KR101739726B1 - Method of manufacturing light transmitting conductor comprising nano-fiber pattern - Google Patents

Abstract

The present invention provides a method of manufacturing a light-transmitting conductor, comprising the steps of: (1) forming a conductive material on a substrate; (2) arranging a photomask having a pattern corresponding to a nanofiber network arranged so that the nanofibers are crossed on the conductive material; And (3) forming a pattern corresponding to the nanofiber network on the conductive material by using a photomask having a pattern corresponding to the nanofiber network, and separating the photomask on the conductive material to form a conductive layer And a plurality of light transmissive conductors having a conductive layer in which a pattern corresponding to the same nanofiber network is formed using the separated photomask.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a method of manufacturing a light transmitting conductor having a nanofiber pattern,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a light transmitting conductor, and more particularly, to a method of manufacturing a light transmitting conductor having a nanofiber pattern.

The light-transmitting conductor is a thin conductive film which transmits light in a visible light region and has electrical conductivity. BACKGROUND ART [0002] Light-transmitting conductors have been widely used widely in various electronic apparatuses. For example, a light transmissive conductor is widely used as a transparent electrode in a flat panel display panel such as a flat panel TV or a liquid crystal display of a desktop PC, a touch panel of a tablet PC, a smart phone, an electroluminescent device, or the like. These light transmissive conductors generally have characteristics that are not compatible with each other, namely, light transmittance and conductivity. That is, generally, in a light-transmitting conductor, if the light transmittance is high, the conductivity is poor, and if the conductivity is high, the light transmittance tends to be low, so that it is difficult to increase both the light transmittance and the conductivity.

Conventionally, a metal oxide such as indium tin oxide (ITO) has been widely used as a light-transmitting conductor in order to have high light transmittance and conductivity. However, such a metal oxide has a problem that the light transmittance is deteriorated as the conductivity is improved.

A light transmissive conductor of a metal mesh structure is also widely used. However, since the light transmitting conductor of the metal mesh structure is difficult to finely form the line width, there is a problem of visibility depending on the viewing distance, a complicated process, and moiré phenomenon due to the pattern structure.

Recently, it has been actively studied to form a light-transmitting conductor by using a nanostructure such as a carbon nanotube or a silver nanowire. However, the light transmissive conductor using such a nanostructure has a problem in that the individual nanostructure units are connected to each other in a state of being in contact with each other, resulting in poor conductivity.

Accordingly, there is a need to develop a light-transmitting conductor which is excellent in both light transmittance and conductivity, improves visibility, can prevent moire phenomenon, and is easy to manufacture.

Patent Registration No. 8049333 of the United States Patent and Trademark Office US Patent Office Registration No. 8604332 Korean Intellectual Property Office Registration No. 10-1328483

It is an object of the present invention to provide a method of manufacturing a light-transmitting conductor having a nanofiber pattern.

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According to a twenty-third aspect of the present invention, there is provided a method of manufacturing a light-transmitting conductor comprising the steps of: (1) forming a conductive material on a substrate; (2) arranging a photomask having a pattern corresponding to a nanofiber network arranged so that the nanofibers are crossed on the conductive material; And (3) forming a pattern corresponding to the nanofiber network on the conductive material by using a photomask having a pattern corresponding to the nanofiber network, and separating the photomask on the conductive material to form a conductive layer And a plurality of light transmissive conductors having a conductive layer in which a pattern corresponding to the same nanofiber network is formed using the separated photomask.

In the invention described in claim 24, the conductive material of step (1) according to claim 23 is a photosensitive material.

The invention described in claim 25 is characterized in that a photosensitive material is formed on the conductive material of step (1) described in claim 23, and the photomask of step (2) is arranged on the photosensitive material.

According to the invention set forth in claim 26, the photomask of the above-mentioned (23) is a light-transmitting substrate and a light-shielding layer on the substrate, wherein light incident from the outside to the substrate is reflected by the substrate And the light shielding layer includes a pattern corresponding to a nanofiber network formed by arranging the nanofibers so as to intersect with each other.

In the invention described in claim 27, the step (3) according to claim 24 or 25 includes exposing the conductive material through the photomask by an exposure system, and developing and etching the exposed conductive material .

In the invention described in claim 28, the pattern of step (3) according to claim 23 is amorphous.

The present invention can provide a method for producing a light-transmitting conductor having a nanofiber pattern.

Fig. 1 is a perspective view schematically showing a light-transmitting conductor as Example 1. Fig.
Fig. 2 is a plan view showing a pattern of a conductive layer on a substrate in the light transmissive conductor of Fig. 1;
3 is a partial plan view showing a part of the conductive layer pattern of Fig.
4 is a cross-sectional view taken along the line IV-IV in Fig.
5 is a perspective view showing a state in which a terminal layer is provided on a light-transmitting conductor as Example 2. Fig.
6A to 6E are views showing a method of manufacturing a light-transmitting conductor as Example 3. Fig.
7 is a view showing a manufacturing method of a light-transmitting conductor as Example 3. Fig.

Specific details for carrying out the invention are described on the basis of practical examples. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, the invention in its broader aspects is not limited to the specific details, representative devices, And the like.

(Example 1)

In this embodiment, as shown in FIG. 1 by way of example, a light transmitting conductor 100 includes a substrate 110 and a conductive layer 120.

The light transmissive conductor 100 is capable of transmitting light and having electrical conductivity. Here, the light transmittance is preferably 90% or more.

The substrate 110 refers to a conductive layer 120 formed on the conductive layer 120 by coating or laminating. The substrate 110 may be rigid or flexible. The substrate 110 may be light transmitting or light non-transmitting. The substrate 110 may be formed of a rigid material such as glass, polycarbonate, acrylic or the like or a soft material such as polyester, polyolefin, polyvinyl, polyimide, silicone, or the like. In addition, the substrate 110 may be formed of a cyclic olefin polymer (COP), a cyclic olefin copolymer (COC), or triacetyl cellulose (TAC). However, the material forming the substrate 110 is not limited thereto.

The conductive layer 120 refers to an electric conductive layer formed on the substrate 110. The conductive layer 120 may have an electrical conductivity of 150? /? Or less. Preferably, the conductive layer 120 may have an electrical conductivity of 50? /? Or less. The electrical conductivity of the conductive layer 120 may be appropriately selected in consideration of the characteristics of the conductive material constituting the conductive layer 120. The conductive layer 120 may have a substantially constant thickness. As a result, the conductive layer 120 does not have an outwardly protruding portion, which makes it difficult to form static electricity, so that it is possible to prevent damage due to static electricity, and it is not necessary to add a separate coating layer for preventing static electricity. For example, the conductive layer 120 preferably has a thickness of 100 nm to 300 nm. The conductive layer 120 preferably has a substantially constant thickness, but is not limited thereto and may have any thickness as long as it forms a layer. The conductive layer 120 may also be a single, monolithically formed monolith, e.g., a copper monolayer. However, the conductive layer 120 is not limited to a monolithically formed monolithic body but may be formed as a plurality of layers such as three layers of molybdenum-aluminum-molybdenum (Mo-Al-Mo) .

The conductive layer 120 includes a conductive material. The conductive material included in the conductive layer 120 may include a metal such as copper, aluminum, silver, molybdenum, and nickel. However, the conductive material included in the conductive layer 120 is not limited to metal, and may be a conductive metal or a metal compound such as a silver halide as long as it has conductivity. The conductive material may be formed on the substrate 110 in various ways. For example, the conductive material may be formed on the substrate 110 by vapor deposition by sputtering.

The conductive layer 120 includes a pattern corresponding to a nanofiber network formed by arranging the nano-fibers so as to cross each other. The nanofibers may be selected from the group consisting of poly (vinylpyrrolidone), poly (vinylidene fluoride), poly (lactic acid), poly (caprolactone) But are not limited to, polypropylene, polyurethane, polystyrene, poly (methyl methacrylate), polycarbonate, polyethylene oxide, polyethylene terephthalate (Polyvinyl alcohol), poly (9-vinylcarbazole), poly (acrylonitrile), nylon 6, nylon 6, nylon 6, , 6), poly (acrylic acid), polyethylene, chitosan, collagen, cellulose, fibrinogen, sol- gel, hyaluronic acid, polyethylene glycol e glycols, poly (methacrylate), polyvinyl acetate, polyfurfuryl alcohol, and mixtures thereof. If it is a nanofiber, it includes any substance. For example, carbon nanofibers can be used as nanofibers. Since the conductive layer 120 includes a pattern corresponding to the nanofiber network, the width of the portion corresponding to each of the nanofibers forming the conductive layer 120 can be narrowed to a high degree, . Accordingly, the conductive layer 120 is formed of a conductive material having high conductivity and is formed in a pattern corresponding to a nanofiber network capable of securing high light transmittance, thereby greatly improving light transmittance and conductivity at the same time.

The pattern corresponding to the nanofiber network formed so that the nanofibers are arranged so as to intersect is not a nanofiber network itself but a pattern formed corresponding to such a network. Such a pattern has a plurality of body portions 121, a plurality of intersection portions 122, and openings 123, as exemplarily shown in Fig. The body portion 121 refers to a portion corresponding to the nanofiber of the nanofiber network and the intersection portion 122 refers to a portion formed by intersecting the body portions 121. The opening portion 123 corresponds to a portion of the body portion 121 . The main body 121 and the intersection 122 are elements that make the conductive layer 120 conductive and the opening 123 is an element that makes the conductive layer 120 light-transmissive. The body portions 121a, 121b, 121c, and 121d and the intersections 122a, 122b, 122c, and 122d may form a closed system 125 that is connected to include an opening 123a therein. Accordingly, the body portions 121 are connected to each other in a redundant manner, thereby improving the reliability of the electrical connection between the portions, thereby effectively preventing the breakage of the electrical connection between the portions of the light- . The other body portions 121e, 121f, and 121g and other intersections 122e, 122f, and 122g may form an open system 126 connected so that the inside and the outside are not distinguished from each other. The opening 123 may be an open system opening 123b formed by a closed system opening 123a formed in the closed system 125 and an open system 126. [ The closed system 125 and the open system 126 may be separated from each other and positioned independently or adjacent to each other. Also, an open system 126 may be located within the enclosure 125, or vice versa, the enclosure 125 may be located within the open system 126.

The body portion 121 is extended continuously from one edge to the other edge of the conductive layer 120, so that it does not have a terminal portion in the pattern. As a result, the reliability of the connection of the conductive layer 120 by the body portion 121 and the intersection portion 122 can be further ensured, and the conductive layer (not shown) The reliability of the connection of the microelectrode pattern corresponding to the electrodes 120 can be secured and the prevention of the electrostatic phenomenon at the end portions can be realized.

As shown in FIG. 3, the width w of the body 121 may be variously formed depending on how the nanofiber network is formed. Here, the width w of the body part means an actual width of the body part 121 or an average thereof. For example, the width w of the main body 121 may fall within a range of 100 nm? W? 2500 nm. The width w of the main body 121 may be variously formed according to the thickness t of the main body 121. For example, when the thickness of the main body 121 is t, the width w of the main body 121 may fall within a range of 100 (nm)? W? 5t. Therefore, for example, when the thickness t of the body portion 121 is 0 < t < 100 nm, the width w of the body portion 121 can fall within a range of 100 nm? W? 500 nm, The width w of the main body portion 121 can be in the range of 100 nm? W? 1500 nm when the thickness t of the main body portion 121 is 100 nm < t? 300 nm, The width w can be in the range of 100 nm < w &lt; 2500 nm.

The thickness t of the main body 121 may fall within a range of 0 < t &lt;

As shown in FIGS. 1 and 2, the length of the main body 121 may be variously formed depending on how the nanofiber network is formed. Here, the length of the main body 121 may mean the actual length of the main body 121 or an average thereof. The length of the main body portion 121 may be related to the width w ₁ of the main body portion. For example, when the width of the main body portion 121 is w ₁ and the length of the main body portion 121 is d ₁ , it can be in the range of ₁ × 10 ² ≦ d ₁ / w ₁ ≦ 5 × 10 ⁶ .

The relationship between the width and the length of the main body 121 can be substantially determined by the aspect ratio A of the nanofibers constituting the nanofiber network (i.e., the ratio of the length of the nanofibers divided by the average diameter of the nanofibers) have. For example, the aspect ratio A of the nanofibers may be ¹ x ¹⁰ < However, the relationship between the width and the length of the main body 121 is not limited to this.

 On the other hand, the intersection portion 122 may have substantially the same thickness as the body portion 121. The pattern of the conductive layer 120 can be formed as a single body and the intersection portion 122 can have substantially the same conductivity as the body portion 121 so that the intersection portion 122 can contact the body portions 121 It is possible to prevent the occurrence of a decrease in touch sensitivity due to the contact resistance.

The size and shape of the region of the opening 123 can be variously formed. For example, the size and shape of the region of the opening 123 may be determined by the distance between the body portions 121 in effect. The size of the area of the opening 123 can be adjusted depending on how the nanofiber network is structured.

The pattern of the conductive layer 120 may be amorphous. By forming the amorphous pattern in this manner, it is possible to prevent the moire phenomenon in which the stripes are seen due to repetition of the regular pattern. However, the pattern of the conductive layer is not limited to amorphous, and any structure may be used as long as it includes a pattern corresponding to a network formed by arranging the nanostructures crossing each other.

On the upper surface of the conductive layer 120, for example, a dark color layer 130 having a dark color such as black may be formed as shown in FIG. As a result, the light passing through the conductive layer 120 having the dark color layer 130 on the upper side can be seen clearly and clearly, and visibility can be improved. When the conductive layer 120 is made of metal, the dark color layer 130 can be easily formed by a method such as oxidizing the upper surface thereof. When the conductive layer 120 is made of a non-metal, the dark color layer 130 may be formed by adding a separate layer to the upper surface of the conductive layer 120.

(Practical example 2)

5, the conductive layer 220 is electrically connected to the conductive layer 220 on the substrate 210 corresponding to the outside of the edge of the conductive layer 220 of the light transmitting conductor 200. In this embodiment, And a terminal layer 230 is formed on the terminal layer 230.

Accordingly, the light transmissive conductor 200 is connected to an external circuit (not shown) through the terminal layer 230, thereby making it possible to act as a constituent part of a system such as a touch screen panel or the like.

The terminal layer 230 may be formed of a nanofiber network that is the same material as the conductive layer 220 so that the electrical action of the user's touch or the like in the conductive layer 220 is smoothly transmitted to the terminal layer 230 I can do it.

The conductive layer 220 includes a plurality of sensing portions 227 spaced apart at predetermined intervals to sense an external touch and transmit an electrical signal. The terminal layer 230 includes a plurality of terminal portions 231 and connection portions 232 connected to the sensing portions 227 of the conductive layer 220. The electrical signal sensed by the sensing unit 227 is transmitted to the external circuit through the connection unit 232 and the terminal unit 231 of the terminal layer 230.

The terminal layer 230 may be formed to have substantially the same thickness as the conductive layer 220, thereby forming the terminal layer 230 together with the conductive layer 220, thereby simplifying the process.

(Example 3)

In this embodiment, as shown in Figs. 6A to 6E as an example, a method of manufacturing a light-transmitting conductor is shown.

In the method of manufacturing the light-transmitting conductor of the present embodiment, the conductive material 330 is first coated on the substrate 310 (FIG. 6A). Here, the conductive material 330 may be a metal having good conductivity, such as gold, silver, or copper, or a nonmetal having conductivity. The conductive material 330 may be coated on the substrate 310 by various methods such as spin coating and plating. Next, the nanofibers are arranged to form a nanofiber network 340 arranged so that the nanofibers are crossed on the conductive material 330 (FIG. 6B). The nanofibers may be selected from the group consisting of poly (vinylpyrrolidone), poly (vinylidene fluoride), poly (lactic acid), poly (caprolactone) But are not limited to, polypropylene, polyurethane, polystyrene, poly (methyl methacrylate), polycarbonate, polyethylene oxide, polyethylene terephthalate (Polyvinyl alcohol), poly (9-vinylcarbazole), poly (acrylonitrile), nylon 6, nylon 6, nylon 6, , 6), poly (acrylic acid), polyethylene, chitosan, collagen, cellulose, fibrinogen, sol- gel, hyaluronic acid, polyethylene glycol e glycols, poly (methacrylate), polyvinyl acetate, polyfurfuryl alcohol, and mixtures thereof.

The nanofiber network 340 is preferably arranged to have an amorphous pattern.

