KR101735678B1 - Method for monitoring laser beam having feedback of temperature profile - Google Patents

Method for monitoring laser beam having feedback of temperature profile Download PDF

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Publication number
KR101735678B1
KR101735678B1 KR1020150141435A KR20150141435A KR101735678B1 KR 101735678 B1 KR101735678 B1 KR 101735678B1 KR 1020150141435 A KR1020150141435 A KR 1020150141435A KR 20150141435 A KR20150141435 A KR 20150141435A KR 101735678 B1 KR101735678 B1 KR 101735678B1
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South Korea
Prior art keywords
laser beam
controlling
laser
shading device
cross
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KR1020150141435A
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Korean (ko)
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KR20170042032A (en
Inventor
최종립
임재원
유영동
김병겸
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주식회사 루세로텍
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Abstract

A laser beam monitor method with energy profile feedback according to an embodiment of the present invention includes the steps of forming and irradiating the shape and size of a laser beam output from a laser source according to the requirements of an application, And controlling the energy profile on the laser beam cross section by controlling the shade device inserted in the movement path of the laser beam according to the measurement result.

Description

[0001] METHOD FOR MONITORING LASER BEAM HAVING FEEDBACK OF TEMPERATURE PROFILE [0002]

The present invention relates to a laser beam monitor method, and more particularly, to a laser beam monitor method having energy profile feedback capable of monitoring various characteristics of a laser beam in real time during a process and controlling the intensity of the laser beam by feeding back the characteristics .

2. Description of the Related Art [0002] In recent years, laser devices have been widely used for modification of a substrate surface, via hole machining, or formation of a specific pattern in a microprocessing process for semiconductors and displays. For this purpose, a number of techniques for processing a laser beam into a specific shape have been developed, and a technique for processing a special shape for a new laser utilization process is still required.

Techniques for shaping the spatial shape of a laser into a line or a plane have been developed, that is, techniques for maintaining spatial intensity of a beam in a specific form or minimizing a transition width of an edge portion have been developed.

However, in such a precisely shaped laser, the characteristic of the beam is deformed by an environmental factor or the like differently from the setting of the initial recipe until it is irradiated on the imaging surface, that is, the target, There is a problem that an abnormality occurs.

Therefore, there is a need for a device that can monitor various characteristics of the laser beam in real time during the process and compensate the laser beam with the setting of the initial recipe.

Korean Patent Publication No. 10-2013-0115887 Korean Patent No. 10-0967072

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a laser beam monitor capable of monitoring various characteristics of a laser beam in real time during a process and controlling the energy profile on a laser beam cross- Method.

In addition, by providing a shading device on the path of the laser beam to be irradiated and changing the energy profile on the laser beam cross section, the temperature profile on the cross-sectional surface is finally imaged on the imaging surface, and the energy profile on the laser beam cross- And to provide a controllable laser beam monitor method.

According to another aspect of the present invention, there is provided a laser beam monitor having energy profile feedback, the laser beam monitoring method comprising the steps of: shaping and examining the shape and size of a laser beam output from a laser source according to application requirements; Measuring the characteristics of the irradiated laser beam and controlling the energy profile on the laser beam cross section by controlling the shade device inserted in the path of the laser beam according to the measurement result in response to the measurement result, .

As described above, according to the laser beam monitor method of the present invention, since the laser beam is monitored in real time during the processing using the laser beam to compensate for the detected problem, It is possible to prevent a problem that an abnormality is generated in advance.

 Further, the laser beam monitor method according to the embodiment of the present invention can monitor the laser beam without affecting the irradiation of the laser beam, and can measure the power of the beam, the image of the beam, the temperature of the surface irradiated with the beam, It is possible to monitor the characteristics of the beam in various ways.

In addition, the laser beam monitor method according to the embodiment of the present invention includes a shading device on the movement path of the laser beam to reverse-tilt (change) the energy profile on the laser beam cross section. Finally, The laser beam can be irradiated so as to have a shape.

In addition, the laser beam monitor method according to the embodiment of the present invention has an advantage that the energy profile on the laser beam cross section can be adjusted in real time by controlling the shade device by feeding back the measurement result of the beam.

