KR101800379B1 - A water combined air plasma processing device - Google Patents

Abstract

The present invention generates ozone by using a plasma generator, easily converts ozone into treated water by using an injector having a simple structure, and converts ozone into radical water, and provides a large amount of ozone and radical water, A disinfection apparatus, a disinfection apparatus, a disinfection apparatus, a disinfection apparatus, a disinfection apparatus, and an agricultural product disposal apparatus.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a water-

More particularly, the present invention relates to a plasma processing apparatus for both water and air, in which ozone is generated using a plasma generator, ozone is easily mixed into treated water by using an injector having a simple structure, And a plasma processing apparatus using water and air, the structure of which is improved so that it can be used for sterilization, disinfection, odor removal, agricultural cultivation, etc. of the food and beverage industry.

As a technique related to advanced water treatment using existing plasma or ozone, there is a utility model registration No. 0288954 (Aug. 31, 2002) [ozone generator]

The registrations are designed to provide an ozone generator that simultaneously performs an ozone generation method using a dielectric barrier discharge in a single ozone generator and an ultraviolet ozone generator using an ultraviolet source to improve the ozone generation rate, Generator.

However, there is a great difficulty in applying the above registration design to the water treatment field in relation to the reality, and in particular, a solution to the problem that the yield of ozone is remarkably lowered at a temperature higher than room temperature (both the high pressure radioactive discharge method and the ultraviolet method cause heat) It is not.

In addition, Patent Registration No. 0572514 (April 13, 2006) (a device for simultaneous generation of ozone and hydrogen peroxide in water using wet plasma) is disclosed. In the patent, a high frequency power source is used, The present invention proposes a device for simultaneously generating hydrogen peroxide capable of increasing the amount of dissolved ozone, which is a major factor of the oxidation reaction in water, and increasing the rate of self-decomposition of dissolved ozone in water.

However, the above-mentioned patent also fails to provide a solution to the problem that the yield of ozone is remarkably lowered at a temperature higher than room temperature, and may be suitable for small-scale water treatment of household water purification facilities, but is unsuitable for large water treatment applications.

Further, Patent Registration No. 0797027 (Jan. 16, 2008) [Wastewater Treatment Apparatus Using Ultraviolet and Oxidative Substances Generated in Dielectric Barrier Discharge Tube and Wastewater Treatment Method Using the Same] A high voltage generator at the upper end of the discharge tube, and a cylindrical photocatalyst network around the discharge tube and inside the wastewater treatment device.

This patent discloses an electric discharge in the dielectric barrier discharge tube contained in the wastewater to generate various oxidizing components and ultraviolet rays and disperses the oxidizing components in the form of fine bubbles in the wastewater so that the organic substances in the wastewater are oxidized and removed The present invention provides a treatment apparatus and method capable of treating an organic matter by at least two mechanisms by activating a photocatalyst by using ultraviolet rays emitted from a dielectric barrier discharge tube or directly irradiating wastewater to remove organic matter, It has been mentioned that there is an effect of removing organic matter with high efficiency at a low electric power in a reaction apparatus.

However, the above-mentioned patent is disadvantageous in that the treatment capacity basically depends on the size of the dielectric barrier discharge tube, and it is unsuitable for water treatment for flowing water since the residence time must be ensured.

In addition, there is a patent registration No. 0833814 (May 26, 2008) [water treatment apparatus], which provides a water treatment apparatus having a high water purification ability by using a peroxy radical and an ozone combination process, It has been described that the treatment ability can be improved and the production of the peroxy radical and the purification treatment are performed simultaneously in the same space to provide an advantage that the water treatment cost can be reduced as compared with the conventional water treatment apparatus using ozone alone .

However, the above-mentioned patent also has no relation to ozone yield or multi-capacity water treatment technology.

