KR101731369B1 - Handler including freezing prevention device for shaft of precooling chamber - Google Patents

Handler including freezing prevention device for shaft of precooling chamber Download PDF

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Publication number
KR101731369B1
KR101731369B1 KR1020150181828A KR20150181828A KR101731369B1 KR 101731369 B1 KR101731369 B1 KR 101731369B1 KR 1020150181828 A KR1020150181828 A KR 1020150181828A KR 20150181828 A KR20150181828 A KR 20150181828A KR 101731369 B1 KR101731369 B1 KR 101731369B1
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KR
South Korea
Prior art keywords
air
block
shaft
heating
handler
Prior art date
Application number
KR1020150181828A
Other languages
Korean (ko)
Inventor
허경삼
김상우
Original Assignee
허경삼
김상우
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Publication date
Application filed by 허경삼, 김상우 filed Critical 허경삼
Priority to KR1020150181828A priority Critical patent/KR101731369B1/en
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Publication of KR101731369B1 publication Critical patent/KR101731369B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2877—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2214/00—Aspects relating to resistive heating, induction heating and heating using microwaves, covered by groups H05B3/00, H05B6/00
    • H05B2214/02—Heaters specially designed for de-icing or protection against icing

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

A handler device is disclosed. The present apparatus is a shaft freezing prevention device for a precooling chamber used in a handler device. The present apparatus includes an air jet disposed so as to surround the outer side of a shaft for transporting a plurality of trays to the inside of the precooling chamber, a heating block for supplying heated air to the air jet, and an air compressor for injecting air into the heating block. So, it is possible to prevent the generation of freezing on the shaft.

Description

[0001] HANDLER INCLUDING FREEZING PREVENTION DEVICE FOR SHAFT OF PRECOOLING CHAMBER [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a handler device used for inspecting semiconductor devices, and more particularly, to a device for preventing freezing of a shaft when driving a pre-cooling chamber of a handler device.

In general, memory or non-memory semiconductor devices and integrated circuit modules that circuitly configure them on a substrate are shipped after various testing processes after production. The term " handler " refers to a device used for electrically connecting such a semiconductor device or an integrated circuit module to an external test device for inspection.

(Patent Document 1) KR 10-0560729 B

On the other hand, the handler device can perform not only a general performance test in which a semiconductor device or an integrated circuit module to be inspected is performed at a normal temperature, but also a normal function in an environment of high temperature and low temperature using an electrothermal heater and liquefied nitrogen in a closed test chamber To test whether it is possible to perform the test.

Normally, such a handler apparatus includes a preheating / preheating chamber for preheating and preheating an object to be inspected, a test chamber for performing a test, and a deep-roasting chamber for returning to a normal temperature.

Referring to FIG. 1, a process of moving from the preheating / preheating chamber 100 to the test chamber 200 will be described. First, a plurality of semiconductor devices or integrated circuit modules to be inspected are disposed on the tray T. In the preheating / preheating chamber 100, an object to be inspected is preheated or precooled in order to create a desired extreme environment for the object to be inspected. In order to improve the operation speed, a plurality of trays are generally housed at once, To the test chamber 200 side one by one. In this case, the preheating / preheating chamber 100 conveys the tray T up and down (or right and left) through the shaft 120 driven by a separate driving device 110, , The tray placed at the uppermost position in FIG. 1) is drawn into the test chamber 200. Thereafter, when the tray T drawn into the test chamber 200 is aligned with the inspection table 210, a predetermined probe 230 is electrically connected to each semiconductor device, and then the inspection device 220 Inspection proceeds.

On the other hand, the conditions required for such semiconductor devices are becoming severe, and in recent years, it has been examined whether the semiconductor device performs normal performance under extreme conditions at minus 30 degrees Celsius (° C) to 55 degrees Celsius. In this case, there arises a problem that freezing occurs in the shaft 120 for driving the plurality of trays T in the pre-cooling chamber 100. When freezing occurs in the shaft 120, a normal operation is difficult due to the gaps formed on the surface of the shaft 120, thereby causing a problem that a long time is required for the test process through the handler device, The durability of the electrode 120 itself deteriorates.

The present invention relates to a handler apparatus for inspecting semiconductor devices, and more particularly to a handler apparatus for inspecting semiconductor devices by freezing a shaft for conveying a plurality of trays in a pre- Which is capable of preventing the occurrence of a defrosting phenomenon in the pre-cooling chamber of the handler device.

The objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood from the following description.

The present invention relates to an apparatus for preventing freezing of a shaft for a pre-cooling chamber of a handler apparatus, comprising: an air jet opening which is arranged so as to surround an outer side of a shaft for transporting a plurality of trays in the pre- And an air compressor for injecting air into the heating block.

Here, when the pre-cooling chamber includes a plurality of shafts, it is preferable that a plurality of the air ejection openings are fastened to each of the plurality of shafts.

