KR101763621B1

KR101763621B1 - Apparatus for supplying powder

Info

Publication number: KR101763621B1
Application number: KR1020100119901A
Authority: KR
Inventors: 김준영; 신세철
Original assignee: 주식회사 탑 엔지니어링
Priority date: 2010-11-29
Filing date: 2010-11-29
Publication date: 2017-08-02
Also published as: KR20120058219A

Abstract

In the powder feeder according to the present invention, a configuration capable of constantly supplying powder in a constant amount is presented.

Description

{APPARATUS FOR SUPPLYING POWDER}

The present invention relates to a powder feeder for supplying powders used in a semiconductor manufacturing process.

In general, a semiconductor is manufactured in the form of a package in which a semiconductor chip is mounted on a lead frame before being mounted on a product. In the semiconductor package, a semiconductor chip is mounted on a lead frame in such a manner that a semiconductor chip is connected to a lead frame using a wire, and a molding process is performed to protect a wire electrically connecting the lead frame and the semiconductor chip. A method of supplying a resin in the form of powder into a mold by one of the molding processes as described above may be applied. In this process, a powder supply device for supplying powder may be used.

Also, a powder mixed with a silicon powder and a phosphor powder in the process of manufacturing a light emitting diode is used in the manufacturing process, and a powder supply device is used to supply such powder.

As described above, in the manufacturing process of electronic parts such as semiconductors and light emitting diodes, a powder supply device is used to supply various types of powder. The most important design factors of the powder supply device are a predetermined amount and a definite amount of powder And optimum design of the powder feeder for this is required.

It is an object of the present invention to provide a powder feeder capable of uniformly feeding powder in a preset amount and in an accurate amount.

According to an aspect of the present invention, there is provided a powder supply device comprising: a first housing member having a powder accommodated therein; a first passage member connected to an outlet of the first housing member; A first supply unit including a first drive device for supplying the first passage unit through the first passage member; A second passage member which is connected to an outlet of the second housing member, and a second passage member which is connected to the outlet of the second housing member through a second passage member A second supply unit including a second drive device for supplying the second drive unit; And a dust-proof unit installed between the first supply unit and the second supply unit and interrupting transmission of vibration between the first supply unit and the second supply unit.

The powder supply device according to the present invention is provided with a dustproof unit for interrupting transmission of vibration between a first supply unit and a second supply unit between a first supply unit and a second supply unit, The vibrations generated in each of the units are prevented from interfering with each other, whereby the powder can be constantly supplied in a constant amount.

The powder supply device according to the present invention further includes a first drive device for generating vibration in the first housing member and a second drive device for generating vibration in the second housing member, By sequentially moving the powder contained in the housing member using vibration, the fine particles forming the powder can be separated from each other, and the powder can be uniformly supplied in a constant amount.

The powder feeder according to the present invention includes the control unit for controlling the first supply unit and the second supply unit using the measurement unit for measuring the supply amount of the powder and the supply amount of the powder measured in the measurement unit, An accurate amount of powder can be supplied to the object.

1 is a schematic view showing a powder supply apparatus according to a first embodiment of the present invention.
Fig. 2 is a schematic view showing a first supply unit of the powder supply apparatus of Fig. 1; Fig.
Fig. 3 is a perspective view showing the first passage member of the first supply unit of Fig. 2; Fig.
Fig. 4 is a schematic view showing a second supply unit of the powder supply device of Fig. 1;
Fig. 5 is a perspective view showing the second passage member of the second supply unit of Fig. 2; Fig.
6 is a schematic diagram showing a powder supply apparatus according to a second embodiment of the present invention.
7 is a control block diagram of the powder feeder of Fig.

Hereinafter, preferred embodiments of the powder supply apparatus according to the present invention will be described with reference to the accompanying drawings.

1, the powder supplying apparatus according to the first embodiment of the present invention includes a first receiving member 11 in which powder P in powder form is accommodated, an outlet (not shown) of the first receiving member 11 And a first drive unit 13 for supplying the powder P contained in the first housing member through the first passage member 12. The first passage unit 12 is connected to the first passage unit 12, And a second passage member 22 connected to the outlet 211 of the second housing member 21 for receiving the powder P supplied from the first passage member 12, A second supply unit 20 including a second drive unit 23 for supplying the powder P contained in the second housing member 21 through the second passage member 22, And a dustproof unit 30 installed between the first supply unit 10 and the second supply unit 20 to block transmission of vibration between the first supply unit 10 and the second supply unit 20. [

As shown in FIG. 2, the first housing member 11 has a receiving space in which the powder P is received, and an outlet 111 communicating with the receiving space is formed. The receiving space of the first housing member 11 can be formed in a cylindrical shape having a constant inner diameter and the first accommodation member 11 can be formed in the first accommodation member 11 so that the powder P accommodated in the accommodation space can smoothly move toward the outlet 111 by its own weight. The accommodation space of the member 11 may be formed in such a shape that its width gradually decreases toward the outlet 111. [

