KR101732009B1 - Apparatus for treating specimen - Google Patents

Apparatus for treating specimen Download PDF

Info

Publication number
KR101732009B1
KR101732009B1 KR1020150185049A KR20150185049A KR101732009B1 KR 101732009 B1 KR101732009 B1 KR 101732009B1 KR 1020150185049 A KR1020150185049 A KR 1020150185049A KR 20150185049 A KR20150185049 A KR 20150185049A KR 101732009 B1 KR101732009 B1 KR 101732009B1
Authority
KR
South Korea
Prior art keywords
specimen
unit
cleaning
filter
housing
Prior art date
Application number
KR1020150185049A
Other languages
Korean (ko)
Inventor
정창수
한상빈
Original Assignee
주식회사 포스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 포스코 filed Critical 주식회사 포스코
Priority to KR1020150185049A priority Critical patent/KR101732009B1/en
Application granted granted Critical
Publication of KR101732009B1 publication Critical patent/KR101732009B1/en

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • B08B1/02
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/34Purifying; Cleaning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/20Metals

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The present invention comprises: a housing including a specimen processing space; a specimen portion including a specimen, and entering inside the housing such that the specimen is positioned in the specimen processing space; a cleaning unit disposed on the specimen processing space; a drying unit disposed above the specimen processing space; and an inspection unit which enters onto the specimen processing space. The present invention is able to provide a favorable effect of shortening a time required to clean the specimen, and to ensure a clean quality of the specimen.

Description

Apparatus for treating specimen

The present invention relates to a specimen processing apparatus, and more particularly, to a specimen processing apparatus capable of simultaneously testing and drying a specimen.

The pretreatment process for observing the structure of the metal material or the plating layer using an electron microscope is as follows.

First, the metal specimen to be observed is subjected to molding. Metal specimens are molded by pressing with a resin. Next, the molded specimen is fastened to the holder and polished (grinding) is performed. Polishing can be performed by mounting stepped sandpaper on the disk.

When the polishing is completed, the following process is carried out to remove foreign substances on the surface of the specimen during the polishing operation.

First, a cleaning agent is put on the surface of the specimen, and the removing cotton is first rubbed on the specimen to remove the foreign substance. Thereafter, foreign matter adhering to the specimen can be removed by using air of high pressure.

Next, the operation of drying the specimen using warm air and cold air is carried out.

However, such a series of specimen foreign matter removal work is manually performed by a worker, so that a long working time is required and it is very difficult to ensure a uniform state of the specimen clean.

Korean Patent Laid-Open Publication No. 2011-0031822 (published on Apr. 26, 2011) discloses a sample washing / drying apparatus, but only a configuration for washing a sample is described, and a configuration for drying and testing the washed sample is described not.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a specimen processing apparatus capable of performing automatic cleaning of a specimen and drying and inspecting the specimen.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other problems not mentioned here can be understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a method of manufacturing a specimen processing apparatus including a housing including a specimen processing space, a specimen unit that enters the inside of the housing and positions the specimen in the specimen processing space, A drying unit disposed in the specimen processing space, and an inspection unit entering the specimen processing space.

Preferably, the housing may include a first access path connected to the outside of the housing in the specimen processing space to guide movement of the specimen part.

The apparatus may further include a second access path connected from the upper portion of the specimen processing space to the outside of the housing to guide the movement of the inspection unit.

Preferably, the housing may include a second door portion that opens and closes the first access road and the second access road.

The washing unit may include a washing / drying unit coupled to the upper and lower moving parts and contacting the specimen.

Advantageously, the up and down movement includes an assembly plate on which a plurality of cleaning modules are mounted.

Preferably, the cleaning module may include a cleaning agent storage part, a dispenser part connected to the cleaning agent storage part, and a cleaning plate connected to the dispenser part.

Advantageously, the cleaning module comprises a filter coupled to the cleaning plate.

Preferably, the cleaning plate is formed with a hole communicating with the dispenser portion, and when the cleaning plate is pressed against the specimen, the dispenser portion can pump the cleaning agent stored in the detergent storage portion and supply the hole to the hole.

