KR101819779B1 - Plant for fluorine produciton - Google Patents

Abstract

The present invention relates to a fluorine gas production plant for producing F2 by electrolysis of a KF / HF composition. The plant includes skid modules for: HF storage, electrolytic cells, storage and purification of the produced F ₂ source gas, fluorine gas transport comprising a single buffer tank or a plurality of storage units, a purified waste gas An electrical sub-station with an analyzer, an electric rectifier, a converter and an emergency source, and a control room with a laboratory and a personal common room. The advantages of these skids are that they can be individually manufactured, tested, and transported to the facility to be assembled in the field. A major advantage is that, in terms of safety, high purity F ₂ is produced reliably over the course of seven days a week, 24 hours a day.

Description

Fluorine production plant {PLANT FOR FLUORINE PRODUCITON}

61 / 383,204, filed September 15, 2010, and 61/383533, filed September 16, 2010, the contents of which are hereby incorporated by reference in their entirety herein The present invention, which is incorporated by reference, relates to a fluorine production plant in the form of an aggregate skid, and a process to which the plant is applied.

During the fabrication of semiconductors, solar cells, thin film transistor (TFT) liquid crystal displays, and microelectromechanical systems (MEMS), sequential steps, often including material deposition and etching of each item, are performed in a suitable manner; Plasma is often used in these processes. During the deposition step, deposits are often formed not only on the subject item, but also on the walls and other internal parts of the chamber. It has been observed that small-scale fluorine is a very effective agonist for both etching and chamber cleaning to remove unwanted deposits. WO 2007/116033 (describing the use of fluorine and certain mixtures as etchants and chamber cleaners), WO 2009/080615 (describing the preparation of MEMS), WO 2009/092453 (Describing a method for manufacturing a solar cell), and an unpublished EP patent application 09174034.0 (concerning a manufacturing method of a TFT).

The United States patent application publication discloses fluorine production and distribution within a manufacturing facility. Providing fluoride in the field reduces the risk associated with fluoride transport from the fluorine generating plant to the site of use.

There are still problems to be solved in terms of the device used in the field concept, for example, there is a problem in that a larger amount of pure fluorine (F ₂ ) and HF is decomposed or the device is broken when leaked.

The present invention provides an improved plant suitable for in situ production of fluorine used as etching agent and chamber cleaner in the manufacture of semiconductors, solar cells, thin film transistor liquid crystal displays and micro-electro-mechanical systems.

The plant of the present invention supplies fluorine gas to a tool that applies fluorine gas as a reaction material for performing a chemical reaction therein,

- a skid-mounted module, represented by skid 1, comprising at least one storage tank for HF,

- a skid mounted module, denoted skid 2, comprising at least one electrolytic cell for producing F ₂ ,

A skid-mounted module, denoted as skid 3, comprising refining means for purifying F ₂ ,

A skid-mounted module, denoted as skid 4, comprising means for transporting fluorine gas to the place of use,

A skid-mounted module, indicated as skid 5, comprising a cooling water circuit,

- a skid mounting module, denoted as skid 6, comprising a means for treating the waste gas,

A skid-mounted module, denoted as skid 7, comprising means for analyzing F ₂ , and

- a skid mounting module, denoted as skid 8, comprising means for operating an electrolytic cell

And a skid mount module including at least one skid mount module selected from the group consisting of:

Figure 1 illustrates one embodiment of a plant according to the present invention in which skids are usefully deployed.

A preferred plant of the present invention supplies fluorine gas to a tool which applies fluorine gas as a reaction material for performing a chemical reaction therein,

- a skid-mounted module, represented by skid 1, comprising at least one storage tank for HF,

- a skid mounted module, denoted skid 2, comprising at least one electrolytic cell for producing F ₂ ,

A skid-mounted module, denoted as skid 3, comprising refining means for purifying F ₂ ,

A skid-mounted module, denoted as skid 4, comprising means for transporting fluorine gas to the place of use,

A skid-mounted module, indicated as skid 5, comprising a cooling water circuit,

- a skid mounting module, denoted as skid 6, comprising a means for treating the waste gas,

A skid-mounted module, denoted as skid 7, comprising means for analyzing F ₂ , and

- a skid mounting module, denoted as skid 8, comprising means for operating an electrolytic cell

And skid-mounted modules including:

Preferably, the factory also includes a skid module, located near the skid modules 1 to 8,

A skid module 9, which is a substation mainly for converting an intermediate voltage to a lower voltage, and /

- The skid module 10 accommodating the equipment (control room, laboratory, rest room).

The apparatus may also include means for supplying an inert gas, for example, means for supplying liquid nitrogen and gaseous nitrogen; Means for supplying compressed air and water; And auxiliary equipment and amenities. At least, skids 1, 2, 3, 4 and 7, preferably all skids, comprise the housing for safety reasons.

In the context of the present invention, the term "fluorine gas" specifically refers to a mixture of molecular fluorine (F ₂ ) and a mixture thereof, particularly an inert gas. Preferably the inert gas is, for example, selected from argon, nitrogen, oxygen, and N ₂ O. Preferred fluorine gas or F2 is composed of, or essentially consists of the F _2.

Hereinafter, a preferred plant as illustrated in Fig. 1 will be described in detail.

Figure 1 illustrates a plant P according to the invention. The size of the factory is 39m x 23m. 1, reference numeral 1 denotes skid 1 including HF storage and vaporization means. Reference numeral 2 is a skid 2 indicated by a dotted line, skid 2 includes an electrolytic cell, and is located below the modules 5 and 7 of the factory underground. Reference numeral 3 in the drawing denotes a skid 3 including purification means for purifying the produced F ₂ . Reference numeral 4 in Fig. 1 denotes a skid 4 including a storage means for fluorine gas. Skid 4 may also comprise, according to one embodiment, a single cell FT-IR for final analysis of purified F ₂ immediately available or ultimately stored. Reference numeral 5 in Fig. 1 denotes a skid 5 accommodating cooling water means. Skid 5 is located on skid 2. Reference numeral 6A in Fig. 1 denotes a skid 6A including an emergency-relative application scrubber (ERS), and reference numeral 6B denotes a skid 6B having an F ₂ scrubber and a H ₂ scrubber. 1, reference numeral 7 denotes skid 7 (which may include, for example, an FT-IR and / or UV spectrometer) including optional means for F2 analysis. Reference numeral 8 in Fig. 1 denotes a rectifier cabinet in the skid 8. Reference numerals 9A and 9B refer to intermediate voltage electrical sub-skid 9A and low voltage electrical sub-skid 9B. Reference numeral 10A denotes a skid 10A including a laboratory and a control room, and reference numeral 10B denotes a skid 10B having facilities such as a rest room and a clothes changing room. Reference numerals 11a and 11b denote escalators and platforms used to reach the skids above, in particular skid 5 and skid 7, to arrive on foot. Reference numeral 12 denotes a forklift in operation. Reference numeral 13 denotes a storage place for KOH solution and other necessary chemicals, and reference numeral 14 denotes an emergency shower. If desired, the plant may be enclosed in a wall as indicated by the black line in FIG. The advantage of a walled plant is that it reduces the risk of these workers by preventing workers who do not appear to be operating an F ₂ production plant from entering the factory. In this case, the fluorine gas plant can be built on the site of the semiconductor manufacturing plant consuming the fluorine gas, and the transportation of the fluorine gas is carried out over the fence.

