KR101699475B1 - X-ray analysis apparatus having positioning means - Google Patents

Abstract

The present invention relates to an X-ray inspection apparatus equipped with position confirmation means capable of visually confirming a path of an X-ray to thereby precisely set the positional relationship of each member. The X-ray inspection apparatus includes a table on which an object to be inspected is placed, A light generating unit arranged on the X-ray generating unit side for emitting light to the inspected object, and a light generating unit arranged on the detecting unit side for receiving the light reflected from the inspected object Wherein the X-ray generating unit and the detecting unit are moved in the circumferential direction around the table to change the path of the X-ray to be irradiated and incident, and the light generating unit and the detecting unit are configured to visually detect X- The path of the X-ray source part and the detection part can be confirmed in advance And position determining means for determining a position of the X-ray image.

Description

X-RAY ANALYSIS APPARATUS HAVING POSITIONING MEANS WITH POSITION DETERMINATION MEANS [0002]

The present invention relates to an optical inspection apparatus, and more particularly, to an X-ray inspection apparatus provided with position confirmation means capable of visually confirming a path of an X-ray to thereby accurately set the positional relationship of each member.

X-ray diffraction analysis (XRR), incineration X-ray scattering (SAXS) and X-ray diffraction (XRD)

X-ray reflectometry (XRR) and incineration X-ray scattering (SAXS) are mainly used to analyze the thickness, density and surface properties of thin film layers deposited on a substrate.

X-ray diffraction (XRD) is a technique for studying the crystal structure of a sample. The sample is irradiated with a monochromatic X-ray, and the deviation and luminous intensity of the diffraction peak are measured by a detector. The characteristic scattering angle and the luminous intensity of the scattered light depend on the lattice plane of the sample to be studied and the number of atoms occupying the lattice plane. For a given wavelength λ and the interval d of the lattice planes, the X- = 2dsin [theta], n: scattering degree). The XRD spectra that can be tuned by stress, solid solution, or other conditions are deformed by the deformation of the lattice plane, so that the structure of the sample can be grasped.

For reference, the term " scattering " in the context of the present invention is used to describe any and all processes emanating from a sample by irradiating the sample with X-rays. X-ray reflectometry (XRR) SAXS) and X-ray diffraction (XRD) as well as reflection or scattering in conventional X-ray fluorescence assays.

1 is a conceptual diagram briefly showing a configuration of an X-ray analysis apparatus of the prior art.

The sample S is placed on a predetermined sample table and the X-ray generator 11 directs the X-ray converging beam 14 toward the surface of the sample S.

The detector 16 is arranged to sense the scattered X-rays 15 from the sample, and such a configuration is common to the concepts of X-ray diffraction analysis equipment and X-ray reflection analysis equipment.

Such a substance analyzing apparatus using X-ray has a function of changing the angle of incidence and reflection of X-ray, So that various inspection can be performed.

However, since the path of the X-ray irradiated from the X-ray generator and scattered on the table side and incident on the detector can not be visually confirmed, there is a problem in that it is difficult to set the precise positional relationship. This phenomenon is caused by the position of the X- Is further enhanced in an analyzing apparatus in which the number of samples is varied.

Even if the positional relationship between the X-ray generator, the table, and the detector is set in advance, the direction of the X-ray incident on the detector side can be varied in various ways depending on the position and shape of the inspected object placed on the table. There is a problem that is more difficult to set up.

SUMMARY OF THE INVENTION The present invention has been devised to solve the problems described above, and it is an object of the present invention to provide a method and apparatus for detecting an X-ray of an object to be inspected or visually confirming a path of the X- And to provide an X-ray inspection apparatus having a confirmation means.

The present invention relates to an X-ray imaging apparatus including a table on which an object to be inspected is placed, an X-ray generation unit irradiated with X-rays toward the inspected object, a detection unit into which X-rays scattered from the inspected object are incident, The X-ray generating unit and the detecting unit are moved in the circumferential direction around the table to change the path of the X-rays irradiated and incident on the X-ray generating unit and the detecting unit, , And the light generating unit and the sensing unit are provided with position checking means for determining an accurate position of the X-ray generating unit and the detecting unit by visually confirming the path of the X-ray before the irradiation of the X-ray is performed . Therefore, precise inspection is possible in XRD equipment.