Preferably, the dispenser portion includes a hollow body and a cylinder portion disposed in the body, the cylinder portion being connected to the cleaning agent storage portion and the cleaning plate.

Preferably, the cleaning module may include an air supply unit, and a jet unit connected to the air supply unit and configured to jet air onto the filter unit.

Preferably, the cleaning module may include a filter replacement portion that moves the filter in contact with the cleaning plate to replace a region of the filter in contact with the specimen.

Preferably, the filter replacing unit is connected to at least one of a filter supply unit and a filter accommodating unit formed in the body, at least one of the filter supply unit and the filter accommodating unit, And a filter driving unit for moving the filter.

Preferably, the specimen part includes a mold part on which a plurality of specimens are mounted, a specimen rotating part rotating the mold part, and a specimen mounting part movably installed on the first access road including the mold part and the specimen driving part .

Preferably, the housing may include a specimen driving part connected to the specimen seating part to move the specimen part.

Preferably, the test piece includes a rotating body connected to the specimen rotating part between the mold part and the specimen mounting part, a ball is disposed between the rotating body and the mold part, And an elastic member which is disposed on the mold part and elastically presses the mold part.

Preferably, the drying unit may be disposed between the cleaning unit and the specimen processing space with respect to a height direction of the housing.

Preferably, the drying unit may include a drying plate connected to the drying air supplying unit and the drying air supplying unit, the drying plate including a plurality of drying air holes, and being tiltably disposed on the sample processing space.

Preferably, the drying plate is rotatably coupled to the housing, and an elastic member is provided between the drying plate and the housing to provide a restoring force in a rotating direction of the drying plate.

According to an embodiment of the present invention, there is provided a configuration for automatically cleaning a specimen, thereby shortening the time required for cleaning the specimen and providing a favorable effect of securing the clean quality of the specimen.

Further, according to the embodiment of the present invention, by including the drying configuration as well as the inspection configuration in addition to the cleaning configuration of the specimen, the cleaning operation time of the specimen can be shortened and the clean quality of the specimen can be secured.

1 shows a specimen processing apparatus according to a preferred embodiment of the present invention,
FIG. 2 is a view showing the housing of the specimen processing apparatus shown in FIG. 1,
FIG. 3 is a view showing a specimen part entering the specimen processing space,
FIG. 4 is a view showing an inspection unit entering the upper part of the specimen processing space,
Figure 5 shows a specimen section,
Fig. 6 is an enlarged view of a portion B in Fig. 6, showing the fixing structure of the rotating body and the molding portion of the specimen portion,
7 is a view showing a cleaning section,
8 is a detailed view of the washing section shown in Fig. 7,
9 is a view showing a cylinder part of the dispenser part,
10 is a view showing a cleaning plate,
11 is a view showing the operation of removing the cleaning agent on the surface of the specimen,
12 is a view showing a filter replacement unit,
13 is a drawing showing a drying operation,
Fig. 14 is a view showing the drying plate shown in Fig. 13,
15 is a view showing a drying plate arranged so as to be able to be tilted,
16 is a view showing the rotation of the drying plate during the washing process of the specimen,
17 is a photograph of the specimen surface through the inspection part.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS The objectives, specific advantages, and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. The terms and words used in the present specification and claims should not be construed to be limited to ordinary or dictionary terms and the inventor should properly define the concept of the term in order to describe its own invention in the best way. The present invention should be construed in accordance with the meaning and concept consistent with the technical idea of the present invention. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

1 is a view showing a specimen processing apparatus according to a preferred embodiment of the present invention.

 1, a specimen processing apparatus according to an exemplary embodiment of the present invention includes a housing 100, a specimen unit 200, a cleaning unit 300, a drying unit 400, an inspection unit 500 ).

Fig. 2 is a view showing the housing of the specimen processing apparatus shown in Fig. 1. Fig.

Referring to FIG. 2, the housing 100 has a space therein to accommodate the cleaning unit 300 and the drying unit 400. The housing 100 secures the specimen processing space A inside.

The housing 100 may include a first access path 110.

The first runway 110 is connected from the specimen processing space A to the outer periphery of the housing 100 and guides the movement of the specimen unit 200. The first access road 110 may be formed at a lower portion of the housing 100 and the specimen unit 200 may be mounted to the first access road 110.

