KR101695389B1 - The imprinting apparatus - Google Patents

The imprinting apparatus Download PDF

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Publication number
KR101695389B1
KR101695389B1 KR1020150131998A KR20150131998A KR101695389B1 KR 101695389 B1 KR101695389 B1 KR 101695389B1 KR 1020150131998 A KR1020150131998 A KR 1020150131998A KR 20150131998 A KR20150131998 A KR 20150131998A KR 101695389 B1 KR101695389 B1 KR 101695389B1
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South Korea
Prior art keywords
roll
main
film material
main roll
pressing
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KR1020150131998A
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Korean (ko)
Inventor
박근노
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(주) 나인테크
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Publication of KR101695389B1 publication Critical patent/KR101695389B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/67225—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/951—Supplying the plurality of semiconductor or solid-state bodies
    • H01L2224/95115—Supplying the plurality of semiconductor or solid-state bodies using a roll-to-roll transfer technique

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

The present invention is characterized in that two press rolls are provided to press the main roll and a temporary curing unit for irradiating ultraviolet rays in the form of a line beam between two press rolls is provided to automate the imprinting process for film materials of various sizes or thicknesses The present invention relates to an imprinting apparatus capable of advancing to an imprinting apparatus capable of proceeding to an imprinting apparatus. A film supply roll installed at one side of the main roll and supplying a film material to be patterned; A film recovery roll provided on the other side of the main roll for winding a patterned film material; A first pressing roll installed at a side of the main roll and below the main roll to press the lower surface of the film material supplied from the film supply roll toward the main roll; A second press roll installed below the main roll and spaced apart from the first press roll by a predetermined distance to press the lower surface of the film material toward the main roll; A resin spraying unit disposed above the main roll and spraying an ultraviolet curable resin onto the outer circumferential surface of the main roll; A tapering unit installed between the first pressing roll and the second pressing roll and irradiating ultraviolet rays toward the film material direction to tentatively cure the ultraviolet curable resin between the film material and the main roll; And a main hardening unit provided between the main roll and the film recovery roll, for irradiating a pattern formed on the upper surface of the film material with ultraviolet light to completely harden the pattern.

Figure R1020150131998

Description

IMPRINTING APPARATUS [0001]

The present invention relates to an imprinting apparatus, and more particularly, to an imprinting apparatus having two pressing rolls for pressing a main roll, and a temporary hardening section for irradiating ultraviolet rays in the form of a line beam between two pressing rolls, To an imprinting apparatus capable of advancing the imprinting process to an automated process.

BACKGROUND ART [0002] In a precision manufacturing field such as a semiconductor or a display manufacturing field, a method using a photolithography process is widely used as a method of forming a fine pattern on a film or a substrate. However, this photolithography process requires not only very expensive equipment, but also requires a long process time.

Accordingly, an imprinting process has been introduced and used instead of such a photolithography process. The imprinting process is a method of forming a specific pattern by pressing a main roll on a substrate or a film by using an ultraviolet curable resin or the like in a state where an opposite shape of a pattern to be formed on a substrate or a film is formed on the main roll.

Such an imprinting method is suitable for a method of manufacturing a film material in a roll to roll form, and the use range thereof is enlarged, and the processing time can be greatly reduced.

As to the imprinting apparatus, as described in Korean Patent No. 10-755235, most of the techniques for forming a pattern on a substrate-like material are made, and a film material is manufactured in a roll-to-roll form Technology development is lacking.

Particularly, in the process of forming a pattern by using an ultraviolet ray-curable resin in a film material, techniques for efficiently performing temporary curing and a technique for effectively separating a temporary film from a main roll have been relatively underdeveloped.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a film forming apparatus, which comprises two pressing rolls for pressing a main roll and includes a tilting unit for irradiating ultraviolet rays in the form of a line beam between two pressing rolls, And to provide an imprinting apparatus capable of advancing the imprinting process to an automated process.

