KR101818315B1 - 정전용량형 압력 센서 및 입력 장치 - Google Patents

정전용량형 압력 센서 및 입력 장치 Download PDF

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Publication number
KR101818315B1
KR101818315B1 KR1020157022136A KR20157022136A KR101818315B1 KR 101818315 B1 KR101818315 B1 KR 101818315B1 KR 1020157022136 A KR1020157022136 A KR 1020157022136A KR 20157022136 A KR20157022136 A KR 20157022136A KR 101818315 B1 KR101818315 B1 KR 101818315B1
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KR
South Korea
Prior art keywords
dielectric layer
region
pressure sensor
center
diaphragm
Prior art date
Application number
KR1020157022136A
Other languages
English (en)
Korean (ko)
Other versions
KR20150108875A (ko
Inventor
카츠유키 이노우에
토시아키 오쿠노
요시유키 코무라
Original Assignee
오므론 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오므론 가부시키가이샤 filed Critical 오므론 가부시키가이샤
Publication of KR20150108875A publication Critical patent/KR20150108875A/ko
Application granted granted Critical
Publication of KR101818315B1 publication Critical patent/KR101818315B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/96—Touch switches
    • H03K17/962—Capacitive touch switches
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/965—Switches controlled by moving an element forming part of the switch
    • H03K17/975—Switches controlled by moving an element forming part of the switch using a capacitive movable element
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/96—Touch switches
    • H03K2017/9602—Touch switches characterised by the type or shape of the sensing electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/94—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00 characterised by the way in which the control signal is generated
    • H03K2217/96—Touch switches
    • H03K2217/9607—Capacitive touch switches
    • H03K2217/960755—Constructional details of capacitive touch and proximity switches

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Measuring Fluid Pressure (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Human Computer Interaction (AREA)
KR1020157022136A 2013-03-11 2013-12-05 정전용량형 압력 센서 및 입력 장치 KR101818315B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013048531A JP5974939B2 (ja) 2013-03-11 2013-03-11 静電容量型圧力センサ及び入力装置
JPJP-P-2013-048531 2013-03-11
PCT/JP2013/082700 WO2014141550A1 (ja) 2013-03-11 2013-12-05 静電容量型圧力センサ及び入力装置

Publications (2)

Publication Number Publication Date
KR20150108875A KR20150108875A (ko) 2015-09-30
KR101818315B1 true KR101818315B1 (ko) 2018-01-12

Family

ID=51536236

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157022136A KR101818315B1 (ko) 2013-03-11 2013-12-05 정전용량형 압력 센서 및 입력 장치

Country Status (4)

Country Link
JP (1) JP5974939B2 (ja)
KR (1) KR101818315B1 (ja)
CN (1) CN105008880B (ja)
WO (1) WO2014141550A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107735657A (zh) * 2016-06-14 2018-02-23 深圳市汇顶科技股份有限公司 便携式电子设备及其压力检测装置和方法
KR102522033B1 (ko) 2016-07-06 2023-04-18 삼성디스플레이 주식회사 표시 장치
JP2020046177A (ja) 2016-12-20 2020-03-26 株式会社村田製作所 圧力センサ素子およびそれを備えた圧力センサモジュール
JP6922798B2 (ja) * 2018-03-15 2021-08-18 オムロン株式会社 静電容量式圧力センサ
CN114502936B (zh) * 2019-10-15 2024-04-26 松下知识产权经营株式会社 载荷传感器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP2005321257A (ja) * 2004-05-07 2005-11-17 Alps Electric Co Ltd 静電容量型圧力センサ
JP2007101222A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 圧力センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951174A (en) * 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
JP2003139628A (ja) * 2002-07-02 2003-05-14 Nitta Ind Corp 静電容量式センサー
US7345867B2 (en) * 2005-11-18 2008-03-18 Alps Electric Co., Ltd Capacitive pressure sensor and method of manufacturing the same
DE102009001924A1 (de) * 2009-03-27 2010-09-30 Robert Bosch Gmbh Drucksensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP2005321257A (ja) * 2004-05-07 2005-11-17 Alps Electric Co Ltd 静電容量型圧力センサ
JP2007101222A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 圧力センサ

Also Published As

Publication number Publication date
CN105008880B (zh) 2017-07-14
KR20150108875A (ko) 2015-09-30
JP5974939B2 (ja) 2016-08-23
JP2014174060A (ja) 2014-09-22
CN105008880A (zh) 2015-10-28
WO2014141550A1 (ja) 2014-09-18

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