The plant has many advantages, in which parts are assembled in multiple skids. For example, a skid can be pre-assembled at a factory and tested; As such, skids are a kind of "off-shelf" product and need to be mounted only in the field. This saves time. Also maintain specific skids; repair; Or it is much easier to separate them for the purpose of replacing them with skids that have the same function but have improved performance, or parts with lower or higher power. Safety is also improved; For example, as described above, skid 2 includes at least one electrolytic cell; Preferably, all the electrolytic cells are charged with electrolytes in advance, and then transported to the site to be assembled in the skid 2. Therefore, the filling operation can be carried out while taking each safety into consideration, and it should not be performed in a local area where such safety precautions can not be taken. The capacity of the plant can be increased by adding modules. Preferably, the skids have a size of the marine container to facilitate module transport. It has a great advantage of producing high purity F ₂ 24 hours a day, 7 days a week, reliably.

The skid will now be described in detail.

For example, as a protection against earthquakes, it is usually desirable to seal cells and connect them to the structure to prevent them from moving. The factory also preferably includes means for detecting the earthquake and transmitting the signal to the control room, wherein the control room receiving the signal automatically suspends operation of the plant, or causes the associated staff to passively operate the plant Lt; / RTI > Preferably, at least one seismometer capable of detecting the vibration acceleration of the plant and transmitting each signal to ring and / or automatically silence the plant when a certain level (e.g., 0.5G) is reached, For example, a rigid system (accelerometer) is provided in the factory.

All the pipes connecting the batteries and connected to the batteries should be insulated, for example, by using spacers between the flanges. The floor must also be insulated.

Preferably, all process skids (skid 1 to skid 8) are accommodated in a confined space.

Skid 1: The HF (Hydrogen Fluoride) storage skid module (skid 1) includes one or more HF storage tanks that serve to store HF and deliver it to the electrolytic cell. Generally, the storage tank for HF can be optionally mounted on a wheel, or is a hollow body that can be transported, for example, by a truck. Preferably, the skid includes multiple storage tanks, and more preferably includes 2, 3, 4, 5, or 6 storage tanks. Preferably, the HF is stored in liquid form in the tank. Skid 1 may be connected to a tank containing pressurized N ₂ . After pressurizing the liquid HF with N ₂ , it transfers the HF to the vaporizer to vaporize. The resultant HF-containing gas phase is transferred to an electrolytic cell or electrolytic cells. If desired, a vaporizer can be installed in each electrolytic cell.

To produce HF in the vaporized state, the vaporizer preferably includes a heat source, such as a heat exchanger utilizing heat from the hot portion or hot coolant. More preferably, the HF storage container can be disconnected from the HF supply line by a double isolation valve having a closed isolation space. In this case, it is appropriate that the skid 1 further comprises at least one interspace vent valve in relation to the at least one closed isolation space. Generally, the interspace discharge valve can be operated to remove hydrogen fluoride selectively present from the enclosed isolation space. The removal operation can be performed, for example, by applying vacuum pressure. In other embodiments, the removal operation may be performed, for example, by flushing the enclosed isolation space with an inert gas, such as anhydrous air, or preferably nitrogen, and / or a pressurized purging gas.

According to one aspect, the removal operation is performed continuously.

Preferably, the removal operation is performed discontinuously, particularly when the HF storage container is connected to / not connected to the supply line. The gas recovered from the closed isolation space is appropriately discharged to the scrubber in the HF decomposition unit, for example, the skid 6.

In factories in accordance with the invention, factory parts adapted to be in contact with the gas, for example hollows, valves, and gas filling and / or draining lines, are made of a material resistant to molecular fluorine It is appropriate to be coated. Examples of such materials include monel metal, stainless steel, copper, and preferably nickel.

In a preferred embodiment of the skid 1, the hydrogen fluoride storage container is accommodated in the enclosed space having at least one opening and closing door, so that the container for hydrogen fluoride storage can be put into or taken out of the enclosed space. According to one embodiment of this aspect, the enclosure contains a container for hydrogen fluoride storage and a connection to the hydrogen fluoride supply line. According to another embodiment, the closed space is further provided with a vaporizer for vaporizing the liquid HF. According to this preferred embodiment and its implementations, it is appropriate that an HF sensor capable of triggering the connection of the closed space to the scrubber described below is included in the enclosed space.

Skid 1 has at least one liquid line and at least one gas line. In this case, the liquid line is connected to the hydrogen fluoride feed line, if appropriate via a flange connection, for example. The gas line may also be connected to an inert gas (e.g., anhydrous air or nitrogen) supply line that allows the hydrogen fluoride storage container to be pressurized.

In skid 1, each hydrogen fluoride storage container generally has a capacity of 10 to 5000 liters, often 500 to 4000 liters, preferably 500 to 3000 liters. A specific example of a container for hydrogen fluoride storage is a tank approved by UN T22 or preferably RID / ADR-IMDG- of UN T20 type. These tanks are on the market.

Each HF storage container of skid 1 can be suitably connected to a hydrogen fluoride feed line via a manifold.

Preferably, each HF storage container of skid 1 is individually shieldable from a hydrogen fluoride feed line.

The HF storage container of skid 1 can generally be disconnected from the hydrogen fluoride feed line by a remote control device, preferably a remote control valve. More preferably, each container is equipped with a remote control device, preferably a remote control valve, which allows the storage container to be shut off from the hydrogen fluoride feed line.

If a remote control valve is present, it is appropriate to additionally provide a manual valve. The remote control valve enables, for example, the HF storage container to be operated in the remote control room.

In a preferred embodiment, the HF storage container comprises an automatic HF level sensor. In particular, the HF storage container can be installed on the balance. In this case, preferably, the process control system, in particular the automatic process control system, closes the remote control valve of the first hollow HF container and opens the remote control valve of another second HF-containing hydrogen fluoride storage container Can be operated. This embodiment is particularly effective in avoiding manual handling of HF valves and ensuring continuous HF supply.

