KR101766733B1 - Scrubber - Google Patents

Abstract

A scrubber is disclosed. According to an aspect of the present invention, the scrubber includes: a combustion chamber having an internal space where exhaust gas is heated and oxidized; an upper structure which is disposed on the upper side of the combustion chamber and includes a piping line for introducing the exhaust gas and a heating means for heating the internal space; an annular scraper which is arranged in the internal space and at least a part of which is in contact with the inner wall of the combustion chamber; one or more screw rods which are vertically disposed in the internal space, are supported to be rotatable with respect to the combustion chamber around a vertical axis, and move the scraper up and down by being screwed to one side of the scraper; and a driving motor which is disposed on the outer side of the combustion chamber to be separated from the upper structure and rotates the screw rod by being connected to the screw rod. Accordingly, the present invention can effectively remove powder from the inner wall of the combustion chamber.

Description

Scrubber {SCRUBBER}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a scrubber for treating exhaust gases such as semiconductor manufacturing processes.

Toxic gases such as silane, dichlorosilane, ammonia, nitric oxide, arsine, porphine, and depoline can be used in semiconductor manufacturing processes such as chemical vapor deposition and plasma etching. Therefore, harmful components such as BCl 3, Cl 2, HCl, and HF may be contained in the exhaust gas of these manufacturing processes. The scrubber is one of the facilities for purifying the exhaust gas containing harmful components before releasing it into the outside air.

The wet scrubbing method and the dry scrubbing method are widely known as methods for the scrubber to treat the exhaust gas.

In the wet treatment method, exhaust gas is brought into gas-liquid contact with water or an alkaline aqueous solution to neutralize or absorb the harmful components. A structure in which water or an alkaline aqueous solution is injected through an injection nozzle and an exhaust gas is passed through the injection region is typical. However, the wet treatment method may cause clogging of solid byproducts generated in the treatment process, and there is a limit in treating exhaust gas at a high concentration compared with the combustion method. Therefore, a wet type mixed scrubber in which a dry treatment method such as an ammonia treatment method and a wet treatment method are combined in recent years is widely used.

The dry treatment method can be further divided into the combustion type in which the exhaust gas is heated and oxidized and the adsorption type using the adsorbent.

The adsorption treatment method is a type of dry treatment method in which the exhaust gas is passed through the filled adsorbent and the harmful components are adsorbed and removed by the reaction between the harmful component and the adsorbent. This adsorption treatment method has an advantage in that the system configuration is simpler than other treatment methods, and its use and handling are facilitated. Examples of the adsorbent include an inorganic adsorbent such as alumina, slaked lime, alumina silicate, and zeolite, an impregnated inorganic adsorbent containing an activated carbon or an inorganic adsorbent as a carrier and an alkali compound or an acidic compound, a resin having an adsorption function, And impregnated activated carbon may be used. If necessary, two or more adsorbents may be used.

The combustion process is a method of pyrolyzing the harmful components by burning the exhaust gas in the combustion chamber. The combustion process method is suitable for handling exhaust gas at a high concentration compared with other treatment methods, and is widely used for exhaust gas treatment in a semiconductor manufacturing process or the like, and is also applied in the form of a mixed type scrubber in which a wet treatment method is combined. However, since the combustion method requires a high temperature environment for pyrolysis, it is pointed out as a disadvantage in terms of safety and economical efficiency.

One of the problems in the above-mentioned combustion type treatment method is the powder generated upon pyrolysis of the exhaust gas. That is, when the exhaust gas is burned at a high temperature in the combustion chamber, a large amount of powder is generated as a by-product of pyrolysis. Such powder is adhered to the inner wall of the combustion chamber or various pipes to reduce the processing efficiency of the apparatus.

Accordingly, various methods for preventing the adhesion of the conventional powder have been proposed. For example, there is known a method for reducing the adhesion of powder by removing moisture from the exhaust gas through the pretreatment means. However, this method can reduce the adhesion of the powder to a certain extent, but it is difficult to completely prevent the adhesion of the powder because there is a limit to removing moisture through the pretreatment means. As another example, there is a method of removing powder adhering to the inner wall or the like through physical means. Typically, this method scratches the powder attached to the inner wall through a scraper. This method can be implemented with a relatively simple structure, minimizing an increase in the cost of the apparatus, but also directly scraping off the adhering powder, so that the effect is immediately obtained in operation.