As shown in Fig. 3, the first passage member 12 is connected to the outlet 111 of the first housing member 11 and extends in the longitudinal direction thereof. The first passage member 12 may be arranged to be inclined downward gradually from the outlet 111 of the first housing member 11. [ The first passage member 12 is preferably formed with a groove 121 having a triangular cross section along its longitudinal direction. The grooves 121 prevent the powder P from flowing out of the first passage member 12 when the powder P moves along the first passage member 12 so that a certain amount of the powder P And serves to guide the movement of the powder P to move along the first passage member 12. Of course, the groove 121 of the first passage member 12 may be formed to have a circular, square or polygonal cross section.

2, the first driving device 13 includes a moving member 131 connected to the first housing member 11 and the first passage member 12, and a moving member 131 connected to the first passage member 12, A supporting member 132 for supporting the movable member 131 and the supporting member 132 so as to be movable in a feeding direction (direction A in FIG. 2) and an opposite direction (direction B in FIG. 2) A stator 134 provided on the support member 132 between the movable member 131 and the support member 132 and a stator 134 provided between the movable member 131 and the support member 132 Moving in a direction adjacent to the stator 134 and in a direction away from the stator 134 due to the interaction with the stator 134, (135). &Lt; / RTI >

The supporting member 132 is provided with a guide 136 connected to the moving member 131 to guide the movement of the moving member 132 so that the moving member 131 can be movably installed on the supporting member 132 . However, the guide 136 may not be separately provided, and the movable member 131 may be supported by the support member 132 so as to be movable through the elastic member 133.

As the elastic member 133, various members having predetermined elastic modulus such as a coil spring and a leaf spring can be applied.

Either one of the mover 135 and the stator 134 may be constituted by a magnetic member and the other may be constituted by an electromagnet. Of course, both the mover 135 and the stator 134 may be composed of electromagnets. With this structure, attraction force or repulsive force can be applied between the mover 135 and the stator 134.

2, the mover 135 is disposed on the front side in the moving direction of the powder P (hereinafter referred to as A direction) with respect to the stator 134, and therefore, the mover 135 and the stator 134 The movable member 131 is moved in a direction opposite to the direction of movement of the powder P (hereinafter referred to as B direction), and a repulsive force is applied between the movable member 135 and the stator 134 The movable member 131 is moved in the A direction. As described above, by using the attraction force and the repulsive force between the mover 135 and the stator 134, the moving member 131 can be reciprocated in directions A and B. At this time, the elastic member 133 may play a role of causing resonance to occur in the moving member 131. On the other hand, any one of the attraction force and the repulsion force between the mover 135 and the stator 134 can be used without using all of them. That is, when the moving member 131 is moved in the B direction by using the attraction force between the mover 135 and the stator 134 and then the attraction force between the mover 135 and the stator 134 is released, The movable member 131 can be moved in the A direction by the elastic restoring force of the movable member 131 and the movable member 131 is moved in the A direction by using the repulsive force between the movable member 135 and the stator 134, The moving member 131 can be moved in the direction B by the elastic restoring force of the elastic member 133 when the repulsive force between the stator 135 and the stator 134 is released. As described above, by using the attraction force and the repulsive force between the mover 135 and the stator 134, the moving member 131 can be reciprocated in directions A and B.

As described above, the movable member 131 can be reciprocated in the directions A and B by the mutual action of the mover 135, the stator 134, and the elastic member 133, The first passage member 11 and the first passage member 12 can vibrate reciprocally in the A direction and the B direction. Powder P received in the first housing member 11 by the vibration of the first housing member 11 and the first passage member 12 flows out of the outlet 111 and flows into the first passage member 12, As shown in FIG.

In the first embodiment of the present invention, the structure in which the mover 135, the stator 134 and the elastic member 133 are applied to generate vibration in the first housing member 11 and the first passage member 12 However, the present invention is not limited to this, and a linear motor capable of reciprocally moving the moving member 131 such as a linear motor, a hydraulic cylinder, a pneumatic cylinder, a ball screw device, There are a variety of mechanisms that can be applied.

As shown in FIG. 4, the second housing member 21 has a receiving space in which the powder P is received, and an outlet 211 communicating with the receiving space is formed. The second accommodation member 21 can be formed in a cylindrical shape having a constant inner diameter and the second accommodation member 21 can be formed in a cylindrical shape having a predetermined length so that the powder P accommodated in the accommodation space can be smoothly moved toward the outlet 211 by its own weight, The accommodation space of the member 21 may be formed in such a shape that its width gradually decreases toward the outlet 211. [

5, the second passage member 22 is connected to the outlet 211 of the second housing member 21 and extends in the longitudinal direction thereof. The second passage member 22 may be arranged to be inclined downward gradually as it extends from the outlet 211 of the second housing member 21. [ The second passage member 22 is preferably formed with a groove 221 having a triangular cross-section along its longitudinal direction. The grooves 221 prevent the powder P from flowing out of the second passage member 22 when the powder P moves along the second passage member 22 so that a certain amount of the powder P And guides the movement of the powder P so as to move along the second passage member 22. Of course, the groove 221 of the second passage member 22 may have a circular, square or polygonal cross section.