According to one preferred embodiment, these valves can be operated to automatically close in the event of abnormal operating conditions, such as process-interruption in process equipment connected to the HF supply line, for example.

According to another preferred embodiment, these valves can be actuated to automatically close if HF leakage occurs in the skid 1. Such HF leakage may be due to, for example, leaking of the optional flange-connection portion within the HF storage container. In this case, it is possible to close the valves by remote control. This eliminates the need to approach the hydrogen fluoride feed unit, especially in this case.

The skids also include valves that shut off the supply of HF and nitrogen. Preferably, skid 1 comprises three to ten HF containers, particularly preferably four, five, six, seven or eight containers. Four HF containers are suitable for production rates equivalent to F ₂ of 150 tonnes per year. Smaller sized tanks, especially if they can be closed individually via valves, are good for improving plant safety. These tanks should be made of at least HF resistant materials or lined. The wall should be thick enough; Preferably a thickness equivalent to a 10 mm IMDG code (International Maritime Dangerous Goods Regulations).

In a particularly preferred embodiment, skid 1 comprises at least one HF emergency container, preferably permanently. This HF emergency container is preferably a hollow HF storage container as described herein, which is preferably connected to the HF supply line. In general, the HF emergency container may be operated to receive HF from the HF storage container in a leaking state. The HF emergency container is properly maintained under inert gas pressure or vacuum.

It is preferable that the tank is movable so that it can be transported by truck and / or handled by a forklift truck.

Skid 1 includes a ventilation system and preferably removes HF and F ₂ (as described below) by continuously supplying atmospheric air to the scrubber, particularly the ERS scrubber, permanently.

Skid 2: A skid (skid 2) comprising an electrolytic cell or two or more cells will now be described in detail. The skid 2 includes at least one electrolytic cell. Preferably, the skid 2 comprises two or more electrolytic cells. More preferably, skid 2 comprises six or more electrolytic cells. Skid 2 with 8 electrolytic cells is very suitable. It is preferable that the skid is configured so that, when the demand for fluorine gas becomes high, an additional electrolytic cell can be added, if desired. The battery includes a jacket, through which the cooling water can be circulated. If desired, the skids 2 may be provided in the form of individual sub-skids 2A, 2B, and the like. In these sub-skids, a certain number of electrolytic cells are assemble. The individual sub-skids 2A and 2B (and other sub-skids) are connected together to form a single cell room. Often, the battery compartment can accommodate four, six, or more (e.g., eight or even more) batteries. The advantage of providing multiple electrolytic cells is that they can be compensated for by increasing the output of other cells even if one or even more cells are shut down for maintenance or repair purposes. Attaching several sub-skids has the advantage that the dimension scale can be kept within the maximum dimension allowed for road transport. The electrolytic cells are connected to the collector of F ₂ and H ₂ produced. It should be noted that each cell may include more than one anode. Typically, each cell comprises 20 to 30 anodes. According to another embodiment, the number of anodes in each electrolytic cell may be greater than 30; Each cell may have, for example, more than 60, up to 70 or even up to 80 anodes. Each anode is connected to a rectifier via a cable. Each battery cathode is connected to a rectifier via one copper or aluminum bus bar. One rectifier can supply current to one or more batteries. It is preferable to apply one rectifier per one anode. Its advantages are that it can fine-tune the intensity of each individual anode according to a particular anode characteristic, and immediately detect abnormal conditions (e.g., overvoltage, short-circuit, or broken anode) at a particular anode to automatically shut down the failed anode All the anode and the battery can continue to generate F ₂ . Thus, preferably, skid 2 comprises at least four electrolytic cells with a plurality of anodes, wherein each of the plurality of rectifiers of skid 8 is assigned to a single anode, or each of the plurality of dual rectifiers of skid 8 comprises two Lt; / RTI >

The skid 2 includes one cooling water circuit (supplied by the cooling water circuits of the skid 5 or connected to the cooling water circuits) for supplying cooling water to the jacket of the battery.

Skid 2 also includes settling boxes; Preferably, the sedimentation for F ₂ and the sedimentation for H ₂ are connected to each cell. These sedimentation serves to prevent the migration of electrolyte solid particles (dust) by reducing the gas velocity of F ₂ and H ₂ produced in the cell. Preferably, the settling comprises a vibrator and a heating section for melting the separated solid electrolyte particles for easy removal.

The collector for collecting the generated F ₂ is connected to the skid 3 via one pipe, and the collector for collecting the generated H ₂ is connected to the scrubber for H ₂ of the skid 6B through a single pipe being). In a preferred embodiment, skid 2 also comprises a ventilation system for treating accidentally vented F ₂ and / or H ₂ .

The atmospheric air in the skid 2 is supplied to the scrubber, especially to the ERS scrubber (described below) for safety reasons.

Skid 3 includes means for purifying the resulting F ₂ . Skid 3 includes a cooler that precools F ₂ . Skid 3 also includes an HF washer, in which the pre-cooled F ₂ is contacted with HF kept at a very low temperature. The HF washer has a cooling jacket through which the coolant is circulated. The skid 3 further comprises a buffer tank, a compressor (e.g. a diaphragm compressor), a HF condenser operating at low temperatures, and preferably one or more HF absorbers containing NaF as an absorber for HF. Preferably, two or more absorbers are housed in the skid 3. If desired, by preparing the absorber in a relaxed manner, one set is in the absorption mode and the other set can be regenerated. The absorption tower includes a heating section. If desired, an additional set of absorbers may be provided at the skid 3, or at a location for reloading the sorbent. The HF condenser is connected to the electrolysis skid 2 via several pipes. Preferably, one or more sets of absorbers are mounted in wheeled carts and are (re-) movable from the skids.

The HF condenser can be cooled to a temperature at which HF condenses to form a liquid or even a solid. It is preferable that HF is condensed to form liquid HF. It is very appropriate to cool the trap to a temperature of -60 캜 to -80 캜, preferably to about -70 캜. As the cooling medium, a cooling liquid well known to be usable at the desired low temperature is suitable. It is preferable to apply the N ₂ gas obtained by mixing the liquid N ₂ and the gas N ₂ in an appropriate amount. This cooling method is very reliable. Thus, the skid 3 includes lines for conveying and withdrawing the cooling medium.

The atmospheric air in the skid 3 is supplied to the scrubber, especially to the ERS scrubber (described below) for safety reasons.

Skid 4 stores the fluorine gas and carries the fluorine gas to the place of use. Skid 4 includes filters to remove any remaining entrained solids. For example, F ₂ produced in an electrolytic cell may include a charged solid electrolyte derived from a cell, usually an adduct of KF and HF. The filter is preferably composed of a material resistant to HF and fluorine; Stainless steel, copper, monel metal and especially nickel are particularly suitable. Filters made of sintered particles of the above metal having a pore diameter in the nanometer range, for example a pore diameter of 5 nm or less, more preferably 3 nm or less, are very suitable to provide semiconductor grade F ₂ .

If desired, skid 4 includes a pre-filter having a pore diameter of 1 탆 or less to remove coarser particles from F ₂ .

Skid 4 may also include a single cell FT-IR. In this single-cell FT-IR, it is possible to analyze the F ₂ in a purified state that can be stored immediately or transported to the place of use. In this case, skid 7 does not necessarily have to have a UV spectrometer and / or multi-cell FT-IR.

The skid 4 preferably comprises means for storing the fluorine gas. The skid 4 may comprise, for example, a buffer tank for fluorine gas.

In addition to the buffer tank, but preferably, instead of the buffer tank, the skid 4 may comprise a permanent or temporary fluorine gas storage unit in the form of a plurality of hollow bodies for storing F ₂ . This storage unit is connectable to other skids.

The term "permanent fluorine gas storage unit" is understood to refer specifically to a fluorine gas storage unit incorporated in a fluorine plant. For example, such a fluorine gas storage unit may be transportable or, preferably, may be a stationary unit present in the skid 4 throughout the lifetime of the fluorine plant. Preferably, the permanent fluorine gas storage unit contains more than 90 wt.%, More preferably more than 95 wt.%, Most preferably about 100 wt.% Fluorine gas based on the total weight of the fluorine gas stored in the plant .

Also, skid 4 can deliver fluorine gas from skid 2 to the location of use. Possible components of skid 4 include, but are not limited to, feed lines, compressors, mixers, and buffer tanks.

It should be understood that the term "connectable" specifically means that the permanent fluorine gas storage unit is provided so that it can be connected to one part of the skid 4. Preferably, the permanent fluorine gas storage unit is provided so as to be connected to the fluorine gas supply line. According to a preferred embodiment, the fluorine gas storage unit is connected to one part of the skid 4, in particular to a fluorine gas supply line throughout which the fluorine gas plant is activated. According to another preferred embodiment, the fluorine gas storage unit is directly connected to one part of the skid 4.

Equipment suitable for connecting the fluorine gas storage units connected to one part of the skid 4 may include one or more lines connected to each of the hollow bodies of the fluorine gas storage unit, There is a manifold with a shut-off valve, which is also connected to one part of the skid 4.

The skid 4 preferably comprises 4 to 25, more preferably 5 to 8 hollow bodies. These hollow bodies preferably have substantially the same shape and dimensions. A cylindrical hollow body (tube) is preferred. Each hollow body of the fluorine gas storage unit preferably has one shut-off valve.

The hollow bodies of the fluorine gas storage unit can be appropriately fixed together using an appropriate frame. Specific geometric shapes for such a frame include triangular, rectangular, and rectangular geometric shapes.

In the fluorine gas plant according to the present invention, the fluorine gas storage means can store or store the fluorine gas at a pressure of generally 25 psig (about 1.72 barg). Often the pressure is at least 35 psig (2.4 barg), preferably at least 40 psig (2.8 barg). In factories in accordance with the present invention, the fluorine gas storage means may or may not store fluorine gas at pressures generally below 400 psi (about 27.6 barg), preferably below about 75 psig (about 5.2 barg). Often this pressure is less than 65 psig (about 4.5 barg), preferably less than 60 psig (about 4.1 barg). It can be understood that the hollow bodies of the fluorine gas storage unit can generally store or store the fluorine gas at the above-mentioned pressure. It is particularly preferred that these hollow bodies store the fluorine element at the aforementioned pressure.

In the fluorine gas plant according to the present invention, the ratio of the molecular F ₂ stored in the fluorine storage means to the daily molecular F ₂ production capacity of the fluorine gas plant is generally from 0.1 to 1, preferably from 0.1 to 0.25 .

Preferably, each hollow body can be individually blocked in the factory; This improves safety. The fluoride discharged from the skid 4 is preferably transported to the place of use through the double wall pipe. Transporting fluorine gas into an inner tube; The outer double-wall envelope contains nitrogen. The pipe has a pressure sensor for analyzing the nitrogen pressure in the outer double wall lid. Preferably, the walls of the pipe are thicker than the pipes commonly used for gas transportation, i.e. preferably more than 1 mm thick, preferably more than 4 mm thick. It is particularly preferred that the wall thickness is at least 5 mm; Pipes classified as "schedule 80" are very suitable. This serves to improve safety. Welded pipes with radiographic inspection are very suitable.

The storage container or storage containers may be mounted on a wheel, or may be transported to a vehicle.

The atmospheric air in the skid 4 is supplied to the scrubber, especially to the ERS scrubber described below (for safety reasons).

In the fluorine gas plant according to the present invention, the place of use can be connected to an additional manufacturing plant, for example a chemical plant, or a factory using fluorine gas, especially for surface treatment. Uses are often connected to semiconductor manufacturing plants, preferably solar cells or flat panel display manufacturing plants.

In a preferred embodiment of the fluorine gas plant according to the present invention, the skid 4 comprising the fluorine gas storage unit is a closed space. The enclosed space generally includes a fluorine sensor capable of causing the connection of the enclosed space to the skid 6. Suitably, the enclosed space is connected to the skid 6 via a suction line, wherein the suction line is connected to an operable fan to move the gas from the confined space of the skid 4 to the skid 6.

According to another embodiment, the fluorine gas plant according to the present invention further comprises a mixer, preferably a stationary mixer, which is preferably capable of receiving fluorine from the skid 4, An inert gas such as argon and / or nitrogen may be delivered.

According to an optional embodiment, the pressure control loop regulates, and generally reduces, the pressure of the fluorine gas supplied to the application to a desired value.

Skid 5 is provided to cool or heat parts of the plant using cooling water. Skid 5 is preferably located near, or more preferably above, the electrolytic skid 2 or sub-skids 2A and 2B or all additional sub-skids 2X. Skid 5 includes one or more circuits that serve to heat the electrolytic cell to melt the electrolyte salt when the reaction starts and to cool the cell while the reaction is being performed. The circuit is charged with cooling water, which may be tap water or distilled water. The circuit includes a buffer tank, preferably a redundant pump, and a dry cooler with fans of various speed drives. During operation, the cooling water is preferably maintained at 75 to 95 DEG C to prevent the electrolyte in the cell from solidifying.

