KR101787387B1 - Measuring Device Of Pattern Shape and Print Characteristics Using Printing Process - Google Patents

Abstract

An apparatus for measuring a pattern shape and a printability using a printing process according to the present invention includes a photographing unit for photographing an area to be inspected of a printed matter printed on a substrate in an enlarged manner and a print image obtained by imaging the outline of the taken print along a longitudinal direction An edge line unit for displaying a center line formed in the longitudinal direction inside the print image so as to present a reference of an angle formed by the print image on the Cartesian coordinates, a revision unit for correcting the center line in the vertical direction, And a reading unit for reading a width value between the center line and the print image.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus for measuring pattern shape and printability using a printing process,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a pattern shape and printing property measuring apparatus using a printing process, and more particularly to a pattern shape and printing property measuring apparatus using a printing process capable of grasping a pattern shape and a printing property of a printed matter printed on a circuit board .

A printed circuit board (PCB) is formed by applying a copper foil on a substrate made of a material such as a paper-phenol resin or a glass-epoxy resin, printing the required circuit, (Etching), and the like, components such as ICs are attached on the circuit by soldering.

2. Description of the Related Art Generally, a printed matter inspection apparatus to be printed on a printed circuit board is a device for detecting the presence or absence of a defect in a printed matter. Even if a defect occurs in a normal print pattern of a printer, a numerical value such as a width value of the generated print pattern is accurately measured There was a problem that can not be done.

Therefore, a method for solving such a problem is required.

SUMMARY OF THE INVENTION The present invention is conceived to solve the problems of the prior art described above, and it is an object of the present invention to provide a method of manufacturing a semiconductor device, which is capable of obtaining a width between a center line and an internal tangent line and a width between the internal tangent line and an external tangent line, The present invention provides a pattern shape and printing property measuring apparatus using a printing process which can accurately determine whether or not a pattern is formed.

The problems of the present application are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided an apparatus for measuring a pattern shape and a printability using a printing process, comprising: a photographing unit that photographs an area to be inspected of a printed matter printed on a substrate in an enlarged manner; An edge line unit for displaying a center line formed in the longitudinal direction inside the print image so as to be able to present a reference of an angle formed by the print image on the Cartesian coordinates, And a reading unit for reading the width value between the center line and the print image.

An edge line unit for detecting a minimum peak point of the print image located at a minimum distance from the center line and deriving an internal tangent line parallel to the center line along the length direction of the print image from the minimum peak point, And an outer edge line portion for deriving an outer tangent line parallel to the center line along the length direction of the print image from the maximum peak point by sensing the maximum peak point of the print image located at the maximum interval from the maximum peak point.

The reading unit may include a first reading unit for deriving the width value of the internal tangent line and the width value of the external tangent line while the revision unit corrects the center line in the vertical direction.

The reading unit may include a second reading unit for deriving the maximum width value and the minimum width value of the print image in a state in which the revision unit corrects the center line in the vertical direction.

The reading unit may include a third reading unit for deriving the width between the center line and the internal tangent line and the width between the internal tangent line and the external tangent line while the revision unit corrects the center line in the vertical direction.

The reading unit may include a measuring unit for plotting a pattern of a width value varying in the length direction of the print image within a range of a maximum width value and a minimum width value derived by the second reading unit.

Either the image unit, the edge line unit, or the revision unit may include a reference sensor that presents a reference of the angle formed by the inner tangent line, the outer tangent line, and the center line on the Cartesian coordinates derived from the print image.

The pattern shape and printability measuring apparatus using the printing process according to the present invention for solving the above problems have the following effects.

The present invention has an advantage in that the width between the center line and the inner tangent line and the width between the inner tangent line and the outer tangent line are derived,

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

The foregoing summary, as well as the detailed description of the embodiments of the present application set forth below, may be better understood when read in conjunction with the appended drawings. Embodiments are shown in the figures for purposes of illustrating the present application. It should be understood, however, that the present application is not limited to the precise arrangements and instrumentalities shown
FIG. 1 is a view showing a use state of a pattern shape and printability measuring apparatus using a printing process according to a first embodiment of the present invention; FIG.
FIGS. 2 to 3 illustrate a process of deriving an internal tangent line and an external tangent line of a print pattern to be printed;
FIG. 4 is a graph comparing the characteristics of the print pattern measured by the conventional technique and the characteristics of the printed pattern measured by the present invention; FIG.
FIG. 5 is a diagram illustrating a pattern of a width value depending on a length direction of a print image; FIG.
FIG. 6 is a diagram showing a configuration of a pattern shape and printability measuring apparatus using a printing process according to the first embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted. Further, in describing the embodiments of the present invention, the configuration shown in the drawings is only an example for facilitating understanding of the detailed description, and the configuration thereof may be various without limitation, thereby indicating that the scope of the right is not limited .

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus capable of measuring characteristics such as a width value of a printed matter printed on a circuit board, And applying the numerical value to an evaluation index to use as a reference data for determining a defective rate occurring in printing a printed matter.

Referring to Figures 1 and 2-a,

The printed matter 10 printed on the circuit board can be printed in various directions such as a horizontal direction, a vertical direction, a diagonal direction, or an irregular slanting direction.

The photographing unit 200 enlarges and photographs the inspection subject area 80 of the printed matter 10 to be inspected in the printed matter 10 printed on the circuit board.

2 (a) shows a form of the printed matter 10 obtained by enlarging and photographing the printed matter 10 actually printed.

Since the printed matter 10 to be printed on the circuit board generally has a fine width of 30 mu m to 100 mu m, it is preferable that the photographing unit 200 having a high magnification and high resolution is used for enlarging and photographing the printed matter 10. [

Although the printed pattern may be a slender line by design, when the actual printed printed matter 10 is enlarged, the outline 100 has a rugged shape as shown in the figure.

Referring to Figures 2-b and 6,

The image unit 300 is connected to the photographing unit 200 and derives the print image 100 in which the outline of the enlarged and photographed printed matter 10 is imaged along the longitudinal direction. As will be described later, the minimum width value, the maximum width value, and the like of the imaged print image 100 are derived.

Referring to Figures 3 and 6,

The edge line unit 400 includes a predetermined design centerline C formed in the longitudinal direction inside the print image 100 to provide a reference of the angle formed by the print image 100 on the Cartesian coordinates ).

The edge line unit 400 includes an inner edge line 410 extending along the longitudinal direction of the imaged print image 100 to derive an inner tangent line I corresponding to a minimum width value of the print image 100, ) Portion 410 and an outer edge line portion 420 for deriving an outer tangent line O corresponding to the maximum width value of the print image 100.

Referring to Figures 3-a and 6,

The inner edge line unit 410 of the edge line unit 400 senses the minimum peak points P1 and P2 of the print image 100 located at the minimum distance from the center line C and detects the minimum peak points P1 and P2, (I) parallel to the center line (C) along the longitudinal direction of the print image (100).

That is, the minimum peak points P1 and P2 protruding most inward in each of the left print image 100 and the right print image 100 are detected, and the print 10 is detected based on the minimum peak points P1 and P2. (I) parallel to the center line (C) in a straight line along the longitudinal direction of the center line (C).

The outer edge line unit 420 of the edge line unit 400 senses the maximum peak points Q1 and Q2 of the print image 100 located at the maximum interval from the center line C and detects the maximum peak points Q1 and Q2, Q2 parallel to the center line C along the longitudinal direction of the print image 100. [

That is, the maximum peak points Q1 and Q2 protruding most outward in each of the left print image 100 and the right print image 100 are sensed, and the print 10 is sensed based on the maximum peak points Q1 and Q2. And an outer tangent line O parallel to the center line C in a straight line along the longitudinal direction of the center line C is derived.

