KR101743266B1 - Heater pipe apparatus for detecting a gas leak - Google Patents

Heater pipe apparatus for detecting a gas leak Download PDF

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Publication number
KR101743266B1
KR101743266B1 KR1020150148478A KR20150148478A KR101743266B1 KR 101743266 B1 KR101743266 B1 KR 101743266B1 KR 1020150148478 A KR1020150148478 A KR 1020150148478A KR 20150148478 A KR20150148478 A KR 20150148478A KR 101743266 B1 KR101743266 B1 KR 101743266B1
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KR
South Korea
Prior art keywords
pipe
gas
cover
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present
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KR1020150148478A
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Korean (ko)
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KR20170047865A (en
Inventor
김태수
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브라이톤 (주)
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L57/00—Protection of pipes or objects of similar shape against external or internal damage or wear
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
    • G01M3/2807—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipes
    • G01M3/2815—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipes using pressure measurements

Abstract

An object of the present invention is to provide a gas leakage detection pipe device capable of quickly and accurately grasping a gas leakage position.
A pipe apparatus for gas leakage detection according to the present invention comprises: a pipe; A cover through which the pipe is inserted so as to surround the pipe; And a gas sensing part provided on the cover, and an internal space may be formed between the pipe and the cover.

Description

TECHNICAL FIELD [0001] The present invention relates to a pipe apparatus for gas leak detection,

The present invention relates to a pipe apparatus for gas leakage detection, and more particularly to a pipe apparatus for gas leakage detection for gas flow and leakage detection.

In general, the semiconductor process includes an oxidation process, a diffusion process, an ion impurity process, a deposition process, an etching process, and a metal process.

Generally, a semiconductor manufacturing equipment includes a reaction chamber or a reactor, and a process gas is injected into a reaction chamber or a reactor to inject a process gas necessary for the reaction. The reaction chamber has an airtight structure and can maintain atmospheric conditions such as a constant temperature and vacuum, and the remaining gas or reaction by-products after the completion of the predetermined process are discharged through the pipe.

At this time, fire and explosion may occur when piping is damaged due to corrosion or cracking, so that gas leakage can be detected and alerted through a gas detection device installed near the piping.

1 is a view showing a conventional gas pipe, in which a plurality of pipes 10 are connected to each other to form a gas flow path, and a gas sensing device 20 is disposed in the vicinity of the pipe 10. The gas sensing device 20 includes a gas sensor which senses when the pipe 10 is damaged and gas in the pipe 10 flows out through the damaged portion 11 and informs the central control portion or the like Depending on the system configuration, a variety of gas leaks can be signaled, for example, by sounding a warning sound.

However, according to the prior art, only the leakage of the gas is detected by the gas sensing device, and the leakage position can not be grasped. That is, since it is not possible to know which pipe has leaked, there is a problem that the operator inspects all of the pipes to determine the gas leakage position. Therefore, it takes a long time to grasp the position of gas leakage, and the maintenance is delayed, and the operation is troublesome. Particularly, the piping is generally installed on the ceiling side. In this case, it is very inconvenient and time-consuming because the access of the person is difficult and the ladder or the expensive device should be used.

Further, in case of a gas having high corrosiveness, since the pipe is rapidly corroded, a material having high corrosion resistance can be additionally used. In general, there are spray coating methods and indentation methods. The spray coating method is coating the corrosion resistant material on the inner surface of the pipe using the spray coating method. The press-fitting method is to press-fit the corrosion-resistant pipe made of a corrosion-resistant material into contact with the inner surface of the pipe.

However, in the case of the spray coating method, it is not easy to control the coating thickness, and since the coating thickness can not be made thick, only a thin coating is possible, so it is difficult to expect sufficient corrosion resistance.

In addition, in the case of the press-fitting method, since the corrosion-resistant pipe must have a minimum strength, the material must be made thicker than necessary.

Meanwhile, the gas used for carrying out the process may be varied according to the characteristics of the process, and the residual gas may be injected to form an insulating film in, for example, low pressure chemical vapor deposition (LP-CVD) cylinder ammonia chloride produced after the gas reaction in which (NH 4 Cl), aluminum chloride generated in the plasma etching process for aluminum etch (AlCl 3), this in addition to SiO 2, Al 2 O 3, SF 3, Cl 3, BCl 3 and the like. These residual gases maintain a gaseous state at a certain temperature or higher, but solidify at a specific temperature or lower.