The housing 100 may include a second access path 120.

The second runway 120 is connected from the upper part of the specimen processing space A to the outside of the housing 100 to guide the movement of the inspection part 500. The inspection unit 500 is seated on the second access road 120.

The housing 100 may include a first door portion 130.

The first door part 130 serves to open and close the first access road 110. The first door part 130 may include a first door 131 and a first driving part 132. The first door 131 may be arranged to block the first access road 110. The first driving part 132 is coupled to the housing 100 and connected to the first door 131 to move the first door 130 up and down to thereby open or close the first access path 110.

The second door part 140 serves to open and close the second access road 120. The second door part 140 may include a second door 141 and a second driving part 142. The second door 141 may be arranged to block the second access road 120. The second driving part 142 is coupled to the housing 100 and connected to the second door 141 to move the second door 141 up and down to open or close the second access path 140.

FIG. 3 is a view showing a sample piece entering the specimen processing space. FIG.

Referring to FIGS. 2 and 3, the specimen unit 200 is disposed on the first access path 110, and is exposed outside the housing 100 to mount the specimen. Thereafter, the specimen section 200 enters the specimen processing space A to perform washing, drying and inspection of the specimen.

The housing 100 may be provided with a specimen driving unit 150 for moving the specimen unit 200.

The specimen driving unit 150 may include a motor 151 and a feed axis 152. The motor 151 may be installed in the housing 100 and the transport shaft 152 may be disposed along the first access road 110. When the motor 151 is operated, the specimen unit 200 moves along the transfer axis 152 and enters the specimen processing space A.

The first door 131 is moved downward to close the specimen processing space A when the specimen unit 200 enters the specimen processing space A.

Fig. 4 is a view showing an inspection unit entering the upper part of the specimen processing space.

Referring to FIG. 4, when the cleaning operation and the drying operation of the specimen are completed, the inspection unit 500 enters the upper part of the specimen processing space A. First, the second door 141 is moved upward to open the upper part of the specimen processing space A, and the inspection part 500 moves and is positioned above the specimen processing space A.

5 is a view showing a specimen part.

5, the specimen unit 200 includes a mold unit 210, a specimen rotation unit 220, a specimen seating unit 230, a rotating body 240, a ball 250, an elastic member 260).

A plurality of specimens 211 are seated in the mold part 210. The mold part 210 may be formed by molding resin through a press work by adding a resin to the specimen 112 to be observed.

The specimen rotating part 220 rotates the mold part 210. The sample rotating unit 220 may include a driving source and a power transmitting structure such as a motor.

The specimen seating part 230 is disposed on the first access course 110 including the mold part 210 and the specimen rotation part 220 therein. Specifically, the specimen seating portion 230 can be moved along the feed shaft 152 in conjunction with the rotation of the feed shaft 152 by screwing the feed shaft 152 thereto.

The rotating body 240 can rotate in combination with the sample rotating part 220. The rotating body 240 may be rotatably formed on the specimen seating part 230. The mold part 210 may be fixed to the inside of the sample rotating part 220. A bearing 241 may be provided between the specimen seating part 230 and the rotating body 240.

Fig. 6 is an enlarged view of a portion B in Fig. 6, showing the fixing structure of the rotating body and the molding portion of the specimen portion.

Referring to FIG. 6, a ball 250 may be disposed between the mold part 210 and the rotating body 240. A receiving groove 241 may be formed in the rotating body 240 and a ball 250 may be received in the receiving groove 241 and an elastic member 260 may be disposed between the ball 250 and the receiving groove 241 . The elastic member 260 pushes the ball 250 so that the ball 250 presses the mold part 210. As the ball 250 presses the mold part 210, the rotating body 240 and the mold part 210 are constrained to each other. This is a structure for facilitating the mounting of the mold part 210 in the rotating body 240 and for increasing the fixing force of the rotating body 240 and the mold part 210.

7 is a view showing a cleaning unit. 8 is a detailed view of the washing unit shown in Fig.

7 and 8, the cleaning part 300 may be disposed inside the housing 100, and may be disposed above the specimen processing space A.

