KR101784669B1 - Multi layer depositon method based roll to roll - Google Patents

Multi layer depositon method based roll to roll Download PDF

Info

Publication number
KR101784669B1
KR101784669B1 KR1020160004317A KR20160004317A KR101784669B1 KR 101784669 B1 KR101784669 B1 KR 101784669B1 KR 1020160004317 A KR1020160004317 A KR 1020160004317A KR 20160004317 A KR20160004317 A KR 20160004317A KR 101784669 B1 KR101784669 B1 KR 101784669B1
Authority
KR
South Korea
Prior art keywords
unit
web
ehd
turned
ald
Prior art date
Application number
KR1020160004317A
Other languages
Korean (ko)
Other versions
KR20170084906A (en
Inventor
최경현
카므란
양봉수
Original Assignee
제주대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제주대학교 산학협력단 filed Critical 제주대학교 산학협력단
Priority to KR1020160004317A priority Critical patent/KR101784669B1/en
Publication of KR20170084906A publication Critical patent/KR20170084906A/en
Application granted granted Critical
Publication of KR101784669B1 publication Critical patent/KR101784669B1/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50—Multilayers
    • B05D7/56—Three layers or more
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/0255—Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/007—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Abstract

The present invention provides a method for multilayer deposition of a specific material on a film comprising a pair of EHDA units on a web moving between an unwinding roll and a winding roll and an ALD unit disposed therebetween, The EHDA unit and the ALD unit laminate multiple layers of a specific material while moving back and forth between the winding rolls, thereby facilitating mass production, facilitating adjustment of the lamination thickness, and reducing the manufacturing cost. Layer lamination method.

Description

[0001] MULTILAYER DEPOSITON METHOD BASED ROLL TO ROLL [0002]

The present invention provides a method for multilayer deposition of a specific material on a film comprising a pair of EHDA units on a web moving between an unwinding roll and a winding roll and an ALD unit disposed therebetween, The EHDA unit and the ALD unit laminate multiple layers of a specific material while moving back and forth between the winding rolls, thereby facilitating mass production, facilitating adjustment of the lamination thickness, and reducing the manufacturing cost. Layer lamination method.

In general, various configurations are used to laminate a specific material on a film. For example, a technique using an electrohydrodynamic atomization unit (EHDA) has been proposed.

The technique using this EHDA unit is to apply a high voltage to the capillary containing the spraying solution to form an electric field of a high voltage difference between the capillary and the substrate which is installed apart from the capillary so as to inject the ultra-fine tenant having a high load from the tip of the capillary .

With such an EHDA unit, a specific material can be laminated on a film in the form of a thin film.

Further, a technique using an atomic layer deposition (ALD) unit to laminate a specific material on the film has also been proposed.

Such an ALD unit is a special chemical deposition method based on sequential introduction of at least two reactive precursors into at least one substrate, whereby the laminated thin films are dense, have no pinhole, and have a uniform thickness.

However, the above-described stacking techniques have the following problems.

First, in the case of the above-described lamination techniques, mass production is difficult and it is difficult to adjust the lamination thickness.

Second, in the case of the conventional ALD unit, a specific pressure is applied to the inside of the ALD unit.

On the other hand, the above-described lamination technique itself is widely known and is described in detail in the following prior art documents, and a description thereof will be omitted.

Korean Patent No. 10-0394371 Korean Patent Publication No. 10-2015-0023016

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide an EW apparatus comprising a pair of EHDA units on a web reciprocating between an unwinding roll and a winding roll and an ALD unit disposed therebetween, The EHDA unit and the ALD unit laminate a multilayer of a specific material while moving back and forth between the winding rolls, thereby facilitating mass production, facilitating adjustment of the thickness of the lamination, and reducing manufacturing costs. It is an object of the present invention to provide a lamination apparatus.

However, the object of the present invention is not limited to the above-mentioned object, and another object which is not mentioned can be clearly understood by those skilled in the art from the following description.