The nanofiber network 340 can be formed by a variety of methods. For example, the nanofibers network 340 can be formed by injecting nanofibers onto the conductive material 330 by electrospinning. Electrospinning is a method of obtaining nanofibers by instantly spinning in the form of a fiber by using a polymer having a low viscosity state by an electrostatic force. Electrospinning uses a high voltage to obtain a charged polymer jet solution or the like. This charged polymer jet solution is dried or solidified to obtain polymer fibers. One electrode is spin coated with solution to bond to the surface of the other collector.

Another method of forming a nanofiber network is melt blown. The meltblown method is a method in which when a polymer in a molten state is extruded from a spinneret having a fine diameter, the polymer is stretched before being solidified by high-temperature high-temperature air coming from a slit located beside the spinneret, , And the superfine fibers are laminated on the collecting body disposed in front of the spinning orifice, and the web is formed by thermal adhesion between the fibers in a state where they are not sufficiently solidified.

Another method of forming a nanofiber network is the spunbond method. The spunbond method is a process of directly spinning a polymer with a continuous filament, and is characterized by comprising a step of forming a web by arbitrarily arranging and laminating, and a bonding step of enhancing bonding between fibers and stabilizing the shape. The raw materials used are thermoplastic polymers such as nylon, polyester, and polypropylene. Specifically, in the spinning process, the polymer is melted to have a constant viscosity in the emitter, then supplied to the filter device and continuously spun into filaments through the spinneret. When the filament is emitted from the spinneret, the filament is moved to the cooling chamber. When the filament passes through the chamber, a cooling air stream flows through the filament and the melted filament is solidified.

Next, a shape corresponding to the nanofiber network 340 is formed in the conductive material 330 using the nanofiber network 340 (FIG. 6C). The conductive material 330 is formed to have a pattern corresponding to the nanofiber network 340 by spraying a corrosive agent such as an etchant to the conductive material 330 through the nanofiber network 340 with an apparatus such as the nozzle 360. [ do. Next, the conductive material 330 remaining on the upper surface of the conductive material 330 having a pattern corresponding to the nanofiber network 340 is peeled off using an apparatus such as the nozzle 370 to form the conductive layer 350 (Fig. 6D). The light transmitting conductor 300 is completed through such a process (FIG. 6E).

In addition, the method may further include forming a terminal layer (not shown) electrically connected to the conductive layer 350 on the substrate 310 corresponding to the outside of the edge of the conductive layer 350.

(Example 4)

In this embodiment, as shown in FIG. 7 by way of example, another manufacturing method of the light-transmitting conductor is shown. The manufacturing method of the light transmissive conductor 400 of the present embodiment is to form the terminal layer 430 as well as the conductive layer 420 on one conductive material. To this end, first, a conductive material is coated on the substrate 410. In this case, the conductive material is formed to include both the region where the conductive layer 420 is formed and the region where the terminal layer 430 is formed. Next, the terminal layer 430 is patterned on the conductive material before the conductive layer 420 is formed. The terminal layer 430 is formed in a portion other than the portion where the conductive layer 420 on the conductive material is to be formed. The terminal layer 430 may be formed by photolithography, but is not limited thereto. The terminal layer 430 is formed to include the terminal portion 431 and further includes the connection portion 432 so that the electrical connection with the conductive layer 320 can be smoothly performed. After the terminal layer 430 is formed, the nanofibers are arranged to form a nanofiber network arranged such that the terminal layer 430 crosses the nanofibers on the conductive material so that the patterned portion is included. To this end, the nanofibers are coated on the conductive material using a device such as a shadow mask in which a portion corresponding to the terminal layer 430 is clogged and a portion corresponding to the conductive layer 420 is opened. Nanofiber networks can be formed by various methods. For example, nanofibers can be formed by electrospinning nanofibers into the conductive phase. Next, a pattern corresponding to the nanofiber network is formed on the conductive material except for the terminal layer 430 using the nanofiber network to form the conductive layer 420 connected to the terminal layer 430.

The conductive layer 420 and the terminal layer 430 are formed on one conductive material together with the sensing portions 427 of the conductive layer 420 and the terminal layer 430 can be formed together to simplify the process and save the material. In addition, the area of the portion corresponding to the substrate on which the terminal layer 430 is formed can be narrowed, thereby making it possible to make the display compact.

(Example 5)

This embodiment relates to another manufacturing method of the light-transmitting conductor.