Other circuits included in skid 5 serve to cool other heat exchangers of the device. The circuit comprises a liquid for cooling, preferably a mixture of water and ethylene glycol, more preferably 40% by weight of water containing ethylene glycol. The circuit also includes a buffer, preferably a pump, which is provided redundantly, and a dry cooler. The cooling circuit includes a detector for measuring the temperature of the cooling water, a means for heating the cooling water (for example, an electric heating unit), and a heat exchanger for cooling the circulating liquid. Optionally, the plant includes a steam generator for providing steam or hot wash water. The steam generator may be a mobile steam generator. The hot steam can be used, for example, to provide hot water, where the electrolytic salt can dissolve, if desired. Thus, the skid 5 includes two or more cooling water circuits.

Skid 6 contains one or more scrubbers for each of F ₂ and H ₂ . Preferably, a scrubber pump is provided as an extra. The skids of the factory (especially skids 1, 2, 3, 4 and 7) include a ventilation system for ventilating the skid enclosure's atmospheric air permanently through the scrubbers in the skid 6.

Preferably, skid 6 includes an F ₂ scrubber for safety reasons or for all F ₂ decomposition or HF vent required for the maintenance process. The F ₂ and HF is derived from the ventilation air from the skid will be processed by the application for emergency Scrubs (ERS). The scrubber is preferably a jet scrubber and provides a suction effect. These scrubbers may be provided on a sub-skid, for example, with a sub-skid 6A comprising one or more emergency-force application scrubbers (ERS), for scrubbing the generated H ₂ to remove HF entrained therein performing sub-steer 6B, and may be mounted on a scrubber for removing the waste gas within the HF and / or F ₂ derived when the ventilation air from the atmosphere of the skid, as will be described later.

The capacity of a regular F ₂ scrubber (optionally mounted on sub-skid 6B) at least matches the expected amount of F ₂ removed during normal operation. F ₂ is removed by contact with the abatement solution. Such a scrubber preferably includes one jet scrubber and one packed tower to provide a large contact area between the abatement solution and F ₂ . Preferably, the gas exiting the normal F ₂ scrubber passes through the backup scrubber of the ERS scrubber.

The ERS scrubber serves as a back up of the regular F ₂ scrubber used to remove F ₂ and HF from the vented air, and serves as an emergency treatment for vented air containing HF and / or F ₂ after leakage. Preferably, the capacity of the ERS scrubber (optionally mounted in sub-skid 6A) is such that, in the event of an emergency, for example, in the very unlikely event that a pipe is broken, in one of the fluorinated tubes or in an HF storage tank Which is at least equal to the amount of fluorine and HF to be removed. It may be desirable to select the capacity of the ERS scrubber for the worst case scenario; For example, if there is an HF tank with a capacity of 2 m ³ and an F ₂ storage tube with a capacity of 8 kg F ₂ , the ERS should be capable of reducing the amount of HF and F _2, respectively, and the plant-holding capacity. Preferably, the ERS scrubber includes two units for scrubbing to achieve high destruction and removal efficiency; An extra pump is provided by normal and emergency power supply. Preferably, the ERS scrubber comprises a single jet scrubber, and a gas to be treated and an abatement solution, To achieve good contact therebetween. The other unit serving as an emergency treatment may include one packed column, but preferably two in series of jet scrubbers. F ₂ removal can be performed using an agent known to remove F ₂ . Preferably, alkali metal thiosulfates (e.g., sodium thiosulfate or thiosulfate, potassium), a case of selectively using KOH solution or NaOH containing as a reducing solution, and the presence, as a disintegrating on F ₂ scrubber (s) and the top Lt; / RTI > Consider using a cooler to cool the KOH solution. Of course, this is an advantage of the concept that one emergency scrubber plays a role in processing HF and F ₂ .

The scrubber of the skid 6, which serves to reduce HF in the H ₂ gas stream, may be mounted to the sub-skid 6B. Preferably, sub-skid 6B includes a jet scrubber operated with HF aqueous solution to lower the content of HF in H ₂ . The concentration of HF may range from 1 to 10% by weight. The scrubber further includes a packed tower, and fresh water is provided at the top of the packed tower to lower the HF content. Skid 6B also includes a line that allows H ₂ to be diluted by the nitrogen used as the cooling medium in skid 3.

The reliability of each of the scrubbers 6 or the scrubbers in the skids 6A and 6B is very important. Therefore, the necessary components such as a fan or a pump for circulating the abatement solution through the scrubber can be provided extra. Sometimes, a new reducing agent, such as a KOH solution, and / or a thiosulphate or solution thereof (e.g., provided by a truck) is added to the circulating abatement solution.

Preferably, skid 6 also includes one or more retention pits for the liquid in case of accidental leakage.

Skid 7 relates to a device used to analyze the generated F ₂ . Preferably, the skid 7 is installed near the skids 2A and 2B; Very preferably on top of the skids 2A and 2B. Skid 7 is, for example, an analyzer shelter. The atmospheric environment around the skid 7 is preferably supplied to the ERS. The analyzer comprises suitable means of analysis for determining the content of the major impurities of the produced F ₂ .

In one embodiment, a UV spectrometer (analyzing the UV spectrum) analyzer and a multi-inlet, multi-cell FT-IR spectrometer (Fourier-transform infrared spectrometer) analyzer are very suitable. Preferably, both the raw F ₂ obtained from the cell and the purified F ₂ can be sent to a single-cell FT-IR or multi-cell FT-IR. In multi-cell FT-IR, one channel is analyzed at a given time. _{HF, CF 4, C 2 F} 6 And the amount of COF ₂ can be measured, for example, by FT-IR, while the content of F ₂ can be analyzed by UV. It has been found that UV spectroscopy can be used as a tool to directly measure fluorine, and this UV spectroscopy shows a drastically reduced fluorine concentration in the event of an anode burn phenomenon, and a tremendous increase in CF ₄ is observed simultaneously in the FT-IR do. Therefore, the image development can be easily detected since the concentration of F ₂ is abruptly reduced during the image development in which impurities (mainly CF ₄ and C ₂ F ₆ ) are formed. As a result of this image development (the resulting F ₂ contains more CF ₄ , C ₂ F ₆ , COF ₂ And HF) is a detection system, and in particular, in the case of the present invention, the content of fluorine was drastically reduced as well as the content of impurities was changed by monitoring with UV spectroscopy. During the measurement using UV spectroscopy, the entire UV spectrum can be used. UV spectroscopy is preferably used at 200 nm to 400 nm, more preferably 250 nm to 330 nm, most preferably 270 nm to 290 nm, and even more preferably about 280 nm at a specific wavelength, not the entire spectrum, In fact, because F ₂ absorbs the maximum amount of UV. FT-IR and UV measurements are also used to adjust the purity of the purified F ₂ . Thus, the above-described analysis detects the anode image development by measuring the raw material F ₂ by UV and measuring CF ₄ by FT-IR, and records and controls the purity of the purified F ₂ .