As one example of conventional prior art for solving this problem, as disclosed in Korean Registered Utility Model No. 20-0472395 entitled " Plasma Elevation Water Treatment System "(Registered on Apr. 17, 2014), a first communication passage And a second communication path through which gas for radical reaction passes; and an inner tube and an outer tube for forming the first communication path and the second communication path; A plasma generating means including an electrode arranged in the first and second communication paths of the dual conduit, and a power portion connected to the electrode; And a water tank connected to the dual conduit for reacting the treated water flowing out from the first communication passage with a radical generating source flowing out of the second communication, wherein the first communication passage of the dual conduit And the second communication passage is formed between the inner pipe and the outer pipe, and the first communication passage of the double pipe is moved randomly along the passage of the process water to generate a stable potential in the first communication passage Wherein a plurality of dielectric beads are filled and both ends of the inner tube are opened and spaced from both ends of the inner tube to a central portion so as to be closely attached to the inner circumferential surface, And a spacer for blocking the passage of the dielectric bead so that the dielectric bead is not separated from the inner tube .

Another prior art related to the conventional plasma processing apparatus is disclosed in Korean Registered Utility Model No. 20-0439228 entitled " Air conditioner equipped with a photo-plasma sterilizing unit "(registered on Mar. 23, 2008) And a photo-plasma sterilizer for sterilizing and purifying indoor air as the photo-plasma is formed in the main body of the air conditioner, wherein the photo-sterilizer comprises a photo-plasma member composed of a UV lamp coated with a semiconductor photocatalyst on the surface, ; A pair of plate-shaped socket members for electrically connecting the light plasma member; And a pair of socket members detachably supported in the main body, the socket frame having a "C" -shaped frame formed with upper and lower inner side guide grooves for slidably guiding the socket member, And a fixing clip for fixing the frame to the inside of the main body, wherein the fixing clip is screwed to the rear surface of the main body so as to fix the frame to the main body, In addition, an opening is formed at a front side of the main body, and a cover is provided at the opening, so that the photo-sterilizing unit can be installed and taken out through the opening.

In addition, since the conventional plasma processing apparatus uses plasma water treated with radical water or plasma ozone using air, a plasma processing apparatus capable of using both water and air is required. to be.

Korean Registered Utility Model No. 20-0472395 entitled "Plasma Elevation Water Treatment Device" (Registered Date: April 4, 2014) Korean Registered Utility Model No. 20-0439228 entitled "Air conditioner equipped with a light plasma sterilizer" (registered on March 21, 2008)

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a plasma generator which generates ozone and easily mixes ozone with treated water using a simple- And also to provide a water and air plasma processing apparatus improved in its structure so as to be able to be used for disinfection, disinfection, odor removal, agricultural cultivation, etc. of the agricultural and horticultural food industry by providing a large amount of ozone and radical water.

According to an aspect of the present invention, there is provided a plasma generator comprising: a plasma generator having a positive electrode and a negative electrode inside and filled with process water for cooling; a process water supply pipe connected to supply treatment water to the inside of the plasma generator; A process water discharge pipe disposed in the process water discharge pipe for discharging process water from the plasma generator; a drain side main tank disposed in the process water discharge pipe for filling process water; a process water filling tank installed in the process water drain pipe for filling the process water; An exhaust pipe that is exhausted after the air that has passed through the plasma generator is converted into ozone and is provided with a three-way control valve, and an exhaust pipe connected to the exhaust pipe and filled with ozone An ozone filling tank connected to the exhaust pipe for branching, An injector connected to the branch pipe and having an inlet connected to the treated water drain pipe and mixing the ozone supplied through the branch pipe with the treated water supplied through the treated water drain pipe; And a radical water tank connected to the ozone reducing unit and filled with OH radical water passing through the ozone reducing unit.

The branch pipe is further provided with a check valve for blocking the reverse flow of ozone supplied through the three-way control valve.

And a drain side auxiliary tank in which the process water drain pipe is filled with process water.

And a bypass line connecting the inlet and the outlet of the injector.

