KR101834613B1 - System and method of shifting a carrier - Google Patents

System and method of shifting a carrier Download PDF

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Publication number
KR101834613B1
KR101834613B1 KR1020150040585A KR20150040585A KR101834613B1 KR 101834613 B1 KR101834613 B1 KR 101834613B1 KR 1020150040585 A KR1020150040585 A KR 1020150040585A KR 20150040585 A KR20150040585 A KR 20150040585A KR 101834613 B1 KR101834613 B1 KR 101834613B1
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KR
South Korea
Prior art keywords
driving
carrier
driving member
conveying
teeth
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KR1020150040585A
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Korean (ko)
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KR20160114302A (en
Inventor
박성완
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주식회사 유니플라즈마
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Priority to KR1020150040585A priority Critical patent/KR101834613B1/en
Publication of KR20160114302A publication Critical patent/KR20160114302A/en
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Publication of KR101834613B1 publication Critical patent/KR101834613B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A carrier transport system and method capable of stably transporting carriers is disclosed. The carrier transporting system includes a transporting member having a tooth formed at one end thereof and a driving member having a toothed shape engaging with the teeth of the transporting member. Here, the carrier is supported by the conveying member, and the conveying member linearly moves according to the rotation of the driving member to convey the carrier in a specific direction.

Description

[0001] SYSTEM AND METHOD OF SHIFTING A CARRIER [0002]

The present invention relates to a carrier transport system and method.

For vacuum deposition, there is a need for a transfer system for transferring the carrier in which the substrate is coupled, either within the chamber or between the chambers.

The conventional conveying system is a roller driving type in which the roller is rotated while a circular rod attached to the lower portion of the carrier is positioned on the roller. In this case, the circular rod is moved in the roller rotating direction by friction between the roller and the circular rod. The method of using the friction between these rollers and the circular rod may cause a slight slippage of the circular rod on the roller.

In the actual process, a plurality of carriers sequentially move to the loading chamber, the buffer chamber, and the process chamber. When the round bar slips, collisions of the carriers may occur.

Korean Published Patent Application No. 2009-0067288 (Publication date: June 25, 2009)

SUMMARY OF THE INVENTION The present invention provides a carrier transport system and method that is capable of delivering carriers stably.

According to an aspect of the present invention, there is provided a carrier transfer system including: a transfer member having a tooth formed at one end thereof; And a driving member having a toothed shape engaging with the teeth of the conveying member. Here, the carrier is supported by the conveying member, and the conveying member linearly moves according to the rotation of the driving member to convey the carrier in a specific direction.

According to another aspect of the present invention, there is provided a carrier transfer system including: a transfer member having a tooth formed at one end thereof; And drive members having teeth that engage with the teeth of the transfer member. Here, the carrier is supported by the conveying member, and the conveying member placed on the first driving member and the second driving member among the driving members moves over the third driving member of the second driving member and the driving members The third driving member starts driving when the teeth of the conveying member and the teeth of the third driving member are engaged with each other.

According to an embodiment of the present invention, there is provided a carrier transfer method comprising: positioning a transfer member for supporting a carrier on a first drive member and a second drive member; And driving the first driving member and the second driving member to move the feeding member in a specific direction to position the feeding member on the second driving member and the third driving member. Here, a tooth is formed on one surface of the conveying member, and the teeth of the conveying member are engaged with the teeth of the driving member.

The carrier transporting system and method according to the present invention moves a conveying member to which a carrier is coupled by rotating a driving member in a state where a tooth is formed at a lower end of the conveying member and the teeth of the conveying member are engaged with the teeth of the driving member. Therefore, since the conveying member does not slip from the driving member, the carrier can be stably conveyed in a desired direction.

In addition, since the carrier member performs the role of transferring the carrier while supporting the carrier, the width of the carrier may not be widened, and as a result, the width of the chamber may not be widened.

FIGS. 1 to 3 are conceptual views illustrating a carrier transporting system and a carrier transporting process according to an embodiment of the present invention.
Figures 4 and 5 are views showing substantially the carrier transport system according to one embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a carrier transport system, and more particularly, to a system for horizontally and stably transporting a carrier used in an in-line vacuum deposition apparatus.