1 is a view schematically showing a configuration of a beam monitor apparatus according to an embodiment of the present invention.
2 is a view showing irradiation of a beam by a beam monitor apparatus according to an embodiment of the present invention.
3 is an image showing the energy profile of the beam and the temperature profile of the section of the imaging surface used in the embodiment of the present invention.
4 is a view showing an example of a shade apparatus according to an embodiment of the present invention.
FIG. 5 is a view showing a detailed structure of the shade device shown in FIG. 4A.
Fig. 6 is a diagram showing the intensity of the beam with reference to the x-axis (see Fig. 4).
7 is a flowchart illustrating a laser beam monitor method having energy profile feedback according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the following description of the embodiments of the present invention, descriptions of techniques which are well known in the technical field of the present invention and are not directly related to the present invention will be omitted. In addition, detailed description of components having substantially the same configuration and function will be omitted.

For the same reason, some of the elements in the accompanying drawings are exaggerated, omitted, or schematically shown, and the size of each element does not entirely reflect the actual size. Accordingly, the present invention is not limited by the relative size or spacing depicted in the accompanying drawings.

Hereinafter, embodiments of a laser beam monitor apparatus according to the present invention will be described with reference to the drawings.

FIG. 1 is a diagram illustrating a configuration of a beam monitor apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram illustrating irradiation of a beam by a beam monitor apparatus according to an embodiment of the present invention.

1 and 2, a beam monitor apparatus according to an exemplary embodiment of the present invention includes a laser beam forming unit 100, shading apparatuses 450 and 450a, beam monitor units 210, 220 and 230, a controller 700 And a driving unit 800. As shown in FIG.

At this time, the shading device can be installed in any portion through which the parallel light of the beam passes.

Referring to FIG. 1, the laser beam forming unit 100 generally includes a laser source 110, a collimator 120, and a light source 110. The laser source 110 includes a laser source 110, a collimator 120, A focusing lens 130, and a beam-shaped mask 140, as shown in FIG.

The collimator 120 converts the laser beam emitted from the laser source 110 into parallel light, and the beam shape optic can shape the shape of the beam into a rectangular or square shape through a combination of, for example, a cylindrical lens, Depending on the shape of the aperture (Aperture), it can be molded in a circular or polygonal form. The size of each beam may vary depending on the shape and size of the optical system and optical fiber in the front end.

The focusing lens 130 determines the uniformity of the laser light wavefront input to the collimator 120 and the beam shape mask 140 is used to remove ambient light from the laser emitted through the focusing lens 130 Respectively. The beam size and shape of each shape can be changed in accordance with the size and shape of the mask, and the mask can be processed into various shapes, and the final beam stage can be irradiated using the optical system of the beam relay stage.

For a more detailed description of the laser beam forming unit 100, reference may be made to the technique disclosed in Korean Patent Laid-Open Publication No. 10-2013-0115887.

The beam monitor units 210 and 220 230 according to the embodiment of the present invention are provided for measuring the characteristics of the beam irradiated from the laser beam forming unit 100 to the image sensing target 500, A relay lens unit 400 provided between the imaging lens 100 and the image sensing plane 500, and a collimator and a focusing lens, and may be provided at other positions.

The relay lens unit 400 includes a first relay lens 410 and a second relay lens 430 spaced apart from each other by a predetermined distance and a laser beam 410 is interposed between the first relay lens 410 and the second relay lens 430, The distance between the first relay lens 410 and the second relay lens 430 may not be limited. The size of the beam irradiated on the final imaging surface 500 can be adjusted according to the combination magnification of the first relay lens 410 and the second relay lens 420 of the relay lens unit 400. [

The beam monitor units 210 and 220 may have a configuration for at least one beam monitor between the first relay lens 410 and the second relay lens 430. Particularly, Only one of the first beam monitor unit 210 and the second beam monitor unit 220 may be provided or both the first beam monitor unit 210 and the second beam monitor unit 220 may be provided .

The first beam monitor unit 210 measures a characteristic of a beam output from the laser beam forming unit 100 and the second beam monitor unit 220 measures a characteristic of a beam reflected from the image sensing plane 500.

The third beam monitor unit 230 is provided between the collimator 120 and the focusing lens 140 to monitor the result of shaping the laser beam formed by the beam shape optics.

For this, the control unit 700 can analyze whether the characteristic information of the beam measured by the beam monitor units 210 and 220 is out of an error range by comparing with a preset reference range, Or to instruct the system to take action according to the line environment.

Specifically, the first beam monitor unit 210, the second beam monitor unit 220, and the control unit 700 will be described with reference to FIG.

The first beam monitor unit 210 includes a first beam splitter 211, a beam splitter 213, a photodetector 215, and a camera 217.

The first beam splitter 211 transmits a part of the beam output from the laser beam forming unit 100 and transmitted through the first relay lens 410 in parallel to the second relay lens 430, . Here, the transmittance and reflectivity of the first beam splitter 211 can be adjusted according to the degree of coating the beam splitter.

 The photodetector 215 measures the power of the beam in real time by measuring the amount of light (i.e., energy) of the beam transmitted through the half mirror 213 by a part of the beam reflected from the first beam splitter 211.

The camera 217 acquires an image of the beam reflected by the beam splitter 213 and measures the power of the beam. When the power of the beam is measured by the camera 217, it is moved step by step, and at the time of beam irradiation, power monitoring and characteristic information of the beam can be measured every shot. This makes it possible to monitor the information of the entire beam at all times.

It is impossible to acquire the characteristic information of the beam for each shot because the beam is continuously irradiated when the beam is formed in the form of a line beam. In order to compensate the interlock function, the characteristic information of the beam is monitored up to the frame rate of the camera, or the characteristic information of the beam is acquired at certain positions and monitored. On the other hand, the beam power can be continuously monitored through the photodetector 215.

The controller 700 acquires the profiling information of the beam through the photodetector 215 and the camera 217 and analyzes the obtained profiling information to determine whether the laser operates in a normal operating range It is determined whether the beam formed by the laser beam forming unit 100 is normally irradiated. When the intensity of the beam obtained through the photodetector 215, the power of the beam, and the image of the beam acquired through the camera 217 are out of the error range in comparison with those set in the recipe set at the time of establishing the process condition, 700 stops the laser beam irradiation or commands an action according to the line environment.

The control unit 700 analyzes the characteristic information of the beam detected by the beam monitor units 210, 220 and 230 and the characteristic information of the laser beam irradiated on the image sensing plane 500 and outputs the characteristic information of the beam to a predetermined reference range And controls the driving unit 800 according to the result of the analysis and the comparison, thereby inserting the shading device 450 into the movement path of the laser beam. The driving unit 800 serves to insert or remove the shade unit 450 in the movement path of the laser beam or move the shade unit 450 according to the insertion amount determined by the controller 700, And a drive motor such as a motor.

The shade device 450 is inserted / withdrawn by a driving path of the laser beam by the driving unit 800, and forms a shadow on the laser beam cross section when the shade device 450 is inserted into the movement path of the laser beam, thereby changing the energy profile on the laser beam cross- (Reverse gradient) to finally cause the laser beam to be irradiated on the imaging surface 500 so that the cross-sectional temperature is uniform or has various shapes.

If the energy profile of the laser beam cross-section irradiated toward the imaging surface is constant, energy at the boundary of the beam moves outside the boundary of the imaging surface when looking at the energy of the imaging surface. As shown in FIG. 3, the temperature profile of the image sensing surface due to the energy profile of the beam irradiated on the image sensing surface is higher at the center portion and lower at the outer portion as shown in FIG. That is, even if the energy profile of the cross section of the laser beam to be irradiated is uniform on the entire cross section, due to the flow of heat, when this beam is irradiated on the image pickup surface, the temperature becomes higher toward the center of the image pickup surface 500 as described above, It is not beneficial when it is used for the purpose of modifying the material.

Therefore, in order to make the temperature profile of the imaging surface uniform by changing the energy profile of the laser beam cross section, the shade device 450 is inserted into the movement path of the laser beam, and the controller 700 real- The characteristic information of the beam detected by the shading units 210, 220 and 230 and the characteristic information of the laser beam irradiated on the image sensing plane 500 are analyzed and the insertion amount and insertion amount of the shading device 450 are determined according to the analysis result And controls the driving unit 800 to insert the shading device 450 into the movement path of the laser beam.

The term " temperature " is used herein to mean energy before the beam is irradiated on the imaging surface, but the beam energy changes the temperature of the imaging surface when the beam is irradiated on the imaging surface.

In other words, the cross-sectional energy profile of the laser beam is irradiated on the image pickup surface to finally determine the temperature distribution of the image pickup surface. At this time, the temperature profile on the cross-sectional surface of the image pickup surface can be made uniform by giving a reverse gradient to the energy profile of the beam cross-

At this time, the temperature distribution of the imaging surface (sample surface irradiated with the beam) may be required in various forms as needed.

That is, the required temperature distribution may be different depending on the material of the imaging surface, which is the sample surface irradiated with the beam, and the material applied to the surface. For example, when the temperature distribution on the imaging surface is uniform or the temperature near the center A temperature distribution higher or lower than the temperature near the boundary may be required.

When the temperature distribution of the imaging surface is determined in this way, the shape of the shade to be fitted to the cross section of the beam is determined accordingly.

When the shade shape is determined as described above, the image of the beam and the energy distribution can be confirmed in real time through the beam monitoring apparatus by inserting the shade into the laser beam path.

The shape of the shade device 400 may be variously implemented as shown in FIG. As shown in Fig. 4A, a thin slit that is transmitted through the cross section of the beam as shown in Fig. 4A, or a thin slit that is partially transmitted from both sides of the beam toward the center as shown in Fig. 4B, Shaped member which can move from both sides of the beam toward the center direction as shown in Fig. 4B, or is formed in the shape of a thin surface having a cross-section transmitting the beam as shown in Fig. 4D, And the area that obstructs the movement of the beam is adjusted. These shades can be made by a MEMS process.

FIG. 5 is a view showing a detailed structure of the shading device 400 shown in FIG. 4A. Referring to FIG. 5, a frame 452 is provided at predetermined intervals on both sides of the path of movement of the beam. The frame 452 is formed with a plurality of holes so that the slit member 454 can be fitted. The thin slit member 454 can be fixed (see the left slit member) by the frame 452 and the slit member 454 passes through the hole of the frame 452 by the driving unit 800 ) Inserted or removed. At this time, the controller 700 determines the number of inserted slit members 454, the length of each slit member 454 passing through the holes, and the like, thereby adjusting the intensity of the beam on the laser beam cross section. Then, the signal is transmitted to the driving unit 800, and the driving unit 800 controls the slit member 454 to be inserted / removed through the hole of the frame 452.

The remaining slit members of Figs. 4B to D can also be inserted / removed by the same method as that of the slit member of Fig. 4A.

3 is an image showing a beam profile used in an embodiment of the present invention. 3 to describe beam profile information analysis of the control unit 700. FIG. The beam uniformity, beam edge slope, beam alignment, beam size and beam power can be measured through the beam profile shown in FIG.

Specifically, beam uniformity can be measured by monitoring the gray scale values of the camera pixels on the red flat top surface.

Further, the slope of the beam edge can be measured by calculating the slope using the gray scale value from the red flat top surface to the blue pixel portion.

Further, the beam alignment can be measured by extracting the outer portion of the beam, for example, the outer pixel portion of the flat top surface, and measuring the angle.

In addition, if the number of pixels in the outer portion of the beam is monitored to be larger or smaller than a preset reference, it is determined that the mask is damaged or the optical alignment of the beam is distorted and the shape of the beam is deformed.

Also, the grayscale average value of the beam global area imaged by the camera 217 is read, and the power of the beam is converted based on the table derived from the conversion, and the power (energy) of the converted beam is monitored.

On the other hand, it is necessary to monitor the characteristics of the beam and the power of the irradiated beam when the process is performed by irradiating the laser beam with a CW (Continuous Wavelength) while moving the workpiece at a constant speed. For this, a high-speed photodetector 215 capable of measuring beam characteristics and power in real time can be applied to measure the beam power by measuring photon energy incident on the photodetector 215. To this end, the controller 700 previously sets a mutual conversion table between the measured value of the photodetector 215 and the power of the beam actually irradiated.

Since the photodetector 215 outputs an analog signal, the controller 700 can convert the analog signal into a digital signal after inputting a signal. The control unit 700 samples the analog signal of the input photodetector, for example, at least 10 us or less, and stores the position data of the process object and the characteristic information of the beam acquired through the camera 217 together.

Particularly, the controller 700 previously sets the ratio between the laser beam extracted through the first beam splitter 211 and the laser beam transmitted through the first beam splitter 211 and irradiated onto the imaging plane 500, Is used to calculate numerical values relating to the characteristics of the beam.

For example, when the ratio between the laser beam extracted through the first beam splitter 211 and the laser beam transmitted through the imaging plane 500 is set at 1: 9, the photodetector 215 and the camera 217 , The characteristic of the laser beam irradiated on the image sensing surface 500 can be calculated by applying a multiple relation at a ratio of 1: 9 to the numerical value of the beam characteristic measured at the image sensing surface 500. Here, It is of course that the reflecting parameter values can be applied.

The second beam monitor unit 220 includes a second beam splitter 221 that reflects a part of a beam that is reflected from the imaging plane 500 and passes through the second relay lens 430 and is incident in parallel, And a pyrometer 223 for measuring the temperature of the surface irradiated with the beam reflected by the splitter 221 in real time.

The control unit 700 can measure the temperature on the surface irradiated with the laser beam through the pyrometer 223 in real time and predict the surface temperature of the image sensing surface 500 by the laser beam irradiation. The temperature obtained through the pyrometer 223 is compared with the surface temperature measured by the laser beam measured based on the surface temperature set when the process conditions are established. According to the comparison result, the control unit 700 can compensate the laser beam power level and irradiation time so that the process proceeds normally according to the initially set process conditions.

Alternatively, the second beam monitor 220 can measure the actual physical property change by measuring the beam reflected by the second beam splitter 221 and the second beam splitter 221 by pixel by pixel An IR camera (ultraviolet camera).

According to the laser beam monitor apparatus according to the embodiment of the present invention described above, since the laser beam is monitored in real time during the processing using the laser beam to compensate for the detected problem, It is possible to prevent a problem in which an abnormality is continuously generated in the processed article in advance.

 Further, the laser beam monitor apparatus according to the embodiment of the present invention can monitor the laser beam without affecting the irradiation of the laser beam, and can measure the power of the beam, the image of the beam, the temperature of the surface irradiated with the beam, It is possible to monitor the characteristics of the beam in various ways.

 Fig. 6 is a diagram showing the intensity of the beam with reference to the x-axis (see Fig. 4).

In general, the temperature profile of the beam cross section is proportional to the intensity of the beam. Therefore, the intensity of the beam along the x-axis has a substantially constant value (500) in the absence of a shading device and has a substantially uniform temperature profile. However, when the shading device is installed on the end face of the beam, the intensity of the beam along the x-axis is lower than that of the boundary portion, so that the central portion becomes a reverse gradient type in which the intensity of the beam is lower than the boundary portion. (510) lower than the boundary region.

By providing such a reverse gradient that the intensity of the beam is higher than that of the inner side, the temperature gradient can be uniformly controlled on the imaging surface, and the temperature profile can be obtained in various forms depending on the material of the imaging surface and the shape to be deformed .

6 is a view illustrating a result of inserting a shading device into an actual beam and measuring the temperature profile of the beam, wherein the cross-sectional images 600, 601, 602, and 603 of the beam, The deformed temperature profile values 610, 611, 612, and 613 can be seen.

In the figure, it can be seen that the temperature profile of the laser beam cross-section can be obtained by inserting the shade device in the path where the beam is moved, and the image plane can be transformed into a desired shape through the temperature profile.

7 is a flowchart illustrating a laser beam monitor method having temperature profile feedback according to an embodiment of the present invention.

Referring to FIG. 7, first, the shape and size of the laser beam output from the laser source are inspected and inspected according to the requirements of the application (S610)

Then, the characteristics of the laser beam irradiated on the imaging surface are measured (S620)

(S630) The temperature profile on the laser beam cross section is controlled by controlling the shade device inserted in the movement path of the laser beam according to the analysis result (S640). Then, The characteristic of the laser beam is measured, and the step of executing the control of the shading device is repeated according to the result of analyzing the characteristic of the measured laser beam.

Here, in the step of inserting the shading device into the movement path of the laser beam, the shading device changes the intensity of the beam irradiated on the imaging surface as shadows are generated on the laser beam.

 That is, controlling the shading device changes the intensity of the beam irradiated on the imaging surface by controlling the area of the shadow generated on the laser beam, thereby changing the temperature profile on the cross section of the laser beam.

The shape of the shade used in the shading device is shifted toward the center direction from both of the fine slits passing through the cross section of the laser beam or the linear slit partially transmitted from the both sides of the laser beam toward the center direction, Or a shape of a surface having a cross section through which a laser beam is transmitted.

A method of controlling the intensity of the laser beam by controlling the shading device will be described.

One is to dispose a plurality of lines passing through the cross section of the laser beam at a predetermined interval, and to adjust the intensity of the laser beam by changing the thickness of the line and the number of lines.

Second, the intensity of the laser beam can be adjusted by changing the thickness of the line and the number of lines by disposing linear slits, which are partially transmitted from both edges of the laser beam toward the center, at a predetermined interval.

Third, it is possible to increase the shadow cast on the laser beam while moving the edge member in a sector shape from both sides of the laser beam toward the center, or to move the edge member in the edge direction, The intensity of the laser beam can be adjusted.

Fourthly, the intensity of the laser beam can be adjusted by rotating a surface member having a cross section through which the laser beam is transmitted, by changing the size of the shadow cast on the laser beam according to the rotation angle of the surface member.

The laser beam monitor method according to the embodiment of the present invention has an advantage that the temperature profile on the laser beam cross section can be adjusted in real time by controlling the shade device by feeding back the measurement result of the beam.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. , And are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention may be practiced without departing from the invention as set forth herein.

100: laser beam forming unit 210, 220, 230: beam monitor unit
400: relay lens unit 450: shade device
452: Frame 454: Slit member
700: control unit 800:

Claims (10)

Shaping and examining the shape and size of the laser beam output from the laser source;
Measuring a characteristic of the laser beam irradiated on an imaging surface; And
And controlling the energy profile on the laser beam cross section by controlling the shade device inserted in the movement path of the laser beam according to the measurement result,
The shape of the shade used in the shading device is shifted toward the center direction from both of the fine slits passing through the cross section of the laser beam or the linear slit partially transmitted from the both sides of the laser beam toward the center direction, Or in the form of a surface having a cross section through which a laser beam is transmitted
Wherein the step of controlling the shading device comprises:
The edge member is moved in the direction of the center of the laser beam to move the edge member in a certain direction on both sides of the laser beam to raise a shadow cast on the laser beam, Wherein the control is performed to reduce shadowing of the laser beam.
The method according to claim 1,
Wherein the step of inserting the shading device into the movement path of the laser beam changes the intensity of the beam irradiated on the imaging surface as the shadow is generated on the laser beam by the shading device. / RTI > The method according to claim 1, wherein the step of controlling the shading device comprises:
Wherein the energy profile of the laser beam is changed by changing the intensity of the beam irradiated on the imaging surface by controlling the area of the shadow generated on the laser beam. delete The method according to claim 1, wherein the step of controlling the shading device comprises:
Wherein a plurality of lines passing through the end face of the laser beam are disposed at a predetermined distance from each other, and the intensity of the laser beam is adjusted by changing the thickness of the lines and the number of the lines. Way. 6. The method of claim 5, wherein controlling the shading device comprises:
Linear slits which are partially transmitted toward the center direction from both edges of the laser beam are spaced apart from each other by a predetermined distance in a case where the linear slits are partially transmitted from both edges of the laser beam toward the center direction, Wherein the intensity of the laser beam is adjusted by changing the number of lines. delete The method according to claim 1, wherein the step of controlling the shading device comprises:
In the case where a shape of a surface having a cross section through which the laser beam is transmitted
And a laser beam monitor with energy profile feedback, characterized in that the size of the shadow cast on the laser beam is changed according to the rotation angle of the face member by rotating a face member having a cross section transmitting the laser beam . The method according to claim 1,
Further comprising the step of stopping the laser beam irradiation or commanding an action according to the process environment when the measured characteristic of the beam is out of an error range as compared with a predetermined reference range, / RTI > 2. The method of claim 1, wherein measuring the characteristics of the laser beam comprises measuring a beam uniformity of the laser beam, a beam edge slope, a beam alignment, a beam size, a beam power, ≪ / RTI > wherein the energy profile feedback is energy profile feedback.

















KR1020150141435A 2015-10-08 2015-10-08 Method for monitoring laser beam having feedback of temperature profile KR101735678B1 (en)

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