KR101869700B1 - Cryogenic Fluid Supply Device - Google Patents

Abstract

A cryogenic fluid supply device is provided. The cryogenic fluid supply device includes a main storage tank for storing a cryogenic fluid, a replenishing tank for storing a cryogenic fluid to be supplied to the main storage tank, a drain tank for storing the cryogenic fluid overflowed from the main storage tank, A sensor for analyzing the characteristics of the cryogenic fluid stored in the main tank, and a controller for receiving the temperature information and the weight information of the cryogenic fluid stored in the main storage tank, from the temperature information and the weight information, The control unit may supply the cryogenic fluid stored in the drain tank to the replenishing tank or discharge the cryogenic fluid to the replenishing tank according to the characteristics of the cryogenic fluid analyzed by the sensor.

Description

[0001] Cryogenic Fluid Supply Device [0002]

The present invention relates to a cryogenic fluid supply apparatus, and more particularly, to a cryogenic fluid supply apparatus capable of conveniently managing a flow level of a cryogenic fluid stored in a cryogenic fluid storage tank.

The cryogenic fluid supply device refers to a device that uses a solvent such as ammonia or furon to cool a fluid to a low temperature that can not be attained only by cooling water. The cryogenic fluid supply device is included in various process processing systems and is a device for cooling the heat generated in the process. It is essential to improve the process efficiency and improve the quality of the product.

However, the existing cryogenic fluid supply device is not suitable for measuring the flow rate of the cryogenic fluid at minus 80 ° C or less, and the flow rate of the cryogenic fluid is insufficiently controlled, and the loss due to the overflow that may occur in a specific situation There is a problem that it is difficult to prepare for.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cryogenic fluid supply device which can easily manage a flow rate level of a cryogenic fluid.

It is another object of the present invention to provide a cryogenic fluid supply device that can automatically replenish a cryogenic fluid when the flow rate of the cryogenic fluid is insufficient.

The technical problem to be solved by the present invention is not limited to the above.

In order to solve the technical problems, the present invention provides a cryogenic fluid supply device.

According to one embodiment, a cryogenic fluid supply apparatus includes a main storage tank for storing a cryogenic fluid, a supplementary tank for storing a supplementary cryogenic fluid supplied to the main storage tank, a reservoir tank for storing the cryogenic fluid overflowed from the main storage tank, A sensor for analyzing characteristics of the cryogenic fluid stored in the drain tank and a temperature information and weight information of the cryogenic fluid stored in the main storage tank, And a control unit for determining a flow rate level of the cryogenic fluid stored in the tank, wherein the controller supplies the cryogenic fluid stored in the drain tank to the replenishing tank or the outside .

According to one embodiment, a cryogenic fluid supply device connects the main storage tank and the drain tank, and includes a first supply line through which the cryogenic fluid overflows in the main storage tank, a first supply line through which the cryogenic fluid flows, A second supply line connecting the tank and supplying the cryogenic fluid from the main storage tank to the drain tank, a second supply line provided on the first supply line for sensing the flow of the cryogenic fluid in the first supply line, And a valve installed on the second supply line for opening and closing the second supply line, wherein when the flow of the cryogenic fluid is sensed by the flow sensor, the control unit opens the valve, And supplying the cryogenic fluid of the main storage tank to the drain tank via a second supply line .

According to one embodiment, the cryogenic fluid supply may include causing the control to shut off the valve such that the flow level of the cryogenic fluid stored in the main storage tank is maintained at a reference level.

According to one embodiment, a cryogenic fluid supply device includes a third supply line connecting the supplemental tank and the main storage tank, and a second supply line disposed on the third supply line, wherein the cryogenic fluid is supplied from the supplemental tank to the main storage tank Wherein the control unit drives the pump to supply the cryogenic fluid of the supplemental tank to the main storage tank when the flow level of the cryogenic fluid stored in the main storage tank is lower than a reference level can do.

According to one embodiment, a cryogenic fluid supply device includes a fourth supply line connecting the drain tank and the supplemental tank, a second supply line disposed on the fourth supply line, the cryogenic fluid being supplied from the drain tank to the supplemental tank And a drain line connected to the drain tank and discharging the cryogenic fluid stored in the drain tank to the outside, wherein the control unit is configured to control the characteristics of the cryogenic fluid in the drain tank to a preset reference The pump is driven to supply the cryogenic fluid of the drain tank to the replenishing tank, and discharging the cryogenic fluid to the outside when the characteristics of the cryogenic fluid in the drain tank do not satisfy predetermined criteria can do.

The cryogenic fluid supply device according to the embodiment of the present invention monitors the flow level of the cryogenic fluid stored in the cryogenic fluid storage tank and automatically replenishes the cryogenic fluid lost due to overflow, can do.

