KR101762181B1 - Filtering apparatus using micro bubbles for fish farm - Google Patents

Filtering apparatus using micro bubbles for fish farm Download PDF

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Publication number
KR101762181B1
KR101762181B1 KR1020150070186A KR20150070186A KR101762181B1 KR 101762181 B1 KR101762181 B1 KR 101762181B1 KR 1020150070186 A KR1020150070186 A KR 1020150070186A KR 20150070186 A KR20150070186 A KR 20150070186A KR 101762181 B1 KR101762181 B1 KR 101762181B1
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KR
South Korea
Prior art keywords
tank
fluid
micro
mixed fluid
housing
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Application number
KR1020150070186A
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Korean (ko)
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KR20160136564A (en
Inventor
박영철
이헌영
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주식회사 뉴워터텍
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Priority to KR1020150070186A priority Critical patent/KR101762181B1/en
Publication of KR20160136564A publication Critical patent/KR20160136564A/en
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    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01KANIMAL HUSBANDRY; CARE OF BIRDS, FISHES, INSECTS; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K63/00Receptacles for live fish, e.g. aquaria; Terraria
    • A01K63/04Arrangements for treating water specially adapted to receptacles for live fish
    • A01K63/045Filters for aquaria
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01KANIMAL HUSBANDRY; CARE OF BIRDS, FISHES, INSECTS; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K63/00Receptacles for live fish, e.g. aquaria; Terraria
    • A01K63/04Arrangements for treating water specially adapted to receptacles for live fish
    • A01K63/042Introducing gases into the water, e.g. aerators, air pumps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D35/00Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/02Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
    • B01F3/04106

Abstract

The present invention separates and removes harmful algae and sediments contained in seawater by using various flotation techniques, such as various organic substances (various kinds of by-products such as fish excrement, unrefined feed, etc.) contained in aquaculture water, In order to maintain the water quality of the breeding water well, it is possible to reduce harmful pathogenic microorganisms and harmful algae, and secondarily to reduce the cost of fish farming water quality management. Provided is a micro-bubble filtering device for aquaculture which can simplify the structure and facilities of the device and can move conveniently because an excellent, large-capacity pump and equipment are not required.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a filtering apparatus for filtering microbubbles,

The present invention relates to a micro-bubble filtering apparatus for aquaculture, and more particularly, to a micro-bubble filtering apparatus for aquaculture in which various kinds of organic matters (various kinds of byproducts such as fish excrement and unrefined feed) contained in aquaculture water and harmful algae and sediments contained in seawater are separated flotation technology to maintain the water quality of the breeding water in a primary way to prevent the generation of pathogenic microorganisms harmful to fish and harmful algae and to reduce the cost of fish farming water quality management in the second place To a micro-bubble filtering apparatus for aquaculture that is capable of simplifying the structure and facilities of the apparatus and facilitating the movement of the apparatus without requiring a large-capacity pump and facility with an excellent processing capacity to suit large-scale sites .

Generally, in a farm, pure oxygen gas is used to maintain the proper dissolved oxygen (DO) necessary for fish growth. In this case, since the oxygen gas is injected into the general blower, the size of the bubbles is large. I can fly to the atmosphere. Therefore, excessive oxygen gas is used in a period where the gas dissolution efficiency is low, such as during the summer season, which may result in an excessive consumption of the maintenance cost.

Since the micro-saturation means requires a high-pressure pump in order to treat a large amount of water, when the capacity and size of the pump become large, the capacity of the pump itself becomes large and the mobility is significantly lowered.

Meanwhile, the conventional foreign matter removing apparatus using floating separation is limited to the use of air as a flotation promoting agent, and air bubbles are generated by a dissolved air flotation separation (Dissolved air flotation method and an air floating separation method in which aeration is performed under atmospheric pressure.