The EHDA unit 300 includes a pair of EHDA units 300 spaced apart from each other on a web W moved between an unwinding roll R1 and a winding roll R2, (300) and an ALD unit (400) disposed between the EWDA unit (300) and the ALD unit (400) while the web (W) moves back and forth between the unwinding roll 400 based on a roll-to-roll basis in which a plurality of layers of a specific material are laminated.

The EHDA unit 300 includes a first EHDU unit 300-1 disposed on the uncoiling roll R1 side and a second EHDU unit 300-2 disposed on the winding roll R2 side, The first EHD unit 300-1 includes a first hardener 320A disposed on the uncoiling roll R1 side of the first EHD part 330-1 and the first EHD part 330-1, And the second hardening portion 340B disposed on the second hardening portion R2 side of the second hardening portion 300-2 and the second hardening portion 340B disposed on the second hardening portion 340B, And the second hardened portion 340D disposed on the side of the winding roll R2 so that the first hardened portion 330-1 or the second hardened portion 330- 2 may be cured by the first curing portions 320A and 320C or the second curing portions 340B and 340D.

The first EHD part 330-1 is turned on while the first hardened part 320A of the first EHD part 330-1 is turned off and the second hardened part 340B is turned on, W is advanced from the unwinding roll R1 to the winding roll R2 side so that the web W is firstly laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B, The cured web W is secondarily stacked after being passed through the ALD unit 400 and wound around the winding roll R2 so that the first and second EHD parts 330-1 and 330-2 are turned off and the second EHD part 330- 2 is turned on while the first hardened portion 320C of the second EHD part 330-2 is turned on and the second hardened portion 340D is turned off so that the web W is lifted from the winding roll R2 The web W is thirdly laminated in the second EHDa 330-2 and then hardened in the first hardened portion 320C so that the hardened web W is transferred to the ALD unit (400) and then laminated fourtharily.

The first and second hardening units 320-1 and 330-2 are turned on so that the first hardening unit 320A of the first hardening unit 330-1 is turned off and the second hardening unit 340B Is turned on and the web W is wound on the unwinding roll R1 in the state where the first hardened portion 320C of the second EHD part 330-2 is turned OFF and the second hardened portion 340D is turned ON The web W advances to the winding roll R2 side so that the web W is firstly laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B and the web W is hardened in the ALD unit 400. The web W is thirdarily laminated in the second EHD part 330-2 and then hardened in the second hardened part 340D and the first hardened part 330-1 The second hardening unit 320A is turned on and the second hardening unit 340B is turned off and the second hardening unit 330A is turned on and the second hardening unit 330A is turned on, The web W is moved back from the winding roll R2 to the unwinding roll R1 side while the first hardened portion 320C of the second hardened portion 320C is turned ON and the second hardened portion 340D is OFF, The web (W) And then the web W is laminated fiftharily through the ALD unit 400. The first and second ELD units 330 and 330 are sequentially stacked in the DA unit 330-2 and then cured in the first hardened unit 320C, -1), and then cured in the first curing unit 340A.

The ALD unit 400 includes an ALD chamber 410 through which the web W enters and exits and an atmospheric pressure environment is formed therein. The ALD chamber 400 is disposed inside the ALD chamber 410 on both sides of the traveling direction of the web W A plurality of idle rollers (IR) arranged in the height direction of the ALD chamber 410 to move the web W; A first precursor chamber 430 for applying a first precursor to the web W and a second precursor chamber 430 for applying a second precursor to the web W. The inert gas chamber 420 applies an inert gas to the web W, A slit S is formed on both sides of the chambers 420 and 430 and a part of the chambers 420 is opened to allow the web W to pass through the chambers 420, 430 and 440, It is also possible that the first precursor or the second precursor is applied.