As an example of a method using a scraper, Japanese Patent Application Laid-Open No. 10-1391191 (hereinafter referred to as Patent Document 1) discloses a device for removing by-product matter for a scrubber and the like. Patent Document 1 has a by-product removing member (scraper) extending upward and downward in the combustion chamber, and such a scraper is configured to scrape by-products (powder) of the inner wall by rotating about the central axis of the combustion chamber. Such a structure is adopted in most of the scraper methods in addition to the patent document 1.

However, the structure of the scraper as in the above-mentioned Patent Document 1 has the following problems.

First, the scrapers are elongated vertically, and the driving force is transmitted to the upper end of the scrapers to rotate along the inner wall. Therefore, it is difficult for the scrapers to closely contact the inner wall of the combustion chamber due to the structure. In particular, since the lower end of the scraper is formed as a free end without any special supporting structure, it can be separated from the inner wall more easily. Therefore, since the scrapers are not brought into close contact with the inner wall, the removal performance of the powder adhering to the inner wall may be deteriorated.

Another problem may arise upon replacement of the scraper. Since the scraper is a part that comes into contact with the inner wall of the combustion chamber and rubs against the inner wall, wear and replacement are scheduled. Particularly, since the combustion chamber is provided with a high-temperature environment in which the exhaust gas is heated and oxidized, wear of such scrapers can be promoted. However, the conventional structure such as Patent Document 1 has a disadvantage that replacement of such a scraper is extremely difficult.

More specifically, Patent Document 1 has a structure in which an upper end of a scraper is mounted and supported on an upper portion of a combustion chamber, and a motor, a gear structure, and the like for driving a scraper are also built in the upper portion of the combustion chamber. At this time, the upper part of the combustion chamber on which the scrapers and the mechanical structure (motor, gear structure, etc.) for the scrapers are mounted is a complicated structure, in which a heating means such as a gas inflow pipe or a plasma torch is disposed. Particularly, a heating means such as a plasma torch is a sensitive core component that generates a flame or an arc in the combustion chamber, and its disassembly and assembly are not easy. Nevertheless, in the conventional structure as in Patent Document 1, disassembly and reassembly of the combustion chamber superstructure are inevitable for replacement of the scrapers. Basically, it is because the scrapers and the related mechanical structures all have a structure in which they are buried in the upper part of the combustion chamber. Therefore, in order to replace the scrapers, disassembly and reassembly of sensitive core parts such as a plasma torch are required together, which makes the replacement work of the scrapers extremely troublesome.

Patent Registration No. 10-1391191 (registered on Apr. 25, 2014)

Embodiments of the present invention aim to provide a scrubber capable of effectively removing powder adhering to the inner wall of a combustion chamber.

In addition, embodiments of the present invention are intended to provide a scrubber improved in powder removing effect by enhancing the inner wall adhesion of a scraper.

In addition, embodiments of the present invention provide a scrubber which can be easily replaced with a scraper.

According to an aspect of the present invention, there is provided a combustion chamber comprising: a combustion chamber having an internal space through which exhaust gas is heated and oxidized; An upper structure disposed on the combustion chamber, the upper structure including a piping line for introducing the exhaust gas and a heating means for heating the inner space; A circular annular scraper disposed in the inner space and at least a part of which is in contact with the inner wall of the combustion chamber; One or more screw rods disposed up and down in the inner space and supported to be rotatable about the combustion chamber about an upper and lower axis and adapted to move to one side of the scraper to move the scraper up and down; And a driving motor disposed on the outer side of the combustion chamber and spaced apart from the upper structure, the driving motor being connected to the screw rod to rotationally drive the screw rod.

The scrubber according to the embodiments of the present invention can effectively remove the powder on the inner wall of the combustion chamber by moving the circular ring-shaped scrapers up and down. Particularly, since the scrapers according to the embodiments of the present invention are formed in a circular ring shape unlike the conventional scrapers elongated in the longitudinal direction, the scrapers can be operated more closely to the inner wall of the combustion chamber without the excursion section.