In addition, the cryogenic fluid supply device according to the embodiment of the present invention monitors the characteristics of the cryogenic fluid in real time, discharges the cryogenic fluid whose characteristics have changed, and maintains the characteristics of the cryogenic fluid.

1 is a diagram schematically illustrating a process processing system according to an embodiment of the present invention.
2 is a view for explaining a cryogenic fluid supply apparatus according to an embodiment of the present invention.
3 to 5 are views for explaining a method of operating a cryogenic fluid supply apparatus according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Further, in the drawings, the thicknesses of the films and regions are exaggerated for an effective explanation of the technical content.

Also, while the terms first, second, third, etc. in the various embodiments of the present disclosure are used to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. Thus, what is referred to as a first component in any one embodiment may be referred to as a second component in another embodiment. Each embodiment described and exemplified herein also includes its complementary embodiment. Also, in this specification, 'and / or' are used to include at least one of the front and rear components.

The singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It is also to be understood that the terms such as " comprises "or" having "are intended to specify the presence of stated features, integers, Should not be understood to exclude the presence or addition of one or more other elements, elements, or combinations thereof.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Figure 1 is a simplified representation of a process processing system 400 in accordance with an embodiment of the present invention.

Referring to FIG. 1, the process processing system 400 may perform various processes in the manufacture of electronic products or the manufacture of mechanical parts. According to an embodiment, a process processing system can perform various processes in a semiconductor providing process.

 The process processing system 400 includes a cryogenic fluid supply device 100, a processing apparatus 200, and a circulation line 300.

The cryogenic fluid supply device (100) supplies the cryogenic fluid to the processing apparatus. The cryogenic fluid may be provided to cool the heat generated during the process of the processing apparatus 200.

The processing apparatus 200 is an apparatus that actually performs a semiconductor manufacturing process, and may generate heat at a high temperature during a process.

The circulation line 300 provides a flow path through which the cryogenic fluid is circulated between the cryogenic fluid supply device 100 and the process processing device 200. The cryogenic fluid is supplied from the cryogenic fluid supply apparatus 100 to the processing apparatus 200 through the circulation line 300 and after cooling the heat generated in the processing apparatus 200, To the cryogenic fluid supply device (100).

2 is a view for explaining a cryogenic fluid supply device 100 according to an embodiment of the present invention.

2, a cryogenic fluid supply apparatus 100 according to an embodiment of the present invention includes a main storage tank 110, a drain tank 120, a replenishing tank 130, a valve 112, pumps 122 and 132, Includes a supply line 114, 116, 124 and 134, a discharge line 126, a control unit 140 and sensors 150, 160, 170 and 180.

The main storage tank 110 stores the cryogenic fluid. The cryogenic fluid stored in the main storage tank 110 may be supplied and recovered to the processing apparatus 200 of FIG. 1 through the circulation line 300. The temperature of the cryogenic fluid may be in the range of minus 50 to 100 degrees. According to one embodiment, the temperature of the cryogenic fluid may be minus 80 °. The main storage tank 110 may include a temperature sensor 150 capable of measuring the temperature of the cryogenic fluid and a weight sensor 160 capable of measuring the weight. The temperature information 10 measured by the temperature sensor 150 and the weight information 20 measured by the weight sensor 160 may be transmitted to the controller 140.

The first supply line 114 connects the main storage tank 110 and the drain tank 120. According to the embodiment, the first supply line 114 is connected to the upper end of the main storage tank 110 at one end.

The first supply line 114 may supply cryogenic fluid overflowing from the main storage tank 110 to the drain tank 120. The cryogenic fluid is sensitive to temperature changes and can rapidly expand in volume, which can overflow from main storage tank 110 during volume expansion.

The second supply line 116 connects the main storage tank 110 and the drain tank 120. One end of the second supply line 116 is connected to the main storage tank 110 at a lower height than the first supply line 114. One end of the second supply line 116 may be connected to the lower end of the main storage tank 110. The cryogenic fluid stored in the main storage tank 110 may be supplied to the drain tank 130 through the second supply line 116. According to one embodiment, the other end of the first supply line 114 and the other end of the second supply line 116 may be joined together and connected to the drain tank 120.

The flow sensor 170 is installed in the first supply line 114 and can sense the flow of the cryogenic fluid supplied to the first supply line 114. The fluid flow information 30 sensed by the flow sensor 150 is transmitted to the controller 140.

The valve 112 is installed in the second supply line 116. The valve 112 receives the signal 50 from the control unit 140 and is opened and closed to control the supply of the cryogenic fluid.

The drain tank 120 stores the cryogenic fluid supplied through the first supply line 112 and the second supply line 114.

The sensor 180 measures the flow rate of the cryogenic fluid stored in the drain tank 120 and the measured information 40 is transmitted to the controller 140. In addition, the sensor 180 analyzes the characteristics of the cryogenic fluid stored in the drain tank 120, and the analyzed information 40 is transmitted to the control unit 140. As described in FIG. 1, the cryogenic fluid is recovered after cooling the heat generated in the processing apparatus 200, in which the cryogenic fluid may be deteriorated in its characteristics by heat. Accordingly, the sensor 180 analyzes the degree of deterioration of the characteristics of the cryogenic fluid. The third supply line 124 connects the drain tank 120 and the replenishing tank 130. The cryogenic fluid stored in the drain tank 120 through the third supply line 124 can be supplied to the replenishing tank 130.

The discharge line 126 connects the drain tank 120 to the outside. The cryogenic fluid stored in the drain tank 120 may be discharged to the outside through the discharge line 126.

The pump 122 is installed in the third supply line 124. The pump 122 receives the signal 70 from the control unit 140 and can operate to control the supply of the cryogenic fluid.

The replenishment tank 130 stores the replenishment fluid. The supplemental fluid is the same kind of fluid as the cryogenic fluid stored in the main storage tank (110). The supplemental fluid has a higher temperature than the cryogenic fluid. According to one embodiment, the temperature of the supplemental fluid may be ambient.

The fourth supply line 134 connects the supplemental tank 130 to the main storage tank 110. The supplemental fluid stored in the supplemental tank 130 through the fourth supply line 134 may be supplied to the main storage tank 110. [ The supplementary fluid supplied to the main storage tank 110 is higher in temperature than the cryogenic fluid stored in the main storage tank 110, but the temperature of the cryogenic fluid can be maintained at a very low temperature because the flow rate supplied is extremely small.

The pump 132 is installed in the fourth supply line 134. The pump 132 receives the signal 60 from the control unit 140 and is operable to control the supply of supplemental fluid. For example, the pump 132 may be a pressure pump.

The control unit 140 receives the information, compares the received information with a predetermined reference, and can transmit an appropriate signal. In other words, the temperature information 10 obtained by measuring the cryogenic fluid stored in the main storage tank 110 by the temperature sensor 150 and the weight information 20 measured by the weight sensor 160 are input to the controller 140. The cryogenic fluid flow information 30, which is obtained by measuring the cryogenic fluid passing through the first supply line 114 connecting the main storage tank 110 and the drain tank 120 with the flow rate sensor 170, . The flow rate and characteristic information 40 of the cryogenic fluid measured by the sensor 180 are input to the controller 140. The control unit 140 may compare the input information with predetermined criteria and transmit the opening and closing signal 50 to the valve 112 and the operation signals 60 and 70 to the pumps 122 and 132. For example, the control unit 140 may be a PLC (Programmable Logic Controller).

Referring to FIG. 3, a process in which the cryogenic fluid is supplied from the main storage tank 110 to the drain tank 120 can be described.

The control unit 140 receives the temperature information 10 from the temperature sensor 150 of the main storage tank 110 and receives the weight information 20 from the weight sensor 160. The control unit 140 compares the weight information 20 with a preset reference, The flow rate level of the cryogenic fluid stored in the tank 110 can be determined. The flow level refers to the depth of the cryogenic fluid stored in the main storage tank 110.

The cryogenic fluid stored in the main storage tank 110 can be expanded in volume by reacting sensitively to changes in temperature and pressure. When the volume of the cryogenic fluid is expanded, an overflow occurs in excess of the capacity of the main storage tank (110). The overflowed cryogenic fluid is supplied to the drain tank 120 through the first supply line 114. The flow of the cryogenic fluid flowing through the first supply line 112 is sensed by the flow sensor 170 and the fluid flow information 30 is transmitted to the controller 140. When the fluid flow information 30 is input to the controller 140, the overflow of the cryogenic fluid stored in the main storage tank 110 is determined, and the signal 50 is sent to open the valve 112. The cryogenic fluid stored in the main storage tank (110) is supplied to the drain tank (120) through the second supply line (116). By supplying the cryogenic fluid stored in the main storage tank 110 to the drain tank 120, the flow level of the cryogenic fluid stored in the main storage tank 110 is reduced. The control unit 140 monitors the flow rate level of the cryogenic fluid stored in the main storage tank 110 in real time and sends a signal 50 when the flow level reaches the reference level to shut off the valve 112.

Referring to FIG. 4, a process of supplying supplemental fluid from the supplemental tank 130 to the main storage tank 110 may be described.

The control unit 140 compares the temperature information 10 and the weight information 20 transmitted from the main storage tank 110 with the stored information to determine the flow level of the cryogenic fluid stored in the main storage tank 110, Level, it sends a signal 60 to the pump 132 to activate it. The supplemental fluid stored in the supplemental tank 130 is supplied to the main storage tank 110 via the third supply line 134. [ When the flow rate level of the cryogenic fluid stored in the main storage tank 110 reaches the reference level, the signal 60 is sent to stop the operation of the pump 132.

The control unit 140 sends a signal 60 to the pump 132 when an overflow occurs in the main storage tank 110 and the flow level of the cryogenic fluid stored in the main storage tank 100 does not reach the reference level And can supply the supplemental fluid to the main storage tank (110).

Referring to FIG. 5, a process in which the cryogenic fluid is supplied from the drain tank 120 to the replenishing tank 130 can be described.

The sensor 180 senses the cryogenic fluid stored in the drain tank 120 and can analyze the characteristics of the cryogenic fluid. The information analyzed by the sensor 180 is transmitted to the controller 140. When the characteristics of the cryogenic fluid stored in the drain tank 120 satisfy predetermined criteria, And sends a signal 70 to operate it. The cryogenic fluid stored in the drain tank 120 is supplied to the replenishing tank 130 through the fourth supply line 124. If the sensor 180 does not sense the cryogenic fluid in the drain tank 120 after the supply of the cryogenic fluid has been completed, the control unit 140 sends a signal 70 to stop the operation of the pump 122.

If the characteristics of the cryogenic fluid stored in the drain tank 120 do not meet predetermined criteria, the cryogenic fluid is discharged through the discharge line 126 to the outside. If the characteristics of the cryogenic fluid stored in the drain tank 120 do not satisfy the predetermined criteria, the cryogenic fluid is deteriorated in characteristics in the course of recovering the heat generated in the processing apparatus 200, This means impossible conditions.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the present invention.

10: Temperature information
20: Weight information
30: Fluid flow information
40: Fluid flow rate / characteristic information
50: Valve operation signal
60: pump (122) operation signal
70: pump 132 operating signal
100: Cryogenic fluid supply device
110: main storage tank
112: Valve
114: first supply line
116: second supply line
120: Drain tank
122: pump
124: Third supply line
126: Exhaust line
130: Refill tank
132: pump
134: fourth supply line
140:
150: Temperature sensor
160: Weight sensor
170: Flow sensor
180: sensor
200: Process processing device
300: circulation line
400: Process processing system

Claims (5)

A main storage tank for storing cryogenic fluid;
A replenishing tank in which a replenishing cryogenic fluid supplied to the main storage tank is stored;
A drain tank for storing the cryogenic fluid overflowed from the main storage tank;
A sensor for analyzing characteristics of the cryogenic fluid stored in the drain tank;
A first supply line connecting the main storage tank and the drain tank and flowing the cryogenic fluid overflowed from the main storage tank;
A second supply line connecting the main storage tank and the drain tank and supplying the cryogenic fluid from the main storage tank to the drain tank;
A flow sensor installed on the first supply line for sensing a flow of the cryogenic fluid in the first supply line;
A valve installed on the second supply line and opening / closing the second supply line; And
And a controller receiving temperature information and weight information of the cryogenic fluid stored in the main storage tank and determining a flow rate level of the cryogenic fluid stored in the main storage tank from the temperature information and the weight information,
Wherein the control unit supplies the cryogenic fluid stored in the drain tank to the replenishing tank or discharges the fluid to the outside in accordance with the characteristics of the cryogenic fluid analyzed by the sensor and when the flow of the cryogenic fluid is sensed by the flow sensor And opening the valve to supply the cryogenic fluid of the main storage tank to the drain tank via the second supply line. delete The method according to claim 1,
And the control unit closes the valve to cause the flow level of the cryogenic fluid stored in the main storage tank to maintain a reference level. The method according to claim 1,
A third supply line connecting the supplemental tank and the main storage tank; And
And a pump installed on the third supply line for supplying the cryogenic fluid from the replenishment tank to the main storage tank,
Wherein the control unit drives the pump to supply the cryogenic fluid of the replenishing tank to the main storage tank when the flow level of the cryogenic fluid stored in the main storage tank is lower than a reference level. The method according to claim 1,
A fourth supply line connecting the drain tank and the supplementary tank;
A pump installed on the fourth supply line for supplying the cryogenic fluid from the drain tank to the replenishing tank; And
And a discharge line connected to the drain tank for discharging the cryogenic fluid stored in the drain tank to the outside,
Wherein the control unit drives the pump to supply the cryogenic fluid of the drain tank to the replenishing tank when the characteristic of the cryogenic fluid in the drain tank satisfies a predetermined criterion, And discharging the fluid to the outside when the characteristics of the fluid do not satisfy predetermined criteria.

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