Wherein the ozone reducing unit includes a housing having one side connected to the outlet side of the injector and the other side to be opened, a casing coupled to the other side of the housing and having a plurality of through holes formed therein, An inner cylinder member for switching the flow direction of the OH radical water passing through the inside of the housing in the flow direction of the OH radical water flowing through the inside of the casing and connected to the casing of the inner cylinder member and connected to the radical water tank, And a connection pipe for switching the connection pipe.

The radical water tank is provided therein with a float valve for adjusting the water level of the OH radical water, an outlet connected to the upper portion to communicate with the upper portion to discharge the ozone gas, and a drain pipe to drain the OH radical water in the lower portion.

A first detection sensor installed in the treated water filling tank for detecting the PH concentration of the treated water filled in the treated water filling tank and outputting the detected information to the control unit side, and a second detection sensor provided in the radial water tank, A second detection sensor for detecting the PH concentration of the OH radical water and outputting the detected information to the control unit side, and a second concentration sensor for detecting the PH concentration difference detected by the first and second detection sensors based on the information applied from the first and second detection sensors And a controller for controlling the supply amount of the process water supplied to the injector when the predetermined set value is exceeded.

And a process water storage tank connected to an external process water inlet pipe at one side and connected to the process water supply pipe and the process water drain pipe at the lower side and the upper side and to supply the process water to the process water filling tank side.

According to another aspect of the present invention, there is provided a plasma processing apparatus comprising: a plasma generator having a positive electrode and a negative electrode inside and filled with process water for cooling; a process water supply pipe connected to supply process water into the plasma generator; A treatment water discharge tank disposed in the treatment water discharge pipe and filled with the treatment water, and a treatment water supply tank disposed in the treatment water discharge pipe, An exhaust pipe connected to the exhaust pipe and filled with ozone, and an exhaust pipe connected to the exhaust pipe and filled with ozone, wherein the exhaust pipe is exhausted after the air having passed through the plasma generator is converted into ozone, A filling tank connected to the exhaust pipe and connected to the ozone generator through the three- An injector connected to the branch pipe and connected to the water supply pipe to mix the ozone supplied through the branch pipe with the water supplied through the water supply pipe; An ozone reducing unit, and a radical water tank connected to the ozone reducing unit and filled with OH radical water passing through the ozone reducing unit.

The ozone gas or the ozone gas is mixed with the treatment water passing through the injector by using the ozone gas as the air or the treatment water to generate the ozone gas as the ozone water, Gas and OH radical water can be supplied to concentrated aquaculture food field. It can be used for sterilization, oxidation, deodorization, decolorization, crop growth, seeds of agricultural products, aquatic products, corrosion prevention and disinfection of food factories, Sterilization and wastewater treatment, and has an advantage that it can be applied to a variety of agricultural and marine products.

Brief Description of the Drawings Fig. 1 is a configuration diagram showing a configuration of a plasma and water treatment apparatus for both water and air according to the present invention. Fig.
Fig. 2 is a view showing an operation of the control unit of the present invention and the first and second detection sensors; Fig.
3 is an enlarged cross-sectional view showing the configuration of the ozone reducing apparatus of the present invention.
FIG. 4A is a view showing a path through which air is changed to ozone gas, and FIG. 4B is a view showing a path through which air and process water are changed to ozone gas and OH radicals.
5 is a configuration diagram showing another embodiment of the present invention.
6 is a configuration diagram showing still another embodiment of the present invention.