In addition, the scrubber according to the embodiments of the present invention can be easily replaced with a conventional scraper. That is, in the scrubber according to the embodiments of the present invention, the driving motor is disposed outside the combustion chamber, and the scraper is movable up and down, thereby enabling the scraper to be drawn out and reassembled through the lower side of the combustion chamber. Therefore, no disassembly of the superstructure or heating means is required to replace the scrapers, and the scrapers can be replaced only by disassembly and reassembly of a relatively simple mechanical structure.

1 is a schematic view of a scrubber according to an embodiment of the present invention.
2 is a schematic view showing the scrapers, the screw rods and the guide rods shown in Fig.
3 is a schematic view showing the scraper shown in Fig.
4 is a schematic view showing a cross section of the scraper shown in Fig.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. It is to be understood, however, that the following examples are provided to facilitate understanding of the present invention, and the scope of the present invention is not limited to the following examples. In addition, the following embodiments are provided to explain the present invention more fully to those skilled in the art. Those skilled in the art will appreciate that those skilled in the art, Will be omitted.

1 is a schematic view of a scrubber 100 according to an embodiment of the present invention.

Referring to FIG. 1, the scrubber 100 of the present embodiment may include a combustion chamber 110 and a superstructure 120.

The combustion chamber 110 may be formed in a hollow cylindrical shape and may have an internal space 111 through which the exhaust gas is heated and oxidized.

The superstructure 120 may be disposed above the combustion chamber 110 to include an exhaust gas or a pipeline for introducing auxiliary gas required for combustion. In addition, the upper structure 120 may include a heating means 121 for heating the inner space 111. The heating means 121 is for heating oxidizing or pyrolyzing the exhaust gas in the inner space 111 and may include various known means. For example, the heating means 121 may include a burner, a rod heater, a plasma torch, or the like, which is typically used in a combustion process. The exhaust gas may be supplied to the inner space 111 through the piping line of the superstructure 120 and may be heated and oxidized in the combustion chamber 110 by the arc generated in the heating means 121.

However, the combustion chamber 110 and the superstructure 120 as described above may be formed in the same or similar manner as conventionally known.

Although not shown, the scrubber 100 of the present embodiment may be further combined with other processing means known in the combustion chamber 110 for combusting exhaust gas. For example, the scrubber 100 of the present embodiment may be provided in a form in which the wet column for wet-processing the exhaust gas is combined with the combustion chamber 110, and is not necessarily limited to the treatment mode by the combustion chamber 110 alone.

Meanwhile, the scrubber 100 of the present embodiment may further include a scraper 130.

The scrapers 130 may be disposed in the inner space 111 of the combustion chamber 110, and may be formed in a circular ring shape as a whole as described later. The scraper 130 may be formed so that the outer rim portion in the form of a circular ring may contact the inner wall 112 of the combustion chamber 110 and move up and down in the inner space 111. Accordingly, the scrapers 130 move vertically in the inner space 111 to remove the powder adhering to the inner wall 112.

The scrubber 100 of the present embodiment may further include at least one screw rod 140.

The screw rods 140 may extend in the longitudinal direction and may be vertically disposed in the inner space 111 of the combustion chamber 110. Preferably, the screw rods 140 may be disposed adjacent the inner wall 112 of the combustion chamber 110. The screw rods 140 are preferably arranged at the outer side in consideration of the space in which the flame or arc is generated by the heating means 121 at the center of the inner space 111.

The screw rod 140 has threads on the outer surface and can be engaged with the scraper 130 described above. The scraper 130 can be moved up and down along the screw rod 140 by a screw thread. In other words, the screw rod 140 can move the scraper 130 up and down.

The screw rod 140 can be rotatably supported on the upper and lower ends about the vertical axis. That is, the upper end of the screw rod 140 may be rotatably mounted on the inner upper surface of the combustion chamber 110, and the lower end of the screw rod 140 may be rotatably mounted on the inner bottom surface of the combustion chamber 110 via bearings . Accordingly, the screw rod 140 can be rotated with respect to the combustion chamber 110 about the vertical axis. The rotational driving force of the screw rod 140 may be provided by a drive motor 160 to be described later.

If necessary, a plurality of screw rods 140 may be provided. For example, the pair of screw rods 140 may be disposed so as to correspond to the left and right inner walls 112 of the inner space 111, or may be spaced circumferentially along the inner wall 112 by having more than two screw rods 140. In this case, the screw rods 140 may be engaged with the scrapers 130 at different positions to transmit driving force for moving the scrapers 130 up and down. As the number of the screw rods 140 increases, the scraper 130 can be more smoothly moved up and down.

In this embodiment, a single screw rod 140 is provided. On the opposite side inner wall 112 corresponding to the screw rod 140, a guide rod 150 to be described later is disposed. This minimizes the addition of the drive motor 160 and other mechanical elements, thereby simplifying the structure of the apparatus and reducing the cost of the apparatus.

If desired, the scrubber 100 according to the present embodiment may further include one or more guide rods 150.

The guide rods 150 may extend in the longitudinal direction and may be vertically disposed in the inner space 111. Further, the guide rod 150 may be disposed adjacent to the inner wall 112 of the combustion chamber 110. This is to ensure a processing space for thermal oxidation of the exhaust gas as described above.

When only one screw rod 140 is provided as illustrated, the guide rod 150 may be disposed on the opposite side of the inner wall 112 on which the screw rod 140 is disposed. In other words, the guide rod 150 may be disposed on the opposite inner wall 112 so as to correspond to the screw rod 140. The screw rod 140 and the guide rod 150 are fastened to the left and right sides of the scraper 130 so that the scraper 130 can be moved up and down with a stable structure.

However, when a plurality of screw rods 140 are provided, the guide rods 150 may be omitted as needed. In this case, since the scrapers 130 are supported at two or more places, a stable supporting structure and moving operation can be performed even if the guide rods 150 are omitted.

The guide rod 150 is a means for assisting the vertical movement of the scraper 130 by the screw rod 140. Unlike the screw rod 140 described above, the guide rod 150 can be screwed on the outer surface, Do. The guide rod 150 can be vertically penetrated to one side of the scraper 130 and the scraper 130 can be slid up and down with respect to the guide rod 150.

In addition, the upper and lower ends of the guide rod 150 may be fixedly installed. That is, the upper end of the guide rod 150 may be fixed to the inner upper surface of the combustion chamber 110, and the lower end of the guide rod 150 may be fixed to the inner bottom surface of the combustion chamber 110. Unlike the screw rod 140 described above, the guide rod 150 may have a fixed structure.

If necessary, a plurality of guide rods 150 may be provided. For example, a plurality of guide rods 150 may be provided and spaced circumferentially along the inner wall 112 of the combustion chamber 110. As described above, when the plurality of screw rods 140 are provided, the guide rods 150 may be omitted. However, in the case where only one screw rod 140 is provided as shown in the example of the plurality of guide rods 150 . ≪ / RTI > For example, a screw rod 140 and three guide rods 150 are provided so that a total of four screw rods 140 or guide rods 150 are arranged at equal intervals in the circumferential direction along the inner wall 112 Etc. can be considered. When the number of the guide rods 150 is increased, a more stable supporting structure of the scraper 130 is secured and the scraper 130 can be moved up and down smoothly.

In the present embodiment, however, only one guide rod 150 is disposed adjacent to the inner wall 112 facing the screw rod 140. In this case, This is to simplify the structure of the apparatus and ensure sufficient internal space 111 for the treatment of the exhaust gas. In addition, when a plurality of screw rods 140 and guide rods 150 are disposed, the powder produced in the inner space 111 may be adhered to the screw rods 140 or the guide rods 150.

The scrubber 100 of the present embodiment may further include a driving motor 160.

The driving motor 160 may be disposed on an outer side surface of the combustion chamber 110. In other words, the drive motor 160 may be disposed outside the combustion chamber 110, which is spaced apart from the superstructure 120. This is for the purpose of facilitating inspection and repair work by disposing the drive motor 160 at a position where access from outside is easy. In the conventional method using a scraper, the disadvantage that dismantling and reassembling of the entire upper structure 120 is required for replacing or checking the driving motor 160 by disposing the driving motor inside the upper structure 120 there was.

The driving motor 160 may be connected to the screw rod 140 to provide a rotational driving force to the screw rod 140. The drive motor 160 may be connected to the screw rod 140 through various known power transmission means. For example, the driving motor 160 may be connected to the screw rod 140 through a chain, a belt, or the like, or may be connected to the screw rod 140 through a worm-worm gear structure or the like.

The drive motor 160 may be connected to the screw rod 140 by the gear box 161 and the gear box 161 may be disposed in the inner space 111 of the combustion chamber 110 . The gear box 161 can transmit the rotational force of the driving motor 160 to the screw rod 140 in a direction change and increase or decrease, and may include a known gear structure such as a bevel gear. Such a structure is advantageous in that the internal space 111 can be suitably closed easily despite the external arrangement of the driving motor 160. [ That is, an appropriate sealing structure is added between the driving shaft of the driving motor 160 and the combustion chamber 110, so that the inner space 111 can be easily sealed.

2 is a schematic view showing the scraper 130, the screw rod 140 and the guide rod 150 shown in Fig.

Referring to FIG. 2, the scraper 130 may be formed in a circular ring shape having a predetermined radius. The radius of the scraper 130 corresponds to the radius of the inner space 111. [ The screw rod 140 and the guide rod 150 may be fastened to one side or the other side of the scraper 130, respectively. Specifically, the screw rod 140 may be vertically mapped to one side of the scraper 130, and the guide rod 150 may be vertically penetrated to the other side opposite thereto. Therefore, the scrapers 130 are supported at predetermined vertical positions in the inner space 111 by the screw rods 140 and the guide rods 150 on both sides.

3 is a schematic view showing the scraper 130 shown in FIG. 4 is a schematic view showing a cross section of the scraper 130 shown in Fig.

Referring to FIGS. 3 and 4, the scraper 130 may have a side wall 131. The side wall 131 may have a predetermined vertical height and may extend in a circular ring shape. A plurality of discharge holes 131a may be formed in the side wall 131. The discharge hole 131a may be formed to extend laterally through the side wall 131, and a plurality of the discharge holes 131a may be spaced apart along the side wall 131. The discharge hole 131a allows the powder introduced into the partition space D, which will be described later, to be discharged to the outside again.

The scraper 130 includes an upper flange 132 extending transversely from the upper end of the side wall 131 toward the inner wall 112 of the combustion chamber 110 and a lower flange 132 extending from the lower end of the side wall 131 to the inner wall And a lower flange 133 extending laterally toward the lower flange 133. [ The upper flange 132 and the lower flange 133 may extend in the form of a circular ring along the side wall 131, respectively. The upper flange 132 and the lower flange 133 may be vertically spaced apart from each other. Thus, as shown in FIG. 4, the cross-section of the scraper 130 may be shaped to be substantially "C" shaped such that the side wall 131, the top flange 132, and the bottom flange 133 are shaped.

The upper flange 132 and the lower flange 133 are vertically spaced apart from each other to define a partition space D therebetween. The partition space D may be formed as a space surrounded by the upper flange 132, the lower flange 133, the side wall 131, and the inner wall 112. In addition, the scrapers 130 are formed in the shape of a circular ring, and the compartment space D may be formed in the inner space 111 in the form of a circular ring. The discharge hole 131a discharges the powder introduced into the compartment space D to the inner space 111 of the outer side.

The upper flange 132 and the lower flange 133 may have screw fastening holes 132a and 133a, respectively. The screw fastening holes 132a and 133a may be formed to penetrate the upper flange 132 or the lower flange 133 vertically and screw grooves may be formed in the inner circumferential surface to be engaged with the screw rod 140 described above. Although not shown, when a plurality of screw rods 140 are provided, a plurality of screw coupling holes 132a and 133a may be provided.