In the case of the above-mentioned dissolved air flotation and air flotation, most chemical additive (coagulant) is used in order to cause air bubbles and particulate matter to adhere well. Additional facilities such as a chemical mixing tank, an infusion pump, and a chemical storage tank are needed. In addition, in case of separated air flotation, additional facilities such as a pressure tank and a pressure regulator are required to set a higher pressure than the atmospheric pressure (5 to 7 atmospheres). In addition, a floating separation tank capable of skimming operations is required to remove sludge and scum that have surfaced in the air-floating separation and dissolved air floating separation methods.

In order to apply float separation technology, various equipment is required. Therefore, it is difficult to apply it to a farm because it requires a certain space for an auxiliary facility.

Korean Patent Laid-Open No. 10-2009-0109903

It is an object of the present invention to provide a micro-bubble filtering apparatus for a culture aquarium which is capable of simplifying the structure and facilities of the apparatus and can be conveniently moved without requiring a large-capacity pump and facility with an excellent processing capacity so as to be suitable for a farm.

An apparatus for filtering micro-bubbles for aquaculture according to one aspect of the present invention includes: a first tank; A second tank accommodated in the first tank so that the mixed fluid therein can be overflowed into the first tank; A fluid supply line for supplying a fluid in which the liquid and the gas are mixed in the second tank; A fluid inflow line for introducing a part of the mixed fluid from the second tank; Micro-saturation means for micronizing the gas contained in the mixed fluid introduced through the fluid inlet line; A fluid material supply line for re-supplying the mixed fluid passing through the micro-saturation means to the second tank; And a fluid discharge line for discharging a mixed fluid including fine bubbles that have been transferred from the second tank to the first tank to the outside; And a control unit.

According to a preferred feature of the present invention, the supply port of the fluid supply line may be disposed adjacent to the fluid inflow line in the second tank.

According to a preferred aspect of the present invention, the micro-saturation means may be directly connected to the second tank in a bypass manner, the fluid inflow line and the fluid material supply line, respectively.

According to a preferred aspect of the present invention, a frame for supporting the first and second tanks and the micro-saturation means is further provided, and a mobile wheel may be installed on the bottom surface of the frame.

According to a preferred aspect of the present invention, A mixed fluid inlet connected to the fluid discharge line at a lower portion of the housing; A mixed fluid moving passage provided in the housing in a conical shape and having a mixed fluid moving passage of a downwardly directed light, the mixed fluid moving passage having a lower end communicating with the mixed fluid inlet portion and an upper end opened; A support plate provided with a gas discharge port and horizontally installed inside the housing from above the mixed fluid moving part, and a support plate extending downward conically from the support plate to separate the housing and the mixed fluid moving part from each other, A purifier moving part including a partition wall formed so as to prevent the purifier from moving; A foreign matter discharging unit formed on the housing and discharging the foreign matter having passed through the gas discharging port to the outside; And a purified water discharging part formed on one side of the housing for discharging the purified water passing through the purified water passage divided by the partition wall to the outside; And a foreign matter removing unit including the foreign matter removing unit.

According to a preferred aspect of the present invention, a mobile wheel may be installed on the bottom surface of the housing.

The apparatus for filtering micro-bubbles for aquaculture according to an embodiment of the present invention is a device for filtering various kinds of organic matter (various kinds of byproducts such as fish excrement and unrefined feed) contained in aquaculture water and harmful algae and sediments contained in seawater by floatation ) Technique to separate and remove the primary water quality of the breeding water to maintain harmful pathogenic microbes and harmful algae to fish, and secondly to reduce the cost of fish farming water quality management And it is possible to simplify the structure and facilities of the apparatus and to move it conveniently because it does not require a large capacity pump and equipment because the processing capacity is excellent so as to be suitable for a large site.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a micro-bubble generating device, a foreign matter removing unit, and a breeding aquarium according to an embodiment of the present invention.
2 is a perspective view of a micro-bubble generator according to an embodiment of the present invention.
3 is a schematic view showing the mechanism of the micro-bubble generating device shown in FIG.
4 is a perspective view schematically showing a foreign matter removing unit according to an embodiment of the present invention.
5 is a cross-sectional view of Fig.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the following embodiments.

The embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art. Accordingly, the shapes and sizes of the elements in the drawings may be exaggerated for clarity of description, and the elements denoted by the same reference numerals in the drawings are the same elements. In the drawings, like reference numerals are used throughout the drawings.

In addition, to include an element throughout the specification does not exclude other elements unless specifically stated otherwise, but may include other elements.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a micro-bubble generating device, a foreign matter removing unit, and a breeding aquarium according to an embodiment of the present invention.

Referring to FIG. 1, the apparatus for filtering micro-bubbles for aquaculture according to the present embodiment is applied to a breeding water tank 300 having a large area, for example, and includes a micro-bubble generator 100 and a foreign matter removing unit 200, .

The micro-bubble generator 100 is a device for injecting gas into the water supplied from the raising water tank 300 through the gas supply unit 153 and then saturating the micro-bubbles. The water mixed with the micro-bubbles is supplied to the raising water tank 300 Or may be moved to the foreign material removing unit 200.

At this time, if the microbubble generator 100 does not pass the foreign material removing unit 200, it acts as a device for supplying dissolved oxygen of the raising water tank 300. The foreign substance removing unit 200 separates the foreign matter from the water supplied from the microbubble generator 100 through the cyclone action to discharge the scum to the outside, and the purified water is supplied again to the breeding water tank 300 .

FIG. 2 is a perspective view of a micro-bubble generating device according to an embodiment of the present invention, and FIG. 3 is a schematic view illustrating a mechanism of the micro-bubble generating device shown in FIG.

Referring to Figs. 2 and 3, the micro-bubble generating device of the present embodiment includes a tank portion, a line portion, and a micro-bubble generating portion.

The tank part is a reservoir for introducing and containing a mixed fluid in which a liquid and a gas are mixed, and for saturating the gas of the mixed fluid in a micro-scale, and includes a first tank 120 and a second tank 110 housed in the first tank 120, . The first tank 120 has a floor and a wall and is open on the upper side and a first accommodation space 120a on the inner side. The second tank 110 has a floor and a wall, A space 110a is provided.

The second tank 110 is formed of a relatively small tank having a lower height and a smaller volume than the first tank 120. The second tank 110 is installed on the bottom of the first tank 120, Are spaced apart from each other.

The line portion includes liquid supply lines 131a and 131b, a gas supply line 132, a fluid supply line 133, and a fluid discharge line 137. [ At this time, the liquid supply line 131b, the gas supply line 132, and the fluid supply line 133 may be connected to each other by, for example, a T-shaped branch pipe 139.

The liquid supply lines 131a and 131b are connected to the breeding water tank 300 of the farm and include a first pump 151 to pump the water in the breeding tank 300 according to the driving of the first pump 151, And serves to supply the pumped water to the fluid supply line 133 via the engine 139. Here, the reference numeral 138 denotes a pressure gauge. In addition, a valve for controlling the inflow amount of the liquid may be provided in the liquid supply lines 131a and 131b.

The gas supply line 132 is connected to the venturi injector 153 and supplies the gas to the fluid supply line 133 via the branch pipe 139 by the venturi injector 153 and supplies the gas to the fluid supply line 133 via the liquid supply line 131b And the gas is mixed with the liquid. At this time, the gas supply line 132 may further include a venture injector if necessary. Further, the gas supply line 132 may be provided with a valve for controlling the gas inflow amount when necessary.

The fluid supply line 133 is located in the second accommodation space 110a of the second tank 110 and the liquid supply line 131b and the gas supply line 133, And supplies the mixed fluid supplied through the supply line 132 to the second accommodation space 110a of the second tank 110. [ At this time, the end of the fluid supply line 133 may be configured to be adjacent to the bottom surface of the second tank 110 preferably.

The fluid discharge line 137 is formed on one surface of the first tank 120 and discharges the mixed fluid including the micro saturated gas.

The micro-bubble generating unit includes a micro-saturation unit 140, a fluid inflow line 134, and a fluid material supply line 136.