According to an aspect of the present invention, there is provided an imprinting apparatus comprising: a main roll having a stamper having a predetermined pattern attached to an outer surface thereof; A film supply roll installed at one side of the main roll and supplying a film material to be patterned; A film recovery roll provided on the other side of the main roll for winding a patterned film material; A first pressing roll installed at a side of the main roll and below the main roll to press the lower surface of the film material supplied from the film supply roll toward the main roll; A first pressure sensing part installed in the first pressing roll and sensing a pressure applied to the first pressing roll; A first pressing roll driving means installed in the first pressing roll, for moving the first pressing roll back and forth in the main roll direction; A second press roll installed below the main roll and spaced apart from the first press roll by a predetermined distance to press the lower surface of the film material toward the main roll; A second pressure sensor installed in the second pressure roll to sense a pressure applied to the second pressure roll; Second press roll driving means installed in the second press roll, for moving the second press roll back and forth in the main roll direction; A resin spraying unit disposed above the main roll and spraying an ultraviolet curable resin onto the outer circumferential surface of the main roll; A tapering unit installed between the first pressing roll and the second pressing roll and irradiating ultraviolet rays toward the film material direction to tentatively cure the ultraviolet curable resin between the film material and the main roll; A main hardening unit provided between the main roll and the film recovery roll, for irradiating a pattern formed on the upper surface of the film material with ultraviolet light to completely harden the pattern; A separation angle increasing roll installed at a position higher than the second pressure roll and enlarging a separation angle formed when the film material is separated from the main roll; A third pressure sensing unit installed in a direction opposite to the main roll of the separating angle increasing roll and sensing a pressure applied to the separating angle increasing roll; Enlarged roll driving means provided in the separating angle enlarging roll for causing the separating angle increasing roll to move back and forth in the main roll direction; Wherein the first and second pressure rollers are driven by the first and second pressure rollers when the pressure range of the first, And controls the pressure value to return to an allowable range.

In addition, in the present invention, it is preferable that the hardening section is formed of an LED for irradiating ultraviolet rays in the form of a line beam.

In the present invention, it is preferable that a resin overflow preventing part provided on both sides of the main roll and the first pressing roll, for preventing the resin supplied between the main roll and the first pressing roll from overflowing to the outside .

Further, in the present invention, the resin overflow prevention portion may include: a blocking body for blocking a space between the main roll and the first pressing roll at both sides; And a gas ejecting part formed in the cut-off body and ejecting gas at a high pressure in a fine gap formed in the main roll and the first pressing roll.

The imprinting apparatus according to this embodiment fine-tunes the appropriate intervals of the first and second press rolls and the separation angle enlarging rolls and the appropriate tension applied to the film material to real-time pressure values sensed by the first, second and third pressure sensing units So that a highly precise pattern forming operation and a control function for the pattern forming operation can be performed.

In addition, the pattern forming operation can be performed at a high speed in a state where precise control is performed, thereby improving the productivity.

1 is a view showing a structure of an imprinting apparatus according to an embodiment of the present invention.
FIG. 2 is a view showing a separation state of a film material by a separation angle enlarging roll according to an embodiment of the present invention.
3 is a view showing a process of manufacturing a main roll according to an embodiment of the present invention.

Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1, the imprinting apparatus 100 according to the present embodiment includes a main roll 110, a film supply roll 120, a film recovery roll 130, a first press roll 140, The first pressure sensing part 210, the second pressure sensing part 220, the third pressure sensing part (not shown), the second pressure sensing part 220, 230, a first pressing roll driving means 240, a second pressing roll driving means 250, an enlarged roll driving means 260, and a control portion (not shown).

The main roll 110 is a component in which a stamper 114 having a specific pattern opposite to a pattern to be formed on the film material 1 is attached to the outer surface of the roll 112. The main roll 110 rotates and sequentially transfers the entire pattern formed on the stamper 114 to the surface of the film material 1 in sequence.

As shown in FIG. 3, the stamper 114 is attached to the main roll 110 in such a manner that a stamper 114, which has been manufactured in advance, is wound on the outer surface of the main roll 112. If the stamper 114 is continuously used for a predetermined number of times and a part of the pattern shape collapses to prevent accurate pattern formation, the stamper 114 is removed and a new stamper is installed again. Accordingly, the stamper 114 can be replaced and a large number of processes can be repeatedly performed.

1, the film supply roll 120 is installed on one side of the main roll 110 and supplies a film material 1 to be patterned. That is, a film material 1 to be imprinted is wound around the film supply roll 120, and the film material is continuously wound in the direction of the main roll 110 by the rotation of the film supply roll 120 1) is supplied.

1, the film recovery roll 130 is installed on the other side of the main roll 110, that is, on the opposite side of the position where the film supply roll 120 is installed, (1). That is, a specific pattern is formed on the surface of the film recovery roll 130 while passing through the main roll 110, and is cured, and the finished film material 1 is recovered and wound.

At this time, the speed at which the film recovery roll 130 is wound is interlocked with the supply speed of the film supply roll 120 and the film material discharge speed at the main roll 110 so that the film material 1 has a constant tension ).

1, the first pressing roll 140 is installed on the lower side of the main roll 110, and the lower surface of the film material 1 supplied from the film supplying roll 120 In the direction of the main roll (110).

In order to form a specific pattern on the film material 1, the film material 1 must be in perfect contact with the surface of the stamper 114 attached to the main roll 112. Then, the ultraviolet curable resin 2 supplied between the film material 1 and the main roll 110 is transferred to the film material 1 while being cured. Accordingly, the first pressing roll 140 is installed so as to be uniformly pressed against the front surface of the film material 1 in the direction of the main roll 110.

In the present embodiment, the first pressing roll 140 may be installed on the lower left side of the main roll 110, as shown in FIG.

The first pressure roll 140 may further include a first pressure sensing unit 210. The distance between the first pressing roll 140 and the main roll 110 should be controlled very finely for accurate processing. However, it is very difficult to measure the interval between the first pressing roll 140 and the main roll 110 in real time while the film material 1 is moving. Therefore, in this embodiment, the pressure applied to the first pressing roll 140 is measured in real time, and the interval between the first pressing roll 140 and the main roll 110 is measured and controlled . Accordingly, the first pressure sensing unit 210 senses the pressure applied to the first pressure roll 140 in real time and transmits the data to a control unit described later.

1, the first pressing roll 140 is installed in a direction opposite to the main roll 110, and the first pressing roll 140 is disposed on the main roll 110, And the first pressing roll driving means 240 adjusts the distance between the first pressing roll 140 and the main roll 110 by moving the first pressing roll 140 forward and backward. Specifically, the first pressing roll driving means 240 may have a very wide variety of configurations, and may be constituted by a servo motor or the like capable of moving the first pressing roll 240 back and forth with a very high speed of reaction very accurately have.

1, the second press roll 150 is installed at a predetermined distance from the first press roll 140 below the right side of the main roll 110, And presses the lower surface of the material (1) toward the main roll (110). That is, the second pressing roll 150 presses the film material 1 toward the main roll 110 in order to form a smooth pattern like the first pressing roll 110. When the film material 1 is pressed in the direction of the main roll 110 in a certain section by the first and second pressing rolls 140 and 150, pattern formation is more reliably performed.

Also, as shown in FIG. 1, the temporary hardening unit 170 is installed in the space between the first and second pressing rolls 140 and 150, thereby facilitating the hardened work.

The second pressure roll 150 may further include a second pressure adjusting unit 220 and a second pressure roll driving unit 250 in the same manner as the first pressure roll 140, Since the substantial structure and action of the second pressing roll driving means 250 and the second pressing roll driving means 250 are the same as those of the first pressure sensing portion 220 and the first pressing roll driving means 250, do.

1, the resin injecting unit 160 is disposed above the main roll 110 and injects ultraviolet curable resin onto the outer circumferential surface of the main roll 110. As shown in FIG. In this embodiment, the resin spraying unit 160 may have various dispenser structures, and an ultraviolet curable resin 2 having a certain viscosity may be sprayed onto the outer surface of the main roll 110 to form the ultraviolet curable resin (2) is continuously supplied to the space between the film material (1) and the stamper (114) by riding on the main roll (110).

In order to prevent the resin supplied between the main roll 110 and the first pressing roll 140 from overflowing to the outside, the imprinting apparatus 100 according to the present embodiment, as shown in FIG. 1, It is preferable that the resin overflow prevention portion 161 is further provided.

The resin overflow prevention part 161 specifically includes a blocking body 163 for blocking a space between the main roll 110 and the first pressing roll 140 from both sides and a blocking body 163 formed in the blocking body, And a gas spraying unit 164 for injecting gas at a high pressure into a fine gap formed in the first pressing roll 110 and the first pressing roll 140 to prevent a fine overflow phenomenon of the resin.

4, the blocking body 163 preferably has a shape corresponding to the shape of the space between the main roll 110 and the first pressing roll 140, and the gas ejecting unit 164 Is formed at the narrow end of the blocking body 163.

The ultraviolet curable resin 2 fills the void space between the film material 1 and the stamper 114 and the pattern 3 is formed on the film material 1 while being hardened by the provisional hardening part 170. [ Respectively.

1, the temporary hardening part 170 is provided between the first pressing roll 140 and the second pressing roll 150 and irradiates ultraviolet rays toward the film material 1 Curing type resin 2 packed in a pattern form between the film material 1 and the main roll 110. The UV- Therefore, the ultraviolet curable resin (2) is primarily cured by the provisional curing section (170) and cured to such an extent that the shape of the ultraviolet curable resin (2) is not deformed. The pattern 3 thus hardened is not deformed in the process of being separated from the main roll 110 but is transferred to the film material 1 while maintaining its shape.

