at the time of touch by enhancing the sensitivity of the touch panel, And to provide a flexible touch screen panel and a method of manufacturing the flexible touch screen panel.

However, the problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to one embodiment, an upper electrode pattern formed on the upper substrate in parallel with each other; A lower electrode pattern formed on the lower substrate and formed parallel to each other in a direction perpendicular to the upper electrode pattern; And a dielectric layer on the dielectric, the dielectric layer including an oxidized graphene island disposed between the top electrode pattern and the bottom electrode pattern at a crossing of the top view.

According to one aspect of the present invention, a change in resistance may be detected according to a change in intensity of a pressure generated in the oxidized graphene island corresponding to a position of the external touch by a pressure applied by an external touch on the upper substrate .

According to one aspect, the thickness of the dielectric may be 1 m to 100 m, and the oxide grains may have a thickness of 10 nm to 50 nm.

According to one aspect of the present invention, the graphene oxide island size may be 200% to 400% of the upper electrode pattern and the lower electrode pattern line width.

According to one aspect, the graphene oxide may include at least one functional group selected from the group consisting of a hydroxyl group, a carboxyl group and an epoxy group on the surface and the edge.

According to one aspect of the present invention, the upper electrode pattern and the lower electrode pattern are selected from the group consisting of gold, silver, platinum, copper, chromium, nickel, zinc, aluminum, tin, titanium, palladium, cobalt, cadmium, Or at least one of them.

According to another embodiment, there is provided a method of manufacturing a semiconductor device, comprising the steps of stirring a mixed solution containing graphite, an acid solution and an oxidizing agent, neutralizing the mixed solution, and sonicating the neutralized mixed solution ; Preparing an upper substrate on which an upper electrode pattern is formed and a lower substrate on which a lower electrode pattern is formed in a direction perpendicular to the upper electrode pattern; Coating the oxide graphene on the dielectric in an island shape; And positioning a dielectric layer coated with an oxidized graphene layer between intersections of the upper electrode pattern and the lower electrode pattern in a plan view.

According to one aspect, the acid solution contains at least one selected from the group consisting of sulfuric acid (HSO ₄ ), nitric acid (HNO ₃ ), hydrochloric acid (HCl), phosphoric acid (H ₃ PO ₄ ) .

According to one aspect, the oxidant is selected from the group consisting of potassium permanganate (KMnO ₄ ), sodium chlorate (NaClO ₃ ), potassium chlorate (KClO ₃ ), hydrogen peroxide (H ₂ O ₂ ), potassium chromate (K ₂ CrO ₄ ), potassium bichromate K ₂ CrO _7), potassium nitrate (KNO _3), oxygen (O _2), ozone (O _3), Florin (F _2), chlorine (Cl _2), bromine (Br _2), iodine (I _2), nitric acid (HNO _3), chromic anhydride (CrO _3), chromate (CrO _4), dichromate (Cr ₂ O _7), manganese oxide (MnO), peroxide, manganese (MnO _4), nitrogen monoxide (NO), nitrogen dioxide (NO ₂₎ At least one selected from the group consisting of nitric acid, nitric oxide (N ₂ O), osmium tetroxide (OsO ₄ ), sulfoxides, ammonium cerium nitrate and permanganate salts Lt; / RTI >

The flexible touch screen panel according to an embodiment of the present invention can provide a multi-point touch control function by increasing the sensitivity of the touch panel by adding a pressure sensitive touch method to the capacitive touch method, and at the same time, it can sensitively detect the pressure, (For example, the ability to force feedback) can be designed and realized with touch control and touch screen panels. In addition, it can be applied not only to a touch panel, but also to a pressure-related sensor element and a stretchable 3D sensor.

The method of manufacturing a flexible touch screen panel according to an embodiment of the present invention can stably produce oxide grains having a wide interval between graphene layers by a simple process.