In this embodiment, the micro-saturation means 140 may be disposed outside the first tank 120, preferably below the first tank 120. In this case, since the capacity and size of the first pump 151 and the air compressor 153 must be increased, it is necessary to restrict the movement of the micro-bubble generating device .

However, in this embodiment, since the micro-saturation means is installed in a tank by-pass manner, the size and the capacity of the second pump 152 for supplying the mixed fluid to the micro-saturation means 140 are relatively The size of the micro-bubble generating device 100 is reduced in size as a whole, so that the facility cost can be reduced and it is easier to move the micro-bubble generating device.

One end of the fluid inflow line 134 is located in the second accommodation space 110a of the second tank 110 and the other end of the fluid inflow line 134 is connected to the microsatellite saturation means 140 to be connected to the second accommodation space 110a of the second tank 110, And a part of the mixed fluid accommodated in the micro-saturation saturating unit 140.

At this time, the fluid inlet line 134 is provided with a second pump 152 for pumping the mixed fluid from the second tank 110. One end of the fluid inflow line 134 is adjacent to the bottom surface of the second tank 110 so that the mixed fluid discharged from the fluid supply line 133 of the line portion is circulated in the second accommodating space 110a So that the second pump 152 can flow into the fluid inflow line 134 as much as possible. Reference numeral 135 denotes a connection line connecting the second pump 152 and the micro-saturation means 140.

The fluid re-supply line 136 has one end connected to the micro-saturation means 140 and the other end located in the second containing space 110a in the second tank 110 and containing micro-saturated gas via the micro- And serves to re-supply the mixed fluid to the second accommodation space 110a of the second tank 110

Further, the other end of the fluid re-supply line 136 may be configured to be adjacent to the bottom surface of the second tank. The fluid including the minute bubbles thus re-supplied overflows to the upper end of the second tank 110, is moved to the first accommodation space 120a of the first tank 120, and is discharged through the fluid discharge line 137.

At this time, the minute bubbles generate ultrasonic waves of 40 KHz, high sound pressure of 140 dB, instantaneous heat of 4000 to 6000 ° C and OH radicals, which are active materials, in the bubble disappearance, so that in the second accommodation space 110a, The effect of sterilizing various pathogenic microorganisms harmful to fish growth by physical force can be expected incidentally.

The micro-bubble generating device 100 of the present embodiment may further include a frame 160. The frame 160 serves as a main body to which the tank portion, the line portion, and the micro- . In addition, a plurality of wheels 170 may be installed on the bottom of the frame 160. In this case, since the position of the micro-bubble generator 100 can be freely changed, it is possible to appropriately supply the purified water to various positions of the breeding water tank 300 when applied to the breeding water tank 300 having a large area such as a farm site .

In addition, the micro-bubble generating device of the present embodiment can increase the dissolved oxygen efficiency in the water by up to 2.0 ppm without using pure oxygen by saturating the air in the atmosphere, , It is expected that the effect of the dissolved oxygen supply can reduce the consumption of expensive oxygen gas. In addition, when the dissolved oxygen is decreased in the summer, the dissolved oxygen can be increased to a level that is good for the growth of the fish in a short time, so that it can be used as an emergency response means in case of sudden decrease in dissolved oxygen.

Meanwhile, the microbubble generator of the present invention may further include a foreign matter removing unit.

FIG. 4 is a perspective view schematically showing a foreign substance removing unit according to an embodiment of the present invention, and FIG. 5 is a sectional view of FIG.

4 and 5, the foreign matter removing unit 200 of the present embodiment includes a housing 210, a mixed fluid inlet 260, a mixed fluid moving unit 230, a purified water moving unit 240, a foreign matter discharging unit 250 and a purified water discharge unit 270.

The housing 210 is a cylindrical water tank having upper and lower hollow portions. At this time, a plurality of moving wheels 280 may be installed on the bottom surface of the housing 210. In this case, it is possible to freely change the position of the foreign material removing unit 200, so that it is possible to appropriately supply the purified water to various positions of the raising water tank 300 when applied to the raising water tank 300 having a large area such as a farm site.