In the present embodiment, it is preferable that the provisional hardening section 170 is formed of an LED that emits ultraviolet rays in the form of a line beam. When the temporary hardening part 170 is made of an LED, the linearity of the irradiated light is enhanced, and ultraviolet rays can be irradiated while ensuring a uniform illuminance on all the surfaces of the film material 1.

1, the main curing unit 180 is installed between the main roll 110 and the film recovery roll 130, and the ultraviolet rays are irradiated onto the pattern formed on the upper surface of the film material 1 It is a component that is completely cured by irradiation. Therefore, the main curing unit 180 is formed on the surface of the film material 1, and the ultraviolet curing unit 180 has a function of supplying ultraviolet rays that completely cure the pattern temporarily cured by the temporary curing unit 170 And an ultraviolet ray irradiating device capable of irradiating the ultraviolet ray.

Meanwhile, as shown in FIG. 1, the imprinting apparatus 100 according to the present embodiment may further include a separation angle enlarging roll 190. 2, at the time when the film material 1 having a predetermined pattern formed thereon is separated from the main roll 110, the 'separation angle' refers to a distance from the surface of the film material 1 Is an angle formed by the tangential direction of the outer circumference of the main roll 110 and the separation angle enlargement roll 190 is a component for controlling the film material 1 such that the separation angle? .

1, the separating angle enlarging roll 190 is installed at a position higher than the second pressing roll 150, so that the film material 1 is very abruptly moved to the film recovery roll 130, Direction. When the separation angle? Of the film material 1 is increased by the separation angle enlarging roll 190 as described above, the edge portion of the pattern 3 formed on the surface of the film material 1 is broken or deformed in the separation process Can be minimized.

1 and 2, the separating angle increasing roll 190 is installed in the opposite direction to the main roll 110, and the pressure applied to the separating angle increasing roll 190 is And a third pressure sensing part 230 for sensing the tension of the film material 1 and measuring the tension of the film material 1 indirectly.

The separating angle enlarging roll 190 presses the film material 1 toward the main roll 110 in order to enlarge the separating angle of the film material 1. However, excessive pressure is applied in this process, and if the tension of the film material 1 increases abnormally, the film material 1 may not be coated properly. Therefore, as shown in FIG. 1, the separation angle enlarging roll 190 is further provided with a third pressure sensing unit 230 for measuring pressure in real time, and the measured data is transmitted to a control unit described later. The separating angle increasing roll 190 may further include driving means 260 for moving the separating angle increasing roll 190 back and forth in the direction of the main roll 110.

Next, the control unit inputs the allowable range of the pressure values sensed by the first, second and third pressure sensing units 210, 220 and 230 in advance, and when a pressure value out of the set range of the pressure value is sensed, The first and second pressure roll driving means 240 and 250 and the enlarged roll driving means 260 are driven to return the pressure value to the allowable range. Specifically, the control unit controls the imprinting apparatus 100 according to the embodiment of the present invention. However, if the allowable range of the pressure values sensed by the first, second, and third pressure sensing units 210, 220, When the pressure value delivered in real time from the first, second and third pressure sensing units 210, 220 and 230 exceeds the allowable range, the first and second pressure roll driving means 240 and 250 And the enlarged roll driving means 260 are controlled so that the pressure applied to the first and second pressing rolls 140 and 150 and the separation angle increasing roll 190 is controlled not to exceed the allowable range.

In this embodiment, the pressure values applied to the first and second pressure rolls 140 and 150 and the separation angle enlarging roll 190 are precisely controlled to indirectly separate the main roll 110 of the film material 1 It is possible to control the contact state and the spacing state with respect to each of the magnifying rolls 190.

In addition, the control unit controls the rotation speed of the film recovery roll 130 according to the pressure applied to the separation angle enlarging roll 190 so as to maintain a uniform coating condition.

1: Film material 2: UV curable resin
100: An imprinting apparatus according to an embodiment of the present invention
110: main roll 120: film feed roll
130: Film recovery roll 140: First press roll
150: second pressure roll 160: resin dispensing part
170: hardened portion 180: hardened portion
190: Separation angle enlargement roll 101:
210: first pressure sensing part 220: second pressure sensing part
230: third pressure sensing unit 240: first pressure roll driving means
250: second pressure roll driving means 250: enlarged roll driving means

Claims (4)

A main roll in which a stamper having a specific pattern formed is attached to the outer surface;
A film supply roll installed at one side of the main roll and supplying a film material to be patterned;
A film recovery roll provided on the other side of the main roll for winding a patterned film material;
A first pressing roll installed at a side of the main roll and below the main roll to press the lower surface of the film material supplied from the film supply roll toward the main roll;
A first pressure sensing part installed in the first pressing roll and sensing a pressure applied to the first pressing roll;
A first pressing roll driving means installed in the first pressing roll, for moving the first pressing roll back and forth in the main roll direction;
A second press roll installed below the main roll at a predetermined distance from the first press roll and pressing the lower surface of the film material toward the main roll;
A second pressure sensor installed in the second pressure roll to sense a pressure applied to the second pressure roll;
Second press roll driving means installed in the second press roll, for moving the second press roll back and forth in the main roll direction;
A resin spraying unit disposed above the main roll and spraying an ultraviolet curable resin onto the outer circumferential surface of the main roll;
A tapering unit installed between the first pressing roll and the second pressing roll and irradiating ultraviolet rays toward the film material direction to tentatively cure the ultraviolet curable resin between the film material and the main roll;
A main hardening unit provided between the main roll and the film recovery roll, for irradiating a pattern formed on the upper surface of the film material with ultraviolet rays to completely harden the pattern;
A separation angle increasing roll installed at a position higher than the second pressure roll and enlarging a separation angle formed when the film material is separated from the main roll;
A third pressure sensing unit installed in a direction opposite to the main roll of the separating angle increasing roll and sensing a pressure applied to the separating angle increasing roll;
Enlarged roll driving means provided in the separating angle enlarging roll for causing the separating angle increasing roll to move back and forth in the main roll direction;
Wherein the first and second pressure rollers are driven by the first and second pressure rollers when the pressure range of the first, So as to return the pressure value within the allowable range;
And a resin overflow preventing portion provided on both sides of the main roll and the first pressing roll and preventing the resin supplied between the main roll and the first pressing roll from flowing out to the outside. The apparatus according to claim 1,
And an LED for irradiating ultraviolet rays in the form of a line beam. delete 2. The image forming apparatus according to claim 1,
A blocking body for blocking a space between the main roll and the first pressing roll at both sides;
And a gas ejecting part formed in the cut-off body and ejecting gas at a high pressure into a fine gap formed in the main roll and the first pressing roll.
KR1020150131998A 2015-09-18 2015-09-18 The imprinting apparatus KR101695389B1 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108459464A (en) * 2018-03-08 2018-08-28 宁波微迅新材料科技有限公司 A kind of UV nano impressions full-automatic assembly line equipment
WO2019027129A1 (en) * 2017-08-01 2019-02-07 주식회사 기가레인 Plasma etching method using imprinted micropattern
KR102036258B1 (en) * 2018-07-30 2019-10-24 (주)프로템 complex substrate fabricating apparatus havina a imprinting roll and impact head
KR20200061270A (en) * 2018-11-23 2020-06-02 주식회사 나노엑스 Imprinting machine and imprinting method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080008219A (en) * 2007-06-18 2008-01-23 (주)나노솔루션 Manufacturing apparatus for film used micro or nano size pattern
KR20100095098A (en) * 2009-02-20 2010-08-30 에이피시스템 주식회사 Imprint apparatus including pressing device capable of controlling by patten area
KR20100120769A (en) * 2009-05-07 2010-11-17 삼성전자주식회사 Roll to roll patterning apparatus and patterning system having the same
KR20140027808A (en) * 2012-08-27 2014-03-07 주식회사 엘지화학 Device and method for manufacturing optical member having micro configuration

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080008219A (en) * 2007-06-18 2008-01-23 (주)나노솔루션 Manufacturing apparatus for film used micro or nano size pattern
KR20100095098A (en) * 2009-02-20 2010-08-30 에이피시스템 주식회사 Imprint apparatus including pressing device capable of controlling by patten area
KR20100120769A (en) * 2009-05-07 2010-11-17 삼성전자주식회사 Roll to roll patterning apparatus and patterning system having the same
KR20140027808A (en) * 2012-08-27 2014-03-07 주식회사 엘지화학 Device and method for manufacturing optical member having micro configuration

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019027129A1 (en) * 2017-08-01 2019-02-07 주식회사 기가레인 Plasma etching method using imprinted micropattern
CN108459464A (en) * 2018-03-08 2018-08-28 宁波微迅新材料科技有限公司 A kind of UV nano impressions full-automatic assembly line equipment
KR102036258B1 (en) * 2018-07-30 2019-10-24 (주)프로템 complex substrate fabricating apparatus havina a imprinting roll and impact head
KR20200061270A (en) * 2018-11-23 2020-06-02 주식회사 나노엑스 Imprinting machine and imprinting method
KR102360807B1 (en) 2018-11-23 2022-02-09 주식회사 나노엑스 Imprinting machine and imprinting method

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