1 is a perspective view of a flexible touch screen panel according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of a flexible touch display panel including a cover film and a display panel in FIG.
FIG. 3 is a schematic view showing touch recognition of an oxidized graphene island according to an external touch of a flexible touch screen panel according to an embodiment of the present invention ((a) after external pressure application (b) external pressure application).
4 is a flowchart illustrating a manufacturing process of a flexible touch screen panel according to an exemplary embodiment of the present invention.
FIG. 5 is a flowchart showing detailed steps of the oxide graphene manufacturing step of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In addition, terms used in this specification are terms used to appropriately express the preferred embodiments of the present invention, which may vary depending on the user, the intention of the operator, or the practice of the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification. Like reference symbols in the drawings denote like elements.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

Hereinafter, a flexible touch screen panel and a manufacturing method thereof according to the present invention will be described in detail with reference to embodiments and drawings. However, the present invention is not limited to these embodiments and drawings.

According to one embodiment, an upper electrode pattern formed on the upper substrate in parallel with each other; A lower electrode pattern formed on the lower substrate and formed parallel to each other in a direction perpendicular to the upper electrode pattern; And a dielectric layer on the dielectric, the dielectric layer including an oxidized graphene island disposed between the top electrode pattern and the bottom electrode pattern at a crossing of the top view.

1 is a perspective view of a flexible touch screen panel according to an embodiment of the present invention. Referring to FIG. 1, a flexible touch screen panel 100 according to an exemplary embodiment of the present invention may include an upper substrate 110, a dielectric 120, and a lower substrate 130. The flexible touch screen panel 100 includes an upper electrode pattern 112 formed on an upper substrate 110 and parallel to the upper substrate 110 and including a lower substrate 130 opposed to the upper substrate 110, And a lower electrode pattern 132 formed on the lower substrate 130 and perpendicularly intersecting the upper electrode pattern 112 in a plan view and formed parallel to each other. The intersection of the plan views means that they are formed on the same plane and do not directly cross each other but are vertically formed with different layers.

According to one aspect, the upper substrate 110 and the lower substrate 130 may be formed of, for example, polydimethylsiloxane, polyethylene terephthalate, polybuthylene terephthalate, But are not limited to, polyethylene terephthalate, poly (methylmethacrylate), polyimide, polyethylene, polypropylene, oriented polypropylene, biaxially oriented polypropylene, polypropylene, polyethylene 2,6-dicarboxyl naphthalate, polyether ether ketone, poly (ethersulfone), polycarbonate, poly Polyacrylic, polyacrylate, polysilane, polyester, polyvinyl (polyvinyl) butadiene-styrene copolymers such as polystyrene, polyolefin, fluoropolymer, polyamide, polynorbornene and acrylonitrile-butadiene-styrene copolymer. And at least one selected from the group consisting of

According to one aspect, the upper substrate 110 includes upper electrode patterns 112 (Tx1, Tx2, ..., Txn) including a plurality of electrodes formed parallel to each other along the horizontal direction on the upper substrate 110, Txn perpendicularly intersect with the horizontal direction of the upper electrode patterns Tx1, Tx2, ..., Txn on the lower substrate 130 and extend along the vertical direction of the lower substrate 130, The lower electrode patterns 132 (Rx1, Rx2, ..., Rxn) including a plurality of electrodes formed in parallel may be formed.

According to one aspect, the upper electrode pattern 112 and the lower electrode pattern 132 may be formed of gold, silver, platinum, copper, chromium, nickel, zinc, aluminum, tin, titanium, palladium, cobalt, cadmium, and rhodium And at least one selected from the group consisting of

According to one aspect, the upper electrode pattern 112 and the lower electrode pattern 132 may be metal mesh electrodes. Conventionally, ITO, which is a transparent electrode having a high light transmittance, excellent visibility and advantageous in resistance, has been widely used as an upper electrode pattern and a lower electrode pattern. However, since the resistance is increased and the material is brittle, Flexible and transparent electrodes such as CNT, graphene, and Ag nanowire have been used as a means to replace ITO, which is not suitable for in-flexible electronic devices. However, they may be using metal mesh electrode patterns that have reached the current process and commercialization stage because of the difficulties of process development such as material production yield, rough surface, and high resistance value.

According to one aspect, the dielectric layer may comprise on the dielectric 120 an oxidized graphene island 122 disposed between the top electrode pattern 112 and the bottom electrode pattern 132 cross- have.