The cleaning unit 300 serves to clean the specimen 211 of the specimen unit 200.

The cleaning unit 300 may include a vertically moving part 310 and a cleaning module 320.

The upper and lower easiness portions 310 are coupled to the housing 100 to move the cleaning module 320 up and down. The upper and lower movable sections 310 may include an assembly plate 311 and a rod 312, a cylinder 313, and a guide 314. The assembly plate 311 may be formed in a flat plate shape, and a plurality of cleaning modules 320 may be mounted. The assembly plate 311 may be connected to the end of the rod 312. The rod 312 moves up and down. The driving method of the cylinder 313 may be a motorized method or a hydraulic method. The guide 314 may be formed in the housing 100 so that the assembly plate 311 moves along the guide 314. [

The cleaning module 320 contacts the specimen 211 to clean the specimen. The cleaning module 320 may include a cleaning agent storage section 321, a dispenser section 322, a cleaning plate 323, a filter 324, an air supply section 325 and a jetting section 326 have. The cleanser storage unit 321 stores the cleanser. The dispenser portion 322 is connected to the cleaning agent storage portion 321 to spray the cleaning agent through the cleaning plate 323. The dispenser portion 322 may include a body 322a and a cylinder portion 322b. The body 322a may be hollow and the cylinder 322b may be disposed within the body 322a. The cylinder portion 322b is connected to the cleaning agent storage portion 321 and connected to the cleaning plate 323.

9 is a view showing the cylinder part of the dispenser part.

The cylinder 322b may be provided with a space for temporarily storing a cleaning agent therein, and may include a rod 322ba. A cleaning agent supply path 322bc may be formed inside the rod 322ba. When the rod 322ba moves upward in the cylinder portion 322b, the cleaning agent in the cylinder portion 322b is supplied to the cleaning plate 323 through the cleaning agent supply path 322bc.

10 is a view showing a cleaning plate.

Referring to Figs. 8 and 10, the cleaning plate 323 is connected to the cylinder portion 322b. The cleaning plate 323 is moved up and down by the cylinder portion 322b. The cleaning plate 323 is a portion in contact with the specimen portion 200. The cleaning plate 323 may be formed with a plurality of holes 323a through which the cleaning agent is discharged.

A filter 324 may be mounted on the cleaning plate 323. [ The filter 324 is in direct contact with the specimen portion 200 to apply the detergent to the specimen portion 200 and to rinse the specimen portion 200 through friction.

11 is a view showing the operation of removing the cleaning agent on the surface of the specimen.

Referring to Figs. 8 and 11, the cleaning module 320 may include a configuration for removing the cleaning agent remaining on the surface of the specimen after the specimen cleaning. For example, the cleaning module 320 may include an air supply portion 325 and a jetting portion 326. The air supply unit 325 supplies air to the jetting unit 326. The air supply part 325 may be connected to the assembly plate 311. The jetting section 326 may be formed along the side wall of the body 222a and the jetting port 326a may be formed at the lower end of the body 322a. The injection port 326a is a portion to which the spray supplied to the air supply unit 325 is injected and may be provided along the lower end of the body 222a. The air ejected to the ejection port 326a physically removes foreign matter from the specimen unit 200. [

12 is a view showing a filter replacement portion.

Referring to FIG. 12, the cleaning module 320 may include a filter replacement portion 327.

The filter replacement portion 327 replaces the area of the filter 324 that abuts the specimen portion 200. The filter 324 may be formed long in a tee shape. The filter replacement portion 327 can then replace the area of the filter 324 that is in contact with the specimen portion 200 by moving the filter 324 that spans the cleansing plate 323.

For example, the filter replacement section 327 may include a filter supply section 327a, a filter accommodating section 327b, and a filter drive section 327c. The filter supply portion 327a and the filter accommodating portion 327b may be configured as rolls rotatably formed inside the body 222a. The filter accommodating portion 327b and the filter accommodating portion 327b may be disposed to face each other. The filter 324 can be wound around the filter accommodating portion 327b and the filter accommodating portion 327b through the cleaning plate 323. [ The filter driving portion 327c is connected to the filter accommodating portion 327b to rotate the filter accommodating portion 327b. The filter driver 327c may be a motor.