1 to 3, the plasma processing apparatus for water and air according to the present invention includes a plasma generator 100 having a positive electrode and a negative electrode inside and filled with a process water for cooling, A process water supply pipe 210 connected to supply process water for cooling to the interior of the process chamber 100, a process water discharge pipe 250 drained from the plasma generator 100, A process water filling tank 600 installed in the process water drain pipe 250 and filled with the process water; and a water treatment tank 200 installed in the inside of the plasma generator 100 An exhaust pipe 320 which is exhausted after the air having passed through the plasma generator is converted into ozone and has a three-way control valve 350 installed therein, an exhaust pipe 320) and An ozone filling tank 500 filled with ozone, a branch pipe 400 branched from the exhaust pipe 320 and supplied with ozone through the three-way control valve 350, An injector 700 connected to the inlet pipe 400 and connected to the drain pipe to mix the ozone supplied through the branch pipe 400 with the process water supplied through the drain pipe, And a radical water tank 900 connected to the ozone dehumidifier 800 and filled with OH radical water passing through the ozone dehumidifier 800. The ozone dehumidifier 800 is connected to the ozone dehumidifier 800,

The plasma generator 100 functions to convert air into ozone through the inside of the outer cylinder by applying a DC high voltage power after winding the electrode in the ceramic bar inside the cylindrical outer cylinder, So that the inside of the outer cylinder is filled with process water.

1, the plasma generator 100 is connected to a process water supply pipe 210 on the lower side and one side thereof so that the process water for cooling is introduced into the plasma generator 100, and on the upper and the lower sides, A pipe 250 is connected and an air supply pipe 310 and an exhaust pipe 320 are connected to the lower side and the upper side.

The air supply pipe 310 is connected to a lower portion of the plasma generator 100 so that air is fed from the compressor (not shown) and passes through the plasma generator 100.

The process water supply pipe 210 cools the internal temperature of the plasma generator 100 to perform a cooling function to prevent excessive heat from being generated in the electrode. In order to make the supply path of the process water double, And two treated water supply pipes 212 and 214.

The first treatment water supply pipe 212 is provided with an input side treatment water tank 215 to fill the treatment water supplied to the plasma generator 100 side.

The second treatment water supply pipe 214 is provided with an open / close valve for selecting supply or interruption of the treatment water supplied into the plasma generator 100.

The first process water supply pipe 212 is connected to the second process water supply pipe 214 to cool the inside of the plasma generator 100 while the process water is supplied through an internal cooling pipe disposed inside the plasma generator 100, The process water is supplied into an external cooling pipe arranged inside the plasma generator 100 to cool the outside of the plasma generator 100. [

The treated water discharge pipe 250 includes a first treated water discharge pipe 252 connected to the upper side of the plasma generator 100 and a second treated water discharge pipe 254 connected to the other side of the plasma generator 100 And has a branched structure.

The first treated water drainage pipe 252 is provided with a drainage-side main tank 225.

The second treated water discharge pipe 254 is further provided with a drain side auxiliary tank 235 filled with the process water.

The drain side auxiliary tank 235 performs a function of a storage space in which process water is filled when only the air, which is not combined with water and air, passes through the plasma generator 100 during the pressure feeding of the process water.

Here, the air is pressure-fed using a compressor, and the pressure of the treated water is used for feeding the pump.

The air supply pipe 310 is converted into ozone while passing through the plasma generator 100, and the ozone is filled into the ozone filling tank 500 side through the exhaust pipe 320.

The ozone filling tank 500 is provided with an ozone gas sensor 510 for measuring the concentration of ozone gas.

The exhaust pipe 320 is connected to the injector 700 through a branch pipe 400 and a three-way control valve 350 is installed at a connection portion between the exhaust pipe 320 and the branch pipe 400.

The ozone in the exhaust pipe 320 is selectively supplied to the branch pipe 400 through the three-way control valve 350 and the ozone supplied to the branch pipe 400 is supplied to the inside of the injector 700.

At this time, the branch pipe 400 is provided with a check valve 450 for preventing the ozone supplied to the inside of the injector 700 from flowing back to the three-way control valve 350 side.

The injector 700 is formed in the form of a venturi pipe, and the inlet side of the injector 700 is connected to the treated water drain pipe 250 to supply treated water. The outlet side of the injector 700 is connected to the ozone dehumidifier 800 side, And is connected to the pipe 400 to supply ozone.