The mixed fluid inflow portion 260 is formed on a lower surface of the housing 210 and is connected to the fluid discharge line 137 of the microbubble generator 100 to include microbubble saturated gas by the microbubble generator 100 The mixed fluid flows into the housing 220 formed in the lower end of the housing 210. At this time, the mixed fluid inlet 260 may have a regulating valve 261.

The mixed fluid moving part 230 is elongated in the vertical direction in the housing 210 and has a structure in which the upper and lower surfaces are opened. At this time, the opened lower surface communicates with the accommodating part 220 and the mixed fluid inflow part 260 so that the mixed fluid introduced into the mixed fluid moving part 230 through the mixed fluid inflow part 260 flows into the lower part of the housing 210 To move upward by the hydraulic pressure.

The mixed fluid moving upward through the mixed fluid moving passage 232 is formed by the cohesion of the minute bubbles, so that the minute organic matter and the large organic matter stick to the bubbles to form a floc, thereby forming a soil brown bubble. Micro bubbles are very small in size from 5 to 20 占 퐉, so that the floating speed is slow and the time required for floc formation is relatively long, so that the efficiency is very high even in a small facility.

In the present embodiment, the mixed fluid moving part 230 has a tapered shape with a narrower width toward the upper side. Accordingly, the mixed fluid moving upward through the mixed fluid moving passage 232 is spirally swirled by the tapered shape of the collimated light. At this time, the moving speed also increases greatly toward the upper side due to the cyclone phenomenon. The upper foam layer formed with the scum and the lower water layer with the contaminant removed are generated at a high speed. At this time, the separation layer can be easily identified by the color difference between the foam layer and the purified water. The bubble layer is floated upward by the buoyant force when passing through the upper end of the mixed fluid moving passage 232 due to the fast moving speed of the mixed fluid, and then escapes through the gas outlet formed on the supporting plate of the purified water moving portion described later.

The purified water flow portion 240 includes a support plate 241 and a partition wall 242. The support plate 241 is installed horizontally inside the housing 210 at a position higher than the upper end of the mixed fluid moving part 230 and has a foreign matter discharge port 241a formed at the center thereof, 232, the scum escapes through the gas outlet 241a and only the clean water moves downward.

The partition wall 242 extends downward from the support plate 241 to divide the wall of the housing 210 and the mixed fluid moving part 230. Since the lower end of the partition wall 242 is formed to have a length that does not contact the mixed fluid moving part 230 and the housing 210 at this time, the purified water, which has exited through the upper opening part of the mixed fluid moving path 232, And then flows downward through the first purified water passage between the partition wall 242 and the wall of the housing 210 as shown in (b) of FIG. 5, And is moved upward through the provided second purified water moving passage. In this embodiment, by increasing the travel path of the purified water, it is possible to increase the number of treatments at one time.

The foreign matter discharging unit 250 is located at the upper end of the housing 210 and moves through the mixed fluid moving path 232 and discharges a scum that has escaped through the foreign matter discharging port 241a of the supporting plate 241 to the outside . At this time, the foreign matter discharging unit 250 may have a regulating valve 251.

The purified water discharging unit 270 discharges the purified water passing through the first and second purified water conveying passages that are located above the housing 210 and are preferably located below the supporting plate 241 and partitioned by the partition wall 242. At this time, the purified water discharging portion 270 may have a regulating valve 271. The purified water discharging unit 270 may be connected to, for example, the aquaculture tank 300 to supply the purified water to the breeding tank 300.

The present invention is not limited by the above-described embodiment and the accompanying drawings, but is intended to be limited by the appended claims.

It will be apparent to those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. something to do.

