KR101832392B1 - Electric Precipitation Module and Scrubber System having the Same - Google Patents

Electric Precipitation Module and Scrubber System having the Same Download PDF

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Publication number
KR101832392B1
KR101832392B1 KR1020150125580A KR20150125580A KR101832392B1 KR 101832392 B1 KR101832392 B1 KR 101832392B1 KR 1020150125580 A KR1020150125580 A KR 1020150125580A KR 20150125580 A KR20150125580 A KR 20150125580A KR 101832392 B1 KR101832392 B1 KR 101832392B1
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KR
South Korea
Prior art keywords
water
dust collecting
main body
discharge electrode
collecting housing
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KR1020150125580A
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Korean (ko)
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KR20170029059A (en
Inventor
김형극
이상준
신승규
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씨에스케이(주)
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Priority to KR1020150125580A priority Critical patent/KR101832392B1/en
Publication of KR20170029059A publication Critical patent/KR20170029059A/en
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Publication of KR101832392B1 publication Critical patent/KR101832392B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/74—Cleaning the electrodes
    • B03C3/78—Cleaning the electrodes by washing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions

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  • Electrostatic Separation (AREA)

Abstract

The present invention relates to a dust collecting apparatus, comprising: a dust collecting housing having a hollow interior and being opened up and down; a discharge electrode unit located inside the dust collecting housing and through which corona discharge progresses with the dust collecting housing; And a lower water jet nozzle for spraying water in an area including an outer surface and a lower part of the discharge electrode unit in the dust collecting housing, and a scrubber system having the same.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electric dust collecting module and a scrubber system including the electric dust collecting module.

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electric dust collecting module used in waste gas treatment generated in an electronic industrial process and a scrubber system having the same.

The waste gas used and discharged from the electronic industry processes that produce electronic products such as semiconductors, display devices, solar cells, or organic light emitting diodes contains acidic components, moisture, dust and the like and has characteristics such as toxicity, It is common to have. Therefore, the waste gas is treated and discharged by a scrubber system of a plasma system, an electric heating oxidation system, and a chemical adsorption system. The plasma method is a method of decomposing and treating waste gas by generating a high-temperature plasma. The combustion oxidation method is a method that is most commonly used for the treatment of waste gas, in which a waste gas is heated and decomposed by a high temperature flame using LNG and an oxidizing agent.

The waste gas treatment method is a process of passing a water treatment module for spraying water to waste gas before being discharged to collect fine particles generated as reaction by-products in a process of decomposing waste gas by a plasma or a flame. In addition, the waste gas treatment system proceeds with the water treatment process and the process of passing the waste gas through the electrostatic dust collecting module in order to collect more efficient particulates.

The electrostatic dust collecting module collects and collects the fine particles contained in the waste gas using a corona discharge generated between the discharge electrode and the dust collecting electrode. When the particulate matter collected in the dust collecting module is not discharged efficiently, the insulation between the discharge electrode and the dust collecting electrode is broken at some position, so that the corona discharge voltage is lowered and the dust collecting efficiency is lowered. It is necessary for the electric dust collecting module to carry out cleaning to remove the collected particulates in accordance with a predetermined cleaning cycle in order to maintain the dust collecting efficiency. The operation of the entire scrubber system must be stopped when the operation of the electric dust collecting module is stopped for cleaning. Therefore, there is a problem that the cleaning efficiency is reduced as the cleaning period is shortened.

The present invention provides an electrostatic dust collecting module and a scrubber system including the electrostatic dust collecting module and the electrostatic dust collecting module, capable of efficiently removing particulates collected to maintain the dust collecting efficiency and increasing the cleaning period.

The electrostatic dust collecting module of the present invention includes a dust collecting housing which is hollow inside and opens up and down,

An upper water injection unit for spraying water to the upper part of the discharge electrode unit inside the dust collecting housing, and an upper water spray unit for spraying water from the upper water spray unit inside the dust collecting housing, And a lower water jetting nozzle for jetting water to an area including an outer surface and a lower portion of the discharge electrode unit.

The dust collecting housing includes a dust collecting housing body and an upper dust collecting housing coupled to an upper portion of the dust collecting housing body. The dust collecting housing body includes an outer surface of the dust collecting housing body at an upper portion of the dust collecting housing body. A water inflow hole for providing a path for water to be introduced into the water jacket pipe from the outside of the water jacket pipe, And a water outlet hole formed to be connected to the water jacket pipe at an upper portion of the dust collecting housing body and formed of a plurality of holes for discharging water to the inner surface of the dust collecting housing body.

The discharge electrode unit may include a discharge electrode body having a hollow interior and a closed upper portion and having a lower portion formed in a horn shape and positioned vertically in the center of the dust housing body, A plurality of discharge fins spaced apart from each other at a predetermined interval so as to face the inner surface of the discharge electrode main body, and a hollow inner tube, the discharge electrode main body being coupled to the upper dust housing, And a power supply line extending from the main body fixing bar to the inside of the discharge electrode body through the inside of the main body fixing bar.

The discharge electrode unit may further include an upper insulating cover having a horn shape formed of an electrically insulating material and having a cover through hole penetrating from a vertex to a lower portion thereof to be coupled to an upper portion of the discharge electrode body, And may be coupled to the discharge electrode body through the through hole.