Powder or the like may be generated when such gas is subjected to a high temperature working process and the residual gas or reaction by-products are cooled to a low temperature when they are discharged to the outside.

For example, in a semiconductor manufacturing process such as low pressure chemical vapor deposition (LPCVD) or plasma etching for aluminum etch, an ammonium chloride gas (NH4Cl) or aluminum chloride (NH4Cl) gas AlCl3). When the pipe discharging reaction by-products is maintained at room temperature, ammonium chloride gas is deposited on the inner surface of the pipe.

In this way, when the residual gas is solidified in the pipe due to a decrease in temperature during the exhaust of the residual gas, the pipe is narrowed when it is deposited and problems such as smooth exhaust of the residual gas are generated. And a separate heating device is installed in the pipe for this purpose so that the residual gas can be maintained in a gaseous state. A heating jacket is used as one of such heating devices.

The heating jacket is installed on the outer surface of the pipe to maintain the temperature of the pipe at a high temperature to prevent the residual gas from being rapidly cooled in the pipe to prevent the residual gas from solidifying and adhering to the inner surface of the pipe in powder form, .

An object of the present invention is to provide a gas leakage detection pipe device capable of quickly and accurately grasping a gas leakage position.

It is another object of the present invention to provide a pipe apparatus for gas leakage detection which can easily adjust the thickness of corrosion-resistant material.

It is another object of the present invention to provide a pipe device for gas leakage detection capable of raising the pipe temperature.

A pipe apparatus for gas leakage detection according to the present invention comprises: a pipe; A cover through which the pipe is inserted so as to surround the pipe; And a gas sensing part provided on the cover, and an internal space may be formed between the pipe and the cover.

Preferably, a tapered globe is formed through one side of the cover, and the gas sensing unit may be disposed in the tapered globe.

Preferably, the gas sensing part may include a gas sensor.

Preferably, the gas sensing unit may include a pressure sensor.

Preferably, between the pipe and the cover is sealed, and between the gas sensing part and the gas sensing part can be sealed.

Preferably, the inner surface of the pipe may be coated with a corrosion-resistant material.

Preferably, the corrosion-resistant material can be coated by a rotary coating method.

Preferably, a heating jacket for heating the pipe by wrapping the pipe,

Wherein the heating jacket includes: a heat transfer sheet for contacting the pipe to transfer heat; And a heating line provided on the heat-transfer sheet to apply heat to the heat-transfer sheet.

The pipe device for gas leakage detection according to the present invention can detect the gas leakage position quickly and accurately, which is very convenient compared to the conventional case and shortens the repair time. Further, the thickness of the corrosion-resistant material can be easily adjusted according to the requirement, and the effect of heating the pipe to prevent the pipe from being deposited or the like can be obtained.

1 is a view showing a conventional gas piping,
2 is a perspective view of a pipe apparatus for gas leakage detection according to an embodiment of the present invention,
3 is a side sectional view of a pipe apparatus for gas leakage detection according to an embodiment of the present invention,
FIG. 4 is a view showing gas leakage of a pipe apparatus for gas leakage detection according to an embodiment of the present invention; FIG.
5 is a side cross-sectional view of a pipe apparatus for gas leakage detection according to another embodiment of the present invention,
6 is a side sectional view of a pipe apparatus for gas leakage detection according to another embodiment of the present invention, and Fig.
7 is a perspective view of a pipe apparatus for gas leakage detection according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately It should be interpreted in accordance with the meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined. Therefore, the embodiments described in this specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. Therefore, It is to be understood that equivalents and modifications are possible.

FIG. 2 is a perspective view of a pipe apparatus for gas leakage detection according to an embodiment of the present invention, FIG. 3 is a side sectional view of a pipe apparatus for gas leakage detection according to an embodiment of the present invention, and FIG. FIG. 5 is a view showing a gas leak of a pipe device for detecting a gas leak according to FIG.

The pipe apparatus for gas leakage detection according to an embodiment of the present invention includes a pipe 100, a cover 200, and a gas sensing unit 300.