Thus, the injector 700 mixes the treated water supplied through the treated water drain pipe 250 with ozone, converts it into OH radical water, and flows out to the outlet side.

The injector 700 further includes a bypass line 750 connecting the inlet side and the outlet side of the injector 700 and a flow rate control valve 755 provided on the bypass line 750 for controlling the flow rate of the treated water, So that it is possible to easily control the supply amount of the process water supplied to the ozone dehumidifier 800 side.

As shown in FIG. 3, the ozone reducing device 800 includes a housing 810 having one side connected to the outlet side of the injector 700 and the other side opened; And a casing 825 which is coupled to the other side of the housing 810 and accommodated in the housing 810 and has a plurality of through holes 825a and passes through the inside of the housing 810 in the casing 825 An inner cylinder member 820 for changing the flow direction of the OH radical (OH radical) water; A connection pipe 830 connected to the casing 825 of the inner barrel member 820 and connected to the radical water tank 900 to switch the flow direction of the OH radical water passing through the inside of the casing 825; .

The through holes 825a are formed in a plurality of locations in the casing 825 adjacent to the connection pipe 830 so as to change the flow direction of the OH radical water and the OH radicals flowing into the housing 810 pass through the through holes 825a From the right side into the casing 825 on the left side.

The OH radical water flowing into the casing 825 flows into the connection pipe 830 while the flow direction is switched again in the casing 825.

That is, the ozone reducing device 800 is connected to the outlet side of the injector 700 to connect the ozone and the process water, and OH radicals mixed with the process water are introduced into the housing 810, and the casing 825 is filled in the housing 810, Flows into the inside of the casing 825 through the through hole 825a, is further changed in direction, flows into the inside of the connection pipe 830, and the direction of the OH radical is changed twice. Thus, There is an advantage that the ozone remaining in the radical water is mixed with the OH radical water while passing through the inside of the ozone dehumidifier 800, thereby reducing the ozone.

The radical water tank 900 includes a flotation valve 920 having a floating means for adjusting the water level of the OH radical water and a fl oating valve 920 connected to the upper portion to communicate with the ozone gas remaining in the radical water tank 900 And a drain pipe 940 through which OH radical water is drained downward.

2, the treatment water filling tank 600 is provided with a treatment tank 60 for detecting the PH concentration of the treatment water filled in the treatment water filling tank 600 and outputting the detected information to the control unit 50 side. 1 detection sensor 610 is provided in the radical water tank 900 and a second detection for detecting the PH concentration of the OH radical water filled in the radical water tank 900 and outputting the detected information to the control unit 50 side The sensor 910 is installed and when the difference in the PH concentration detected by the first and second detection sensors 610 and 910 exceeds a predetermined set value based on information applied from the first and second detection sensors 610 and 910, ) Controls the supply amount of the treatment water supplied to the injector 700 side.

At this time, when the difference in PH concentration between the first and second detection sensors 610 and 910 is larger than a preset concentration, the flow rate of the treated water supplied to the ozone dehumidifier 800 can be controlled to be increased. 755 may be opened to further supply the treated water through the bypass line 750.

On the other hand, when the difference in PH concentration detected by the first and second detection sensors 610 and 910 is lower than the preset concentration, the flow control valve 755 is closed to close the bypass line 750.

The opening / closing operation of the flow control valve 755 is controlled by the control unit 50.

In addition, the control unit 50 has a function of controlling the supply amount of air and treatment water during operation of the operation panel (not shown) and controlling the flow rate of the discharged ozone and OH radical water.

The control unit 50 controls the operation of the three-way control valve 350 so that only the ozone is used in the plasma generator 100 according to the operation of the operation panel of the user, or both the ozone and the OH radicals As shown in FIG.

FIG. 4A is a graph showing the flow state of the fluid in which the air of the present invention is converted into ozone gas by passing through the plasma generator 100, and FIG. 4B is a graph showing a state where the process water of the present invention passes through the plasma generator 100 And then flows out to the outside through the radical water tank 900 after being converted into OH radical water after reacting with the ozone gas in the injector 700. FIG.

Therefore, according to the present invention, ozone gas is used by using only air, or ozone gas is mixed with treated water passing through the injector 700 by using both air and treated water to generate OH radicals as ozone water, There is an advantage that it is possible to supply ozone gas or ozone gas harmless to human body and OH radical water to the field of concentrated aquaculture without using a toxin factor such as chlorine.

The sterilization, oxidation, deodorization, discoloration, and crop growth of the OH radical water mixed with the ozone gas and the ozone gas generated in the plasma generator 100 are used to grow seeds of agricultural products, sterilize aquatic products, Corrosion inhibition, disinfection, disinfection of house, treatment of wastewater, and so on.

Fig. 5 is a view showing another embodiment of the present invention. In Fig. 5, the same constituent elements as those of the foregoing embodiment are connected to an external process water inflow pipe 205 on one side, And a process water storage tank 255 connected to the process water discharge pipe 250 and supplying the process water to the process water filling tank 600 side.

Hereinafter, the same constituent elements as those of the foregoing embodiment will be denoted by the same reference numerals, and redundant description will be omitted.

The process water storage tank 255 stores a larger amount of process water than the process water fill tank 600. After the process water is introduced from the outside through the process water inflow pipe 205, The process water is supplied to the plasma generator 100 side.

The treated water storage tank 255 performs a cooling function from the treated water discharge pipe 250 connected to the upper side through the plasma generator 100. After the warm water is stored, the treated water is passed through the treated water filled tank 600, So that the treated water is supplied to the water tank 700 side.

In addition, the process water storage tank 255 is provided with a floating valve 255a to adjust the level of the process water in the process water storage tank 255. [

Thereby, the process water storage tank 255 makes it possible to store a large amount of process water in order to prevent a shortage of process water.

FIG. 6 is a view showing still another embodiment of the present invention, and a description of the same components as those of the preceding embodiments will be omitted. However, it is to be understood that the process water supplied to the injector 700 may be applied to the plasma generator 100 The water supplied through the water pipe 250A is mixed with the ozone gas while passing through the inside of the injector 700. [

To this end, the inlet side of the injector 700 is connected to a separate water supply pipe 250A.

50: control unit 100: plasma generator
205: treated water inflow pipe 210: treated water supply pipe
212: first treated water supply pipe 214: second treated water supply pipe
215: input side process water tank 225: drain side main tank
235: drain side auxiliary tank 250: treated water drain pipe
250A: water pipe 252: first treated water drain pipe
254: second treated water drain pipe 255: treated water storage tank
255a: Floating valve 310: Air supply line
320: exhaust pipe 350: three-way control valve
400: branch piping 450: check valve
500: ozone filling tank 510: ozone gas sensor
600: Process water filling tank 610: First detection sensor
700: Injector 750: Bypass line
755: Flow regulating valve 800: Ozone-reducing valve
810: Housing 820: Inner bar member
825: casing 825a: through hole
830: Connection piping 900: Radical water tank
910: second detection sensor 920: float valve
930: Outlet 940:

Claims (9)

A plasma generator 100 having a positive electrode and a negative electrode inside and filled with process water for cooling,
A process water supply pipe 210 connected to supply process water to the inside of the plasma generator 100,
A treated water discharge pipe 250 drained from the plasma generator 100,
A drainage-side main tank 225 disposed in the treated water drainage pipe 250 and filled with treated water,
A process water filling tank 600 installed in the process water drain pipe 250 to fill the process water,
An air supply pipe 310 for supplying air into the plasma generator 100,
An exhaust pipe 320 which is exhausted after the air having passed through the plasma generator 100 is converted into ozone and is installed with a three-way control valve 350,
An ozone filling tank 500 connected to the exhaust pipe 320 and filled with ozone,
A branch pipe 400 branched to the exhaust pipe 320 and supplied with ozone through the three-way control valve 350,
The ozone which is connected to the branch pipe 400 and whose inlet is connected to the process water drain pipe 250 and is supplied through the branch pipe 400 is mixed with the process water supplied through the process water drain pipe 250 An injector 700,
An ozone dehumidifier 800 connected to an outlet side of the injector 700,
And a radical water tank (900) connected to the ozonizer (800) and filled with OH radicals passing through the ozonizer (800). The method according to claim 1,
Wherein the branch piping (400) is further provided with a check valve (450) for blocking the reverse flow of ozone supplied through the three-way control valve (350). The method according to claim 1,
Further comprising a drain side auxiliary tank (235) for filling the treated water drainage pipe (250) with process water. The method according to claim 1,
Further comprising a bypass line (750) connecting the inlet and the outlet of the injector (700). The method according to claim 1,
The ozone reducing device 800 includes a housing 810 having one side connected to the outlet side of the injector 700 and the other side opened,
And a casing 825 which is coupled to the other side of the housing 810 and accommodated in the housing 810 and has a plurality of through holes 825a and passes through the inside of the housing 810 in the casing 825 An inner barrel member 820 for switching the flow direction of the OH radical water,
A connection pipe 830 connected to the casing 825 of the inner barrel member 820 and connected to the radical water tank 900 to switch the flow direction of the OH radical passing through the casing 825 Wherein the water and air plasma processing apparatus are combined with each other. The method according to claim 1,
The radical water tank 900 includes a float valve 920 disposed therein for adjusting the water level of the OH radical water,
An outlet 930 connected to the upper portion to discharge the ozone gas,
And a drain pipe (940) for draining the OH radical water in the lower part of the plasma processing apparatus. The method according to claim 1,
A first detection sensor 610 installed in the treated water filling tank 600 for detecting the PH concentration of the treated water filled in the treated water filling tank 600 and outputting the detected information to the control unit 50 side,
A second detection sensor 910 installed in the radical water tank 900 for detecting the PH concentration of the OH radical water filled in the radical water tank 900 and outputting the detected information to the control unit 50 side,
When the PH concentration difference detected by the first and second detection sensors 610 and 910 exceeds a predetermined set value based on information applied from the first and second detection sensors 610 and 910, And a control unit (50) for controlling the supply amount of the water and the air. The method according to claim 1,
An external process water inflow pipe 205 is connected to one side of the process water supply pipe 210 and a process water discharge pipe 250 is connected to the lower side and the upper side of the process water supply pipe 210, And a process water storage tank (255) for supplying water and air. A plasma generator 100 having a positive electrode and a negative electrode inside and filled with process water for cooling,
A process water supply pipe 210 connected to supply process water to the inside of the plasma generator 100,
A treated water discharge pipe 250 drained from the plasma generator 100,
A drainage-side main tank 225 disposed in the treated water drainage pipe 250 and filled with treated water,
A process water filling tank 600 installed in the process water drain pipe 250 to fill the process water,
An air supply pipe 310 for supplying air into the plasma generator 100,
An exhaust pipe 320 which is exhausted after the air having passed through the plasma generator 100 is converted into ozone and is installed with a three-way control valve 350,
An ozone filling tank 500 connected to the exhaust pipe 320 and filled with ozone,
A branch pipe 400 branched to the exhaust pipe 320 and supplied with ozone through the three-way control valve 350,
An injector 700 connected to the branch pipe 400 and connected to the inlet water pipe 250A to mix the ozone supplied through the branch pipe 400 with the water supplied through the water pipe 250A, ,
An ozone dehumidifier 800 connected to an outlet side of the injector 700,
And a radical water tank (900) connected to the ozonizer (800) and filled with OH radicals passing through the ozonizer (800).

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