The upper flange 132 and the lower flange 133 may have guide fastening holes 132b and 133b, respectively. The guide fastening holes 132b and 133b are for fastening the guide rod 150 and may be formed to penetrate the upper flange 132 or the lower flange 133 vertically. In this embodiment, the guide rod 150 is provided on one side of the screw rod 140. The guide fastening holes 132b and 133b are formed on opposite sides of the screw fastening holes 132a and 133a As shown in FIG. Although not shown, when a plurality of guide rods 150 are provided, a plurality of guide coupling holes 132b and 133b may be provided.

The scraper 130 may have tips 132c and 133c provided at the ends of the upper flange 132 and the lower flange 133 toward the inner wall 112. [ The tips 132c and 133c may be in contact with the inner wall 112 of the combustion chamber 110 and may be provided in the upper flange 132 and the lower flange 133, respectively. The tips 132c and 133c are provided on the upper flange 132 and the lower flange 133 so that the tips 132c and 133c can scrape the inner wall 112 twice when the scraper 130 is moved up and down have. As a result, the effect of removing the powder can be improved.

Preferably, the tips 132c and 133c may be formed to protrude toward the inner wall 112 with a certain degree of sharpness. Alternatively, the tips 132c and 133c may have a substantially triangular cross section and one apex may be formed to contact the inner wall 112. The shapes of the tips 132c and 133c reduce the contact area of the inner wall 112 to reduce interference between the scraper 130 and the scraper 130, and allow the scraped powder to be easily scraped off.

More preferably, the tips 132c and 133c may be formed to be separable and replaceable from other portions of the scraper 130. [ In other words, the scraper 130 is divided into a body 130a consisting of a side wall 131, an upper flange 132 and a lower flange 133, and a tip ring 130b including tips 132c and 133c . At this time, the tip ring 130b may be formed as a circular ring-shaped part fastened to the upper flange 132 and the lower flange 133 and may be formed separately from the body 130a so as to be detachable from the body 130a Lt; / RTI >

The tip ring 130b may have tips 132c and 133c that have a substantially triangular cross section and contact the inner wall 112 of the combustion chamber 110. Such tips 132c and 133c may be circular And may be formed along the outer rim of the tip ring 130b extending in the form of a ring. In addition, the tip ring 130b may be provided with fastening pieces 132d and 133d along the rim in the radial direction opposite to the tips 132c and 133c. The engaging pieces 132d and 133d may extend a predetermined length toward the radially inward direction to form a predetermined overlapping portion with the upper flange 132 or the lower flange 133. [ The tip ring 130b may be mounted to the body 130a by bolting the fastening pieces 132d and 133d to the upper flange 132 or the lower flange 133. [

Optionally, the tip ring 130b may include a Teflon coating on some or all of it. Preferably, the tip ring 130b may be teflon coated, including tips 132c, 133c portions that are in contact with at least the inner wall 112. In this case, the durability of the tip ring 130b is improved, and the replacement cycle of the scraper 130 can be extended.

Meanwhile, the body 130a may be formed of a metal material.

Hereinafter, the operation of the scrubber 100 according to the present embodiment will be described.

Referring to FIG. 1, the scrubber 100 of the present embodiment burns exhaust gas in the combustion chamber 110 to thermally decompose harmful components contained therein. This is the same as or similar to the conventional one. When the exhaust gas is burned in the combustion chamber 110 as described above, powder can be generated with the dispersion, and the powder in the form of fine powder is adhered to the inner wall 112 of the combustion chamber 110 together with moisture . The scrubber 100 of the present embodiment can remove the scrubber 100 through the scrapers 130 disposed in the internal space 111 of the combustion chamber 110.

Specifically, when the screw rod 140 is rotationally driven about the vertical axis by the operation of the driving motor 160, the scrapers 130 attached to the screw rods 140 move upward or downward. 4, since the tips 132c and 133c are in contact with the inner wall 112 of the combustion chamber 110, the scraper 130 scrapes the powder adhering to the inner wall 112 while being moved up and down I will. Particularly, the scrapers 130 of the present embodiment are provided with tips 132c and 133c on the upper flange 132 and the lower flange 133, respectively, so that the inner wall 112 is scratched twice by one movement, Effective powder removal can be achieved.

Particles may be introduced into the compartment space D through the discharge holes 131a of the side walls 131 in the process of scraping the powder on the inner wall 112, And then discharged to the inner space 111 of the housing 110. 1, the guide rod 150 supports the scraper 130 on the opposite side of the screw rod 140 to guide the scraper 130 up and down.

As described above, the scrubber 100 according to the embodiments of the present invention can effectively remove the powder in the inner wall 112 of the combustion chamber 110 by moving the circular ring-shaped scraper 130 up and down. Particularly, since the scrapers 130 of the present embodiment are formed in a circular ring shape unlike the conventional scrapers elongated in the longitudinal direction, they can be operated more closely to the inner wall 112 of the combustion chamber 110 without an exciting section . That is, in the conventional case, a bar-shaped scraper extending downward is used, so that a scraper does not closely contact the inner wall at the lower end of the scraper, and the scraper 130 floats. The powder can be effectively removed over the entire range of the inner wall 112 of the combustion chamber 110 as the lifting phenomenon does not occur.

In addition, the scrubber 100 according to the embodiments of the present invention can be easily replaced with the scraper 130 compared to the prior art. That is, in the scrubber 100 according to the present embodiment, since the driving motor 160 is disposed outside the combustion chamber 110 and the scraper 130 is movable up and down, (130) can be pulled out and reassembled. Therefore, unlike the prior art, it is not necessary to disassemble the upper structure 120, the heating means 121, or the like in order to replace the scrapers 130, and only a disassembly and reassembly of a relatively simple mechanical structure is required. Further, the scraper 130 of the present embodiment has the advantage that the tip ring 130b is detachable from the body 130a and can be reused by replacing only the tip ring 130b where abrasion occurs.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, many modifications and changes may be made by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims. The present invention can be variously modified and changed by those skilled in the art, and it is also within the scope of the present invention.

100: scrubber 110: combustion chamber
120: upper structure 130: scraper
140: screw rod 150: guide rod
160: drive motor

Claims (5)

A combustion chamber (110) having an internal space (111) in which exhaust gas is heated and oxidized;
An upper structure 120 disposed above the combustion chamber 110 and including a piping line for introducing the exhaust gas and a heating means 121 for heating the internal space 111;
A circular annular scraper 130 disposed in the inner space 111 and at least a part of which is in contact with the inner wall 112 of the combustion chamber 110;
And one or more screws (not shown) are mounted on the inner space 111 to be rotatable with respect to the combustion chamber 110 about the vertical axis and to be moved to the one side of the scraper 130 to move the scraper 130 up and down. A rod 140;
A guide rod 150 vertically disposed in the inner space 111 and penetratingly connected to the other side of the scraper 130 spaced apart from the screw rod 140 to guide up and down movement of the scraper 130; And
And a driving motor 160 disposed on the outer side of the combustion chamber 110 and spaced apart from the upper structure 120 and connected to the screw rod 140 to rotationally drive the screw rod 140. [ Scrubber. The method according to claim 1,
The scraper (130)
A side wall 131 extending in a circular ring shape with a predetermined vertical height;
An upper flange 132 extending from the upper end of the side wall 131 toward the inner wall 112; And
And a lower flange (133) extending from the lower end of the side wall (131) toward the inner wall (112). The method of claim 2,
The side wall (131)
A plurality of discharge holes 131a spaced apart in the circumferential direction are formed to pass therethrough,
The upper flange 132 and the lower flange 133,
Tips (132c, 133c) protruding sharply toward the inner wall (112) and contacting the inner wall (112); And
And screw tightening holes (132a, 133a) vertically penetrating the screw rods (140) so as to be engaged. delete The method according to claim 1,
The scraper (130)
A body 130a having a circular ring-shaped side wall 131, an upper flange 132 extending from an upper end of the side wall 131, and a lower flange 133 extending from a lower end of the side wall 131; And
And a tip ring 130b formed to be detachable from the body 130a and fastened to an end of the upper flange 132 and the lower flange 133 toward the inner wall 112. [

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