100; Micro-bubble generator
131a, 131b; Liquid supply line
132; Gas supply line
133; Fluid supply line
134; Fluid inflow line
135; Connection line
136; Fluid supply line
137; Fluid discharge line
139; Branch engine
140; Micro-saturation means
151; The first pump
152; The second pump
153; Venturi injector
160; frame
170, 280; Mobile wheel
200; Foreign material removal
210; housing
220; Receiving portion
230; Mixed fluid flow
232; Mixed fluid passage
240; Purified water eastern
241; Support plate
242; septum
250; The foreign-
260; Mixed fluid inlet
270; Purified water discharging portion
300; Breeding tank

Claims (6)

A micro bubble generator for injecting gas into the water supplied from the lubrication bath and saturating the micro bubbles; And
And a foreign matter removing unit connected to a rear end of the micro bubble generator,
The fine bubble generator
A first tank;
A second tank accommodated in the first tank so that the mixed fluid therein can be overflowed into the first tank;
A fluid supply line for supplying a fluid in which the liquid and the gas are mixed in the second tank;
A fluid inflow line for introducing a part of the mixed fluid from the second tank;
Micro-saturation means for micronizing the gas contained in the mixed fluid introduced through the fluid inlet line;
A fluid material supply line for re-supplying the mixed fluid passing through the micro-saturation means to the second tank; And
A fluid discharge line for discharging the mixed fluid including fine bubbles which have been transferred from the second tank to the first tank to the outside; / RTI >
The foreign-
housing;
A mixed fluid inlet connected to the fluid discharge line at a lower portion of the housing;
A mixed fluid moving passage provided in the housing in a conical shape and having a mixed fluid moving passage of a downwardly directed light, the mixed fluid moving passage having a lower end communicating with the mixed fluid inlet portion and an upper end opened;
A support plate provided with a gas discharge port and horizontally installed inside the housing from above the mixed fluid moving part, and a support plate extending downward conically from the support plate to separate the housing and the mixed fluid moving part from each other, A purifier moving part including a partition wall formed so as to prevent the purifier from moving;
A foreign matter discharging unit formed on the housing and discharging the foreign matter having passed through the gas discharging port to the outside; And
A purified water discharging portion formed on one side of the housing and discharging the purified water passing through the purified water passage divided by the partition wall to the outside; And a foreign matter removing unit including the foreign matter removing unit,
Wherein the micro-saturation means is connected directly to the second tank in a bypass manner, the fluid inlet line and the fluid material feed line being directly connected to the second tank.
2. The apparatus according to claim 1, wherein the supply port of the fluid supply line is disposed adjacent to the fluid inflow line in the second tank. delete 3. The apparatus according to claim 1 or 2, further comprising a frame for supporting the first and second tanks and the micro-saturation means, wherein a moving wheel is installed on the bottom surface of the frame. delete The apparatus for filtering micro-bubbles for aquaculture according to claim 1, wherein a moving wheel is installed on the bottom of the housing.
KR1020150070186A 2015-05-20 2015-05-20 Filtering apparatus using micro bubbles for fish farm KR101762181B1 (en)

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KR101762181B1 true KR101762181B1 (en) 2017-07-27

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108854253A (en) * 2018-07-11 2018-11-23 镇沅今晨山水产科技有限公司 A kind of fry hatching water purification installation
CN112535964A (en) * 2019-09-20 2021-03-23 中国石油化工股份有限公司 Micro-nano bubble generating device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100215310B1 (en) 1997-03-24 1999-08-16 최동민 Mixer of agent
KR200335075Y1 (en) * 2003-09-16 2003-12-01 이석주 Apparatus for Removing Waste of Fish Farm
JP5023481B2 (en) * 2005-12-08 2012-09-12 株式会社日立製作所 Liquid processing method and liquid processing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100215310B1 (en) 1997-03-24 1999-08-16 최동민 Mixer of agent
KR200335075Y1 (en) * 2003-09-16 2003-12-01 이석주 Apparatus for Removing Waste of Fish Farm
JP5023481B2 (en) * 2005-12-08 2012-09-12 株式会社日立製作所 Liquid processing method and liquid processing apparatus

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