The carrier on which the substrate is mounted is put into the vacuum chamber in a vertically erected state, and then the deposition process is performed. After the deposition process is completed, the carrier is discharged to the outside of the vacuum chamber. In this case, a system capable of stably transporting carriers is required, and the present invention proposes a system for stably transporting a carrier without widening the width of the carrier or the vacuum chamber.

Further, in the prior art, slippage of the carrier occurs, but the present invention proposes a transport system in which slippage of the carrier does not occur, so that carriers that are sequentially transported do not collide. Thus, the spacing between the carriers can be smaller than in the prior art.

Hereinafter, various embodiments of the carrier transport system of the present invention will be described with reference to the accompanying drawings.

FIGS. 1 to 3 are conceptual views illustrating a carrier transporting system and a carrier transporting process according to an embodiment of the present invention.

1, the carrier transport system of the present embodiment includes a carrier member 102 for supporting and transporting the carrier 100, a driving member 104 for moving the carrier member 102, and a driving member 104 And a power member (not shown) for driving the motor. Although only three driving members 104 are shown in FIGS. 1 and 2 for convenience of explanation, the present invention is not limited thereto.

A substrate is attached to the carrier 100, and the carrier 100 is vertically erected and transported. The carrier 100 can be variously modified as long as the substrate can be mounted.

The conveying member 102 is a member that conveys the carrier 100 in a specific direction while supporting the carrier 100. The driving member 104 performs a function of operating the conveying member 102. [

According to one embodiment, the transfer member 102 may be a rack gear having teeth on its lower end, for example, teeth, as shown in FIG. 1, and the drive member 104 may be a toothed, Lt; / RTI > That is, the teeth of the conveying member 102 and the teeth of the driving member 104 engage with each other, and accordingly, the conveying member 102 moves linearly as the driving member 104 rotates.

According to one embodiment, the driving member 104 is rotated using the motor as the power member, and the conveying member 102 is moved in accordance with the rotation of the driving member 104. As a result, as the transfer member 102 moves, the carrier 100 is transferred in a specific direction, for example, from the loading chamber to the process chamber.

On the other hand, the driving members 104a to 104c can be controlled by separate power members.

According to another embodiment, a supporting member (not shown) is arranged on the conveying member 102, and the carrier 100 may be placed on the supporting member. Of course, also in this case, as the carrying member 102 moves, the carrier 100 is transported while being placed on the supporting member.

The operation of this carrier transport system will be described.

First, the carrier 100 is arranged while being supported on the conveying member 102, and the conveying member 102 is placed on the driving members 104a and 104b. According to one embodiment, the carrier 100 may be attached on the transfer member 102.

Subsequently, the power members drive the driving members 104a and 104b, and as a result, the conveying member 102 moves in a specific direction. At this time, the driving member 104c is not driven.

Subsequently, when the conveying member 102 is arranged above the conveying members 104b and 104c as shown in Fig. 2, the teeth of the lower end of the conveying member 102 and the teeth of the driving member 104c It is judged whether or not it is engaged.

3 (A), when the driving member 104c operates in a state in which the teeth of the conveying member 102 and the teeth of the driving member 104c are not engaged, the carrier 100 is tilted and conveyed, An error may occur. Therefore, whether or not the teeth of the driving member 104c and the teeth of the conveying member 102 are engaged is determined first so that the carrier 100 is not tilted.

When the teeth of the driving member 104c and the teeth of the conveying member 102 engage with each other as shown in Fig. 3B, the driving member 104c starts driving, and the driving member 104a stops driving . At this time, since the teeth of the conveying member 102 and the teeth of the driving member 104c are engaged, the carrier 100 is conveyed in a normal state without being tilted. On the other hand, the position of the transfer member 102 is sensed by the position sensor, and a control unit (not shown) can control the operation of the driving members 104 according to the detection result.

The carrier transport system of the present invention can transport the carrier 100 in a specific direction in the same manner as described above.