According to one aspect, the dielectric is selected from the group consisting of polyvinyl alcohol (PVA), polyvinyl pyrrolidone, polypyrrole, polyvinyl chloride (PVC), poly (alkyl acrylate), poly (ethyl acrylate) ), Poly methyl methacrylate (PMMA), polyaniline, polyvinyl acetate, poly (ethyl vinyl acetate), poly (ethyl-co-vinyl acetate), polyvinyl butyrate, polyacrylate, polyacrylic acid ester, (PVDF), poly (2-vinylpyridine), polyvinyl methyl ether, polyvinylidene fluoride (PVDF), polyacrylonitrile Styrene / acrylic acid esters, vinyl acetate / acrylate esters, ethylene / vinyl acetate copolymers, poly (vinyl acetate) copolymers, poly Butadiene, polyisoprene, polystyrene, polyethylene, polyethyleneimine, polyether, polyester, polycarbonate, polyamine, polyurethane, polypropylene, polyamide, polyimide, polythiophene, polyacetylene, polyetherimide, polysulfone, poly (PEO), polydimethylsiloxane (PDMS), CYTOP (polyvinylidene fluoride), polystyrenesulfonyl fluoride, melamine-formaldehyde resin, nylon, epoxy resin, polylactide, polyethylene oxide ^TM, poly (styrene -co- acrylate), poly (styrene -co- butadiene), poly (styrene -co- divinylbenzene), poly (dimethylsiloxane -co- (ethylene oxide)), poly (lactic acid -co- Glycolic acid), a silicone resin, and a cellulose. The organic polymer may help to further widen the layer of oxidized graphene. By increasing the gap between the graphenes in the oxide graphene and by adding the decompression sensor using the change in conductivity due to the pressure applied due to the mechanical properties of the graphene, The sensitivity can be further increased to provide a flexible touch screen panel with high efficiency.

According to one aspect, the thickness of the dielectric may be from 1 m to 100 m. If the thickness of the dielectric is less than 1 탆, there is a possibility of electric conduction between the electrodes, which may cause a problem in touch sensing. If the thickness exceeds 100 탆, there may be a problem in touch sensing due to a low capacitance value.

According to one side, the dielectric layer is preferably used as an insulator having a dielectric constant, and since it must have low conductivity even if it has conductivity, it is preferable to include an oxide graphene having a relatively poor conductivity rather than using a conductive fine graphene . The oxidized graphene may be one produced by oxidizing the graphite. The reason why the conductivity is lowered by oxidizing the conductive graphene is to utilize the structure of the graphene. The graphite has a lamellar structure in which graphene, which is a plate-like structure in which carbon atoms are connected by a hexagonal ring, is piled up. Generally, the gap between the graphenes is 3.35 Å, which is a structure in which the carbon nanotubes are spread in a flat state, and thus has high conductivity corresponding to the carbon nanotubes and excellent mechanical properties.

According to one aspect of the invention, it is possible to use several layers of graphene layers that are not several layers, rather than using a layered two-dimensional carbon layer of graphene. And the graphen interlayer spacing in the oxidized graphene of the oxidized graphene island having a large gap between graphene layers may be 5 Å to 8 Å. When the gap between the graphenes in the oxidized graphene is wide, the dispersibility of the oxidized graphene is excellent.

According to one aspect, the oxidized graphene island thickness may be between 10 nm and 50 nm. If the thickness of the graphene oxide layer is less than 10 nm, there may be a difficulty in recognizing the graphene layer because the resistance value of the graphene layer changes depending on the applied pressure. If the thickness is more than 50 nm, There may be a problem.

According to one aspect of the present invention, the graphene oxide island size may be 200% to 400% of the upper electrode pattern and the lower electrode pattern line width. If the size of the graphene oxide grains is less than 200% of the width of the upper electrode pattern and the lower electrode pattern line, there may be a problem that the portion to be touched is too thin to be recognized. If the size is more than 400% And there is a problem that the transparency is visually deteriorated.

According to one aspect, the graphene oxide may include at least one functional group selected from the group consisting of a hydroxyl group, a carboxyl group and an epoxy group on the surface and the edge. When the graphene is oxidized, at least one functional group selected from the group consisting of a hydroxyl group, a carboxyl group and an epoxy group is adhered to the surface and the edge of the graphene layer while the layer structure of the graphene is oxidized and the layer structure is maintained. The layers vary in spacing depending on the applied pressure, so the graphene conductivity that varies with them can be combined with a pressure sensitive sensor. The type and number of the functional groups may vary depending on the oxidation method of the oxidized graphene or the degree of oxidation.