The upper dust collecting housing further includes an upper water inflow hole at a lower portion thereof. The upper water jetting unit is formed in a ring shape and coupled to the inside of the upper dust collecting housing, A plurality of water injection passages formed in a ring shape and including a water injection hole penetrating from the water transfer passage in an inner center direction to inject water in a center direction and the water transfer passage being connected to the upper water inflow hole, An injection guide ring coupled to the inner surface of the body and having a horizontal surface and a curved surface extending inward from the horizontal surface and having an end directed downward, the injection guide ring being formed such that the horizontal surface is in contact with the upper portion of the inner circumferential surface of the water injection hole, And a water supply pipe connected to the hole to supply water from the outside to the water transfer passage .

The electrostatic dust collecting module may further include a gas injection nozzle for injecting gas into the main body fixing bar at a position where the main dust collecting housing and the main body fixing bar are coupled. At this time, the main body fixing bar is formed in a letter shape having a horizontal part and a vertical part, one end of the horizontal part is coupled to the upper dust collecting housing and the other end is extended to the center of the upper dust collecting housing, Wherein the gas injection nozzle is formed in a ring shape and is formed in a ring shape and includes a gas supply passage through which gas is supplied from the outside, And a gas injection passage connected to the gas supply passage and having a second end configured to inject gas in a direction parallel to the outer surface of the horizontal portion of the main body fixing bar.

Also, the main body fixing bar may be formed of stainless steel, and may be formed by coating an outer surface with an electrically insulating material or by coupling an insulating tube.

A plurality of the lower water jet nozzles may be spaced apart from each other at a predetermined interval in a circumferential direction of the dust collecting housing body from a lower portion of the dust collecting housing body and spray water upward in the discharge electrode body.

Further, the scrubber system of the present invention is characterized by being provided with the above-described electric dust collecting module.

The electrostatic dust collecting module and the scrubber system including the electrostatic dust collecting module efficiently remove particulates collected in the electrostatic dust collecting module, thereby minimizing the occurrence of arc discharge and locally causing insulation between the discharging electrode unit and the dust collecting housing, And the operation rate is improved.

In addition, the electric dust collecting module and the scrubber system including the same have the effect of efficiently removing fine particles collected in the electric dust collecting module by water or air sprayed from a plurality of directions.

In addition, the electric dust collecting module and the scrubber system including the same can efficiently remove dust particles, thereby minimizing the differential pressure generated by the dust collecting module in the scrubber system and maintaining a smooth exhaust pressure.

1 is a perspective view of a scrubber system including an electric dust collecting module according to an embodiment of the present invention.
2 is a vertical sectional view of the dust collecting module of FIG.
3 is a front view including a partial cross-sectional view of the discharge electrode unit shown in Fig.
4 is a partial enlarged view of A in Fig.
Fig. 5 is a partially enlarged view of Fig. 2B. Fig.
FIG. 6 is a perspective view of the dust collecting housing main body of FIG. 2;
7 is a cross-sectional view of CC of Fig.
Figure 8 is a vertical cross-sectional view of the water treatment module of Figure 1;
9 is a photograph showing the state of the discharge electrode before cleaning.
10 is a photograph showing the state of the discharge electrode after cleaning.
11 is a cross-sectional view showing a state in which fine particles accumulated on the upper portion of the main body fixing bar are removed by the gas injected from the gas injection nozzle.

Hereinafter, an electrostatic dust collecting module and a scrubber system including the electrostatic dust collecting module according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, a structure of an electric dust collecting module and a scrubber system including the electric dust collecting module according to an embodiment of the present invention will be described.

1 is a perspective view of a scrubber system including an electric dust collecting module according to an embodiment of the present invention. 2 is a vertical sectional view of the dust collecting module of FIG. 3 is a front view including a partial cross-sectional view of the discharge electrode unit shown in Fig. 4 is a partial enlarged view of A in Fig. Fig. 5 is a partially enlarged view of Fig. 2B. Fig. FIG. 6 is a perspective view of the dust collecting housing main body of FIG. 2; 7 is a cross-sectional view taken along line C-C of Fig. Figure 8 is a vertical cross-sectional view of the water treatment module of Figure 1;

1 to 8, a scrubber system including an electric dust collecting module according to an embodiment of the present invention includes a burner module 100, a combustion module 200, a water tank 300, a water treatment module 400, And an electric dust collection module 500. Further, the scrubber system may further include an exhaust module 600.

The burner module 100, the combustion module 200, the water tank 300, and the water treatment module 400 may be formed in a general structure used in a scrubber system used in an electronic industrial process. For example, the burner module 100 may be a module for decomposing waste gas using plasma generated from a plasma torch or a module for decomposing waste gas using a flame generated by combustion of fuel and an oxidizer in a combustion burner . The burner module 100 is formed on one side of the scrubber system. Also, the combustion module 200 may include a housing that forms a combustion space connected to the burner module 100, and may be formed as a module for burning waste gas. In addition, the combustion module 200 may be formed integrally with the burner module 100 or may be omitted.

The water tank tank 300 is formed in a hollow box shape, and may include a coupling hole formed at one side of the upper part and a coupling hole formed at the other side of the upper part. The water tank 300 is filled with water at a certain level. A combustion module 200 is coupled to a coupling hole formed at one side of the water tank 300 and a water treatment module 400 is coupled to a coupling hole formed at the other side. Meanwhile, the water tank 300 may be formed in a variety of structures in which the burned waste gas flows.

The water tank 300 contacts the waste gas introduced from the combustion module 200 with water to collect the water-soluble gas and the particulate matter contained in the waste gas, and then discharges it to the water treatment module 400. Also, the water tank 300 collects fine particles generated by the burner module 100 and the combustion module 200 due to the decomposition reaction of the waste gas. In addition, the water tank 300 collects water sprayed from the water treatment module 400 and fine particles falling together with water. In addition, the water tank 300 collects water sprayed from the electrostatic dust collecting module 500 and fine particles falling together with water.

The water treatment module 400 collects water-soluble gas and reaction by-product particles contained in the waste gas by spraying water to the waste gas flowing upward from the water tank 300. The water treatment module 400 may also be formed in various configurations for spraying water to collect water-soluble components and fine particles of waste gas. For example, the water treatment module 400 may include a water treatment housing 410, a water supply pipe 420, and a water treatment injection nozzle 430. The water treatment module 400 may further include a water treatment support plate 440 and a trap pipe 450.

The water treatment housing 410 is formed in a hollow cylindrical shape. And the upper part and the lower part are opened. The water treatment housing 410 is formed so that the diameter of the lower portion gradually decreases, and the lower portion of the water treatment housing 410 is coupled to a coupling hole formed on the other side of the water tank 300.

The water supply pipe 420 extends from the upper part of the water treatment housing 410 to the inside of the water treatment housing 410 and receives water from the outside. The water supply pipe 420 may be formed in a plurality of branches such as Y shape according to the inner diameter of the water treatment housing 410.

The water treatment spray nozzle 430 is coupled to the water supply pipe 420 and discharges water supplied through the water supply pipe 420 in a downward direction. The water treatment spray nozzle 430 may be formed of various spray nozzles used in a scrubber system.

The water treatment support plate 440 is formed in a disk shape having a diameter corresponding to the inner diameter of the water treatment housing 410 and has a plurality of support through holes through which waste gas flows. The water treatment support plate 440 is located at a lower position inside the water treatment housing 410. The water treatment support plate 440 supports the trap pipe 450 positioned at the upper part.

The trap pipe 450 has a hollow interior and is formed in a cylindrical shape having open top and bottom. Also, the trap tube 450 has a plurality of collecting through holes (not shown) formed on the sidewall to increase the surface area. A plurality of the trap pipes 450 are vertically disposed on the upper portion of the water treatment support plate 440. The trap pipe 450 allows the waste gas rising from the water tank 300 to rise while contacting the surface. In addition, the trap pipe 450 allows the water sprayed from the water treatment spray nozzle 430 to flow downward along the surface. Thus, the trap tube 450 increases the time the water contacts the waste gas, and allows the water to contact the waste gas to remove fine foreign particles or water-soluble gas components of the waste gas. Meanwhile, the trap pipe 450 is used in a general semiconductor waste gas treatment scrubber system. And may be formed of an increased surface area filler such as a telerette.

The electric dust collecting module 500 includes a dust collecting housing 510, a discharge electrode unit 520, an upper water spray unit 530, a lower water spray nozzle 540, and a gas spray nozzle 550. The electric dust collecting module 500 generates a corona discharge between the dust collecting housing 510 and the discharge electrode unit 520 and discharges the particles contained in the waste gas flowing between the inner surface of the dust collecting housing 510 and the discharge electrode unit 520 Collect and collect. At this time, the fine particles are accumulated in an area including the inner surface of the dust collecting housing 510 and the outer surface of the discharge electrode unit 520. Particularly, the fine particles are accumulated around the outer surface of the discharge electrode unit 520. The upper water injection unit 530 and the lower water injection nozzle 540 inject water at the upper and lower parts of the discharge electrode unit 520 to collect fine particles on the outer surface of the discharge electrode unit 520. Figure 8 is a cross- Fig. . Further, the gas injection nozzle 550 removes fine particles accumulated on the upper portion of the discharge electrode unit 520.

The dust collecting housing 510 includes a dust collecting housing body 511 and an upper dust collecting housing 515. Meanwhile, the dust collecting housing 510 may be integrally formed with the dust collecting housing body 511 and the upper dust collecting housing 515. The dust collecting housing 510 is hollow and has a vertically opened tubular shape. The dust collecting housing 510 is preferably formed in a cylindrical shape having a constant horizontal distance from the central axis.

The dust collecting housing body 511 includes a water jacket pipe 512, a water inlet hole 513, and a water outlet hole 514. [ The dust collecting housing main body 511 is formed in a cylindrical shape that is opened up and down. The dust housing main body 511 accommodates therein a discharge electrode unit 520. The dust housing main body 511 is preferably electrically connected to the ground. Therefore, the dust collecting housing main body 511 acts as a dust collecting pole in the corona discharge process with the discharge electrode unit 520.

The water jacket pipe 512 is formed in a ring shape surrounding the outer surface of the dust collecting housing body 511 from the upper portion of the dust collecting housing body 511. At this time, the water jacket pipe 512 may be formed so that the upper part thereof is opened. The water jacket pipe 512 has a space through which water flows along the upper outer surface of the dust collecting housing body 511 to provide a path for water to flow. The water jacket pipe 512 may further include a dust prevention plate 518 to prevent water from flowing out from the water inflow hole 513. The slip prevention plate 518 is formed in a plate shape having a width larger than the diameter of the water inflow hole 513 and is located at an upper portion of the water inflow hole 513 inside the water jacket pipe 512.

The water inlet hole 513 is formed on the outer surface of the water jacket pipe 512 and may be formed with one or two water inlet holes 513. The water inlet hole 513 provides a path for water to flow into the water jacket pipe 512. A water supply pipe 519 for supplying water to the outside of the water inlet hole 513 may be further formed.

The water outlet hole 514 is formed to be connected to the water jacket pipe 512 at an upper portion of the dust collecting housing body 511 and is formed as a plurality of holes penetrating from the inner surface to the outer surface. The water outlet holes 514 are preferably formed at regular intervals along the horizontal direction. The water outlet hole 514 provides a path through which the water flowing through the water jacket tube 512 flows out to the inner surface of the dust collecting housing body 511. The water W1 flowing out of the water outlet hole 514 flows downward along the inner surface of the dust collecting housing body 511 to remove fine particles accumulated on the inner surface of the dust collecting housing body 511. [

The lower nozzle hole 511a is located below the dust collecting housing body 511 and the lower water spray nozzle 540 is coupled. The lower nozzle holes 511a are formed in a number corresponding to the number of the water injection nozzles 540.

The upper dust collecting housing 515 is formed to include an upper discharge electrode hole 516 and an upper water inlet hole 517. The upper dust collecting housing 515 is formed in a vertically opened cylindrical shape. The upper dust collecting housing 515 is coupled to the upper portion of the dust collecting housing body 511. At this time, the upper dust collecting housing 515 may be coupled to the upper part of the dust collecting housing body 511 or the water jacket tube 512.

The upper discharge electrode hole 516 is formed in the middle or upper portion of the upper dust collecting housing 515. A discharge electrode unit 520 is coupled and fixed to the upper discharge electrode hole 516.

The upper water inflow hole 517 is formed in the middle or lower part of the upper dust collecting housing 515. An upper water injection unit 530 is coupled to the upper water inflow hole 517.

The discharge electrode unit 520 includes a discharge electrode body 521, a discharge pin 522, a body fixing bar 523, and a power supply line 524. The discharge electrode unit 520 may further include an upper insulating cover 525 and a lower insulating cover 526. The discharge electrode unit 520 is positioned inside the dust collecting housing 510 such that the outer surface thereof is spaced apart from the inner surface of the dust collecting housing 510. The discharge electrode unit 520 generates a corona discharge by a power source supplied through a dust collecting housing 510 serving as a dust collecting electrode and a power supply line 524. The discharge electrode unit 520 may be applied with a lower voltage than the dust housing main body 511. That is, when the dust collecting housing 510 is connected to the ground, a negative voltage is applied to the discharge electrode unit 520. For example, a voltage of -20 kV may be applied to the discharge electrode unit 520. Accordingly, the discharge electrode unit 520 efficiently collects fine particles of reaction by-products such as silicon dioxide (SiO 2 ) through a negative corona discharge.

The discharge electrode main body 521 is formed in a cylindrical shape with an inner hollow and has a cylindrical shape with an upper portion closed and an open lower portion. The discharge electrode main body 521 preferably has a horizontal cross-sectional shape corresponding to the horizontal cross-sectional shape of the dust-collecting housing 510. The discharge electrode main body 521 is vertically positioned at the center of the dust collecting housing main body 511 such that the outer circumferential surface thereof is spaced at the same horizontal distance as the inner circumferential surface of the dust collecting housing 510. The discharge electrode main body 521 is spaced apart from the inner surface of the dust collecting housing 510 by a predetermined distance to form a passage through which the waste gas flows. The discharge electrode body 521 is formed in a horn shape so that the waste gas flowing from the lower portion can smoothly flow upward. In addition, the discharge electrode body 521 is hollowed to provide a space through which the main body fixing pipe and the power supply line 524 are introduced. The discharge electrode main body 521 is formed of a metal material having corrosion resistance and electrical conductivity. The discharge electrode main body 521 may be formed of stainless steel.

The discharge fin 522 is formed in a pin shape having a predetermined length. The discharge pin 522 is formed of a metal material having corrosion resistance and being electrically conductive. The discharge pin 522 may be formed of stainless steel. A plurality of the discharge fins 522 are coupled to the outer circumferential surface of the discharge electrode main body 521 and the ends thereof are coupled to the inner surface of the dust housing main body 511. The discharge fins 522 are spaced apart from each other in the vertical direction and the horizontal direction on the outer peripheral surface of the discharge electrode main body 521 at predetermined intervals. The discharge fin 522 is separated from the inner circumferential surface of the dust collecting housing 510 by a predetermined distance. The discharge pin 522 generates a corona discharge between the inner peripheral surface of the dust collecting housing 510 and the inner peripheral surface of the dust collecting housing 510. The distance between the discharge pin 522 and the inner circumferential surface of the dust collecting housing 510 may be set to an appropriate distance according to the discharge voltage required for the corona discharge.

The main body fixing bar 523 is formed by a tube or a rod. The main body fixing bar 523 is preferably formed in a hollow tube shape. The main body fixing bar 523 is formed to have the strength necessary to support the discharge electrode unit 520. The main body fixing bar 523 is preferably formed of stainless steel. In this case, the main body fixing bar 523 may be formed by coating an outer surface with an insulating material or by inserting an insulating tube for electrical insulation

The body fixing bar 523 is coupled to the discharge electrode main body 521 and the upper dust collecting housing 515 so that the discharge electrode main body 521 is positioned at the inner center of the dust collecting housing main body 511. The body fixing bar 523 may be formed such that a lower end thereof extends into the interior of the discharge electrode body 521. For example, the main body fixing bar 523 may be formed in a "? &Quot; shape having a horizontal portion and a vertical portion. The main body fixing bar 523 has one end of the horizontal part coupled to the upper dust collecting housing 515 and the other end extending to the center of the upper dust collecting housing 515 and the vertical part extending from the other end of the dust collecting housing 510 And extends in the downward direction. At this time, the lower end of the vertical portion of the body fixing bar 523 may extend into the interior of the discharge electrode body 521. The body fixing bar 523 may be formed such that one end of the horizontal part protrudes to the outside of the dust collecting housing 510. At this time, the main body fixing bar 523 is coupled to the outside through the upper discharge electrode hole 516 of the upper dust collecting housing 515. The discharge electrode main body 521 is coupled to the vertical portion and is vertically positioned at the inner center of the dust collecting housing 510.

The power supply line 524 extends from the outside of the dust collecting housing 510 to the inside of the discharge electrode main body 521 through the inside of the main body fixing bar 523 and is connected to the inside of the discharge electrode main body 521. The power supply line 524 applies a discharge voltage to the discharge electrode main body 521. The power supply line 524 applies a voltage smaller than a voltage supplied to the dust collecting housing 510, and preferably applies a negative voltage.

The upper insulating cover 525 is formed in a horn shape, and a cover through hole 525a penetrating from the vertex to the lower portion is formed. The upper insulating cover 525 is preferably formed of an electrically insulating material. The upper insulating cover 525 may be formed of a metal material and then coated with an electrically insulating material on the surface thereof. A vertical portion of the main body fixing bar 523 penetrates through the cover through hole 525a. The upper insulating cover 525 is coupled to an upper portion of the discharge electrode main body 521 and allows the fine particles accumulated on the upper portion of the discharge electrode main body 521 to be easily removed. The upper insulating cover 525 may be omitted when the upper part of the discharge electrode main body 521 is formed in a horn shape like a lower part.

The lower insulating cover 526 is formed in a hollow conical shape and is coupled to a lower portion of the discharge electrode main body 521 so that its vertex points downward. The lower insulating cover 526 seals the lower portion of the discharge electrode main body 521. The lower insulating cover 525 is preferably formed of an electrically insulating material. In addition, the lower insulating cover 525 may be formed of a metal material and then coated with an electrically insulating material on the surface thereof.

The upper water injection unit 530 includes an injection body 531, an injection guide ring 535, and an upper water supply pipe 539. The upper water injection unit 530 is located above the discharge electrode unit 520 in the upper dust housing 515 and injects the water W2 onto the upper part of the discharge electrode main body 521 of the discharge electrode unit 520. The water W2 sprayed to the upper portion of the discharge electrode main body 521 drops the fine particles accumulated in the discharge electrode main body 521 and the discharge fin 522 downward.

The spray body 531 is formed in a ring shape, and a water movement passage 532 having a ring shape is formed therein. The injection body 531 may include an injection inner ring 531a, an injection upper ring 531b, and a lower ring 531c. The spray body 531 is opened in the direction of the outer circumferential surface, and the outer circumferential surface is coupled to the inner circumferential surface of the upper dust housing 515. Accordingly, the jet main body 531 forms a water movement path together with the upper dust housing 515. Meanwhile, the spray body 531 may include a separate spray outer ring (not shown) to form a water movement path.

The spray body 531 is formed such that an opened outer circumferential surface thereof is connected to the upper water inflow hole 517. That is, the spray body 531 is coupled to the inner circumferential surface of the upper dust housing 515 at a position where the upper water inflow hole 517 is formed. The injection body 531 allows water to flow from the upper water inflow hole 517 into the water transfer passage 532.

The spray body 531 is formed to include a water spray hole 533. The water injection hole 533 is formed to penetrate inward from the water transfer passage 532. That is, the water injection hole 533 may be formed in the injection inner ring. The water injection hole 533 is formed to be connected to the upper part of the water transfer passage 532. The water injection hole 533 injects water supplied to the water transfer passage 532 in the direction of the center of the injection body 531. A plurality of the water injection holes 533 are formed at predetermined intervals along the circumferential direction of the injection inner ring. Accordingly, the water spray holes 533 can uniformly spray water along the circumferential direction of the spray body 531.

The injection guide ring 535 is formed in a ring shape and is coupled to the inner surface of the injection body 531. The ejection guide ring 535 is located inside the upper portion of the discharge electrode unit 520. The injection guide ring 535 may have a horizontal surface and a curved surface extending inward from the horizontal surface and having an end directed downward. Here, the horizontal plane is a ring-shaped surface, which means a plane that forms a plane from the outside to the inside of the jet guide ring 535, and the curved surface means an arc-shaped surface that extends inward from the horizontal plane and has a curvature in the medial lower direction . The horizontal plane of the injection guide ring 535 is formed so as to be in contact with the upper part of the inner circumferential surface of the water injection hole 533. The water sprayed from the water spray hole 533 is sprayed in a downward direction from the center of the spray body 531 while flowing along the horizontal plane and the curved surface of the spray guide ring 535. The water sprayed from the lower water spray nozzle 540 is sprayed onto the upper part of the discharge electrode main body 521. The curved surface of the injection guide ring 535 can be adjusted in shape or curvature depending on the shape and position of the discharge electrode main body 521. The upper surface of the injection guide ring 535 may be formed as an inclined surface as a whole to prevent the fine particles from accumulating on the upper surface. In addition, the upper surface of the injection guide ring 535 may be formed so that a part of the outer side thereof is a horizontal plane.

The upper water supply pipe 539 is coupled to the upper water inlet hole 517 of the upper dust collecting housing 515 and supplies water to the water transfer passage 532 from the outside. The upper water supply pipe 539 is formed in a number corresponding to the upper water inflow hole 517.

The lower water spray nozzle 540 may be formed of a nozzle capable of adjusting an angle at which water is sprayed with respect to a vertical direction. In addition, the lower water jetting nozzle 540 is formed of a general nozzle for spraying water. The lower water jetting nozzle 540 is coupled to the dust collecting housing body 511 by a separate fixing bracket 541. The lower water spray nozzle 540 is inserted into the lower nozzle hole 511a of the dust collecting housing body 511 and is coupled thereto.

A plurality of the lower water jet nozzles 540 are spaced apart from each other in the circumferential direction of the dust collecting housing body 511 at predetermined intervals. Further, the lower water jetting nozzle 540 is coupled to a position corresponding to a lower portion of the discharge electrode main body 521. The lower water jetting nozzle 540 injects water W3 into an area ranging from a lower portion of the discharge electrode main body 521 to a predetermined height in an upper direction. That is, the lower water spray nozzle 540 can spray water over the outer surface of the discharge electrode main body 521 of the discharge electrode unit 520 and the lower portion of the horn shape. The lower water spray nozzle 540 can adjust the angle at which water is sprayed according to the height of the discharge electrode main body 521. For example, the lower water jetting nozzle 540 may inject water so that the angle at which the water is sprayed on the vertical direction is an obtuse angle.

The gas injection nozzle 550 is formed in a ring shape, and a gas supply passage 551 and a gas injection passage 553 are formed therein. The gas injection nozzle 550 has an inner diameter smaller than that of the upper discharge electrode hole 516 and is coupled to the upper dust collection housing 515 such that the central axis coincides with the central axis of the upper discharge electrode hole 516. In addition, the gas injection nozzle 550 fixes the main body fixing bar 523.

The gas injection nozzle 550 injects a gas G1 such as nitrogen gas or air into a space between the inner peripheral surface of the upper discharge electrode hole 516 of the upper dust collecting housing 515 and the outer peripheral surface of the main body fixing bar 523. [ More specifically, the gas injection nozzle 550 is coupled to the periphery of the upper discharge electrode hole 516 or the upper discharge electrode hole 516 of the upper dust collecting housing 515, and is parallel to the outer surface of the horizontal portion of the main body fixing bar 523 The gas G1 is sprayed in one direction to remove fine particles accumulated on the horizontal portion of the main body fixing bar 523. [ There is a high possibility that arc discharge is generated between the main body fixing bar 523 and the dust collecting housing 510 due to fine particles when the fine particles are accumulated on the upper portion of the main body fixing bar 523. [ Accordingly, the gas injection nozzle 550 prevents an accumulation of fine particles around the main body fixing bar 523 by forming an air curtain around the main body fixing bar 523, .

The gas supply passage 551 is formed in a ring shape inside the gas injection nozzle 550 and provides a space through which gas supplied from the outside flows. A separate external gas supply pipe (not shown) is connected to the gas supply passage 561.

The gas injection passage 553 has one end connected to the gas supply passage 551 and the other end contacting the outer circumferential surface of the main body fixing bar 523 to inject gas in a direction parallel to the outer surface of the main body fixing bar 523 And is opened to the inner peripheral surface or the inner surface of the gas injection nozzle 550. The gas injection passage 553 injects the gas supplied from the gas supply passage 551 along the outer surface of the main body fixing bar 523 in a direction parallel to the outer surface of the main body fixing bar 523, Thereby removing particulate matter accumulated on the outer surface of the container.

In addition, the gas injection nozzle 550 may be formed in various structures for injecting gas. For example, the gas injection nozzle 550 may be formed by combining an outer injection nozzle ring 555 and an inner injection nozzle ring 557. Grooves or trenches may be formed on the surfaces of the outer injection nozzle ring 555 and the inner injection nozzle ring 557 facing each other to form the gas supply passage 551 and the gas injection passage 553.

The discharge module 600 is formed in a cylindrical shape that opens up and down, and discharges waste gas rising from the electric dust collecting module 500 to the outside. The exhaust module 600 may have various structures that are combined with the electrostatic dust collecting module 500 to discharge the waste gas of the electrostatic dust collecting module 500 to the outside. The exhaust module 600 may be equipped with a temperature sensor to measure the exhaust temperature of exhaust gas.

The exhaust module 600 may be formed of a lower exhaust module and an upper exhaust module. The lower discharge module is formed in a shape corresponding to the upper dust collection housing 515 of the electrostatic dust collecting module 500 and is formed such that the upper portion gradually decreases in diameter. The upper discharge module may be formed as a cylinder having a diameter corresponding to the upper diameter of the lower discharge module as a whole.

Hereinafter, the operation and effects of the electrostatic dust collecting module and the scrubber system including the electrostatic dust collecting module according to an embodiment of the present invention will be described. Here, the functions and effects of the dust collecting module constituting the scrubber system will be mainly described.

10 is a photograph showing the state of the discharge electrode before cleaning. 11 is a photograph showing the state of the discharge electrode after cleaning. 12 is a cross-sectional view showing a state in which fine particles accumulated on the upper portion of the main body fixing bar are removed by the gas injected from the gas injection nozzle.

9 is a photograph showing the state of the discharge electrode before cleaning. 10 is a photograph showing the state of the discharge electrode after cleaning. 11 is a cross-sectional view showing a state in which fine particles accumulated on the upper portion of the main body fixing bar are removed by the gas injected from the gas injection nozzle.

Power is supplied from the power supply line 524 of the discharge electrode unit 520 to the discharge electrode main body 521 and the discharge fin 522 and the discharge fin 522 ) And the dust collecting housing (510). The fine particles contained in the waste gas are charged and collected on the outer surface of the discharge electrode main body 521 and the discharge fin 522 or on the inner surface of the dust collecting housing 510.

Next, the water W2 is sprayed from the upper water injection unit 530 to the upper part of the discharge electrode main body 521 after the discharge in the discharge electrode unit 520 for a predetermined period of time to discharge the discharge electrode main body 521 and the discharge fin 522, Thereby removing the fine particles accumulated on the outer surface of the substrate. The lower water spray nozzle 540 injects water W3 upward in the lower part of the discharge electrode main body 521 to remove fine particles accumulated on the outer surfaces of the discharge electrode main body 521 and the discharge fin 522. [ The upper water injection unit 530 and the lower water injection nozzle 540 spray water at upper and lower portions to prevent excessive accumulation of fine particles on the outer surfaces of the discharge electrode body 521 and the discharge fin 522. Particularly, in a region where the water sprayed from the upper water injection unit 530 is not in contact with water, the water sprayed from the lower water spray nozzle 540 is contacted to the outer surface of the discharge electrode main body 521 and the discharge fin 522, Can be sprayed. Accordingly, the upper water injection unit 530 and the lower water injection nozzle 540 remove fine particles from the outer surfaces of the discharge electrode main body 521 and the discharge fin 522 more cleanly. 9 is a photograph showing a state in which fine particles are accumulated in the discharge electrode main body 521 and the discharge fin 522 after discharging for 120 minutes while flowing a gas containing 10,000 ppm of silane gas (SiH4). 10 is a photograph showing a state after the discharge electrode main body 521 and the discharge fin 522 are cleaned by spraying water for 30 seconds using the upper water injection unit 530 and the lower water injection nozzle 540. FIG. 9 and 10, it can be seen that the fine particles accumulated in the discharge electrode main body 521 and the discharge fin 522 are almost removed through 30 seconds of cleaning.

The upper water injection unit 530 and the lower water injection nozzle 540 prevent particles from accumulating on the surfaces of the discharge electrode main body 521 and the discharge fin 522 or the dust collecting housing 510, And between the discharge fins 522 and the dust collecting housing 510 to prevent the local insulation breakdown and the arc discharge from progressing and the dust collecting efficiency to be reduced.

Further, the dust collecting housing main body 511 supplies water to the water through the water outlet hole 514 to remove fine particles collected on the inner surface.

Also, the gas injection nozzle 550 injects gas as shown in FIG. 11 to remove fine particles accumulated in the main body fixing bar 523. The gas injection nozzle 550 prevents particulates from accumulating on the main body fixing bar 523 and prevents current from flowing between the main body fixing bar 523 and the dust collecting housing 510. Particularly, the gas injection nozzle 550 can be kept dry as compared with the use of water by removing fine particles accumulated on the surface of the main body fixing bar 523 by using the gas, and it is possible to prevent energization according to the presence of moisture.

100: burner module 200: combustion module
300: aquarium tank
400: Water treatment module
410: water treatment housing 420: water supply pipe
430: water treatment spray nozzle 440: water treatment support plate
450: trap tube
500: Electric dust collection module
510: dust collecting housing 520: discharge electrode unit
530: upper water injection unit 540: lower water injection nozzle
550: gas injection nozzle
600: Exhaust module

Claims (10)

A dust collecting housing having a hollow interior and being opened up and down;
A discharge electrode unit located inside the dust housing and through which the corona discharge progresses;
An upper water spray unit for spraying water to the upper portion of the discharge electrode unit in the dust collecting housing,
And a lower water jet nozzle for spraying water in an area including an outer surface and a lower part of the discharge electrode unit in the dust collecting housing,
Wherein the dust collecting housing includes a dust collecting housing body and an upper dust collecting housing coupled to an upper portion of the dust collecting housing body and having an upper discharge electrode hole,
The discharge electrode unit
A discharge electrode body having a hollow inside, a closed upper portion and a lower open portion, the discharge electrode main body being vertically positioned at the center of the dust housing main body,
A lower insulating cover which is formed in a hollow conical shape and which is coupled to a lower portion of the discharge electrode body so as to face the lower portion thereof and seals a lower portion of the discharge electrode body,
A plurality of discharge fins spaced apart from each other at predetermined intervals on the outer surface of the discharge electrode main body so as to face the inner surface of the dust collecting housing main body,
A main body fixing bar which is formed by a tube having an inner hollow and which is coupled to the main body of the discharge electrode and the top dust collecting housing so that an end thereof extends into the main body of the discharge electrode,
And a power supply line extending to the inside of the discharge electrode body through the inside of the body fixing bar and coupled to the inside of the discharge electrode body. The method according to claim 1,
The dust collecting housing main body
A water jacket tube formed in a ring shape surrounding an outer surface of the dust collecting housing body at an upper portion of the dust collecting housing body and having a space for water to flow therein,
A water inlet hole for providing a path for water to flow into the water jacket pipe from the outside of the water jacket pipe,
And a water outlet hole formed in the upper portion of the dust collecting housing main body and connected to the water jacket pipe and formed of a plurality of holes for discharging water to the inner surface of the dust collecting housing main body. delete The method according to claim 1,
The discharge electrode unit
Further comprising an upper insulating cover having a horn shape formed of an electrically insulating material and having a cover through hole penetrating from a vertex to a lower portion to be coupled to an upper portion of the discharge electrode body,
And the main body fixing bar penetrates through the cover through hole and is coupled to the main body of the discharge electrode. The method according to claim 1,
The upper dust collecting housing further includes an upper water inflow hole at a lower portion thereof,
The upper water injection unit
A water discharge passage formed in a ring shape and coupled to the inside of the upper dust collecting housing and formed in a ring shape and a plurality of water discharge holes penetrating from the water transfer passage in the direction of the inner center to spray water in the center direction A water injection passageway communicating with the upper water inflow hole,
The spray nozzle is formed in a ring shape and is coupled to an inner surface of the spray body. The spray nozzle has a lower surface extending inward from a horizontal surface and a curved surface having an end directed downward. Guide ring and
And a water supply pipe connected to the upper water inlet hole and supplying water from the outside to the water transfer passage. The method according to claim 1,
Further comprising a gas injection nozzle for injecting gas into the main body fixing bar at a position where the main dust collecting housing and the main body fixing bar are coupled with each other. The method according to claim 6,
The main body fixing bar is formed in a letter shape having a horizontal portion and a vertical portion. One end of the horizontal portion is coupled to the upper dust collecting housing and the other end extends to the center of the upper dust collecting housing. And extending from the other side end of the horizontal portion to a lower side of the dust collecting housing main body,
Wherein the gas injection nozzle is formed in a ring shape and is formed in a ring shape and has a gas supply passage through which gas is supplied from the outside and a gas supply passage whose one end is connected to the gas supply passage and whose other end is parallel to the outer surface of the horizontal portion of the body fixing bar And a gas injection passage formed so as to inject gas in the direction of the gas discharge passage. The method according to claim 1,
Wherein the main body fixing bar is formed of stainless steel, and an outer surface of the main body fixing bar is coated with an electrically insulating material or coupled with an insulating tube. The method according to claim 1,
Wherein a plurality of the lower water jet nozzles are spaced apart from each other at a predetermined interval in a circumferential direction of the dust collecting housing body from a lower portion of the dust collecting housing body,
And discharges water in an upper direction of the discharge electrode main body. A scrubber system comprising an electric dust collecting module according to any one of claims 1, 2 and 4 to 9.
KR1020150125580A 2015-09-04 2015-09-04 Electric Precipitation Module and Scrubber System having the Same KR101832392B1 (en)

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Publication number Priority date Publication date Assignee Title
KR20200062911A (en) * 2018-11-27 2020-06-04 한국에너지기술연구원 Electric pricipitator having wet scrubbing function

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KR102118795B1 (en) * 2018-08-27 2020-06-04 (주)엔노피아 Electrostatic precipitator

Citations (1)

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Publication number Priority date Publication date Assignee Title
KR200400060Y1 (en) * 2005-08-18 2005-11-02 한승용 Electric precipitation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200400060Y1 (en) * 2005-08-18 2005-11-02 한승용 Electric precipitation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200062911A (en) * 2018-11-27 2020-06-04 한국에너지기술연구원 Electric pricipitator having wet scrubbing function
KR102160788B1 (en) * 2018-11-27 2020-09-29 한국에너지기술연구원 Electric pricipitator having wet scrubbing function

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