4, the second driving device 23 includes a moving member 231 connected to the second accommodating member 21 and the second passage member 22, and a moving member 231 connected to the second accommodating member 21 and the second passage member 22, A supporting member 232 for supporting the movable member 231 and the supporting member 232 movably in the feeding direction (the direction A in FIG. 4) and the opposite direction (the direction B in FIG. 4) A stator 234 provided on the supporting member 232 between the moving member 231 and the supporting member 232 and a stator 234 provided between the moving member 231 and the supporting member 232 The movable member 231 is provided so as to be adjacent to the stator 234 between the stator 234 and the movable member 231 and moves in the direction adjacent to the stator 234 and in the direction away from the stator 234 by the interaction with the stator 234. [ (235). &Lt; / RTI >

The supporting member 232 is provided with a guide 236 connected to the moving member 231 and guiding the movement of the moving member 232 so that the moving member 231 can be movably installed on the supporting member 232 . However, a structure in which the guide 136 is not separately provided and the moving member 231 is supported by the supporting member 232 so as to be movable through the elastic member 233 can be applied.

As the elastic member 233, various members having predetermined elastic modulus such as a coil spring and a leaf spring can be applied.

Either the mover 235 or the stator 234 may be constituted by a magnetic member and the other may be constituted by an electromagnet. Of course, both the mover 235 and the stator 234 can be composed of electromagnets. With this structure, an attractive force or a repulsive force can be applied between the mover 235 and the stator 234. The configuration and operation of the mover 235 and the stator 234 are the same as those of the mover 135 and the stator 134 of the first driving device 13 described above.

The movable member 231 can be reciprocated in the A direction and the B direction by the interaction of the movable member 235, the stator 234 and the elastic member 233, And the second passage member 22 can vibrate reciprocally in the A direction and the B direction. The powder P contained in the second housing member 21 is discharged from the outlet 211 by the vibration of the second housing member 21 and the second passage member 22 and is discharged from the second passage member 22, As shown in FIG.

The stator 234 and the elastic member 233 are applied to generate vibration in the second accommodating member 21 and the second passage member 22 in the first embodiment of the present invention However, the present invention is not limited to this, and it is possible to generate power in a linear form capable of reciprocating the moving member 231 such as a linear motor, a hydraulic cylinder, a pneumatic cylinder, and a ball screw device in directions A and B There are a variety of mechanisms that can be applied.

In the meantime, predetermined vibrations may be generated in the first supply unit 10 and the second supply unit 20, respectively, and vibrations generated in any one of the first supply unit 10 and the second supply unit 20 An error occurs in the process of supplying the powder P and the powder P can not be supplied in a constant amount in a constant amount. In order to prevent such a phenomenon, the present invention preferably includes a dustproof unit (30) for blocking transmission of vibration between the first supply unit (10) and the second supply unit (20).

As the vibration-proof unit 30, a first supply unit 10 such as a member made of an elastic material such as rubber or synthetic resin, a hydraulic or pneumatic damper, a sealing tube in which a gas or fluid is contained, an elastic member including a spring, 2 supply unit 20 can be applied.

On the other hand, the powder P is first supplied to the inside of the first housing member 11 of the first supply unit 10, and the powder P supplied to the first housing member 11 is mixed with the powder P Particles of fine diameter may be combined with each other. This type of powder P can maintain the form of aggregation of fine particles even though it passes through the first passage member 12 of the first supply unit 10, which results in a nonuniform supply of the powder P .

The powder feeder according to the first embodiment of the present invention includes the first feed unit 10 and the second feed unit 20 together so that the powder P The fine particles forming the powder P can be kept separated from each other while passing through the first supply unit 10 and the second supply unit 20.

The first housing member 11 provides a housing space in which the powder P is first supplied and the second housing member 21 houses a housing space in which the powder P having passed through the first supply unit 10 is housed to provide. The volume of the second housing member 21 is preferably smaller than the volume of the first housing member 11 since the second housing member 21 is disposed in an intermediate process in which the powder P is supplied. When the volume of the second housing member 21 is made smaller than the volume of the first housing member 11, the driving force of the second driving device 23 can be made smaller than the driving force of the first driving device 13 Therefore, unnecessary loss of energy can be prevented.

The powder supply apparatus according to the first embodiment of the present invention as described above is provided with a first supply unit 10 and a second supply unit 20 The powder P can be constantly supplied in a constant amount.

The powder supplying apparatus according to the first embodiment of the present invention includes a first driving device 13 for generating vibration in the first housing member 11 and a second driving device 13 for generating vibration in the second housing member 21 2 drive device 14 and moves the powder P contained in the first housing member 11 and the second housing member 21 to separate the fine particles constituting the powder P from each other Thus, there is an effect that the powder P can be constantly supplied in a constant amount.

Hereinafter, a powder supplying apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 6 and 7. FIG. The same reference numerals are given to the same parts as those described in the first embodiment of the present invention, and a detailed description thereof will be omitted.

6, the powder supplying apparatus according to the second embodiment of the present invention includes a stage 50 on which an object 40 to which a powder P is supplied is placed, A measuring unit 60 for measuring the supply amount of the powder P supplied to the object 40 and a measuring unit 60 for measuring the supply amount of the powder P supplied from the measuring unit 60, And a control unit (70) for controlling the control unit (20).

The object 40 may actually be a semiconductor product to which the powder P is supplied and may be a container such as a cup for transporting the powder P supplied from the powder supply device. The stage 50 can be connected to a conveying device such as a conveyor.

The measurement unit 60 may be configured to include a weight measurement sensor connected to the stage 50 on which the object 40 is supported to measure the weight of the object 40 to which the powder P is supplied. The weight measuring sensor may be a load cell arranged on the lower side of the object 40 to which the powder P is supplied and detecting a deformation amount according to an applied load as an electric signal and measuring an applied load based on the detected electric signal, &Lt; / RTI > However, the present invention is not limited to the case where the measuring unit 60 is composed of a load cell, and various configurations such as a mechanical, electric or electronic sensor capable of measuring the weight of the object 40 to which the powder P is supplied can be applied have.

7, the control unit 70 subtracts the weight of the object 40 itself of the object 40 from the weight of the object 40 supplied with the powder P measured in the measuring unit 60, The supply amount of the powder P can be measured from the weight. When the powder P is supplied in a predetermined amount to the object 40, the control unit 70 controls the first driving unit 13 and the second driving unit 20 of the first driving unit 10, And controls the operation of the second driving device 23 to be stopped.

As described above, the powder supplying apparatus according to the second embodiment of the present invention is configured to use the supply amount of the powder measured by the measuring unit 60 for measuring the supply amount of the powder P and the measuring unit 60, It is possible to supply the correct amount of powder P to the object 40 by providing the control unit 70 for controlling the unit 10 and the second supply unit 20. [

10: first supply unit 11: first housing member
12: first passage member 13: first driving device
20: second supply unit 21: second housing member
22: second passage member 23: second driving device
60: Measurement unit 70: Control unit

Claims

A first passage member that is connected to an outlet of the first housing member, and a second passage member that vibrates the first passage member to transmit powder contained in the first housing member to the first passage member through the first passage member A first supply unit including a first drive device for supplying the first drive unit;
A second passage member that is connected to an outlet of the second housing member, and a second passage member that vibrates the second passage member to receive the powder contained in the second housing member, And a second drive unit for supplying the second drive unit to the second passage member via the second passage member; And
And a dustproof unit installed between the first supply unit and the second supply unit and interrupting transmission of vibration between the first supply unit and the second supply unit,
Wherein the powder is sequentially supplied by the first supply unit and the second supply unit.

delete

The method according to claim 1,
The first driving device includes:
A moving member connected to the first housing member and the first passage member;
A support member for supporting the movable member so as to be movable in a powder supply direction and in a direction opposite thereto;
An elastic member connecting between the moving member and the support member;
A stator installed on the supporting member between the moving member and the supporting member; And
And a moving member provided on the moving member so as to be adjacent to the stator between the moving member and the supporting member and moving in a direction adjacent to the stator and in a direction away from the stator by interaction with the stator Wherein the powder feeder is a powder feeder.

delete

The method according to claim 1,
The second driving device includes:
A moving member connected to the second housing member and the second passage member;
A support member for supporting the movable member so as to be movable in a powder supply direction and in a direction opposite thereto;
An elastic member connecting between the moving member and the support member;
A stator installed on the supporting member between the moving member and the supporting member; And
And a moving member provided on the moving member so as to be adjacent to the stator between the moving member and the supporting member and moving in a direction adjacent to the stator and in a direction away from the stator by interaction with the stator Wherein the powder feeder is a powder feeder.

The method according to claim 1,
Wherein the cross-sectional shape of the first passage member and the second passage member is formed in a triangular, circular, or polygonal shape.

The method according to claim 1,
A measuring unit for measuring a supply amount of the powder; And
And a control unit for controlling the first supply unit and the second supply unit using the supply amount of the powder measured in the measurement unit.