When the filter driving portion 327c is operated, the band-shaped filter is wound on the filter accommodating portion 327b, and the filter driving portion 327c is also rotated in conjunction with this, do. When the filter 324 is moved over the rotating plate 323, the area of the filter 324 contacting the specimen unit 200 is changed.

13 is a view showing a drying operation.

Referring to FIG. 13, when the washing operation of the test piece is completed, the drying operation can be performed by the drying unit 400.

The drying unit 400 may include a drying air supply unit 410 and a drying plate 420. The drying air supply unit 410 supplies hot air or cold air to the drying plate 420. The drying plate 420 blows the hot air or the cold air supplied from the drying air supplying unit 410 to the specimen unit 200 to perform the drying operation of the specimen 211.

14 is a view showing the drying plate shown in Fig.

Referring to FIGS. 1 and 14, a drying plate 420 is disposed on the specimen part 200 to supply the drying air to the specimen part 200.

The drying plate 420 may include a plurality of dry air holes 421. And the drying plate 420 may include a feed port 422. The air supplied from the dry air supply unit 410 is supplied to the supply port 422 and discharged through the dry air hole 421. On the other hand, the drying plate 420 can be disposed on the housing 100 so as to be able to tilt over the specimen processing space A.

Fig. 15 is a view showing a drying plate arranged so as to be able to be tilted, and Fig. 16 is a view showing the rotation of a drying plate during a washing process of a specimen.

The dry air supply unit 410 is disposed between the specimen processing space A and the cleaning unit 300 with respect to the height direction of the housing 100. Therefore, when the cleaning module 320 moves downward for the cleaning operation, the drying plate 420 must deviate from the movement path of the cleaning module 320.

Referring to FIGS. 14 to 16, when the cleaning module 320 moves downward, the drying plate 420 rotates and deviates from the movement path of the cleaning module 320.

14, the drying plate 420 may be provided with a touch bar 440. When the cleaning module 320 touches the touch bar 440 during downward movement of the cleaning module 320, The drying plate 420 can be pivoted downward by the operation of the driving unit 430. A power transmission module capable of converting a linear motion into a rotational motion may be provided between the rotation driving unit 430 and the drying plate 420.

When the cleaning operation for the test piece 211 is completed, the cleaning module 320 is moved upward. When the cleaning module 320 is moved up, the drying plate 420 must be restored to its original position for the drying operation.

15, a guide 450 may be provided at a lower portion of the drying plate 420, and an elastic member 460 may be provided at the guide 450. As shown in FIG. The elastic member 460 is interposed between the housing 100 and the lower surface of the drying plate 420 to provide a restoring force so that the drying plate 420 rotates to its original position.

When the cleaning operation and the drying operation of the test piece 211 are completed, as shown in FIG. 4, the inspection unit 500 enters the specimen processing space A and the surface of the specimen can be visually confirmed inside the specimen processing apparatus . A camera may be installed in the inspection unit 500, and a module and a cable capable of transmitting an image acquired by the camera to an external display device may be installed.

17 is a photograph of the specimen surface through the inspection part.

17 (a) is a photograph showing the surface of the specimen after washing and drying of the specimen through manual operation, and FIG. 17 (b) is a photograph of washing and drying the specimen through the specimen processing apparatus It is a photograph of the surface of the specimen. 17 (a) and 17 (b), the clean state of the specimen of FIG. 17 (a) in which the specimen is washed and dried through the specimen processor is shown in FIG. 17 (a) Is better than that of the specimen.

As described above, the specimen processing apparatus according to one preferred embodiment of the present invention has been specifically described with reference to the accompanying drawings.

It will be apparent to those skilled in the art that various modifications, substitutions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. will be. Therefore, the embodiments disclosed in the present invention and the accompanying drawings are intended to illustrate and not to limit the technical spirit of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments and the accompanying drawings . The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100: Housing
110: First access road
120: 2nd ramp
130: first door part
131: first door
132:
140: second door portion
141: second door
142:
150: specimen driving part
151: Motor
152: Feed axis
200: Specimen section
210:
211: The Psalms
220: specimen rotating part
230: specimen seating part
240: rotating body
250: Ball
260: elastic member
300: Cleaning section
310: Eastern Shanghai
320: Cleaning module
400: dryer
500: Inspector

Claims (19)

A housing including a specimen processing space;
A specimen portion that enters the inside of the housing and places the specimen in the specimen processing space;
A cleaning unit disposed in the specimen processing space,
A drying unit disposed in the specimen processing space;
And an inspection unit which enters the specimen processing space,
Wherein the cleaning unit includes a vertically moving part coupled to the housing and a cleaning module coupled to the up / down moving part to contact the specimen, the cleaning module including a cleaning agent storage part, a dispenser part connected to the cleaning agent storage part, Wherein the cleaning plate is formed with a hole communicating with the dispenser portion, and when the cleaning plate is pressed in contact with the specimen, the dispenser portion pumps the cleaning agent stored in the detergent storage portion, To the specimen processing apparatus.
The method according to claim 1,
The housing
And a first access path connected from the specimen processing space to the outside of the housing to guide movement of the specimen part.
3. The method of claim 2,
And a second access path connected from the upper part of the specimen processing space to the outside of the housing to guide the movement of the inspection part.
The method of claim 3,
Wherein the housing includes a first door portion for opening and closing the first access path and a second door portion for opening and closing the second access path.
delete The method according to claim 1,
The above-
And an assembly plate on which a plurality of cleaning modules are mounted.
delete The method according to claim 1,
Wherein the cleaning module includes a filter coupled to the cleaning plate.
delete 9. The method of claim 8,
The dispenser portion
Hollow body;
And a cylinder portion disposed in the body and connected to the cleaning agent storage portion and the cleaning plate.
11. The method of claim 10,
The cleaning module
And an injection unit connected to the air supply unit and formed in the body and injecting air into the filter.
11. The method of claim 10,
Wherein the cleaning module includes a filter replacement portion that moves the filter in contact with the cleaning plate to replace an area of the filter that is in contact with the specimen.
13. The method of claim 12,
The filter-
A filter supply part and a filter receiving part formed on the body;
And a filter driving unit connected to at least one of the filter supply unit and the filter accommodating unit to move the filter from the filter supply unit across the clean plate to the filter accommodating unit.
3. The method of claim 2,
The specimen portion
A mold part on which a plurality of specimens are mounted;
A specimen rotating part for rotating the mold part;
And a specimen placing part movably installed on the first access course including the mold part and the specimen rotating part.
15. The method of claim 14,
The housing
And a specimen driving unit connected to the specimen mounting unit to move the specimen unit.
15. The method of claim 14,
The specimen portion
And a rotating body connected to the specimen rotating part between the mold part and the specimen mounting part, wherein a ball is disposed between the rotating body and the mold part, and is disposed between the ball and the rotating body, And an elastic member that pressurizes the specimen.
A housing including a specimen processing space;
A specimen portion that enters the inside of the housing and places the specimen in the specimen processing space;
A cleaning unit disposed in the specimen processing space,
A drying unit disposed in the specimen processing space;
And an inspection unit which enters the specimen processing space,
The drying unit is disposed between the washing unit and the specimen processing space with reference to a height direction of the housing. The drying unit includes a drying air supply unit, a drying air supply unit, and a plurality of drying air holes. Wherein the drying plate is rotatably coupled to the housing, and between the drying plate and the housing, there is provided an elastic plate for providing a restoring force in a rotating direction of the drying plate, A specimen processing apparatus comprising a member.
delete delete
KR1020150185049A 2015-12-23 2015-12-23 Apparatus for treating specimen KR101732009B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150185049A KR101732009B1 (en) 2015-12-23 2015-12-23 Apparatus for treating specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150185049A KR101732009B1 (en) 2015-12-23 2015-12-23 Apparatus for treating specimen

Publications (1)

Publication Number Publication Date
KR101732009B1 true KR101732009B1 (en) 2017-05-11

Family

ID=58742087

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150185049A KR101732009B1 (en) 2015-12-23 2015-12-23 Apparatus for treating specimen

Country Status (1)