In summary, the carrier transport system of the present embodiment can transport the carrier 100 by using the carrier member 102 with the teeth formed thereon and the drive member 104 having the teeth formed thereon. The teeth of the driving member 104 are engaged with the teeth of the feeding member 102, so that the feeding member 102 does not slip from the driving member 104. [

On the other hand, it is also possible to use a gear having teeth for conveying, apart from a conveying member for supporting the carrier without forming a tooth on the conveying member, but in this case, the width of the carrier is inevitably widened. As a result, the width of the chamber must also be widened.

On the other hand, when the toothed portion is formed at the lower end of the conveying member 102, the conveying member 102 can be used for conveying while supporting the carrier 100. Therefore, the width of the carrier 100 in the carrier transport system of the present invention becomes smaller, as compared with the system in which the member for the transport function and the member for supporting the carrier must be separately, have.

Figures 4 and 5 are views showing substantially the carrier transport system according to one embodiment of the present invention. 4 and 5 show only two supporting rollers 400a and 400b, one driving member 104 and one power member 500, but are not limited thereto.

4 and 5, the carrier transport system of the present embodiment includes a transfer member 102, a driving member 104, support rollers 400, a support member 402, a guide member 410, 420, support roller fixing portions 430, a driving member fixing portion 432, a position sensor (not shown), a power member 500, and a control portion (not shown).

The supporting roller fixing portions 430 and the driving member fixing portions 432 are connected to the guide member (frame 410) Lt; RTI ID = 0.0 > and / or < / RTI > The guide member 410 can determine the direction in which the carrier 100 is to be transported.

The support rollers 400 can facilitate the movement of the conveying member 102 while supporting the load of the carrier 100 and the support member 402 and can be moved in accordance with the movement of the carrier 100 without a driving force. It can rotate freely. Concretely, as shown in Fig. 5, a concave portion is formed along the center of the support roller 400, and the conveying member 102 can be positioned on the concave portion.

Without these support rollers 400, the carrier 100 and the support member 402 may not be stably supported.

The support member 402 serves to support the carrier 100, and the width of the support member 402 may be wider than the width of the carrier 100, for example, for stable support.

A concave portion is formed at the center of the lower surface of the supporting member 402 and the upper end of the conveying member 102 is supported by the supporting member 400 in a state in which the conveying member 102 is seated on the supporting roller 400 402 as shown in FIG. In addition, the lower and both lower ends of the support member 402 can be supported by both sides of the support roller 400 as shown in Fig. Therefore, the support member 402 is conveyed in accordance with the movement of the conveying member 102 while the carrier 100 is stably supported.

The upper roller 420 may be partially inserted into the groove of the frame of the carrier 100 in a state of being coupled to the upper member of the guide member 410 and may restrict the movement of the carrier 100 in the width direction I.e., the carrier 100, to the guide member 410 in a stable manner.

However, since the carrier 100 must be conveyed in accordance with the rotation of the driving member 104, the upper roller 420 should not interfere with the movement of the carrier 100. The carrier transport system of the present invention may use an upper roller 420 that rotates in accordance with the movement of the carrier 100 and a protruding member protruding from one end of the upper roller 420 may be inserted into the groove 430 of the carrier 100 As shown in Fig. As a result, the carrier 100 can be stably supported by the guide member 410 through the upper roller 420 while being transferred according to the rotation of the driving member 104. However, as long as the carrier 100 is supported, the upper support member of the carrier 100 can be variously modified.

The support roller fixing portions 430 may be fixed to the guide member 410 in a state where the support roller fixing portions 430 are coupled to the guide member 410.

The driving member fixing portion 432 can fix the driving member 104 in a state of being coupled to the guide member 410.

The position sensor can detect the position of the carrier 100 by sensing the conveying member 102. [

The control unit may control the power members 500 according to the detection result of the position sensor.

The power member 500 is, for example, an electric motor, and the rotation axis can be coupled to the center of the driving member 104. [ Therefore, when the rotation shaft of the power unit 500 rotates according to the control of the control unit, the driving member 104 rotates, and as a result, the conveying member 102 moves to convey the carrier 100.

In other words, when the power member 500 rotates the driving member 104, the conveying member 102 engaged with the driving member 104 is moved in a linear direction to move the carrier 100 in a desired direction (arrow direction in FIG. 5) .

It will be apparent to those skilled in the art that various modifications, additions and substitutions are possible, without departing from the spirit and scope of the invention as defined by the appended claims. Should be regarded as belonging to the following claims.

100: carrier 102:
104: driving member 400: support roller
402: support member 410: guide member (frame)
420: upper roller 430: support roller fixing portion
432: driving member fixing part 500: power member

Claims (11)

A transfer member having a tooth formed at one end thereof; And
A plurality of driving members having teeth that mesh with teeth of the conveying member, the plurality of driving members being driven respectively by the corresponding power members,
Wherein the carrier is supported by the conveying member, the conveying member linearly moves in accordance with rotation of the driving member to convey the carrier in a specific direction,
Wherein when the first driving member and the transfer member placed on the second driving member are transferred and moved onto the third driving member among the second driving member and the driving members, The third driving member is not driven even if the second driving member is driven, even if the conveying member is positioned on the third driving member when the tooth of the conveying member is not engaged, The third driving member starts driving when the teeth of the third driving member engage with the teeth of the conveying member when the second driving member is driven and when the teeth of the third driving member and the teeth of the conveying member are engaged with each other And the carrier transport system.
The method according to claim 1,
A rotatable support roller arranged to be spaced apart from the driving member and supporting the conveying member;
A supporting member for supporting the carrier while being placed on the conveying member;
A power member for controlling rotation of the driving member; And
And a position sensor for detecting the position of the carrier by sensing the transfer member. 3. The image forming apparatus according to claim 2, characterized in that a concave portion is formed at the center of the lower surface of the support member, and the upper end of the conveying member is inserted into the concave portion of the support member in a state in which the conveying member is seated on the support roller system. 3. The method of claim 2,
A guide member for guiding the conveying direction of the carrier; And
And an upper roller for supporting the carrier in a state of being coupled to the guide member,
Wherein the upper roller is connected to an upper end of the carrier. 5. The method of claim 4,
A support roller fixing portion coupled to the guide member to fix the support roller; And
And a driving member fixing unit coupled to the guide member to fix the driving member. delete delete delete Positioning a transfer member for supporting the carrier on the first drive member and the second drive member;
Driving the first driving member and the second driving member to move the feeding member in a specific direction to position the feeding member on the second driving member and the third driving member; And
And driving the third driving member when the teeth of the conveying member and the teeth of the third driving member are engaged with each other as the conveying member is conveyed to the third driving member by driving the second driving member However,
Wherein the first driving member is not driven when the third driving member is driven and the third driving member is not driven when the first driving member is driven,
Wherein a tooth is formed on one surface of the conveying member, and a tooth shape of the conveying member engages with a tooth shape of the driving member.
delete 10. The image forming apparatus according to claim 9, wherein a supporting member is arranged between the conveying member and the carrier,
Wherein a concave portion is formed in a central portion of a lower surface of the support member, and an upper end of the conveying member is inserted into the concave portion.
KR1020150040585A 2015-03-24 2015-03-24 System and method of shifting a carrier KR101834613B1 (en)

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KR101834613B1 true KR101834613B1 (en) 2018-03-06

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007162063A (en) * 2005-12-13 2007-06-28 Dainippon Printing Co Ltd Sputtering apparatus and carrier for transporting substrate
US20110253953A1 (en) 2008-12-09 2011-10-20 Canon Anelva Corporation Rack and pinion mechanism, vacuum processing apparatus, method of driving and controlling rack and pinion mechanism, drive control program, and recording medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100920901B1 (en) 2007-12-21 2009-10-12 한국기계연구원 Multilayer thin film execution equipment and execution method of using of the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007162063A (en) * 2005-12-13 2007-06-28 Dainippon Printing Co Ltd Sputtering apparatus and carrier for transporting substrate
US20110253953A1 (en) 2008-12-09 2011-10-20 Canon Anelva Corporation Rack and pinion mechanism, vacuum processing apparatus, method of driving and controlling rack and pinion mechanism, drive control program, and recording medium

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