The apparatus may further include a distributor for distributing heated air supplied from the heating block to each of the plurality of air injection openings, and further disposed between the heating block and the air compressor Gt; filter < / RTI > Here, the filter may be a filter that removes moisture or dust from the air supplied from the air compressor.

Furthermore, it is preferable that the air jet opening has at least one jet hole for injecting heated air into the inner side surface through which the shaft passes.

In addition, the heating block may include a metal block formed of a metal having a high thermal conductivity and having an air flow path formed therein, and a heating rod heating the metal block. The metal blocks may include a first block and a second block which are connected to each other. In this case, the first block and the second block are coupled to each other on one side of the first block and the second block, As shown in Fig. In addition, it is preferable that the air flow path formed in the metal block is formed in a zigzag shape.

Conventionally, as a result of icing on a shaft that is pulled in and pulled out by a pre-cooling chamber which is a low-temperature environment at a low temperature of about minus 55 degrees Celsius, test operation time by the handler device is reduced, The durability of the shaft was deteriorated by the stress caused by the temperature difference. However, by using the apparatus for preventing freezing of the shaft according to the present invention, it is possible not only to sufficiently secure the operation time for inspecting the semiconductor element by the handler, but also to maintain the durability of the shaft. Further, as the pre-cooling chamber is smoothly driven to a cryogenic environment, the product family of semiconductor devices that can be tested through the handler device can be further diversified.

FIG. 1 is a schematic view of a main part of a conventional handler device. FIG. 1 is a view illustrating a process in which a preheated or precooled tray is sequentially drawn into a test chamber through a preheating / preheating chamber.
2 is a schematic view of a shaft anti-freezing apparatus for a pre-cooling chamber of a handler device according to the present invention.
3 and 4 are a perspective view and a partial cross-sectional view showing a state in which an air nozzle is mounted on a shaft in a shaft anti-freezing apparatus for a pre-cooling chamber of a handler device according to the present invention.
5 is a perspective view showing an embodiment of an air ejection opening usable in the apparatus for preventing ice formation in a preheating chamber of a handler apparatus according to the present invention.
6 is a perspective view showing an embodiment of a heating block usable in a shaft anti-freezing device for a pre-cooling chamber of a handler device according to the present invention.
7 is a cross-sectional view showing an embodiment of a distributor usable in a shaft anti-freeze apparatus for a pre-cooling chamber of a handler apparatus according to the present invention.

While the present invention has been described in connection with certain exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and similarities. It should be understood, however, that the invention is not intended to be limited to the particular embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In addition, numerals (e.g., first, second, etc.) used in the description of the present invention are merely an identifier for distinguishing one component from another.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 to 3, the apparatus for preventing freezing of a shaft for a pre-cooling chamber of a handler apparatus according to the present invention is configured to surround the outside of a shaft 120 for transporting a plurality of trays from outside the pre- A heating block 330 for supplying heated air to the air ejection port 310 and an air compressor 350 for injecting air into the heating block 330. The air blowing port 310 may be formed of a plurality of air holes. Here, the pre-cooling chamber 100 may include a plurality of shafts 120, and a plurality of air injection holes 310 may be provided and fastened to each of the plurality of shafts 120. The air conditioner may further include a distributor 320 for distributing the heated air supplied from the heating block 330 to each of the plurality of air injection holes 310.

More specifically, the air injected from the air compressor 350 is heated by the heating block 330, and then supplied to each of the air injection openings 310 via the distributor 320. As shown in FIG. 5, the air jet opening 310 may be formed by using two semicircular "C" -shaped aluminum blocks arranged opposite to each other, The formed shaft inlet 311 is formed. At least one or a plurality of injection holes 314 for injecting heated air into the shaft inlet 311, that is, the inner side surface through which the shaft 120 penetrates, may be formed. The warmed air injected through the external conduit 310a is injected into the injection hole 314 through the internal conduit 312 formed in the air injection hole 310 and is injected into the shaft 120 by the injected warm air, Thereby preventing the occurrence of gaps.

3 and 4 are a perspective view and a partial cross-sectional view showing a state in which the air jet opening 310 is fastened to the shaft 120. As shown in FIG. 3, the air jet opening 310 is disposed outside the pre-cooling chamber 100 and is disposed so as to surround the outer side of the shaft 120. As shown in FIG. That is, the shaft 120 is inserted into the shaft inlet 311 provided in the air injection port 310, and the heated air injected through the external pipeline 310a flows through the internal pipeline 312 and the injection hole 314 To the outer surface of the shaft 120. [ When the shaft 120 that is drawn into the low-temperature environment inside the pre-cooling chamber 100 is pulled out to the outside again, the surface of the shaft 120 may be deformed. As soon as the shaft 120 is drawn out of the pre- 310 can be prevented from being generated by the warmed air injected by the heat exchanger (310).