An inorganic material is discharged by the ALD unit 400 and stacked on the web W. In the EHDA unit on at least one side of the pair of EHDA units 300, Or the like.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to that, terms and words used in the present specification and claims should not be construed in a conventional and dictionary sense, and the inventor may properly define the concept of the term in order to best explain its invention It should be construed as meaning and concept consistent with the technical idea of the present invention.

According to the present invention, it is possible to easily mass-produce a laminated film of a plurality of layers, to easily adjust the thickness of the laminated layers, and to simplify facilities and reduce manufacturing costs.

1 is a schematic view showing a laminating apparatus according to an embodiment of the present invention,
2 is a schematic view showing an ALD unit among the stacking apparatuses according to one embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

In addition, the following embodiments are not intended to limit the scope of the present invention, but merely as exemplifications of the constituent elements set forth in the claims of the present invention, and are included in technical ideas throughout the specification of the present invention, Embodiments that include components replaceable as equivalents in the elements may be included within the scope of the present invention.

FIG. 1 is a schematic view showing a stacking apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing an ALD unit of a stacking apparatus according to an embodiment of the present invention.

Example

First, the laminating apparatus 10 capable of embodying the method of the present invention will be described. As shown in FIG. 1, the laminating apparatus 10 includes a web moving between an unwinding roll R1 and a winding roll R2, (W). ≪ / RTI >

A pair of EHDA units 300 disposed on the web W and spaced apart from each other at a predetermined interval and an ALD unit 400 disposed between the EHDA unit 300 are provided.

That is, the web W is unwound from the unwinding roll R1 and is wound while being wound on the winding roll R2, and a pair of EHDA units 300 are disposed on the web W. On the other hand, The ALD unit 400 is disposed between the pair of EHDA units 300.

Such a device 10 allows the web W to reciprocate between the unwinding roll Rl and the winding roll R2 while the EHDA unit 300 and the ALD unit 400 form a multi- .

That is, if it is defined that the movement of the web W in the direction from the unwinding roll R1 to the side of the winding roll R2 is referred to as forward movement and the movement in the opposite direction is referred to as backward movement, A plurality of layers of a specific material are laminated by the EHDA unit 300 and the ALD unit 400 while moving back and forth between a roll R1 and a winding roll R2. .

Further, the thickness of the thin film to be laminated can be easily adjusted by adjusting the moving speed of the web W.

As described above, the ALD unit 400 is disposed between the pair of EHDA units 300. At this time, the ALD unit 400 may be configured to stack a specific material on the web W in an atmospheric pressure environment It is possible.

In other words, conventionally, since the specific pressure is applied to the inside of the ALD unit as described above, complicated equipment is required to maintain the pressure, thus increasing manufacturing costs.

The present invention solves this problem, and it is possible to simplify the facility by making the inside of the ALD unit 400 at atmospheric pressure, thereby saving manufacturing cost.

Meanwhile, the EHDA unit 300 includes a first EHDU unit 300-1 and a second EHDU unit 300-2 as shown, and may have the same configuration.

More specifically, the first EHD unit 300-1 includes a first hardener 320A disposed on the uncoiling roll R1 side of the first EHD part 330-1 and the first EHD part 330-1, And a second hardened portion 340B disposed on the winding roll R2 side.

The second EHDU unit 300-2 includes a first hardened portion 320C disposed on the unwinding roll R1 side of the second EHD portion 330-2 and the second EHD portion 330-2, And a second hardened portion 340D disposed on the roll R2 side.

At this time, the material stacked by the first EHD part 330-1 or the second EHD part 330-2 is hardened by the first hardened parts 320A and 320C or the second hardened parts 340B and 340D .

Meanwhile, since the EHDA unit 330 itself is a well-known configuration, detailed description and explanation are omitted.

Also, UV lamps may be used for the first curing units 320A and 320C and the second curing units 340B and 340D, and since they are well known in the art, detailed description and illustration are omitted.

Hereinafter, a method of stacking using the above-described apparatus will be described.