The cover 200 has a cylindrical shape, and the pipe 100 is inserted into the cover 200. The outer surface of the pipe 100 and the inner surface of the cover 200 are spaced apart from each other by a predetermined distance so that the diameter of the cover 200 is larger than the diameter of the pipe 100, An inner space can be formed in the inner space.

 Side walls are formed at both ends of the cover 200, and a through hole is formed in the center of the side wall so that the pipe 100 can be inserted. It is preferable that the pipe 100 and the side wall are not necessarily sealed in the state where the pipe 100 is inserted into the through hole, but it is preferable that the pipe 100 and the side wall are sealed for more accurate gas leakage detection. According to one embodiment, when the diameter of the through-hole is larger than the outer diameter of the pipe 100, the space between the pipe 100 and the through-hole can be closed with a filling material and sealed. Further, according to another embodiment, the diameter of the through-hole may be tightly coupled with the outer diameter of the pipe 100, and may be closed and sealed with a filler material if necessary.

The gas sensing unit 300 includes a gas sensor capable of sensing a gas, and the gas sensing unit 300 includes a gas sensor do. The construction of the gas sensor is merely a well-known conventional technology, and a further description thereof will be omitted. In addition, according to another embodiment of the present invention, the gas sensing unit 300 can detect a gas leak by using a gas sensing means that changes color to acid or alkali.

In addition, the gas sensing unit 300 may include a transmitter for transmitting a gas sensing signal when gas is detected from the gas sensor, and the transmitter may be a wireless transmitter or a wired transmitter.

A plurality of the pipe apparatuses for gas leakage detection are connected to form a gas flow path, and signal lines may be connected to the gas sensing unit 300 when the transmitter unit is a wire transmission unit.

4, when the pipe 100 is damaged, gas in the pipe 100 flows out through the damaged part. The discharged gas flows in the cover 200 and flows through the gas sensing part 210, (300). The leaked gas is detected by a gas sensor, and a corresponding gas detection signal is transmitted to a central control unit or the like which manages the entire facility. Therefore, it is possible to accurately grasp the pipe 100 in which the gas leaks out of the plurality of pipes 100.

According to another embodiment of the present invention, a warning lamp, a speaker, and the like may be provided and operated when a gas is sensed to visually and audibly warn the gas leakage of the gas leakage detection pipe device.

According to another embodiment of the present invention, the gas sensing part 300 is hermetically sealed by the gas sensing part 210, and the space between the pipe 100 and the through- Can be completely sealed from the outside. At this time, a pressure sensor is used as a gas sensor, and gas leakage can be detected by detecting pressure change of the internal space generated when gas is leaked.

5 is a side cross-sectional view of a pipe apparatus for gas leakage detection according to another embodiment of the present invention.

The inner surface of the pipe 100 is coated with a corrosion-resistant material, according to one embodiment, coated by a spin coating process. The corrosion resistant material may be a fluororesin (Teflon) series such as ECTFE, ETFE, PTFE, PFA, and FEP. However, the material is not limited thereto, and any material having excellent corrosion resistance and being capable of coating can be used.

The thickness of the coating layer 110 may be about 0.1 mm to 6 mm, and the thickness of the coating layer 110 may be adjusted according to the use conditions and specifications. The coating layer 110 is preferably formed by a spin coating method and the inner surface of the pipe 100 may be coated with a uniform thickness by rotating the pipe 100 in a state where the coating material is put in the pipe 100.

6 is a side cross-sectional view of a pipe apparatus for gas leakage detection according to another embodiment of the present invention, in which a heating jacket 400 for heating a pipe 100 can be fixed by surrounding an outer surface of the pipe 100. [

The heating jacket 400 includes a heat transfer sheet, and the pipe 100 can be heated from the heating line provided on the heat transfer sheet through the heat transfer sheet.

Although not shown, a bimetal, a temperature sensor, a thermal fuse, and the like may be provided, and the bimetal may be operated depending on the set temperature, so that the pipe 100 may be heated by connecting / disconnecting the power. The temperature controller (not shown) receives the measured temperature from the temperature sensor and controls the temperature of the hot wire of the heating jacket 400, thereby controlling the temperature of the pipe 100 It can be kept constant. In addition, thermal fuses can prevent overcurrents from occurring, thereby preventing accidents such as circuit damage and fire. In addition, an overcurrent shutdown device, an earth leakage shutoff device, .

Further, it is possible to detect whether or not the heater is operated by lighting the heater operation lamp according to the heater operation state.

FIG. 7 is a perspective view of a pipe device for detecting gas leakage according to another embodiment of the present invention. When the pipe is a corrugated pipe 100A, the pipe may be inserted into the cover 200. FIG.

In addition, the shape of the cover 200 can be manufactured in response to deformation of a variety of pipe shapes and corrugated pipes such as a T-shaped pipe and an El storage.

According to the prior art, only the leakage of the gas is detected by the gas sensing device, but the leakage position can not be grasped. That is, since it is not possible to know which pipe has leaked, there is a problem that the operator inspects all of the pipes to determine the gas leakage position. Therefore, it takes a long time to grasp the position of gas leakage, and the maintenance is delayed, and the operation is troublesome. Particularly, the piping is generally installed on the ceiling side. In this case, it is very inconvenient and time-consuming because the access of the person is difficult and the ladder or the expensive device should be used.

Further, when the corrosion-resistant material is used, the thickness adjustment is not easy and it is difficult to expect a sufficient corrosion resistance, or the material cost increases more than necessary.

However, according to the present invention, it is possible to quickly and accurately grasp the gas leakage position, which is very convenient compared to the prior art, and the maintenance time can be shortened. Further, the thickness of the corrosion-resistant material can be easily adjusted according to the requirement, and the effect of heating the pipe to prevent the pipe from being deposited or the like can be obtained.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Various modifications and variations are possible within the scope of the appended claims.

100: pipe 110: coating layer
200: cover 210:
300: gas sensing part 400: heating jacket

Claims (8)

A pipe for injecting a process gas in semiconductor manufacturing equipment;
A cover inserted into the pipe so as to surround the pipe and forming an internal space between the pipe and the pipe;
A gas sensing unit disposed in a tapered region formed through one side of the cover and sensing a gas flowing into the internal space from the pipe and discoloring by acid or alkali; And
A heating jacket for heating the pipe by wrapping the pipe and contacting the pipe to transfer heat, and a heating jacket provided on the heat-transfer sheet and including a heating wire for applying heat to the heat-
/ RTI >
A coating layer of 0.1 mm to 6 mm is formed on the inner surface of the pipe by coating a corrosion resistant material of fluororesin type by a rotary coating method,
Wherein the pipe is sealed between the pipe and the cover, and the gap is sealed between the gas sensing part and the gas sensing part.
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KR1020150148478A 2015-10-26 2015-10-26 Heater pipe apparatus for detecting a gas leak KR101743266B1 (en)

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Application Number Priority Date Filing Date Title
KR1020150148478A KR101743266B1 (en) 2015-10-26 2015-10-26 Heater pipe apparatus for detecting a gas leak

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KR20170047865A KR20170047865A (en) 2017-05-08
KR101743266B1 true KR101743266B1 (en) 2017-06-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230001018U (en) * 2021-11-11 2023-05-18 주식회사 하플루스 A fitting lock apparatus for semiconductor fab

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005221348A (en) * 2004-02-04 2005-08-18 Laserfront Technologies Inc Piping with leak detecting function and leak detector
JP3736771B2 (en) * 1995-09-29 2006-01-18 ローズマウント インコーポレイテッド Fluid tube for conveying erodible liquid, enclosure structure thereof, and manufacturing method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3736771B2 (en) * 1995-09-29 2006-01-18 ローズマウント インコーポレイテッド Fluid tube for conveying erodible liquid, enclosure structure thereof, and manufacturing method thereof
JP2005221348A (en) * 2004-02-04 2005-08-18 Laserfront Technologies Inc Piping with leak detecting function and leak detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230001018U (en) * 2021-11-11 2023-05-18 주식회사 하플루스 A fitting lock apparatus for semiconductor fab
KR200497141Y1 (en) 2021-11-11 2023-08-08 주식회사 하플루스 A fitting lock apparatus for semiconductor fab

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