Next, the normal-temperature air supplied by the air compressor 350 is heated while passing through the heating block 330. As shown in FIG. 6, the heating block 330 may include a metal block formed of a metal having excellent thermal conductivity and having an air flow path formed therein, and a heating rod for heating the metal block. have. For example, two metal blocks made of aluminum may be used as the first block 331 and the second block 332. Here, the heating rod 333 is a material that generates electricity, and the power line 333a is connected to an external power source (not shown) to heat the metal block. The heating rod 333 may be disposed on one or both of the first block 331 and the second block 332. In addition, the first block 331 and the second block 332 are arranged to be connected to each other. At this time, a recessed portion 335 constituting an air flow path is formed on each of the surfaces. That is, the recessed portion 335 is formed to be symmetrical with respect to each of the first block 331 and the second block 332, and at the same time, when the first block 331 and the second block 332 are fastened to each other Constitute a closed air passage. In this case, it is preferable that the air flow path formed by the recessed portion 335 is formed in a zigzag shape. The first and second blocks 331 and 332 having a predetermined dimension can maximize the air flow path length so that the lengths of the first and second blocks 331 and 332 heated by the heating rod 333 Allow the heat to pass sufficiently into the air passing through it. That is, the air injected through the duct 330a by the air compressor 350 is sufficiently heated while moving along the staggered air passage formed by the recessed portion 335, and the warmed air passes through the duct 330b .

The heated air passing through the heating block 330 can be distributed to the respective air injection openings 310 through the distributor 320 as shown in FIG. That is, the air injected through the pipeline 320a is distributed to the respective pipelines 310a in the distributor 320 and is injected into the plurality of air injection ports 310 by the pipeline 310a.

In addition, a predetermined filter 340 may be disposed between the heating block 330 and the air compressor 350. Here, the filter 340 may be a filter that removes moisture or dust contained in the air supplied from the air compressor 350. Thus, the air injected by the air injection port 310 is blocked in advance so as not to contain moisture or impurities, so that the inflow of impurities into the pre-cooling chamber 100 is blocked or the humidity inside the pre- .

Conventionally, as a result of icing on a shaft that is pulled in and pulled out by a pre-cooling chamber which is a low-temperature environment at a low temperature of about minus 55 degrees Celsius, test operation time by the handler device is reduced, The durability of the shaft was deteriorated by the stress caused by the temperature difference. However, by using the apparatus for preventing freezing of the shaft according to the present invention, it is possible not only to sufficiently secure the operation time for inspecting the semiconductor element by the handler, but also to maintain the durability of the shaft. Further, as the pre-cooling chamber is smoothly driven to a cryogenic environment, the product family of semiconductor devices that can be tested through the handler device can be further diversified.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. It is therefore to be understood that the embodiments of the invention described herein are to be considered in all respects as illustrative and not restrictive, and the scope of the invention is indicated by the appended claims rather than by the foregoing description, Should be interpreted as being included in.

Claims (8)

In a handler apparatus having a preheating chamber,
And a plurality of shafts which are drawn into and pulled out from the pre-cooling chamber to transport a plurality of trays in the pre-cooling chamber,
A plurality of air ejection openings arranged outside the pre-cooling chamber so as to surround the outside of each of the plurality of shafts; A heating block for supplying heated air to each of the plurality of air ejection openings; And an air compressor for injecting air into the heating block,
Wherein each of the plurality of air jetting openings is formed with at least one jetting hole for jetting warmed air to the outer surface of each of the plurality of shafts.
delete The method according to claim 1,
Wherein the shaft anti-icing device further comprises a distributor for distributing the warmed air supplied from the heating block to each of the plurality of air ejection openings.
The method according to claim 1,
Wherein the shaft anti-icing device further comprises a filter disposed between the heating block and the air compressor and adapted to remove moisture or dust from the air supplied from the air compressor.
delete The method according to any one of claims 1, 3, and 4,
In the heating block,
A metal block formed of a metal having excellent thermal conductivity and having an air flow path formed therein; And
A heating rod for heating the metal block;
The handler device comprising:
The method according to claim 6,
Wherein the metal block includes a first block and a second block which are interconnected with each other,
Wherein the first block and the second block are coupled to each other on one side of the first block and the second block so as to be coupled to each other to form an air flow passage.
The method according to claim 6,
Wherein the air flow path is formed in a zigzag shape.
KR1020150181828A 2015-12-18 2015-12-18 Handler including freezing prevention device for shaft of precooling chamber KR101731369B1 (en)

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KR1020150181828A KR101731369B1 (en) 2015-12-18 2015-12-18 Handler including freezing prevention device for shaft of precooling chamber

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Application Number Priority Date Filing Date Title
KR1020150181828A KR101731369B1 (en) 2015-12-18 2015-12-18 Handler including freezing prevention device for shaft of precooling chamber

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KR101731369B1 true KR101731369B1 (en) 2017-04-28

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100993877B1 (en) * 2009-07-16 2010-11-11 손한봉 Heater
JP2012112875A (en) * 2010-11-26 2012-06-14 Orion Mach Co Ltd Environmental test device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100993877B1 (en) * 2009-07-16 2010-11-11 손한봉 Heater
JP2012112875A (en) * 2010-11-26 2012-06-14 Orion Mach Co Ltd Environmental test device

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