In the method of manufacturing the light-transmitting conductor of this embodiment, first, a conductive material is coated on a substrate, and a photomask having a pattern corresponding to a nanofiber network arranged so as to cross the nanofibers on the conductive material is arranged Next, the conductive layer is formed by forming a pattern corresponding to the nanofiber network on the conductive material by using the photomask. As a result, a light-transmitting conductor having a conductive layer in which a pattern corresponding to the same nanofiber network is formed can be manufactured very easily in large quantities.

The conductive material may be made of various materials having conductivity. For example, the conductive material may be made of a metal such as copper, silver, or gold.

The conductive material may be formed of a photosensitive material such as a silver halide. In this case, the conductive material may be exposed to light through a photomask by a direct exposure system without forming a separate photosensitive material to form a pattern. .

The photosensitive material may be additionally formed on the conductive material. In this case, a photomask having a pattern corresponding to a network of nanofibres is arranged on the photosensitive material, and exposure through the exposure system can be performed through the photomask. Thus, after forming a pattern on the photosensitive material, a pattern corresponding to the nanofiber pattern may be formed on the conductive material to correspond to the pattern formed on the photosensitive material.

The photomask has a light-shielding layer on a light-transmitting substrate. The light-shielding layer can be formed by forming a light-shielding material such as chromium on the light-transmitting substrate by spin coating, plating, vapor deposition or the like, which prevents light incident from the outside to the light-transmitting substrate from penetrating the substrate. Further, the light-shielding layer includes a pattern corresponding to a nanofiber network formed by arranging the nanofibers so as to cross each other. Such a light-shielding layer is formed on the light-shielding material formed on the light-transmitting substrate in a manner similar to that in Embodiment 4 or Example 5, in which the conductive layer is formed by forming a pattern corresponding to the nanofiber network on the conductive material formed on the substrate. Can be formed by forming a pattern corresponding to the fiber network. However, the method of forming the light shielding layer is not limited to this, and various methods can be used.

After arranging the photomask on the conductive material, the conductive material is exposed through the photomask by the exposure system. Then, after removing the photomask, the exposed conductive material is developed and etched to form a conductive layer on the conductive material by forming substantially the same pattern as the pattern corresponding to the nanofiber network of the photomask. Here, the pattern formed on the conductive material may be amorphous.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Is possible. Accordingly, the scope of protection of the present invention is defined by the technical idea of the appended claims.

INDUSTRIAL APPLICABILITY The present invention can be applied to a field to which a light-transmitting conductor and a manufacturing method thereof are applied.

100, 200, 300, 400: light-transmitting conductor
110, 210, 310, 410: substrate
120, 220, 320, 420: conductive layer
121, 221, 321:
122, 222, 322:
123, 323:
124, 324: end
130: dark colored layer
330: Conductive material
340: nanofiber network
427:
430: terminal layer
431:
432:

Claims (28)

delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete (1) forming a conductive material on a substrate;
(2) arranging a photomask having a pattern corresponding to a nanofiber network arranged so that the nanofibers are crossed on the conductive material; And
(3) forming a pattern corresponding to the nanofiber network on the conductive material by using a photomask having a pattern corresponding to the nanofiber network, and separating the photomask on the conductive material to form a conductive layer, Including,
Wherein a plurality of light transmitting conductors having a conductive layer in which patterns corresponding to the same nanofiber network are formed using the separated photomask are produced. 24. The method of claim 23,
Wherein the conductive material of step (1) is a photosensitive material. 24. The method of claim 23,
The method of manufacturing a light-transmitting conductor according to claim 1, wherein a photosensitive material is formed on the conductive material in step (1), and a photomask in step (2) is arranged on the photosensitive material. 24. The method of claim 23,
The photomask of the step (2) includes a light-transmitting substrate and a light-shielding layer on the substrate,
Wherein the light-shielding layer includes a light-shielding material that prevents light incident on the substrate from being transmitted from the outside to the substrate,
Wherein the light-shielding layer comprises a pattern corresponding to a nanofiber network formed by arranging the nanofibers so as to cross each other. The method of claim 24 or 25,
Wherein the step (3) includes exposing the conductive material through the photomask by an exposure system, and developing and etching the exposed conductive material. 24. The method of claim 23,
Wherein the pattern of step (3) is an amorphous light-transmitting conductor.

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