Country Link
KR (1) KR101732009B1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109100199A (en) * 2018-11-02 2018-12-28 江苏新锐环境监测有限公司 A kind of air-dried primary screening machine of Soil K+adsorption
US10702819B2 (en) 2017-11-27 2020-07-07 Samsung Electronics Co., Ltd. Air cleaner
CN112427370A (en) * 2020-10-21 2021-03-02 徐州顺风阀门有限公司 Belt cleaning device of valve processing
CN113477619A (en) * 2021-08-11 2021-10-08 徐州好合智能装备有限公司 Mould cleaning device
CN114101165A (en) * 2021-10-21 2022-03-01 郑州金域临床检验中心有限公司 Specimen flushing device and control method thereof
KR20220078156A (en) 2020-12-03 2022-06-10 변성현 Apparatus for manufacturing test piece for inspecting test piece

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200202425Y1 (en) * 2000-06-23 2000-11-15 포항종합제철주식회사 Device for inspecting inner defect of galvanized strip

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200202425Y1 (en) * 2000-06-23 2000-11-15 포항종합제철주식회사 Device for inspecting inner defect of galvanized strip

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10702819B2 (en) 2017-11-27 2020-07-07 Samsung Electronics Co., Ltd. Air cleaner
US10967319B2 (en) 2017-11-27 2021-04-06 Samsung Electronics Co., Ltd. Air cleaner
CN109100199A (en) * 2018-11-02 2018-12-28 江苏新锐环境监测有限公司 A kind of air-dried primary screening machine of Soil K+adsorption
CN109100199B (en) * 2018-11-02 2024-04-26 江苏新锐环境监测有限公司 Air-dried primary screening machine for soil detection
CN112427370A (en) * 2020-10-21 2021-03-02 徐州顺风阀门有限公司 Belt cleaning device of valve processing
KR20220078156A (en) 2020-12-03 2022-06-10 변성현 Apparatus for manufacturing test piece for inspecting test piece
CN113477619A (en) * 2021-08-11 2021-10-08 徐州好合智能装备有限公司 Mould cleaning device
CN113477619B (en) * 2021-08-11 2022-06-07 徐州好合智能装备有限公司 Mould cleaning device
CN114101165A (en) * 2021-10-21 2022-03-01 郑州金域临床检验中心有限公司 Specimen flushing device and control method thereof
CN114101165B (en) * 2021-10-21 2022-10-25 郑州金域临床检验中心有限公司 Sample washing device and control method thereof

Similar Documents

Publication Publication Date Title
KR101732009B1 (en) Apparatus for treating specimen
US20200147654A1 (en) Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus
EP0893819B1 (en) Apparatus and method for washing substrate
US8844546B2 (en) Apparatus and method for cleaning semiconductor substrate using pressurized fluid
KR100659415B1 (en) Scrub washing method, scrub washing device, lens forming die drying method, lens forming die drying device, and plastic lens manufacturing method
JP3321635B2 (en) Cleaning equipment
KR102233392B1 (en) Design of disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing
CN110315435B (en) Processing device
JP3459632B2 (en) Substrate cleaning device
TW201318771A (en) Brush box module for chemical mechanical polishing cleaner
KR20150079019A (en) Dryice cleaning device
CN203076276U (en) Silicon wafer two-faced scrubbing machine
EP3272459A1 (en) Apparatus and method for polishing a surface of a substrate
US7010826B2 (en) Substrate cleaning tool and substrate cleaning apparatus
CN103008301A (en) Two-sided scrubbing unit for wafers
KR101168361B1 (en) Brush box cleaner with force control
KR100998031B1 (en) Apparatus for cleaning a bearing
KR101113272B1 (en) Filter cleaner
KR20060086963A (en) Surface cleaning/modifying method and surface cleaning/modifying device
KR20210127030A (en) Apparatus for cleaning roller
CN105665376B (en) Dry type fingerprint cleaning device
JP3999540B2 (en) Brush cleaning method and processing system for scrub cleaning apparatus
KR20210002182A (en) Nozzle cleaning unit and substrate processing apparatus
KR101272004B1 (en) Apparatus for polishing specimen
KR100371347B1 (en) Recycle method and system of optical for color display tube

Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant