KR101793705B1 - Scrubber apparatus capable for detecting fire inside housing - Google Patents

Scrubber apparatus capable for detecting fire inside housing Download PDF

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Publication number
KR101793705B1
KR101793705B1 KR1020160003372A KR20160003372A KR101793705B1 KR 101793705 B1 KR101793705 B1 KR 101793705B1 KR 1020160003372 A KR1020160003372 A KR 1020160003372A KR 20160003372 A KR20160003372 A KR 20160003372A KR 101793705 B1 KR101793705 B1 KR 101793705B1
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South Korea
Prior art keywords
odor
main body
fire
internal
scrubber
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KR1020160003372A
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Korean (ko)
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KR20170083902A (en
Inventor
차경천
박종기
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차경천
박종기
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Priority to KR1020160003372A priority Critical patent/KR101793705B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30—Controlling by gas-analysis apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H01L2021/60007—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process
    • H01L2021/60022—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process using bump connectors, e.g. for flip chip mounting
    • H01L2021/60097—Applying energy, e.g. for the soldering or alloying process
    • H01L2021/60172—Applying energy, e.g. for the soldering or alloying process using static pressure
    • H01L2021/60187—Isostatic pressure, e.g. degassing using vacuum or pressurised liquid

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Fire Alarms (AREA)
  • Fire-Detection Mechanisms (AREA)

Abstract

1. A scrubber apparatus for pyrolyzing noxious gas discharged from a main chamber and discharging a stabilized processing gas to the atmosphere, comprising: a single body sealed inside and maintaining a negative pressure; An internal odor detector for detecting the odor generated due to a change in the characteristics of a material constituting a component or a cable; An external odor sensor installed outside the main body to detect an odor generated due to changes in characteristics of the object due to heat; And a controller for determining a fire inside the main body based on a difference between values detected from the internal and external odor detectors.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a scrubber device capable of detecting fire,

The present invention relates to a scrubber apparatus, and more particularly to a scrubber apparatus capable of reliably detecting a fire inside a main body.

A large number of noxious gases are used during the semiconductor manufacturing process. It is the scrubber that processes the vacuum pump and the noxious gas that is used in the process and then discharged and discharged to the outside.

Various noxious gases used in the main chamber are transferred to a vacuum pump located at a remote location, treated in a scrubber for waste gas treatment, and then taken out. Here, the vacuum pump functions not only to deliver the harmful gas to the scrubber but also to vacuum the main chamber.

The scrubber is a device for purifying harmful gases and uses a high temperature of 700 ° C to 1,500 ° C.

Therefore, conventionally, a smoke detector has usually been used to detect a fire occurring inside a scrubber.

However, since the smoke detector is a sensor that senses smoke generated in a fire, it can detect the fire only after the smoke is generated due to the fire, and thus the response to the fire is delayed.

Further, even when smoke is generated outside the scrubber device and the smoke flows into the scrubber device, that is, the inside of the main body, there is a problem that the smoke detector malfunctions as a result of a fire in the scrubber device.

On the other hand, in the high temperature environment in the scrubber, as a by-product generated during the treatment, piping corrosion occurs and gas leaks. In order to detect leakage of harmful gas and by-products due to pipe corrosion, There is a problem that a detector needs to be installed.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a scrubber device that increases reliability of fire judgment by operating only on fires generated in the scrubber.

Another object of the present invention is to provide a scrubber device capable of detecting a fire to prevent a fire or quickly responding to a fire before a smoke or a flame is generated by a fire.

It is another object of the present invention to provide a scrubber device capable of detecting all kind of noxious gas and by-product leakage at a low cost while detecting a fire.

The above object of the present invention is achieved by a scrubber apparatus for pyrolyzing noxious gas discharged from a main chamber and discharging a stabilized processing gas into the atmosphere, the scrubber apparatus comprising a single body which is sealed and maintains a negative pressure, An internal odor sensor for detecting an odor generated due to a change in characteristics of a component constituting the main body or a material constituting the cable; An external odor sensor installed outside the main body to detect an odor generated due to changes in characteristics of the object due to heat; And a controller for determining a fire inside the main body based on a difference between the values detected by the internal and external odor detectors.

Preferably, a main body discharge port communicating with the inside of the main body is provided at an upper portion of the main body.

Preferably, the controller determines that the internal odor sensor detects a fire when the value detected by the internal odor sensor is equal to or greater than a reference value, and the difference between the values detected by the internal and external odor sensor exceeds a preset value.

Preferably, the inner and outer odor detectors further detect the odor of the odorant contained in the noxious gas leaking to the outside.

The above object is achieved by a fire detection method applied to a scrubber apparatus for pyrolyzing noxious gas discharged from a main chamber and discharging a stabilized processing gas into the atmosphere, wherein the scrubber apparatus comprises a single body which is sealed inside and maintains a negative pressure A first step of detecting an odor generated due to changes in characteristics of materials constituting the component parts or the cable in the main body; A second step of detecting an odor generated on the outside of the main body due to changes in characteristics of the object due to heat; And a third step of determining a fire inside the main body based on a difference between the values sensed in the first and second steps.

Preferably, in the third step, if the value sensed in the first step is equal to or greater than a reference value, and the difference between the sensed values in the first and second steps exceeds a preset value, it is determined as a fire.

According to the above-described structure, it is possible to reliably determine the fire of the scrubber device by operating only the fire inside the scrubber device.

In addition, it is possible to detect the odor generated when the object inside the body receives heat and change the characteristics of the material by detecting the odor sensor, so that it is possible to prevent the fire or reduce the time to cope with the fire.

In addition, it is possible to detect leakage of all kinds of noxious gas leaking from the inside of the main body at a minimum cost by including an odorant in the noxious gas.

1 shows an external view of a scrubber apparatus according to an embodiment of the present invention.
2 is an internal configuration diagram.
3 is a system diagram using a scrubber device with an odor detector.
FIG. 4 is a graph showing changes in voltage values received from the internal and external odor detectors. FIG. 4 (a) shows the fire inside the body, and FIG. 4 (b) shows the fire outside the body.

It is noted that the technical terms used in the present invention are used only to describe specific embodiments and are not intended to limit the present invention. In addition, the technical terms used in the present invention should be construed in a sense generally understood by a person having ordinary skill in the art to which the present invention belongs, unless otherwise defined in the present invention, Should not be construed as interpreted or interpreted in an excessively reduced sense. In addition, when a technical term used in the present invention is an erroneous technical term that does not accurately express the concept of the present invention, it should be understood that technical terms can be understood by those skilled in the art. In addition, the general terms used in the present invention should be interpreted according to a predefined or prior context, and should not be construed as being excessively reduced.

Furthermore, the singular expressions used in the present invention include plural expressions unless the context clearly dictates otherwise. In the present invention, the terms such as " comprises " or " comprising " and the like should not be construed as encompassing various elements or various steps of the invention, Or may further include additional components or steps.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows an external view of a scrubber apparatus according to an embodiment of the present invention, and FIG. 2 shows an internal structure of the scrubber apparatus.

A main body discharge port 114 and a process gas discharge port 152 are provided on the upper surface of the single body 110 sealed inside and a control panel 118 is provided on the side surface.

The inside of the main body 110 is sealed to the extent that gas or smoke can be sucked from the outside, and the main body discharge port 114 installed on the upper surface maintains the negative pressure and becomes lower than the outside of the main body 110.

The control panel 118 is provided with an external odor sensor 190 which is merely an example and may be located anywhere outside the body 110 or alternatively at other locations adjacent to the body 110 May be installed.

The external odor sensor 190 is also a malodor detector. For example, the change in the thermal conductivity and the change in the electrical conductivity due to adsorption of odorous substances on the surface of the metal oxide semiconductor is measured by a change in resistance value generated at both ends of the platinum wire coil. The external odor detector 190 can detect the leakage of the noxious gas selectively while performing fire detection essentially outside the main body 110.

2, a grid frame 112 is formed inside the main body 110, and each component is installed in the frame 112. Although not particularly limited, a space in which the components are installed and a space in which the piping is installed So that the internal structure can be compact and well-organized.

In this embodiment, the pipe section and the component section are divided horizontally into a pipe section and a component section, and a vertically extending partition 116 is provided between them. The pipe section and the component section communicate with each other about the partition 116.

A wet tank 120 is disposed at the lowermost portion of the tank 120. A circulation pump 140 is installed on the bottom tank 120 and a drain pump 130 is installed on the side surface.

An exhaust tower 150 and a reactor 160 are connected to a top surface of the bottom tank 120 through a U-shaped branch pipe. An inlet assembly 170 is connected to an upper portion of the reactor 160. And an outlet 152 is connected to the upper part of the housing.

An internal odor detector 180 is installed on the upper part of the partition wall 116 to detect odors of noxious gas leaking from various pipes installed in the piping area and odor of noxious gas leaking from joints of respective parts of the parts area, And the odor generated when the cable is burned.

The internal odor detector 180 is also a malodor detector. For example, the change in the thermal conductivity and the change in the electrical conductivity due to adsorption of odor substances on the surface of the metal oxide semiconductor is measured by a change in resistance value occurring at both ends of the platinum wire coil.

According to this embodiment, the internal odor detector 180 can selectively detect the leakage of noxious gas while performing fire detection in the body 110.

Specifically, the internal odor detector 180 can quickly detect the occurrence of a fire in the main body 110 and cope with it.

Generally, an odor is generated due to a change in characteristics of a subject, for example, a PVC component, a heat jacket, or a cable constituting a fire before a fire occurs and smoke is generated. The internal odor detector 180 detects the odor The fire can be predicted before the smoke or flame is generated by the fire.

In other words, when the object receives heat, the characteristic of the substance changes and the smell occurs first, and when more heat is received, the smoke is generated, followed by the spark, which causes a time difference. Accordingly, when the material characteristic of the object is changed by the heat, and the odor is generated at the time when the odor is generated, the internal odor detector 180 senses the odor by the internal odor detector 180 and the response time can be reduced.

Alternatively, the internal odor detector 180 detects the odor of noxious gas leaking into the interior of the main body 110 due to corrosion of the piping, or leaking from each component or joint of the piping.

To this end, harmful gas is added to the odorant during production to provide odor. Here, the noxious gas means an explosive gas, a flammable gas, or a corrosive gas among the 250 kinds of gases used in the semiconductor manufacturing process, and a gas having a fatal influence on the human body.

Since the internal odor detector 180 detects the odor of any kind of noxious gas contained in the noxious gas, it is not necessary to provide different gas detectors depending on the type of noxious gas, And has the advantage that the management is simple and easy.

Since the inside of the main body 110 remains closed even if noxious gas leaks into the main body 110, the leakage of the noxious gas occurs quickly, It is possible to cope with the problem, and the body of the external worker is not adversely affected. Particularly, by providing a main body discharge port 114 communicating with the inside of the main body 110 and connecting a separate piping to the main body discharge port 114, the noxious gas remaining in the main body 110 can be quickly removed by the exhaust pump, It is possible to minimize leakage to the outside through other parts of the housing 110.

3 is a system diagram using a scrubber device with an odor detector.

When NH 3 , PH 3 , F 2 , Cl 2 , HF 3 or the like which is used in the main chamber (not shown) through the deposition or etching process flows into the reactor 160 through the inlet assembly 170, The treated water is collected in the tank 120 and purified. The treated gas passes through the exhaust tower 150 and is discharged to the outside through the gas outlet 152.

In this process, the connection portion between the main body 110 and the external piping or between the piping connecting the component parts such as the inlet assembly 170, the reactor 160, and the bottom tank 120 within the main body 110 When the noxious gas leaks from the connection portion of the main body 110 or the noxious gas leaks due to the corrosion of the pipeline itself, the external odor detector 190 installed outside the main body 110 or the internal odor detector 180 installed therein may leak Detects the odor of the odorant contained in the harmful gas.

When a fire occurs inside or outside the main body 110, the internal odor detector 180 and the external odor detector 190 sense odors, respectively, Determine if it is a fire.

In the case of the internal odor detector 180, when a fire occurs in a PVC component, a heat jacket, or a cable disposed inside the body 110 due to high heat, To detect the odor generated by the water.

Here, a reference value for the occurrence of the leakage of the noxious gas or the occurrence of the fire in the constant voltage value range by the internal odor detector 180 can be set.

Likewise, the external odor detector 190 also detects the odor generated by the change of the characteristic of the object against the fire of the object outside the main body 110.

The control unit 220 receives detection signals (voltage values) from the internal odor sensor 180 and the external odor sensor 190 to determine the type of fire.

FIG. 4 is a graph showing changes in voltage values received from the internal and external odor detectors. FIG. 4 (a) shows a fire inside the body, and FIG. 4 (b) shows a fire outside the body.

For convenience of explanation, it is assumed that a reference value for determining that a fire has occurred from the voltage value received from the internal odor detector 180 is 800 mV, and a difference between the sensed voltage values from the internal odor detector 180 and the external odor sensor 190 It is assumed that the alarm is notified when it is 200 mV or more, and the alarm is generated when it is 400 mV or more.

In the graph, the X axis represents the time and the Y axis represents the signal value sensed by the odor detectors 180 and 190, for example, the voltage value.

Basically, when the voltage value received from the internal odor detector 180 does not exceed the reference value, the control unit 220 determines that no fire has occurred in the main body 110.

If the voltage value received from the internal odor detector 180 exceeds the reference value and the difference between the voltage value received from the external odor detector 190 and a predetermined value or more is present, .

4A, when the voltage value received from the internal odor detector 180 exceeds a reference value, that is, 800 mV, the difference between the voltage values received from the internal and external odor detectors 180 and 190 It is determined that there is a high possibility that a fire has occurred in the main body 110 because of exceeding 200 mV.

It is determined that a fire has occurred in the main body 110 at a time point T2 when the difference between the voltage values received from the internal and external odor detectors 180 and 190 exceeds 400 mV.

On the other hand, if the voltage value received from the internal odor detector 180 exceeds the reference value but does not show a difference from the voltage value received from the external odor detector 190 by more than a preset value, It is judged that a fire has occurred.

4 (b), when the voltage value received from the internal odor detector 180 exceeds a reference value, that is, 800 mV, the difference between the voltage values received from the internal and external odor detectors 180 and 190 It is judged that there is a high possibility that a fire has occurred outside the main body 110 because there is no exceeding 200 mV.

The control unit 220 transmits the determination result to the management server 200 through the wired or wireless network, for example, the internal network 210 to which the LAN or WiFi is applied.

The management server 200 may be installed in the central monitoring control room, receives the determination result from the control unit 220 of each scrubber device 100 and notifies the predetermined countermeasure method. For example, Or to issue an evacuation command, for example.

At this time, the management server 200 can perform different countermeasures according to the determination result of the control unit. For example, as shown in FIG. 4 (a), at the time point T1, At time T2, it is determined that a fire has occurred and an alarm can be generated.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or essential characteristics thereof. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100: scrubber device
110:
112: grid frame
114: Body outlet
116:
120:
130: Drain pump
140: circulation pump
150: Exhaust Tower
160: reactor
170: inlet assembly
180: Internal odor detector
190: External odor detector
200: management server
210: Network
220:

Claims (6)

1. A scrubber apparatus for pyrolyzing noxious gas discharged from a main chamber and discharging a stabilized process gas into the atmosphere,
A single body which is sealed inside and which maintains a negative pressure,
An internal odor sensor installed inside the main body to detect an odor generated due to a change in characteristics of a component constituting the main body or a material constituting the cable;
An external odor sensor installed outside the main body to detect an odor generated due to changes in characteristics of the object due to heat; And
And a controller for determining that a fire is caused when the value detected by the internal odor detector is equal to or greater than a reference value and the difference between the values detected by the internal and external odor detectors exceeds a preset value. Improved scrubber device. In claim 1,
And a main discharge port communicating with the inside of the main body is installed on an upper portion of the main body. delete In claim 1,
Wherein the internal and external odor sensor further detects the odor of the odorant contained in the toxic gas leaking to the outside. A fire detection method applied to a scrubber apparatus for thermally decomposing noxious gas discharged from a main chamber and discharging a stabilized process gas into the atmosphere,
Wherein the scrubber device has a single body that is sealed inside and maintains a negative pressure,
A first step of detecting an odor generated due to a change in characteristics of a material constituting the component parts or the cable in the main body;
A second step of detecting an odor generated on the outside of the main body due to changes in characteristics of the object due to heat; And
And a third step of judging the fire as a fire if the sensed value in the first step is equal to or greater than a reference value and the difference between the sensed values in the first and second steps exceeds a preset value, Fire detection method.
delete
KR1020160003372A 2016-01-11 2016-01-11 Scrubber apparatus capable for detecting fire inside housing KR101793705B1 (en)

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KR101793705B1 true KR101793705B1 (en) 2017-11-03

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Publication number Priority date Publication date Assignee Title
KR102080811B1 (en) * 2019-10-31 2020-05-26 주식회사 한국이알이시 Photovoltaic junction box with fire complex sensing function and control method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200374862Y1 (en) * 1999-01-27 2005-02-04 동부아남반도체 주식회사 Modural gas pump scrubber
KR100704317B1 (en) * 2006-12-22 2007-04-09 금성제어기 주식회사 An early sensing apparatus and method for the abnormal generation of heat of motor control center
KR101534534B1 (en) * 2015-03-02 2015-07-08 주식회사 유니온이엔지 Movable complex scrubber

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200374862Y1 (en) * 1999-01-27 2005-02-04 동부아남반도체 주식회사 Modural gas pump scrubber
KR100704317B1 (en) * 2006-12-22 2007-04-09 금성제어기 주식회사 An early sensing apparatus and method for the abnormal generation of heat of motor control center
KR101534534B1 (en) * 2015-03-02 2015-07-08 주식회사 유니온이엔지 Movable complex scrubber

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