KR101730080B1 - Powder stuck-prevention valve - Google Patents

Powder stuck-prevention valve Download PDF

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Publication number
KR101730080B1
KR101730080B1 KR1020150137431A KR20150137431A KR101730080B1 KR 101730080 B1 KR101730080 B1 KR 101730080B1 KR 1020150137431 A KR1020150137431 A KR 1020150137431A KR 20150137431 A KR20150137431 A KR 20150137431A KR 101730080 B1 KR101730080 B1 KR 101730080B1
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KR
South Korea
Prior art keywords
scraper bar
hole
unit
main gear
gate valve
Prior art date
Application number
KR1020150137431A
Other languages
Korean (ko)
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KR20170038284A (en
Inventor
김도열
Original Assignee
김도열
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Publication date
Application filed by 김도열 filed Critical 김도열
Priority to KR1020150137431A priority Critical patent/KR101730080B1/en
Publication of KR20170038284A publication Critical patent/KR20170038284A/en
Application granted granted Critical
Publication of KR101730080B1 publication Critical patent/KR101730080B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
    • B08B1/001—Cleaning by methods involving the use of tools, brushes, or analogous members characterised by the type of cleaning tool
    • B08B1/005—Scrapers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

The present invention is characterized in that a first seat portion 110 and a second seat portion 120 are connected to each other and are recessed and formed with a body portion 100 having a plumbing hole 121 formed at the center of the second seat portion 120 A main gear portion 200 rotatably seated on the first seat portion 110 and having an insertion hole 210 formed at the center thereof and a rotatable main gear portion 200 rotatably mounted on the second seat portion 120, A scraper bar 320 connected to the main gear unit 200 and having a gas transfer hole 310 formed at the center thereof and having at least one longitudinal direction formed on the inner surface of the gas transfer hole 310, A cover unit 400 coupled to an upper portion of the main body 100 and formed with a first connection hole 410 and a second connection hole 420, And a drive unit 500 coupled to the main gear unit 200 through the first connection hole 410. The pipe 20 is coupled to the plumbing hole 121, (420) The scraper bar 320 is rotated to scrape the powder adhering to the inner surface of the pipe 20 and the inflow part 11 according to whether the driving part 500 is driven or not, .

Description

[0001] Powder stuck-prevention valve [0002]

The present invention relates to a powder adhering prevention valve, wherein a first seat portion 110 and a second seat portion 120 are connected and depressed, and a plumbing hole 121 is formed at the center of the second seat portion 120, A main gear portion 200 rotatably seated on the first seat portion 110 and formed with an insertion hole 210 formed at the center thereof, The gas moving hole 310 is rotatably mounted on the seating part 120 and connected to the main gear part 200. A gas moving hole 310 is formed at the center of the receiving part 120, And a first connection hole 410 and a second connection hole 420 are formed on the upper portion of the main body 100. The first connection hole 410 and the second connection hole 420 are formed by punching And a driving unit 500 which is coupled to the main gear unit 200 through the first connection hole 410. The piping 20 is connected to the piping 121, The scraper bar 320 is rotated according to whether the driving unit 500 is driven in a state where the gate valve 10 is coupled to the second connection hole 420 and the pipe 20 and the inflow And the powder adhered to the inner surface of the part (11) is scraped off.

In general, since semiconductor and LCD have high precision, high cleanliness and special manufacturing technology are required.

For this reason, the semiconductor device is manufactured in a vacuum state in which the contact of the foreign substances contained in the air can be most completely blocked.

Therefore, the sealing technique between the vacuum working area of the semiconductor manufacturing apparatus and the atmosphere also greatly affects the quality of semiconductor products.

A gate valve is installed in the process section for manufacturing the semiconductor as described above, and performs a function of transferring or blocking the fluid moved by the vacuum pump to the chamber.

The gate valve includes an inlet through which the fluid flows and an outlet through which the fluid flows out. When the cylinder is driven, the sealing portion moves and opens and closes the inlet portion, thereby transferring or blocking the fluid into the chamber.

On the other hand, as the fluid is exhausted by the vacuum pump, the process byproducts present in the fluid flow into the gate valve, whereby the powder is generated and fixed to the gate valve or the inner surface of the pipe by chemical reaction.

Such powder precipitates at a low temperature and is fixed to the gate valve or the sealing portion or the inside of the pipe to shorten the life of the gate valve. In order to prevent the powder from sticking, a heater Thereby increasing the temperature inside the gate valve, thereby preventing precipitation of the powder.

The gate valve having the function of removing the powder by using the heater has been variously manufactured. One example of such a gate valve is the " heating type angle valve " (Korean Patent Registration No. 10-1423692) .

The " heating type angle valve " of Patent Document 1 has a first connecting passage communicating with a hollow portion formed therein and a second connecting passage communicating with the hollow portion and formed in a direction perpendicular to the first connecting passage An opening / closing part installed to slide on the hollow part of the body part to open / close the communication between the first connection passage and the second connection passage, a driving part coupled to the body part to slide the opening / closing part, And a heating part installed on an outer wall of the hollow part to heat the hollow part to maintain a constant temperature, wherein the body part has a buried groove formed in an outer wall of the hollow part so that the heating part is embedded, The fitting protrusions corresponding to the buried grooves are formed in the same shape as that of the buried grooves so as to fix the heating portion The heating unit may include a heater embedded in an outer wall of the body portion and a heater connected to the heater body to contact the heater to maintain the temperature of the heater at 150 to 200 DEG C. [ A temperature measuring device for measuring the temperature and a measuring device holder for fixing the heater and the temperature measuring device installed on the body part, the temperature of the hollow part is heated and kept constant to maintain the communication between the first connecting channel and the second connecting channel. It is possible to reduce the occurrence of particles adhering to the hollow portion at the time of attachment.

However, in the "heating type angle valve" of Patent Document 1, the particles fixed to the hollow portion by using the heating portion are removed by the chemical method through the heat generation, and the particles are removed by the particles according to the conditions of the heating portion temperature, There is a problem that the particles can not be removed uniformly.

In addition, there is a problem that a high temperature phenomenon occurs on the inside and the surface of the body portion, the hollow portion, the opening and closing portions due to the heat of the heating portion, and mechanical defects due to high temperature may occur.

Patent Document 1: Korean Patent Publication No. 10-1423692

SUMMARY OF THE INVENTION The present invention has been accomplished in order to solve the above problems, and it is an object of the present invention to provide a motorcycle having a first seat portion formed inside the body portion, a main gear portion connected to the driving portion in the second seat portion, and a scraper bar formed in at least one longitudinal direction The scraper bar is rotated in a state where the scraper bar is in contact with the inner side surface of the inlet portion of the gate valve and the piping coupled to the upper and lower portions of the main body portion, Which is capable of increasing the removal rate of the powder and reducing the occurrence of mechanical deformation due to the high temperature, thereby increasing the stable driving of the gate valve.

In order to solve the above-described problems, the powder fixation prevention valve according to the present invention includes a first seating part 110 and a second seating part 120 connected to each other, and the second seating part 120 A main gear portion 100 rotatably seated on the first seating portion 110 and having an insertion hole 210 formed at the center thereof, And a gas transfer hole 310 is formed in the center of the gas transfer hole 310. The gas transfer hole 310 is formed in the center of the gas transfer hole 310, A driving unit 300 including at least one scraper bar 320 formed on the inner surface of the main body 100 in a longitudinal direction of the main body 100, And a driving unit 500 coupled to the main gear unit 200 through the first connection hole 410. The cover unit 400 includes a plurality of holes 420, And the gate valve 10 is coupled to the second connection hole 420. When the gate valve 10 is coupled to the second connection hole 420, 320 are rotated to scrape the powder adhered to the inner surface of the pipe 20 and the inflow portion 11.

One side of the scraper bar 320 is in close contact with the inner surface of the pipe 20 and the inlet 11.

One side of the scraper bar 320 is spaced apart from the inner side of the pipe 20 and the inlet 11 and one side of the scraper bar 320 is connected to the scraper bar 320 The scraping projections 321 are formed so as to scrape the powder adhered to the inner surface of the pipe 20 and the inlet 11 in the process of rotating the scraper 320.

The gate valve 10 and the driving unit 500 are interchangeably connected through an electric signal so that when the inlet 11 is closed the driving of the driving unit 500 is stopped, Is not rotated.

In addition, the scraper bar 320 is formed of a thermal conductor.

As described above, according to the present invention, the first and second seating portions formed on the inner side of the main body portion are each provided with the main gear portion connected to the driving portion and the driver portion having the scraper bar formed in at least one longitudinal direction, The scraper bar is rotated in a state in which the scraper bar is in contact with the inner side of the inflow part of the piping and the gate valve connected to the upper and lower parts of the main body part and the powder adhered to the inner side of the piping and the inflow part is scratched mechanically So as to increase the removal rate of the powder and reduce the occurrence of mechanical deformation due to the high temperature, thereby increasing the stable driving of the gate valve.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an entire structure of a powder fixing prevention valve according to a preferred embodiment of the present invention; FIG.
FIG. 2 is a perspective view showing a state in which a powder fixing prevention valve and a gate valve are combined according to a preferred embodiment of the present invention. FIG.
FIG. 3 is a partial perspective view showing a state in which a main gear portion and a driving gear portion are seated on a main body portion of a structure of a powder fixing prevention valve according to a preferred embodiment of the present invention. FIG.
FIG. 4 is an exploded perspective view showing a disassembled state of a powder fixation prevention valve according to a preferred embodiment of the present invention. FIG.
FIG. 5 is a sectional view showing a cross section of a powder fixing prevention valve according to a preferred embodiment of the present invention. FIG.
FIG. 6 is a sectional view showing a cross section of a powder fixation preventing valve according to another preferred embodiment of the present invention. FIG.

Hereinafter, a powder fixing valve according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that, in the drawings, the same components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as to avoid obscuring the subject matter of the present invention.

1 or 4, the powder fixation prevention valve 1 according to an embodiment of the present invention includes a main body 100, a main gear portion 200, a driver's portion 300, a cover portion 400, and a driving unit 500.

First, the main body 100 will be described. 3 or 4, the main body 100 is a housing in which a main gear unit 200 and a drive gear unit 300 to be described later are seated, and the main gear unit 200 is seated inside thereof The first and second seating portions 110 and 120 are respectively depressed and the main gear portion 200 and the driving gear portion 300 are connected to the first seating portion The gear teeth formed on the main gear portion 200 and the drive gear portion 300 are engaged with each other so as to be meshed with each other while being seated on the second seat portion 110 and the second seat portion 120, respectively.

A smooth rotation of the shaft 510 of the driving unit 500, which will be described later, is connected to the main gear unit 200, which is seated on the first seating unit 110, at the center of the first seating unit 110, The bearing seating groove 111 into which the second bearing 800 is inserted is preferably recessed.

It is preferable that a plumbing hole 121 is formed at the center of the second seating part 120 so as to communicate with the pipe 20 connected to the lower part of the main body part 100.

Next, the main gear unit 200 will be described. 3 or 4, the main gear unit 200 is rotatably mounted on the first seating unit 110 and receives the driving force of the driving unit 500 to be described later, And an insertion hole 210 through which the shaft 510 is inserted is formed at the center of the main gear portion 200. [

A first bearing 700 is coupled to the shaft 510 in a state where the shaft 510 is inserted into the insertion hole 210 so that the shaft 510 can be smoothly rotated. .

Next, the driver unit 300 will be described. 3 or 4, the driving gear unit 300 is rotatably mounted on the second seat portion 120 and is coupled to the main gear unit 200 by a driving force of the driving unit 500 And is composed of a gas moving hole 310, a scraper bar 320, and a driving gear rotation guide member 300.

As shown in FIG. 5 or 6, when the valve blade 12 of the gate valve 10 is in an opened state (see FIG. 5 or 6), the gas moving hole 310 is formed in the center of the drive unit 300, A gas or a fluid such as a mixed gas or a clear gas introduced from the piping 20 connected to the lower portion of the main body 100 is introduced into the upper portion of the cover portion 400, (11) to the outflow section (13).

The scraper bar 320 is formed on the inner side surface of the gas transfer hole 310 in the shape of at least one bar in the longitudinal direction and rotates together with the rotation of the driving unit 300 to connect the pipe 20 and the inlet 11 to scrape off the powder adhering to the inner surface thereof.

5, the scraper bar 320 is connected to the piping hole 121 and the second connection hole 420 of the cover part 400, which will be described later, One side of the scraper bar 320 is in close contact with the inner surface of the pipe 20 and the inlet 11 so that the pipe 20 and the inlet 11 are in close contact with each other. Thereby enabling to remove the powder adhered to the inner surface of the casing.

6, the scraper bar 320 of the other embodiment has the pipe 20 connected to the plumbing hole 121 and the gate valve 10 connected to the second connection hole 420, One side of the scraper bar 320 is spaced apart from the inner side surfaces of the plumbing hole 121 and the second connection hole 420 in a state where the scraper bar 320 is coupled with the scraper bar 320, The second connection hole 420 and the scraper bar 320 can be prevented by preventing the frictional force between the inner surface of the first connection hole 121 and the second connection hole 420 and the one side surface of the scraper bar 320, It is possible to prevent the deformation or the breakage of the magnetic recording medium.

The scraper bar 320 is formed on one side of the upper and lower sides of the scraper bar 320. The scraper bar 320 is fixed to the inner surface of the pipe 20 and the inflow part 11, A scraping protrusion 321 is preferably formed to scrape off the scraping protrusion 321, respectively.

At this time, the scraping protrusions 321 may be formed in a semicircular shape with a plurality of patterns having a predetermined pattern, or may be formed in various shapes such as a bar shape or the like in which a powder can be scratched.

The scraper bar 320 and the scraping protrusion 321 are formed of a heat conduction material that facilitates heat transfer so that the scraper bar 320 and the scraping protrusion 321 are formed on the pipe 20 and the inlet 11, The scraper bar 320 is not rotated even when the scraper bar 320 is not rotated by using the residual heat generated by the frictional force between the inner surface of the scraper bar 320 and one side of the scraper bar 320 or the scraping protrusion 321, It is possible to remove the fastener secured to the inner surface of the inflow portion 11. [

The driving gear rotation guide member 300 is provided between the driving unit 300 and the second seating unit 120 to enable the driving unit 300 to rotate in a predetermined position.

Meanwhile, a third bearing (900) for guiding the smooth rotation of the drive unit (300) may be provided on the upper part of the drive unit (300).

Next, the cover portion 400 will be described. 1 or 4, the cover unit 400 is a kind of cover that is coupled to the upper portion of the main body 100. The cover unit 400 has a concentric circle with the insertion hole 210, And a second connection hole 420 having a concentric circle with the gas transfer hole 310 are formed in a piercing hole.

Next, the driving unit 500 will be described. 1, 5, and 6, the driving unit 500 is a kind of motor that applies a driving force to rotate the main gear unit 200, and the driving unit 500 is a type of motor, The detailed description is omitted because it corresponds to a level of skill at a widely known level.

A fixing bracket 600 having a through hole 610 through which the shaft 510 passes is provided at an upper portion of the cover unit 400 to fix the driving unit 500 to the cover unit 400 It is possible.

In the present invention, the gate valve 10 and the driving unit 500 are connected to each other so as to be compatible with each other through an electrical signal, so that when the inlet unit 11 is closed, the driving unit 500 is stopped By making the scraper bar 320 not rotate, it becomes possible to increase the operation efficiency and the replacement cycle of the powder fixing prevention valve 10.

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: Powder fastening prevention valve
10: gate valve 11: inlet
12: valve blade 13:
20: Piping
100: main body part 110: first seat part
111: Bearing seat groove
120: second seat part 121: plumber
200: main gear portion 210: insertion hole
300: driver machine part 310: gas moving ball
320: scraper bar 321: scraping projection
330: drive gear rotation guide member
400: cover part 410: first connection hole
420: second connection hole
500: driving part 510: shaft
600: Fixing bracket 610: Through hole
700: first bearing 800: second bearing
900: Third bearing

Claims (5)

A main body 100 having a first seating part 110 and a second seating part 120 connected to each other and recessed therein and a plumbing hole 121 formed at the center of the second seating part 120;
A main gear portion 200 rotatably seated on the first seat portion 110 and having an insertion hole 210 formed at the center thereof;
And the gas transfer hole 310 is rotatably mounted on the second seat portion 120 and connected to the main gear portion 200. The gas transfer hole 310 is formed at the center of the second seat portion 120, A driver unit (300) including a scraper bar (320) formed in the longitudinal direction;
A cover part 400 coupled to the upper part of the body part 100 and having a first connection hole 410 and a second connection hole 420 formed in a perforation;
And a driving unit 500 coupled to the main gear unit 200 through the first connection hole 410,
The scaffold bar 320 is connected to the piping hole 121 and the gate valve 10 is coupled to the second connection hole 420. When the scraper bar 320 is driven, (11) of the gate valve (10) is scraped off by rotating the piping (20) and the powder (20) attached to the inner surface of the inlet (11) of the gate valve (10). The method according to claim 1,
Wherein one side of the scraper bar (320) is in close contact with the inner surface of the pipe (20) and the inlet (11). The method according to claim 1,
One side of the scraper bar 320 is spaced apart from the inner surface of the pipe 20 and the inlet 11,
The scraper bar 320 is provided on one side of the upper and lower sides with scraping protrusions 321 and 322 to scrape powder adhering to the inner surface of the pipe 20 and the inflow part 11 during the rotation of the scraper bar 320. [ Are formed on the outer peripheral surface of the valve body (1). The method according to any one of claims 2 to 5,
The gate valve 10 and the driving unit 500 are interchangeably connected through an electric signal so that the driving unit 500 is stopped when the inlet unit 11 is closed so that the scraper bar 320 rotates (1). ≪ / RTI > The method according to claim 1,
Wherein the scraper bar (320) is formed of a thermal conductor.
KR1020150137431A 2015-09-30 2015-09-30 Powder stuck-prevention valve KR101730080B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150137431A KR101730080B1 (en) 2015-09-30 2015-09-30 Powder stuck-prevention valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150137431A KR101730080B1 (en) 2015-09-30 2015-09-30 Powder stuck-prevention valve

Publications (2)

Publication Number Publication Date
KR20170038284A KR20170038284A (en) 2017-04-07
KR101730080B1 true KR101730080B1 (en) 2017-04-25

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107654684B (en) * 2017-10-26 2019-04-19 江苏顺达机械设备有限公司 A kind of intelligent gate valve easy to clean of the scratching based on Internet of Things
KR102270688B1 (en) * 2020-05-06 2021-06-28 안무아 Vacuum gate valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101423692B1 (en) 2012-09-20 2014-07-25 주식회사 마이크로텍 Heating type angle valve

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