The X-ray inspection apparatus equipped with the positioning means according to the present invention may further comprise a first reflecting portion for reflecting or refracting the light emitted from the detecting portion to the inspected object and a second reflecting portion for reflecting or refracting the light reflected from the inspected object to the sensing portion And may further include a second reflecting portion. Therefore, the positioning accuracy is improved by matching the paths of the light and the X-rays.

The first reflector and the second reflector may be made of a material having a high X-ray transmittance.

The first reflecting portion may include a first reflecting portion and a second reflecting portion. The first reflecting portion may include a first reflecting portion and a second reflecting portion. And a second driving unit for disposing or detaching the X-ray beam on the path of the X-ray beam.

The first reflection portion may further include a first hinge portion disposed on one end side of the first reflection member to rotate the first reflection member, wherein the second reflection portion is disposed on one end side of the second reflection member, And a second hinge unit for rotating the member.

The first driving unit and the second driving unit may be horizontally moved by sliding the first reflecting member and the second reflecting member.

According to another aspect of the present invention, there is provided an X-ray imaging apparatus comprising: a moving step of placing an object to be examined on a table and moving an X-ray generating unit and a detecting unit around a position of a table; A position confirming step of receiving light from the detecting unit so as to correspond to the path of the X-ray incident on the detecting unit and determining an accurate position of the X-ray generating unit and the detecting unit with respect to the inspected object, and examining the X- And an inspection step.

Wherein the position determining step reflects the light emitted from the light generating unit by the first reflecting unit disposed on the path of the X-ray, reflects the light reflected by the inspected object by the second reflecting unit disposed on the path of the X- Wherein the first and second reflectors are separated from the path of the X-ray after the positioning step.

The present invention relates to an X-ray imaging apparatus including a table on which an object to be inspected is placed, an X-ray generation unit irradiated with X-rays toward the inspected object, a detection unit into which X-rays scattered from the inspected object are incident, A first reflecting member disposed on the side of the detecting unit and receiving light reflected from the inspected object, a first reflecting member reflecting the light emitted to the light generating unit to the inspected object or the table, and a first reflecting member on the X- And a second reflecting member for reflecting or refracting the light reflected from the inspection object or the table to the sensing unit and the second reflecting member on the X-ray path, And a second reflecting part including a second driving part for rotating the X-ray generating part and the detecting part, The light generating unit and the sensing unit can visually confirm the path of the X-ray before the irradiation of the X-ray is performed, thereby determining the precise position of the X-ray generating unit and the detecting unit Wherein the first driving unit and the second driving unit are provided with position checking means for adjusting the rotation angle of the first reflecting member and the second reflecting member in accordance with the feeding angle of the X-ray generating unit and the detecting unit in the circumferential direction, Lt; / RTI >

The first driving part and the light generating part may be transported along the circumferential direction together with the X-ray generating part, and the second driving part and the sensing part may be transported along the circumferential direction together with the detecting part.

Since the path of the X-ray can be accurately confirmed by the X-ray inspection equipment and the inspection method provided with the positioning means according to the concept of the present invention, the precise position of the X-ray source and the detection unit can be determined and the inspection of the inspected object can be accurately performed It is effective.

In addition, the advantageous effect of the position checking means can be excluded, so that the advantages of the fine inspection in the inspection using the X-ray can be further improved.

1 is a conceptual diagram showing a configuration of a conventional X-ray analysis apparatus;
2 is a conceptual diagram of an X-ray inspection apparatus having a positioning means according to a first embodiment of the present invention;
3 is a conceptual diagram of an X-ray inspection apparatus having a positioning means according to a second embodiment of the present invention.
4 is a view showing a detection unit side of an X-ray inspection equipment provided with a positioning means of a third embodiment of the present invention.
FIG. 5 is a view for explaining an X-ray inspection apparatus having a positioning means to which the concept of FIG. 4 is applied; FIG.
FIG. 6 is a view for explaining an X-ray inspection apparatus having a position checking means according to a fourth embodiment of the present invention; FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

FIG. 2 is a conceptual diagram of an X-ray inspection apparatus having a positioning means according to a first embodiment of the present invention.

As in the prior art, the X-ray inspection apparatus equipped with the positioning means according to the present invention includes a table 300 on which an object S is placed, an X-ray generator 100 for irradiating X-rays, A detection unit 200 for detecting a line, and positioning means.

An X-ray tube having an electron gun and a target therein is used as the X-ray generator 100. Various types of equipment for emitting X-rays are used. The X-ray generator 100 is preferably a closed type ) May be used. However, the form of the X-ray generating unit 100 is not limited thereto, and various types of apparatuses such as an open type X-ray generating apparatus may be applied. When electrons generated from the electron gun collide with the target, X-rays are output and can be irradiated on the inspected object S placed on the table 300.

The detector 200 includes a detector capable of detecting scattered X-rays. The detector converts the detected X-rays into electrical signals and transmits them to a controller (not shown) Provide the data.

The inspected object S is disposed between the X-ray generating section 100 and the detecting section 200 or more precisely on the upper surface of the table 300 and the X-ray X irradiated from the X- And is incident on the detection unit 200.

The X-ray generating unit 100 and the detecting unit 200 can be moved around the table 300 on which the inspected object S is placed. In order to accurately operate the X-ray generating unit 100 and the detecting unit 200, A structure may be adopted in which a plurality of arms coaxially rotated on the center axis of the table 300 support the X-ray generating unit 100 and the detecting unit 200 to support the X-ray generating unit 100 and the detecting unit 200, respectively.

The angles at which the X-ray X is incident or irradiated can be varied according to a preset value about the position of the table 300 in the X-ray generating unit 100 and the detecting unit 200.

However, when the angle is set around the position of the table 300, there is a problem in that it can not cope with various cases where the X-ray X is scattered depending on the shape, size, and / or properties of the inspected object S . That is, when determining the positions of the X-ray generating unit 100 and the detecting unit 200 with respect to the position of the table 300, there is only a meaning of setting the approximate position. In order to solve this problem, the range to cover the error of the detection unit 200 may be widened or solved through an algorithm. Fundamentally, it is necessary to modify the path of the X-ray X depending on the type of the inspected object S It exists.

Therefore, in the present invention, position confirmation means are provided on the side of the X-ray generator 100 and the detector 200, respectively.

The position determining means includes a light generating unit 410 disposed on the X-ray generating unit 100 side for emitting light L to the inspected object S, a sensing unit 420 for receiving light reflected from the inspected object, .

The light L may be selectively used as light of various wavelengths that can be visually recognized or converted into a visual signal.

In the first embodiment of the present invention, the light generating unit 410 is disposed adjacent to the X-ray generating unit 100 and the light L emitted from the light generating unit 410 is incident on the X- (X).

In this case, when a point at which light is emitted from the light generating unit 410 is referred to as a light source and a point at which the X-ray is irradiated from the X-ray generating unit 100 is defined as an X-ray source, the light source and the X- It is preferable for the determination.

It is preferable that the light source and the X-ray source coincide with each other at least when they are incident on the inspected object S, but it is difficult to match them in the first embodiment because of the physical arrangement. Other embodiments for solving this will be described later.

Similarly, the sensing unit 420 is disposed adjacent to the sensing unit 200 so that the light L incident on the sensing unit 420 is parallel to the direction of the X-ray X incident on the sensing unit 200.

For example, the sensing unit 420 may be a charge-coupled device (CCD) camera. A CCD camera is a type of digital camera, which uses a charge coupled device (CCD) to convert an image into an electrical signal to process it as digital data. In this case, it is possible to further include a display device (not shown) for visually confirming the light reflected by the inspected object S. However, the sensing unit 420 may be a device capable of selectively sensing various lights such as a laser, a visible light, and an infrared light.

Since the light generating unit 410 and the sensing unit 420 emit the light L so as to correspond to the path of the X-ray X and can sense the light reflected or scattered from the inspected object S and the sensing unit 420, In the X-ray inspection equipment having the structure that the angle of the X-ray irradiated or incident on the inspection equipment, particularly the X-ray generating unit 100 and the detecting unit 200, can be varied around the table 300, It is possible to establish an accurate positional relationship. This means that the accuracy of the test can be further improved.

3 is a conceptual diagram of an X-ray inspection apparatus having a positioning means according to a second embodiment of the present invention.

When the light generating unit 410 and the sensing unit 420 are disposed at positions substantially corresponding to the X-ray generating unit 100 and the detecting unit 200, the path of the X- There is a problem that deviation occurs and accuracy is degraded as described above.

In order to solve this problem, in the concept of the second embodiment of the present invention, the position determining means is disposed on the X-ray path of the X-ray generator 100 and the table 300 and the light emitted from the light- A second reflector 510 disposed on the X-ray path between the table 300 and the detector 200 and reflecting light to the detector 420; 520).

The first reflector 510 and the second reflector 520 may be made of a material and a shape capable of reflecting light. The first reflector 510 and the second reflector 520 may be substantially plate- Or the X-ray path connecting the inspected object S and the X-ray X, and may be disposed so as to be inclined between the inspected object S and the detecting unit 200. [

The light generating unit 410 and the sensing unit 420 may be disposed on the X-ray generating unit 100 and the detecting unit 200, respectively. But does not mean that it should be adjacent to the X-ray generating unit 100 and the detecting unit 200.

It is possible to substantially match the path of the X-ray X and the path of the light L according to the structure of the second embodiment of the present invention, and the detection unit 200 and the X- There is an advantage in that the position of the light source can be determined.

The light generating unit 410 and the sensing unit 420 may be arranged to emit or receive light in a direction substantially orthogonal to the path of the X-ray X, It should be noted that the present invention is not limited thereto. That is, in the second embodiment of the present invention, when the path of the light reflected by the inspected object S from the first reflector 510 to the second reflector 520 substantially coincides with the path of the X-ray X, The light emitted from the light generating unit 410 and the light input to the sensing unit 420 may be set according to the angles of the first and second reflectors 510 and 520.

When the light is used as the laser, the area of the light input to the sensing unit 420 may be detected in a relatively small dot form rather than in the area of the X-ray beam. In this case, the meaning that the paths of the light L and the X-ray X substantially coincide can be understood to mean that the central axis of the X-ray beam and the central axis of the light L substantially coincide with each other.

3, when the first reflector 510 and the second reflector 520 are disposed on the path of the X-ray, in order to ensure the accuracy of the inspection, It is preferable that the portion 520 reflects the light L and the transmittance of the X-ray X is high.

In the above example, the first reflector 510 and the second reflector 520 are made of a material that reflects light, but it is also possible to apply a member capable of adjusting the path by refracting light .

However, even though it is made of the above-described material, there may exist x-rays scattered, absorbed or reflected by the first reflector 510 and the second reflector 520 during the inspection process. In this case, exist.

A third embodiment of the present invention for solving the problem will be described below.

FIGS. 4 and 5 are views showing an X-ray inspection apparatus having a positioning means according to a third embodiment of the present invention.

4 is a conceptual diagram specifically showing a second reflecting portion 520 disposed on the side of the detecting portion 200. Since the structure of the first reflecting portion 510 corresponds to this structure, a duplicate description will be omitted.

In order to solve this problem, the second reflector 520 is disposed on the X-ray line X to fix the X-ray X, The movable structure may be disposed or disengaged from the path of the movable member.

As shown in the figure, the second reflector 520 includes a second reflector 521 that reflects light received by the sensing unit 420 from one side, a second reflector 521 that reflects light from the second reflector 521, And a driving unit 523.

The second reflection member 521 may include a second hinge unit 522 at one end and the second drive unit 523 may rotate the second hinge unit 522 to rotate the second reflection member 521 may be disposed between the detection unit 200 and the inspected object S or may be separated from the position.

The second driving unit 523 may be disposed at an optional position so that the path of the light input to the sensing unit 420 or the path of the X-rays incident on the detecting unit 200 may not be obstructed.

The second driving unit 523 may position the second reflecting member 521 on the X-ray path in a state where the position checking means is operated and rotate the second reflecting member 521 in a state where the position checking means is not operated It can be turned on and off.

The first reflecting portion 510 may include a second reflecting member 521, a first hinge portion 512 and a first driving portion 513. The first reflecting portion 510 may include a second reflecting portion 521, The first driving unit 513 may be arranged to place the first reflecting member 511 on the X-ray path and to rotate the first reflecting member 511 in a state where the positioning means is not operated, .

5 shows a state in which the operation of the positioning means is terminated and the X-ray is irradiated on the inspected object S and inspection is performed.

The operation of the X-ray inspection apparatus having the positioning means according to the third embodiment of the present invention will be described with reference to the drawings.

When the inspected object S is placed on the table 300, the position is set such that a predetermined angle of incidence and scattering are determined in a state in which the X-ray generating unit 100 and the detecting unit 200 are directed to the table 300, respectively.

The first driving unit 513 and the second driving unit 523 are operated so that the first reflecting member 511 and the second reflecting member 521 are disposed on the path of the X- The light emitted from the light generating unit 410 is reflected or refracted by the first reflecting member 511 to be reflected by the inspected object S and then reflected or refracted by the second reflecting member 521 to be reflected by the sensing unit 420 .

The user can reset the position of the X-ray generating unit 100 and / or the detecting unit 200 with respect to the inspected object S through the sensing unit 420.

When the precise position is set by the positioning means as described above, the first driving unit 513 and the second driving unit 523 separate the first reflecting member 511 and the second reflecting member 521 on the path of the X- do.

Thereafter, the X-ray generating unit 100 irradiates the X-ray to the inspected object, and the X-ray scattered from the inspected object is detected by the detecting unit 200 to be inspected accurately.

As described above, the sensing unit 420 may include various devices capable of receiving light emitted from the light generating unit 410, and it should be noted that the sensing unit 420 does not exclude a device that can directly recognize the light through the eyes.

The positions of the first driving part 513 and the second driving part 523 for driving the first reflecting part 510 and the second reflecting part 520 are not necessarily located on the upper side of the path of the X- The first reflection member 511 and the second reflection member 521 may be moved in the X-ray path in such a manner that the first reflection member 511 and the second reflection member 521 are slidably moved.

The first driving unit 513 and the second driving unit 523 may be coupled to the X-ray generating unit 100 and the detecting unit 200 in a direct manner. In the present invention, the X-ray generating unit 100 and the detecting unit 200 can be rotated coaxially with respect to the sample S to detect diffraction at various angles such that the first driving unit 513 and the light generating unit 410 are rotated together with the X- The second driving unit 523, and the sensing unit 420 may be rotated together with the detection unit 200.

The first reflecting member 511 and the second reflecting member 521 formed by the first driving unit 513 and the second driving unit 523 may be disposed at angles relative to the sample of the X-ray generating unit 100 and the detecting unit 200, It is preferable to rotate the linkage with respect to each other. That is, the angle between the first reflecting member 511 and the second reflecting member 521 needs to be adjusted according to the angle between the X-ray generating unit 100 and the detecting unit 200. For example, The first reflecting member 511 also needs to be further rotated in the clockwise direction so that light from the light generating unit 410 can be directed to the sample side when the first reflecting member 511 further rotates clockwise around the sample at a predetermined angle . In this case, the rotation angle of the second reflection member 521 also needs to be adjusted according to the position of the detection unit 200.

It should be noted that this concept has the advantage that the accuracy of determining the position through light in the XRD equipment can be dramatically improved while maximizing the spatial efficiency.

FIG. 6 is a view for explaining an X-ray inspection apparatus having a position checking means according to a fourth embodiment of the present invention.

As described above, in the fourth embodiment of the present invention, the first driving unit 513 and the second driving unit 523 for driving the first reflecting member 511 and the second reflecting member 521, Is opened and closed.

Herein, the description of the operation of the first reflector 510 and the second reflector 520 will not be repeated.

The first driving unit 513 may be installed on the X-ray generating unit 100 side and may preferably be coupled to the housing of the X-ray generating unit 100 in consideration of spatial arrangement efficiency.

Similarly, the second driving unit 523 may be installed on the side of the detecting unit 200 and may be coupled to the housing of the detecting unit 200.

More precisely, the first driving unit 513 is provided between the X-ray generating unit 100 and the sample S to provide a driving force to slide the first reflecting member 511 so as to open and close the path of the X- And the second driving unit 523 can provide a driving force to open and close the linear path between the sample S and the detection unit 200. [

5, when the first reflecting member 511 and the second reflecting member 521 are drawn out in conjunction with the rotation angle of the X-ray generating unit 100 and the detecting unit 200 with respect to the sample, It is preferable that the angles of the first and second driving units 513 and 523 are adjusted by rotating the first and second driving units 513 and 523 with respect to the X-ray generating unit 100 and the detecting unit 200.

6, the first driving unit 513 and the second driving unit 523 are fixed to the X-ray generating unit 100 and the detecting unit 200, respectively, to form a first reflecting member 511 and a second reflecting mirror 511, The rotation angle of the reflection member 521 may be adjusted.

Since the path of the X-ray can be accurately confirmed by the X-ray inspection apparatus having the positioning means according to the concept of the present invention as described above, the precise position of the X-ray generator and the detection unit can be determined and the inspection of the inspected object can be accurately performed .

Further, since the influence of the X-ray inspection by the position checking means can be excluded, the advantage of the precise inspection can be further improved.

In the foregoing, the present invention has been described in detail based on the embodiments and the accompanying drawings. However, the scope of the present invention is not limited by the above embodiments and drawings, and the scope of the present invention will be limited only by the content of the following claims.

100 ... X-ray generating part 200 ... detecting part
300 ... Table 410 ... Light generating part
420 ... sensing unit 510 ... first reflector
511: first reflecting member 512: first hinge portion
513 ... first driving portion 520 ... second reflecting portion
521 ... second reflecting member 522 ... second hinge portion
523 ... second driving portion

Claims (2)

A table on which the inspected object is seated;
An X-ray source portion irradiated with an X-ray toward an inspected object;
A detector for receiving an X-ray scattered from the inspected object;
A light generating unit disposed on the X-ray generation unit side and emitting light to the inspected object side;
A sensing unit disposed on the side of the sensing unit and receiving light reflected from the inspected object;
A first reflection member arranged on an X-ray path between the X-ray generating unit and the inspected object so as to be inclined with respect to the path of the X-ray beam, a first hinge unit arranged on one end side of the first reflection member to rotate the first reflection member, A first reflecting part having a first driving part for arranging or removing the member on the path of the X-rays and reflecting or refracting the light emitted from the light generating part to the inspected object; And
A second reflection member arranged on an X-ray path between the inspected object and the detection unit so as to be inclined; a second hinge unit disposed on one end side of the second reflection member to rotate the second reflection member; And a second reflecting part for reflecting or refracting the light reflected from the inspected object to the sensing part,
The X-ray generating unit and the detecting unit are moved in the circumferential direction around the table to change the path of the X-rays irradiated and incident,
When the path of the X-ray is visually confirmed before the X-ray is irradiated through the light generating unit and the sensing unit, the precise position of the inspected object, the X-ray generating unit or the detecting unit is reset by the positioning unit, And the driving unit separates the first reflecting member and the second reflecting member on the path of the X-ray.
The method according to claim 1,
The first driving unit and the light generating unit are moved along the circumferential direction together with the X-
And the second driving unit and the sensing unit are provided along with the detection unit along the circumferential direction.

Images