Referring to Figures 3-b and 6,

The revision unit 500 corrects the center line C in the vertical direction on the Cartesian coordinates together with the non-printing support 100. In the embodiment shown in FIG. 3, the center line C may be rotated clockwise by an angle of 90.degree. -. As a result, the center line C of the print image 100 is positioned in a precisely vertical direction on the rectangular coordinate.

2 to 4,

An image unit 300 for imaging the print image 100 of the printed matter 10 and an edge line unit 400 for deriving the internal tangent line I and the external tangent line O, The revision unit 500 includes a reference sensor 800 for presenting a reference point of an angle represented by the print image 100 of the printed matter 10 in the Cartesian coordinates.

Referring to Figures 3-b and 6,

The shape of the print image 100 in which the revision unit 500 corrects the center line C is shown on the Cartesian coordinates and the print image 100 is printed on the print 10, The width value of the light source 100, and the like.

The reading unit 600 includes a first reading unit 610, a second reading unit 620, a third reading unit 630, and a measuring unit 640.

The third reading unit 630 of the reading unit 600 determines the width M1 between the center line C and the inner tangent line I in the state in which the revision unit 500 corrects the center line C in the vertical direction, The width M2 between the inner tangent line I and the outer tangent line O is derived.

On the design drawing, it is desired to print the print such that the longitudinal direction of the print image 100 is exactly parallel to the center line b direction, as shown in Fig. 4-a.

However, when the printed matter 10 is actually printed, the printed image 100 appears slightly inclined with respect to the center line C as shown in Fig. 3-b, that is, a manufacturing malfunction may occur .

The width M1 between the center line C and the inner tangent line I and the width between the inner tangent line I and the outer tangent line O can be obtained by correcting the center line C in the vertical direction, (M2), it is possible to grasp the degree of defect of the manufacturing process to a certain extent through the width values (M1, M2).

Referring to Figures 3-b and 6,

The first reading unit 610 of the reading unit 600 derives the width value L of the inner tangent line I and the width value H of the outer tangent line O. The second reading unit 620 reads the width value L The minimum width value R1 and the maximum width value R2 of the printed matter 10 are derived. The numerical value is used as data to be substituted into the printability evaluation index to be described later.

4A shows a form of a print image obtained by correcting the center line b in the vertical direction according to the prior art. Fig. 4B is a view similar to Fig. 3, There is shown a form of the print image 100 in which the center line C is corrected in the vertical direction through the pattern shape and printability measuring device.

Referring to Figure 4-a,

The prior art first displays the inner tangent line i and the outer tangent line e from the minimum peak and the maximum peak point of the print image and derives the center line b from the inner tangent line i. The derived center line (b) is inclined by? 'On the horizontal plane. Therefore, if the center line b is rotated by 90 -? 'In the vertical direction and then is drawn, the distance between the center line b and the inner tangent line i and the distance between the inner tangent line i and the outer tangent line e become m1, m2. That is, when a print image in which a failure occurs is measured by a conventional technique, the distance between the center line b and the inner tangent line i and the distance between the inner tangent line i and the outer tangent line e are represented by m1 and m2, respectively . In addition, the minimum and maximum width values of the print image are represented by r1 and r2, respectively, and the width between the inner tangent lines is denoted by l and the width between the outer tangent lines is denoted by h.

The numerical values (r1, r2, l, h, m1, m2) measured by the above-described prior art are calculated by using the pattern shape and the printability measuring apparatus using the printing process according to the present invention shown in FIG. The width M2 between the inner tangent I and the outer tangent O and the width value L of the inner tangent I and the width M1 of the outer tangent I There is a difference from the width value (H), the minimum width value (R1) and the maximum width value (R2).

That is, the present invention can measure accurate numerical values (R1, R2, L, H, M1, M2) differently from the prior art.

Referring to Figure 3-b and Figure 5,

The measuring unit 640 may calculate the width of the printed image 100 in the range of the maximum width R2 and the minimum width R1 derived by the second reading unit 620, .

The y-axis corresponding to the longitudinal direction of the print image 100 shown in Fig. 3-b corresponds to the horizontal axis y in Fig.

5 is a graph of a variation pattern of the width value f (y) of the print image 100 with respect to the horizontal axis y corresponding to the longitudinal direction of the print image 100. As shown in FIG.

5, it is also possible to measure the maximum width value R2 and the minimum width value R1 of the print image 100 and to calculate the print image 100 through the sum of the width values f (y) It is also possible to measure the average width value of the image 100. [ In one example, the sum of the width values f (y) of the respective points is obtained at n points on the horizontal axis y, and the total width is divided by n to calculate the average width value of the print image.

The above numerical values are used as data to be assigned to the printability evaluation index prescribed by the International Electronical Committee (IEC), which is an international electrical conference described below.

The printability evaluation index is as follows.

(b) the minimum width value (R1) of the printed material; (c) the maximum width value (R2) of the printed material; and (d) the internal tangent (I) And the width value (H) of the outer tangent line (O) is substituted for the item (e).

f) item is the deviation value for the print width value, g) item is the average value between the peaks, and h) item is the average value of the deviation.

As a result, the accurate numerical values (R1, R2, L, H, M1, and M2) measured by the pattern shape and printability measuring apparatus using the printing process according to the present invention are compared with the printing evaluation indexes a) It is possible to obtain an accurate result value differently from the prior art.

It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. It is obvious to them. Therefore, the above-described embodiments are to be considered as illustrative rather than restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof.

10: Printed matter 80: Area to be inspected
100: print image 200: photographing unit
300: image unit 400: edge line unit
410: Inner edge line part 420: Outer edge line part
500: Revision unit 600: Reading unit
610: first reading section 620: second reading section
630: Third reading section 640: Measuring section
700: Defect part 800: Reference sensor
C: center line P1, P2: minimum peak point
Q1, Q2: Maximum peak point I: Internal tangent
O: external tangent L: internal tangential interval
H: outer tangential spacing R1: print minimum width value
R2: print maximum width value M1: center line and internal tangent width value
M2: Width value of internal tangent and external tangent

Claims (7)

An image pickup unit for enlarging and photographing a region to be inspected of a printed matter printed on a substrate;
An image unit for deriving a print image obtained by imaging an outline of the photographed printed matter along a longitudinal direction;
An edge line unit for injecting and displaying a predetermined design centerline formed in the longitudinal direction inside the print image so as to present a reference of an angle formed by the print image on the Cartesian coordinates;
A revision unit for correcting the center line in the vertical direction; And
A reading unit for reading a width value between the center line and the print image;
/ RTI >
The edge line unit
An inner edge line portion extending from the minimum peak point to an inner tangent line extending along the longitudinal direction of the print image and parallel to the center line by detecting a minimum peak point of the print image located at a minimum distance from the center line, And an outer edge line portion that detects an uppermost peak point of the print image located and derives an outer tangent line parallel to the center line along the length direction of the print image from the maximum peak point,
The reading unit
And a first reading unit for deriving a width value of the internal tangent line and a width value of the external tangent line while the revision unit corrects the center line in the vertical direction. delete delete The method according to claim 1,
The reading unit
In a state in which the revision unit corrects the center line in the vertical direction,
And a second reading unit for deriving a maximum width value and a minimum width value of the print image. The method according to claim 1,
The reading unit
In a state in which the revision unit corrects the center line in the vertical direction,
And a third reading unit for deriving a width between the center line and the internal tangent line and a width between the internal tangent line and the external tangent line. 5. The method of claim 4,
The reading unit
And a measuring unit for plotting a pattern of a width value varying in a length direction of the print image within a range of a maximum width value and a minimum width value derived by the second reading unit, Measuring device. The method according to claim 1,
One of the image unit, the edge line unit and the revision unit
And a reference sensor for presenting a reference of an angle formed by the internal tangent line, the external tangent line and the center line derived from the print image on the Cartesian coordinates.

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