According to one aspect, the oxidized graphene may be one that is conductive but not efficient and thus included as part of the dielectric layer. Since the dielectric material is a dielectric material having a dielectric constant higher than that of the upper electrode pattern and the lower electrode pattern, the upper electrode pattern and the lower electrode pattern have electrical signals, and when they are conductive, It can not recognize it, and the electrodes can receive damage. However, since it can be used to the extent that it is finely conductive, the oxide graphene can be used as a dielectric even if it is not an insulator.

FIG. 2 is a cross-sectional view of a flexible touch display panel including a cover film and a display panel in FIG. 2, in a flexible touch display panel, a cover film is disposed on an upper electrode pattern 112, and a display panel for outputting a screen is disposed under the lower electrode pattern 132, is provided . An optical adhesive (OCA) or a UV resin can be used as the transparent adhesive layer to bond the display panel to the lower electrode pattern 132. [ In FIG. 2, the upper substrate and the lower substrate are omitted.

According to one aspect of the present invention, a change in resistance is detected according to a change in intensity of a pressure generated in the oxidation graphene island corresponding to a position of the external touch by a pressure applied by an external touch on the upper substrate 110 Touch sensing and pressure sensing functions.

FIG. 3 is a schematic view showing touch recognition of an oxidized graphene island according to an external touch of a flexible touch screen panel according to an embodiment of the present invention ((a) after external pressure application (b) external pressure application). As a pointing object, a finger or a stylus pen or the like may be used. As the finger is touched, an external pressure is applied, deformation is caused by an external pressure, and an oxidation graphene island senses a change in resistance according to a change in external pressure, thereby performing a touch sensing and a pressure sensing function. Signal can be digitized to process touch and pressure.

The flexible touch screen panel according to an embodiment of the present invention can provide a multi-point touch control function by increasing the sensitivity of the touch panel by adding a pressure sensitive touch method to the capacitive touch method, and at the same time, it can sensitively detect the pressure, (For example, a function of pushing back force) is advantageous in designing and realizing a touch control panel and a touch screen panel, and can be applied not only to a touch panel, but also to a pressure sensor device and a flexible 3D sensor.

According to another embodiment, there is provided a method of manufacturing a semiconductor device, comprising the steps of stirring a mixed solution containing graphite, an acid solution and an oxidizing agent, neutralizing the mixed solution, and sonicating the neutralized mixed solution ; Preparing an upper substrate on which an upper electrode pattern is formed and a lower substrate on which a lower electrode pattern is formed in a direction perpendicular to the upper electrode pattern; Coating the oxide graphene on the dielectric in an island shape; And positioning a dielectric layer coated with an oxidized graphene layer between intersections of the upper electrode pattern and the lower electrode pattern in a plan view.

4 is a flowchart illustrating a manufacturing process of a flexible touch screen panel according to an exemplary embodiment of the present invention. Referring to FIG. 4, the manufacturing process of the flexible touch screen panel according to an exemplary embodiment of the present invention includes a step of fabricating oxide grains 210, an upper substrate having an upper electrode pattern, and a lower substrate preparation step 220, an oxide graining island coating step 230 on the dielectric, and a dielectric layer positioning step 240 at an intersection of the upper electrode pattern and the lower electrode pattern plan view.

FIG. 5 is a flowchart showing detailed steps of the oxide graphene manufacturing step of FIG. Referring to FIG. 5, the step of preparing the oxidized graphene includes a mixed solution stirring step 212, a mixed solution neutralizing step 214, and a mixed solution sonication step 216.

According to one aspect, the mixed solution stirring step 212 of the oxide graphene producing step 210 is a step of stirring a mixed solution to which graphite, an acid solution and an oxidizing agent are added.

According to one aspect, the acid solution contains at least one selected from the group consisting of sulfuric acid (HSO ₄ ), nitric acid (HNO ₃ ), hydrochloric acid (HCl), phosphoric acid (H ₃ PO ₄ ) .

According to one aspect, the oxidant is selected from the group consisting of potassium permanganate (KMnO ₄ ), sodium chlorate (NaClO ₃ ), potassium chlorate (KClO ₃ ), hydrogen peroxide (H ₂ O ₂ ), potassium chromate (K ₂ CrO ₄ ), potassium bichromate K ₂ CrO _7), potassium nitrate (KNO _3), oxygen (O _2), ozone (O _3), Florin (F _2), chlorine (Cl _2), bromine (Br _2), iodine (I _2), nitric acid (HNO _3), chromic anhydride (CrO _3), chromate (CrO _4), dichromate (Cr ₂ O _7), manganese oxide (MnO), peroxide, manganese (MnO _4), nitrogen monoxide (NO), nitrogen dioxide (NO ₂₎ At least one selected from the group consisting of nitric acid, nitric oxide (N ₂ O), osmium tetroxide (OsO ₄ ), sulfoxides, ammonium cerium nitrate and permanganate salts Lt; / RTI >

According to one aspect of the present invention, the graphite, the acid solution and the oxidizing agent may be mixed and stirred at the same time. However, the graphite and the acid solution may be mixed and stirred to disperse and oxidize the agglomerated graphite. In this case, the method may further include a step of mixing and dispersing the graphite and the acid solution, and then storing the mixture at a temperature of from 50 ° C to 10 ° C for 10 minutes to 1 hour. Thereafter, the oxidizing agent is mixed and stirred in the mixed solution, and at least one functional group selected from the group consisting of a hydroxyl group, a carboxyl group and an epoxy group is adhered between the carbon layers to weaken the van der Waals force between the carbon layers, . The type and number of the functional groups may vary depending on the oxidation method of the oxidized graphene or the degree of oxidation. Due to the high temperature generated during the reaction between the acid solution and the oxidizing agent, it is advisable to gradually add the oxidizing agent slowly. The stirring may be carried out at room temperature for from 9 hours to 15 hours at 200 rpm to 500 rpm.

According to one aspect, the mixing solution neutralization step 214 may be to add distilled water to the mixed solution until the pH is between 6 and 7 to neutralize the mixed solution. Hydrogen peroxide may be further added to the mixed solution so that the remaining oxidizing agent may be further reduced into a salt form without reacting with the graphite.

According to one aspect, the mixed solution sonication step 216 may sonify the neutralized mixed solution to lower the spacing between the graphene layers in the oxidized graphene that has been agglomerated. Thereafter, the mixed solution is freeze-dried to obtain the oxidized graphene powder. The lyophilization may be performed, for example, at -30 ° C to -80 ° C for 30 minutes to 2 hours, followed by drying at -100 ° C to -150 ° C for about one day to three days.

According to one aspect, the lower substrate preparation step 220, in which the upper substrate and the lower electrode pattern, on which the upper electrode pattern is formed, may include an upper electrode pattern (not shown) formed on the upper substrate, Tx1, Tx2, ..., and Txn on the lower substrate and intersecting the vertical direction of the upper electrode patterns Tx1, Tx2, ..., Txn perpendicularly to the horizontal direction, Rx1, Rx2, ..., Rxn including a plurality of electrodes formed in parallel with each other along a predetermined direction.

According to one aspect, the upper substrate and the lower substrate may be formed of, for example, polydimethylsiloxane, polyethylene terephthalate, polybuthylene terephthalate, polyethylene terephthalate, But are not limited to, poly (methylmethacrylate), polyimide, polyethylene, polypropylene, oriented polypropylene, biaxially oriented polypropylene, polyethylene 2, But are not limited to, polyethylene 2,6-dicarboxyl naphthalate, polyether ether ketone, poly (ethersulfone), polycarbonate, polyacrylic, poly But are not limited to, polyacrylate, polysilane, polyester, polyvinyl chloride, But are not limited to, polystyrene, polystyrene, polyolefin, fluoropolymer, polyamide, polynorbornene and acrylonitrile-butadiene-styrene copolymer. , And the like.

According to one aspect, the upper electrode pattern and the lower electrode pattern may be formed by printing an opaque metal in a lattice form having a thickness of 2 to 10 mu m. The upper electrode pattern and the lower electrode pattern have a very low resistance because they use a metal having high conductivity.

According to one aspect of the present invention, the upper electrode pattern and the lower electrode pattern may include at least one selected from the group consisting of gold, silver, platinum, copper, chromium, nickel, zinc, aluminum, tin, titanium, palladium, cobalt, cadmium, And may include any one of them.

According to one aspect, the upper electrode pattern and the lower electrode pattern can be manufactured by introducing a thin film deposition technique. It is advantageous in terms of the process cost of manufacturing fine patterns than ITO-based process, which is a rare earth metal, and the line width of ITO is narrowed to several micrometers, or the thin film is deposited by the low resistance value and sputtering method at the time of large- I have sex.

According to one aspect of the present invention, the upper electrode pattern and the lower electrode pattern may be manufactured by a metal mesh manufacturing process, and the metal mesh may be photolithography, which is a method of depositing a metal on a substrate. Photolithography is a technique for making integrated circuits, component thin-film circuits, printed wiring patterns, etc. on the surface of a substrate by photolithography. In order to deposit electrodes on the substrate, various processes are required. First, photo resist (PR), which is a photosensitive polymer material responsive to light, is applied to a substrate and spin-coated. In this case, the conditions may be spin coating of 5 seconds at RPM 500 and 30 seconds at RPM 2,000, and the photoresist may be using a negative photoresist. The photoresist has a positive photoresist and a negative photoresist. The positive photoresist has a property of curing a portion not exposed to UV rays and the negative photoresist has a property of curing a light-receiving portion. In order to deposit a metal mask of several micrometers More suitable and more easily used in a lift-off process which is the final process of electrode deposition, so that a negative photoresist can be used in the present invention. Subsequently, after drying for 30 seconds to 5 minutes at 90 ° C to 130 ° C, exposure of the photoresist-coated substrate through a UV-patterned mask having high energy for 2 seconds to 5 seconds using an exposure machine, Can be hardened. The exposed substrate may be dried again at 90 ° C to 110 ° C for 30 seconds to 3 minutes, and then developed for 30 seconds to 3 minutes through the developer. When the development is carried out, the uncured portion can be separated from the substrate by the developer. Then, after confirming through the optical microscope that the pattern is well formed on the substrate, a sputtering process can be performed to deposit the metal electrode on the substrate having the pattern well. If a desired metal is directly deposited on the substrate, the auxiliary metal (for example, chromium) is deposited on the patterned substrate for 20 seconds to 30 seconds under the condition of 0.3 A, Lt; RTI ID = 0.0 > deposition. ≪ / RTI > The metal may be deposited for about 5 minutes under the condition of 0.1 Å to 1 Å. Then, the lift-off process, which is an operation of leaving only the electrode deposited by removing the photoresist pattern hardened on the substrate, can be performed. It may be that the substrate deposited on the acetone-filled sonication is put into a sonic treatment within one minute. Then, the photoresist, which has been hardened on the substrate, is separated so that only the upper electrode pattern or the lower electrode pattern can be formed. Make sure that the metal is deposited well using an optical microscope and measure the conductivity to see if it can be used as an electrode. The resistance at both ends of the ITO electrode is several thousand ohms, but the metal mesh has the advantage that there is no difference in the resistance value with respect to the distance.

According to one aspect, the oxide graphene island coating step 230 on the dielectric may be to coat the oxidized graphene produced in this step in an island shape on the dielectric. The method of coating the oxidized graphene in an island shape may be a photolithography process using a photomask or an inkjet printing process in the same manner as in the case of depositing an electrode. Since oxidized graphene has low conductivity, it can be used as a dielectric layer together with a dielectric.

According to one aspect, the dielectric is selected from the group consisting of polyvinyl alcohol (PVA), polyvinyl pyrrolidone, polypyrrole, polyvinyl chloride (PVC), poly (alkyl acrylate), poly (ethyl acrylate) ), Poly methyl methacrylate (PMMA), polyaniline, polyvinyl acetate, poly (ethyl vinyl acetate), poly (ethyl-co-vinyl acetate), polyvinyl butyrate, polyacrylate, polyacrylic acid ester, (PVDF), poly (2-vinylpyridine), polyvinyl methyl ether, polyvinylidene fluoride (PVDF), polyacrylonitrile Styrene / acrylic acid esters, vinyl acetate / acrylate esters, ethylene / vinyl acetate copolymers, poly (vinyl acetate) copolymers, poly Butadiene, polyisoprene, polystyrene, polyethylene, polyethyleneimine, polyether, polyester, polycarbonate, polyamine, polyurethane, polypropylene, polyamide, polyimide, polythiophene, polyacetylene, polyetherimide, polysulfone, poly (PEO), polydimethylsiloxane (PDMS), CYTOP (polyvinylidene fluoride), polystyrenesulfonyl fluoride, melamine-formaldehyde resin, nylon, epoxy resin, polylactide, polyethylene oxide ^TM, poly (styrene -co- acrylate), poly (styrene -co- butadiene), poly (styrene -co- divinylbenzene), poly (dimethylsiloxane -co- (ethylene oxide)), poly (lactic acid -co- Glycolic acid), a silicone resin, and a cellulose.

According to one aspect, the dielectric layer positioning step 240 at the intersection points of the upper electrode pattern and the lower electrode pattern in the plan view includes a step of forming a dielectric layer with an oxide graphene is coated between the upper electrode pattern and the lower electrode pattern, Lt; / RTI > By utilizing the nature of graphene, which has a wide gap between graphene layers in oxidized graphene, and mechanical properties change due to the touch pressure, the sensitivity of the touch panel is increased by adding the pressure sensitive touch method to the existing capacitive touch method. It is possible to provide an excellent flexible touch screen panel. As the pointing object (finger, stylus pen, etc.) is touched, external pressure is applied, deformation is caused by external pressure, and the oxidation graphene island senses the change of resistance according to the change of external pressure intensity, Sensing function can be performed.

The method of manufacturing a flexible touch screen panel according to an embodiment of the present invention can stably produce oxide grains having a wide interval between graphene layers by a simple process.

Hereinafter, the present invention will be described in detail with reference to the following examples and comparative examples. However, the technical idea of the present invention is not limited or limited thereto.

Example

<Oxidation Grapina  Manufacturing>

A method of chemically oxidizing graphite to make oxidized graphene was used. The graphene graphene fabrication method was applied by the Hammers method. 2 g to 4 g of graphite and 100 ml of sulfuric acid were mixed and stirred in an Erlenmeyer flask. At this time, the graphite used was a synthetic graphite, and the sulfuric acid was concentrated sulfuric acid and the concentration thereof was 90% to 99%. This process is the process of dispersing and oxidizing the agglomerated graphite. After thoroughly dispersing for 30 minutes, the flask was immersed in an ice bath and the temperature of the solution was adjusted to 0 ° C. Then, 3 g to 12 g of potassium permanganate was added and further oxidized. This process is an important process that attaches several functional groups between carbon layers to weaken the Van der Waals force between carbon layers, causing them to fall apart. In this case, potassium permanganate reacted with solution and temperature was increased. After the addition of potassium permanganate, the temperature of the solution was controlled within the range of 20 ° C to 80 ° C. The degree of oxidation depends on the temperature set at this time. After stirring for 30 minutes to 90 minutes, 100 mL to 300 mL of distilled water was added slowly and the mixture was stirred with the graphite solution to lower the acid concentration of the solution. As the temperature rises due to the reaction of water and strong acid, distilled water was added dropwise every 1 second. After the addition of distilled water and stirring, hydrogen peroxide (H ₂ O ₂ ) was added to reduce the residual potassium permanganate in the solution without reacting with graphite, thereby forming manganese sulfate. The sample thus prepared was centrifuged and washed several times to neutralize the pH using a centrifuge. When the pH was neutral, the solution was sonicated to remove the oxidized graphene that was sticking. Then, centrifugation was further performed to separate the remaining unoxidized graphite and the oxidized graphene. The obtained graphene oxide samples were confirmed to be oxidized by confirming the peaks of C = C, CO, and -OH groups using FT-IR.

&Lt; Preparation of an upper substrate on which an upper electrode pattern is formed and a lower substrate on which a lower electrode pattern is formed >

Negative photoresist was applied to a polyethylene terephthalate (PET) substrate and spin coated at RPM 500 for 5 seconds and RPM 2,000 for 30 seconds. The coated negative photoresist was then dried for 1 minute at 110 DEG C and then exposed to a photoresist coated substrate through a patterned mask with high energy for 2.5 seconds to 3.5 seconds using an exposure machine The part was cured. The exposed substrate was dried again at 105 DEG C for 1 minute and then developed for 1 minute through the developer so that the uncured portion was separated from the substrate by the developer. Then, the pattern was confirmed on the substrate through an optical microscope. A sputtering process was performed to deposit a copper electrode on a well-patterned substrate. Prior to depositing the copper electrode, chromium was deposited on the patterned substrate for 0.3 seconds at 0.3 A for 20 seconds to 30 seconds, and copper was deposited for 0.3 minutes at 0.3 A for 5 minutes. After that, adhesion test was performed to confirm whether the deposition was good. The adhesion test was applied to the substrate using a tape in the laboratory and peeled off to confirm that the deposited copper was falling off. Copper deposition after chromium deposition did not fall on the tape because of good adhesion. Thereafter, a lift-off process, which is an operation of leaving only the electrode deposited by removing the photoresist pattern hardened on the substrate, was performed. The substrate deposited on the acetone-filled sonic cell was put in a sonic wave for 1 minute or less, and the photoresist hardened on the substrate was removed, leaving only the electrode pattern. It was confirmed by optical microscope that copper was deposited well and conductivity was measured to confirm that it could be used as an electrode. Through these processes, an upper substrate and a lower substrate on which an upper electrode pattern and a lower electrode pattern are formed, respectively, were prepared.

<Oxidation Grapina  Irish coated Dielectric layer  Manufacturing>

At the intersections of the top and bottom electrode patterns, oxidized graphene was coated on the dielectric by placing the electrodes at the crossing points of the planes of the two electrodes by an island method. An optical clear adhesive (OCA) was used as a dielectric and as an adhesive and dielectric for bonding to the other side.

The method of coating the graphene oxide by the island-like method is to coat the graphene oxide by a photolithography process using a photomask in the same manner as in the case of depositing the electrode.

< flexible  Manufacture of touch screen panels>

The flexible touch screen panel positioned the dielectric layer coated with the oxidized graphene at the intersection of the upper electrode and the lower electrode in a plane view. Finally, touch recognition was measured with Capacitive Touch Panel R & D System and it was confirmed whether it can be used as touch panel. At this time, it was confirmed that the measured equipment could be driven as a flexible touch screen panel using FTLab's TMS1000. The completed touch panel was fabricated by using the properties of graphene, which changes its mechanical properties due to the touch pressure, so that the sensitive touch panel with high touch sensitivity is added to the capacitive touch method.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible. Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

100: Flexible touch screen panel
110: upper substrate
112: upper electrode pattern
120: Dielectric
122: oxidized graphene island
130: Lower substrate
132: Lower electrode pattern

Claims (5)

An upper electrode pattern formed on the upper substrate in parallel with each other;
A lower electrode pattern formed on the lower substrate and formed parallel to each other in a direction perpendicular to the upper electrode pattern; And
A dielectric layer on the dielectric, the dielectric layer including an oxidized graphene island disposed between planes of the upper electrode pattern and the lower electrode pattern;
/ RTI &gt;
Wherein the thickness of the dielectric is 1 占 퐉 to 100 占 퐉 and the thickness of the oxide grains is 10 nm to 50 nm,
The size of the graphene oxide grains in the upper electrode pattern and the lower electrode pattern line width is 200% to 400%
Wherein the oxidized graphene islands include a plurality of oxidized graphene layers, and each of the oxidized graphene layers includes at least one functional group selected from the group consisting of a hydroxyl group, a carboxyl group, and an epoxy group on the surface and the edge,
Flexible touch screen panel.
The method according to claim 1,
Wherein a change in resistance is detected in accordance with a change in the intensity of pressure generated in the oxidized graphene island corresponding to the position of the external touch by a pressure applied by an external touch on the upper substrate.
delete delete Comprising the steps of: stirring a mixed solution containing graphite, an acid solution and an oxidizing agent; neutralizing the mixed solution; and sonicating the neutralized mixed solution;
Preparing an upper substrate on which an upper electrode pattern is formed and a lower substrate on which a lower electrode pattern is formed in a direction perpendicular to the upper electrode pattern;
Coating the oxide graphene on the dielectric in an island shape; And
Positioning a dielectric layer coated with an oxidized graphene island between intersections of the upper electrode pattern and the lower electrode pattern in plan view;
The manufacturing method of a flexible touch screen panel according to claim 1 or 2,

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