First, the first EHD part 330-1 is turned on and the first hardened part 320A of the first EHD part 330-1 is turned off and the second hardened part 340B is turned on, W) from the unwinding roll R1 to the winding roll R2 side.

In this case, the web W is first laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B.

Thereafter, the cured web W passes through the ALD unit 400 to be secondarily laminated and wound on the winding roll R2.

That is, the first EHD part 330-1 performs a first laminating process and the second laminating process is performed in the ALD unit 400, so that two different materials are stacked as a whole.

Thereafter, the first and second hardening units 320-1 and 330-2 are turned on and the first hardening unit 320C of the second hardening unit 330-2 is turned on and the second hardening unit 330-2 is turned on. 340D move the web W back from the winding roll R2 to the unwinding roll R1 side in the OFF state.

At this time, the web W is thirdarily laminated in the second EHDAS 330-2 and then hardened in the first hardened portion 320C.

Further, the cured web W is laminated fourtharily through the ALD unit 400. [

As a result, according to the method of the present invention, two kinds of materials are stacked in total as four layers.

As described above, one of the first and second EHD parts 330-1 and 330-2 can be stacked in a state in which the first EHD part 330-1 and the second EHD part 330-2 are turned on, It is also possible to stack them in a state in which the part 330-2 is turned on.

That is, the first and second hardening units 330-1 and 330-2 are turned on so that the first hardening unit 320A of the first hardening unit 330-1 is turned off and the second hardening unit 340B Is turned on and the web W is wound on the unwinding roll R1 in the state where the first hardened portion 320C of the second EHD part 330-2 is turned OFF and the second hardened portion 340D is turned ON To advance to the winding roll R2 side.

At this time, the web W is first laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B, and the web W passes through the ALD unit 400, Respectively.

Further, the web W is thirdarily laminated in the second EHD part 330-2 and then hardened in the second hardened part 340D.

Thereafter, the first and second hardening units 330-1 and 330-2 are turned on so that the first hardening unit 320A of the first hardening unit 330-1 is turned on and the second hardening unit 340B Is turned OFF and the web W is lifted from the winding roll R2 in the state in which the first hardened portion 320C of the second EHD part 330-2 is turned ON and the second hardened portion 340D is OFF And is caused to move back to the winding roll R1 side.

At this time, the web W is laminated fourtharily in the second EHD part 330-2 and cured in the first curing part 320C.

In particular, since the web W is advanced, the third material is laminated in the second EHD part 330-2, and then the fourth material is laminated in the second EHD part 330-2.

With this configuration, the thickness of a specific material layer can be more easily adjusted.

Meanwhile, after the web W is fourtharily laminated in the second EHD part 330-2, the web W is stacked fifth through the ALD unit 400, and the sixth web laminate And hardened in the first hardened portion 340A.

Thus, according to the present invention, a six-layer lamination is performed. Of course, if this invention is carried out a number of times, more layers can be easily stacked.

Meanwhile, the ALD unit 400 may be disposed between a pair of EHDA units 300, as shown in FIG. 2, wherein the ALD unit 400 is configured to apply a specific substance on the web W It is also possible to stack them.

For this purpose, the ALD unit 400 is driven in the atmospheric pressure environment as described above. To this end, an atmospheric pressure environment is created therein as shown in FIG. 2, and an ALD chamber 410 in which the web W enters and exits And a plurality of idler rollers IR disposed on both sides of the ALD chamber 410 on the opposite sides of the traveling direction of the web W to move the web W in the height direction of the ALD chamber 410 .

That is, a plurality of idler rollers IR are disposed on both sides of the ALD chamber 410, and a plurality of idler rollers IR are arranged in the height direction in the drawing, and the idler roller IR moves the web W.

The inert gas chamber 420 is disposed at a portion of the movement path of the web W and applies an inert gas to the web W. The inert gas chamber 420 applies a first precursor to the web W, A precursor chamber 430 and a second precursor chamber 440 for applying a second precursor to the web W.

