KR101701330B1 - 복합 확장 모드 공진기들 - Google Patents

복합 확장 모드 공진기들 Download PDF

Info

Publication number
KR101701330B1
KR101701330B1 KR1020157012451A KR20157012451A KR101701330B1 KR 101701330 B1 KR101701330 B1 KR 101701330B1 KR 1020157012451 A KR1020157012451 A KR 1020157012451A KR 20157012451 A KR20157012451 A KR 20157012451A KR 101701330 B1 KR101701330 B1 KR 101701330B1
Authority
KR
South Korea
Prior art keywords
piezoelectric
axis
conversion layer
coefficients
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020157012451A
Other languages
English (en)
Korean (ko)
Other versions
KR20150077441A (ko
Inventor
쳉지에 주오
종해 김
창한 호비 윤
상-준 박
필립 제이슨 스테파노
치 순 로
로버트 파울 미쿨카
마리오 프란시스코 벨레즈
라빈드라 브이. 셰노이
매튜 마이클 노와크
Original Assignee
퀄컴 엠이엠에스 테크놀로지스, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 퀄컴 엠이엠에스 테크놀로지스, 인크. filed Critical 퀄컴 엠이엠에스 테크놀로지스, 인크.
Publication of KR20150077441A publication Critical patent/KR20150077441A/ko
Application granted granted Critical
Publication of KR101701330B1 publication Critical patent/KR101701330B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/241—Bulk-mode MEMS resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020157012451A 2012-10-22 2013-08-26 복합 확장 모드 공진기들 Expired - Fee Related KR101701330B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/657,653 2012-10-22
US13/657,653 US9331666B2 (en) 2012-10-22 2012-10-22 Composite dilation mode resonators
PCT/US2013/056614 WO2014065939A1 (en) 2012-10-22 2013-08-26 Composite dilation mode resonators

Publications (2)

Publication Number Publication Date
KR20150077441A KR20150077441A (ko) 2015-07-07
KR101701330B1 true KR101701330B1 (ko) 2017-02-01

Family

ID=49085246

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157012451A Expired - Fee Related KR101701330B1 (ko) 2012-10-22 2013-08-26 복합 확장 모드 공진기들

Country Status (6)

Country Link
US (1) US9331666B2 (enExample)
EP (1) EP2909933A1 (enExample)
JP (1) JP6129978B2 (enExample)
KR (1) KR101701330B1 (enExample)
CN (1) CN104737449B (enExample)
WO (1) WO2014065939A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5762528B2 (ja) 2010-05-17 2015-08-12 ベクトン・ディキンソン・アンド・カンパニーＢｅｃｔｏｎ， Ｄｉｃｋｉｎｓｏｎ Ａｎｄ Ｃｏｍｐａｎｙ 針注入深さ調整付き針組立体
WO2016154397A1 (en) 2015-03-24 2016-09-29 Carnegie Mellon University Two-dimensional mode resonators
CN108028638B (zh) * 2015-09-25 2021-01-05 株式会社村田制作所 水晶片以及水晶振子
ITUB20156009A1 (it) * 2015-11-30 2017-05-30 St Microelectronics Srl Riflettore mems biassiale risonante con attuatori piezoelettrici e sistema mems proiettivo includente il medesimo
US10618079B2 (en) * 2016-02-29 2020-04-14 Qualcomm Incorporated Piezoelectric micromechanical ultrasonic transducers and transducer arrays
US10903818B2 (en) * 2016-04-01 2021-01-26 Intel Corporation Piezoelectric package-integrated film bulk acoustic resonator devices
JP6545772B2 (ja) * 2017-01-03 2019-07-17 ウィン セミコンダクターズ コーポレーション 質量調整構造付きバルク音響波共振装置の製造方法
JP2018182615A (ja) * 2017-04-18 2018-11-15 株式会社村田製作所 弾性波装置
EP3547552B1 (en) * 2018-03-28 2024-03-20 Capital One Services, LLC Systems and methods for providing vibration transduction and radio-frequency communication in proximity to an electrically conductive structure
JP7315424B2 (ja) * 2018-09-28 2023-07-26 日東電工株式会社 圧電デバイス、及び圧電デバイスの製造方法
CN109889177B (zh) * 2018-12-26 2023-04-07 天津大学 具有掺杂隔离结构的体声波谐振器
CN109889173B (zh) * 2018-12-26 2022-07-12 天津大学 柔性基底薄膜体声波滤波器的连接结构
CN114830017A (zh) 2019-09-25 2022-07-29 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件
US11439361B2 (en) * 2020-01-29 2022-09-13 GE Precision Healthcare LLC Methods and systems for medical imaging vibration reduction
CN115989637A (zh) * 2020-09-03 2023-04-18 株式会社村田制作所 弹性波装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070267942A1 (en) 2006-05-19 2007-11-22 Hisanori Matsumoto Piezoelectric film resonator, radio-frequency filter using them, and radio-frequency module using them

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3514222B2 (ja) * 1999-11-17 2004-03-31 株式会社村田製作所 圧電共振子、電子部品及び電子機器
US6441539B1 (en) * 1999-11-11 2002-08-27 Murata Manufacturing Co., Ltd. Piezoelectric resonator
US6385429B1 (en) 2000-11-21 2002-05-07 Xerox Corporation Resonator having a piezoceramic/polymer composite transducer
US20040027030A1 (en) * 2002-08-08 2004-02-12 Li-Peng Wang Manufacturing film bulk acoustic resonator filters
EP1489740A3 (en) * 2003-06-18 2006-06-28 Matsushita Electric Industrial Co., Ltd. Electronic component and method for manufacturing the same
JP2005277454A (ja) * 2004-03-22 2005-10-06 Tdk Corp 圧電共振器およびそれを備えた電子部品
WO2007000929A1 (ja) 2005-06-29 2007-01-04 Matsushita Electric Industrial Co., Ltd. 圧電共振器、圧電フィルタ、それを用いた共用器及び通信機器
US7868522B2 (en) * 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US8008993B2 (en) * 2005-09-30 2011-08-30 Nxp B.V. Thin-film bulk-acoustic wave (BAW) resonators
WO2009011022A1 (ja) * 2007-07-13 2009-01-22 Fujitsu Limited 圧電薄膜共振素子及びこれを用いた回路部品
US7786826B2 (en) * 2007-10-12 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus with acoustically coupled BAW resonators and a method for matching impedances
WO2010013197A2 (en) 2008-08-01 2010-02-04 Ecole polytechnique fédérale de Lausanne (EPFL) Piezoelectric resonator operating in thickness shear mode
US8513863B2 (en) * 2009-06-11 2013-08-20 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with two layers
US20110001394A1 (en) 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
US8673121B2 (en) 2010-01-22 2014-03-18 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric materials with opposite C-axis orientations
US8659611B2 (en) * 2010-03-17 2014-02-25 Qualcomm Mems Technologies, Inc. System and method for frame buffer storage and retrieval in alternating orientations
FI124453B (fi) 2010-08-13 2014-09-15 Valtion Teknillinen Mikromekaaninen resonaattorijärjestelmä ja menetelmä sen valmistamiseksi
US9406865B2 (en) 2011-08-19 2016-08-02 Qualcomm Incorporated Composite piezoelectric laterally vibrating resonator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070267942A1 (en) 2006-05-19 2007-11-22 Hisanori Matsumoto Piezoelectric film resonator, radio-frequency filter using them, and radio-frequency module using them

Also Published As

Publication number Publication date
JP6129978B2 (ja) 2017-05-17
KR20150077441A (ko) 2015-07-07
WO2014065939A1 (en) 2014-05-01
US9331666B2 (en) 2016-05-03
EP2909933A1 (en) 2015-08-26
JP2015537439A (ja) 2015-12-24
US20140111064A1 (en) 2014-04-24
CN104737449B (zh) 2017-12-08
CN104737449A (zh) 2015-06-24

Similar Documents

Publication Publication Date Title
KR101701330B1 (ko) 복합 확장 모드 공진기들
US9270254B2 (en) Cross-sectional dilation mode resonators and resonator-based ladder filters
US8816567B2 (en) Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
US20130235001A1 (en) Piezoelectric resonator with airgap
US9337799B2 (en) Selective tuning of acoustic devices
US20130134838A1 (en) Piezoelectric mems transformer
US20130021304A1 (en) Piezoelectric laterally vibrating resonator structures with acoustically coupled sub-resonators
US20130120081A1 (en) Combined resonators and passive circuit components for filter passband flattening
US20120050236A1 (en) Electromechanical systems piezoelectric contour mode differential resonators and filters
US20120274647A1 (en) Piezoelectric resonators and fabrication processes
US20130135264A1 (en) Multilayer piezoelectric thin film resonator structure
US20130120415A1 (en) Combined resonators and passive circuit components on a shared substrate
US8471643B2 (en) Electromechanical systems oscillator with piezoelectric contour mode resonator for multiple frequency generation
US20120293520A1 (en) Piezoelectric resonators with configurations having no ground connections to enhance electromechanical coupling
US8704428B2 (en) Widening resonator bandwidth using mechanical loading

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
A302 Request for accelerated examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PA0302 Request for accelerated examination

St.27 status event code: A-1-2-D10-D17-exm-PA0302

St.27 status event code: A-1-2-D10-D16-exm-PA0302

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20200125

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20200125