The analysis then continues to sample the raw material F ₂ and purified F ₂ of all cells. Current FT-IR can accommodate up to 9 samples. Thus, the purified F ₂ and raw material F ₂ of up to eight electrolytic cells can be analyzed with one multi-cell FT-IR of the current generator.

According to another embodiment, the analysis of the fluorine produced is carried out using only single-cell FT-IR; No UV spectrometer is applied. Single-cell FT-IR is used to analyze purified F ₂ (final analysis).

Skid 8 provides rectifiers, BPCS (Basic Process Control System), ESD (Emergency Shutdown System), F & G (fire and gas system) panels to record fire alarms and gas alarms, small motor starters, And other means of controlling the electrical means of the plant. The skid 8 is installed near the skids 2A and 2B, preferably above the skids. As mentioned above, each electrolytic cell usually has at least one anode, but often has a plurality (e.g., 26) of the anode. The term "plurality of anodes" may refer to any number greater than or equal to two. The number of the anode is limited only by realistic considerations, for example, a battery or a battery unit (consisting of several batteries) must not be too large. Often, the number of the anode is 80 or less, preferably 70 or less. One rectifier can provide current to one, two, or more anodes. Preferably, one rectifier is supplied to each anode. A rectifier capable of individually supplying current to multiple anodes is commercially available. For example, if there are 26 anodes in a cell, it is desirable to provide 26 rectifiers, or 13 dual rectifiers that individually supply current to two anodes. The rectifiers are preferably assembled in a rectifier cabinet installed in an enclosure provided with an air-conditioner.

It is desirable to apply a slight overpressure to the skid 8 to protect it from gas entry. All cable and cathode bus bars shall be tightly sealed.

To protect against earthquakes, it is desirable to bolt the rectifier cabinet onto a fixed frame.

Skid 8 includes walls and roofs. Also it skids 8 comprises a preferably fire detection system, in particular VESDA (high sensitivity smoke detection apparatus), and HFC-227ea or Inergen ^®, an inert gas fire-extinguishing system that operates using a mixture of (N, aralkyl Ron and carbon dioxide).

The skid 9 is preferably an assembled room with a concrete wall, made of metal shield material, or similar to a container. The skid 9 is connected to the current, and includes means for converting electricity from an intermediate voltage to a lower voltage. Preferably, skid 9 includes sub-skids 9A and 9B that are "substations ". Preferably, skid 9A includes MV (intermediate voltage) cells for input and output currents and bypass current, and voltage devices for converting intermediate to low voltage. Skid 9A may be configured for a local network; For example, select a voltage to match the local voltage, which may be 380 V or 400 V (50 Hz) or 440 V (60 Hz), for example. Preferably, the skid 9 also also includes a fire detection system, in particular VESDA (high sensitivity smoke detection apparatus), and HFC-227ea or Inergen ^®, an inert gas fire-extinguishing system that operates using a mixture of (N, aralkyl Ron and carbon dioxide).

Preferably, skid 9B is also an assembled concrete room with walls and roof. These substations accommodate low voltage switchgear (LVCS) and one diesel generator. The skid 9B is interconnected by cables with skids that require a low voltage power supply, e.g., via cable trenches. Preferably the skid and 9B also includes a fire detection system, in particular VESDA (high sensitivity smoke detection apparatus), and HFC-227ea or Inergen ^®, an inert gas fire-extinguishing system that operates using a mixture of (nitrogen, argon and carbon dioxide) as well.

Preferably, skid 9B also includes a battery charger station for a forklift.

The skid 9B must be connected to the process skids and, in particular, to the rectifiers of the skid 8.

The skid 10 includes a personal facility, for example, a control room, a laboratory, and a common room. Preferably, the skid 10 is divided into a sub-skid 10A and a sub-skid 10B. The sub-skid 10A includes a control room and a laboratory. The laboratory, which may be small in size, is well ventilated (e.g., venting up to 500 m ³ / h and even higher), preferably made of an acid resistant material and available for titration for analysis; Safety cabinets for reactants and samples; washbasin; And a chemical sink capable of collecting chemical waste, preferably in a drum made of an acid resistant material. Preferably the laboratory has a fresh air inlet and a gas detector installed in a closing mechanism that closes the air inlet in the event of a gas alarm being generated. Preferably, sub-skid 10A is maintained under slight overpressure conditions to prevent gas ingress. The skid 10A preferably includes an air conditioning function.

Preferably, the control board of the control room is connected to the remote control board, which can be located at another facility. This allows multiple fluorine gas production plants to be operated remotely from one control room.

The sub-skid 10B includes a rest room. The sub-skid 10B includes facilities useful in a personal control room. The sub-skid 10B preferably includes a locker, a room for changing clothes, a toilet, a shower, and a cabinet for chemical gown (gloves, cape, etc.). It is preferred that the factory safety shower be located near the outside of the sub-system 10B, including the eye-shower system, since it must be supplied with hot tap water. The skid 10 preferably includes a ventilation portion and a heating portion.

Additional equipment may be provided at the factory to help start the plant.

Compressors are needed to provide pressurized fluorine gas. The compressor must exhibit resistance to fluorine gas. Compressors used for the fluorine gas handled in the nuclear industry are very suitable. These compressors are preferably diaphragm type (diaphragm type) compressors. These compressors are on the market. The diaphragm is made of a material resistant to F ₂ , especially monel metal, stainless steel, copper or nickel. The membrane is a three-layer membrane. When one membrane is broken, the breakage phenomenon can be detected by pressure measurement, so that no F ₂ is discharged from the compressor membrane to the outside region.

The plant also requires equipment and valves for operation.

For example, if a mixer is present to provide a mixture of F ₂ with an inert gas or other gas, a gas mixture (e.g., a mixture of inert gas (s) and F ₂ ) The process steps include mass flow meters for gases or gases mixed with F ₂ and F ₂ , control valves and interlock devices installed with dedicated programmable control loops.

As described above, the plant has means for analyzing certain parameters for operation (e.g., flow control of fluorine gas or inert gas). For this purpose, it is preferable to use a flow controller. Using such a flow controller, for example, it is possible to control the amount of fluorine gas passing through the line that transfers fluorine gas to the FT-IR and UV analyzer. The mass flowmeter should be a "low ΔP type" controller that only causes a low pressure drop. In addition to these flow meters, tubes, pipes and accessories that are suitable for transporting fluorine gas and used to transport fluorine gas to analyzers are also on the market. The valve should be a bellows seal high tension valve. The PLC (programmable logic controller) controls the movement of the FT-IR mirrors, collects fault alarm signals, and sends the results to the BPRS (Basic Process Control System). In order to analyze pure F ₂ , it is preferable to apply a window made of AgCl, and an Al ₂ O ₃ window can be applied to analyze a raw material F ₂ (for example, a raw material F ₂ from a sampling line of an electrolytic cell).

From the above discussion it becomes clear that several alternatives can be applied in connection with the analysis of F ₂ .

According to a first alternative, a single-cell FT-IR is placed on skid 4. Single-cell FT-IR is responsible for the final analysis of F ₂ .

According to a second alternative, a multi-cell FT-IR is placed on skid 4, and optionally a UV analyzer is placed on skid 7.

According to a third alternative, a single-cell FT-IR is placed on skid 4, a multi-cell FT-IR and optionally a UV analyzer are placed on skid 7. [

The first alternative is the least costly solution. The second alternative is more costly than the first alternative, but permits a faster response when F ₂ production in one or more cells is disturbed. The second alternative also makes it possible to distinguish between irregularly operating cells. The third alternative is the most costly alternative, but at the same time allows for quick response, distinguishes the failing battery, and confirms the purity of the final F ₂ .

Which alternatives you choose depends on your expectations or requirements, your personal experience, and your tendency for the plant to fail. It is also possible to provide analyzers for skids 4 and 7, but either or both of them operate intermittently rather than continuously.

Safety equipment: It is well known that F ₂ and HF are compounds that should be handled with care. Of course, H ₂ is flammable. Therefore, the factory is provided with safety equipment. For example, the plant includes a safety panel with switches for emergency stop (ESD), alarm, and priority automatic processing.

F ₂ , HF and, if applicable, H ₂ detectors are installed at the ventilation duct and discharge point, for example to the ERS scrubber. A gas alarm signal is sent to the ESD for safety functions. The plant includes a warning light, for example, if a gas alarm signal is sent to the ESD. These alarms should also be visible in the control room of the skid 10. Gas measurements should be provided to the control room, for example in ppm units. It would be very advantageous if the plant had fire and gas panels in the control room of the skid 10 showing all fire and gas alarms and poor ventilation.

As mentioned above, the factory includes a smoke detector and a VESDA detector. Particularly, process skids such as Skids 1, 2, 3, 4 and 7 include means for manually stopping F ₂ generation (e.g., emergency push buttons) and / or means for driving fire fighting equipment. CC TV (closed circuit television) can be used to supervise the factory. Access to the plant, and monitoring of the material's unloading operations (e.g., of HF mobile tanks or KOH solutions).

The plant is equipped with a safety equipment system (SIS), which includes detectors, ESD systems and safety drives. SIS is designed to achieve safety integrity level "2". In particular, if an electric motor or electric rod needs to be included as part of the safety gauge function, consider alternative, independent methods of tripping these motors / rods; For example, when the motor / electric load dedicated contactor or the circuit breaker is not open, the upper breaker is tripped.

In case the external power supply is cut off, the plant is equipped with a diesel generator which supplies an emergency generator, preferably 100 kVA.

It is also desirable if a "dead man" type of detection device for the worker alone is included in the control room.

Furthermore, it is desirable that the control room provide data on wind direction and wind speed.

The assembly footprint for a plant with a capacity of 150 tonnes per year is 30 m x 9.2 m. The total size is about 39m x 23m if it includes equipment, private areas, and accessibility skids for maintenance and service. The skid height may be higher than standard (standard height is 64 inches). Skids 6A, including emergency scrubbers, often do not have a standard space size, but must be tailored to the specific needs of each plant.

Often, the skid structure is a painted steel frame on which all equipment is secured; They are designed for outdoor installation. When fixed on the external structure of the skid, panels, doors and roofs represent the external skid scale larger than the size of the standard marine container. If necessary, these skids are prefabricated and each of the panels, doors and roofs are assembled onto the skids in the field. It fixes the skids on existing concrete slabs, or on specific foundations or on specific foundations.

Advantages of the skid are, for example, that they are manufactured before the factory test, are piped and tracked, and assembled together. It is desirable that the interface between the skids is minimized and that all parts of each skid are easily accessible as far as possible during maintenance, inspection or maintenance.

The advantage of this skid is that it can reliably produce high purity F ₂ for safety, 24 hours a day, 7 days a week.

Hereinafter, the assembly and operation of a factory constructed of skids will be described.

The skids as described above are assembled at the worksite; According to one embodiment, the electrolytic cells of skid 2 are supplied in a state filled with electrolyte salt in advance. This improves safety. After first testing the skids in the workshop, the F ₂ produced by them is delivered to the required facility. It is desirable to have enough concrete slabs on the facility to build on the F ₂ production plant.

Assemble and connect the skids. The skid 2 includes six electrolytic cells forming one battery chamber. In this case, each electrolytic cell contains 26 anodes; Other multiple, such as up to 80 and, if desired, even more, anodes are possible. Before or after the connection, as a precaution against earthquakes or bad weather, block the skids on the ground.

Skid 13 serves as a reservoir for the required chemicals, such as thiosulfate, hydroxide, and / or electrolyte salts.

It is desirable to test the operability of the built-in components at this time.

Now we will explain the operation of the factory in detail.

It provides a factory with 6 batteries. When operating 24 hours a day, 7 days a week, the nominal capacity of these plants for pure F ₂ is about 100 tons per year (12 kg / h, peak 20 kg / h). The capacity can be enlarged by adding two additional electrolytic cells and a rectifier or current rack. By adding additional skids (additional cell rooms and rectifiers, additional cooling skids, additional analyzers) it is possible to extend the capacity up to 300 tons per year. Preferably the internal volume of from 1 to assemble 20m ^3, and most preferably a tank filled with HF in the amount of 1 to 3m ³ of the skid 1, and connected to the electrolytic cells. Prior to final assembly of the plant, the battery is charged with an electrolyte salt having a composition of KF · 2HF in advance. The contents of the electrolytic cell are heated to about 80 to 120 DEG C and melted therein. HF discharged from the vaporizer of the skid 1 is supplied to the electrolytic cell. From the skid 9A, an intermediate voltage is supplied to the skid 9B, where it is converted to a low voltage DC having a voltage of 8 to 12V, the current passing through the molten composition of HF and the molten electrolyte salt maintained in the temperature range of 80 to 120 占 폚. One rectifier may be assigned to each anode; Preferably, one rectifier is assigned to each anode. It is particularly desirable to apply dual rectifiers; These dual rectifiers can meet two anodes. If 26 anodes are present in each cell, 13 dual rectifiers can be applied to provide current to the anode. The cell is operated at a pressure higher than atmospheric pressure (e.g., 7 to 10 mbarg). Small fluorine (F ₂ ) and small hydrogen (H ₂ ) are formed in each electrode chamber of the skid 2.

HF is advantageously supplied such that the levels of electrolyte salts and HF in each cell do not exceed a particular upper limit and lower limit. Preferably, the skid containing the electrolytic cells or electrolytic cells also includes a sensor for measuring the temperature of the cell, the liquid level in the cell or cells, the pressure and pressure difference, the current and voltage of the anode and the gas temperature. The battery is cooled using cooling water at a temperature of about 75 to 95 캜, preferably 75 to 85 캜.

The formed H ₂ is delivered to the skid 6 B and is contacted with an aqueous solution containing 0 to a maximum of about 5 wt% HF dissolved in water in a jet scrubber. The gas exiting the scrubber is delivered to the bottom of the packed column, where it is contacted with fresh water sprayed on top of the packed column. The gas discharged from the packed column is diluted with nitrogen and discharged to the atmosphere.

The plant produces F ₂ at about 415 kg / day.

The F ₂ produced in the cell is first pre-purified through removal of the particles (mainly re-solidified electrolyte salts that are entrained). The stream of feed F ₂ is then cooled to condense and remove a portion of the entrained HF. After that, the raw material F ₂ is compressed to about 3.5 barg with a diaphragm compressor. An extra pair of NaF towers can be placed on the trolleys to make the towers movable, especially when it is necessary to completely replace the NaF pellets (when additional regeneration is no longer possible). The compressed F ₂ then passes through a trap, where F ₂ is cooled to about -70 ° C by vaporized liquid N ₂ and gas N ₂ . The remaining HF is removed by the condensation reaction in the trap. The F ₂ is then passed through one of the two lines of the two absorption towers containing the NaF pellets to remove any remaining traces of HF. At this time the lines are redundant because sometimes the NaF towers are heated to about 350 to 400 ° C and N ₂ passes through them to remove absorbed HF and regenerate each tower. The pressure in the NaF column in the absorption mode is about 3.5 barg. The F ₂ gas stream exiting these two NaF columns is passed through two filters to remove all solids, especially NaF. Preferably the filter is made of monel metal and the pore diameter of the second filter is 3 nm. The temperature of the first tower is about 100 ° C, and the temperature of the second tower is about 30-40 ° C. The purified F ₂ was continuously sampled.

According to one embodiment, the samples are sent to a multi-cell FT-IR and UV analyzer as described above. According to another embodiment, single-cell FT-IR is applied to selectively analyze purified F2. The analysis is sent online to the control board in the control room on skid 10A.

From the results of the analysis of the samples it can be seen that F _{2 that} is too impure enough to be useful for semiconductor manufacturing purposes (e.g., containing too much CF ₄ or containing more homologs to indicate battery failure) If it is found to be produced, the F ₂ produced by each sample or sample and the electrolytic cell is transferred to the F ₂ scrubber in skid 5 and to the emergency scrubber performing the decomposition action through the sodium thiosulfate-containing KOH solution. Alternatively, the impure F ₂ can be collected, and the pureness of such F ₂ can be used for a sufficient purpose. From these samples, if it is found that the purity of F ₂ produced corresponds to the desired purity, return these samples to the F ₂ product line. F ₂ is then transferred to a storage means in which six identical shaped containers with an internal volume of 1.3 m ³ are accommodated. Each cylinder can be individually opened and closed by a shut-off valve. Alternatively, the pressure of the generated F ₂ is lowered to about 1.5 barg by a pressure control loop, and then transferred to a flat panel display manufacturing plant using F ₂ for chamber cleaning. A double walled pipe containing nitrogen in the space between the inner tube and the outer tube is used, and F ₂ passes through the inner tube.

During normal operation, the shutoff valve is open, and the pressure difference between the F ₂ storage unit and the source of use may be different for various consuming patterns in use or for the case where the generation process of the F ₂ generating unit is interrupted, To be controlled smoothly.

Where the disclosure of all patents, patent applications, and publications incorporated herein by reference is inconsistent with the present disclosure, the meaning of a term is to be emphasized.

Claims (17)

- a skid-mounted module, represented by skid 1, comprising at least one storage tank for HF,
- a skid mounted module, denoted skid 2, comprising at least one electrolytic cell for producing F ₂ ,
A skid mounting module comprising a cooler for pre-cooling the stream of feed F ₂ , indicated as skid 3, and
A skid-mounted module, indicated by skid 4, comprising a buffer tank and a supply line to the place of use
Wherein the cooler is connected to a compressor, the compressor is connected to an HF condenser operating at a low temperature, and the HF condenser is a device for mixing N ₂ gas obtained by mixing liquid N ₂ with gas N ₂ into a cooling medium Fluorine gas production plant. The method according to claim 1,
A skid module 9, which is a substation for converting an intermediate voltage to a lower voltage, and / or
- a fluorine gas production plant further comprising a skid module (10) accommodating equipment and amenities. The fluorine gas production plant according to claim 1, wherein the internal volume of the storage tank for HF of the skid 1 is 1 to 2 m ³ . 4. A fluorine gas production plant according to any one of claims 1 to 3, wherein the skid 2 comprises four or more electrolytic cells each assigned to at least one individual rectifier. Article according to any one of the preceding claims, the skid 3 is absorbed HF from the condenser, and the F ₂ for removing HF from the HF washer, the F ₂ for contacting a raw material F ₂ gas and liquid HF The fluorine gas producing plant comprising at least one absorber for producing fluorine gas. The fluorine gas production plant according to any one of claims 1 to 3, wherein the skid (4) comprises a plurality of hollow bodies for fluorine gas storage. The fluorine gas production plant according to claim 6, wherein each hollow body can be individually cut off from the factory. delete delete delete delete The system of claim 2, wherein the skid (9) includes a sub-skid (9A) for receiving an intermediate voltage cell for input current, an output current and a bypass current, and a sub-skid (9A) for receiving a low voltage switchgear, a diesel generator and a battery charger station - a fluorine gas production plant comprising a skid 9B. The fluorine gas production plant according to claim 2, wherein the skid (10) comprises a sub-skid (10A) for accommodating a control room including a laboratory and a sub-skid (10B) for accommodating a common room. 4. The fluorine gas production plant according to any one of claims 1 to 3, wherein each skid is provided with at least one emergency button. The fluorine gas production plant according to any one of claims 1 to 3, comprising a seismometer. 16. The fluorine gas producing plant according to claim 15, wherein the seismometer is a strong system. 16. The fluorine gas production plant according to claim 15, wherein the seismometer is connected to a control board and causes a temporary disconnection of the plant.

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