That is, a plurality of the inert gas chambers 420, the first precursor chambers 430, and the second precursor chambers 440 are arranged in the left-right direction in the drawing as in the embodiment shown in FIG. 2, W), the gas is applied.

Meanwhile, as described above, since the web W passes through the chambers 420, 430, and 440, slits S are formed on both sides of the chambers 420, 430, and 440 to open a portion thereof. The slit S allows the web W to pass therethrough.

In addition, a connection pipe P is installed in each of the chambers 420, 430, and 440, and various materials are introduced by the respective supply units described later.

The first precursor or the second precursor is applied to the web W by the ALD unit 400.

The inert gas chamber 420 applies an inert gas to the web W as described above. The first precursor chamber 430 applies the first precursor to the web W. The first precursor chamber 430 and the web W Wherein each gas from the inert gas chamber 420 and the first precursor chamber 430 and the second precursor chamber 440 is in contact with the first precursor chamber 440 and the second precursor chamber 440, And is discharged through a discharge portion 490 described later.

2, the plurality of inert gas chambers 420 are spaced apart from each other by a predetermined distance, and the first precursor chamber 430 and the second precursor chamber 420 are interposed between the inert gas chambers 420, (440) are arranged alternately so as to improve the discharge efficiency.

2, a depressurizing gas supply unit 460 connected to the inert gas chamber 420 to supply an inert gas, a primary precursor 460 for supplying a specific precursor to the first precursor chamber 430, It is also possible to include a supply part 470 and a secondary precursor supply part 480 for supplying another precursor to the second precursor chamber 440.

In other words, an inert gas supply unit 460 for storing and transferring the well-known nitrogen gas may be connected to the inert gas chamber 420 to supply the inert gas. For this purpose, as shown in FIG. 2, It is also possible to dispose the connecting pipe P at one point and supply the same to the first precursor supplying unit 470 and the second precursor supplying unit 480,

The supplied inert gas, the first precursor or the second precursor is discharged to the inside of the ALD chamber 410 by the slit S, and in order to discharge various gases existing in the ALD chamber 410, It is also possible to include a discharge portion 490 which communicates with the inside of the ALD chamber 410. At this time, the discharge chamber 490 can use a well-known suction pump.

According to the present invention described above, it is possible to laminate different materials more easily in the form of a thin film. At this time, the inorganic material is discharged by the ALD unit 400 to be laminated on the web W, In the EHDA unit on at least one side of the unit 300, the organic material may be discharged and laminated on the web W.

By such a constitution, a plurality of layers such as organic materials and inorganic materials can be stacked.

Particularly, the inorganic material is discharged by the ALD unit 400 and stacked on the web W. In the EHDA unit on at least one side of the pair of EHDA units 300, It is also possible to stack other materials on the substrate.

On the other hand, the web W is a kind of substrate to which a specific substance is applied, and is excellent in flexibility. The web W can be moved by the rollers by using the web W. Since the web W itself is a well-known structure, detailed description and illustration are omitted.

It is also possible to include the main chamber 100 in which the EHDA unit 300 and the ALD unit 400 are accommodated and the uncoiling roll R1 and the winding rolls R2.

At this time, it is preferable that the main chamber 100 is disconnected from the periphery so that external foreign substances do not enter the main chamber 100, and the inside of the main chamber 100 may be filled with inert gas or maintained at atmospheric pressure.

It is also possible to further include a supply chamber 200 disposed on one side of the main chamber 100 to supply a material to be applied to the web or the web.

That is, it is possible to prepare a web or a material to be applied to the web in advance in the supply chamber 200 to avoid contact with the outside, and it is also possible to prepare a glove (GV) for holding the web or the like in advance.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the same is by way of illustration and example only and is not to be construed as limiting the present invention. It is obvious that the modification or improvement is possible.

It is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

100: main chamber 200: supply chamber
300: EHDA unit 310: chamber
320: first hardening part 330: EHDA part
340: second hardening unit 400: ALD unit
410: ALD chamber 420: inert gas chamber
430: first precursor chamber 440: second precursor chamber
450: exhaust chamber 460: inert gas supply
470: Primary precursor supply unit 480: Secondary precursor supply unit
490: Discharge part IR: idler roller
S: Slit GV: Glove

Claims (6)

A pair of EHDA units 300 spaced apart from each other on a web W moved between an unwinding roll R1 and a winding roll R2 and an ALD unit 300 disposed between the EHDA unit 300 (400)
The web W is moved forward and backward between the unwinding rolls Rl and the winding rolls R2 so that the EHDA unit 300 and the ALD unit 400 stack a plurality of layers of a specific material, Laminating method. The method according to claim 1,
The EHDA unit 300 includes a first EHDU unit 300-1 disposed on the uncoiling roll R1 side and a second EHDU unit 300-2 disposed on the winding roll R2 side,
The first EHD unit 300-1 includes a first hardener 320A disposed on the uncoiling roll R1 side of the first EHD part 330-1 and the first EHD part 330-1, R2) side, and the second hardened portion 340B,
The second EHDU unit 300-2 includes a first hardened portion 320C and a second hardened portion 320C disposed on the uncoiling roll R1 side of the second EHD portion 330-2 and the second EHD portion 330-2, And a second hardened portion 340D disposed on the second hardened portion R2 side,
The material stacked by the first EHD part 330-1 or the second EHD part 330-2 is formed by the roll hardening by the first hardening parts 320A and 320C or the second hardening parts 340B and 340D, Based multi-layer deposition method. 3. The method of claim 2,
The first EHD part 330-1 is turned on while the first hardened part 320A of the first EHD part 330-1 is turned off and the second hardened part 340B is turned on, From the unwinding roll R1 to the winding roll R2 side,
The web W is first laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B,
The cured web W is secondarily laminated through the ALD unit 400 and wound on a winding roll R2,
The first hardening unit 320C of the second hardening unit 330-2 is turned on and the second hardening unit 340D is turned on while the first hardening unit 330-1 is turned off and the second hardening unit 340-2 is turned on, The web W is moved back from the winding roll R2 to the unwinding roll R1 side,
The web W is thirdarily laminated in the second EHDU 330-2 and cured in the first hardened portion 320C,
Wherein the cured webs (W) are stacked fourtharily through an ALD unit (400). 3. The method of claim 2,
The first and second hardening units 320-1 and 330-2 are turned on and the first hardening unit 320A of the first hardening unit 330-1 is turned off and the second hardening unit 340B is turned off, And the web W is wound on the winding roll R1 in the state where the first hardened portion 320C of the second EHD part 330-2 is OFF and the second hardened portion 340D is ON, (R2) side,
The web W is first laminated in the first EHD part 330-1 and then hardened in the second hardened part 340B,
The web W is secondarily laminated through the ALD unit 400,
The web W is thirdarily laminated in the second EHD part 330-2 and cured in the second curing part 340D,
The first and second hardening units 320A and 330B are turned on so that the first hardening unit 320A of the first hardening unit 330-1 is turned on and the second hardening unit 340B is turned on Winding the web W from the winding roll R2 to the unfolding roll 320 in the state where the first hardened portion 320C of the second EHD portion 330-2 is turned ON and the second hardened portion 340D is OFF, (R1) side,
The web W is laminated fourtharily in the second EHD part 330-2 and cured in the first curing part 320C,
The web W is stacked fifth by passing through the ALD unit 400,
And the first hardened portion 340A is cured after being sixtharily laminated in the first EHD portion 330-1. The method according to claim 1,
The ALD unit 400 includes an ALD chamber 410 through which the web W enters and exits and has an atmospheric pressure environment therein. The ALD chamber 400 is disposed on both sides of the web W in the ALD chamber 410, A plurality of idler rollers (IR) arranged in the height direction of the ALD chamber 410 and on which the web W is moved; A first precursor chamber 430 for applying a first precursor to the web W and a second precursor chamber 430 for applying a second precursor to the web W, 440 are formed on both sides of each of the chambers 420, 430 and 440 so that the web W passes through the chambers 420, 430 and 440,
Wherein the first precursor or the second precursor is applied to the web (W). The method according to claim 1,
An inorganic material is discharged by the ALD unit 400 to be laminated on the web W,
Wherein the organic material is discharged from the EHDA unit on at least one side of the pair of EHDA units (300) and stacked on the web (W).
KR1020160004317A 2016-01-13 2016-01-13 Multi layer depositon method based roll to roll KR101784669B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160004317A KR101784669B1 (en) 2016-01-13 2016-01-13 Multi layer depositon method based roll to roll

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160004317A KR101784669B1 (en) 2016-01-13 2016-01-13 Multi layer depositon method based roll to roll

Publications (2)

Publication Number Publication Date
KR20170084906A KR20170084906A (en) 2017-07-21
KR101784669B1 true KR101784669B1 (en) 2017-10-12

Family

ID=59462837

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160004317A KR101784669B1 (en) 2016-01-13 2016-01-13 Multi layer depositon method based roll to roll

Country Status (1)

Country Link
KR (1) KR101784669B1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020043216A1 (en) 2000-08-09 2002-04-18 Chul-Ju Hwang Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors
KR100394371B1 (en) 2000-09-22 2003-08-09 주식회사 에이스랩 Appratus for controlling static eletricity using ultra-fine particles
JP2011137208A (en) 2009-12-28 2011-07-14 Sony Corp Apparatus and method for forming film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020043216A1 (en) 2000-08-09 2002-04-18 Chul-Ju Hwang Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors
KR100394371B1 (en) 2000-09-22 2003-08-09 주식회사 에이스랩 Appratus for controlling static eletricity using ultra-fine particles
JP2011137208A (en) 2009-12-28 2011-07-14 Sony Corp Apparatus and method for forming film

Also Published As

Publication number Publication date
KR20170084906A (en) 2017-07-21

Similar Documents

Publication Publication Date Title
US20140020627A1 (en) Roll-to-roll thin film coating machine
TW201210703A (en) Double side coating device
KR101633540B1 (en) Substrate processing apparatus
KR20150015479A (en) Coating device
KR102137479B1 (en) Fence frame connection device
KR101784669B1 (en) Multi layer depositon method based roll to roll
JP2014065021A (en) Coating apparatus
CN102642313A (en) Rubber sheet lamination composite production line and sheet producing method thereof
KR102156200B1 (en) apparatus for coating the both side
KR20170084897A (en) Multi layer depositon apparatus based roll to roll
CN107949656B (en) Apparatus and method for providing a coating layer to a surface of a substrate
TWI587931B (en) Roll, film forming apparatus, and method of forming a film on a substrate
JP4760265B2 (en) Application method
US9193147B2 (en) Foil transfer device
JP4780474B2 (en) Thin film laminate manufacturing method and manufacturing apparatus
KR101639721B1 (en) Pouch layer coating device for producing polymer secondary battery
KR200205282Y1 (en) Apparatus of coating web substrate
US20230095254A1 (en) Multilayer circuit board manufacturing apparatus and multilayer circuit board manufacturing method
KR102622824B1 (en) Medical coating machine
JP2019072666A (en) Multilayer coating device
JP2013527961A (en) Method and system for manufacturing an antenna
JPWO2017014092A1 (en) Atomic layer deposition winding film forming apparatus and atomic layer deposition method
KR101626576B1 (en) Hybrid coating device having chamber type ink supply
KR20160019300A (en) Apparatus for conveying sheet
JP2020000959A5 (en)

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant